CN103871816B - For the sensor of adaptation and there is its adaptation, plasma apparatus - Google Patents
For the sensor of adaptation and there is its adaptation, plasma apparatus Download PDFInfo
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- CN103871816B CN103871816B CN201210548863.3A CN201210548863A CN103871816B CN 103871816 B CN103871816 B CN 103871816B CN 201210548863 A CN201210548863 A CN 201210548863A CN 103871816 B CN103871816 B CN 103871816B
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Abstract
The invention discloses a kind of sensor for adaptation, adaptation and plasma apparatus. Sensor comprises: metal cartridge, insulation sleeve, ground connection shell, ring-shaped article, induction coil and circuit board, insulation sleeve is set on the outer peripheral face of metal cartridge. Ground connection valve jacket is located at insulation sleeve outside. Ring-shaped article is set in insulation sleeve outside and is positioned at ground connection shell. Induction coil is set in ring-shaped article outside and is positioned at ground connection shell. Board sleeve is located at ring-shaped article outside and is positioned at ground connection shell, wherein in the axial section of insulation sleeve, surface along insulation sleeve is defined as the first line segment from the interior edge of an end face of insulation sleeve to the line segment of outer, surface along insulation sleeve is defined as the second line segment from outer to the line segment of ground connection shell, and wherein at least one line segment in the first line segment and second line segment of at least one end face of insulation sleeve is curve. According to the sensor of the embodiment of the present invention, can increase metal cartridge to the shortest insulation distance between ground connection shell, improve the theoretical withstand voltage of sensor.
Description
Technical field
The present invention relates to plasma field, especially relate to a kind of sensor for adaptation and there is its couplingDevice, plasma apparatus.
Background technology
Plasma technique is widely used in the production process of semiconductor devices. Conventional plasma type has electric capacityCoupled plasma (CCP), inductively coupled plasma (ICP) and Ecr plasma (ECP)Etc. type. In inductive coupling plasma generator, RF energy by inductance-coupled coil ionize gas to chamber withForm plasma. This mode can obtain highdensity plasma and structure letter under lower operating air pressureSingly, cost is low.
Along with the development of technology, the single inductance-coupled coil in inductance coupled plasma device develops into many graduallyIndividual inductance-coupled coil, this inductance coupled plasma device with multiple inductance-coupled coils can be in lower workMake to obtain under air pressure highdensity plasma, and can (determine plasma to the radio frequency source that produces plasma simultaneouslyVolume density) carry out independent control with chip bench radio frequency source (particle energy on wafer is incided in decision), thus makeThis inductance coupled plasma device is widely used. Realizing many inductance coils controls separately and need to employing export moreAdaptation, current sensor is the important device for each inductance coil energy being monitored in many output matching devices.
On the periphery wall of the copper post in the sensor in existing many output matching devices, be arranged with columniform insulating sleeve, absolutelyOn the periphery wall of edge sleeve, be arranged with ground loop or voltage induced ring, the sensor of this structure can only be applied to main circuitVoltage is less, the situation lower to insulating requirements, and this structure physical size is larger simultaneously, to the installing space of sensorHave relatively high expectations, and this safety of structure is poor, easily occurs spark phenomenon.
Summary of the invention
The present invention is intended at least solve one of technical problem existing in prior art.
For this reason, one object of the present invention is to propose the sensor for adaptation that a kind of theoretical withstand voltage is high.
Another object of the present invention is to propose a kind of adaptation with the sensor.
A further object of the present invention is to propose a kind of plasma apparatus with above-mentioned adaptation.
According to the sensor for adaptation of the embodiment of the present invention, comprising: metal cartridge; Insulation sleeve, described insulation sleeveBe set on the outer peripheral face of described metal cartridge; Ground connection shell, described ground connection valve jacket is located at described insulation sleeve outside; Ring-typePart, described ring-shaped article is set in described insulation sleeve outside and is positioned at described ground connection shell; Induction coil, the described line of inductionSnare is located at described ring-shaped article outside and is positioned at described ground connection shell; And circuit board, described board sleeve is located at described ringShape part outside and be positioned at described ground connection shell, in the axial section of described insulation sleeve, along the surface of described insulation sleeveBe defined as the first line segment from the interior edge of an end face of described insulation sleeve to the line segment of outer, along the table of described insulation sleeveFace is orientated the second line segment from described outer as to the line segment of described ground connection shell; First of the upper surface of wherein said insulation sleeveIn the second line segment of the second line segment of line segment, upper surface, the first line segment of lower surface and lower surface, has a line at leastSection is curve.
According to the sensor for adaptation of the embodiment of the present invention, in the axial section of insulation sleeve, along insulation sleeveSurface is curve and/or the surface along insulation sleeve from the interior edge of at least one end face of insulation sleeve to the first line segment of outerBe curve from outer to the second line segment of ground connection shell, thereby can, in the case of not increasing the height of insulation sleeve, increase goldBelong to cylinder to the shortest insulation distance between ground connection shell, to improve the theoretical withstand voltage of sensor, thereby make sensorCan be applicable under higher voltage, improved security and the range of application of sensor, avoid occurring spark phenomenon.
In addition, also there is following additional technical feature according to the sensor for adaptation of the present invention:
According to some embodiments of the present invention, described sensor is current sensor, described ring-shaped article for ground loop and with instituteStating ground connection shell is connected to form a part for described ground connection shell.
According to other embodiment of the present invention, described sensor is voltage or power sensor, and described ring-shaped article is inductionRing.
Particularly, the second line segment of described insulation sleeve upper surface is that surface along described insulation sleeve is from described insulation sleeveThe outer of end face is to the line segment of the upper surface of described ground loop or the upper surface of described ground connection shell, described insulation sleeve lower surfaceThe second line segment be surface along described insulation sleeve from the outer of the lower surface of described insulation sleeve to described ground connection shellThe line segment on surface.
In some embodiments of the invention, described the first line segment is straight line, and described the second line segment is curve.
Further, on the periphery wall of at least one end face of described insulation sleeve, be arranged with extension set.
Further, described extension set and described insulation sleeve are integrally formed.
In other embodiment of the present invention, described the first line segment is curve, and described the second line segment is straight line.
Further, at least one end face of described insulation sleeve is provided with end cover, described end cover away from described insulation sleeveSurface is provided with at least one circumferential recess along the circumferential extension of described end cover.
Further, the surface joining with described insulation sleeve of described end cover is provided with consolidating along the circumferential extension of described end coverDetermine groove, at least one end face of described insulation sleeve is provided with along the circumferential extension of described insulation sleeve and is engaged in described fixingFixed lobe in groove.
In further embodiment of the present invention, at least one end face of described insulation sleeve, be formed with along described insulation sleeveThe groove circumferentially extending.
According to the adaptation of the embodiment of the present invention, comprise the sensor for adaptation according to the above embodiment of the present invention.
According to the plasma apparatus of the embodiment of the present invention, comprise adaptation according to the above embodiment of the present invention.
Additional aspect of the present invention and advantage in the following description part provide, and part will become from the following descriptionObviously, or by practice of the present invention recognize.
Brief description of the drawings
Above-mentioned and/or additional aspect of the present invention and advantage from conjunction with below accompanying drawing to becoming bright the description of embodimentAobvious and easy understanding, wherein:
Fig. 1 is the principal section figure of sensor according to an embodiment of the invention;
Fig. 2 is the part sectioned view of the sensor shown in Fig. 1;
Fig. 3 is the principal section figure of sensor in accordance with another embodiment of the present invention;
Fig. 4 is the part sectioned view of the sensor shown in Fig. 3;
Fig. 5 is the principal section figure of the sensor of another embodiment according to the present invention;
Fig. 6 is the principal section figure of the sensor of another embodiment according to the present invention.
Detailed description of the invention
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, wherein phase from start to finishSame or similar label represents same or similar element or has the element of identical or similar functions. Below by referenceThe embodiment that accompanying drawing is described is exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " on ",D score, 'fornt', 'back', " left side ", " right side ", " vertically ", " level ", " top ", " end "" interior ", " outward " etc. instruction orientation or position relationship be based on orientation shown in the drawings or position relationship, be only forBe convenient to describe the present invention and simplified characterization, instead of device or the element of instruction or hint indication must have specificallyOrientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention. In addition term ",One ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation "," be connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect,Or connect integratedly; Can be mechanical connection, can be also electrical connection; Can be to be directly connected, in also can passing throughBetween medium be indirectly connected, can be the connection of two element internals. For the ordinary skill in the art, canUnderstand above-mentioned term concrete meaning in the present invention with concrete condition.
In addition,, in description of the invention, except as otherwise noted, the implication of " multiple " is two or more.
Describe according to a kind of sensor 100 for adaptation of the embodiment of the present invention, this sensing below with reference to Fig. 1-Fig. 6Device 100 can be current sensor, voltage sensor or power sensor etc. This sensor 100 can be applicable to plasmaIn body equipment.
According to the sensor 100 for adaptation of the embodiment of the present invention, as shown in Fig. 1-Fig. 6, comprising: metal cartridge1, insulation sleeve 2, ground connection shell 3, ring-shaped article 4, induction coil 5 and circuit board 6, wherein, insulation sleeve 2 is set in goldBelong on the outer peripheral face of cylinder 1, for example insulation sleeve can by polytetrafluoroethylene (PTFE), PEI (PEI),The materials such as polyether-ether-ketone (PEEK) are made. Ground connection shell 3 is set in insulation sleeve 2 outsides. Ring-shaped article 4 is set in insulation sleeve2 outsides and be positioned at ground connection shell 3. Induction coil 5 is set in ring-shaped article 4 outsides and is positioned at ground connection shell 3. Circuit board6 are set in ring-shaped article 4 outsides and are positioned at ground connection shell 3. Wherein, in the axial section of insulation sleeve 2, along insulationThe surface of cover 2 is defined as the first line segment from the interior edge of an end face of insulation sleeve 2 to the line segment of outer, along insulation sleeve 2Surface be defined as the second line segment from outer to the line segment of ground connection shell 3. Wherein, the First Line of the upper surface of insulation sleeve 2In the second line segment, the first line segment of lower surface and second line segment of lower surface of section, upper surface, has a line segment at leastFor curve. In other words, in the axial section of insulation sleeve 2, along the surface of insulation sleeve 2 from insulation sleeve 2 at leastThe interior edge of an end face to the first line segment of outer be curve and/or along the surface of insulation sleeve 2 from outer to ground connection shell 3The second line segment be curve. Preferably, this metal cartridge 1 is copper post.
In other words, first line segment that can be at least one end face of insulation sleeve 2 is that curve, the second line segment are curve, alsoFirst line segment that can be at least one end face of insulation sleeve 2 is that curve, the second line segment are straight line, can also be insulationThe first line segment of at least one end face of cover 2 is that straight line, the second line segment are curve.
Wherein, the first line segment of the upper surface of insulation sleeve 2 and the length sum of the second line segment, with the lower surface of insulation sleeve 2The first line segment and the length sum of the second line segment in minimum of a value be the shortest insulation distance of metal cartridge 1 to ground connection shell 3From, thereby by increasing the shortest insulation distance, improve the theoretical withstand voltage of sensor, sensor can be applied inUnder higher voltage. And can be according to dissimilar sensor, suitable selection the first line segment and the length of the second line segment.
According to the sensor 100 for adaptation of the embodiment of the present invention, in the axial section of insulation sleeve 2, along absolutelyThe surface of edge cover 2 is curve and/or along absolutely from the interior edge of at least one end face of insulation sleeve 2 to the first line segment of outerThe surface of edge cover 2 is curve from outer to the second line segment of ground connection shell 3, thereby can be at the height that does not increase insulation sleeve 2Situation under, increase metal cartridge 1 to the shortest insulation distance between ground connection shell 3, to improve the reason of sensor 100Opinion withstand voltage, thus sensor 100 be can be applicable under higher voltage, improve the security of sensor 100And range of application, avoid occurring spark phenomenon.
As shown in Fig. 1-Fig. 6, in some embodiments of the invention, sensor 100 is current sensor, now ring-typePart 4 is ground loop and is connected to form a part for ground connection shell 3 with ground connection shell 3.
Particularly, the lower end of ground loop 4 be connected with the interior diapire of ground connection shell 3 and the upper end of ground loop 4 from ground connection shell 3Expose, as shown in Fig. 1-Fig. 6, interval predetermined gap between the top board of ground connection shell 3 and insulation sleeve 2, can be predetermined from thisThe upper end of ground loop 4 is seen in gap.
In the time that sensor 100 is current sensor, the second line segment of the upper surface of insulation sleeve 2 is the table along insulation sleeve 2Face is from the outer of the upper surface of insulation sleeve 2 to the line segment of the upper surface of ground loop 4, second of the lower surface of insulation sleeve 2Line segment is the line segment from the outer of the lower surface of insulation sleeve 2 to the lower surface of ground connection shell 3 along the surface of insulation sleeve 2.
In other embodiment of the present invention, sensor 100 is voltage or power sensor, and now ring-shaped article 4 is senseYing Huan, inductance loop 4 is earth-free, to carry out the sampling of voltage signal.
Particularly, in the time that sensor 100 is voltage or power sensor, the second line segment of the upper surface of insulation sleeve 2 is suitableThe surface that insulation sleeve 2 is from the outer of the upper surface of insulation sleeve 2 to the line segment of the upper surface of ground connection shell 3, insulation sleeve 2The second line segment of lower surface be from the outer of the lower surface of insulation sleeve 2 to ground connection shell 3 along the surface of insulation sleeve 2The line segment of lower surface.
Embodiment 1:
As shown in Fig. 1 and Fig. 2, Fig. 5 and Fig. 6, in an embodiment of the present invention, at least one end face of insulation sleeve 2The first line segment be straight line, the second line segment is curve. Particularly, on the periphery wall of at least one end face of insulation sleeve 2Be arranged with extension set 9. Alternatively, extension set 9 is integrally formed with insulation sleeve 2.
Example 1:
In example of the present invention, as depicted in figs. 1 and 2, the periphery wall of the lower end of insulation sleeve 2 is provided with one-body moldedExtension set 9, now the first line segment of the upper surface of insulation sleeve 2 is straight line, the first line segment of the lower surface of insulation sleeve 2For straight line, the second line segment of the upper surface of insulation sleeve 2 is straight line, and the second line segment of the lower surface of insulation sleeve 2 is curve.
As depicted in figs. 1 and 2, extension set 9 comprises body 91 and the flange 92 of annular, and body 91 is set in absolutelyOn the periphery wall of the lower end of edge cover 2, flange 92 is perpendicular to the outward flange of body 91 and along the direction towards ground connection shell 3Extend. Further, the lower surface of insulation sleeve 2 is concordant with the lower surface of extension set 9. In the example of Fig. 1, oneBody formed insulation sleeve 2 and the overall vertical cross-section of extension set 9 are formed as " J " shape substantially.
Now, in the example of Fig. 2, along the surface of insulation sleeve 2 from the outer of the lower surface of insulation sleeve 2 to ground connection shellThe line segment of 3 the lower surface i.e. length of the second line segment is j-a+i+h+g+f+e, the first line segment of the upper surface of insulation sleeve 2With the length sum of the second line segment be a+d, the first line segment of the lower surface of insulation sleeve 2 and the length sum of the second line segment areJ+i+h+g+f+e, metal cartridge 1 is the minimum in j+i+h+g+f+e and a+d to the shortest insulation distance of ground connection shell 3Value. In different sensors, can be by selecting suitable d, f, g, h, i and j value the shortest to increase as much as possibleInsulation distance.
Be understandable that, withstand voltage because general insulating materials withstand voltage is far longer than air, for example PTFE withstand voltageCan reach 17-20kV/mm, and only 1kV/mm of air, therefore think herein insulating materials thickness enough withstand voltage andBe far longer than air breakdown voltage. Therefore in the embodiment shown in Figure 2, the shortest insulation distance employing is insulation sleeve 2The first line segment of upper surface and first line segment and of the lower surface of the length sum a+d of the second line segment and insulation sleeve 2Minimum of a value in the length sum e+f+g+h+i+j of two line segments, instead of physics beeline a.
Example 2:
In example of the present invention, as shown in Figure 5, the periphery wall of the upper end of insulation sleeve 2 is provided with integrated extensionCover 9, now the first line segment of the upper surface of insulation sleeve 2 is straight line, the first line segment of the lower surface of insulation sleeve 2 is straight line,The second line segment of the upper surface of insulation sleeve 2 is curve, and the second line segment of the lower surface of insulation sleeve 2 is straight line.
As shown in Figure 5, extension set 9 comprises body 91 and the flange 92 of annular, and body 91 is set in insulation sleeve 2The periphery wall of upper end on, flange 92 extends perpendicular to the outward flange of body 91 and along the direction towards ground connection shell 3.Further, the upper surface of insulation sleeve 2 is concordant with the upper surface of extension set 9. In the example of Fig. 5, one-body moldedInsulation sleeve 2 and the overall vertical cross-section of extension set 9 be formed as substantially falling " J " shape.
Now, in the example of Fig. 5, along the surface of insulation sleeve 2 from the outer of the upper surface of insulation sleeve 2 to ground connection shellThe line segment of 3 the upper surface i.e. length of the second line segment is j-a+i+h+g+f+e, the first line segment of the upper surface of insulation sleeve 2With the length sum of the second line segment be j+i+h+g+f+e, the first line segment of the lower surface of insulation sleeve 2 and the length of the second line segmentDegree sum is a+d, and metal cartridge 1 is the minimum in j+i+h+g+f+e and a+d to the shortest insulation distance of ground connection shell 3Value. In different sensors, can be by selecting suitable d, f, g, h, i and j value the shortest to increase as much as possibleInsulation distance.
Be understandable that, withstand voltage because general insulating materials withstand voltage is far longer than air, for example PTFE withstand voltageCan reach 17-20kV/mm, and only 1kV/mm of air, therefore think herein insulating materials thickness enough withstand voltage andBe far longer than air breakdown voltage. What therefore in the embodiment shown in fig. 5, the shortest insulation distance adopted is insulation sleeve 2The first line segment of lower surface and first line segment and of the upper surface of the length sum a+d of the second line segment and insulation sleeve 2Minimum of a value in the length sum e+f+g+h+i+j of two line segments, instead of physics beeline a.
Example 3:
In example of the present invention, as shown in Figure 6, on the periphery wall of the top and bottom of insulation sleeve 2, be respectively equipped with oneThe extension set 9 of moulding, now the first line segment of the upper surface of insulation sleeve 2 is straight line, first of the lower surface of insulation sleeve 2Line segment is straight line, and the second line segment of the upper surface of insulation sleeve 2 is curve, and the second line segment of the lower surface of insulation sleeve 2 isCurve.
As shown in Figure 6, each in two extension sets 9 comprises respectively body 91 and the flange 92 of annular, body91 are set on the periphery wall of respective ends of insulation sleeve 2, and flange 92 is perpendicular to the outward flange of body 91 and along towards connecingThe direction of the earth's crust 3 is extended. Further, the upper surface of insulation sleeve 2 is concordant with the upper surface of corresponding extension set 9,The lower surface of insulation sleeve 2 is concordant with the lower surface of corresponding extension set 9. In the example of Fig. 6, integrated exhaustedEdge cover 2 and two overall vertical cross-section of extension set 9 are formed as substantially falling " C " shape.
Now, the first line segment of the upper surface of insulation sleeve 2 and the length sum of the second line segment equal the lower surface of insulation sleeve 2The first line segment and the length sum of the second line segment, in the example of Fig. 6, metal cartridge 1 is the shortest to ground connection shell 3Insulation distance equals j+i+h+g+f+e, thus in different sensors, can by select suitable f, g, h, i,E and j value are to increase as much as possible the shortest insulation distance.
Be understandable that, withstand voltage because general insulating materials withstand voltage is far longer than air, for example PTFE withstand voltageCan reach 17-20kV/mm, and only 1kV/mm of air, therefore think herein insulating materials thickness enough withstand voltage andBe far longer than air breakdown voltage. Therefore in the embodiment shown in fig. 6, the shortest insulation distance adoptsE+f+g+h+i+j, instead of physics beeline a.
Embodiment 2:
In an embodiment of the present invention, as shown in Figure 3 and Figure 4, the first line segment of at least one end face of insulation sleeve 2 isCurve, the second line segment is straight line. Particularly, at least one end face of insulation sleeve 2 is provided with end cover 10, end cover 10The surface away from insulation sleeve 2 be provided with at least one circumferential recess 101 along the circumferential extension of end cover 10.
Further, the surface joining with insulation sleeve 2 of end cover 10 is provided with along the holddown groove of the circumferential extension of end cover 10102, at least one end face of insulation sleeve 2 is provided with along the circumferential extension of insulation sleeve 2 and is engaged in holddown groove 102Fixed lobe 20. Thereby make end cover 10 simple with the assembling of insulation sleeve 2.
In the example of Fig. 3 and Fig. 4, the upper surface of insulation sleeve 2 and lower surface are respectively equipped with an end cover 10, are located atThe upper surface of the end cover 10 of the upper surface of insulating part 2 is provided with two circumferential recess along the circumferential extension of end cover 10101, the lower surface that is located at the end cover 10 of the upper surface of insulation sleeve 2 is provided with fixing along the circumferential extension of this end cover 10Groove 102, the upper surface of insulation sleeve 2 is provided with the fixed lobe 20 being engaged in this holddown groove 102.
The lower surface that is located at the end cover 10 of the lower surface of insulating part 2 is provided with the circumferential of two circumferential extensions along end cover 10Groove 101, the upper surface that is located at the end cover 10 of the lower surface of insulation sleeve 2 is provided with along the circumferential extension of this end cover 10Holddown groove 102, the lower surface of insulation sleeve 2 is provided with the fixed lobe 20 being engaged in this holddown groove 102.
Now, in the example of Fig. 3 and Fig. 4, along the surface of insulation sleeve 2 from the interior edge of the upper surface of insulation sleeve 2 toThe line segment of outer i.e. the first line segment is curve, along the surface of insulation sleeve 2 from the outer of the upper surface of insulation sleeve 2 to connecingThe line segment of the upper surface of the earth's crust 3 i.e. the second line segment is straight line, along the surface of insulation sleeve 2 from the lower surface of insulation sleeve 2Interior edge to the line segment of outer the first line segment be curve, along the surface of insulation sleeve 2 from the lower surface of insulation sleeve 2Outer is that the second line segment is straight line to the line segment of ground connection shell 3 lower surfaces.
As shown in Figure 3 and Figure 4, the length d 1 of the first line segment of the upper surface of insulation sleeve 2 is in a+4k and a+2lMinimum of a value, i.e. d1=min (a+4k, a+2l), the length d 2 of the first line segment of the lower surface of insulation sleeve 2 is a+4o and a+2pIn minimum of a value, i.e. d2=min (a+4o, a+2p), thus metal shell 1 is to the shortest insulation distance of ground connection shell 3D3=min (a+4k+m, a+2l+n, a+4o+q, a+2p+r). In different sensors, can by select suitable l, m,N, o, p, q, r value are to increase as much as possible the shortest insulation distance.
Further, the groove being formed with at least one end face of insulation sleeve 2 along the circumferential extension of insulation sleeve 2 (is schemed notIllustrate). Thereby can be further in the case of not increasing the height of insulation sleeve 2, increase metal cartridge 1 to ground connection shell 3Between the shortest insulation distance.
Wherein, be worth understanding, in embodiment 1 and embodiment 2, can also be by suitably reducing insulation sleeve 2Height dimension or reduce the diameter dimension of insulation sleeve 2, to increase the shortest between ground connection shell 3 of metal cartridge 1On the basis of insulation distance, reduce the size of sensor 100. In the design of sensor 100, also should be according to realityThe size of situation choose reasonable metal cartridge 1 and the gauge of insulation sleeve 2, to avoid sensor 100 to be applied in heightWhen voltage, there is punch-through.
Be understandable that, in the embodiment shown in fig. 4, insulation distance calculates with L1=a+4k+m, L1=a+2l+nCalculate, instead of surperficial air line distance a+n. Also need herein explanation, air is withstand voltage is 1kV/mm, and insulation materialMaterial surface withstand voltage is 0.67kV/mm, the therefore withstand voltage V1=1*L=L that is calculated as of surface insulation distance to L=a+4k+m,If calculated with L=a+n, it is withstand voltage is that V2=(a-2s+m)+0.67* (2s)=a+m-0.33s(is with insulation sleeve surface grooveWidth is s) < V1=a+4k+m, and it is more meaningful that therefore this sentences the withstand voltage calculating of surface insulation distance, and acquiescence is not removed meterCalculate space insulation distance withstand voltage.
According to the plasma apparatus of the embodiment of the present invention, comprise the biography for adaptation according to the above embodiment of the present inventionSensor 100.
According to other configuration examples of the plasma apparatus of the embodiment of the present invention as reaction chamber and radio-frequency power supply etc. and operate rightBe all known in those of ordinary skill in the art, be not described in detail here.
In the description of this description, reference term " embodiment ", " some embodiment ", " illustrative examples ", " showExample ", the description of " concrete example " or " some examples " etc. means specific features, the knot described in conjunction with this embodiment or exampleStructure, material or feature are contained at least one embodiment of the present invention or example. In this manual, to above-mentioned termSchematic statement not necessarily refer to identical embodiment or example. And, the specific features of description, structure, material orPerson's feature can be with suitable mode combination in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: not de-In the situation of principle of the present invention and aim, can carry out multiple variation, amendment, replacement and modification to these embodiment,Scope of the present invention is limited by claim and equivalent thereof.
Claims (13)
1. for a sensor for adaptation, it is characterized in that, comprising:
Metal cartridge;
Insulation sleeve, described insulation sleeve is set on the outer peripheral face of described metal cartridge;
Ground connection shell, described ground connection valve jacket is located at described insulation sleeve outside;
Ring-shaped article, described ring-shaped article is set in described insulation sleeve outside and is positioned at described ground connection shell;
Induction coil, described induction coil is set in described ring-shaped article outside and is positioned at described ground connection shell; With
Circuit board, described board sleeve is located at described ring-shaped article outside and is positioned at described ground connection shell,
In the axial section of described insulation sleeve, along the surface of described insulation sleeve from the interior edge of an end face of described insulation sleeveBe defined as the first line segment to the line segment of outer, the line segment along the surface of described insulation sleeve from described outer to described ground connection shell is fixedJustice is the second line segment; Wherein
The first line segment and the lower surface of the first line segment of the upper surface of described insulation sleeve, the second line segment of upper surface, lower surfaceThe second line segment in to have a line segment at least be curve.
2. the sensor for adaptation according to claim 1, is characterized in that, described sensor is current senseDevice, described ring-shaped article is ground loop and is connected to form the part of described ground connection shell with described ground connection shell.
3. the sensor for adaptation according to claim 1, is characterized in that, described sensor is voltage or meritRate sensor, described ring-shaped article is inductance loop.
4. the sensor for adaptation according to claim 2, is characterized in that, of described insulation sleeve upper surfaceTwo line segments for the surface along described insulation sleeve from the outer of the upper surface of described insulation sleeve upper surface or the institute to described ground loopState the line segment of the upper surface of ground connection shell, the second line segment of described insulation sleeve lower surface is that surface along described insulation sleeve is from describedThe outer of the lower surface of insulation sleeve is to the line segment of the lower surface of described ground connection shell.
5. the sensor for adaptation according to claim 1, is characterized in that, described the first line segment is straight line,Described the second line segment is curve.
6. the sensor for adaptation according to claim 5, is characterized in that at least one of described insulation sleeveOn the periphery wall of end face, be arranged with extension set.
7. the sensor for adaptation according to claim 6, is characterized in that, described extension set and described insulationCover is integrally formed.
8. the sensor for adaptation according to claim 1, is characterized in that, described the first line segment is curve,Described the second line segment is straight line.
9. the sensor for adaptation according to claim 8, is characterized in that at least one of described insulation sleeveEnd face is provided with end cover, and the surface away from described insulation sleeve of described end cover is provided with at least one circumferentially prolonging along described end coverThe circumferential recess of stretching.
10. the sensor for adaptation according to claim 9, is characterized in that, described end cover with described absolutelyThe surface that edge cover joins is provided with along the holddown groove of the circumferential extension of described end cover, at least one end face of described insulation sleeve, establishesHave along the circumferential extension of described insulation sleeve and be engaged in the fixed lobe in described holddown groove.
11. sensors for adaptation according to claim 8, is characterized in that, described insulation sleeve at least oneOn individual end face, be formed with along the groove of the circumferential extension of described insulation sleeve.
12. 1 kinds of adaptations, comprise the sensor for adaptation as described in any one in claim 1-11.
13. 1 kinds of plasma apparatus, comprise adaptation as claimed in claim 12.
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| US5420504A (en) * | 1993-07-06 | 1995-05-30 | General Electric Company | Noninductive shunt current sensor based on concentric-pipe geometry |
| CH692161A5 (en) * | 1997-07-04 | 2002-02-28 | Lem Liaisons Electron Mec | current sensor. |
| CN2670951Y (en) * | 2003-12-12 | 2005-01-12 | 华中科技大学 | Current sensor |
| CN1908681B (en) * | 2006-08-15 | 2010-04-07 | 重庆大学 | Over-voltage monitoring sensor for AD electricity system |
| JP5420562B2 (en) * | 2007-12-13 | 2014-02-19 | ラム リサーチ コーポレーション | Detection apparatus and method for detecting plasma unconfined events |
| CN201788219U (en) * | 2010-07-08 | 2011-04-06 | 福州博峰智能电器有限公司 | Induction voltage-measuring sensor of high-voltage charged displaying device |
| CN202126458U (en) * | 2011-06-14 | 2012-01-25 | 福建中能电气股份有限公司 | Voltage sensor with shielding cable |
-
2012
- 2012-12-17 CN CN201210548863.3A patent/CN103871816B/en active Active
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| CN103871816A (en) | 2014-06-18 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |