CN103926343A - Application of silica-gel chromatographic column to detection of high-purity gas via gas chromatography - Google Patents
Application of silica-gel chromatographic column to detection of high-purity gas via gas chromatography Download PDFInfo
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- CN103926343A CN103926343A CN201410154067.0A CN201410154067A CN103926343A CN 103926343 A CN103926343 A CN 103926343A CN 201410154067 A CN201410154067 A CN 201410154067A CN 103926343 A CN103926343 A CN 103926343A
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- silica gel
- gel material
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- purity gas
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 83
- 239000000741 silica gel Substances 0.000 title claims abstract description 71
- 229910002027 silica gel Inorganic materials 0.000 title claims abstract description 71
- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 238000004817 gas chromatography Methods 0.000 title abstract description 5
- 229960001866 silicon dioxide Drugs 0.000 title abstract 4
- 239000007789 gas Substances 0.000 claims description 83
- 239000000463 material Substances 0.000 claims description 60
- 238000004587 chromatography analysis Methods 0.000 claims description 24
- 239000002808 molecular sieve Substances 0.000 claims description 24
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 23
- 238000004458 analytical method Methods 0.000 claims description 17
- 238000013459 approach Methods 0.000 claims description 10
- 239000012159 carrier gas Substances 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 9
- 239000001307 helium Substances 0.000 claims description 8
- 229910052734 helium Inorganic materials 0.000 claims description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 8
- 238000010926 purge Methods 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 6
- 229920006395 saturated elastomer Polymers 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000004868 gas analysis Methods 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 239000001301 oxygen Substances 0.000 description 10
- 229910052760 oxygen Inorganic materials 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 description 7
- 239000001569 carbon dioxide Substances 0.000 description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- -1 aperture Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000004811 liquid chromatography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000004451 qualitative analysis Methods 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- FZGRPBJBMUNMQH-UHFFFAOYSA-N trimethyl-$l^{3}-chlorane Chemical compound CCl(C)C FZGRPBJBMUNMQH-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000005526 G1 to G0 transition Effects 0.000 description 1
- 230000029936 alkylation Effects 0.000 description 1
- 238000005804 alkylation reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004440 column chromatography Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000027734 detection of oxygen Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940059082 douche Drugs 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
The invention provides an application of a silica-gel chromatographic column to detection of high-purity gas via gas chromatography, and relates to a method and a device for detecting high-purity gas by using the silica-gel chromatographic column. The application of the silica-gel chromatographic column to detection of the high-purity gas has the characteristics that the perfect chromatographic peak shape is provided, high sensitivity and good selectivity are obtained, the sharp peak is realized, the peak capacity is high and the like.
Description
Technical field
The present invention relates to gas chromatographic detection field, especially relate to the application of silica gel material chromatogram column analysis high-purity gas gas chromatographic detection.
Background technology
High-purity gas (Purified Gases), industrial noun, is often referred to the gas that utilizes certain grade purity that modern purification technique can reach.For different classes of gas, purity index is different, for example, for nitrogen, hydrogen, argon, helium, be often referred to purity be equal to or higher than 99.999% be high-purity gas; And for oxygen, purity is 99.99% can claim high purity oxygen; For hydrocarbon, what purity was 99.99% can think high-purity gas; High-purity gas application is extremely wide, and in semi-conductor industry, High Purity Nitrogen, hydrogen, argon, helium can be used as delivery gas and protection gas; High-purity gas can be used as the spirit of preparation combination gas.
For the impurity of stipulating in high-purity gas, carry out qualitative and quantitative analysis just particularly important, the content of the foreign gas in general gas flow is extremely low, 10
-6～10
-7scope at present, is mainly to adopt gas chromatograph to exceed the detection of gas.Gas chromatograph is a kind of separation, analysis tool of many mixture, and it is to take gas as mobile phase, adopts the column chromatography technology of douche.When the amalyzing substances of many components enters into chromatographic column, because the gas phase of each component in chromatographic column is different with the partition factor between immobile liquid liquid phase, therefore each component is also just different in the travelling speed of chromatographic column, after certain column length, order is left chromatographic column and is entered detecting device, be converted to afterwards after testing electric signal and deliver to data processing work station, thereby completed the qualitative and quantitative analysis to measured matter.
At present; it is conventionally can use 5A molecular sieve, PORAPAK Q that gas chromatograph detects high-purity gas; HAYESEP Q; GDX-502, TDX-01, Chromosorb102 etc. analyze; yet the chromatograph packing material through evidence except 5A can adsorb micro-oxygen; because 5A molecular sieve can not analysing impurity carbon dioxide, there is the problem that some impurity can not detect completely again, so need the method for new detection high-purity gas to improve detection accuracy and sensitivity.
At present, analysis of material is the important composition that comprises the chromatographic technique of liquid chromatography, capillary chromatography and gas chromatography etc., is the main material of sample preparation technology; The chromatographic column of silica gel material is mainly used in liquid chromatography and capillary electric chromatogram; Silica gel material has surface nature uniqueness, can pass through the features such as chemical bonding adjustment form surface properties; Silica gel material chromatographic column lacks corresponding application for the detection of gas chromatography.
Summary of the invention
The present invention proposes a kind of silica gel material chromatographic column for analyzing the application of the gas chromatographic column of high-purity gas, with detection method and the device of silica gel material chromatographic column gas chromatographic column, the problem of accuracy and poor sensitivity while having solved high-purity gas detection in prior art.
Technical scheme of the present invention is achieved in that
The present invention relates to a kind of silica gel material chromatographic column for the application of high-purity gas gas chromatographic detection.
Wherein, silica gel material chromatographic column is as gas chromatographic column, and preferably, described silica gel material is as follows: particle diameter 5 μ m; Aperture 100A; Hole area 1.1ml/g; There is sealing; Specific surface area 450m
2/ g; Metallic impurity: <10ppm; Carbon content 17%; P H scope 1.5-10; Temperature range 20-250 ℃.
Another aspect of the present invention relates to the analytical approach of silica gel material chromatogram column analysis high-purity gas, adopts silica gel material chromatographic column described above; Described silica gel material chromatographic column and the series connection of molecular sieve chromatography post, chromatographic column column temperature is 60 ℃, chromatographic column flow velocity 30ml/min, sample size 1ml, 150 ℃ of detector temperatures, carrier gas is helium;
Step is as follows: air scour quantitatively encircles, and uses the saturated described chromatographic column of air sample introduction; And after sample introduction 10 times, use and detect gas analysis component peaks area.
Preferably, the tail wind drift amount of detecting device is 30ml/min.
Wherein, utilize in the analytical approach of silica gel material chromatogram column analysis high-purity gas, adopt silica gel material chromatogram column analysis high-purity gas device; Described silica gel material chromatogram column analysis high-purity gas device comprises six-way valve, quantitative ring, chromatographic column and detecting device; Described chromatographic column comprises molecular sieve chromatography post and silica gel material chromatographic column, and described six-way valve is connected with described quantitative ring; Described six-way valve is connected with described molecular sieve chromatography post, and described silica gel material chromatographic column is connected with described detecting device; Described silica gel material chromatographic column is connected with described molecular sieve chromatography post.
Further preferably, described six-way valve comprises quantitative ring entrance connector, carrier gas inlet, molecular sieve chromatography post connector, quantitatively ring exports connector, sample export, sample inlet; Described quantitative ring is connected with quantitative ring outlet connector with described quantitative ring entrance connector, and described molecular sieve chromatography post is connected with described chromatographic column connector.
Preferably, described six-way valve is provided with purging.The purge flow rate of further preferably, described six-way valve is 5ml/min.
Preferably, described detecting device is provided with tail and blows.
In silica gel material chromatographic column, the characteristic of silica gel material or parameter comprise particle diameter, surface area etc., wherein silica gel material sealing refers to: in chemically bonded stationary phase preparation process, after bonding reaction, conventionally adopt the little molecule silylating reagents such as trimethyl chlorine (first) silane or hmds to carry out Passivation Treatment; To reduce Silica Surface residual hydroxy groups as far as possible, improve the chemical stability of Bonded Phase and the repeatability of chromatographic performance.
Beneficial effect of the present invention is as follows:
Silica gel material is in the detection application of high-purity gas gas chromatography, and the parameter of silica gel material is selected to comprise particle diameter, sealing, surface area, metallic impurity etc., is applied in the gas chromatographic detection of high-purity gas, has outstanding specificity and detection sensitivity.The chromatogram test column of silica filler, matrix metal content is low, all types of analytes are all showed to perfect peak shape, and physical strength good stability, because having the difference in different material absorption retention time, can make various materials reach separating-purifying object, perfect chromatographic peak profile can be provided, can obtain higher sensitivity, there is sharp-pointed peak shape, fabulous selectivity, the higher features such as peak capacity.
While utilizing the chromatographic column of silica gel material to analyze high-purity gas, in the high-purity gas chromatographic detection method adopting, adopt connecting of molecular sieve chromatography post and silica gel material chromatographic column, the parameters such as the column temperature adopting, chromatographic column flow velocity, first, use air scour quantitatively to encircle, saturated chromatographic column, after sample introduction 10 times, detect the detection of high-purity gas, the relative deviation that result during detection has outstanding detection specificity and result is little.In addition, because 5A molecular sieve chromatography major gene is for adsorbing a small amount of oxygen, can not detect carbon dioxide again, silica gel material chromatographic column is adsorption of oxygen not, so the accuracy of the detection data that can improve high-purity gas detection is used in series connection, and can detect carbon dioxide component, get rid of the interference of other gases.
The device of the analysis high-purity gas adopting in the present invention, adopt six-way valve, quantitatively encircle, and comprise chromatographic column and detecting device, wherein six-way valve is provided with purging, but can adsorb a small amount of oxygen and detecting carbon dioxide for detection of oxygen molecular sieve chromatography post, the interference of other detection gases of utilization purging removal during detection due to silica gel material chromatographic column.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the embodiment of the present invention 2 high-purity gas gas chromatographic detection apparatus structure schematic diagram;
Fig. 2 and Fig. 3 are the detection architecture that in the embodiment of the present invention 3, silica gel material chromatographic column detects high-purity gas.
Wherein, 1-six-way valve, 2-detecting device, 3-chromatographic column, 4-quantitatively encircles, 101-quantitatively encircles entrance connector, 102-carrier gas inlet, 103-molecular sieve chromatography post connector, 104-and quantitatively encircles outlet connector, 105-sample export, 106-sample inlet, 5-carrier gas source of the gas, 6-purges, and 7-exports sample, 8-detects sample, and 9-tail blows.
Embodiment
Below in conjunction with the embodiment of the present invention, technical scheme of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Embodiment based in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
1 one kinds of silica gel material chromatographic columns of embodiment
A silica gel material chromatographic column, silica gel material is as follows: particle diameter 5 μ m; Aperture 100A; Hole area 1.1ml/g; There is sealing; Specific surface area 450m
2/ g; Metallic impurity: <10ppm; Carbon content 17%; PH scope 1.5-10; Temperature range 20-250 ℃.The purity of high-purity gas is equal to or higher than 99.999%, and comparatively harsh to the rotation of silica gel material during detection, wherein the particle diameter of silica matrix, aperture, hole area and surface area can affect the absorption affinity of gas composition; In above-mentioned employing silica gel chromatograph production field, normal selected technology, adopts the little molecule silylating reagents such as trimethyl chlorine (first) silane or hmds to carry out passivation during sealing.When concrete silica gel material is produced, adopt existing production technology means, comprise the acidifying of silica matrix particle, inerting disposal or the termination process of the alkylation of silica matrix particle and silica matrix particle.
Embodiment 2 silica gel chromatographic columns are analyzed high-purity gas device
As shown in Figure 1, silica gel chromatographic column is analyzed high-purity gas device, comprises six-way valve 1, quantitatively encircles 4, chromatographic column 3 and detecting device 2; Chromatographic column 3 comprises molecular sieve chromatography post and silica gel chromatographic column, and six-way valve 1 is connected with quantitative ring 4; Six-way valve 1 is connected with molecular sieve chromatography post, and silica gel chromatographic column is connected with detecting device 2; Silica gel chromatographic column is connected with molecular sieve chromatography post.The series system of molecular sieve chromatography post and silica gel chromatographic column adopts the art personnel's conventional selection mode.
Specifically preferably, six-way valve 1 comprises quantitative ring entrance connector 101, carrier gas inlet 102, molecular sieve chromatography post connector 103, quantitatively ring exports connector 104, sample export 105, sample inlet 106; Quantitatively ring 4 is connected with quantitative ring outlet connector 104 with quantitative ring entrance connector 101, molecular sieve chromatography post is connected with chromatographic column connector 103, carrier gas source of the gas 5 and communication with carrier gas entrance 102, detect sample 8 and enter six-way valve by sample inlet 106, final outlet sample 7 is discharged by sample export 105.
Further preferably, as shown in Figure 1, six-way valve 1 is provided with and purges 6, and detecting device 2 is provided with tail and blows 9.
Embodiment 3 silica gel material chromatographic columns are for the analytical approach of high-purity gas form and aspect chromatogram
Utilize silica gel material chromatographic column in embodiment 1 and the silica gel chromatographic column described in embodiment 2 to analyze the device of high-purity gas: silica gel chromatographic column and 5A Coupled columns, wherein detected parameters is as follows:
Step is as follows: air scour quantitatively encircles, and uses the saturated 5A chromatographic column of air sample introduction and silica gel material chromatographic column; And after saturated 10 times of sample introduction, detect gas to be checked, analyze each component peaks area.
Testing result as shown in table 1 and Fig. 2 and Fig. 3,
Table 1: helium Plays gas each component peaks area average and relative average debiation
Table 2: silica gel chromatographic column detects helium Plays carbon dioxide in gas peak area mean value and relative average debiation; Helium is as protection gas or Balance Air.
The independent detection gas of comparative example 5A chromatographic column
Detected parameters adopts the detected parameters of recording in embodiment 2, and wherein, it is as shown in table 2 that high-purity gas detects data;
Table 3: helium Plays gas each component peaks area average and relative average debiation
As the data of the detection high-purity gas of embodiment 2 and comparative example, in comparative example, use 5A chromatographic column to detect separately the component of hydrogen, oxygen, nitrogen and methane in gas, wherein, hydrogen, oxygen, nitrogen and methane relative deviation are followed successively by 0.5,1.3,1.4 and 0.6; In embodiment 2, when 5A chromatographic column and silica gel chromatographic column series connection are used, wherein, the detection relative deviation of hydrogen, oxygen, nitrogen and methane is 0.4,0.2,0.7 and 0.3, when silica gel chromatographic column detects carbon dioxide in gas component, relative deviation is 1.6, and the method for detection high-purity gas provided by the invention has outstanding sensitivity and accuracy; Exactly because 5A can adsorb the sensitivity that a small amount of oxygen can weaken detection while detecting, and can not detect carbon dioxide component residual.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (9)
1. silica gel material chromatographic column is for the application of high-purity gas gas chromatographic detection.
2. silica gel material chromatographic column as claimed in claim 1, for the application of high-purity gas gas chromatographic detection, is characterized in that: described silica gel material is as follows: particle diameter 5 μ m; Aperture 100A; Hole area 1.1ml/g; There is sealing; Specific surface area 450m
2/ g; Metallic impurity: <10ppm; Carbon content 17%; PH scope 1.5-10; Temperature range 20-250 ℃.
3. the analytical approach of silica gel material chromatogram column analysis high-purity gas, is characterized in that: adopt the silica gel material chromatographic column described in claim 1 or 2; Described silica gel material chromatographic column and the series connection of molecular sieve chromatography post, chromatographic column column temperature is 60 ℃, chromatographic column flow velocity 30ml/min, sample size 1ml, 150 ℃ of detector temperatures, carrier gas is helium;
Step is as follows: air scour quantitatively encircles, and uses the saturated described silica gel material chromatographic column of air sample introduction and analyze sieve chromatographic column; And after sample introduction 10 times, use and detect gas analysis component peaks area.
4. the analytical approach of silica gel material chromatogram column analysis high-purity gas as claimed in claim 3, is characterized in that: the tail wind drift amount of described detecting device is 30ml/min.
5. the analytical approach of silica gel material chromatogram column analysis high-purity gas as claimed in claim 3, is characterized in that: adopt silica gel material chromatogram column analysis high-purity gas device; Described silica gel material chromatogram column analysis high-purity gas device comprises six-way valve, quantitative ring, chromatographic column and detecting device; Described chromatographic column comprises molecular sieve chromatography post and silica gel material chromatographic column, and described six-way valve is connected with described quantitative ring; Described six-way valve is connected with described molecular sieve chromatography post, and described silica gel material chromatographic column is connected with described detecting device; Described silica gel material chromatographic column is connected with described molecular sieve chromatography post.
6. the analytical approach of silica gel material chromatogram column analysis high-purity gas as claimed in claim 5, is characterized in that: described six-way valve comprises quantitative ring entrance connector, carrier gas inlet, molecular sieve chromatography post connector, quantitatively ring exports connector, sample export, sample inlet; Described quantitative ring is connected with quantitative ring outlet connector with described quantitative ring entrance connector, and described molecular sieve chromatography post is connected with described chromatographic column connector.
7. the analytical approach of silica gel material chromatogram column analysis high-purity gas as claimed in claim 5, is characterized in that: described six-way valve is provided with purging.
8. the analytical approach of silica gel material chromatogram column analysis high-purity gas as claimed in claim 5, is characterized in that: described detecting device is provided with tail and blows.
9. the analytical approach of silica gel material chromatogram column analysis high-purity gas as claimed in claim 7, is characterized in that: the purge flow rate of described six-way valve is 5ml/min.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410154067.0A CN103926343B (en) | 2014-04-16 | 2014-04-16 | Silica gel material chromatographic column is used for the application of high-purity gas gas chromatographic detection |
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| CN201410154067.0A CN103926343B (en) | 2014-04-16 | 2014-04-16 | Silica gel material chromatographic column is used for the application of high-purity gas gas chromatographic detection |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106124663A (en) * | 2016-07-29 | 2016-11-16 | 黑龙江省劳动安全科学技术研究中心 | A kind of detection method of Carbon Dioxide in Air content |
| CN112919480A (en) * | 2021-02-01 | 2021-06-08 | 中国石油天然气股份有限公司 | Dihydroxy silica gel, preparation method thereof and detection system for concentration of functional polymer in produced liquid |
| CN113702585A (en) * | 2021-08-26 | 2021-11-26 | 山东非金属材料研究所 | Automatic capturing and digesting device for trace metal elements in high-purity gas |
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| CN106124663A (en) * | 2016-07-29 | 2016-11-16 | 黑龙江省劳动安全科学技术研究中心 | A kind of detection method of Carbon Dioxide in Air content |
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| CN112919480A (en) * | 2021-02-01 | 2021-06-08 | 中国石油天然气股份有限公司 | Dihydroxy silica gel, preparation method thereof and detection system for concentration of functional polymer in produced liquid |
| CN113702585A (en) * | 2021-08-26 | 2021-11-26 | 山东非金属材料研究所 | Automatic capturing and digesting device for trace metal elements in high-purity gas |
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| Publication number | Publication date |
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| CN103926343B (en) | 2016-04-06 |
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