CN103872266A - Reel-to-reel organic photoelectronic device manufacturing equipment and method - Google Patents
Reel-to-reel organic photoelectronic device manufacturing equipment and method Download PDFInfo
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- CN103872266A CN103872266A CN201410130950.6A CN201410130950A CN103872266A CN 103872266 A CN103872266 A CN 103872266A CN 201410130950 A CN201410130950 A CN 201410130950A CN 103872266 A CN103872266 A CN 103872266A
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Abstract
The invention discloses reel-to-reel organic photoelectronic device manufacturing equipment. The equipment comprises an inert gas chamber, a reel-to-reel conveying device, an organic functional layer manufacturing system and a cathode forming system, wherein the reel-to-reel conveying device, the organic functional layer manufacturing system and the negative pole forming system are arranged in the inert gas chamber, the organic functional layer manufacturing system and the negative pole forming system are sequentially arranged with one after the other in the device material conveying direction, and a water analysis meter and an oxygen analysis meter are further arranged in the inert gas chamber. According to a reel-to-reel organic photoelectronic device manufacturing method, continuous, fast and large-scale manufacturing of organic photoelectronic devices can be achieved, the industrialization barriers that the cost of the traditional technology is high and continuous, fast and large-scale manufacturing can not be achieved are broken, and an excellent method is provided for manufacturing flexible and transparent organic devices.
Description
Technical field
The invention belongs to organic optoelectronic device field, be specifically related to volume to volume Preparation equipment of a kind of organic optoelectronic device and preparation method thereof.
Background technology
The nineteen forty-seven Chinese descendant in America that is born in Hong Kong teaches Deng Qingyun and in laboratory, has found Organic Light Emitting Diode, namely OLED, launch thus the research to OLED, 1987, Deng Qingyun professor and Vanslyke adopted ultrathin membrane technology, made anode with nesa coating, AlQ3 makes luminescent layer, three arylamine are made hole transmission layer, and Mg/Ag alloy is made negative electrode, have made double-deck organic electroluminescence device.Nineteen ninety, the people such as Burroughes have found the OLED take conjugated polymer PPV as luminescent layer, from then in worldwide, have started the upsurge of OLED research.
The simplest OLED structure is: anode, luminescent layer, negative electrode.For boost device luminous efficiency, need add implanted layer and transport layer.The operation principle of OLED is: hole and electronics inject from anode and negative electrode respectively, arrive transport layer through the implanted layer that reduces potential barrier, arrive luminescent layer by the transport layer that regulates both hole and electron recombination region, hole and electronics meet compound at luminescent layer, the outer-shell electron that the energy discharging makes luminescent material by ground state transition to excitation state, the process that electronics is got back to ground state by excitation state can release energy with luminous form, finally forms electro optical phenomenon.The appearance of OLED has brought huge business opportunity to illumination, demonstration, the field such as backlight, has also proposed a lot of challenges simultaneously.At present, OLED still has several hang-ups to assault fortified position: macromolecule OLED efficiency is low; Device lifetime, value was low; OLED cost is high, expensive; Flexible and transparent technology is also immature.Current OLED makes mainly with the mode of vacuum evaporation, and this process costs is high, can not realize continuously, prepare fast, on a large scale OLED, and cost can OLED product business-like big factors just.Therefore be badly in need of a kind of equipment and process method of preparing continuously, fast, on a large scale OLED.
Summary of the invention
In view of this; the object of this invention is to provide volume to volume Preparation equipment of a kind of organic optoelectronic device and preparation method thereof; adopt this equipment to prepare OLED; relatively existing method has continuously, advantage fast; can carry out large scale, high-quality OLED scale preparation, the industrialization of OLED is played to great progradation.
The object of the invention is to be achieved through the following technical solutions:
A volume to volume Preparation equipment for organic optoelectronic device, comprises inert gas chamber and is arranged on the indoor volume to volume transmitting device of inert gas cavity, organic function layer preparation system and negative electrode forming system; Described organic function layer preparation system and negative electrode form system and successively arrange along device material transmission direction successively;
Further, indoor water analyzer, oxygen analyzer and the decontaminating column for adsorbed water and oxygen of being also provided with of described inert gas cavity;
Further, described volume to volume equipment is also provided with vacuum pump for inert gas chamber is vacuumized and for fill the inertia gas cylinder of noble gas to inert gas chamber;
Further, described volume to volume transmitting device comprises at least one emptying roller and material receiving roller, is also provided with multiple transmission roll shafts for transmission apparatus material between described emptying roller and material receiving roller;
Further, deviation-rectifying system before and after described volume to volume transmitting device is also provided with, described front and back deviation-rectifying system comprises edge of materials inductor and transmits prosthetic device, described edge of materials inductor is arranged on emptying roller and material receiving roller, and described transmission prosthetic device is connected on the axle of emptying roller and material receiving roller;
Further, described volume to volume transmitting device also comprises tension control system, and described tension control system comprises tension force induction installation and revolution speed control device;
Further, described organic function layer preparation system comprises and is used to form the slot coated system of organic wet film and is positioned at organic solvent volatilization system thereafter;
Further, described negative electrode formation system comprises that negative electrode wet film forms system and is positioned at the volatilization system for drying thereafter;
Further, described negative electrode wet film formation system comprises doctor blade system, silk screen printing system and ink-jet print system;
Further, described volatilization system comprises for the heating system of heated cathode wet film, for the hygrosensor of detecting temperature and for regulating the temperature controller of temperature.
In addition, utilize volume to volume Preparation equipment of the present invention to manufacture the method for organic optoelectronic device, comprise the steps:
1), utilize vacuum pump, inertia gas cylinder, water analyzer, oxygen analyzer and decontaminating column to make inert gas cavity indoor in anhydrous and oxygen-free state;
2), will be arranged on emptying roller with the flexible substrate material of anode layer, the open end of described backing material is wrapped on material receiving roller, rotates emptying roller and material receiving roller with identical speed, and backing material is transmitted along fixed course;
3), utilizing slot coated system that flexible substrate material is coated with goes up organic function layer, then makes the device function layer of the organic function layer formation stable in properties in flexible substrate material through organic solvent volatilization system;
4), finally utilize negative electrode to form system and in flexible substrate material, prepare device cathodes layer.
The invention has the beneficial effects as follows: organic optoelectronic device can be realized continuously, be prepared fast, on a large scale to volume to volume equipment of the present invention, break through traditional handicraft cost high, the industrialization obstacle that can not prepare continuously, fast, on a large scale, simultaneously for the preparation of flexible and transparent organic assembly provides a splendid method.
Other advantages of the present invention, target and feature will be set forth to a certain extent in the following description, and to a certain extent, based on will be apparent to those skilled in the art to investigating below, or can be instructed from the practice of the present invention.Target of the present invention and other advantages can be realized and be obtained by specification below.
Accompanying drawing explanation
In order to make the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing, the present invention is described in further detail, wherein:
Fig. 1 is structural representation of the present invention;
Fig. 2 is PH1000 anode OLED structural representation prepared by the present invention;
Fig. 3 is Graphene anode OLED structural representation prepared by the present invention;
In figure, 101-emptying roller, 102-transmits roll shaft, 103-drive roller shaft, 104-slot coated system, 106-organic solvent volatilization system, 108-negative electrode wet film forms system, 110-volatilization system, 112-material receiving roller, 113-inertia gas cylinder, 114-water analyzer, 115-oxygen analyzer, 116-vacuum pump.
Embodiment
Hereinafter with reference to accompanying drawing, the preferred embodiments of the present invention are described in detail.Should be appreciated that preferred embodiment is only for the present invention is described, rather than in order to limit the scope of the invention.
As shown in the figure, a kind of volume to volume Preparation equipment of organic optoelectronic device, comprises inert gas chamber and is arranged on the indoor volume to volume transmitting device of inert gas cavity, organic function layer preparation system and negative electrode forming system; Described organic function layer preparation system and negative electrode form system and successively arrange along device material transmission direction successively.
Organic optoelectronic device can be realized continuously, be prepared fast, on a large scale to the volume to volume equipment of the present embodiment, break through traditional handicraft cost high, the industrialization obstacle that can not prepare continuously, fast, on a large scale, simultaneously for the preparation of flexible and transparent organic assembly provides a splendid method.
In the present embodiment, described volume to volume equipment is also provided with vacuum pump 116 for inert gas chamber is vacuumized and for fill the inertia gas cylinder 113 of noble gas to inert gas chamber, described inert gas cavity is indoor be also provided with water analyzer 114, oxygen analyzer 115 and and for the decontaminating column of adsorbed water and oxygen; The present embodiment carries out vacuum pumping by vacuum pump is set to inert gas chamber, inertia gas cylinder is set to be convenient to pass into inert gas in inert gas chamber, water analyzer, oxygen analyzer and decontaminating column object are set and are to guarantee the state of inert gas chamber in anhydrous and oxygen-free, thereby be increased dramatically device lifetime, in addition, the indoor organic solvent adsorption column that is also provided with of inert gas cavity of the present embodiment, for adsorbing the organic solvent of the volatilization of being heated.
In the present embodiment, described volume to volume transmitting device comprises at least one emptying roller 101 and material receiving roller 112, is also provided with multiple transmission roll shafts 102 for transmission apparatus material between described emptying roller and material receiving roller; The volume to volume transmitting device of the present embodiment is simple in structure, and transmission is reliable.
In the present embodiment, deviation-rectifying system before and after described volume to volume transmitting device is also provided with, described front and back deviation-rectifying system comprises edge of materials inductor and transmits prosthetic device, described edge of materials inductor is arranged on emptying roller and material receiving roller, and described transmission prosthetic device is connected on the axle of emptying roller and material receiving roller; When this edge of materials inductor senses that material is in course of conveying during to bias internal, this this emptying roller of transmission prosthetic device control or this material receiving roller move inward, otherwise are outwards subjected to displacement.
In the present embodiment, described volume to volume transmitting device also comprises tension control system, and described tension control system comprises tension force induction installation and revolution speed control device; When in the time that tension force induction installation is found transmission of materials, tension force is greater than a preset value, revolution speed control device fine motion reduces rolling rotating speed, and on the contrary, in the time finding that tension force is less than this preset value, revolution speed control device fine motion promotes rolling rotating speed.
In the present embodiment, described organic function layer preparation system comprises and is used to form the slot coated system 104 of organic wet film and is positioned at organic solvent volatilization system 106 thereafter, and the slot coated system of the present embodiment comprises scraper, slit and roll shaft.Organic solution ink relies on self gravitation to arrive substrate via slit, and the drive roller shaft 103 under substrate drives substrate motion, and the relative motion of substrate and scraper forms organic wet film, and organic wet film forms organic film through organic solvent volatilization system.
In the present embodiment, described negative electrode formation system comprises that negative electrode wet film forms system 108 and is positioned at the volatilization system 110 for drying thereafter; Described negative electrode wet film formation system comprises doctor blade system, silk screen printing system and ink-jet print system; Described volatilization system comprises for the heating system of heated cathode wet film, for the hygrosensor of detecting temperature and for regulating the temperature controller of temperature.
In addition, utilize the volume to volume Preparation equipment of the present embodiment to manufacture the method for organic optoelectronic device, comprise the steps:
1), utilize vacuum pump, inertia gas cylinder, water analyzer, oxygen analyzer and decontaminating column to make inert gas cavity indoor in anhydrous and oxygen-free state, and utilize the be heated organic solvent of volatilization of organic solvent adsorption column absorption;
2), will be arranged on emptying roller with the flexible substrate material of anode layer, the open end of described backing material is wrapped on material receiving roller, rotate emptying roller and material receiving roller with identical speed, by tension control system and front and back deviation-rectifying system, backing material is transmitted along fixed course;
3), utilize slot coated system to make the upper organic function layer of flexible substrate material coating, then make the device function layer of the organic function layer formation stable in properties in flexible substrate material through organic solvent volatilization system, in this step, organic solution ink relies on self gravitation to arrive substrate via slit, roll shaft under substrate drives substrate motion, the relative motion of substrate and scraper forms organic wet film, and organic wet film forms organic film through organic solvent volatilization system;
4), finally utilize negative electrode to form system and in flexible substrate material, prepare device cathodes layer.
In the present embodiment, what Fig. 2 represented is PH1000 anode OLED structural representation prepared by the present invention, be followed successively by from the bottom up: PET substrate, PEDOT:PSS (PH1000) anode, PEDOT:PSS (AI4083) hole injection layer, MEH-PPV luminescent layer, ZnO electron transfer layer, Ionic solution electron injecting layer, Ag negative electrode; What Fig. 3 represented is Graphene anode OLED structural representation prepared by the present invention, is followed successively by from the bottom up: PET substrate, Graphene anode, PEDOT:PSS (AI4083) hole injection layer, SY luminescent layer, EP:PFNR2 electron injecting layer, Ag negative electrode.
Finally explanation is, above embodiment is only unrestricted in order to technical scheme of the present invention to be described, although the present invention is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can modify or be equal to replacement technical scheme of the present invention, and not departing from aim and the scope of the technical program, it all should be encompassed in the middle of claim scope of the present invention.
Claims (10)
1. a volume to volume Preparation equipment for organic optoelectronic device, is characterized in that: comprise inert gas chamber and be arranged on the indoor volume to volume transmitting device of inert gas cavity, organic function layer preparation system and negative electrode forming system; Described organic function layer preparation system and negative electrode form system and successively arrange along backing material transmission direction successively.
2. the volume to volume Preparation equipment of organic optoelectronic device according to claim 1, is characterized in that: described inert gas cavity is indoor is also provided with water analyzer, oxygen analyzer, decontaminating column and reproducible organic solvent adsorption column for adsorbed water and oxygen.
3. the volume to volume Preparation equipment of organic optoelectronic device according to claim 2, is characterized in that: described volume to volume equipment is also provided with vacuum pump for inert gas chamber is vacuumized and for fill the inertia gas cylinder of noble gas to inert gas chamber.
4. the volume to volume Preparation equipment of organic optoelectronic device according to claim 3, it is characterized in that: described volume to volume transmitting device comprises at least one emptying roller and material receiving roller, between described emptying roller and material receiving roller, be also provided with multiple transmission roll shafts for transmission apparatus material.
5. the volume to volume Preparation equipment of organic optoelectronic device according to claim 4, it is characterized in that: deviation-rectifying system before and after described volume to volume transmitting device is also provided with, described front and back deviation-rectifying system comprises edge of materials inductor and transmits prosthetic device, described edge of materials inductor is arranged on emptying roller and material receiving roller, and described transmission prosthetic device is connected on the axle of emptying roller and material receiving roller.
6. the volume to volume Preparation equipment of organic optoelectronic device according to claim 5, is characterized in that: described volume to volume transmitting device also comprises tension control system, and described tension control system comprises tension force induction installation and revolution speed control device.
7. the volume to volume Preparation equipment of organic optoelectronic device according to claim 6, is characterized in that: described organic function layer preparation system comprises and is used to form the slot coated system of organic wet film and is positioned at organic solvent volatilization system thereafter.
8. the volume to volume Preparation equipment of organic optoelectronic device according to claim 7, is characterized in that: described negative electrode formation system comprises that negative electrode wet film forms system and is positioned at the volatilization system for drying thereafter.
9. the volume to volume Preparation equipment of organic optoelectronic device according to claim 8, is characterized in that: described negative electrode wet film formation system comprises doctor blade system, silk screen printing system and ink-jet print system.
10. utilize volume to volume Preparation equipment described in claim 9 to manufacture the method for organic optoelectronic device, it is characterized in that: comprise the steps:
1), utilize vacuum pump, inertia gas cylinder, water analyzer, oxygen analyzer and decontaminating column to make inert gas cavity indoor in anhydrous and oxygen-free state;
2), will be arranged on emptying roller with the flexible substrate material of anode layer, the open end of described backing material is wrapped on material receiving roller, rotates emptying roller and material receiving roller with identical speed, and backing material is transmitted along fixed course;
3), utilizing slot coated system that flexible substrate material is coated with goes up organic function layer, then makes the device function layer of the organic function layer formation stable in properties in flexible substrate material through organic solvent volatilization system;
4), finally utilize negative electrode to form system and in flexible substrate material, prepare device cathodes layer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410130950.6A CN103872266B (en) | 2014-03-24 | 2014-03-24 | Volume to volume Preparation equipment of organic optoelectronic device and preparation method thereof |
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| CN201410130950.6A CN103872266B (en) | 2014-03-24 | 2014-03-24 | Volume to volume Preparation equipment of organic optoelectronic device and preparation method thereof |
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| CN103872266B CN103872266B (en) | 2016-03-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681918A (en) * | 2021-08-27 | 2021-11-23 | 辽宁分子流科技有限公司 | Roll-to-roll equipment for preparing core unit of micro-fluidic chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101228217A (en) * | 2005-07-20 | 2008-07-23 | 3M创新有限公司 | Moisture barrier coatings |
| CN101802892A (en) * | 2007-09-11 | 2010-08-11 | 株式会社尼康 | Manufacturing method for display element, and manufacturing apparatus for display element |
| CN102806660A (en) * | 2012-08-16 | 2012-12-05 | 上海交通大学 | Device and method for processing polymer film surface microstructure based on roll-to-roll hot rolling |
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2014
- 2014-03-24 CN CN201410130950.6A patent/CN103872266B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101228217A (en) * | 2005-07-20 | 2008-07-23 | 3M创新有限公司 | Moisture barrier coatings |
| CN101802892A (en) * | 2007-09-11 | 2010-08-11 | 株式会社尼康 | Manufacturing method for display element, and manufacturing apparatus for display element |
| CN102806660A (en) * | 2012-08-16 | 2012-12-05 | 上海交通大学 | Device and method for processing polymer film surface microstructure based on roll-to-roll hot rolling |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681918A (en) * | 2021-08-27 | 2021-11-23 | 辽宁分子流科技有限公司 | Roll-to-roll equipment for preparing core unit of micro-fluidic chip |
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| CN103872266B (en) | 2016-03-16 |
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