CN103901606B - Oil breakdown controlled opening system used for EFD device and manufacturing method thereof - Google Patents

Oil breakdown controlled opening system used for EFD device and manufacturing method thereof Download PDF

Info

Publication number
CN103901606B
CN103901606B CN201410084369.5A CN201410084369A CN103901606B CN 103901606 B CN103901606 B CN 103901606B CN 201410084369 A CN201410084369 A CN 201410084369A CN 103901606 B CN103901606 B CN 103901606B
Authority
CN
China
Prior art keywords
liquid
efd
pixel wall
area
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410084369.5A
Other languages
Chinese (zh)
Other versions
CN103901606A (en
Inventor
周国富
李发宏
罗伯特·安德鲁·海耶斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Guohua Optoelectronics Co Ltd
Original Assignee
South China Normal University
Shenzhen Guohua Optoelectronics Co Ltd
Academy of Shenzhen Guohua Optoelectronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by South China Normal University, Shenzhen Guohua Optoelectronics Co Ltd, Academy of Shenzhen Guohua Optoelectronics filed Critical South China Normal University
Priority to CN201410084369.5A priority Critical patent/CN103901606B/en
Publication of CN103901606A publication Critical patent/CN103901606A/en
Application granted granted Critical
Publication of CN103901606B publication Critical patent/CN103901606B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

The invention discloses an oil breakdown controlled opening system used for an EFD device and a manufacturing method of the oil breakdown controlled opening system used for the EFD device. A step is arranged on a substrate below a lower electrode, so that the second thickness of the first liquid on the step is smaller than that of the first liquid at the position except for the step. Through the thickness difference, when preset low voltage is applied between an upper electrode and the lower electrode, the first liquid on the step is broken down by the second liquid firstly, the first liquid is pushed and extruded by the second liquid, and the first liquid moves to a first area from a second area. In this way, in an EFD pixel unit, the breakdown point of an oil layer serving as the inert liquid is located on the required ideal area, the influence by too much or too little filling of the oil layer is little, only the lower potential difference is required for breaking down the oil layer, and therefore the lag effect is relieved, and the gray level of pixels is easy to control.

Description

A kind of controlled open system of the oil puncture for EFD device and its manufacture method
Technical field
The present invention relates to a kind of controlled open system of the oil puncture for EFD device and its manufacture method, belong to EFD and show Technical field.
Background technology
The display unit being presently used for word, image, video and interactive interface typically adopts flat pannel display structure, In this field, widely used have, for example, micro-fluidic display system (Electro fluidic display system, EFD), electrophoretic display system (Electrophoretic display system), plane conversion (In-Plane- Switching, IPS), electro-osmosis display system (Elctro-osmosis display system), and liquid crystal display LCD Deng.Part display structure therein adopts reflective display, for example, is applied to electric ink (E ink) or Electronic Paper EFD.EFD is alternatively referred to as the moistening display (Electrowetting display) of electricity, electrowetting refer to by change drop with absolutely Voltage between edge substrate, to change wettability on substrate for the drop, that is, change contact angle, so that drop is deformed upon, displacement Phenomenon.So-called moistening refers to the process of that a kind of fluid of the surface of solids is replaced by one other fluid.Liquid is in solid surface energy Sprawl, there is the trend of expansion in solid-liquid contact face, that is, the adhesive force of liquid versus solid surfaces is more than its cohesiveness it is simply that moistening.Liquid Body can not be sprawled in the surface of solids, and contact surface has the trend shrinking globulate it is simply that nonwetting, and nonwetting is exactly liquid versus solid The adhesive force on surface is less than its cohesiveness.Wherein, the wettability effect of hydrophobic surface can change (therefore named electricity profit using voltage Wet), make this surface become more hydrophilic (moistening).Because originally hydrophobic surface becomes more to absorb water now, original and hydrophobic surface The inert fluid of good contact, such as oil reservoir are it has to change its form.It is the base of electrowetting application that this interface property controls Plinth.With regard to the application of the moistening displaying principle of electricity, in patent WO03071347, and in publication《Natural》425383385 It is described later in detail in the content of table.
The structure chart of the principle of EFD pixel cell structure as illustrated in figs. ia and ib, under dielectric layer and photoetching It is provided with pixel wall 3 above electrode 5.The insulating barrier of the superiors has hydrophobicity, therefore also referred to as drain insulating layer 6.First liquid Body 1 (such as oil reservoir) has good wettability in drain insulating layer 6, and therefore it is used for what filling was limited by pixel wall 3 Region.Second liquid 2 is not moistened with drain insulating layer 6, and it is incompatible with oil reservoir, the top of its fills unit structure.
When applying a voltage on electrode, electric charge accumulates in second liquid 2 lower surface, and then it overcomes capacitive force to puncture Oil reservoir.By increasing voltage further, the oil reservoir puncturing can be pushed toward a jiao of pixel region.If elimination voltage, pressed The oil of contracting will be back to state before applying voltage.As shown in Figure 1a, before applying voltage, oil reservoir is filled in figure institute Region;Shown in Fig. 1 b, after application of a voltage, oil reservoir is pushed to the side of pixel cell structure.If adding suitable in oil reservoir When pigment, such as black pigment, in Fig. 1 a position, overlook this pixel cell, pixel assumes lighttight black;And in Fig. 1 b Position, pixel transmittance, if reflective display, then present the color in the reflecting layer under pixel, for example white.
In order to puncture oil reservoir it is necessary to using appropriate charge density, it is defined as
ρ = ϵ v d ,
Wherein V is the voltage applying, and ε is dielectric constant, and d is thickness.Due to technologic impact, for example, dielectric layer Thickness change and oil reservoir filling inhomogeneities, the charge density on oil reservoir surface may be different.So will result in following asking Topic:
1) breakdown point of the oil reservoir of different pixels may be different;
2) motion of the oil reservoir thus puncturing is unpredictable.
During EFD device works, problem above will bring defect, and this is that user is not intended to see.
Additionally, there is serious hysteresis effect, as shown in Figure 2 in existing pixel design.Trunnion axis is apply Voltage V, and vertical axises are the pixel region opened.The voltage applying increases to the cut-in voltage Vth (unlatching of in figure from zero point O Point A), cause oil reservoir to be punctured by second liquid 2.After puncturing, the contraction of the oil in pixel is very sensitive to the voltage applying, This make opened areas modulation extremely difficult.When the voltage applying exceedes certain numerical value, opened areas become saturation (in figure saturation Point B).If the voltage applying reduces, the opened areas of pixel are then followed different paths (as shown in figure Turn Off Path BCO) and are subtracted Little.Here it is so-called hysteresis effect.However, it is generally desirable to the hysteresis effect in EFD display device is less, by this pixel grey scale The grade opened areas size of respective pixel (its pari passu) can easily be modulated by the voltage applying.
Content of the invention
It is an object of the invention to overcoming the defect of prior art problem, a kind of oil puncture for EFD device is provided to be subject to Control open system and its manufacture method.
To achieve these goals, the present invention adopts following technical scheme:
According to an aspect of the present invention it is proposed that a kind of controlled open system of oil puncture for EFD device, described oil Puncture controlled open system and include an EFD display structure, described EFD shows that structure includes being arranged on EFD display structural top Top electrode, it is arranged on EFD and shows the bottom electrode of structural base, setting dielectric layer on the bottom electrode, be arranged on dielectric layer On pixel wall, wherein described pixel wall limit region in be filled with first liquid, between first liquid and Top electrode It is filled with second liquid, described dielectric layer includes drain insulating layer, first liquid and drain insulating layer have enough moistening Property, so that contacting with drain insulating layer in the state of first liquid no applied voltage between Top electrode and bottom electrode and covering completely Lid drain insulating layer, wherein said pixel wall includes the pixel wall with differing heights, the pixel wall of wherein said differing heights Including the higher pixel wall with the first height, it is located at the first area that EFD shows structure, and has than the first height Low relatively low pixel wall, it is located at the second area that EFD shows structure.
Wherein, the height of relatively low pixel wall is set to, and makes to apply a default relatively low electricity between Top electrode and bottom electrode During pressure, the first liquid of second area is breakdown first.
Preferably, the lower section of bottom electrode is provided with substrate, and described substrate is located at the part of second area at it and is provided with one Step, so that the part that bottom electrode and dielectric layer are located on step at it, exceeds its part beyond being located at step, thus Make second thickness on step for the first liquid, less than its first thickness beyond step.
Preferably, the thickness difference between the second thickness of first liquid and first thickness is set to, make Top electrode with When applying a default low voltage between electrode, the first liquid on step is punctured by second liquid first, and the One liquid is pushed by second liquid, moves to first area from second area.
Preferably, described substrate is located at the part of second area at it and is provided with multiple steps, wherein further away from the firstth area The vertical height of the step in domain is more than the vertical height of the step of closer first area.
Preferably, described first liquid is inert fluid, and it includes the oil reservoir colouring.
Preferably, it is provided with hydrophilic layer between Top electrode and second liquid.
According to another aspect of the invention, it is proposed that a kind of EFD display device, it includes multiple thering is above-mentioned oil puncture The EFD pixel cell of controlled open system, wherein, in the controlled open system of oil puncture in described every EFD pixel cell First area is consistent with the orientation of second area.
In accordance with a further aspect of the present invention it is proposed that a kind of method of the controlled unlatching of oil puncture for EFD device, it wraps Include following steps:
One EFD display structure is set in the controlled open system of described oil puncture;In described EFD display structure, setting One substrate, manufactures a step on the substrate, so that described step is higher than the basal region beyond it.
Molding bottom electrode apply dielectric layer in substrate, so that bottom electrode and dielectric layer are located on step at it The vertical height of part be higher than its part beyond being located at step, wherein said dielectric layer is set to including hydrophobic insulation Layer.
Place outside dielectric layer and manufacture a pixel wall using photoetching process, wherein said pixel wall includes thering is different height The pixel wall of degree, the pixel wall of described differing heights includes the relatively low pixel wall above step, and is located at beyond step Higher pixel wall.
Fill first liquid in described pixel wall, wherein second thickness above it is positioned at step for the first liquid is than it First thickness beyond step is little.
Top electrode is set above pixel wall, fills second liquid between Top electrode and pixel wall.
Preferably, the thickness difference between second thickness and first thickness is set to, and makes to apply between Top electrode and bottom electrode During default low voltage of plus, the first liquid above step is punctured by second liquid first, and first liquid quilt Second liquid is pushed, the regional movement to beyond step for the region above step.
Compared with prior art, the present invention has following remarkable advantage and beneficial effect:
According to the present invention for the controlled open system of oil puncture of EFD device and its manufacture method, first, in EFD picture In plain unit, the breakdown point as the oil reservoir of inert fluid is in required preferable region, excessive or very few by oil reservoir The impact of filling is less.In the EFD display device being made up of multiple such pixel cells, the oil reservoir of each pixel cell hits Wear a little all in the same area, the oil reservoir direction of motion of therefore each pixel is all consistent with characteristic.Second, for puncturing oil reservoir, only need Electric potential difference that will be lower.Therefore, alleviate hysteresis effect.This make pixel tonal gradation easily controllable.Therefore, on the whole greatly Improve greatly the display effect of EFD display device.
Brief description
Below in conjunction with accompanying drawing, embodiments of the invention are described in detail:
Fig. 1 a is the principle schematic between upper/lower electrode during no applied voltage that existing EFD shows structure;
Fig. 1 b is the principle schematic after existing EFD shows the applied voltage between upper/lower electrode of structure;
Fig. 2 show the schematic diagram that existing EFD shows the hysteresis effect of structure;
Fig. 3 show the electrical representation schematic diagram that existing EFD shows structure;
Fig. 4 a show the top of the EFD display structure of the pixel wall with differing heights according to one embodiment of the invention Depending on schematic diagram;
Fig. 4 b show the edge of the EFD display structure of the pixel wall with differing heights according to one embodiment of the invention The diagrammatic cross-sectional side elevation of the direction Z of Fig. 4 a;
Fig. 5 show in the EFD display structure of the pixel wall with differing heights according to one embodiment of the invention Capacitance characteristic principle schematic;
Fig. 6 show in the EFD display structure with different pixels wall height according to another embodiment of the present invention The principle schematic of capacitance characteristic.
Specific embodiment
As shown in figure 3, in the design of existing EFD pixel, the height of pixel wall 3 is homogeneous, and it makes the operation of pixel Existing EFD as herein described is shown with the defect problem of structure is more sensitive, the such as oil reservoir direction of motion is inconsistent and hysteresis effect. From the perspective of electricity, an EFD pixel can be regarded as the combination of two electric capacity:C1 is the first liquid representing inert fluid Body (such as oil reservoir) electric capacity, C2 is the dielectric layer electric capacity representing dielectric layer.Therefore, total capacitance C=C1*C2/ (C1+C2). On interface, the electric charge of accumulation is proportional to total capacitance.Following according to embodiments of the invention, will be come using this principle Manufacture new pixel wall 3 structure, and solve the problems, such as above-mentioned.
It is that the EFD of the pixel wall 3 with differing heights according to one embodiment of the invention shows as shown in figures 4 a and 4b Show structure, described structure is the improvement in the structure shown in Fig. 1 a.The same with the structure shown in Fig. 1 a, described structure also can be wrapped Include and be arranged on the Top electrode 4 of EFD display structural top, be arranged on the bottom electrode 5 of EFD display structural base, be arranged on bottom electrode 5 On dielectric layer 8, the pixel wall 3 being arranged on dielectric layer 8, according to the present invention, described dielectric layer 8 can be by one layer or many Layer dielectric substance is constituted, and forms electric capacity in electrically itself and upper/lower electrode 4,5.Fill out in the region that described pixel wall 3 limits It is filled with first liquid 1, the oil reservoir of such as coloring, it belongs to inert fluid, be filled between first liquid 1 and Top electrode 4 Two liquid 2, it includes but is not limited to water, non-aqueous electrolytic solution, or other on-aqueous liquid, does not apply between upper/lower electrode 4,5 During making alive, second liquid 2 is not moistened with drain insulating layer 6.In one exemplary embodiment as shown in Figure 5,6, described electricity is situated between Matter layer 8 includes lower insulation layer and drain insulating layer 6, it is also possible to only drain insulating layer 6 in other feasible examples.Oil Layer with drain insulating layer 6, there is enough wettabilities so that oil reservoir between Top electrode 4 and bottom electrode 5 no applied voltage one Contact with drain insulating layer 6 under off status and drain insulating layer 6 is completely covered, according to this embodiment, wherein said pixel wall 3 is wrapped Include the pixel wall 3 with differing heights, the pixel wall 3 of wherein said differing heights includes the higher pixel wall with the first height 31, it is located at the first area 21 that EFD shows structure, and has the relatively low pixel wall 32 highly lower than first, and it is located at EFD shows a second area 22 of structure.
Wherein, the height of relatively low pixel wall 32 is set to, and makes applying one between Top electrode 4 and bottom electrode 5 default relatively During low-voltage, the oil reservoir of second area 22 is punctured by second liquid 2 first.
By such enforcement, the capacitance structure in EFD pixel is changed into as shown in Figure 5, in this embodiment, C11 It is respectively the electric capacity of the first liquid 1 being located at first area and second area with C12, C21 and C22 is the electric capacity of dielectric layer 8, In the electrical model of this theoretical property, C21=C22.
Wherein, there is the charge density ρ in the first area 21 of higher pixel wall 311Drawn by below equation:
ρ 1 = ϵ 0 ϵ 1 ϵ 1 d 0 + ϵ 0 d 1
Wherein ε0For the dielectric constant of dielectric layer 8, ε1For the dielectric constant of oil reservoir, d0For the height of dielectric layer 8, d1 For the height of higher pixel wall 31, example the first height as mentioned.
And there is the charge density ρ in the second area 22 of relatively low pixel wall 322Drawn by below equation, wherein d2It is relatively The height of low pixel wall 32:
ρ 2 = ϵ 0 ϵ 1 ϵ 1 d 0 + ϵ 0 d 2
Height d due to relatively low pixel wall 322Relatively low, the charge density of corresponding second area 22 is higher.Therefore can be pre- See, by applying relatively low electric potential difference, the oil reservoir in second area 22 is punctured by second liquid 2 first.So, permissible All pixels in prediction EFD device all puncture in the same area, and thus it is foreseeable that this operation phase in device Between, oil reservoir uniformly moves to the first area 21 with higher pixel wall 31 place.
In such EFD display device, including multiple EFD pixel lists with the controlled open system of above-mentioned oil puncture Unit, wherein, the first area 21 in the controlled open system of oil puncture in described every EFD pixel cell and second area 22 Orientation is consistent.
According to the structure with multiple different pixel wall 3 height of the present invention, can be advantageously using existing technique Processing procedure is realizing.
According to another embodiment of the present invention, as shown in Figure 6.The lower section of bottom electrode 5 is provided with substrate, and described substrate is at it The part of second area 22 is provided with a step 9, so that the portion that bottom electrode 5 and dielectric layer 8 are located on step 9 at it Point, exceed its part beyond being located at step 9, so that second thickness on step 9 for the oil reservoir, than it beyond step 9 First thickness is little.
In this example, relatively low pixel wall 32 and higher pixel wall 31 are set to top and flush, to facilitate subsequent technique Enforcement.
Preferably, the thickness difference between the second thickness of oil reservoir and first thickness is set to, and makes in Top electrode 4 and bottom electrode When applying a default low voltage between 5, the oil reservoir on step 9 is punctured by second liquid 2 first, and oil reservoir is by the Two liquid 2 are pushed, and move to first area 21 from second area 22.
Preferably, described substrate is located at the part of second area 22 at it and is provided with multiple steps 9, wherein further away from first The vertical height of the step 9 in region 21 is more than the vertical height of the step 9 of closer first area 21.So, the motion of oil reservoir Characteristic will be more smooth, and the modulation to the gray scale of display will be more prone to.
Preferably, it is provided with hydrophilic layer between Top electrode 4 and second liquid 2.
In this embodiment, manufacture a step 9 in substrate first, subsequent shaped electrode simultaneously applies dielectric layer 8.Finally make Manufacture pixel wall 3 with photoetching process.For the motion puncturing oil reservoir and control oil reservoir, the structure of Fig. 6 has close effect.
According to the principle of the present invention, by using different processes, build the pixel wall 3 with differing heights.? There is the second area 22 of relatively low pixels tall, charge density is higher.As a result, when applying relatively low electric potential difference, Oil reservoir in second area 22 punctures first.
According to one more embodiment of the present invention, it is the method for the controlled unlatching of oil puncture for EFD device, it includes following Step:
One EFD display structure is set in the controlled open system of described oil puncture;In described EFD display structure, setting One substrate, manufactures a step 9 on the substrate, so that described step 9 is higher than the basal region beyond it.
Molding bottom electrode 5 apply dielectric layer 8 in substrate, so that bottom electrode 5 and dielectric layer 8 are located at platform at it The vertical height of the part on rank 9 is higher than its part beyond being located at step 9, and wherein said dielectric layer 8 is set to including absolutely Edge layer and drain insulating layer 6.
Further, it is possible to pass through existing process, the insulating barrier of dielectric layer 8 is made to be located at the thickness of the part of step 9 at it, With its be located at step 9 beyond part thickness closely, this on electrology characteristic, can make insulating barrier its be located at step Part on 9 and beyond step 9 is respectively provided with close to equal capacitance.
Place outside dielectric layer 8 and manufacture a pixel wall 3 using photoetching process, wherein said pixel wall 3 includes having not Level pixel wall 3, the pixel wall 3 of described differing heights includes the relatively low pixel wall 32 positioned at step 9 top, and is located at Higher pixel wall 31 beyond step 9, it is alternatively possible to it is neat that relatively low pixel wall 32 and higher pixel wall 31 are fabricated to top Flat, to facilitate the enforcement of subsequent technique, so, relatively low pixel wall 32 will compare high pixel wall 31 size in vertical direction Little.
Fill oil reservoir in described pixel wall 3, the second thickness that wherein oil reservoir is located above step 9 at it is located at platform than it First thickness beyond rank 9 is little.
Top electrode 4 is set above pixel wall 3, fills second liquid 2 between Top electrode 4 and pixel wall 3.Preferably Ground, the thickness difference between second thickness and first thickness is set to, and makes applying one between Top electrode 4 and bottom electrode 5 default During low voltage, the oil reservoir positioned at step 9 top is punctured by second liquid 2 first, and oil reservoir is pushed by second liquid 2, from The regional movement to beyond step 9 for the region of step 9 top.
For exemplarily the present invention will be described, it is not precluded from other different structures to above example.For example, The height change of multistage step 9 can be shown as in EFD pixel.According to existing process, in some instances, pixel wall 3 Overhead height can be fabricated to respect to substrate bottom unanimously, and that is, top flushes, so that thickness on each step 9 for the first liquid 1 Degree is different;It is also possible to make pixel wall 3 highly consistent with respect to its bottom in other examples, first so still can be made Thickness on each step 9 for the liquid 1 is different, to realize the technique effect of the present invention.
The above, simply presently preferred embodiments of the present invention, the invention is not limited in above-mentioned embodiment, as long as It reaches the technique effect of the present invention with identical means, all should belong to protection scope of the present invention.Protection model in the present invention In enclosing, its technical scheme and/or embodiment can have various different modifications and variations.Even if individual other technical characteristic is not Quote in same claim, the present invention also can comprise to have the embodiment of these features.

Claims (9)

1. a kind of controlled open system of the oil puncture for EFD device is it is characterised in that described oil puncture controlled open system bag Include an EFD display structure, described EFD shows that structure includes being arranged on EFD and shows the Top electrode of structural top, is arranged on EFD and shows Show the bottom electrode of structural base, setting dielectric layer on the bottom electrode, setting pixel wall on the dielectric layer, wherein in institute It is filled with first liquid in the region stating pixel wall restriction, between first liquid and Top electrode, be filled with second liquid, described Dielectric layer includes drain insulating layer, and first liquid and drain insulating layer have enough wettabilities, so that first liquid is upper Contact with drain insulating layer under an off status of no applied voltage between electrode and bottom electrode and drain insulating layer is completely covered, its Described in pixel wall include the pixel wall with differing heights, the pixel wall of wherein said differing heights includes thering is the first height Higher pixel wall, it is located at the first area that EFD shows structure, and has the relatively low pixel wall highly lower than first, It is located at the second area that EFD shows structure,
Wherein, the height of relatively low pixel wall is set to, when making to apply a default low voltage between Top electrode and bottom electrode, The first liquid of second area is breakdown first.
2. the controlled open system of a kind of oil puncture for EFD device according to claim 1 is it is characterised in that lower electricity The lower section of pole is provided with substrate, described substrate its be located at second area part be provided with a step so that bottom electrode and The part that dielectric layer is located on step at it, exceeds its part beyond being located at step, so that first liquid is on step Second thickness, less than its first thickness beyond step.
3. a kind of controlled open system of oil puncture for EFD device according to claim 2 is it is characterised in that first Thickness difference between the second thickness of liquid and first thickness is set to, and makes applying one between Top electrode and bottom electrode default During low voltage, the first liquid on step is punctured by second liquid first, and first liquid is pushed by second liquid, Move to first area from second area.
4. a kind of controlled open system of oil puncture for EFD device according to claim 2 is it is characterised in that described Substrate is located at the part of second area at it and is provided with multiple steps, and the wherein vertical height further away from the step of first area is big Vertical height in the step of closer first area.
5. a kind of controlled open system of oil puncture for EFD device according to claim 1 is it is characterised in that described First liquid is inert fluid, and it includes the oil reservoir colouring.
6. the controlled open system of a kind of oil puncture for EFD device according to claim 1 is it is characterised in that upper electricity It is provided with hydrophilic layer between pole and second liquid.
7. a kind of EFD display device is it is characterised in that it includes multiple thering is that oil puncture as claimed in claim 1 is controlled to open The EFD pixel cell of starting system, wherein, the firstth area in the controlled open system of oil puncture in described every EFD pixel cell Domain is consistent with the orientation of second area.
8. a kind of method of the controlled unlatching of the oil puncture for EFD device is it is characterised in that comprise the following steps:In oil puncture One EFD display structure is set in controlled open system;In described EFD display structure, a substrate is set, makes on the substrate Make a step, so that described step is higher than the basal region beyond it;Molding bottom electrode apply dielectric layer in substrate, with The vertical height making the bottom electrode and dielectric layer part on it is positioned at step is higher than its part beyond being located at step, its Described in dielectric layer be set to including drain insulating layer;Place outside dielectric layer and manufacture a pixel wall using photoetching process, Wherein said pixel wall includes the pixel wall with differing heights, and the pixel wall of described differing heights is included above step Relatively low pixel wall, and it is located at the higher pixel wall beyond step;First liquid, the wherein first liquid is filled in described pixel wall The first thickness beyond being located at step is little than it for second thickness above it is positioned at step for the body;In setting above pixel wall Electrode, fills second liquid between Top electrode and pixel wall.
9. a kind of method of the controlled unlatching of oil puncture for EFD device according to claim 8 is it is characterised in that Thickness difference between two thickness and first thickness is set to, and makes to apply a default low voltage between Top electrode and bottom electrode When, the first liquid above step is punctured by second liquid first, and first liquid is pushed by second liquid, from step The regional movement to beyond step for the region of top.
CN201410084369.5A 2014-03-07 2014-03-07 Oil breakdown controlled opening system used for EFD device and manufacturing method thereof Active CN103901606B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410084369.5A CN103901606B (en) 2014-03-07 2014-03-07 Oil breakdown controlled opening system used for EFD device and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410084369.5A CN103901606B (en) 2014-03-07 2014-03-07 Oil breakdown controlled opening system used for EFD device and manufacturing method thereof

Publications (2)

Publication Number Publication Date
CN103901606A CN103901606A (en) 2014-07-02
CN103901606B true CN103901606B (en) 2017-02-08

Family

ID=50993039

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410084369.5A Active CN103901606B (en) 2014-03-07 2014-03-07 Oil breakdown controlled opening system used for EFD device and manufacturing method thereof

Country Status (1)

Country Link
CN (1) CN103901606B (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4596410B2 (en) * 2003-09-30 2010-12-08 富士フイルム株式会社 Display device
GB201004244D0 (en) * 2010-03-15 2010-04-28 Liquavista Bv Electrowetting display device
JP2013134275A (en) * 2011-12-26 2013-07-08 Japan Display East Co Ltd Display device and method for driving the same
CN202615040U (en) * 2012-06-15 2012-12-19 京东方科技集团股份有限公司 Electrowetting display

Also Published As

Publication number Publication date
CN103901606A (en) 2014-07-02

Similar Documents

Publication Publication Date Title
US20050040048A1 (en) Electropolymerization method for preparing nano-tube type conducting polymer using porous template, method for preparing electrochromic device, and electrochromic device prepared therefrom
CN104656248B (en) A kind of display methods of Electrowetting display panel, display device and display panel
US20080304135A1 (en) In-Plane Switching Electrophoretic Display
KR101719158B1 (en) Electrophoretic display device and method for manufacturing the same
CN105425385B (en) A kind of electric moistening display for controlling ink movement and preparation method thereof
CN103901606B (en) Oil breakdown controlled opening system used for EFD device and manufacturing method thereof
CN106125291A (en) A kind of bistable state electric moistening display and preparation method thereof
KR20120038226A (en) Electrophoretic display device and manufacturing method thereof
JP2009075345A (en) Manufacturing method of electrophoretic display panel and electrophoretic display panel
US7623284B2 (en) Electropolymerization method for preparing nano-tube type conducting polymer using porous template, method for preparing electrochromic device, and electrochromic device prepared therefrom
WO2024046506A1 (en) Lower substrate for electrowetting display device, and electrowetting display device and preparation method therefor
CN105445927A (en) Printing ink motion controllable electrowetting display and preparation method thereof
CN106773445A (en) A kind of display unit, display device and its touch control method
CN104459993A (en) Pixel structure and electrowetting display device comprising same
US9779672B2 (en) Oil puncture controlled starting system for EFD apparatus and manufacturing method therefor
CN110161675A (en) A kind of electric moistening display part and preparation method thereof based on conductive column
CN110609384B (en) Device capable of controlling ink movement based on electrowetting technology and preparation method thereof
CN102419474B (en) Manufacture method of electrowetting element with hydrophobic retaining wall
CN106652793A (en) Handwriting screen
CN106054371B (en) A kind of electric moistening display and preparation method thereof
CN106373532A (en) Array substrate, electrowetting display panel and display device
CN207488614U (en) A kind of bistable electro soaks display device
CN210005795U (en) electrowetting display device based on conductive column
CN103941512B (en) The manufacture method of pixel dividing wall, array base palte and AMECD
EP3391119B1 (en) Electrowetting element with ridge

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: 510631 University Town, Guangdong, South China Normal University, five, 407,, Guangzhou

Applicant after: SOUTH CHINA NORMAL University

Applicant after: SHENZHEN GUOHUA OPTOELECTRONICS Co.,Ltd.

Applicant after: ACADEMY OF SHENZHEN GUOHUA OPTOELECTRONICS

Address before: 510631 University Town, Guangdong, South China Normal University, five, 407,, Guangzhou

Applicant before: South China Normal University

Applicant before: SHENZHEN GUOHUA OPTOELECTRONICS Co.,Ltd.

Applicant before: SHENZHEN GUOHUA OPTOELECTRONICS INSTITUTE

COR Change of bibliographic data
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20240619

Address after: 518000 b715, Yinxing technology building, 1301 Guanlan community sightseeing Road, Guanlan street, Longhua District, Shenzhen City, Guangdong Province

Patentee after: SHENZHEN GUOHUA OPTOELECTRONICS Co.,Ltd.

Country or region after: China

Address before: South China advanced Optoelectronics Research Institute, South China Normal University, No. 378, Waihuan West Road, Panyu District, Guangzhou City, Guangdong Province, 510006

Patentee before: SOUTH CHINA NORMAL University

Country or region before: China

Patentee before: SHENZHEN GUOHUA OPTOELECTRONICS Co.,Ltd.

Patentee before: ACADEMY OF SHENZHEN GUOHUA OPTOELECTRONICS

TR01 Transfer of patent right
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20140702

Assignee: Guangxian Technology (Guangdong) Co.,Ltd.

Assignor: SHENZHEN GUOHUA OPTOELECTRONICS Co.,Ltd.

Contract record no.: X2024980014574

Denomination of invention: An oil breakdown controlled opening system for EFD devices and its manufacturing method

Granted publication date: 20170208

License type: Exclusive License

Record date: 20240910

EE01 Entry into force of recordation of patent licensing contract