CN103949772B - Femtosecond laser prepares the method for three-dimensional rotatable nanometer body grating in transparent material - Google Patents
Femtosecond laser prepares the method for three-dimensional rotatable nanometer body grating in transparent material Download PDFInfo
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- CN103949772B CN103949772B CN201410162039.3A CN201410162039A CN103949772B CN 103949772 B CN103949772 B CN 103949772B CN 201410162039 A CN201410162039 A CN 201410162039A CN 103949772 B CN103949772 B CN 103949772B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
Abstract
The present invention relates to a kind of method that femtosecond laser prepares three-dimensional rotatable nanometer body grating in transparent material, belong to femtosecond laser applied technical field.Feature of the present invention is that the pulse front edge only changing incident laser tilts and namely polarization direction can obtain the three-dimensional manometer body grating structure of specific orientation in laser spot region.Incident femtosecond pulse is linearly polarized light, and wavelength is 800nm, and pulse width is 100 ~ 150fs, and pulse energy is 1 ~ 6mJ, and pulse light intensity spatial distribution is Gaussian Profile.Transparent medium internal irradiation region, after machine glazed finish and chemical attack, can carry out the result with scanning electronic microscope observation to the cross-section structure of nanometer body grating.
Description
Technical field
The present invention relates to a kind of method that femtosecond laser prepares three-dimensional rotatable nanometer body grating in transparent material, belong to femtosecond laser applied technical field.
Background technology
Femto-second laser pulse is a kind of ultrashort superpower pulse laser, and have traditional continuous laser and the incomparable superior function of Long Pulse LASER, this makes it receive much concern in micro Process field.It can within the extremely short time, interact with high peak power and material, can as quick as thought at laser irradiation region Implantation Energy, by multiphoton ionization, tunnelling ionization and avalanche ionization, can in the inner inducement structure change of transparent material, femtosecond laser micro-nano technology is a very noticeable research direction in world today's laser, opto-electronic industry.
Utilize the feature that femtosecond laser can change at the inner inducement structure of transparent material, people are in the inner structure induction of many difference in functionalitys of transparent material, and such as fiber waveguide, microfluidic device, has the pore space structure of optical storage function.
Utilize the nonlinear excitation of femtosecond laser in transparent material inside and the time-space variation characteristic of femtosecond pulse spectrum, we achieve a kind of technology preparing the nanometer body grating structure of three-dimensional periodic in transparent solid material inside.The present invention has one-step shaping, without the need to mask, from features such as secondary pollutions, has well repeatable and scale potentiality to be exploited.And, according to actual needs, the spatial orientation of this micro-nano structure can be gone out by designed in advance, can the structure change that formed of accuracy controlling irradiation zone by changing laser parameter.
Summary of the invention
The object of this invention is to provide a kind of method that femtosecond laser prepares three-dimensional rotatable nanometer body grating in transparent material.
For achieving the above object, the present invention adopts following technical scheme:
Femtosecond laser prepares a method for three-dimensional rotatable nanometer body grating in transparent material, comprises the steps:
1) according to required three dimensions orientation, design and calculate the angle between grating rotating plane and the femtosecond laser plane of incidence
, and in grating rotating face, the angle between grating normal and line scanning direction
;
2) transparent material of six mirror polish is placed on the three-dimensional platform of computer operating;
3) laser pulse forward position tilting value PFT is measured, according to formula with ultrashort pulse space-time detecting devices
, regulate grating in laser system to obtain required PFT value, thus determine intensity top rake
;
4) setting femtosecond laser wavelength is 800nm, pulse width 100 ~ 150fs, repetition rate 1k or 250kHz, sweep speed 1 ~ 500mm/s, micro objective N.A.0.5-0.9;
5) utilize neutral filter to regulate femtosecond laser energy continuously, make micro objective export single pulse energy and be greater than 1mJ, and select appropriate energy as requested; The anglec of rotation in grating planar
be equal to the angle between laser polarization direction and scanning direction, adjustment initial laser polarization direction is parallel with laser pipeline purging direction, and the reading defined on now λ/2 wave plate is
, calculate in the wave plate to step 1) of adjustment λ/2
namely degree, now determine the spatial orientation of the nanometer grating of processing;
6) laser sent by femtosecond laser is focused on transparent material inside through micro objective, coordinate electronic shutter moving three dimension platform by the program of setting, then there is in required machining area preparation the three-dimensional manometer body grating structure of specific orientation.
Described transparent material is vitreous silica, mixes germanium quartz glass, alpha-alumina crystals, tellurium dioxide crystal or borosilicate glass.
The present invention has following outstanding substantive distinguishing features and significant advantage:
The invention provides a kind of simple to operate, feasible method, in the inner microcell preparation of transparent medium, there is the controlled periodicity self-assembled nanometer body grating structure of 3 D tropism in conjunction with femtosecond laser direct writing technology.This nanometer body grating prepared in transparent material has the feature such as anisotropic etch of birefringence, anisotropic emission, scattering, high thermal stability and polarization independent, will have huge potential value in micro-nano optoelectronics device, microfluidic channel, biomedical engineering etc.
Accompanying drawing explanation
Fig. 1 is the machining sketch chart that femtosecond laser induces the three-dimensional manometer body grating rotated freely.
Fig. 2 be nanometer body grating spatial orientation by
with
two angles determine.
Figure 3 shows that and utilize 250kHz femtosecond laser, modulation
when being 8.8 °, the profile scanning Electronic Speculum figure of the nanometer body grating of the different spaces orientation that the different polarization anglec of rotation is corresponding.Section corresponds to the XZ face in Fig. 2, carries out electron microscopic observation along Y+ direction.
Figure 4 shows that plane of polarization azimuth in Fig. 3
and the relation between nanometer grating width d.D is the width in grating between parallel lines.Experiment image data in stain representative graph 3, curve representation theory data fitting curve.
Figure 5 shows that plane of polarization azimuth in Fig. 3
with the nanometer body grating angle of orientation
between relation.
for the angle between wave vector and raster width d.Experiment image data in stain representative graph 3, curve representation theory data fitting curve.
Figure 6 shows that and utilize 1kHz femtosecond laser, constant intensity top rake
, the profile scanning Electronic Speculum figure of the nanometer body grating of the different spaces orientation that the different polarization anglec of rotation is corresponding.Section corresponds to the XZ face in Fig. 2, carries out electron microscopic observation along Y+ direction.
Detailed description of the invention
The preferred embodiments of the present invention accompanying drawings is as follows:
realexecute example 1
First, according to the demand preparing three-dimensional manometer body grating, choose the transparent blocks such as quartz glass as target material.Secondly, can inclination angle in face of adjusting strength according to the step of above technical solution
to 8.8 °.Select wavelength to be 800nm, pulse width 120fs, repetition rate is 250kHz, and sweep speed is 50 μm/s, and the femtosecond laser of single pulse energy 2.8 μ J focuses on below material upper surface 100 μm place, carries out unidirectional line sweep in a horizontal plane.Change po-larization rotational angular, from 10 ° to 190 °, every 20 ° are carried out primary line scanning.As shown in Figure 3, be the cross sectional Scanning Electron microphotograph of pipeline purging.Fig. 4, Figure 5 shows that plane of polarization azimuth
with nanometer grating width d, the grating angle of orientation
between relation.The experimental data measured in stain representative graph 3, curve represents the gross data matched curve after analysis chart 2 geometrical property.Both are very identical.
Embodiment 2
According to the demand preparing three-dimensional manometer body grating, choose the transparent blocks such as quartz glass as target material.Constant intensity top rake
constant, select wavelength to be 800nm, pulse width 120fs, repetition rate is 1kHz, and sweep speed is 5 μm/s, and the femtosecond laser of single pulse energy 5 μ J focuses on below material upper surface 100 μm place, carries out unidirectional line sweep in a horizontal plane.Change po-larization rotational angular, be respectively 10 °, 50 °, 90 °, carry out primary line scanning at every turn.
After Laser Processing completes, the nanometer grating that irradiation zone place is formed defines the lamellar structure that Density Distribution is periodically alternately arranged for " dredging-Mi-thin-Mi " shape.First, by the method for machine glazed finish, the three-dimensional structure of inside is polished to surface, cleans and dry.Subsequently, material is soaked 3 minutes in the hydrofluoric acid solution of 1% volume ratio, " dredging-Mi-thin-Mi " will there is selective corrosion in structure, and the lamella that density is less preferentially will corrode the larger lamella of density and then be easy to retain, and material is thus formed the surface texture of " recessed-male-female-convex ".Finally, by SEM, nanometer body grating cycle, orientation and pattern are observed.As shown in Figure 6, be the cross sectional Scanning Electron microphotograph of pipeline purging.The femtosecond laser of the relatively low repetition rate of same proof also can induce the nanometer body grating rotated freely.
Claims (2)
1. femtosecond laser prepares a method for three-dimensional rotatable nanometer body grating in transparent material, it is characterized in that, comprises the steps:
1) according to required three dimensions orientation, design and calculate the angle between grating rotating plane and the femtosecond laser plane of incidence
, and in grating rotating face, the angle between grating normal and line scanning direction
;
2) transparent material of six mirror polish is placed on the three-dimensional platform of computer operating;
3) laser pulse forward position tilting value PFT is measured, according to formula with ultrashort pulse space-time detecting devices
, regulate grating in laser system to obtain required PFT value, thus determine intensity top rake
;
4) setting femtosecond laser wavelength is 800nm, pulse width 100 ~ 150fs, repetition rate 1k or 250kHz, sweep speed 1 ~ 500mm/s, micro objective N.A.0.5-0.9;
5) utilize neutral filter to regulate femtosecond laser energy continuously, make micro objective export single pulse energy and be greater than 1mJ, and select appropriate energy as requested; The anglec of rotation in grating planar
be equal to the angle between laser polarization direction and scanning direction, adjustment initial laser polarization direction is parallel with laser pipeline purging direction, and the reading defined on now λ/2 wave plate is
, calculate in the wave plate to step 1) of adjustment λ/2
namely degree, now determine the spatial orientation of the nanometer grating of processing;
6) laser sent by femtosecond laser is focused on transparent material inside through micro objective, coordinate electronic shutter moving three dimension platform by the program of setting, then there is in required machining area preparation the three-dimensional manometer body grating structure of specific orientation.
2. femtosecond laser according to claim 1 prepares the method for three-dimensional rotatable nanometer body grating in transparent material, it is characterized in that, described transparent material is vitreous silica, mixes germanium quartz glass, alpha-alumina crystals, tellurium dioxide crystal or borosilicate glass.
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| CN103949772B true CN103949772B (en) | 2016-01-13 |
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| CN111790980B (en) * | 2020-06-28 | 2021-10-08 | 华中科技大学 | Method, system and application for regulating and controlling three-dimensional direction of optical axis of nano grating |
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| EP1535697A1 (en) * | 2002-05-24 | 2005-06-01 | Riken | Method and device for processing inside of transparent material |
| CN101319347A (en) * | 2008-05-20 | 2008-12-10 | 上海大学 | Method for crystal surface self-organizing growth of fine-nano-structure with femtosecond laser |
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| US7438824B2 (en) * | 2005-03-25 | 2008-10-21 | National Research Council Of Canada | Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics |
| JP2010207889A (en) * | 2009-03-11 | 2010-09-24 | Canon Machinery Inc | Method and device for producing periodic structure |
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| EP1535697A1 (en) * | 2002-05-24 | 2005-06-01 | Riken | Method and device for processing inside of transparent material |
| CN101319347A (en) * | 2008-05-20 | 2008-12-10 | 上海大学 | Method for crystal surface self-organizing growth of fine-nano-structure with femtosecond laser |
| CN101359067A (en) * | 2008-08-08 | 2009-02-04 | 西安交通大学 | Method for preparing bragg grating by femtosecond laser and apparatus |
| CN102500923A (en) * | 2011-09-21 | 2012-06-20 | 长春理工大学 | Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method |
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