CN103954395A - Device for manufacturing minitype optical fiber Fabry-Perot pressure sensor and corresponding manufacturing method - Google Patents
Device for manufacturing minitype optical fiber Fabry-Perot pressure sensor and corresponding manufacturing method Download PDFInfo
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Abstract
The invention discloses a device for manufacturing a minitype optical fiber Fabry-Perot pressure sensor. The device for manufacturing the minitype optical fiber Fabry-Perot pressure sensor comprises a welding module, a cutting module, a first moving module, a second moving module, an imaging module and a monitoring module. The welding module is used for welding optical fibers to hollow glass tubes. The cutting module is fixedly connected with the welding module and is used for being matched with the imaging module, the first moving module and the second moving module to carry out precise locating and cutting on a diaphragm and the cavity length of a Fabry-Perot cavity. The first moving module and the second moving module are used for driving an object to be processed to move, and assisting the cutting module in carrying out cutting. The imaging module is used for precisely measuring the cutting end face angle of the object to be processed, observing the quality of the Fabry-Perot cavity through collected images, and monitoring the geometric characteristics of the Fabry-Perot cavity. The monitoring module is used for monitoring the quality of the Fabry-Perot cavity in real time, and monitoring the photometric characteristics of the Fabry-Perot cavity. The device for manufacturing the minitype optical fiber Fabry-Perot pressure sensor solves the technical problems that the diaphragm is difficult to connect, the cavity length is hard to control and the diaphragm is thinned in existing Fabry-Perot cavity manufacturing, the manufacturing success rate of the minitype optical fiber Fabry-Perot pressure sensor is improved greatly, and the consistency of manufacture processes is improved.
Description
Technical field
The present invention relates to fiber optic sensor technology field, relate in particular to a kind of producing device and corresponding method for making of mini optical fibre method amber pressure transducer.
Background technology
Along with the development of minimally-invasive treatment, implanted pressure transducer becomes the important tool of the human body internal pressures such as intracranial pressure, intracardiac pressure, blood pressure, and mini optical fibre method amber pressure transducer is due to features such as its volume is small, highly sensitive, bio-compatible, anti-electromagnetic interference (EMI), become study hotspot than electric sensor.
In recent years, occurred the relevant report of a lot of medical miniature Fabry-perot optical fiber pressure transducers, wherein the miniature method amber pressure transducer of full optical fiber, especially causes people's concern, but its manufacturing technology becomes the great technological difficulties that hinder its development.The making step of general law amber pressure transducer comprises: diaphragm making and connection, long accurate control and the attenuate diaphragm in chamber.
Aspect the producing device and method for making of mini optical fibre method amber pressure transducer, micro electro mechanical system (MEMS) technology is comparatively ripe at present, and existing company product is all also based on this technology, but its manufacturing process is very complicated, and apparatus expensive.Patent US8559770B2 and CN101655353A corrode optical fiber by hydrofluorite to make sensor as Fa-Po cavity, but the sensor that this method for making makes, Fa-Po cavity end face poor quality.The people such as the Nan Wu of University of Massachusetts in 2013 have reported a kind of pre ure tra ducer based on silicon dioxide diaphragm, but the making of its diaphragm be connected all comparatively difficulty; The same year, Wuhan University of Technology reported a kind of intracranial pressure sensor of hollow glass tube as Fa-Po cavity that use, but its chamber length is difficult to accuracy controlling; The people such as the Bremer.K of University of Limerick were studying the mini optical fibre method amber pressure transducer that can simultaneously measure temperature and pressure so far always from 2009, it is made difficult point and is to seal two fusion points of Fa-Po cavity and the precise cutting of diaphragm, completes respectively by discrete heat sealing machine and cutter.Not yet there is at present the optical fiber splicer with precision positioning cutting function of ripe making optical fibre device, patent US2013/0205835A1 has proposed the device that a kind of cutting and welding integrate, the method of how to carry out precision positioning cutting on heat sealing machine has been described, the integrated approach of its design not mentioned cutter and heat sealing machine, and ignore the working load of heat sealing machine motor system, simultaneously when making mini optical fibre method amber pressure transducer, the monitoring modular of its disappearance Fa-Po cavity.In the Patents CN103018835A of Chengdu Jiekangte Technology Co.Ltd's application, the accurately optical fiber splicer of positional dissection of design, if be used for facture amber pressure transducer, can not monitor in real time Fa-Po cavity end face quality, so can not solve equally the making difficult point of Fa-Po cavity.
From above report, the making difficult point of mini optical fibre method amber pressure transducer is: diaphragm obtain be connected, accurate control that chamber is long and the real-time monitoring of Fa-Po cavity quality.End surface dislocation, mirror tilt, Fa-Po cavity pollution etc. all can cause that method amber pressure transducer makes unsuccessfully in addition, and existing Fa-Po cavity producing device can not well address the above problem, can not be well by the positioning problems occurring.Making difficult point based on above-mentioned Fa-Po cavity just, the present invention proposes producing device and the corresponding method for making of Fa-Po cavity in a kind of method amber pressure transducer, solve above-mentioned technological difficulties, the more important thing is that each step the invention enables in manufacturing process is all controlled, improved the consistance of its making.
Summary of the invention
One object of the present invention is to provide a kind of device of making mini optical fibre method amber pressure transducer, can realize the integrated of welding, precision positioning cutting, on-line monitoring Fa-Po cavity, with solve existing diaphragm obtain be connected, the manufacture craft difficult problem such as the long accurate control in chamber, diaphragm attenuate, its image-forming module and monitoring modular, make sensor in the time that manufacturing process goes wrong, can be rapidly by positioning problems.Meanwhile, each processing step of sensor production is controlled, thereby increases the consistance of its making.
Another object of the present invention is to provide a kind of method of utilizing this producing device to make mini optical fibre method amber pressure transducer, with solve existing diaphragm obtain be connected, the manufacture craft difficult problem such as the long accurate control in chamber, diaphragm attenuate, thereby greatly increase the operability of sensor production, improved the consistance of sensor.
According to an aspect of the present invention, propose a kind of producing device of mini optical fibre method amber pressure transducer, this producing device comprises: welded module, and cutting module, the first motion module, the second motion module, image-forming module and monitoring modular, wherein:
Described welded module is for welding optic fibre and hollow glass tube;
Described cutting module is fixedly connected with described welded module, for matching with described image-forming module and the first motion module, the second motion module, for location and the cutting of the chamber progress row precision of diaphragm and Fa-Po cavity;
Described the first motion module and the second motion module are used for driving pending object of which movement, and auxiliary described cutting module cuts;
Described image-forming module is used for accurately measuring the cutting end plane angle of pending object, and passes through the quality of the image viewing Fa-Po cavity gathering, and monitors the geometrical property of Fa-Po cavity;
Described monitoring modular is used in the time of facture amber pressure transducer, the quality of Real-Time Monitoring Fa-Po cavity, the optical characteristics of monitoring Fa-Po cavity.
According to a further aspect in the invention, also propose a kind of method of utilizing described producing device to make mini optical fibre method amber pressure transducer, described method for making comprises the following steps:
Step 1, start cutting module cutting optical fibre, and monitor the cutting angle of fiber end face by display screen;
Step 2, by multiple spot burning-on method welding one optical fiber and hollow glass tube, wherein, the solder joint at fiber end face place is expressed as welding solder joint a;
Step 3, by another optical fiber of multiple spot burning-on method welding and hollow glass tube, form sealing Fa-Po cavity;
Step 4, for described hollow glass tube, one end at it away from Fa-Po cavity, and carry out precision positioning and cutting apart from welding solder joint a a distance, mineralization pressure sensitive thin film sheet;
The presser sensor diaphragm that step 5, meticulous attenuate obtain, obtains mini optical fibre method amber pressure transducer.
Can find out from technique scheme, the present invention has following beneficial effect:
1, mini optical fibre method amber pressure transducer producing device of the present invention, the integrated function of welding, precision positioning cutting and on-line monitoring Fa-Po cavity, wherein, image-forming module is observed mirror tilt situation, end surface dislocation situation, is had contamination-free etc.; Monitoring modular is observed interference spectrum, is read contrast, reflective light intensity, and Real-Time Monitoring chamber is long etc., if while going wrong in the manufacturing process of sensor like this, and can be rapidly by positioning problems;
2, the quality that the present invention can on-line monitoring Fa-Po cavity, not only can, by the geometrical property of imaging modulus on-line monitoring Fa-Po cavity, can also pass through the optical characteristics of monitoring modular on-line monitoring Fa-Po cavity;
3, the invention solves the problem of the long precision control in chamber, the length that the present invention not only can accuracy controlling Fa-Po cavity, the optical characteristics of the Fa-Po cavity that can also reflect according to monitoring modular determines that best Fa-Po cavity chamber is long;
4, the invention solves the difficult problem that Fa-Po cavity diaphragm connects, the present invention is by inserting optical fiber hollow glass tube welding, then start to form multiple fusion points in the overlapping welding of discharging successively from fiber end face, so first, can ensure the quality (reflectivity and the depth of parallelism) as diaphragm end face, the success ratio that secondly can increase cutting operation in subsequent step, finally can reduce temperature cross sensitivity;
5, the present invention has improved the consistance of sensor production, ends cutting angle of the present invention can be accurate to 0.1 °, diaphragm cutting attenuate can be accurate to 1 μ m, diaphragm corrosion thinning can be accurate to 0.1 μ m, the long regulation and control in chamber can be accurate to 0.1 μ m, fusion point can pass through the relative position that regulates discharge capacity, discharge time and regulate the optical fiber of sparking electrode and required welding by three-dimensional trim holder, obtains various welding effects.
Brief description of the drawings
Fig. 1 is the system schematic of mini optical fibre method amber pressure transducer producing device of the present invention;
Fig. 2 is the structural representation of mini optical fibre method amber pressure transducer producing device of the present invention;
Fig. 3 is the structural representation of blade fixing device of the present invention;
Fig. 4 is the structural representation of cutter head starter gear of the present invention;
Fig. 5 is the fabrication processing figure of mini optical fibre method amber pressure transducer of the present invention;
Fig. 6 is the operation chart of cutting optical fibre of the present invention;
Fig. 7 is that the present invention inserts the operation chart of carrying out welding in hollow glass tube as the optical fiber of diaphragm;
It is long and seal the schematic diagram of Fa-Po cavity by welding that Fig. 8 is that the present invention monitors chamber;
Fig. 9 is the precision positioning cutting schematic diagram of diaphragm of the present invention;
Figure 10 is the present invention's schematic diagram of the mobile platform of mobile adjustment rack simultaneously;
Figure 11 is the pressure test result schematic diagram of the miniature method amber pressure transducer that obtains according to one embodiment of the invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
For reaching an above-mentioned object, the invention provides a kind of producing device of mini optical fibre method amber pressure transducer, Fig. 1 is the system schematic of mini optical fibre method amber pressure transducer producing device of the present invention, Fig. 2 is the structural representation of mini optical fibre method amber pressure transducer producing device of the present invention, as depicted in figs. 1 and 2, described mini optical fibre method amber pressure transducer comprises hollow glass tube and optical fiber, this producing device comprises: welded module 1, cutting module 2, the first motion module 3, the second motion module 3 ', image-forming module 4 and monitoring modular 5, wherein:
Described welded module 1 is for welding optic fibre and hollow glass tube;
Wherein, the welding function that described welded module 1 can use the welding function of optical fiber splicer 6 or directly utilize carbon dioxide laser fused fiber splice processing workstation to carry;
Described optical fiber splicer 6 comprises: the first V-type groove 7, the second V-type groove 7 ', the first optical fiber presser feet 10, the second optical fiber presser feet 10 ', the first high-accuracy X/Y/Z shaft movement mechanism 8, the second high-accuracy X/Y/Z shaft movement mechanism 8 ', the first reflective mirror 11, the second reflective mirror 11 ', the first object lens and CCD camera 12, the second object lens and CCD camera 12 ', LED lamp 13, display screen 14, the first sparking electrode 9, the second sparking electrode 9 ', hurricane globe 20, wherein:
Described high-accuracy X/Y/Z shaft movement mechanism 8,8 ' with grasping system, for fixing and driving pending object as fibre movement; Described V-type groove 7,7 ' and optical fiber presser feet 10,10 ' coordinate the position of fine-tuning pending object and play resiliently mounted effect;
Described reflective mirror 11,11 ', object lens and CCD camera 12,12 ' and LED lamp coordinate the light path imaging system forming in heat sealing machine 6, and show by display screen.
Described optical fiber splicer 6 adopts PAS fibre core to core technology, can easily optical fiber be inserted in the hollow glass tube matching with its external diameter.In addition, the discharge capacity of described optical fiber splicer 6 and discharge time can finely tune, thereby can meet different welding requirements.
Described cutting module 2 is fixedly connected with described welded module 1, particularly, described cutting module 2 is arranged on the hurricane globe 20 of described optical fiber splicer 6 or carbon dioxide fused fiber splice processing workstation, more specifically, described cutting module 2 be fixed on the first optical fiber presser feet 10 on described optical fiber splicer 6 hurricane globes 20, the second optical fiber presser feet 10 ' with the position of the first catoptron 11, the second reflective mirror 11 ' centre, the blade of described cutting module 2 in the time implementing cutting function, be positioned at the first sparking electrode 9, the second sparking electrode 9 ' center position; Described cutting module 2 for described image-forming module 4 and the first motion module 3, the second motion module 3 ' match, for the chamber of Fa-Po cavity, long and diaphragm carries out accurate location and cutting;
Described cutting module 2 comprises blade fixing device 15 and cutter head starter gear 16, and described blade fixing device 15 and cutter head starter gear 16 coordinate the inside and outside both sides that are arranged on described hurricane globe 20.Described blade fixing device 15 is not in the time needing to cut, by the volute spring top, inner side of fan housing 20 of going back on defense that stretches, to avoid affecting the light path imaging system in optical fiber splicer 6; In the time that needs cut, cutter head starter gear 16, by motion clockwise, ejects blade fixing device 15 to cut; Complete after cutting, by counterclockwise running, make blade fixing device 15 be returned to original position.
Fig. 3 is the structural representation of blade fixing device of the present invention, as shown in Figure 3, described blade fixing device 15 comprises blade 21, insert clamp 22, volute spring 23 and coupling arrangement 24, wherein, one end of described coupling arrangement 24 is with internal thread, and be fixed on hurricane globe 20, the other end is connected with insert clamp 22 by volute spring 23; Together with described blade 21 passes through screw fastening with insert clamp 22, thereby can change by support blade.In the time not needing to cut, described blade fixing device 15 keeps compressive state by volute spring, to avoid affecting the light path imaging system in described optical fiber splicer 6.Preferably, described blade 21 is diamond blade.
Fig. 4 is the structural representation of cutter head starter gear of the present invention, as shown in Figure 4, described cutter head starter gear 16 comprises motor module 26 and the screw 25 being connected with described motor module 26, wherein, described motor module 26 is programmable module, and it is by driven by motor transmission gear, make screw 25 do clockwise/rotate counterclockwise, in addition, can regulate the rotating speed of described motor module 26, clockwise/parameters such as the counterclockwise revolution moving by programming, thereby meet different cutting demands; The external thread of described screw 25 matches with the internal thread of described coupling arrangement 24, to connect; The end of described screw 25 contacts with described insert clamp 22.In the time that needs cut, motor module 26 does clockwise motion, drive screw 25 to clockwise rotate, thereby the insert clamp being in contact with it 22 is ejected, the stone blade 21 being connected with insert clamp 22 marks after the edge of a knife on the object such as optical fiber or glass tube to be cut, and motor module 26 rotates counterclockwise, and screw 25 is retracted, insert clamp 22, under the elastic reaction of volute spring 23, also shrinks back the top of hurricane globe.
Described the first motion module 3 and the second motion module 3 ' for driving pending object of which movement, adjust the relative position of pending object, and auxiliary described cutting module 2 cuts;
The high-accuracy X/Y/Z shaft movement mechanism 8 of the first high-accuracy X/Y/Z shaft movement mechanism 8/ second that the described optical fiber splicer 6 of described the first motion module 3/ second motion module 3 ' comprise carries ' and be arranged on first adjustment rack 17, the second adjustment rack 17 of described optical fiber splicer 6 one sides ';
Described the first adjustment rack 17/ second adjustment rack 17 ' be provided with above the first V-type groove fiber clamp 18/ second V-type groove fiber clamp 18 ', for placing pending object.Described the first V-type groove fiber clamp 18/ second V-type groove fiber clamp 18 ' V-type groove and described the first V-type groove 7/ second V-type groove 7 ' be adjusted on same axis and sustained height.
In the time of the object such as cutting optical fibre or glass tube, by two adjustment racks 17,17 ' counter motion, apply pulling force to optical fiber, auxiliary cutting, with avoid to two high-accuracy X/Y/Z shaft movement mechanisms 8,8 ' precision exert an influence, and extend its serviceable life.In addition, in the time of facture amber pressure transducer, two high-accuracy X/Y/Z shaft movement mechanisms 8,8 of two adjustment racks 17,17 ' can increase ' stroke.
Described image-forming module 4 is for accurately measuring the cutting end plane angle of pending object, and by the quality of the image viewing Fa-Po cavity that gathers, the geometrical property of monitoring Fa-Po cavity;
Described image-forming module 4 comprise the first reflective mirror 11, the second reflective mirror 11 ', the first object lens and CCD camera 12, the second object lens and CCD camera 12 ', light fixture 13 (such as LED lamp), and display screen 14.
Described monitoring modular 5 is for when the facture amber pressure transducer, the chamber of Real-Time Monitoring Fa-Po cavity is long, the optical characteristics of monitoring Fa-Po cavity, observes interference spectrum, and monitors the quality of Fa-Po cavity by the method such as contrast, the reflective light intensity amber pressure transducer parameter of computing method amber pressure transducer.
Described monitoring modular 5 comprises with the spectrometer of monitoring algorithm and/or demodulated equipment 19.
Adopt the producing device of said structure that the function of welding, precision positioning cutting, on-line monitoring Fa-Po cavity quality is integrated.
For reaching another above-mentioned object, the invention provides a kind of method of utilizing described producing device to make mini optical fibre method amber pressure transducer, described mini optical fibre method amber pressure transducer comprises quartz glass tube and optical fiber, described method for making comprises the following steps:
Step 1, start cutting module 2 cutting optical fibres, and monitor the cutting angle of fiber end face by display screen 14;
As shown in Figure 6, this step is further:
First, by the first fiber clamp 18 of the first adjustment rack 17, the second adjustment rack 17 ' the second fiber clamp 18 ' V-type groove, respectively with optical fiber splicer 6 first V-type grooves 7, the second V-type groove 7 '-adjust to same axis, on sustained height;
Then, the coat of optical fiber is divested and becomes naked fibre, and with after alcohol swab wiping, put into optical fiber splicer 6 first V-type groove 7 second V-type grooves 7 ';
Then, use the first fiber clamp 18, the second fiber clamp 18 ' fix described optical fiber, regulate two adjustment racks 17,17 ', it is moved round about, apply certain pulling force to optical fiber;
Then, cover hurricane globe 20, start cutter sweep 2, mark after the edge of a knife until blade 21 on optical fiber, regulate two adjustment racks 17,17 ' it is moved round about, fibercuts, completes the cutting of optical fiber;
Wherein, observe the cutting angle of fiber end face by display screen 14, the cutting angle of fiber end face is controlled in 0.2 °.
Step 2, by multiple spot burning-on method welding one optical fiber and hollow glass tube;
Described step 2 is specially: utilize high-accuracy X/Y/Z shaft movement mechanism 8,8 ' and image-forming module 4, optical fiber after the cutting of diaphragm is inserted in the hollow glass tube that internal diameter matches with it, in the overlapping part of described optical fiber and hollow glass tube, especially start to discharge successively welding from fiber end face, form multiple welding solder joints, with welding optic fibre and hollow glass tube, wherein, the solder joint at fiber end face place is expressed as welding solder joint a;
Wherein, described hollow glass tube is hollow quartz-glass pipe.
As shown in Figure 7, this step is further comprising the steps:
First, by optical fiber and hollow glass tube put into respectively optical fiber splicer 6 first V-type grooves 7 and the second V-type groove 7 ', close hurricane globe 20;
Then, adopt " manual actuation " heat sealing machine motor, or press " SET " key, by optical fiber splicer 6 auto-alignment hollow glass tube and optical fiber, wherein, manual/auto control optical fiber inserts the degree of depth of hollow glass tube to suitable position;
Then, carry out welding in the end of optical fiber, form welding solder joint a, this is during for attenuate diaphragm, and diaphragm can firmly be connected with hollow glass tube; Then while moving fiber and hollow glass tube, along both overlappings, the welding of discharging successively, forms multiple welding solder joints, and this is in follow-up cutting step, increases the firm degree that optical fiber is connected with hollow glass tube, increases the operability of cutting.
Wherein, when optical fiber and hollow glass tube, move, for V-type groove and the discrete heat sealing machine of high-accuracy X/Y/Z shaft movement mechanism, can by by adjusting bracket 17,17 ' and can precision positioning the heat sealing machine 6 of cutting be placed on the mobile platform that center as shown in figure 10 hollows out, complete by adjusting knob; For V-type groove and the heat sealing machine that high-accuracy X/Y/Z motion is connected, just can directly complete.In addition, for the welding of hollow glass tube and the optical fiber of various outer diameter, can be by fine setting discharge capacity and discharge time, and by adjustment rack 17,17 ' adjusting be fused thing and sparking electrode 9,9 ' relative height, complete different welding effects.
According to the processing of described step 2, first solder joint a can ensure the fastness in diaphragm thinning process; Secondly form multiple welding solder joints, can increase the firm degree that optical fiber is connected with hollow glass tube, because while needing to cut in subsequent step, apply pulling force on need the transition body after optical fiber and glass tube welding and complete cutting, described step 2 can ensure the success ratio of cutting operation; Finally, optical fiber is inserted to welding in quartz glass tube and then cuts the scheme that forms diaphragm, then cut with the existing quartz glass bar/fused fiber splice matching with its external diameter by quartz glass tube the scheme that forms diaphragm compared with, temperature cross sensitivity is lower.
Step 3, by another optical fiber of multiple spot burning-on method welding and hollow glass tube, form sealing Fa-Po cavity;
Described step 3 is specially: another optical fiber is connected with monitoring modular 5, and utilize the method for described step 2 that the optical fiber being connected with monitoring modular 5 is inserted into hollow glass tube from the other end of hollow glass tube, utilize image-forming module 4 to observe mirror tilt simultaneously, end surface dislocation, there are the unfavorable conditions such as contamination-free, utilize monitoring modular 5 to monitor in real time chamber long, observe interference spectrum, the contrast of computing method amber pressure transducer, the sensor parameters such as reflective light intensity, and determining after optimum length, carry out multiple discharge welding for described optical fiber and hollow glass tube, form sealing Fa-Po cavity, as shown in Figure 8, wherein determining of optimum length will be taken into account contrast and the reflective light intensity of interference spectrum, and such as the Fa-Po cavity for high-fineness, chamber length that can comparative selection degree maximum is as optimum length.
Wherein, can utilize the high-accuracy X/Y/Z shaft movement mechanism 8,8 of optical fiber splicer 6 ' and adjustment rack 17,17 ' come chamber progress row precision control.
Step 4, for described hollow glass tube, one end at it away from Fa-Po cavity, and apart from welding solder joint a a distance, such as 1～10 μ m, carry out precision positioning and cutting, mineralization pressure sensitive thin film sheet, as shown in Figure 9;
In this step, the position of cutting blade is fixed, at two sparking electrodes 9, 9 ' center position, by high-accuracy X/Y/Z shaft movement mechanism 8, 8 ' and adjustment rack 17, 17 ', welding solder joint a is moved near the center of two sparking electrodes, according to Comparison Method, apart from μ m place, welding solder joint a1～10, and in the one end away from Fa-Po cavity, method according to described step 1 is cut, different is, cutting is the glass tube that external diameter is larger herein, in addition, in order to increase the operability of cutting, answer revolution and the rotating speed of motor module in corresponding increase cutting module.
Step 5, the meticulous presser sensor diaphragm obtaining that subtracts, obtain mini optical fibre method amber pressure transducer.
In an embodiment of the present invention, in order to obtain higher sensitivity, use buffered hydrofluoric acid solution to assist and subtract described presser sensor diaphragm, precision can reach 0.1 μ m.
Figure 11 is the pressure test result schematic diagram of the mini optical fibre method amber pressure transducer that obtains according to an embodiment of the invention, and the external diameter of this mini optical fibre method amber pressure transducer is 220 μ m, and diaphragm thickness is 1.6 μ m, and chamber length is 9 microns.
Utilize the present invention, can realize the cutting accuracy of 1 μ m magnitude, the degree of regulation that chamber is long 0.1 micron and observation and the control of 0.1 ° of magnitude of end slope, quality that can on-line monitoring Fa-Po cavity, while going wrong in sensor production process, can be rapidly by positioning problems.The diaphragm that the present invention has also solved existing Fa-Po cavity making simultaneously connects difficulty, chamber length is difficult to the technological difficulties such as regulation and control and diaphragm attenuate, greatly improve the success ratio that mini optical fibre method amber pressure transducer is made, and in manufacturing process, each step process is controlled, thereby has improved the consistance of its making.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (9)
1. a producing device for mini optical fibre method amber pressure transducer, is characterized in that, this producing device comprises: welded module, and cutting module, the first motion module, the second motion module, image-forming module and monitoring modular, wherein:
Described welded module is for welding optic fibre and hollow glass tube;
Described cutting module is fixedly connected with described welded module, for matching with described image-forming module and the first motion module, the second motion module, for location and the cutting of the chamber progress row precision of diaphragm and Fa-Po cavity;
Described the first motion module and the second motion module are used for driving pending object of which movement, and auxiliary described cutting module cuts;
Described image-forming module is used for accurately measuring the cutting end plane angle of pending object, and passes through the quality of the image viewing Fa-Po cavity gathering, and monitors the geometrical property of Fa-Po cavity;
Described monitoring modular is used in the time of facture amber pressure transducer, the quality of Real-Time Monitoring Fa-Po cavity, the optical characteristics of monitoring Fa-Po cavity.
2. producing device according to claim 1, is characterized in that, described cutting module 2 comprises blade fixing device and cutter head starter gear.
3. producing device according to claim 2, it is characterized in that, described blade fixing device comprises blade, insert clamp, volute spring and coupling arrangement, wherein, one end of described coupling arrangement is with internal thread, and the other end is connected with insert clamp by volute spring; Described blade tightens together with insert clamp, and in the time not needing to cut, described blade fixing device keeps compressive state by volute spring.
4. producing device according to claim 3, it is characterized in that, described cutter head starter gear comprises motor module and the screw being connected with described motor module, wherein, described motor module, by driven by motor transmission gear, makes screw do clockwise/rotate counterclockwise; The external thread of described screw is connected with the screw-internal thread fit of described coupling arrangement; The end of described screw contacts with described insert clamp.
5. producing device according to claim 4, is characterized in that, described motor module is able to programme, can regulate by programming the parameter of described motor module.
6. producing device according to claim 1, is characterized in that, described motion module comprises high-accuracy motion and adjustment rack, and described high-accuracy motion and be provided with grasping system above adjustment rack, for placing or clamp pending object.
7. a method of utilizing the producing device described in claim 1-6 any one to make mini optical fibre method amber pressure transducer, is characterized in that, described method for making comprises the following steps:
Step 1, start cutting module cutting optical fibre, and monitor the cutting angle of fiber end face by display screen;
Step 2, by multiple spot burning-on method welding one optical fiber and hollow glass tube, wherein, the solder joint at fiber end face place is expressed as welding solder joint a;
Step 3, by another optical fiber of multiple spot burning-on method welding and hollow glass tube, form sealing Fa-Po cavity;
Step 4, for described hollow glass tube, one end at it away from Fa-Po cavity, and carry out precision positioning and cutting apart from welding solder joint a a distance, mineralization pressure sensitive thin film sheet;
The presser sensor diaphragm that step 5, meticulous attenuate obtain, obtains mini optical fibre method amber pressure transducer.
8. method for making according to claim 7, it is characterized in that, described step 2 is specially: utilize high-accuracy motion and image-forming module, the optical fiber after the cutting of diaphragm is inserted in hollow glass tube, in the welding of discharging successively of both overlapping parts, form multiple welding solder joints.
9. method for making according to claim 7, it is characterized in that, described step 3 is specially: another optical fiber is connected with monitoring modular, and utilize the method for described step 2 that the optical fiber being connected with monitoring modular is inserted into wherein from the other end of hollow glass tube, carry out multiple discharge welding for described optical fiber and hollow glass tube, form sealing Fa-Po cavity, utilize the quality of image-forming module and monitoring module monitors Fa-Po cavity simultaneously.
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| CN105890535A (en) * | 2016-03-25 | 2016-08-24 | 重庆大学 | Manufacturing apparatus and method for fiber sensor |
| CN106671428A (en) * | 2016-12-28 | 2017-05-17 | 北京知觉科技有限公司 | Electric arc welding based quick manufacturing system and method for fiber fabry-perot cavity |
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| CN107014410A (en) * | 2017-03-31 | 2017-08-04 | 西安交通大学 | The optical fiber alignment and the long control device and method of chamber made for optical fiber F P sensors |
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| CN111220188A (en) * | 2020-01-17 | 2020-06-02 | 广州大学 | Ultra-sensitive refractive index sensor based on cascade optical fiber error displacement pair enhanced vernier effect |
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| CN113188691A (en) * | 2021-04-21 | 2021-07-30 | 上海大学 | Optical fiber Fabry-Perot sealed cavity pressure sensor and preparation method thereof |
| CN113483794A (en) * | 2021-09-08 | 2021-10-08 | 西北工业大学 | F-P sensor preparation facilities convenient to monitoring angle regulation and length |
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| CN117003197A (en) * | 2023-09-26 | 2023-11-07 | 之江实验室 | Preparation method of high-temperature inertial chip capable of being integrated on crystal and provided with vertical Fabry-Perot cavity |
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| CN107807421A (en) * | 2017-12-15 | 2018-03-16 | 中国电子科技集团公司第四十研究所 | A kind of fused fiber splice sparking electrode height automatic regulating apparatus and method |
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| CN110487454A (en) * | 2019-09-18 | 2019-11-22 | 大连理工大学 | A kind of miniature film chip optical fiber end FP pressure sensor, production method and application |
| CN111220188A (en) * | 2020-01-17 | 2020-06-02 | 广州大学 | Ultra-sensitive refractive index sensor based on cascade optical fiber error displacement pair enhanced vernier effect |
| CN113188691A (en) * | 2021-04-21 | 2021-07-30 | 上海大学 | Optical fiber Fabry-Perot sealed cavity pressure sensor and preparation method thereof |
| CN113188691B (en) * | 2021-04-21 | 2023-01-20 | 上海大学 | Optical fiber Fabry-Perot sealed cavity pressure sensor and preparation method thereof |
| CN113483794A (en) * | 2021-09-08 | 2021-10-08 | 西北工业大学 | F-P sensor preparation facilities convenient to monitoring angle regulation and length |
| CN113483794B (en) * | 2021-09-08 | 2021-11-09 | 西北工业大学 | F-P sensor preparation facilities convenient to monitoring angle regulation and length |
| CN116235961A (en) * | 2023-05-10 | 2023-06-09 | 南京康善制药设备有限公司 | Control system and method of automatic peeling flaker |
| CN117003197A (en) * | 2023-09-26 | 2023-11-07 | 之江实验室 | Preparation method of high-temperature inertial chip capable of being integrated on crystal and provided with vertical Fabry-Perot cavity |
| CN117003197B (en) * | 2023-09-26 | 2024-03-26 | 之江实验室 | Preparation method of high-temperature inertial chip capable of being integrated on crystal and provided with vertical Fabry-Perot cavity |
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