CN103926786A - Electrostatic precipitator for photomask - Google Patents

Electrostatic precipitator for photomask Download PDF

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Publication number
CN103926786A
CN103926786A CN201410138291.0A CN201410138291A CN103926786A CN 103926786 A CN103926786 A CN 103926786A CN 201410138291 A CN201410138291 A CN 201410138291A CN 103926786 A CN103926786 A CN 103926786A
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CN
China
Prior art keywords
light shield
positive plate
plate
electrostatic precipitator
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410138291.0A
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Chinese (zh)
Inventor
林辉
谢华
莫少文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huali Microelectronics Corp
Original Assignee
Shanghai Huali Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Huali Microelectronics Corp filed Critical Shanghai Huali Microelectronics Corp
Priority to CN201410138291.0A priority Critical patent/CN103926786A/en
Publication of CN103926786A publication Critical patent/CN103926786A/en
Pending legal-status Critical Current

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Abstract

The invention provides an electrostatic precipitator for a photomask. A negative plate and a positive plate are arranged on the upper surface and the lower surface of the photomask, respectively, and a certain voltage is applied to the two ends of the negative plate and the positive plate, so that a high voltage electric field is formed between the negative plate and the positive plate; negative pole discharges, so that the negatively charged gas ions move towards the positive plate under the action of electric field force and collide with particles on the surface of the photomask in the moving process, and the particle charge has negative electricity; the charged particles also move towards the positive plate under the action of electric field force, so that the particles are deposited on the positive plate, and the aim of completing removing the particles on the surface of the photomask can be achieved.

Description

Light shield electrostatic precipitator
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to a kind of light shield electrostatic precipitator that light shield is adopted to electrostatic precipitation.
Background technology
Total institute is known, due to photoetching process to light shield require high, if there is the directly quality of impact exposure of some particles in light shield.Therefore; in litho machine, conventionally can be provided with a system module that automatically detects light shield surface particles; this system module can detect grain size and the particle position at exposure front and back light shield glass surface and picture surface, and the performance of monitoring light shield with this prevents that the particle existing from affecting exposure technology.
If system module detects light shield surface while there is particle, now just need light shield to take out litho machine, clear up, in prior art, light shield is put into the automatic cleaning device that nitrogen gun is housed and cleaned, concrete employing nitrogen gun ejection nitrogen purges the particle on light shield.
Because the purging of nitrogen gun is purging light shield all positions, surface, do not have specific aim, therefore the position or the periphery that likely particle are purged to other by original position do not have on the position of figure, thereby cause periphery not have the particle of the position of figure to increase.In fact, the particle of light shield periphery can bring particle contamination to the vacuum cup of the vacuum pad on light shield carrying platform and light shield whirligig, and the alignment precision in the time of will exposing to product like this exerts an influence.
Visible, method for cleaning of the prior art is not really cleared up and is removed the particle that is positioned at light shield surface.
Summary of the invention
The object of the present invention is to provide a kind of light shield electrostatic precipitator, can remove the particle that is positioned at light shield surface completely, guarantee the degree of accuracy of exposure.
To achieve these goals, the present invention proposes a kind of light shield electrostatic precipitator, for dedusting cleaning is carried out in the surface of light shield, described device comprises: power supply, minus plate and positive plate, wherein said minus plate is connected with the negative pole of power supply, described positive plate is connected with the positive pole of power supply, and described light shield is between described minus plate and positive plate.
Further, the 2 phase 220V alternating currents that described power supply is 50HZ.
Further, described device also comprises step-up transformer, and described step-up transformer is connected with described power supply.
Further, described device also comprises rectifier, and described rectifier is connected with described step-up transformer, for current conversion is become to DC current.
Compared with prior art, beneficial effect of the present invention is mainly reflected in: in light shield upper and lower surface, place respectively minus plate and positive plate, and apply certain voltage at minus plate and positive plate two ends, make to form high-voltage electric field between minus plate and positive plate, because negative electrode discharges, make the pole plate motion on the sunny side under the effect of field of electric force of electronegative gaseous ion, collide with the particle on light shield surface at the volley, make particle lotus with negative electricity, particle after charged is under the effect of electric field force, also pole plate motion on the sunny side, make particle deposition on positive plate, thereby arrive the object that light shield surface particles is removed completely.
Accompanying drawing explanation
Fig. 1 is the structural representation of light shield electrostatic precipitator in one embodiment of the invention.
Embodiment
Below in conjunction with schematic diagram, light shield electrostatic precipitator of the present invention is described in more detail, the preferred embodiments of the present invention have wherein been represented, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to the restriction of relevant system or relevant business, by an embodiment, change into another embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with reference to accompanying drawing, with way of example, the present invention is more specifically described.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of the aid illustration embodiment of the present invention lucidly.
Please refer to Fig. 1, a kind of light shield electrostatic precipitator has been proposed in the present embodiment, for dedusting cleaning is carried out in the surface of light shield, described device comprises: power supply, minus plate 21 and positive plate 22, wherein said minus plate 21 is connected with the negative pole of power supply, described positive plate 22 is connected with the positive pole of power supply, and described light shield 10 is between described minus plate 21 and positive plate 22.
In the present embodiment, the 2 phase 220V alternating currents that described power supply is 50HZ.
In the present embodiment, described device also comprises step-up transformer, and described step-up transformer is connected with described power supply.Described step-up transformer, for the voltage of power supply is raise, is convenient to the follow-up stronger electric field that provides, and can remove larger particle 11.
In the present embodiment, described device also comprises rectifier, and described rectifier is connected with described step-up transformer, for current conversion is become to DC current, thereby conveniently electric current is applied on described minus plate 21 and positive plate 22.
On the fixture of the automatic detection light shield surface particles of litho machine, install light shield electrostatic precipitator additional, in upper end, connect the minus plate 21 of high-voltage DC power supply, in lower end, connect positive plate 22.
Specific works flow process comprises: when the automatic detection light shield particle device of litho machine detects light shield 10 surfaces and has bulky grain 11 to produce, automatically start light shield electrostatic precipitator, now between minus plate 21 and positive plate 22, form high-voltage electric field, by electrostatic precipitation mode, the particle 11 that is positioned at light shield 10 surfaces is cleaned out.
To sum up, in the light shield electrostatic precipitator providing in the embodiment of the present invention, in light shield upper and lower surface, place respectively minus plate and positive plate, and apply certain voltage at minus plate and positive plate two ends, make to form high-voltage electric field between minus plate and positive plate, because negative electrode discharges, make the pole plate motion on the sunny side under the effect of field of electric force of electronegative gaseous ion, collide with the particle on light shield surface at the volley, make particle lotus with negative electricity, particle after charged is under the effect of electric field force, also pole plate motion on the sunny side, make particle deposition on positive plate, thereby arrive the object that light shield surface particles is removed completely.
Above are only the preferred embodiments of the present invention, the present invention is not played to any restriction.Any person of ordinary skill in the field; within not departing from the scope of technical scheme of the present invention; the technical scheme that the present invention is disclosed and technology contents are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not depart from technical scheme of the present invention, within still belonging to protection scope of the present invention.

Claims (4)

1. a light shield electrostatic precipitator, for dedusting cleaning is carried out in the surface of light shield, described device comprises: power supply, minus plate and positive plate, wherein said minus plate is connected with the negative pole of power supply, described positive plate is connected with the positive pole of power supply, and described light shield is between described minus plate and positive plate.
2. light shield electrostatic precipitator as claimed in claim 1, is characterized in that, the 2 phase 220V alternating currents that described power supply is 50HZ.
3. light shield electrostatic precipitator as claimed in claim 2, is characterized in that, described device also comprises step-up transformer, and described step-up transformer is connected with described power supply.
4. light shield electrostatic precipitator as claimed in claim 3, is characterized in that, described device also comprises rectifier, and described rectifier is connected with described step-up transformer, for current conversion is become to DC current.
CN201410138291.0A 2014-04-08 2014-04-08 Electrostatic precipitator for photomask Pending CN103926786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410138291.0A CN103926786A (en) 2014-04-08 2014-04-08 Electrostatic precipitator for photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410138291.0A CN103926786A (en) 2014-04-08 2014-04-08 Electrostatic precipitator for photomask

Publications (1)

Publication Number Publication Date
CN103926786A true CN103926786A (en) 2014-07-16

Family

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CN201410138291.0A Pending CN103926786A (en) 2014-04-08 2014-04-08 Electrostatic precipitator for photomask

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CN (1) CN103926786A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104588370A (en) * 2014-11-26 2015-05-06 上海华力微电子有限公司 Method for removing pollution particles on photomask covering film
CN106486345A (en) * 2015-08-26 2017-03-08 中芯国际集成电路制造(上海)有限公司 The manufacture method of mask structure
CN109524900A (en) * 2018-12-03 2019-03-26 沈明华 A kind of communication base station installation equipment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167628A (en) * 1981-04-08 1982-10-15 Toshiba Corp Washing of mask or the like in photoetching process
JPS5912770A (en) * 1982-07-12 1984-01-23 Fujitsu Ltd Dust attractor
CN1519054A (en) * 2003-01-22 2004-08-11 野 袁 Drum type electrostatic cleaner
US20070079525A1 (en) * 2005-10-11 2007-04-12 Nikon Corporation Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles and other objects
CN201140111Y (en) * 2008-01-01 2008-10-29 浙江广天变压器有限公司 High voltage commutation direct current return circuit series filter arrangement for electrostatic dust collection
CN202649668U (en) * 2012-06-19 2013-01-02 京东方科技集团股份有限公司 Automatic mask cleaning system and exposure equipment

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167628A (en) * 1981-04-08 1982-10-15 Toshiba Corp Washing of mask or the like in photoetching process
JPS5912770A (en) * 1982-07-12 1984-01-23 Fujitsu Ltd Dust attractor
CN1519054A (en) * 2003-01-22 2004-08-11 野 袁 Drum type electrostatic cleaner
US20070079525A1 (en) * 2005-10-11 2007-04-12 Nikon Corporation Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles and other objects
CN201140111Y (en) * 2008-01-01 2008-10-29 浙江广天变压器有限公司 High voltage commutation direct current return circuit series filter arrangement for electrostatic dust collection
CN202649668U (en) * 2012-06-19 2013-01-02 京东方科技集团股份有限公司 Automatic mask cleaning system and exposure equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104588370A (en) * 2014-11-26 2015-05-06 上海华力微电子有限公司 Method for removing pollution particles on photomask covering film
CN106486345A (en) * 2015-08-26 2017-03-08 中芯国际集成电路制造(上海)有限公司 The manufacture method of mask structure
CN106486345B (en) * 2015-08-26 2019-05-28 中芯国际集成电路制造(上海)有限公司 The manufacturing method of mask structure
CN109524900A (en) * 2018-12-03 2019-03-26 沈明华 A kind of communication base station installation equipment

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Application publication date: 20140716