CN203490201U - Gas chromatograph with plasma emission detector - Google Patents
Gas chromatograph with plasma emission detector Download PDFInfo
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- CN203490201U CN203490201U CN201320516866.9U CN201320516866U CN203490201U CN 203490201 U CN203490201 U CN 203490201U CN 201320516866 U CN201320516866 U CN 201320516866U CN 203490201 U CN203490201 U CN 203490201U
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- gas chromatograph
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Abstract
The utility model relates to a gas chromatograph with a plasma emission detector. The gas chromatograph is characterized by comprising a built-in purifier, an oxygen adsorption preventing device, a six-way valve, an oxygen-argon separation device, the plasma emission detector and a digital voltage output device which are sequentially connected, wherein the plasma emission detector comprises a selective light-filtering device. According to the utility model, a detected carrier gas outflows from a steel cylinder, respectively passes through the built-in purifier and the oxygen adsorption preventing device and then enters the six-way valve; when the six-way valve is switched into a sample injection state, the carrier gas carried with a sample enters the oxygen-argon separation device; after the sample gas is completely separated, the components respectively enter the plasma emission detector; after the components are subjected to selective light filtration through the selective light-filtering device, an optical signal is transformed into an electrical signal; finally a digital electronic signal is output through the digital voltage output device. The gas chromatograph disclosed by the utility model has the advantages of simple structure and low cost, and is convenient for operation.
Description
Technical field
The utility model relates to a kind of gas chromatograph, particularly discloses a kind of gas chromatograph with plasma emission detecting device for high-purity gas and electronics industry field of gas detection.
Background technology
For the chromatograph of high-purity gas and electronics industry gas, all there is many disadvantages in the market.Although traditional hydrogen flame detector is highly sensitive, can only measure hydrocarbon, in the situation that installing reburner additional, can measure carbon monoxide and carbon dioxide.And the sensitivity of thermal conductivity detector (TCD) mensuration inorganic component is too low.In recent years, also there were some highly sensitive instruments to occur, as Zirconia detector, argon ion detecting device, although sensitivity is very high, because there is selectivity, can only detects a certain gas or coordinate and just can complete the mensuration of all impurity components with other analytical instrument.Also having a kind of helium ionization detector, is a kind of common detector, and sensitivity is also higher, but must use expensive helium as carrier gas, and use cost is higher.In addition, during current gas chromatograph analysing impurity content, can only analysing impurity content under existing condition higher than sample more than ppm rank, the sample of low content cannot detect; When oxygen is separated with argon gas, need to reduce chromatograph box temperature, will drop to even below 0 degree Celsius, with liquid nitrogen and solid carbon dioxide cooling, complicated operation, wastes energy conventionally; When measuring other oxygen of ppm level, conventionally adopt macromolecule bead or molecular sieve chromatography post to carry out separation, according to the character of these two kinds of carriers, when oxygen content is very low, chromatographic column can be adsorbed a certain amount of oxygen content, thereby cannot detect the oxygen of the low content in sample.And the purification devices of existing instrument and instrument split, transport very inconveniently, increases cost.
Summary of the invention
The purpose of this utility model is to address the deficiencies of the prior art, design a kind of gas chromatograph with plasma emission detecting device, detectable substance content is at other impurity of ppt level, the problem of chromatographic column oxygen uptake when having solved existing chromatograph box temperature argon gas and oxygen separation and oxygen are at micro-content in the time of 50-60 ℃.
The utility model is achieved in that a kind of gas chromatograph with plasma emission detecting device, it is characterized in that: described gas chromatograph comprises built-in purifier, anti-block adsorbent equipment, six-way valve, oxygen argon tripping device, plasma emission detecting device and the digital voltage output unit connecting successively; Described plasma emission detecting device comprises selection filtering apparatus; Tested carrier gas is flowed out from steel cylinder, after built-in purifier and anti-block adsorbent equipment, enter six-way valve respectively, when six-way valve switches to sample introduction state, carrier gas is carried sample gas and is entered oxygen argon tripping device, when sample gas completes after separation, each component enters respectively plasma emission detecting device, through selecting filtering apparatus to carry out after selectivity optical filtering, optical signalling is converted into electric signal, finally by digital voltage output unit, digital electronic signal is exported.
Described plasma emission detecting device is outsourcing piece, originate from Canadian LDetek company, in described plasma emission detecting device, comprise radio-frequency generator, quartz ampoule, selection filtering apparatus and signal amplifier that order is installed, described selection filtering apparatus is comprised of optical filter, photodiode; The working mechanism of described gas chromatograph mainly completes in this plasma emission detector, carrier gas is carried sample gas and is entered plasma emission detecting device, effect through radio-frequency generator, sample gas forms emission spectrum, through quartz ampoule, enter optical filter again, the wavelength that has oneself after every kind of material formation spectrum, according to the optical filter that need to select different wave length of analyzing, the material of mating plate is converted into electric signal by photodiode light signal after filtration, and electric signal is directly exported to digital voltage output unit by signal amplifier.
Described built-in purifier is also outsourcing piece, originates from Canadian LDetek company, and described built-in purifier contains two air-breathing beds, working temperature is 350 ℃ and 200 ℃, when carrier gas is passed through first air-breathing, the impurity except hydrogen is all adsorbed totally, and hydrogen is by the second air-breathing bed absorption.
The length of described oxygen argon tripping device is that 2m, bore are 3.2mm, and inside filling out can oxygen separation, the chromatographic column of the stainless steel of the 5A carrier of argon gas.Described anti-block adsorbent equipment length is that 2m, bore are 3.2mm, fills the chromatographic column of the stainless steel of active passivation chromatographic column carrier.Described digital voltage output unit, comprises a circuit board, directly exports digital voltage signal.
The high performance plasmas emission detector that the utility model adopts is a kind of common detector, it has very high response to inorganic and organic component, the above-mentioned any detecting device of remolding sensitivity all will exceed at least 2 orders of magnitude, and can use nitrogen, argon gas or helium as carrier gas, relative usage cost is lower.
The beneficial effects of the utility model are: the utility model is a kind of for analyzing the gas chromatograph of high-purity gas Analysis of Micro-amount Impurities In Liquid, can analyze quantitatively content ppt level Trace Components, having solved ppt level Trace Components analyzes and the separated difficult problem of the lower oxygen argon of chromatograph box 50 degrees celsius, purifier and chromatographic apparatus one, structure is simpler, and digital voltage signal is directly exported, without micro-current magnification version, and with low cost, easy to operate.
The advantage that the utility model compared with prior art had is:
1, solved the detection of ppt rank foreign gas content;
2, solved chromatograph box oxygen difficult problem separated with argon gas under normal temperature control;
3, solved the difficult problem that trace oxygen cannot detect due to the absorption of chromatographic column.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model gas chromatograph.
Fig. 2 is the utility model gas chromatograph principle of work schematic diagram.
In figure: 1, built-in purifier; 2, anti-block adsorbent equipment; 3, six-way valve; 4, oxygen argon tripping device; 5, select filtering apparatus; 6, plasma emission detecting device; 7, digital voltage output unit; 601, radio-frequency generator; 602, quartz ampoule; 603, optical filter; 604, photodiode; 605, signal amplifier.
Embodiment
With reference to the accompanying drawings 1 and 2, a kind of gas chromatograph with plasma emission detecting device of the utility model, comprise the built-in purifier 1, anti-block adsorbent equipment 2, six-way valve 3, oxygen argon tripping device 4, plasma emission detecting device 6 and the digital voltage output unit 7 that connect successively, plasma emission detecting device 6 comprises selects filtering apparatus 5.
Tested carrier gas is carried sample gas and is flowed out from steel cylinder, first pass through built-in purifier 1 and anti-block adsorbent equipment 2, effectively remove the content of foreign gas in carrier gas, then pass into the six-way valve 3 for gas sampling, when six-way valve 3 switches to sample introduction state, make trace oxygen pass through rapidly the III mouth of six-way valve 3, enter the oxygen argon separating column of oxygen argon tripping device 4.When sample gas completes after oxygen and argon gas detachment process, each component enters respectively plasma emission detecting device 6.
Plasma emission detecting device 6 is outsourcing piece, originates from Canadian LDetek company.In plasma emission detecting device 6, comprise radio-frequency generator 601, quartz ampoule 602, selection filtering apparatus and signal amplifier 605 that order is installed, select filtering apparatus to be formed by optical filter 603 and photodiode 604.The working mechanism of gas chromatograph mainly completes in this plasma emission detector 6, carrier gas is carried sample gas and is entered after plasma emission detecting device 6, through the effect of radio-frequency generator 601, sample gas forms emission spectrum, then enters optical filter 603 through quartz ampoule 602.The wavelength that has oneself after every kind of material formation spectrum, according to the optical filter that need to select different wave length 603 of analyzing, the material of mating plate 603 is converted into electric signal by photodiode 604 light signal after filtration, electric signal is directly exported to digital voltage output unit 7 by signal amplifier 605 again, thereby completes whole detection.
Built-in purifier 1 of the present utility model is also outsourcing piece, originates from Canadian LDetek company, and built-in purifier 1 contains two air-breathing beds, working temperature is 350 ℃ and 200 ℃, when carrier gas is passed through first air-breathing, the impurity except hydrogen is all adsorbed totally, and hydrogen is by the second air-breathing bed absorption.
The length of oxygen argon tripping device 4 of the present utility model is that 2m, bore are 3.2mm, and inside filling out can oxygen separation, the chromatographic column of the stainless steel of the 5A carrier of argon gas.Anti-block adsorbent equipment 2 length are that 2m, bore are 3.2mm, fill the chromatographic column of the stainless steel of active passivation chromatographic column carrier.Digital voltage output unit 7, comprises a circuit board, directly exports digital voltage signal.
The utility model can detection level in other foreign gas of ppt level, realize the separated of oxygen and argon gas under the normal temperature control of chromatograph box, purifier and chromatograph are integrated, structure is simpler, directly exports digital voltage signal, without micro-current magnification version, with low cost, easy to operate.
Claims (6)
1. with a gas chromatograph for plasma emission detecting device, it is characterized in that: described gas chromatograph comprises built-in purifier, anti-block adsorbent equipment, six-way valve, oxygen argon tripping device, plasma emission detecting device and the digital voltage output unit connecting successively; Described plasma emission detecting device comprises selection filtering apparatus; Tested carrier gas is flowed out from steel cylinder, after built-in purifier and anti-block adsorbent equipment, enter six-way valve respectively, when six-way valve switches to sample introduction state, carrier gas is carried sample gas and is entered oxygen argon tripping device, when sample gas completes after separation, each component enters respectively plasma emission detecting device, through selecting filtering apparatus to carry out after selectivity optical filtering, optical signalling is converted into electric signal, finally by digital voltage output unit, digital electronic signal is exported.
2. according to the gas chromatograph with plasma emission detecting device described in claim 1, it is characterized in that: in described plasma emission detecting device, comprise radio-frequency generator, quartz ampoule, selection filtering apparatus and signal amplifier that order is installed, described selection filtering apparatus is comprised of optical filter, photodiode; The working mechanism of described gas chromatograph mainly completes in this plasma emission detector, carrier gas is carried sample gas and is entered plasma emission detecting device, effect through radio-frequency generator, sample gas forms emission spectrum, through quartz ampoule, enter optical filter again, the wavelength that has oneself after every kind of material formation spectrum, according to the optical filter that need to select different wave length of analyzing, the material of mating plate is converted into electric signal by photodiode light signal after filtration, and electric signal is directly exported to digital voltage output unit by signal amplifier.
3. according to the gas chromatograph with plasma emission detecting device described in claim 1, it is characterized in that: described built-in purifier contains two air-breathing beds, working temperature is 350 ℃ and 200 ℃, when carrier gas is passed through first air-breathing, impurity except hydrogen is all adsorbed totally, and hydrogen is by the second air-breathing bed absorption.
4. according to the gas chromatograph with plasma emission detecting device described in claim 1, it is characterized in that: the length of described oxygen argon tripping device is that 2m, bore are 3.2mm, inside filling out can oxygen separation, the chromatographic column of the stainless steel of the 5A carrier of argon gas.
5. according to the gas chromatograph with plasma emission detecting device described in claim 1, it is characterized in that: described anti-block adsorbent equipment length is that 2m, bore are 3.2mm, fill the chromatographic column of the stainless steel of active passivation chromatographic column carrier.
6. according to the gas chromatograph with plasma emission detecting device described in claim 1, it is characterized in that: described digital voltage output unit comprises a circuit board, directly exports digital voltage signal.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103424490A (en) * | 2013-08-23 | 2013-12-04 | 上海华爱色谱分析技术有限公司 | Gas chromatograph with plasma emission detector |
WO2016051357A1 (en) * | 2014-10-01 | 2016-04-07 | Ldetek Inc. | Detection of gas impurities with a gas chromatograph |
CN105485408A (en) * | 2015-12-30 | 2016-04-13 | 上海华爱色谱分析技术有限公司 | Device for providing air source for switching of pneumatic valve on gas chromatograph |
CN107024527A (en) * | 2016-01-29 | 2017-08-08 | 安捷伦科技有限公司 | Plasma spectroscopy device |
-
2013
- 2013-08-23 CN CN201320516866.9U patent/CN203490201U/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103424490A (en) * | 2013-08-23 | 2013-12-04 | 上海华爱色谱分析技术有限公司 | Gas chromatograph with plasma emission detector |
WO2016051357A1 (en) * | 2014-10-01 | 2016-04-07 | Ldetek Inc. | Detection of gas impurities with a gas chromatograph |
CN105485408A (en) * | 2015-12-30 | 2016-04-13 | 上海华爱色谱分析技术有限公司 | Device for providing air source for switching of pneumatic valve on gas chromatograph |
CN107024527A (en) * | 2016-01-29 | 2017-08-08 | 安捷伦科技有限公司 | Plasma spectroscopy device |
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