CN103887135A - 离子注入系统 - Google Patents
离子注入系统 Download PDFInfo
- Publication number
- CN103887135A CN103887135A CN201210566738.5A CN201210566738A CN103887135A CN 103887135 A CN103887135 A CN 103887135A CN 201210566738 A CN201210566738 A CN 201210566738A CN 103887135 A CN103887135 A CN 103887135A
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- Prior art keywords
- dividing plate
- implantation chamber
- implantation
- gas
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005468 ion implantation Methods 0.000 title abstract description 8
- 238000002513 implantation Methods 0.000 claims abstract description 71
- 150000002500 ions Chemical class 0.000 claims description 35
- 239000007943 implant Substances 0.000 claims description 27
- 238000001816 cooling Methods 0.000 claims description 15
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- 239000011148 porous material Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 4
- 238000005192 partition Methods 0.000 abstract 5
- 238000002347 injection Methods 0.000 description 10
- 239000007924 injection Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000007654 immersion Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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- Electron Sources, Ion Sources (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210566738.5A CN103887135B (zh) | 2012-12-24 | 2012-12-24 | 离子注入系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210566738.5A CN103887135B (zh) | 2012-12-24 | 2012-12-24 | 离子注入系统 |
Publications (2)
Publication Number | Publication Date |
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CN103887135A true CN103887135A (zh) | 2014-06-25 |
CN103887135B CN103887135B (zh) | 2016-05-18 |
Family
ID=50955973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210566738.5A Active CN103887135B (zh) | 2012-12-24 | 2012-12-24 | 离子注入系统 |
Country Status (1)
Country | Link |
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CN (1) | CN103887135B (zh) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6269765B1 (en) * | 1998-02-11 | 2001-08-07 | Silicon Genesis Corporation | Collection devices for plasma immersion ion implantation |
US20060019039A1 (en) * | 2004-07-20 | 2006-01-26 | Applied Materials, Inc. | Plasma immersion ion implantation reactor having multiple ion shower grids |
US20080075834A1 (en) * | 2004-10-23 | 2008-03-27 | Kartik Ramaswamy | Dosimetry using optical emission spectroscopy/residual gas analyzer in conjuntion with ion current |
CN101922046A (zh) * | 2010-09-01 | 2010-12-22 | 中国科学院微电子研究所 | 一种等离子体浸没注入装置 |
CN101939821A (zh) * | 2008-02-06 | 2011-01-05 | 应用材料股份有限公司 | 利用腔室内部表面上的纯硅或近乎纯硅处理层进行的等离子体浸没式离子注入法 |
CN102296275A (zh) * | 2010-06-25 | 2011-12-28 | 中国科学院微电子研究所 | 基片离子均匀注入的方法 |
CN102792425A (zh) * | 2010-03-10 | 2012-11-21 | 应用材料公司 | 循环氧化与蚀刻的设备及方法 |
-
2012
- 2012-12-24 CN CN201210566738.5A patent/CN103887135B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6269765B1 (en) * | 1998-02-11 | 2001-08-07 | Silicon Genesis Corporation | Collection devices for plasma immersion ion implantation |
US20060019039A1 (en) * | 2004-07-20 | 2006-01-26 | Applied Materials, Inc. | Plasma immersion ion implantation reactor having multiple ion shower grids |
US20080075834A1 (en) * | 2004-10-23 | 2008-03-27 | Kartik Ramaswamy | Dosimetry using optical emission spectroscopy/residual gas analyzer in conjuntion with ion current |
CN101939821A (zh) * | 2008-02-06 | 2011-01-05 | 应用材料股份有限公司 | 利用腔室内部表面上的纯硅或近乎纯硅处理层进行的等离子体浸没式离子注入法 |
CN102792425A (zh) * | 2010-03-10 | 2012-11-21 | 应用材料公司 | 循环氧化与蚀刻的设备及方法 |
CN102296275A (zh) * | 2010-06-25 | 2011-12-28 | 中国科学院微电子研究所 | 基片离子均匀注入的方法 |
CN101922046A (zh) * | 2010-09-01 | 2010-12-22 | 中国科学院微电子研究所 | 一种等离子体浸没注入装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103887135B (zh) | 2016-05-18 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190529 Address after: Room 820, 8th Floor, Building 1, 13 Guocheng Road, Shunqing District, Nanchong City, Sichuan Province Patentee after: Zhongke Jiuwei Technology Co.,Ltd. Address before: 100029 Microelectronics Institute, Chinese Academy of Sciences, 3 north earth road, Chaoyang District, Beijing Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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TR01 | Transfer of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Ion implantation system Effective date of registration: 20231109 Granted publication date: 20160518 Pledgee: Sichuan Tianfu Bank Co.,Ltd. Business Department Pledgor: Zhongke Jiuwei Technology Co.,Ltd. Registration number: Y2023980064475 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |