CN103896492A

CN103896492A - Device for manufacturing glass porous body, its manufacturing method and optical fiber perform manufacturing method

Info

Publication number: CN103896492A
Application number: CN201310713452.XA
Authority: CN
Inventors: 远藤祥; 池田正司
Original assignee: Fujikura Ltd
Current assignee: Fujikura Ltd
Priority date: 2012-12-25
Filing date: 2013-12-20
Publication date: 2014-07-02
Anticipated expiration: 2033-12-20
Also published as: JP5651675B2; CN103896492B; JP2014125359A

Abstract

The present invention provides a device for manufacturing glass porous body, its manufacturing method and optical fiber perform manufacturing method which makes a glass porous body by enabling the flames from a burner to become glass particles and depositing the glass particles on a target in a chamber. The burner can be arranged backwardly to the outdoor retreat area of the burning chamber and the place right to the outdoor retreat area is provided with a channel for blowing and discharging air away.

Description

The manufacturing installation of glass porous insert and manufacture method and fibre parent material manufacture method

Technical field

The present invention relates to manufacturing installation and manufacture method and the fibre parent material of the glass porous insert using in the manufacture of the base glass material for fibre parent material and various optics, heat-resistant part etc.

Background technology

Conventionally, for the silica glass mother metal of fibre parent material etc. by sintering VAD(Vapor phase axial deposition) method or OVD(Outside vapor deposition) the glass porous insert made of the SOOT method (flame hydrolysis external sediment method) such as method, its transparent glass is made.Optical fiber for example, by manufacturing the fibre parent material wire drawing making like this (can referring to patent documentation 1～9).

Fig. 1 illustrates an example of the glass apparatus for producing porous body 10 that adopts OVD method.Glass porous insert 1 passes through SiCl ₄unstripped gas and oxygen hydrogen (O such as (silicon tetrachlorides) ₂+ H ₂) etc. gas from raw material pipe arrangement line 8 be supplied to burner 2, again by flame 3 generate glass granules be deposited on target 4 peripheries and obtain.Cylindric for glass granules is deposited as in target 4 peripheries, target 4 is pivoted, and make burner 2 do relative movement with respect to the length direction of target 4.Target 4 is coated by chamber 5, in this chamber 5, on the position just relative with burner 2, is provided with venting port 6.The glass granules not adhering to and the combustion gases that in manufacture, produce are discharged by venting port 6.Target 4 is supported by the supports such as rotating disk 7.

In the time that glass granules deposition finishes, in raw material pipe arrangement line 8, pass into the rare gas element such as nitrogen, argon, discharge (referring to Fig. 2) from burner 2.This is the unstripped gas remaining in pipe arrangement, burner inside etc. in order to discharge, and prevents in impurity intrusion pipe arrangement.To be called sweeping gas 9 from burner 2 expellant gas herein below.In addition,, taking out glass porous insert or cleaning chamber 5 when interior, for fear of burner 2 breakages, burner 2 is retreated to outside chamber 5.

Patent documentation:

Patent documentation 1: TOHKEMY 2010-202445 communique

Patent documentation 2: TOHKEMY 2005-247624 communique

Patent documentation 3: TOHKEMY 2003-073138 communique

Patent documentation 4: TOHKEMY 2004-091309 communique

Patent documentation 5: TOHKEMY 2006-347780 communique

Patent documentation 6: TOHKEMY 2012-062203 communique

Patent documentation 7: TOHKEMY 2009-167028 communique

Patent documentation 8: Japanese kokai publication hei 7-101744 communique

Patent documentation 9: TOHKEMY 2012-193066 communique

Summary of the invention

Once unstripped gas is flowed in raw material pipe arrangement line, even if purge, raw material also can stick on raw material pipe arrangement line, therefore, can remain all the time micro-raw material in sweeping gas.As shown in Figure 2, during making burner 2 retreat to outside chamber 5, sweeping gas 9 diffuses to indoor, due to the impact of raw material residual in sweeping gas 9, around manufacturing installation 10, become indoor various device, article, equipment etc. (be not limited to manufacturing installation 10 and its accessory) corrosion, deteriorated reason.As unstripped gas, sometimes also can use for example SiCl ₄deng metal chloride, fluorine cpd, still, in these compounds, also existing can the rear composition that produces the corrosivess such as HCl, HF of hydrolysis.

If the indoor foreign matter such as rust staining, dirt is sneaked in glass porous insert, the glasswork of being made up of this glass porous insert can go bad, deteriorated.For example, manufacture when optical fiber, there will be Optical Fiber Transmission consumption to worsen, and because the bubble producing in mother metal causes fracture of wire in wire drawing or in shield test reactor etc., cause decrease in yield.Therefore,, in order to remove the indoor foreign matter such as rust staining, dirt, need to regularly safeguard.Improve rate of utilization, the raising throughput of manufacturing installation, preferably can reduce generation, the minimizing maintenance times of indoor foreign matter.

The present invention In view of the foregoing makes, and aims to provide the manufacturing installation of glass porous insert and the manufacture method of manufacture method and fibre parent material that can suppress corrosion around, burn into reduction frequency of maintenance.

In order to solve above-mentioned problem, the invention provides the manufacturing installation that the glass granules that makes to generate is deposited on the target being accommodated in chamber, manufactures glass porous insert in the flame of burner, this manufacturing installation is characterised in that, said burner can retreat to the burner buffer region being arranged on outside above-mentioned chamber, has the pipeline that attracts the sweeping gas of discharging from said burner on the position just relative with the said burner that retreats to said burner buffer region.

Preferably, have the moving track that the said burner of making moves along the length direction of above-mentioned target, said burner can retreat to said burner buffer region by above-mentioned moving track.

In addition, the invention provides the manufacture method of glass porous insert, in the method, use the manufacturing installation of above-mentioned glass porous insert to manufacture glass porous insert.

Preferably before or after the operation of manufacturing above-mentioned glass porous insert, there is the operation that the said burner of making retreats to said burner buffer region, attracts the sweeping gas of discharging from said burner by being configured in the locational above-mentioned pipeline just relative with said burner.

In addition, the invention provides the manufacture method of fibre parent material, the method comprises the operation that uses the manufacture method of above-mentioned glass porous insert to manufacture glass porous insert.

According to the present invention, by preventing the diffusion of sweeping gas, can suppress corrosion, corrosion around, cut down frequency of maintenance, improve unit service factor.

Brief description of the drawings

Fig. 1 is the schematic diagram that shows an example of the glass granules deposition apparatus that adopts OVD method.

Fig. 2 is the explanatory view of the purging operation in the glass granules deposition apparatus of Fig. 1.

Fig. 3 is the schematic diagram that shows an example of glass apparatus for producing porous body of the present invention.

Fig. 4 is the chart that shows the relation of the discarded rate of optical fiber causing with bubble between the continuous operating period of manufacturing installation.

Embodiment

Below, by preferred implementation, the present invention will be described by reference to the accompanying drawings.

Fig. 3 shows an example of glass apparatus for producing porous body of the present invention.The manufacturing installation 10 of Fig. 3 is same as in figure 1, is deposited on the target 4 being accommodated in chamber 5 and is manufactured glass porous insert 1 by the glass granules that makes to generate in the flame 3 of burner 2.In addition, burner 2 can retreat to the burner buffer region 11 being arranged on outside chamber 5, with retreat to the just relative position of burner 2 of burning buffer region 11 on have attract the sweeping gas 9(discharging from burner 2 referring to Fig. 2) pipeline 13(referring to Fig. 3).

In the manufacture method of glass porous insert of the present invention, before or after the operation of manufacturing glass porous insert (between the operation of the manufacture glass porous insert more than 2 times), make burner 2 retreat to burner buffer region 11, attract the sweeping gas of discharging from burner 2 by being configured in the locational pipeline 13 just relative with burner 2.

Thus, during making burner 2 retreat to outside chamber 5, can prevent that sweeping gas is to indoor diffusion, suppress indoor and device self corrosion.Can also cut down thus indoor frequency of maintenance, improve operation factor.

Pipeline 13 can use the various materials such as plastics, metal to form, but the good materials of rust-preventing characteristic such as preferred vinylchlorid.

Pipeline 13 should be configured to attract as much as possible the sweeping gas of discharging from burner 2, for example, preferably can attract 90% to more than 99%, preferably can attract 100%.Burner 2 inside have the stream of the gas such as unstripped gas, oxygen, and the front end of this stream has can spray gas, make flame 3(referring to Fig. 1) produce opening.Gas flow path can be circular concentric with burner urceolus, and 1 or 2 above little cylinder also can be set.In addition,, because sweeping gas is discharged from the opening of unstripped gas stream, therefore, preferably the extended line of all unstripped gas streams is included in pipeline suction port inner side.Preferably by fully close pipeline burner front end.

The direction of unstripped gas stream can be parallel with burner length direction, also can inwards tilt towards the central shaft of burner, can also expand laterally, tilt from burner central shaft.In the time that the direction of unstripped gas stream inwards tilts towards burner central shaft, can on the axial same circumference in burner center, multiple unstripped gas streams be set, and the extended line of these unstripped gas streams is converged on a bit in (focus) with the distance (focal length) of regulation.When the extended line of multiple unstripped gas streams converges on when some, due to the position far away than focus, gas is dispersed on the contrary, therefore, preferably pipeline suction port is configured in to the position nearer than focus.

The port area of pipeline suction port is preferably wide than the port area of burner front end.Pipeline traffic attraction (volume that the unit time attracts) is preferably fully greater than the output (volume that the unit time discharges) of the sweeping gas of discharging from burner.But when traffic attraction is excessive, room air can be subject to a lot of attraction, therefore, if needed, preferably suitably regulate traffic attraction.

Embodiment

Fig. 3 illustrates the embodiment of OVD deposition apparatus.Same as in figure 1, burner 2 can move on the length direction of target 4, can use desirable position on oxygen hydrogen flame 3 calcination targets 4.In addition, be set with burner buffer region 11 at the side of chamber 5, in the process of taking out glass porous insert 1 or in the process of cleaning chamber 5, can make burner 2 retreat to burner buffer region 11.

In this embodiment, when deposition glass granules, make the moving track 12 that burner 2 moves along the length direction of target 4 extend to burner buffer region 11.Thus, can make burner 2 retreat to burner buffer region 11 along moving track 12, also can make burner 2 be back in chamber 5 along moving track 12.

In addition, in burner buffer region 11, on the position just relative with burner 2, be provided with gas exhaust duct 13(referring to Fig. 3), its have attract the sweeping gas 9(that discharges from burner 2 referring to Fig. 2) structure.

While manufacturing glass porous insert, first, be arranged on the glass stick that comprises core as target on OVD deposition apparatus.The burner that retreats to burner buffer region is moved in chamber, start to deposit glass granules.Make glass granules on target, be deposited into desirable thickness, can make thus glass porous insert.

After the manufacture of glass porous insert finishes, nitrogen is passed in burner as sweeping gas, and make burner again retreat to burner buffer region.Be attached under the state on target glass porous insert is taken out from chamber at glass porous insert.Remove after the glass granules remaining in chamber by venting port, suction cleaner etc. in chamber, then at another target of chamber indoor location, start to manufacture glass porous insert.

In addition, the glass porous insert of making, at sintering on the glass stick of target, is made to its transparent glass above, form thus taking glass stick as core, fibre parent material taking the transparent glass that obtained by glass porous insert as cladding part.

For rust staining and dirt with sweeping gas removal device, before burner buffer region arranges gas exhaust duct, within once every 3 months, keep in repair (comparative example of Fig. 4), and by gas exhaust duct is installed in burner buffer region, even if move continuously OVD deposition apparatus between half a year, still obtained good optical fiber (embodiment of Fig. 4).In Fig. 4 by the meaning of A.U.(" arbitrary unit ") tendency of the discarded rate of optical fiber that (from left side) and bubble cause between the continuous operating period of indication device, and contrast.

The present invention is not limited to the manufacture of fibre parent material, can also be applied to silica (SiO ₂) be the manufacture of the glasswork of main component.Silica glass is not limited to pure SiO ₂, also can add GeO ₂, B ₂o ₃, Al ₂o ₃, F, TiO ₂deng.Also can be applicable to the manufacture of the heat-resistant parts such as the opticses such as lens, prism, photomask, boiler tube, retort furnace, crucible.

Nomenclature:

1 ... glass porous insert, 2 ... burner, 3 ... flame, 4 ... target, 5 ... chamber, 6 ... venting port, 7 ... support, 8 ... raw material pipe arrangement line, 9 ... sweeping gas, 10 ... manufacturing installation, 11 ... burner buffer region, 12 ... moving track, 13 ... pipeline.

Claims

1. the manufacturing installation of glass porous insert, it is deposited on the target being accommodated in chamber the glass granules generating in burner flame, manufactures glass porous insert, wherein,

Described burner can retreat to the burner buffer region being arranged on outside described chamber,

On the position just relative with the described burner that retreats to described burner buffer region, there is the pipeline that attracts the sweeping gas of discharging from described burner.

2. the manufacturing installation of glass porous insert according to claim 1, is characterized in that, has the moving track that described burner is moved along described target length direction, and described burner can retreat to described burner buffer region by described moving track.

3. the manufacture method of glass porous insert, its right to use requires the manufacturing installation of the glass porous insert described in 1 or 2 to manufacture glass porous insert.

4. the manufacture method of glass porous insert according to claim 3, it is characterized in that, before or after manufacturing the operation of glass porous insert, have and make described burner retreat to described burner buffer region, attract from the operation of the sweeping gas of described burner discharge by being configured in the locational described pipeline just relative with described burner.

5. the manufacture method of fibre parent material, it comprises the operation of manufacturing glass porous insert by the manufacture method of glass porous insert claimed in claim 3.

6. the manufacture method of fibre parent material, it comprises the operation of manufacturing glass porous insert by the manufacture method of glass porous insert claimed in claim 4.