JP6024711B2 - Wire electric discharge machining system and machining method thereof. - Google Patents

Description

  The present invention relates to a technique of a wire electric discharge machining system and a machining method thereof.

Conventionally, a wire saw is known as an apparatus for slicing a silicon ingot into a large number of thin pieces. Recently, there is a technique for slicing a workpiece into a thin plate using a wire electric discharge machining technique.
For example, Patent Document 1 discloses a technique for supplying a voltage independently to each wire from a position fixed to the parallel wires.

JP 2011-148031 A

  In Patent Document 1, since the position of each supply electron is fixed, the length of the wire from the discharge part (workpiece) to the supply electron is constant, and the variable resistance in the electric circuit is changed from the discharge part to the supply electron. By making the resistance value higher than the resistance value due to the length of the wire and further variably adjusting the resistance value of the variable resistor itself, the machining current value for each wire is individually adjusted to an optimum value.

  In this way, when individually adjusting the machining current value for each wire, if the resistance value of the workpiece has changed, etc., if all the variable resistances for each wire are not adjusted, When a workpiece whose resistance value varies from sample to sample cannot be obtained and the workpiece is processed by electric discharge machining, the rate at which the workpiece is processed suddenly extremely decreases.

The present invention is a collective power feeding method that feeds machining voltage to a plurality of wires at once , and when adjusting the machining current value that flows collectively to a plurality of wires, the machining current value can be set without changing the machining voltage setting conditions. and an object thereof is to provide a simple adjustment to that specification set so that the appropriate value.

The present invention is a wire electric discharge machining apparatus for slicing a workpiece with wires arranged in parallel, and traveling means for traveling so that the wires are arranged in parallel, and a plurality of wires in the wires traveling so as to be arranged in parallel The supply voltage that feeds the machining voltage to the wires in a lump, and the machining voltage fed to the plurality of wires is moved between the workpiece and the workpiece by moving the position where the supply electron feeds the plurality of wires. An adjusting means for adjusting the impedance of the plurality of wires from the discharging unit to the electric supply to an arbitrary value;
The adjusting means further includes driving means for moving a position where the power supply supplies power to the plurality of wires,
The adjustment unit corrects the difference in specific resistance measured for each workpiece before the workpiece is subjected to electric discharge machining by moving the position where the power supply is supplied by the driving unit using the impedances of the plurality of wires. and child and features.

The present invention is a wire electric discharge machining apparatus for slicing a workpiece with wires arranged in parallel, and traveling means for traveling so that the wires are arranged in parallel, and a plurality of wires in the wires traveling so as to be arranged in parallel The supply voltage that feeds the machining voltage to the wires in a lump, and the machining voltage fed to the plurality of wires is moved between the workpiece and the workpiece by moving the position where the supply electron feeds the plurality of wires. An adjusting means for adjusting the impedance of the plurality of wires from the discharging unit to the electric supply to an arbitrary value;
A processing power supply unit that supplies the processing voltage to the power supply is provided, and a resistance value from the processing power supply unit to the power supply is smaller than an impedance of the plurality of wires adjusted to the arbitrary value It is characterized by that.

The adjusting means may be configured such that the second distance by the plurality of wires traveling between the pair of supply electrons without passing through the discharge unit side is shorter than the first distance. The impedance of the plurality of wires traveling between the pair of supply electrons without passing through the discharge unit side is arranged from the discharge unit to the pair of supply units. It adjusts so that it may become smaller than the impedance by the said several wire to an electron.

The traveling means winds the wire around a plurality of main rollers so that the wires travel side by side, and the second distance is a traveling distance of the wire that makes one turn around the plurality of main rollers. The adjusting means arranges each of the pair of supply electrons so as to be less than one third.
Further, the processing voltage having an equal potential is supplied to the pair of supply electrons.

According to the present invention, when adjusting the machining current value that flows collectively to a plurality of wires in a batch feeding method in which machining voltages are fed to a plurality of wires at once, the machining current value is maintained without changing the machining voltage setting conditions. it is possible to provide a simple adjustment to that specification set so that the appropriate value.

The figure which looked at the wire electric discharge machining system of the present invention from the front. The enlarged view which looked at the wire electric discharge machining apparatus of this invention from the front. The figure which looked at the arrangement | positioning relationship between the electric power feeder and a wire in this invention from the side. The figure which showed arrangement | positioning of the electric circuit and various components in the wire electric discharge machining system of a prior art. The figure which showed arrangement | positioning of the electric circuit and various components in the wire electric discharge machining system of a prior art. The inter-electrode state (voltage and current) and the machining power supply pulse (ON / OFF) cycle in the present invention. The figure which showed arrangement | positioning of the electric circuit and various components in this invention. The figure which showed arrangement | positioning of the electric circuit and various components in this invention. The figure which looked at the positional relationship of the electric supply and wire in a prior art (wire electric discharge machining system) from diagonally forward. The figure which imitated how to flow the electric circuit and machining current in the prior art (wire electric discharge machining system). The figure which imitated the way of the machining current at the time of the electric circuit and equal discharge in a prior art (wire electric discharge machining system). The figure which imitated how to flow of the electric circuit in the prior art (wire electric discharge machining system) and the partial electric current at the time of partial discharge. The figure which looked at the positional relationship of the electric supply and wire in this invention (wire electric discharge machining system) from diagonally forward. The figure which imitated how to flow the electric circuit and the machining current in the present invention (wire electric discharge machining system). The figure which modeled how the flow of the machining current at the time of the electric circuit and partial discharge in this invention (wire electric discharge machining system). The movement of the drive mechanism of the wire electric discharge machining apparatus of this invention is shown. It is a figure which shows the example of arrangement | positioning of the electric power feeding unit of this invention. It is a figure which shows the example of arrangement | positioning of the electric power feeding unit of this invention. An example of the hardware constitutions of the control computer which controls the operation | movement which concerns on this invention is shown.

  Referring to FIG. FIG. 1 is an external view of a wire electric discharge machining apparatus 1 according to an embodiment of the present invention as viewed from the front. The configuration of each mechanism shown in FIG. 1 is an example, and it goes without saying that there are various configuration examples depending on the purpose and application.

  FIG. 1 shows the configuration of a wire electrical discharge machining system (semiconductor substrate or solar cell substrate manufacturing system) according to the present invention. The wire electric discharge machining system includes a wire electric discharge machining device 1, a power supply device 2, and a machining fluid supply device 50. The wire electric discharge machining system can slice a workpiece into thin pieces by electric discharge at intervals between a plurality of wires arranged in parallel.

  In the wire electrical discharge machining apparatus 1, a workpiece feeding device 3 driven by a servo motor is provided above the wire 103 and can move the workpiece 105 in the vertical direction. In the present invention, the workpiece 105 is sent in the downward (gravity) direction, and electric discharge machining is performed between the workpiece 105 and the wire 103. In the present specification, upper and lower correspond to the upper and lower directions in the direction of gravity, and left and right correspond to the left and right when the wire electric discharge machine is viewed from the front.

  In the power supply device 2, the discharge servo control circuit that controls the servo motor controls the discharge gap to be constant in order to efficiently generate discharge according to the state of discharge, performs work positioning, and discharges Proceed with processing.

  The machining power supply circuit (FIG. 7) supplies a discharge pulse for electric discharge machining to the wire 103, performs control adapted to a state such as a short circuit occurring in the discharge gap, and outputs a discharge gap signal to the discharge servo control circuit. Supply.

  The machining fluid supply device 50 feeds machining fluid necessary for cooling the electrical discharge machining part and removing machining chips (scraps) to the workpiece 105 and the wire 103 by a pump, removing machining chips in the machining fluid, and ion exchange. The electrical conductivity (1 μS to 250 μS) is managed and the liquid temperature (around 20 ° C.) is managed. Although water is mainly used, electric discharge machining oil can also be used.

  Grooves are formed in the main rollers 8 and 9 at a predetermined pitch and number so that the workpiece can be processed with a desired thickness, and the tension-controlled wires from the wire supply bobbin are transferred to the two main rollers. It is wound as many times as necessary and sent to the take-up bobbin. A wire speed of about 100 m / min to 900 m / min is used. As the two main rollers rotate in the same direction and at the same speed, one wire 103 sent from the wire feeding portion circulates around the outer periphery of the main rollers (two) and is arranged in parallel. A plurality of wires 103 can travel in the same direction (that is, the travel means).

As shown in FIG. 8, the wire 103 is a single connected wire. The wire 103 is fed from a bobbin (not shown) and fitted into a guide groove (not shown) on the outer peripheral surface of the main roller. After being wound spirally (approximately 2000 times at the maximum), it is wound around a bobbin (not shown).
The wire electric discharge machining apparatus 1 is connected to the power supply unit 2 via an electric wire 513 and is operated by electric power supplied from the power supply unit 2.

As shown in FIG. 1, the wire electrical discharge machining apparatus 1 includes a block 15 that functions as a base of the wire electrical discharge machining apparatus 1, a work feeding device 3 that is installed in an upper portion of the block 15, and an adhesive portion 4. , A workpiece 105, a processing liquid tank 6, a main roller 8, a wire 103, a main roller 9, an electric supply unit 10, and an electric supply 104.
FIG. 2 will be described. FIG. 2 is an enlarged view within a dotted line 16 frame shown in FIG.

  A wire 103 is wound around the main rollers 8 and 9 a plurality of times, and the wires 103 are aligned at a predetermined pitch in accordance with a groove cut in the main roller. The main roller has a structure in which metal is used in the center and the outside is covered with resin.

  A power supply 104 attached to the power supply unit 10 is disposed between the two main rollers and at a position substantially above the center of the main rollers 8 and 9, and the power supply 104 is directed upward. The machining voltage is supplied to the plurality of wires 103 traveling by bringing the exposed surface into contact with the wires.

  As shown in FIG. 3, the power supply 104 comes into contact with 10 of the wires 103 to supply the discharge pulses 503 (FIG. 6) from the machining power supply unit to the 10 wires. The position where the power supply 104 is arranged is provided at a position where the lengths of the wires from both ends of the work 105 are substantially equal (511L1 = 511L2). The power supply 104 is required to be resistant to mechanical wear and have electrical conductivity, and a cemented carbide is used.

  A work 105 attached to the work feeding device 3 is disposed between the two main rollers and substantially below the center of the main rollers 8 and 9, and the work feeding device 3 lowers the work 105. Slicing progresses by feeding in the direction.

  The machining liquid tank 6 is provided at a position below the main roller, the wire 103 and the workpiece 105 are immersed, and the electric discharge machining portion is cooled and the machining chip is removed. The processing liquid tank 6 is for storing the processing liquid and immersing the delivered work.

In FIG. 3, the number of the wires 103 that are in contact with ten wires 103 is shown as one, but it goes without saying that the number of wires and the total number of the supplied electrons can be changed according to the required number. .
The block 15 is joined to the work feeding device 3. Further, the workpiece feeding unit 3 is bonded (joined) by the workpiece 105 and the bonding unit 4.
In this embodiment, a silicon ingot will be described as an example of the processing material (work 105).
The bonding portion 4 may be anything as long as it is for bonding (joining) the workpiece feeding device 3 and the workpiece 105, and for example, a conductive adhesive is used.

  The workpiece feeding unit 3 is a device having a mechanism for moving the workpiece 105 bonded (joined) by the bonding unit 4 in the vertical direction, and the workpiece feeding unit 3 moves downward (gravity direction) while holding the workpiece 105. ), The workpiece 105 can be brought closer to the direction of the wire 103. The work feeding unit 3 is disposed at a position lower than the power supply 104. The workpiece feeding unit 3 feeds the workpiece 105 in a direction approaching the wire that goes around the main rollers 8 and 9 so that the workpiece 105 to be held is immersed in the machining liquid.

  The processing liquid tank 6 is a container for storing the processing liquid, and is disposed outside the wire that goes around the plurality of main rollers 8 and 9. The working fluid is, for example, deionized water having a high resistance value. By providing the machining fluid between the wire 103 and the workpiece 105, electric discharge occurs between the wire 103 and the workpiece 105, and the workpiece 105 can be shaved.

  A plurality of rows of grooves for winding the wire 103 are formed on the main rollers 8 and 9, and the wire 103 is wound around the grooves. Then, the main roller 8, 9 rotates to the right or left, so that the wire 103 travels. Further, as shown in FIG. 2, the wire 103 is wound around the main rollers 8 and 9 to form a wire row on the upper side and the lower side of the main rollers 8 and 9.

  The wire 103 is a conductor, and the supplied voltage is supplied from the power supply 104 to the wire 103 by contacting the power supply 104 of the power supply unit 10 to which the voltage is supplied from the power supply unit 2 and the wire 103. 103 is applied. That is, the power supply 104 applies a voltage to the wire 103.

Then, an electric discharge occurs between the wire 103 and the workpiece 105, and the workpiece 105 is shaved (electric discharge machining), so that a thin plate-like silicon (silicon wafer) can be formed.
FIG. 3 will be described. FIG. 3 is an enlarged view of the power supply 104.
The power supply 104 (1 piece) is in contact with the wire 103 (10 pieces). The distance between the wires 103 (wire pitch) is about 0.3 mm.
FIG. 4 will be described. FIG. 4 shows an electric circuit 400 and a wire electric discharge machining device 4000 according to an individual feeding system that feeds a machining voltage individually for each wire, which is a conventional system.

  The machining power supply unit 401 supplies a machining voltage Vm. Here, Vm is a machining voltage set to supply a current necessary for electric discharge machining. Vm can be set to an arbitrary machining voltage in the range of 60V to 150V.

  The machining power supply unit 402 supplies an induced voltage Vs. Here, Vs is an induced voltage set for inducing discharge. The machining power supply unit 402 is also used for the purpose of monitoring the voltage (discharge current) state between the wires and the workpiece. Vs can be set to any induced voltage between 60V and 300V.

  The transistor (Tr2) 403 switches between the ON (conductive) state and the OFF (non-conductive) state of the machining voltage Vm by switching. The transistor (Tr1) 404 switches between the ON (conductive) state and the OFF (non-conductive) state of the induced voltage Vs by switching.

  By setting a fixed resistance value (Rm) 405 using a current limiting resistor, the wire current (Iw) for each wire and the discharge current (Ig) between the electrodes are limited. Rm can be set to an arbitrary resistance value of 1Ω to 100Ω. That is, when Vm = 60V (volt), Vg = 30V, and Rm = 10Ω, Iw (Ig) = (60V−30V) / 10Ω = 3A (ampere).

  In the above calculation formula, the voltage drop from the machining power source (Vm) to the feeding point (power supply) is 30 V, but the voltage drop from the feeding point to the discharge point due to the wire resistance (Rw) is not considered. .

  That is, in the case of the conventional individual power feeding method, the value of the machining current Iw is determined by the resistance Rm of the current limiting resistor, so that a desired wire current or discharge current (Ig) is obtained for each wire. Is set so that the wire resistance Rw has a relationship of Rm> Rw.

  By setting a fixed resistance value (Rs) 406 using a current limiting resistor, the induced current that induces discharge is limited. Rs can be set to an arbitrary resistance value of 1Ω to 100Ω.

A discharge voltage (Vg) 407 is a discharge voltage between the electrodes applied between the wire 103 and the workpiece 105 (between the electrodes) during discharge. A discharge current (Ig) 408 is a discharge current between the electrodes that flows between the wire 103 and the workpiece 105 during discharge. The machining current (Iw) 410 is individually supplied for each wire.
FIG. 5 will be described. FIG. 5 shows that the electric circuit 400 supplies power to a plurality of wires in an individual power supply method in which a machining voltage is individually supplied for each wire, which is a conventional method.

  A wire resistance (Rw) 409 indicates the resistance of each wire. The individual power supply 204 performs electrical discharge machining by applying a machining voltage pulse from two individual power supply electrons provided near both ends of the workpiece 105. The individual power supply 204 is connected to the same number of power supply circuits 400 as the number of wires 103 to be wound.

  FIG. 6 will be described. FIG. 6 shows changes in the discharge voltage (Vgn) between the electrodes and the discharge current (Ign) between the electrodes and the ON / OFF operation (timing chart) of Tr1 and Tr2 according to the present invention. The horizontal axis of the graph indicates time.

  First, the transistor Tr1 504 is turned on and an induced voltage is applied. At this time, since the wire 103 and the work 105 (between the electrodes) are insulated, almost no discharge current flows between the electrodes. After that, when a discharge current starts to flow between the electrodes and the discharge is started, the voltage Vgn drops to detect the start of the discharge and turn on Tr2 to obtain a large discharge current between the electrodes. Tr2 is turned off after a predetermined time has elapsed. A series of operations is repeated again after a predetermined time has elapsed since the Tr2 was turned off.

  FIG. 7 will be described. FIG. 7 shows the relationship between the electric circuit 2 and the wire electrical discharge machining apparatus 1 in a batch power feeding method in which a machining voltage is fed collectively to a plurality of wires (10 wires) in the present invention. A state is shown in which a wire current as a machining current and a discharge current between the electrodes are flowing. FIG. 7 shows an equivalent circuit of the electric circuit 2 shown in FIG.

  If the conventional electric circuit 400 shown in FIG. 4 is introduced as it is into the electric circuit of the collective power supply method in which the machining voltage is fed to a plurality of wires (10 wires) at once, the feeding point is supplied from the machining power supply unit. In order to control the machining current between the main rollers 8 and 9, Rm is adjusted so that the machining current of the total (10 times) of the wire current supplied to the plurality of wires (10) is supplied. What is necessary is just to install the electric current limiting resistor which is the resistance value divided by the frequency | count of winding (10 times) between a process power supply part and a feeding point. First, a case will be described in which a current limiting resistor having a resistance value fixed to Rm / 10 is installed between the machining power supply unit and the power supply.

  When the discharge state occurs uniformly and simultaneously between all 10 wires and the workpiece, the discharge current is evenly distributed over the 10 wires, and according to the fixed resistance value (Rm / 10). Since the discharge current is supplied between each wire and the workpiece, supply of an excessive discharge current is not a problem.

  However, if the discharge state does not occur uniformly and simultaneously between all 10 wires and the workpiece, the wire current corresponding to the fixed resistance value (Rm / 10) is the wire in the discharge state. Therefore, supply of excessive wire current becomes a problem. That is, when only one of the ten wires is in a discharge state, one wire and a wire current that is 10 times the wire current to be supplied to the workpiece are The wire is broken by being supplied to the workpiece.

  A wiring 513 is an upstream cable having an impedance (resistance) 505 and connected to the processing power supply unit (Vmn) minus side. The wiring 513 supplies a machining voltage to the power supply 104 from the machining power supply unit (Vmn). The wiring 514 has an impedance (resistance) 520 and is a down cable connected to the processing power supply unit (Vmn) plus side.

  The resistance value Rmn 505 of the wiring 513 of the present invention does not fix the resistance value to a predetermined value as in the conventional processing current limiting resistor, and the wire electric discharge machining apparatus in this embodiment is 1 out of 10 wires. Even when only the book is in a discharged state, a mechanism is provided that can control the resistance value to vary depending on the number of discharged books.

  Furthermore, when the resistance value Rmn505 of the present invention is used in a range where the resistance value is sufficiently smaller than the wire resistance Rwn509, the wire resistance Rwn509 becomes dominant in limiting the machining current, and the influence of the resistance value Rmn505. Is almost negligible.

  That is, it is not necessary to provide a current limiting resistor that limits the upper limit of the machining current that flows between the machining power supply unit 501 and the power supply 104 and is a discharge current that is discharged to the workpiece 105 between the electrodes. Alternatively, the resistance value may be smaller than the resistance value obtained by simply dividing Rmn by the number of turns (10 times) around which the main rollers 8 and 9 are wound.

  That is, by using the impedance that is the resistance Rwn 509 of each wire, the wire current Iwn of each wire is stably supplied, so that the concentration of the wire current can be prevented. A resistor (Rwn) 509 is a wire resistance for each wire.

  Here, the wire resistance value from the power supply 104 to the discharge part is a resistance according to the length of the wire from the contact of the traveling wire (one piece) with the supply electron 104 to the discharge part. For example, let Rw1, Rw2,..., Rw10 be the wire resistances when supplying power to 10 wires (the main rollers 8 and 9 are wound 10 turns) in a lump.

  Rm is not a resistor that limits the wire current (Iw) or discharge current (Ig) for each wire as in the conventional method, but Rwn is the wire current (Iw) or discharge current (Ig) for each wire. By setting the limiting resistance, the wire current (Iwn) and the discharge current (Ign) for each wire can be limited. That is, an arbitrary resistance value can be set by changing the distance (length L) between the power feeding point (power supply) and the discharge point (discharge part). That is, when Vmn = 60V, Vgn = 30V, and Rwn = 10Ω, Iwn (Ign) = (60V−30V) / 10Ω = 3A.

  In the above calculation formula, the voltage drop from the feed point to the discharge point due to the wire resistance (Rwn) is set to 30 V, but the discharge from the feed point due to the resistor (Rmn) causing the voltage drop from the machining power supply unit to the feed point is performed. The voltage drop to the point is not considered.

  That is, in the case of the collective power supply method according to the present invention, Iwn is determined by Rwn. Therefore, in order to obtain a desired wire current (Iwn) and discharge current (Ign) for each line, power is supplied from the machining power supply unit. The resistance Rmn that causes a voltage drop to the point is set to have a relationship of Rmn <Rwn.

  The wire resistance Rwn for each wire is calculated from the following three parameters: (1) electrical resistance value ρ depending on the wire material, (2) wire cross-sectional area B, and (3) wire length L. Rwn = (ρ × B ) / L.

  The machining power supply unit 501 supplies a machining voltage Vmn. Here, Vmn is a machining voltage set to supply a machining current necessary for electric discharge machining. Vmn can be set to an arbitrary machining voltage. Furthermore, since the supply amount of the machining current is larger than that in the conventional method, the machining power supply unit 501 supplies larger power (product of the machining voltage and the machining current) than the machining power supply unit 401. The machining power supply unit 501 supplies a machining voltage (Vmn) to the power supply 104.

  The machining power supply unit 502 supplies an induced voltage Vsn. Here, Vsn is an induced voltage set to induce discharge. The machining power supply unit 502 is also used for the purpose of monitoring the state of the discharge voltage (discharge current) between the wire and the workpiece and using it for controlling the workpiece feeding device. Vsn can be set to any induced voltage. Furthermore, since the supply amount of the induced current is larger than that in the conventional method, the machining power supply unit 502 supplies larger power than the machining power supply unit 402. The machining power supply unit 502 supplies the induced voltage Vsn to the power supply 104.

  The transistor (Tr2) 503 switches between the ON (conductive) state and the OFF (non-conductive) state of the machining voltage Vmn by switching. The transistor (Tr1) 504 switches between the ON (conductive) state and the OFF (non-conductive) state of the induced voltage Vsn by switching.

  A discharge voltage (Vgn) 507 between the electrodes is a voltage applied between the wire 103 and the workpiece 105 during discharge. For example, let Vg1, Vg2,..., Vg10 be the discharge voltages when supplying power to 10 wires at once.

  A portion where the discharge electrode voltage is applied between the wire 103 and the workpiece 105 by discharge is a discharge portion. In the discharge part, the machining voltage supplied to the plurality of wires traveling by contact with the plurality of wires traveling and the power supply is discharged to the workpiece.

  A discharge current (Ign) 508 between the electrodes is a current that flows between the wire 103 and the workpiece 105 during discharge. For example, Ig1, Ig2,..., Ig10 are discharge currents when power is supplied to 10 wires at once.

  A portion where a discharge current flows between the wire 103 and the workpiece 105 due to the discharge is a discharge portion. In the discharge part, the machining voltage supplied to the plurality of wires traveling by contact with the plurality of wires traveling and the power supply is discharged to the workpiece.

A wire current (Iwn) 510 is individually supplied for each wire. For example, each wire current when power is supplied to 10 wires at once is assumed to be Iw1, Iw2,.
A distance L 511 from the feeding point to the discharging point is the length of the wire from the feeding point (power supply) to the discharge point (work).

  FIG. 8 will be described. FIG. 8 shows that a plurality of wires are collectively fed by a batch feeding type electric circuit 2 that feeds machining voltage currents to a plurality of wires (10) in the present invention. Note that the arrangement of the configuration of the wire electrical discharge machining apparatus 1 shown in FIG. 8 is different from the arrangement of the configuration of the wire electrical discharge machining apparatus 1 shown in FIGS. 1 and 2, but the electrical configuration is the same. I want.

  The power supply 104 contacts a plurality of traveling wires at once. An electric discharge pulse is applied from one electric supply 104 provided at a position facing the workpiece 105 to perform electric discharge machining. One power supply circuit 2 is connected to the number (10) of wires 103 around which the main roller is wound. Hereinafter, the machining current (total of each wire current) flowing in the wire will be described with reference to the arrangement of FIG.

  As shown in FIG. 8, since the wire current flowing from the power supply point (position where the power supply 104 and the wire 103 contact) to the discharge point (between the wire 103 and the workpiece 105) flows in two directions of the left and right main rollers, There is wire resistance in each direction. The length 511L1 is the length (distance) between the feeding point and the discharge point when the current flows in the direction of the left main roller, and the wire resistance determined when the length is L1 is Rw1a. The length 511L2 is the length (distance) between the discharge point and the power feeding point when the current flows in the direction of the right main roller. The wire resistance determined when the length is L2 is Rw1b.

  The length that the wire 103 winds the main rollers 8 and 9 once is set to 2 m. Since the power supply 104 and the workpiece 105 are arranged at a distance that is substantially half the length of one turn, the distance between the discharge point and the power supply point (the length L of the wire) is 1 m. Here, the distance of the wire which travels from the power supply to the discharge unit may be longer than 0.5 m.

  The main component of the material of the wire 103 is iron, and the diameter of the wire is 0.12 mm (cross-sectional area 0.06 × 0.06 × πmm 2). Since the wire resistance values Rw1a and Rw1b are the same length (L1 = L2 = 1 m), if each wire resistance value is set to about 20Ω, one wire (Rw1a and Rw1b) The combined wire resistance value of winding the rollers 8 and 9 once is about 10Ω.

  Further, as shown in FIG. 8, in order to make the wire resistance value according to the lengths of L1 and L2 the same resistance value, it is preferable to arrange the power supply 104 so that the lengths of L1 and L2 are the same. There is no particular problem even if the power supply 104 is arranged so that the difference between the lengths of L2 and L2 differs by about 10% (for example, L1 is 1 m and L2 is 1.1 m). When the discharge voltages Vg1 to Vg10 are substantially equal, since Vmn is applied to each of Rw1 to Rw10, Iw1 to Iw10 are all the same wire current. Here, Vmn is obtained from the voltage drop value (Rw1 × Iw1) due to the wire resistance and the discharge voltage (Vgn). The voltage drop from the power supply 104 to the discharge part is a voltage drop due to the resistance of the traveling wire.

  Rw1 = 10Ω (resistance value from the power supply 104 to the discharge part). If Iw1 = 3A and Vgn = 30V, Vmn is as follows. Vmn = 10 (Ω) × 3 (A) + 30V = 60V. Therefore, the voltage drop from the power supply to the discharge unit is larger than 10 V, and the resistance value from the power supply to the discharge unit may be larger than 1Ω. Note that the voltage drop value due to the wire resistance may be set by the wire parameter according to the relational expression of Rwn = (ρ × B) / L.

  Therefore, when Rmn is calculated when the discharge state occurs uniformly and simultaneously between all the 10 wires and the workpiece, the discharge state occurs in all the wires, and Iw1 = 3A flows through the 10 wires. A total machining current of 10 × 3A = 30 A is required between the machining power supply unit and the power supply point, and the voltage drop between the machining power supply unit and the power supply point is 1 / 100th of Vmn (0.6 V). ), Rmn in this case is as follows. The voltage drop from the processing power supply unit to the power supply 104 is smaller than 1 V, and the voltage drop from the processing power supply unit to the power supply electron may be smaller than the voltage drop from the power supply to the discharge unit. Rmn (resistance value from the processing power supply unit 501 to the power supply 104) = 0.6V / 30A = 0.02Ω. Therefore, the resistance value from the machining power supply unit to the supply electron is smaller than 0.1Ω, and the resistance value from the machining power supply unit to the supply electron may be smaller than the resistance value from the supply electron to the discharge unit. Further, the ratio of the voltage drop from the machining power supply unit to the power supply 104 and the voltage drop from the power supply 104 to the discharge unit is 10 times or more. Furthermore, the ratio of the resistance value from the machining power supply unit to the power supply 104 and the resistance value from the power supply unit to the discharge unit is 10 times or more. Here, when 10 machining currents are obtained in consideration of Rmn, (60V-30V) / ((10Ω / 10 pieces) + 0.02Ω) = 29.41A, and the machining current per wire is 2.941A. It becomes.

  Moreover, even if one wire current flows when the discharge state does not occur uniformly and simultaneously between all 10 wires and the workpiece, the machining current per wire is (60V-30V) / (10Ω + 0.02Ω) = 2.994 A, so that there is no significant difference even when the discharge state occurs uniformly and simultaneously between all ten wires and the workpiece.

As a further effect, when power is supplied to a plurality of N wires (the main rollers 8 and 9 are wound N times) at one location (in a lump), power is supplied individually for each wire. The machining speed is 1 / N compared to the machining speed at the time, but according to the present invention, even when power is supplied to N wires at one place (collective), The same processing speed can be maintained.
FIG. 9 will be described. FIG. 9 shows an example of a wire electric discharge machining system of an individual power feeding method as in FIG.

  Power is supplied to a wire wound around four main rollers by arranging a pair of individual power supply electrons at a position close to the workpiece 105 to be processed. Two (a pair of) individual power supply electrons are provided for each turn of the wound wire. Further, upstream of the pair of individual power supply electrons, there is an internal resistance Rm405 for limiting the upper limit of the machining current flowing through the pair of individual power supply electrons. In FIG. 9, it should be noted that the electric circuit other than the portion related to the internal resistance Rm405 is omitted for the sake of simplicity.

  The internal resistance Rm405 is provided in the electrical wiring in order to limit the upper limit of the machining current value for each wire traveling in parallel. The resistance value of the internal resistance Rm405 is sufficiently larger than the resistance value Rw due to the length of the wire (Rm >> Rw). The reason for this is that the internal resistance Rm 405 individually controls the machining current value that flows for each turn of the wire.

  The length of the wire between the work discharge point and the individual power supply 204a is 411L1. The length 411L1 of the wire is a resistance value by the wire and corresponds to Rw1a. The length of the wire between the work discharge point and the individual power supply 204b is 411L2. The length 411L2 of the wire is a resistance value by the wire and corresponds to Rw1b. The length of the wire from the individual power supply 204b to the individual power supply 204c on the side not passing through the discharge point of the workpiece is set to 412L. The length 412L of the wire is a resistance value by the wire and corresponds to Rw12.

  As shown in FIG. 9, 412L (second distance) in which the wire travels between the pair of supply electrons without passing through the discharge unit side is longer than 411L1 (first distance). This is because if the resistance value due to the length of 412L is not made larger than the resistance value due to the length of 411L1, a machining current flows in a direction in which the resistance value Rw12 of the wire is present. For example, when 411L1 or 411L2 (first distance) is 1 m and 412L (second distance) is 4 m, the resistance value (impedance) by the length of 412L is the resistance by the length of 411L1 or 411L2. It becomes larger than the value (impedance).

  FIG. 10 will be described. FIG. 10 is a diagram for virtually explaining the arrangement relationship of the wire 103, the power supply 204, and the discharge point of the workpiece by virtually expanding the wound wire shown in FIG. 9 into a straight line. FIG. 10 is an equivalent circuit obtained by simplifying the machining power supply unit 401 from FIG. 9.

  When the wires wound around the four main rollers are virtually developed, the individual power supply 204a to the individual power supply 204f are arranged on one wire 103 with respect to the discharge points W1 to W3 of the workpiece. Become. There are discharge points (W1 to W3) of the workpiece between the supply electrons 204a and 204b, the supply electrons 204c and 204d, and the supply electrons 204e and 204f, and a discharge is generated at the position of each discharge point.

  In order to individually limit the machining current (Iw1 to Iw3) flowing from the machining power supply unit 401 and the discharge points (W1 to W3) of the workpiece, the internal resistance Rm for each installed wiring is Rm1, Rm2, and Rm3, respectively. To do. In FIG. 10, the switching element (transistor) 403 for pulsing the machining current shown in FIG. 4 and the discharge voltage Vg are omitted.

  The resistance value according to the length of the wire between the workpiece discharge point W1 and the individual power supply 204a is defined as Rw1a. The resistance value according to the length of the wire between the workpiece discharge point W1 and the individual power supply 204b is defined as Rw1b. The resistance value according to the length of the wire between the work discharge point W2 and the individual power supply 204c is Rw2a. A resistance value according to the length of the wire between the work discharge point W2 and the individual power supply 204d is defined as Rw2b. The resistance value according to the length of the wire between the workpiece discharge point W3 and the individual power supply 204e is Rw3a. The resistance value according to the length of the wire between the workpiece discharge point W3 and the individual power supply 204f is Rw3b.

  Here, since the circuit from W1 to the power supply on both sides is a parallel circuit, the resistance values Rw1a and Rw1b of the wire are assumed to be the resistance value Rw1 of the wire based on the length of the wire (411L) for convenience. Similarly, the resistance values of the combined wires by the parallel circuit from W2 and W3 to the supply electrons on both sides are denoted as Rw2 and Rw3, respectively.

  Furthermore, the resistance value of the wire according to the length of the wire (412L) from the individual power supply 204b to the individual power supply 204c via the side not on the discharge point side is defined as Rw12. The resistance value of the wire according to the length (412L) of the wire from the individual power supply 204d to the individual power supply 204e via the one not on the discharge point side is defined as Rw23.

FIG. 11 will be described. FIG. 11 shows an individual electric power feeding type wire electric discharge machining system in which electric discharges occur simultaneously at the discharge points W1 to W3 and currents Iw1 to Iw3 flow through the wires. The machining power supply unit 401 is simplified from FIG. This is an equivalent circuit.
In this equivalent circuit, machining currents Iw1, Iw2, and Iw3 flowing from each discharge point of one turn of the wire can be expressed as (Equation 1) below.
・ Iw1 = Vm / (Rw1 + Rm1)
・ Iw2 = Vm / (Rw2 + Rm2)
・ Iw3 = Vm / (Rw3 + Rm3)

Here, when the supply electron 204 is arranged at a position close to the discharge point, the length of the wire from the supply electron 204 to the discharge point W is shortened, and the resistance values Rw1 to Rw3 by each wire are the internal values of the wires. Since it is sufficiently smaller than the resistances Rm1 to Rm3, Rw1, Rw2, and Rw3 in Formula 1 can be ignored as compared with Rm1, Rm2, and Rm3. Here, the potential of the power supply 204a or 204b is V1, the potential of the power supply 204c or 204d is V2, and the potential of the power supply 204e or 204f is V3. Then, the potentials V1, V2, and V3 and Iw1, Iw2, and Iw3 at the positions of the respective power supply electrons can be simplified to the expression 2 as follows in the expression 1.
・ V1 = Iw1 * Rm1 Iw1 = Vm / Rm1
・ V2 = Iw2 * Rm2 Iw2 = Vm / Rm2
・ V3 = Iw3 * Rm3 Iw3 = Vm / Rm3

  Therefore, if Rm1, Rm2, and Rm3 are all set to substantially the same resistance value, and if substantially the same machining current flows through Iw1, Iw2, and Iw3, the potentials of V1, V2, and V3 from simplified formula 2 are as follows. It can be seen that all are almost equal. Therefore, in this case, the machining current does not flow through Rw12 connecting the same potentials V1 and V2, and the machining current does not flow through Rw23 connecting the same potentials V2 and V3.

FIG. 12 will be described. FIG. 12 shows an individual electric power feeding type wire electric discharge machining system in which no electric discharge is generated at the discharge points W1 to W3, but only electric discharge Iw2 flows in each wire. FIG. 10 shows an equivalent circuit obtained by simplifying the machining power supply unit 401 from FIG.
In this case, the machining current Iw2 flows from the power supply 204c in three paths (directions). Therefore, the current value can be obtained by Equation 3 as follows: Iw2 = Vm / (Rw2 + Ra)
However, Ra is defined by Formula 4 as follows.
Ra = 1 / (1 / (Rw12 + Rm1) + 1 / Rm2 + 1 / (Rw23 + Rm3))

Here, as in the case described with reference to FIG. 11, when the power supply 204 is arranged at a position close to the discharge point, the length of the wire from the power supply 204 to the discharge point W is shortened and depends on each wire. The resistance values Rw1 to Rw3 are sufficiently smaller than the internal resistances Rm1 to Rm3 of each wiring, and Rw1, Rw2, and Rw3 can be ignored. If the potential of the power supply 204c or 204d is V2, the power supply from Equation 3 The potential V2 at the position can be simplified by Equation 5 as follows.
・ Iw2 = V2 / Ra
Here, Ra is Equation 6 as follows.
Ra = 1 / (1 / (Rw12 + Rm1) + 1 / Rm2 + 1 / (Rw23 + Rm3))
Therefore, it can be seen that the current value of Iw2 is determined depending on the resistance values of Rw12 and Rw23.

  When the power supply 204 is arranged at a position close to the discharge point, the resistance of the wire due to the length of the wire (412L) from the individual power supply 204b to the individual power supply 204c via the one not on the discharge point side. The value Rw12 is larger than Rm2, and since Rm2 is not a large resistance, the wire current flowing in the direction of Rw12 is small, and the wire current flows mainly in the direction of Rm2. Similarly, the resistance value Rw23 of the wire due to the length (412L) of the wire from the individual power supply 204d to the individual power supply 204e via the one not on the discharge point side is larger than Rm2, and Rm2 is Since it is not a large resistance, the wire current flowing in the direction of Rw23 is small, and the wire current flows mainly in the direction of Rm2.

However, as shown in FIG. 12, when the power supply 204 is arranged at a position far from the discharge point, the distance between the individual power supply 204b and the individual power supply 204c that is not on the discharge point side. The wire resistance value Rw12 due to the length of the wire (412L) is sufficiently smaller than Rm2, Rw12 can be ignored, Iw2 flows in three directions, and its current values I1, I2, I3 Respectively becomes the following Expression 7.
・ I1 = Vm / Rm1
・ I2 = Vm / Rm2
・ I3 = Vm / Rm3

  Therefore, the wire current I1 also flows in the direction of Rw12. Similarly, the resistance value Rw23 of the wire due to the length of the wire (412L) from the individual power supply 204d to the individual power supply 204e via the one not on the discharge point side is sufficiently smaller than Rm2, and Rw23 is It can be ignored and the wire current I3 also flows in the direction of Rw23.

  Thus, in order to prevent the wire currents I1 and I3 from flowing in the directions of Rw12 and Rw23, it is necessary to dispose the power supply 204 near the discharge point and increase the resistance values of Rw12 and Rw23. When the internal resistances Rm1, Rm2, and Rm3 are provided for each wiring, it is necessary to place the individual power supply 204 at a position as close as possible to the discharge point as shown in FIG. The power supply 204 cannot be arranged.

  FIG. 13 will be described. When the configuration of four main rollers is used as shown in FIG. 13, there are the following problems. In the configuration of the four main rollers, if the power supply 104 is arranged as in FIG. 1, the distance between the power supply and the work (discharge point), that is, the wire length 511L becomes long. If the wire length 511L becomes too long, the resistance value (impedance) of the wire also increases too much, so that the discharge current value decreases due to the voltage drop. Furthermore, since the processing speed (processing rate) is proportional to the discharge current value, the processing speed also decreases.

  There is a method of increasing the applied voltage and increasing the current in order to prevent this reduction in the processing speed. However, there is a problem that the electric power corresponding to the increased voltage is consumed and the efficiency is lowered.

  The wire electric discharge machining system may not be able to arbitrarily set the distance from the feeding point to the discharge point, that is, the wire length L, due to mechanical size restrictions such as the wire guide, workpiece size, and machining fluid tank.

  In order to arrange the power supply and the work inside the wire loop, the main roller has four main rollers. In this configuration, a pair of power supply units are arranged on the left and right sides at an equal distance from the work. The electric power supplies 104a and 104b need only have the same distance from the workpiece, and can be arranged at arbitrary positions.

  Thus, the resistance value (impedance) determined by the length of the wire can be arbitrarily adjusted, and the discharge current value can be limited by the resistance value (impedance) determined by the wire length as in FIG. The same discharge current flows through the plurality of wires, and each current value can be arbitrarily adjusted under the same applied voltage. In other words, even when the total length of the wire is increased due to the configuration of four main rollers, the same electrical characteristics as in FIG. 1 can be provided.

  The pair of supply electrons 104a and 104b are respectively arranged at positions where 511L1 and 511L2 (first distance) along which the wire from the discharge part W travels are approximately equal. In the example of FIG. 13, they are arranged on both sides. Furthermore, the driving means capable of moving the pair of the power supply and the power supply unit is disposed inside the wire around which the plurality of main rollers are wound.

  As shown in FIG. 13, by increasing the number of feeding points at one place to two places (a pair of feeding electrons), the distance from the feeding point to the discharge point (discharge section) can be given flexibility and the impedance can be adjusted. I did it.

  Since the drive unit 1901 shown in FIG. 16 slide-drives the entire power supply unit 10, a pair of power supply units are brought into contact with the wire so that 511L1 (first distance) on which the wire travels fluctuates, and The contact position can be moved.

  Furthermore, since the pair of power supply and drive means are arranged inside the wire that winds the plurality of main rollers, the length of the electrical wiring branching to each is shortened, and the power supply device to the pair of power supplies The resistance value can be further reduced.

  In FIG. 13, 512L (second distance) in which the wire travels between the pair of supply electrons without passing through the discharge part side is shorter than 511L1 (first distance). This is because even if the resistance value due to the length of 512L is made smaller than the resistance value due to the length of 511L1, no machining current flows in the direction in which the resistance values Rw12 and Rw23 of the wire are present. For example, when 511L1 and 511L2 (first distance) are set to 2 m and 512L (second distance) is set to 1.9 m, the resistance value (impedance) due to the length of 512L depends on the length of 511L1. It becomes smaller than the resistance value (impedance).

  As shown in FIG. 1, the traveling means of FIG. 13 also winds one continuous wire around a plurality of (four) main rollers a plurality of times (for example, about 2000 times), so that the wires are arranged at substantially equal intervals. And run in the same direction. As described above, when 511L1 and 511L2 (first distance) are set to 2 m and 512L (second distance) is set to 1.9 m, the traveling distance of the wire that goes around the plurality of main rollers is 5.9 m. . Here, 512L (second distance) may be less than one third of the travel distance of the wire that makes one turn around the plurality of main rollers.

  FIG. 14 will be described. FIG. 14 is an expression similar to FIG. 10 and shows the arrangement relationship between the wires and the electrons and the discharge circuit in the batch power supply method. Here, the major difference from FIG. 10 is that there is no internal resistance Rm1 to Rm3 for each wiring for limiting the maximum current value flowing through the wiring in accordance with the wiring resistance value.

  FIG. 15 will be described. FIG. 15 shows a wire electric discharge machining system which is a collective power feeding system in which no discharge is generated at the discharge points W1 to W3, but only the discharge point W2 is discharged and only the current Iw2 is flowing. This is an equivalent circuit in which the power supply 104 is simplified.

  There is no current limiting resistor from the power supply 104a and 104b to the cathode of the power supply Vmn501. For this reason, the potentials V1, V2, and V3 at the positions of the supply electrons are equal to V1 = V2 = V3, so that no machining current flows in the direction in which the wire resistance values Rw12 and Rw23 are present.

  That is, in the power feeding method (Rmn << Rwn) in which the internal resistance is eliminated in the electrical wiring as shown in FIG. 13, no machining current flows in the directions of Rw12 and Rw23. Therefore, as shown in FIG. There is no necessity to arrange the individual power supply 204 at a position as close as possible to the discharge point unlike the power supply method (Rm >> Rw) having an internal resistance, and the power supply method (Rmn << Rwn) in FIG. Therefore, there is no problem even if the arrangement position of the pair of power supply 104 is moved.

  That is, the resistance value from the power supply device to the pair of supply electrons is sufficiently smaller than the resistance value by 511L1 (first distance) in which the wire from one of the pair of supply electrons to the discharge part (discharge point W) travels. The machining current does not flow in the direction in which the wire resistance values Rw12 and Rw23 are present.

  When the machining voltage is fed across a plurality of (for example, 10) wires running in parallel with each other, a pair of power supply electrons has the same potentials V1, V2, and V3.

FIG. 16 will be described. A-C in FIG. 16 will be described. FIG. 16A shows a state where the driving unit 1901 slides the power supply unit upward (or on the right side with respect to the slide surface) and the power supply 104b is arranged.
FIG. 16B shows a state in which the driving unit 1901 slides the power supply unit to the center and the power supply 104b is arranged.
FIG. 16C shows a state in which the driving unit 1901 slides the power supply unit downward (or left side with respect to the slide surface) and the power supply 104b is arranged.

FIG. 17 will be described. In the embodiment of the present invention, the drive mechanism 1901 is a mechanism that moves the power supply position of the power supply 104 that contacts the wire surface, for example, by sliding the entire power supply unit 10 in parallel along the wire surface. With the driving mechanism 1901, the fixed position of the power supply 104 can be freely changed. The mechanism for freely changing the fixed position is not limited to the slide, and the electronic supply unit 10 can be placed at an arbitrary position selected from a number of predetermined fixed positions so that it can be freely changed. It may be rearranged manually by the user.
Thus, the wire length (511L) can be freely adjusted by sliding the entire power supply unit 10 in parallel along the wire surface.

  That is, the wire length (511L) is an impedance component depending on the length of the wire from the discharge unit to the power supply 104, and the drive mechanism 1901 is a mechanism for adjusting an optimum impedance component for each work.

  Even when workpieces are made of the same material and have the same shape, when a large number of workpieces are produced, workpieces with specific resistance values that are not constant may be produced for each production lot of the production process.

For example, when a workpiece whose measured specific resistance value is lower than the control reference value is measured in advance before electric discharge machining for each workpiece production lot, the workpiece is fed from the workpiece as shown in FIG. The electrons 104a and 104b are placed away from each other.
As shown in FIG. 17, the power supply unit 10 is moved by the driving unit 1901 and the power supply units 104 a and 104 b are arranged, so that the impedance component from the discharge unit to the power supply units 104 a and 104 b can be adjusted to be large. .
If the impedance component from the discharge unit to the supply electrons 104a and 104b is increased, the amount of decrease in the specific resistance value below the management reference value can be corrected by the increase in the impedance component.

For example, when a workpiece whose measured resistivity value is higher than the control reference value is measured in advance before electric discharge machining for each workpiece production lot, and the workpiece is subjected to electric discharge machining as shown in FIG. 104a and 104b are arranged close to each other.
As shown in FIG. 18, by moving the power supply unit 10 by the driving unit 1901 and arranging the power supply 104a and 104b, the impedance component from the discharge unit to the power supply 104a and 104b can be adjusted to be small. .
If the impedance component from the discharge unit to the supply electrons 104a and 104b is reduced, the increase in the specific resistance value over the management reference value can be corrected by the decrease in the impedance component.
In summary, when the measured specific resistance value of the workpiece is equal to the management reference value, the supply electrons 104a and 104b are arranged at the position B in FIG. When the measured specific resistance value of the workpiece is lower than the management reference value, the supply electrons 104a and 104b are arranged at the position A in FIG. If the measured specific resistance value of the workpiece is higher than the management reference value, the power supply 104a, 104b may be arranged at the position C in FIG.

  In this way, since the increase / decrease in the specific resistance value of the workpiece that occurs in each production lot can be corrected by the increase / decrease in the impedance component, the specific resistance for each production lot can be maintained even when the setting conditions such as the machining voltage remain constant. A workpiece whose value is not constant can be continuously subjected to electric discharge machining.

In other words, when electric discharge machining is performed by supplying a machining voltage to a plurality of wires at once, the machining condition setting when resistance variation for each workpiece occurs is collectively corrected using the resistance (impedance component) of the wire. be able to.
FIG. 19 will be described. FIG. 19 is a hardware configuration diagram of the control computer 1000 built in the wire electric discharge machining apparatus.

  In FIG. 19, an MPU (CPU) 1001 comprehensively controls each device and controller connected to the system bus 1004. In addition, the ROM 1002 or the external memory 1011 is necessary for realizing a BIOS (Basic Input / Output System) or an operating system program (hereinafter referred to as an OS) that is a control program of the CPU 1001 and a function executed by each server or each PC. Various programs to be described later are stored.

  The RAM 1003 functions as a main memory, work area, and the like for the CPU 1001. The CPU 1001 implements various operations by loading a program or the like necessary for execution of processing from the ROM 1002 or the external memory 1011 to the RAM 1003 and executing the loaded program.

  An input controller 1005 controls input from a keyboard (KB) 1009 or a pointing device such as a mouse (not shown). The video controller 1006 controls display on the display unit 1010. Note that the display unit 1010 is not limited to a CRT, but may be another display such as a liquid crystal display. These are used by the administrator as needed. Further, the display unit may include a touch panel function in which the user specifies a target position in the display screen with a finger, a pen, or the like.

  The memory controller 1007 is connected via an adapter to a hard disk (HD), flexible disk (FD), or PCMCIA card slot for storing a boot program, various applications, font data, user files, editing files, various data, and the like. Controlling access to an external memory 1011 such as a CompactFlash (registered trademark) memory.

  The communication I / F controller 1008 is connected to and communicates with an external device via a network (communication line) such as a LAN 1012 or WAN, and executes communication control processing in the network. For example, communication using TCP / IP is possible.

  Note that the CPU 1001 can perform display on the display unit 1010 by executing outline font rasterization processing on a display information area in the RAM 1003, for example. Further, the CPU 1001 enables a user instruction with a mouse cursor (not shown) on the CRT.

  Various programs to be described later for realizing the present invention are recorded in the external memory 1011 and are executed by the CPU 1001 by being loaded into the RAM 1003 as necessary. Further, data files and data tables used when executing the program are also stored in the external memory 1011 or the storage unit.

The program in the present invention is a program that can be executed by the control computer 1000 for wire electric discharge machining operation according to the wire electric discharge machining method, and the storage medium of the present invention is stored as a program that can execute the wire electric discharge machining operation. Yes.
(Other embodiments of the present invention)

  As described above, the recording medium on which the program for realizing the functions of the above-described embodiments is recorded is supplied to the wire electric discharge machining apparatus, and the system or the computer (or CPU or MPU) in the apparatus reads the computer temporarily. It goes without saying that the object of the present invention can also be achieved by reading and executing a program stored in a possible recording medium.

  In this case, the program itself read from the recording medium realizes the novel function of the present invention, and the non-transitory computer-readable recording medium storing the program constitutes the present invention. .

  As a recording medium for supplying the program, for example, a flexible disk, hard disk, optical disk, magneto-optical disk, CD-ROM, CD-R, DVD-ROM, BD-ROM, magnetic tape, nonvolatile memory card, ROM , EEPROM, silicon disk, etc. can be used.

  Further, by executing the read program, not only the functions of the above-described embodiments are realized, but also an OS (operating system) operating on the computer based on the instruction of the program performs the actual processing. Needless to say, a case where the function of the above-described embodiment is realized by performing part or all of the processing is also included.

  Furthermore, after the program read from the recording medium is written to the memory provided in the function expansion board inserted into the computer or the function expansion unit connected to the computer, the function expansion board is based on the instructions of the program code. It goes without saying that the case where the CPU or the like provided in the function expansion unit performs part or all of the actual processing and the functions of the above-described embodiments are realized by the processing.

  Further, the present invention may be applied to a system composed of a plurality of devices or an apparatus composed of a single device. Needless to say, the present invention can be applied to a case where the present invention is achieved by supplying a program to a system or apparatus. In this case, by reading a recording medium storing a program for achieving the present invention into the system or apparatus, the system or apparatus can enjoy the effects of the present invention.

Furthermore, by downloading and reading a program for achieving the present invention from a server, database, etc. on a network by a communication program, the system or apparatus can enjoy the effects of the present invention.
In addition, all the structures which combined each embodiment mentioned above and its modification are also included in this invention.

DESCRIPTION OF SYMBOLS 1 Wire electrical discharge machining apparatus 2 Power supply device 3 Work feeding part 10 Electric supply unit 103 Wire electrode 104 Electric supply 105 Work (silicon ingot)
204 Feeder 511L1 Wire length (first distance)
511L2 wire length (first distance)
512L wire length (second distance)

Claims (8)

A wire electric discharge machining apparatus that slices a workpiece with wires arranged in parallel,
Traveling means for traveling so that the wires are arranged side by side;
A power supply that feeds a machining voltage to a plurality of wires in the wires that run so as to be arranged side by side;
By moving the position where the power supply supplies power to the plurality of wires, the processing voltage supplied to the plurality of wires discharges between the workpiece and the plurality of wires from the discharge unit to the power supply. Adjusting means for adjusting the impedance of the wire to an arbitrary value;
The adjusting means further includes driving means for moving a position where the power supply supplies power to the plurality of wires,
The adjustment unit corrects the difference in specific resistance measured for each workpiece before the workpiece is subjected to electric discharge machining by moving the position where the power supply is supplied by the driving unit using the impedances of the plurality of wires. wire electric discharge machining apparatus according to claim and to Turkey. A wire electric discharge machining apparatus that slices a workpiece with wires arranged in parallel,
Traveling means for traveling so that the wires are arranged side by side;
A power supply that feeds a machining voltage to a plurality of wires in the wires that run so as to be arranged side by side;
By moving the position where the power supply supplies power to the plurality of wires, the processing voltage supplied to the plurality of wires discharges between the workpiece and the plurality of wires from the discharge unit to the power supply. Adjusting means for adjusting the impedance of the wire to an arbitrary value;
A machining power supply that feeds the machining voltage to the power supply;
With
The processing is, the resistance to the supply electrons from the power supply unit, said any of said plurality of which is adjusted to a value of the wire characteristics and to Ruwa unpleasant electrical discharge machining apparatus is smaller than the impedance due. The power supply is arranged in a pair on both sides of the workpiece,
The adjusting means arranges the pair of supply electrons so that a first distance by the plurality of wires from the discharge unit to the pair of supply electrons becomes equal, and the pair of supply electrons from the discharge unit. The wire electric discharge machining apparatus according to claim 1, wherein an impedance of the plurality of wires up to electrons is adjusted to an arbitrary value. The adjusting means is configured so that a second distance by the plurality of wires traveling between the pair of supply electrons without passing through the discharge unit side is shorter than the first distance. A pair of supply electrons are arranged, and the impedance of the plurality of wires traveling between the pair of supply electrons without passing through the discharge section side is from the discharge section to the pair of supply electrons. The wire electrical discharge machining apparatus according to claim 3 , wherein the wire electrical discharge machining apparatus is adjusted so as to be smaller than an impedance due to the plurality of wires. The travel means winds the wire around a plurality of main rollers so that the wires travel in parallel,
The adjusting means arranges each of the pair of power supply units so that the second distance is less than one third of the travel distance of the wire that makes one turn around the plurality of main rollers. Item 5. A wire electric discharge machining apparatus according to Item 4 . The pair of the power supply terminal, a wire electrical discharge machining apparatus according to any one of claims 3 to 5 wherein the machining voltage equal potential, characterized in that it is powered. A traveling means for slicing the workpiece with the wires arranged in parallel, traveling so as to arrange the wires in parallel, and a power supply that collectively supplies a machining voltage to a plurality of wires in the wires traveling so as to be arranged in parallel A processing method in a wire electric discharge machining apparatus comprising:
Discharge in which the machining voltage supplied to the plurality of wires discharges between the workpiece and the workpiece by the adjustment means of the wire electric discharge machining apparatus moving the position where the power supply supplies power to the plurality of wires. An adjustment step of adjusting the impedance of the plurality of wires from the unit to the power supply to an arbitrary value,
The adjusting step further includes a driving step of moving a position where the power supply supplies power to the plurality of wires,
Using the impedance of the plurality of wires in the adjustment step, the difference in specific resistance measured for each workpiece before the electric discharge machining of the workpiece is moved, and the position where the power supply is fed in the driving step is moved. A processing method characterized by correcting. A traveling means for slicing the workpiece with the wires arranged in parallel, traveling so as to arrange the wires in parallel, and a power supply that collectively supplies a machining voltage to a plurality of wires in the wires traveling so as to be arranged in parallel And a machining power source unit that feeds the machining voltage to the power supply, and a machining method in a wire electric discharge machining apparatus,
Discharge in which the machining voltage supplied to the plurality of wires discharges between the workpiece and the workpiece by the adjustment means of the wire electric discharge machining apparatus moving the position where the power supply supplies power to the plurality of wires. An adjustment step of adjusting the impedance of the plurality of wires from the unit to the power supply to an arbitrary value,
A processing method, wherein a resistance value from the processing power supply unit to the power supply is smaller than an impedance due to the plurality of wires adjusted to the arbitrary value.

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