CN103962664B - Wire electric discharge machine and wire electric discharge machining method - Google Patents
Wire electric discharge machine and wire electric discharge machining method Download PDFInfo
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- CN103962664B CN103962664B CN201410025482.6A CN201410025482A CN103962664B CN 103962664 B CN103962664 B CN 103962664B CN 201410025482 A CN201410025482 A CN 201410025482A CN 103962664 B CN103962664 B CN 103962664B
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Abstract
A kind of wire electric discharge machine and wire electric discharge machining method are provided.Even if in the case of many lines have been powered in the lump, it is also possible to prevent from stably occurring the time-dependent of electro-discharge machining to produce deviation in the radical of the line actually discharged at interpolar.The wire electric discharge machine cut workpiece by electro-discharge machining according to the interval of the line being set up in parallel is possessed: multiple home rolls, in the way of moving to same direction, makes line pitch of the laps；Power supply sheet, the many lines to pitch of the laps, supply is for the processing power source of electro-discharge machining in the lump；Workpiece delivery section, sends workpiece to the direction of the line close to pitch of the laps；And power-supply wiring, turn on power supply sheet and workpiece and supply the processing power source for electro-discharge machining, power supply sheet and workpiece delivery section are configured at the inner side of the line that multiple home rolls carry out pitch of the laps, and the power circuit of the processing power source employing power-supply wiring is connected respectively with power supply sheet and workpiece delivery section.
Description
Technical field
The present invention relates to line (wire) electric discharge device and the technology of wire electric discharge machining method.
Background technology
In the past, as the known scroll saw of device (wire saw) for silicon ingot (silicon ingot) being cut into multiple thin slice, but in recent years, there is a use line Discharge Processing Technology and be the technology of thin plate by work piece cut.
Such as, in patent documentation 1, disclose the technology configuring work transfer device in the multiple deflector rolls making line move.
[patent documentation 1] Japanese Unexamined Patent Publication 2010-260151 publication
Summary of the invention
Even if many lines have been powered in multi-thread electro-discharge machining same pulse and the processing power source of same magnitude of voltage in the lump, the electric discharge of interpolar is respectively different for each line, so may not reach steady statue for each line and flow out discharge current simultaneously.
In patent documentation 1, for following problem entirely without open, i.e. if so for each line of interpolar, the rise time of discharge current produces deviation, then the machining energy change after discharge current rises, so the machining shape of each line also becomes uneven.
Even if it is an object of the invention to provide one in the case of many lines have been powered in the lump, it is also possible to machining energy produces the structure of deviation in the radical of the line actually discharged to prevent, at interpolar, the time-dependent of electro-discharge machining stably occurs.
The present invention provides a kind of wire electric discharge machine, according to the interval of the line being set up in parallel, is cut workpiece by electro-discharge machining, and this wire electric discharge machine is characterised by possessing: multiple home rolls, makes described line pitch of the laps, so that moving to same direction；Power supply sheet, the many lines to described pitch of the laps, supply is for the processing power source of described electro-discharge machining in the lump；Workpiece delivery section, sends described workpiece to the direction of the line close to described pitch of the laps；And power-supply wiring, turn on described power supply sheet and described workpiece and supply the processing power source for described electro-discharge machining, described power supply sheet and described workpiece delivery section are configured at the inner side of the line that the plurality of home roll carries out pitch of the laps, and the power circuit of the described processing power source employing described power-supply wiring is connected respectively with described power supply sheet and described workpiece delivery section.
Additionally, it is characterized in that, it is also equipped with processing groove, this processing groove is configured at the outside of the line that the plurality of home roll carries out pitch of the laps, and store working fluid, described workpiece delivery section is configured at the position lower than described power supply sheet, and described workpiece is sent by described workpiece delivery section to the direction of the line close to described pitch of the laps, to be impregnated in described working fluid by the described workpiece kept.
Additionally, it is characterised in that described power-supply wiring has: use and the coaxial wiring portion of descending cable containing up；And the described described up use contained or described descending cable are from the single line portion of the connection powered described in described coaxial wiring portion Zhi Eryu sheet and described workpiece delivery section,
The length that causes compared to 2 line all-moving surfaces that formed in the periphery of the plurality of home roll, that move to different directions interval each other, the length in the single line portion of described branch is shorter.
Additionally, it is characterised in that described power-supply wiring has: use and the coaxial wiring portion of descending cable containing up；And described contain described up with or described descending cable from the single line portion of the connection powered described in described coaxial wiring portion Zhi Eryu sheet and described workpiece delivery section, the length in the single line portion of described branch is roughly equal with the distance that described workpiece is sent by described workpiece delivery section to the direction of the line close to pitch of the laps.
Additionally, it is characterised in that possess: discharge part, make to be supplied to the described processing power source of described line in the lump to described workpiece electrical discharge；And power supply unit, the supply of described power supply sheet is used for the processing power source of described electro-discharge machining, the resistance of the power-supply wiring of described power supply unit to described power supply sheet is less than the resistance of the line of described power supply sheet to described discharge part.
Additionally, it is characterised in that the resistance of the power-supply wiring of described power supply unit to described power supply sheet is less than 0.1 Ω.
Even if by means of the invention it is possible in the case of providing many lines having been powered in the lump, it is also possible to interpolar discharge processing is stable, that prevent machining energy from depending on line radical produces the structure of deviation.
Accompanying drawing explanation
Fig. 1 is the figure of the line electrical discharge machining system observing the present invention from front.
Fig. 2 is the figure of the wire electric discharge machine observing the present invention from front.
Fig. 3 is the figure observing the power supply sheet the present invention from side with the configuration relation of line.
Fig. 4 is the figure of the configuration illustrating electric circuit and various parts in conventional art (single line electrical discharge machining system).
Fig. 5 is the figure of the configuration illustrating electric circuit and various parts in conventional art (multi-thread electrical discharge machining system).
Fig. 6 is the figure in pulse (ON/OFF) cycle illustrating interpolar state (voltage and current) and processing power source in the present invention.
Fig. 7 is the figure of the configuration illustrating the electric circuit in the present invention and various parts.
Fig. 8 is the figure of the configuration illustrating the electric circuit in the present invention and various parts.
Fig. 9 is the figure of the configuration illustrating the electric circuit in the present invention and various parts.
Figure 10 is the figure of the cable distribution observing the situation being configured with power supply sheet and workpiece ideally from front.
Figure 11 is the figure of the cable distribution illustrating the situation being respectively configured the bigger power supply sheet before this of the routing resistance being mainly made up of and workpiece inductance.
Figure 12 is the figure of the cable distribution illustrating the situation being configured with power supply sheet and workpiece by the routing resistance that inductance is constituted in the way of making mainly to be diminished ideally.
Figure 13 is the result of the rise time τ comparing electric discharge between multiple lines in the present invention.
Figure 14 is to compare the radical of the adjoint line in the present invention to increase and the curve chart of the calculated value of the processing electric current of total that changes.
Figure 15 is the figure rising manner point situation of the discharge current in the multi-thread electrical discharge machining system of the present invention illustrated.
Figure 16 is the figure observing the power supply blade unit the present invention from front with the variation of the configuration relation of workpiece delivery section.
Figure 17 is the figure observing the power supply blade unit the present invention from front with the variation of the configuration relation of workpiece delivery section.
Figure 18 is the figure observing the power supply blade unit the present invention from front with the variation of the configuration relation of workpiece delivery section.
[symbol description]
1: many wire electric discharge machines；2: supply unit；3: workpiece delivery section；103: line electrode；104: power supply sheet；105: workpiece (silicon ingot)；505: the impedance produced by the cable of processing power source (minus side) to sheet of powering (power supply section)；520: the impedance produced by the cable of workpiece delivery section (workpiece) to processing power source (positive side)；509: the impedance produced by 1 line of power supply sheet (power supply section) to interpolar (discharge part)；513: the power supply wiring cable being connected with processing power source (minus side)；514: the power supply wiring cable being connected with processing power source (positive side)；515: single wire cable (single line portion)；600: coaxial cable (coaxially wiring portion).
Detailed description of the invention
Explanatory diagram 1.
Fig. 1 is the outside drawing of the many wire electric discharge machines 1 observing embodiments of the present invention from front.It addition, the structure of each mechanism shown in Fig. 1 is an example, certainly there is various structure example according to purpose, purposes.
Fig. 1 is the figure of the structure illustrating the multi-thread electrical discharge machining system (the manufacture system of semiconductor substrate or solar cell substrate) in the present invention.Multi-thread electrical discharge machining system is made up of many wire electric discharge machines 1, supply unit 2, working fluid feedway 50.
Machined object can be cut into thin slice by the interval of the electric discharge many lines to be set up in parallel by multi-thread electrical discharge machining system.
1 is many wire electric discharge machines, in 1, is arranged at line 103 top by the work transfer device 3 of servo motor driven and workpiece 105 can be made in the vertical direction to move.In the present invention, workpiece 105, by (gravity) direction conveying downwards, carries out electro-discharge machining between workpiece 105 and line 103.
2 is supply unit, in 2, the electric discharge servo control circuit of control servo motor, in order to discharge efficiently according to the state of electric discharge, be controlled in the way of striation in discharge (gap) is remained certain gap, and carries out workpiece location and advance electro-discharge machining.
The discharge pulse being used for electro-discharge machining is supplied to line 103 by processing power source circuit (Fig. 7), and carries out being adapted in striation in discharge the control of the states such as the short circuit that occurs, and supplies the striation in discharge signal to electric discharge servo control circuit.
50 is working fluid feedway, 50 by the cooling in electro-discharge machining portion, processing fragment (consider) removal needed for working fluid by pump to workpiece 105 and line 103 liquor charging, and the removal of the processing fragment being processed in liquid, the management of electrical conductivity (1 μ S～250 μ S) exchanged based on ion, the management of liquid temperature (near 20 DEG C).Although mainly using water, but electro-discharge machining oil can also be used.
8,9 is home roll, on home roll, by can desirably thickness processing in the way of, define groove according to the spacing predetermined, quantity, by from line supply bobbin the line controlled by tension force be wound on 2 home rolls with necessary amount, deliver to be wound around bobbin.Linear velocity uses 100m/min to 900m/min degree.
In a same direction and being rotated linkedly with identical speed by 2 home rolls, 1 line 103 sent from line extraction unit carries out pitch of the laps to the periphery of home roll (2), it is possible to make the many lines 103 being set up in parallel move (mobile parts) in the same direction.
Line 103 is the line of 1 connection as shown in Figure 8, it is drawn out of from not shown bobbin and while being embedded into the gathering sill (not shown) of the outer peripheral face of home roll, while this home roll outer helical shape wind repeatedly (maximum 2000 degree) after, be wound on not shown bobbin.
Many wire electric discharge machines 1 are connected via electric wire 513 with power subsystem 2, by the electric power action supplied from power subsystem 2.
Many wire electric discharge machines 1 are as it is shown in figure 1, possess the block 15 of the pedestal function as many wire electric discharge machines 1；It is arranged in the top of block 15, block 20, work transfer device 3, adhesive portion 4, silicon ingot 105, processing groove 6, home roll 8, line 103, home roll 9, power supply unit 10 and power supply sheet (Japanese: son) 104.
Explanatory diagram 2.
Fig. 2 is the enlarged drawing in dotted line 16 frame shown in Fig. 1.
8,9 is home roll, on home roll by line 103 around on repeatedly, according to the groove carved on home roll, line 103 spacing according to the rules is dressed the ranks.
Home roll is to use metal, the structure that outside covers with resin in center.
Part above substantially central portion between 2 home rolls, home roll 8,9 inside, being configured with the power supply sheet 104 being installed on power supply unit, power supply sheet 104 supplies processing power source by making the surface exposed upward touch line in the lump to many lines 103 of movement.
As it is shown on figure 3, power supply sheet 104 is by contacting with 10 lines 103, the discharge pulse (the 504 of Fig. 6) from processing power source is supplied to 10 lines.
The position of configuration power supply sheet 104 is disposed on the position (511L1=511L2) that the length of two ends initial line from silicon ingot 105 is roughly equal.
Power supply sheet 104 requires that resistance to mechanical wear resistance is strong and has electric conductivity, employs superhard alloy.
Between 2 home rolls, the part of home roll 8,9 inside substantially central portion lower section, is configured with the silicon ingot 105 being installed on work transfer device 3, and workpiece 105 is in downward direction sent, thus advanced cutting processing by work transfer device 3.
Processing groove 6, impregnated wire 103 and silicon ingot 105 are set in the bottom of home roll, carry out the cooling in electro-discharge machining portion, the removal of processing fragment.Processing groove 6 is used for storing working fluid, the workpiece that dipping is sent.
As shown in Figure 3, it is shown that the power supply sheet 104 contacted when the radical of online 104 is by 10 is 1, but for each power supply sheet line radical, power supply sheet sum certainly increase according to necessary amount.
Block 20 engages with work transfer device 3.It addition, workpiece delivery section 3 and silicon ingot 105(workpiece) by adhesive portion 4 bonding (joint).
In the present embodiment, as rapidoprint (workpiece), illustrate with silicon ingot 105 for example.
As long as adhesive portion 4 is for bonding (joint) work transfer device 3 and silicon ingot 105(workpiece) parts, then can be any parts, such as, the bonding agent of use electric conductivity.
Workpiece delivery section 3 is to possess the device of mechanism making to be moved in the vertical direction by the silicon ingot 105 of adhesive portion 4 bonding (joint), by workpiece delivery section 3 (gravity direction) movement in downward direction when maintaining workpiece 105, it is possible to make silicon ingot 105 close to the direction of line 103.
Workpiece delivery section 3 is configured at the position lower than power supply sheet 104.
In the way of making kept workpiece 105 be impregnated in working fluid, workpiece 105 is carried by workpiece delivery section 3 to the direction of the line close to pitch of the laps.
Processing groove 6 is the container for storing working fluid, is configured at the outside that multiple home rolls (8,9) carry out the line of pitch of the laps.
Working fluid is the deionized water that such as resistance value is high.By arranging working fluid between online 103 and silicon ingot 105, between online 103 and silicon ingot 105, cause electric discharge, it is possible to cutting silicon ingot 105.
In home roll 8,9, define the multiple row groove for hookup wire 103, and be mounted with line 103 in the cell.Then, by home roll 8,9 to the right or anticlockwise, line 103 moves.
It addition, as in figure 2 it is shown, line 103 is arranged on home roll 8,9, define alignment in the upside of home roll 8,9 and downside.
It addition, line 103 is conductor, contact with line 103 for the power supply sheet 104 of the power supply unit 10 that gives voltage from power subsystem 2 by making, this voltage confession giving is applied to line 103(sheet 104 of powering from sheet 104 of powering line 103 is applied with voltage).
Then, electric discharge is caused between online 103 and silicon ingot 105, it is possible to cutting silicon ingot 105(carries out electro-discharge machining), make laminal silicon (silicon wafer).
Explanatory diagram 3.
Fig. 3 illustrates the enlarged drawing of power supply sheet 104.
Power supply sheet 104(1) with line 103(10 root) contact.
Line 103 interval (spacing of line) each other is 0.3mm degree.
Explanatory diagram 4.
Fig. 4 be shown in as conventional mode for each line independently supply processing electric current independently-powered in the figure of electric circuit 400.
401 is processing power source (Vm).It it is the machining voltage set for the electric current needed for supplying electro-discharge machining.About Vm, it is possible to the arbitrary machining voltage being set as in 60V～150V.
402 is processing power source (Vs).It it is the induced voltage (Japanese :) set to induce electric discharge.And then, also it is used for online and the purpose of the state of supervision voltage across poles (electrode current) between workpiece.About Vs, it is possible to the arbitrary induced voltage being set as in 60V～300V.
403 is transistor (Tr2).By on-off mode switching processing power source Vm ON(turn on) state and OFF(non-conduction) state.
404 is transistor (Tr1).By on-off mode switching processing power source Vs ON(turn on) state and OFF(non-conduction) state.
405 is the resistance (Rm) of processing electric current limiting resistance body.By setting fixing resistance value, limit line current (Iw), the interpolar discharge electric current (Ig) of every 1.About Rm, it is possible to be set as the arbitrary resistance value in 1 Ω～100 Ω.That is, be set to Vm=60V(volt), in the case of Vg=30V, Rm=10 Ω, become Iw(Ig)=(60V-30V)/10 Ω=3A(ampere).
It addition, in above-mentioned calculating formula, the voltage drop of processing power source (Vm) to supply terminals (power supply sheet) is set to 30V, but does not considers that the supply terminals caused by line resistance (Rw) is to the voltage drop of point of discharge.
I.e., in the case of as the independently-powered mode of conventional mode, the value of processing electric current Iw is determined by the resistance Rm of processing electric current limiting resistance body, so in order to obtain desired line current, discharge current (Ig) for every 1, being set as that line resistance Rw becomes Rm > relation of Rw.
406 is faradic current limiting resistance (Rs).The faradic current inducing electric discharge is limited by setting fixing resistance value.About Rs, it is possible to be set as the arbitrary resistance value in 1 Ω～100 Ω.
407 is voltage across poles (Vg).It is the interpolar discharge voltage in discharge process, (interpolar) between line 103 and workpiece 105 applied.
408 is electrode current (Ig).It it is the interpolar discharge electric current flow through between online 103 and workpiece 105 in discharge process.
410 is the processing electric current (Iw) independently supplied for every 1 line.
Explanatory diagram 5.
Fig. 5 be as conventional mode independently supply for each line processing electric current independently-powered in electric circuit 400 figure that many lines are powered.
409 is the line resistance (Rw) of the resistance representing every 1 line.
204 is independent power supply sheet.Near the two ends being arranged at silicon ingot 105, the independently-powered pulse applying machining voltage at two, carries out electro-discharge machining.
And be connected with the power circuit 400 of the radical equal number of the line 103 wound.
Fig. 6 illustrates the interpolar discharge voltage (Vgn) of the present invention and the ON/OFF action (sequential chart) of the change of interpolar discharge electric current (Ign) and Tr1, Tr2.The transverse axis of curve chart is the time.
First, make transistor Tr1503 become ON, apply induced voltage.Now, between line 103 and workpiece 105, (interpolar) is insulated, so flowing through interpolar discharge electric current hardly.Afterwards, start electric discharge if beginning to flow through interpolar discharge electric current, then Vgn produces voltage drop, thus detects when electric discharge starts and makes Tr2 become ON, obtains big interpolar discharge electric current.OFF is become making Tr2 after the stipulated time.The most a series of action after the OFF making Tr2 have passed through the stipulated time.
Explanatory diagram 7.
Fig. 7 is the figure illustrating the electric circuit 2 in the power supply in the lump that many lines (10) supply processing electric current in the lump in the present invention with the relation of wire electric discharge machine 1.Illustrate and flow through processing electric current, line current and the state of interpolar discharge electric current.
Fig. 7 illustrates and the equivalent circuit of the electric circuit 2 shown in Fig. 8.
If it is assumed that the electric circuit 400 of the conventional mode shown in Fig. 4 is importing directly into multiple lines (10) are supplied together processing electric current in the lump power supply in electric circuit in, then in order to control processing electric current between processing power source to supply terminals, replace current limitation resistor body Rm405, the current limitation resistor body of the resistance value that Rm is obtained divided by 10 (windings home roll 8,9 around the number of turns) be arranged at processing power source between supply terminals to supply the processing electric current of the total (10 times) to the line current that multiple lines (10) supply.
First, illustrate the Rm/10 root with the most fixing resistance value is arranged at processing power source to situation about powering between sheet.
In the case of uniformly and causing discharge condition at all 10 between line and workpiece simultaneously, discharge current disperses in 10 lines equably, so the discharge current corresponding with fixing resistance value (Rm/10 root) is fed between each line and workpiece, so the supply of the discharge current of surplus does not become problem.
But, in the case of the most uniformly and causing discharge condition at all 10 between line and workpiece simultaneously, the line current corresponding with fixing resistance value (Rm/10 root) by concentrated supply to becoming between the line of discharge condition and workpiece, so the supply of the line current of surplus becomes problem.That is, in 10 only 1 become discharge condition in the case of, the line current of originally should be supplied to 1 line and workpiece 10 times of line current is fed into line and the workpiece becoming discharge condition, causes line to break.
505 is the impedance (resistance) of wiring 513.It it is the up cable being connected with processing power source (Vmn) minus side.From processing power source portion (Vmn), power supply sheet 104 is supplied processing power source.
520 is the impedance (resistance) of wiring 514.It it is the descending cable being connected with processing power source (Vmn) just side.
Resistance value Rmn505 about the wiring 513 of the present invention, not as the processing electric current limiting resistance body of conventional mode, resistance value is fixed as the value of regulation, even if but possess in 10 only 1 become discharge condition in the case of, it is also possible to become the mechanism that the radical of discharge condition makes resistance value change according to control.
And then, changed in the range of the resistance value less than line resistance Rwn509 by resistance value Rmn505 making the present invention, when limiting processing electric current, Rwn509 is top dog, and the impact of resistance value Rmn505 can substantially be ignored.
I.e., it is also possible to not possessing the processing electric current limiting resistance body of the lower limit limiting processing electric current, wherein, this processing electric current is to become to flow through and at the interpolar electric current to the interpolar discharge electric current that workpiece 105 discharges between power supply sheet 104 in processing power source portion 501.
That is, it is set to the resistance value less than the resistance value merely obtained by Rmn divided by 10 (windings home roll 8,9 around the number of turns).
That is, by utilizing the impedance of the resistance Rwn509 as each line, line current Iwn of each line is stably supplied, so the concentration of line current will not be caused.
509 is the resistance (Rwn) produced by line of every 1 line.
Herein, the line resistance value of power supply sheet 104 to discharge part refers to, resistance value based on the line (1) contacting with power supply sheet 104 and moving, from the length of power supply sheet 104 to discharge part.
Such as, each line resistance of situation about will power 10 lines (being wound 10 weeks by home roll 8,9) in the lump is set to Rw1, Rw2～Rw10.
By not as conventional mode Rmn and Rwn is set to limit line current (Iw), the resistance of discharge current (Ig) of every 1, it is possible to limit line current (Iwn), the discharge current (Ign) of every 1.I.e., it is possible to be set as arbitrary resistance value by change supply terminals (power supply sheet) and the distance (length L) of point of discharge (discharge part).That is, in the case of being set to Vmn=60V, Vgn=30V, Rwn=10 Ω, Iwn(Ign is become)=(60V-30V)/10 Ω=3A.
It addition, in above-mentioned calculating formula, make the supply terminals produced by line resistance (Rwn) to the voltage drop of point of discharge become 30V, but do not consider to cause processing power source to the voltage drop of supply terminals resistance (Rmn) caused by supply terminals to the voltage drop of point of discharge.
I.e., in the case of as the power supply mode in the lump of the present invention, Iwn is determined by Rmn, so in order to obtain desired line current (Iwn), discharge current (Ign) for every 1, is set as making causing processing power source to become the relation of Rmn < Rwn to the resistance Rmn of the voltage drop of supply terminals.
It addition, can be according to resistance value ρ of (1) material based on line, the sectional area B of (2) line, these 3 parameters of length L of (3) line, by Rwn=(ρ × B) relational expression of/L, determine the line resistance Rwn of each line independence.
501 is processing power source portion (Vmn).It it is the machining voltage set for the processing electric current needed for supplying electro-discharge machining.Vmn can be set as arbitrary machining voltage.And then, compared to conventional mode, the quantity delivered of processing electric current is bigger, so compared to 401, supplying bigger electric power (machining voltage is with processing electric current long-pending).
Processing power source portion 501 supplies processing power source (Vmn) to power supply sheet 104.
502 is processing power source portion (Vsn).It it is the induced voltage set to induce electric discharge.And then, also it is used for online and monitors between workpiece that the state of voltage across poles (electrode current) is used for the purpose of the control of work transfer device.Vsn can be set as arbitrary induced voltage.And then, compared to conventional mode, faradic quantity delivered is bigger, so compared to 402, supplying bigger electric power.
Processing power source portion 502 supplies processing power source (Vsn) to power supply sheet 104.
503 is transistor (Tr2).By on-off mode switching processing power source Vmn ON(turn on) state and OFF(non-conduction) state.
504 is transistor (Tr1).By on-off mode switching processing power source Vsn ON(turn on) state and OFF(non-conduction) state.
507 is electric discharge voltage across poles (Vgn).It is to the electric discharge voltage across poles applied between line 103 and workpiece 105 in discharge process.
Such as, each electric discharge voltage across poles of the situation that 10 lines are powered in the lump will be set to Vg1, Vg2～Vg10.
It is discharge part by discharging to the part of applying electric discharge voltage across poles between line 103 and workpiece 105.In discharge part, the processing power source multiple lines by being moved and the contact of power supply sheet powered multiple lines of movement in the lump is to workpiece electrical discharge.
508 is electric discharge electrode current (Ign).It it is the electric discharge electrode current flow through between online 103 and workpiece 105 in discharge process.
Such as, each electric discharge electrode current of the situation that 10 lines are powered in the lump will be set to Ig1, Ig2～Ig10.
It is discharge part by flowing through the part of electric discharge electrode current between On-line Discharge 103 and workpiece 105.In discharge part, the processing power source multiple lines by being moved and the contact of power supply sheet powered multiple lines of movement in the lump is to workpiece electrical discharge.
510 is the line current (Iwn) independently supplied for every 1 line.
Such as, each line current of the situation that 10 lines are powered in the lump will be set to Iw1, Iw2～Iw10.
511 is supply terminals to distance L of point of discharge, is i.e. supply terminals (power supply sheet) to the length of the line of point of discharge (workpiece).
Explanatory diagram 8.
Fig. 8 be in the present invention by many lines (10) being supplied in the lump the figure that many lines are powered by the electric circuit 2 powered in the lump of processing electric current in the lump.
104 is power supply sheet.Power supply sheet 104 contacts in the lump with many lines of movement.From be arranged at silicon ingot 105 to position, sheet 104 of powering at apply discharge pulse, carry out electro-discharge machining.
Radical (10) for the line 103 of winding home roll is connected to 1 power circuit 2.
Hereinafter, with reference to the configuration of Fig. 8, the processing electric current (total of each line current) flow through in line is described.
As shown in Figure 8, about the line current from supply terminals (power supply sheet 104 and the position of line 103 contact) inflow point of discharge (between line 103 and workpiece 105), 2 directions of home roll to the left and right are flow through, so existing for the line resistance of all directions.
511L1 is the length (distance) between the supply terminals of the situation that electric current flows through to the home roll direction on the left side and point of discharge, and the line resistance determined in the case of L1 is set to Rw1a.
511L2 is the length (distance) between electric current situation about flowing through to the home roll direction on the right side, point of discharge and supply terminals, and the line resistance determined in the case of L2 is set to Rw1b.
Line 103 is wound the home roll length of 8,9 one weeks and is set to 2m.
Power supply sheet 104 is configured in the distance of the substantially half of the winding length of 1 week, so the distance (length L of line) between point of discharge and supply terminals is 1m.
Therefore, mobile longer than 0.5m to the distance of the line of discharge part at power supply sheet.
The main constituent of the material of line 103 is ferrum, and the diameter of line is 0.12mm(sectional area 0.06 × 0.06 × π mm2).Resistance value Rw1a of line, Rw1b are identical length (L1=L2=1m) respectively, if so setting each line resistance value as 20 identical Ω degree, then the line resistance value of the synthesis of based on Rw1a and Rw1b 1 (being wound 1 week by home roll 8,9) becomes 10 Ω degree.
Additionally, as shown in Figure 8, in order to make the line resistance value of length based on L1 and L2 become identical resistance value, preferably by make the length of L1 and L2 become identical in the way of, configuration power supply sheet 104, even if so that the difference of the length of L1 and L2 is 10% degree (such as L1 is 1m and L2 is 1.1m) different mode configures power supply sheet 104, there is no special problem yet.
In the case of discharge voltage Vg1～Vg10 is roughly equal, owing to Vmn is applied to each Rw1～Rw10, so Iw1～Iw10 is the most identical line current.
Herein, voltage drop value (Rw1 × Iw1) and discharge voltage (Vgn) according to being produced by line resistance obtain Vmn.
The voltage drop of power supply sheet 104 to discharge part is the voltage drop produced by the resistance of the line of movement.
If set to Rw1=10 Ω (resistance value of power supply sheet 104 to discharge part)
Iw1=3A
Vgn=30V,
Then Vmn becomes following.
Vmn=10(Ω) × 3(A)+30V=60V
Therefore, power supply sheet is more than 10V to the voltage drop of discharge part.
Therefore, power supply sheet is more than 1 Ω to the resistance value of discharge part.
Alternatively, it is also possible to by Rwn=(ρ × B) relational expression of/L, utilize the parameter of line to set the voltage drop value produced by line resistance.
Therefore, if calculating the Rmn in all 10 situations uniformly and simultaneously causing discharge condition between line and workpiece, then in institute is wired, become discharge condition and in the case of having flow through Iw1=3A in 10 lines, between processing power source to supply terminals, the overall processing electric current needing 10 × 3A=30A, if by one of voltage drop percentage being set to Vmn between this processing power source to supply terminals (0.6V), then the Rmn of this situation becomes following.
Therefore, processing power source portion is less than 1V to the voltage drop of power supply sheet 104.
Therefore, the voltage drop of processing power source portion extremely power supply sheet is less than the voltage drop of power supply sheet to discharge part.
Rmn=0.6V/30A=0.02 Ω (resistance value in processing power source portion 501 to power supply sheet 104).
Therefore, processing power source portion is less than 0.1 Ω to the resistance value of power supply sheet.
Therefore, the resistance value of processing power source portion extremely power supply sheet is less than the resistance value of power supply sheet to discharge part.
Therefore, the voltage drop of processing power source portion extremely power supply sheet 104 is more than 10 times with the ratio of the voltage drop of power supply sheet 104 to discharge part.
Therefore, the resistance value of processing power source portion extremely power supply sheet 104 is more than 10 times with the ratio of power supply sheet to the resistance value of discharge part.
Therefore, if it is considered that Rmn and obtain the processing electric current of 10, then become (60V-30V)/((10 Ω/10 piece)+0.02 Ω)=29.41A, assigning to the processing electric current after every single line becomes 2.941A.
Additionally, in the case of the most uniformly and causing discharge condition at all 10 between line and workpiece simultaneously, even if flowing through 1 line current, assign to the processing electric current after every single line and become (60V-30V)/(10 Ω+0.02 Ω)=2.994A, compared in all 10 situations uniformly and simultaneously causing discharge condition between line and workpiece, big difference also will not be produced.
In addition, as further effect, when to as many N root (by home roll 8,9 wound N week) line at 1 (in the lump) power supply in the case of, compared to process velocity when having powered independently for every 1 line, process velocity becomes 1/N, but according to the present invention, even if in the case of having powered (in the lump) at 1 to N root line, it is also possible to maintain the process velocity being equal to when 1 line has been powered independently.
Explanatory diagram 9 and Figure 10.
600 is coaxial cable (coaxially wiring portion), and the power supply being used for electro-discharge machining is supplied to wire electric discharge machine 1.In coaxial wiring portion, in order to suppress routing resistance LL, containing the electric current to the supply processing of A point up connect up 513 with make processing after electric current return to the descending wiring 514 in processing power source portion (Vmn).
601L is the physical length of the cable of wiring 513.
602L is the physical length of the cable of wiring 514.
A point is the terminal of the cable of wiring 513, electrically connects with power supply sheet 104.
B point is the terminal of the cable of the wiring 514 in coaxial cable, starts front end herein and then is connected with wiring 515.B point to C point is branched to single line (wiring 515).
C point is the terminal of the single wire cable of wiring 515, electrically connects with workpiece 105 and 3 via workpiece delivery section 3.
515 is single wire cable (single line portion), be coaxially wiring portion 600 contain up with or descending cable from the part of branch of coaxial wiring portion 600.
And then, the single line portion of branch electrically connects with the one party side (or two side sides) in power supply sheet or workpiece delivery section 3.In case of fig. 10, it is shown that situation about being connected with workpiece delivery section 3.
Figure 11 is described.
It is routed to relay terminal (A point and B point) by coaxial cable 600 from supply unit.Being coaxial cable till relay terminal, so being Low ESR, the impact of length is little.
In order to carry out electro-discharge machining, apply voltage to workpiece and line, thus separate in relay terminal (branch) be workpiece side (+) and sheet (line) side (-) of powering, connected up by the electric wire of single line respectively to them.
The single line portion of branch of institute electrically connects with the one party side (or two side sides) in power supply sheet or workpiece delivery section 3.In case of fig. 11, it is shown that situation about being connected with workpiece delivery section 3.
In the case of outside at the loop of the line of pitch of the laps as shown in Figure 11 is configured with workpiece delivery section 3, power supply sheet 104, in order to avoid to workpiece, single line portion and the interference of the line of pitch of the laps of power supply sheet, needing the outside cabling of the loop making electric wire online.
Length to workpiece, each single line portion of power supply sheet needs 50cm～1m degree.2 totals become 1m～2m, therefore, have bigger impedance, and according to the radical of the line of electric discharge, each discharge energy is not fixed.
Figure 12 is described.
Situation about workpiece and power supply sheet being configured in the loop of line is described.About to workpiece and the wiring of power supply sheet, to be mounted directly to the one side (negative pole) of the coaxial cable from supply unit power on sheet or power supply sheet erecting bed.The positive pole of coaxial cable is connected with the electric wire of single line, connects up to workpiece erecting bed.
If able to the interval of power supply sheet erecting bed and workpiece erecting bed is configured to beeline, then the length in single line portion is to utilize the surplus of electric wire corresponding with the amount of movement of workpiece the most fully, the amount of movement of workpiece is size 156mm of the silicon ingot of standard, so follow the trail of the cable section of workpiece, the length the shortest 20cm of the becoming degree (distance sending workpiece 105 to the direction of the line 103 close to pitch of the laps with workpiece delivery section 3 is substantially equal to) in single line portion 515 with the movement of workpiece from coaxial wiring Bu Jin branch.
Therefore, in the case of comparing with Figure 11, it is possible to by the contraction in length in single line portion to 1/5～1/10.
I.e., when as this Figure 12 inner side be configured with power supply sheet 104 and workpiece delivery section 3 in the case of, even if it is the longest, the length (distance) formed compared to 2 the line all-moving surfaces (upper and lower surface) being formed in the periphery of multiple home rolls 8,9 and moving to different directions respectively interval each other, the length from the single line portion 515 that coaxial cable section props up is shorter.
It addition, about the single line portion 511 propped up from coaxial cable section, both can be descending 1 being the most only connected with workpiece 105, it is also possible to be up 1 being only connected with power supply sheet 104.Alternatively, it is also possible to be descending 1 piece being connected with workpiece and the mode of up 1 these 2 difference branches being connected with power supply sheet 104.In this case, the length (distance) that 2 line all-moving surfaces (upper and lower surface) that the total prolongation ratio having added up to the single line portion 515 of 2 is formed in the periphery of multiple home rolls 8,9, that move to different directions respectively interval each other is formed is short.
Figure 13 is described.
Figure 13 is the result of aftermentioned Theoretical Calculation to be summarized as table and obtains.
By Tr1 impulsing voltage, the discharge current between control line and workpiece.
Supply voltage (Vmn) and the routing resistance L being mainly made up of can be utilized inductanceL, line resistance (pure resistance Rwn, inductance Lw), although calculating discharge current I(simply by following formula it addition, there is electric discharge voltage across poles for Yan Mi, but herein omit).
Routing resistance LLRefer to, with wiring 513, wiring 514, wiring 515 the resistive component of total identical.
In the case of the line discharged is 1, discharge current (ampere) can be calculated by following formula.
I=(Vmn/Rw) * (1-e-t/ τ)
τ refers to the rise time of discharge current.
τ=(LL+ Lw)/Rw
It addition, in the case of being many (10) online, discharge current can be calculated by following formula.
I10=(Vmn/(Rw/n) * (1-e-t/ τ)
τ 10=(LL+ (Lw/n))/(Rw/n)
Herein, n is the radical (radical of the line of electric discharge) of the line powered in the lump.
Routing resistance LLMainly inductance, so significantly affecting the rise time of the discharge current (Ign) of interpolar.
So, as the τ (shown in Figure 15) of rise time and as routing resistance LLThe size of the resistance value of the power-supply wiring of (inductance) is correlated with.
Impedance (resistance) component caused by power-supply wiring cable of the original power supply supply used in wire electric discharge machine is likely to become the main cause of the voltage drop of processing power source, thus it typically would be desirable to the least.
Therefore, even if in the wire electric discharge machine in general single line, near supply unit to wire electric discharge machine, use can reduce the coaxial cable of its impedance (resistance) component and connect up.
As shown in figure 11, in many wire electric discharge machines of the present invention, about being respectively configured workpiece and the position of power supply sheet, according to following 2 reasons as above, power supply blade unit and point of discharge are individually separated, and then workpiece is movable with electro-discharge machining propelling, so in order to constitute from supply unit power supply sheet supply processing power source, the line current flow through in making online is discharged at interpolar, and make the electrode current flow through within the workpiece return to the power circuit of processing power source, certain needs cable connected up from the single line of the coaxial cable branch being routed near many wire electric discharge machines.
(1) by extending the line length (length that line moves) of point of discharge extremely power supply blade unit as far as possible, impedance (resistive component) caused by line length becomes big further, its result, the impedance (resistive component) of each line is top dog in a power, it is possible to determine the current value flow through in each line with the impedance (resistive component) of each line.
(2) by making power supply blade unit the most equal to the line length (L1 and L2) of the left and right sides of point of discharge, impedance (resistive component) caused by line length is the most roughly equal, its result, the current value flow through in each line can be made equal in the left and right sides, it is possible to (direct of travel of the line of movement) processes workpiece accurately in the left and right sides.
If the cable length with single line wiring is elongated, then impedance (resistance) component caused by cable length becomes big, becomes and makes routing resistance LLThe main cause that (inductance) increases.
But in many wire electric discharge machines of the present invention, the reason of cable length of shortening single line wiring as far as possible is such from the main cause of the voltage drop becoming processing power source general different by the general reason in the wire electric discharge machine of single line, its object is to make the machining energy of each of each line not rely on discharge condition and become uniform.
So, in many wire electric discharge machines of the present invention, in order to reduce the impedance of the cable of single line part as far as possible, cable length is the shortest, make the cable length of single line part become the shortest to meet above-mentioned 2 conditions, most preferably workpiece delivery section and power supply this two side of blade unit are configured at the inner side of multiple home roll.
The following is the result using above-mentioned formula to carry out Theoretical Calculation and to obtain.
The deviation of τ of rise time and the impact of the length of power-supply wiring can be denoted as by this Theoretical Calculation.
It is being set in the case of 10 lines of 1 cloth alignment power in the lump,
It is assumed to be the inductance Lw:50 μ H of line resistance Rwn:10 Ω, line.
Calculate and make the length of wiring routing resistance L when being 2m respectivelyLIt is set to routing resistance L during 2 μ H, 0.2mL: the τ of the situation of 0.2 μ H.
1301 is the radical of the line at interpolar discharge.
1302 is to have added up to routing resistance and the inductance of line and the result that obtains.Unit is [microhenry].
1303 is the resistance of line.
1304 is τ.Unit is time [microsecond].
1305 is the deviation of τ.
Represent the impact caused by generation state of electric discharge.
According to table, when comparative result 1300 and result 1400, it is believed that in the case of the length in single line portion is 0.2m, compared to the situation of 2m, the deviation of τ is less, i.e. electric discharge line one another discharge rise time [microsecond] substantially evenly align.
Figure 14 is the calculating formula using above-mentioned (Vmn-Vgn)/((radical of Rwn/ line)+Rmn)=processing electric current, only makes Rmn variable and compares the curve chart of the calculated value of the processing electric current of the total increased with the radical of line and change.It addition, in formula, be set to Vmn=60V, Vgn=30V, Rwn=10 Ω, obtain the value (ampere) of processing electric current.
The longitudinal axis of curve chart is the ampere of the processing electric current representing total, and the longitudinal axis of curve chart is the radical of the line connecting with power supply sheet and powering (in the lump) at 1.By making the power supply sheet 104 of different sizes and linear contact lay be powered, it is possible to the radical of the line that change is powered at 1 (in the lump) (1,2,10,, 100).
Curve chart is the parameter beyond fixing Rmn and only the resistance value (Ω) of Rmn is replaced into different 3 resistance value respectively and compares and the result that obtains.
According to curve chart, make Rmn the least, make with the radical increase of line it is believed that the total of processing electric current of relevant property direct with process velocity increases with the radical of line generally proportionately.
In the present invention, between line 103 and workpiece 105, the resistance value of the working fluid of (interpolar) changes according to the distance of interpolar.Therefore, the value of the degree that the resistance value of the working fluid by being set as the Rsn506 of faradic current limiting resistance with this interpolar is roughly the same, it is possible to the variation of detection voltage across poles (Vgn).
Figure 15 is described.
Figure 15 is the figure rising manner point situation of the discharge current in the multi-thread electrical discharge machining system of the present invention illustrated, left figure represents the pulse power (the 503 of Fig. 6) being powered, top right plot represents the processing (movements of the 508 of Fig. 6) in the case of rising soon, and bottom-right graph represents the processing (movements of the 508 of Fig. 6) in the case of rising slowly.
Figure 15 be illustrate the pulse power applying (left figure) and with the applying of the pulse power figure of the relation (right figure) that discharge current rises.In the line electro-discharge machining of the present invention, even if in the case of to many lines, confession gives the processing power source of same pulse and same magnitude of voltage in the lump, as being modeled as
1. rise the processing (top right plot) of the situation of fast line
2. rise the processing (bottom-right graph) of the situation of slow line
Like that, and the long-pending i.e. electric parameters of electric current and time proportionally determines machining energy.The generation of the electric discharge of interpolar is respectively different for each line, and therefore, if the rise time of electric current is different, then machining energy is different.That is, in the case of the rise time (τ) of upper figure is short, the i.e. machining energy of electric parameters increases, and workpiece is processed much.
On the contrary, in the case of the rise time (τ) of figure below is long, the i.e. machining energy of electric parameters reduces and workpiece is processed must lack.If so for each line of interpolar, stable until discharge current and till outflow rise time (τ) produces deviation, then the machining energy after discharge current rises also changes, so the machining shape of each line also becomes uneven.
Figure 16 is described.
Figure 16 is the variation of the configuration of Fig. 2.In this case, in shown configuration example, workpiece delivery section and power supply this two side of blade unit are configured at the inner side of multiple home roll, by L1(in the case of line is moved by the home roll 8 in left side, from the length of power supply sheet 104 to point of discharge) and L2(in the case of line is moved by the home roll 9 on right side, from the sheet 104 length to point of discharge of powering) be set to approximately equidistantly, even if but the configuration of the configuration of workpiece delivery section and power supply blade unit is not dressed the ranks in vertical, still reaches the purpose of the present invention.
Figure 17 is described.
Figure 17 is the variation of the configuration of Fig. 2.In this case, workpiece delivery section and power supply this two side of blade unit are configured at the inner side of multiple home roll, but L1(in the case of line is moved by the home roll 8 in left side, from the length of power supply sheet 104 to point of discharge) and L2(in the case of line is moved by the home roll 9 on right side, from the length of power supply sheet 104 to point of discharge) difference.In this case, the current value flow through in each line is different in the left and right sides, so workpiece is also subject to processing impact in the precision of the left and right sides (direct of travel of the line of movement), but as long as its difference is 10% degree, just reaches the purpose of the present invention.
Figure 18 is described.
Figure 18 is the variation of the configuration of Fig. 2.In this case, in shown configuration example, workpiece delivery section and power supply this two side of blade unit are configured at the inner side of multiple home roll, by L1(in the case of line is moved by the home roll 8 in left side, from the length of power supply sheet 104 to point of discharge) and L2(in the case of line is moved by the home roll 9 on right side, from the sheet 104 length to point of discharge of powering) be set to approximately equidistantly, even if multiple home rolls are configured at 2 the most as shown in Figure 2, and be configured at as shown in Figure 18 at 4, still reach the purpose of the present invention.In shown configuration example, it is configured at as shown in Figure 18 at 2 even if the quantity of power supply blade unit is configured at 1 the most as shown in Figure 2, still reaches the purpose of the present invention.
It addition, the quasiconductor ingot casting that cut with the multi-thread electrical discharge machining system of the present invention is manufactured into the substrate of quasiconductor or substrate used for solar batteries, it is possible to as semiconductor device, solaode.
Claims (6)
1. a wire electric discharge machine, according to the interval of the line being set up in parallel, by electric discharge
Workpiece is cut by processing, and this wire electric discharge machine is characterised by possessing:
Multiple home rolls, make described line pitch of the laps, so that moving to same direction；
Power supply sheet, the many lines to described pitch of the laps, in the lump supply adding for described electro-discharge machining
Work power supply；
Workpiece delivery section, sends described workpiece to the direction of the line close to described pitch of the laps；And
Power-supply wiring, turns on described power supply sheet and described workpiece and supplies for described electric discharge
The processing power source of processing,
Described power supply sheet and described workpiece delivery section be configured at the plurality of home roll is carried out around
The inner side of the line of circle, employs power circuit and the institute of the described processing power source of described power-supply wiring
State power supply sheet and described workpiece delivery section connect respectively,
Described wire electric discharge machine is also equipped with processing groove, and this processing groove is configured at the plurality of
Home roll carries out the outside of the line of pitch of the laps, and stores working fluid,
Described workpiece delivery section is configured at the position lower than described power supply sheet,
Described workpiece is sent by described workpiece delivery section to the direction of the line close to described pitch of the laps, with
The described workpiece kept is impregnated in described working fluid.
Wire electric discharge machine the most according to claim 1, it is characterised in that
Described power-supply wiring has:
Use and the coaxial wiring portion of descending cable containing up；And
Described containing described up with or described descending cable from described coaxial wiring
The single line portion of the connection powered described in part Zhi Eryu in sheet and described workpiece delivery section,
Compared to that formed in the periphery of the plurality of home roll, move to different directions 2
Length that individual line all-moving surface interval each other causes, the length in the single line portion of described branch is more
Short.
Wire electric discharge machine the most according to claim 1, it is characterised in that
Described power-supply wiring has:
Use and the coaxial wiring portion of descending cable containing up；And
Described containing described up with or described descending cable from described coaxial wiring
The single line portion of the connection powered described in part Zhi Eryu in sheet and described workpiece delivery section,
The length in the single line portion of described branch with described workpiece delivery section by described workpiece to connecing
The distance that the direction of the line of nearly pitch of the laps is sent is roughly equal.
Wire electric discharge machine the most according to claim 1 and 2, it is characterised in that tool
Standby:
Discharge part, makes the described processing power source by being supplied to described line in the lump put to described workpiece
Electricity；And
Power supply unit, is used for the processing power source of described electro-discharge machining to the supply of described power supply sheet,
Described power supply unit is less than described power supply sheet extremely to the resistance of the power-supply wiring of described power supply sheet
The resistance of the line of described discharge part.
Wire electric discharge machine the most according to claim 4, it is characterised in that
Described power supply unit is less than 0.1 Ω to the resistance of the power-supply wiring of described power supply sheet.
6. the wire electric discharge machining method in wire electric discharge machine, this wire electric discharge machine
According to the interval of the line being set up in parallel, being cut workpiece by electro-discharge machining, this line is put
Electric machining device possesses: multiple home rolls, makes described line pitch of the laps, so that moving to same direction；
Power supply sheet, the many lines to described pitch of the laps, supply is for the processing electricity of described electro-discharge machining in the lump
Source；Workpiece delivery section, sends described workpiece to the direction of the line close to described pitch of the laps；Power supply
Wiring, turns on described power supply sheet and described workpiece and supplies adding for described electro-discharge machining
Work power supply；And processing groove, it is configured at the outside of the line that the plurality of home roll is carried out pitch of the laps,
And store working fluid,
Wherein, described power supply sheet and described workpiece delivery section are configured at and enter the plurality of home roll
The inner side of the line of row pitch of the laps, employs the power circuit of the described processing power source of described power-supply wiring
It is connected respectively with described power supply sheet and described workpiece delivery section,
Described workpiece delivery section is configured at the position lower than described power supply sheet,
Described workpiece is sent by described workpiece delivery section to the direction of the line close to described pitch of the laps, with
The described workpiece kept is impregnated in described working fluid.
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| EP1792683A1 (en) * | 2004-09-10 | 2007-06-06 | Mitsubishi Denki Kabushiki Kaisha | Wire electric discharge apparatus |
| CN101670472A (en) * | 2008-09-12 | 2010-03-17 | 财团法人工业技术研究院 | Method and device for controlling wire cutting electrochemical discharge processing and feeding |
| CN102892539A (en) * | 2010-05-18 | 2013-01-23 | 三菱电机株式会社 | Workpiece retainer, wire electric discharge machining device, thin-plate manufacturing method, and semiconductor-wafer manufacturing method |
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| WO2008047440A1 (en) * | 2006-10-19 | 2008-04-24 | Mitsubishi Electric Corporation | Power supply circuit of wire electric discharge machining system |
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| EP1792683A1 (en) * | 2004-09-10 | 2007-06-06 | Mitsubishi Denki Kabushiki Kaisha | Wire electric discharge apparatus |
| CN101670472A (en) * | 2008-09-12 | 2010-03-17 | 财团法人工业技术研究院 | Method and device for controlling wire cutting electrochemical discharge processing and feeding |
| CN102892539A (en) * | 2010-05-18 | 2013-01-23 | 三菱电机株式会社 | Workpiece retainer, wire electric discharge machining device, thin-plate manufacturing method, and semiconductor-wafer manufacturing method |
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