CN103887133B - 一种磁场增强型线性大面积离子源 - Google Patents
一种磁场增强型线性大面积离子源 Download PDFInfo
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- CN103887133B CN103887133B CN201410129716.1A CN201410129716A CN103887133B CN 103887133 B CN103887133 B CN 103887133B CN 201410129716 A CN201410129716 A CN 201410129716A CN 103887133 B CN103887133 B CN 103887133B
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109559962A (zh) * | 2017-09-26 | 2019-04-02 | 深圳市鼎力真空科技有限公司 | 一种窄束型线性离子源 |
CN108914091B (zh) * | 2018-08-10 | 2020-09-01 | 成都极星等离子科技有限公司 | 一种改进型阳极层离子源 |
CN109166780B (zh) * | 2018-09-27 | 2023-10-24 | 中山市博顿光电科技有限公司 | 一种条形霍尔离子源 |
CN109559969A (zh) * | 2018-11-28 | 2019-04-02 | 合肥如真空设备有限公司 | 一种增强型离子源 |
CN110767522B (zh) * | 2019-11-04 | 2022-03-18 | 无锡诚承电子科技有限公司 | 一种聚焦型线性阳极层离子源 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002280378A (ja) * | 2001-01-11 | 2002-09-27 | Hitachi Kokusai Electric Inc | バッチ式リモートプラズマ処理装置 |
CN101089617A (zh) * | 2006-06-12 | 2007-12-19 | 东捷科技股份有限公司 | 结合电子显微镜样品室且可供观测的液/气环境 |
CN201409253Y (zh) * | 2009-05-05 | 2010-02-17 | 核工业西南物理研究院 | 一种阳极层线性离子源 |
CN101685753A (zh) * | 2008-09-28 | 2010-03-31 | 和舰科技(苏州)有限公司 | 具有气体缓冲均匀功能的离子源 |
CN102254775A (zh) * | 2011-03-29 | 2011-11-23 | 核工业西南物理研究院 | 增强磁场型线性离子源 |
CN204130495U (zh) * | 2014-04-01 | 2015-01-28 | 南京迪奥赛真空科技有限公司 | 一种磁场增强型线性大面积离子源 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002280378A (ja) * | 2001-01-11 | 2002-09-27 | Hitachi Kokusai Electric Inc | バッチ式リモートプラズマ処理装置 |
CN101089617A (zh) * | 2006-06-12 | 2007-12-19 | 东捷科技股份有限公司 | 结合电子显微镜样品室且可供观测的液/气环境 |
CN101685753A (zh) * | 2008-09-28 | 2010-03-31 | 和舰科技(苏州)有限公司 | 具有气体缓冲均匀功能的离子源 |
CN201409253Y (zh) * | 2009-05-05 | 2010-02-17 | 核工业西南物理研究院 | 一种阳极层线性离子源 |
CN102254775A (zh) * | 2011-03-29 | 2011-11-23 | 核工业西南物理研究院 | 增强磁场型线性离子源 |
CN204130495U (zh) * | 2014-04-01 | 2015-01-28 | 南京迪奥赛真空科技有限公司 | 一种磁场增强型线性大面积离子源 |
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Application publication date: 20140625 Assignee: ANHUI DUOJIN COATING TECHNOLOGY CO., LTD. Assignor: NANJING DIAOSAI VACUUM TECHNOLOGY CO., LTD. Contract record no.: 2017340000014 Denomination of invention: Magnetic field reinforced type linear large-area ion source Granted publication date: 20160127 License type: Exclusive License Record date: 20170413 |
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Effective date of registration: 20180511 Address after: 243000 A308, 399 Chuang Chuang center, 399 Meishan Road, Anhui economic and Technological Development Zone, Ma'anshan Patentee after: ANHUI DUOJIN COATING TECHNOLOGY CO., LTD. Address before: 210000 Room 501, four building, hi tech Industrial Park, 6 wing Chi Road, Bai Xia District, Nanjing, Jiangsu Patentee before: NANJING DIAOSAI VACUUM TECHNOLOGY CO., LTD. |
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Address after: 243000 One Floor, Building 1669, North Huolishan Avenue, Cihu High-tech Zone, Ma'anshan City, Anhui Province Patentee after: ANHUI DUOJIN COATING TECHNOLOGY CO., LTD. Address before: A308 in Kechuang Center No. 399 Meishan Road, Maanshan Economic and Technological Development Zone, Anhui Province Patentee before: ANHUI DUOJIN COATING TECHNOLOGY CO., LTD. |
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