CN103869424A - Optical coupling device - Google Patents
Optical coupling device Download PDFInfo
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- CN103869424A CN103869424A CN201210547422.1A CN201210547422A CN103869424A CN 103869424 A CN103869424 A CN 103869424A CN 201210547422 A CN201210547422 A CN 201210547422A CN 103869424 A CN103869424 A CN 103869424A
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- dielectric grating
- face
- optically coupled
- planar light
- coupled device
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention provides an optical coupling device. The optical coupling device comprises a substrate, a planar optical waveguide formed on the substrate, a dielectric grating formed on the planar optical waveguide, a modulation electrode which is arranged parallel to the dielectric grating and is arranged on the dielectric grating, and two ground electrodes which are arranged on the substrate parallel to the dielectric grating and are respectively positioned on the two sides of the dielectric grating. The planar optical waveguide is used for butting a laser source so as to receive laser beams emitted from the laser source. The dielectric grating is arranged along a direction parallel to the incidence direction of the laser beams and forms a diffractive optical waveguide lens with the planar optical waveguide to converge the laser beams. A modulation electric field is loaded between the modulation electrode and the two ground electrodes, so that the focal distance of the diffractive optical waveguide lens is changed by changing the refraction index of the planar optical waveguide changed through an electro-optical effect. Therefore, the laser beams can be converged into an optical element effectively.
Description
Technical field
The present invention relates to integrated optical device, particularly a kind of optically coupled device.
Background technology
In integrated optics, the problem that the coupling of light source and optical element need to be considered has: although integrated optics generally adopt directivity preferably laser as light source, but the light beam that laser sends still has certain angle of divergence, if directly allow light source dock with optical element, divergent rays in light beam cannot enter optical element, and light utilization efficiency is low.Therefore, how light source is coupled to optical element so that the light beam of dispersing assemble into optical element with improve light utilization efficiency be an important topic.
Summary of the invention
In view of this, be necessary to provide a kind of optically coupled device that improves light utilization efficiency.
A kind of optically coupled device, it comprises that a substrate, one are formed at this suprabasil planar light waveguide, one and are formed at dielectric grating on this planar light waveguide, one and are parallel to this dielectric grating and are arranged at modulator electrode on this dielectric grating and two and are parallel to the ground electrode that this dielectric grating is arranged in this substrate and lays respectively at these dielectric grating both sides.This planar light waveguide is for docking to receive with a LASER Light Source laser beam that this LASER Light Source is sent.This dielectric grating edge is parallel to the incident direction setting of this laser beam, and forms diffraction type optical waveguide lens (diffractive waveguide lens) to assemble this laser beam with this planar light waveguide.Thereby between this modulator electrode and this two ground electrodes, change the focal length of this diffraction type optical waveguide lens to change the refractive index of this planar light waveguide by electrooptical effect for load-modulate electric field.
According to integrated optics theory, this dielectric grating and this planar light waveguide form loaded type optical waveguide (strip/grating loaded waveguide), and the equivalent refractive index that this planar light waveguide loads the part of this dielectric grating becomes large.So, by the structure of this dielectric grating is rationally set, for example, be arranged to chirp grating (chirped grating) and just can form the diffraction type optical waveguide lens of a chirp grating type.And thereby load-modulate electric field changes the refractive index of this planar light waveguide between this modulator electrode and this two ground electrodes by electrooptical effect, thereby change the focal length of this diffraction type optical waveguide lens, effectively this laser beam is assembled into optical element.
Brief description of the drawings
Fig. 1 is the schematic perspective view of the optically coupled device of preferred embodiments of the present invention.
Fig. 2 is the diagrammatic cross-section of the optically coupled device II-II along the line of Fig. 1.
Fig. 3 is the floor map of the dielectric grating of the optical coupling device of Fig. 1.
Main element symbol description
| Optically coupled |
10 |
| |
110 |
| The |
111 |
| The |
112 |
| |
120 |
| The |
121 |
| The |
122 |
| |
130 |
| The |
131 |
| |
132 |
| |
141 |
| |
142 |
| |
150 |
| LASER |
20 |
| |
21 |
| Optical element | 30 |
Following embodiment further illustrates the present invention in connection with above-mentioned accompanying drawing.
Embodiment
Refer to Fig. 1 and Fig. 2, the optically coupled device 10 of preferred embodiments of the present invention, it comprises that a substrate 110, one are formed at planar light waveguide in this substrate 110 120, one and are formed at dielectric grating on this planar light waveguide 120 130, one and are parallel to this dielectric grating 130 and are arranged at modulator electrode 141 on this dielectric grating 130 and two and are parallel to the ground electrode 142 that this dielectric grating 130 is arranged in this substrate 110 and lays respectively at these dielectric grating 130 both sides.This planar light waveguide 120 is for docking to receive the laser beam 21 that this LASER Light Source 20 is sent with a LASER Light Source 20.These dielectric grating 130 edges are parallel to the incident direction setting of this laser beam 21, and form a diffraction type optical waveguide lens to assemble this laser beam 21 with this planar light waveguide 120.Between this modulator electrode 141 and this two ground electrodes 142 for load-modulate electric field
thereby change the focal length of this diffraction type optical waveguide lens to change the refractive index of this planar light waveguide 120 by electrooptical effect.
According to integrated optics theory, this dielectric grating 130 forms loaded type optical waveguide with this planar light waveguide 120, and the equivalent refractive index that this planar light waveguide 120 loads the part of this dielectric grating 130 becomes large.So, by the structure of this dielectric grating 130 is rationally set, for example, be arranged to chirp grating and just can form the diffraction type optical waveguide lens of a chirp grating type.And load this modulated electric fields between this modulator electrode 141 and this two ground electrodes 142
thereby change the refractive index of this planar light waveguide 120 by electrooptical effect, thereby change the focal length of this diffraction type optical waveguide lens, for example effectively this laser beam 21 is assembled, into optical element 30 (strip optical waveguide).In addition, taking the short transverse of this planar light waveguide 120 as
axle, Width is
axle, depth direction (being parallel to the direction of this dielectric grating 130) is
axle is set up coordinate system, and this modulator electrode 141 so arranges and can make this modulated electric fields with these two ground electrodes 142
part through this laser beam 21 is basically parallel to
direction of principal axis, and according to the Wave equation analysis of planar light waveguide, known, the transverse electric wave of this laser beam only has edge
axial electric field component
, and transverse magnetic wave only has edge
axial electric field component
and edge
axial electric field component
, therefore, this modulated electric fields
can effectively act on transverse magnetic wave, modulation transverse magnetic wave.
This substrate 110 is substantially rectangular, and comprises first end face 111 and first side 112 being connected with this first end face 111.Due to lithium niobate (LiNbO
3) crystal (LN) has higher reaction velocity, and consider that lithium niobate diffuse metal titanium (simple substance) can form the loaded lightguide of gradually changed refractive index type, therefore, the material of this substrate 110 adopts lithium columbate crystal.
This planar light waveguide 120 is rectangular equally, be positioned on this first end face 111, and comprise that second end face 121 opposing with this first end face 111 and one are connected with this second end face 121 and with coplanar the second side 122, this first side 112.This planar light waveguide 120 diffuses into Titanium (simple substance) and forms in lithium niobate.So, loading after this dielectric grating 130, the refractive index generation gradual change of this planar light waveguide 120, is the advantage that produces the diffraction type optical waveguide lens of chirp grating type.
This dielectric grating 130 is positioned on this second end face 121, and comprises three end face 131 opposing with this second end face 121.The same material that diffuses into Titanium in lithium niobate that adopts of this dielectric grating 130 is made.This dielectric grating 130 can be a chirp grating.Concrete, this dielectric grating 130 comprises medium part 132 multiple rectangles, that be arranged in parallel, the plurality of medium part 132 arranges with this second side 122 perpendicular to this first side 112, and highly basic identical.The number of the plurality of medium part 132 is odd number, and symmetrical about an axis of symmetry O, and along this axis of symmetry O to the direction away from this axis of symmetry O, the width of this medium part 132 is more and more less, and the gap of adjacent two these medium parts 132 is also more and more less.
Refer to Fig. 3, in present embodiment, taking the Width of this dielectric grating 130 as
axle, this axis of symmetry O with
the joining of axle is initial point, along this axis of symmetry O to away from the direction of this axis of symmetry O being
axle forward, exists with this laser beam 21
place with the phase differential at initial point place is
axle, can obtain according to planar light waveguide wave theory:
, wherein
.Of this medium part 131
individual border
meet following condition:
, wherein,
for positive integer,
(for forming this diffraction type optical waveguide lens),
and
for constant relevant to the focal length of this diffraction type optical waveguide lens.So, can be derived from:
.And
situation, the border of this medium part 131 on this axis of symmetry O left side can obtain by symmetry.
This modulated electric fields
cross this planar light waveguide 120, thereby can further change the equivalent refractive index of this planar light waveguide 120, change equivalently the refractive power (being focal length) of the diffraction type optical waveguide lens of chirp grating type, thereby can be coupled this LASER Light Source 10 and this optical element 30 that arrange with various distances.The length of this modulator electrode 141 and these two ground electrodes 142 is greater than or equal to the length of this dielectric grating 130, and in present embodiment, this modulator electrode 141 equals this by the length of this dielectric grating 130 and height with the length of these two ground electrodes 142.In addition, the width of this modulator electrode 141 is slightly less than or equals the width of this dielectric grating 130.The height of these two ground electrodes 142 is less than the height of this planar light waveguide 120, so, can make through the electric field part of this laser beam 21 more parallel
direction of principal axis.
Preferably, in order to prevent that light wave from being absorbed with this two ground electrodes 142 by this modulator electrode 141, can form one deck cushion 150 in this dielectric grating 130 and this substrate 110 and between this modulator electrode 141 and this two ground electrodes 142.This cushion 150 adopts silicon dioxide to make.
While making this optically coupled device 10, a lithium niobate blank (not shown) that comprises the 3rd end face 131 is first provided, the 3rd end face 131 plate Titanium (simple substance) then high temperature Titanium diffused into this lithium niobate blank have the lithium niobate part of Titanium to be formed for making the diffusion of this planar light waveguide 120 and this dielectric grating 130, and do not have diffusion to have the lithium niobate part of Titanium to be this substrate 110, then on the 3rd end face 131, be etched to this planar light waveguide 120 (i.e. this second end face 121) with form this dielectric grating 130 and this dielectric grating 130 both sides partially-etched to this substrate 110 (this first end face 111) to form this planar light waveguide 120.Then in this dielectric grating 130 and this substrate 110 to should modulator electrode 141 plating this cushion 150 and this modulator electrode 141 and these two ground electrodes 142 with the position of these two ground electrodes 142.
In a word; those skilled in the art will be appreciated that; above embodiment is only for the present invention is described; and be not used as limitation of the invention; as long as within connotation scope of the present invention, within the appropriate change that above embodiment is done and variation all drop on the scope of protection of present invention.
Claims (12)
1. an optically coupled device, it comprises that a substrate, one are formed at this suprabasil planar light waveguide, one and are formed at dielectric grating on this planar light waveguide, one and are parallel to this dielectric grating and are arranged at modulator electrode on this dielectric grating and two and are parallel to the ground electrode that this dielectric grating is arranged in this substrate and lays respectively at these dielectric grating both sides; This planar light waveguide is for docking to receive with a LASER Light Source laser beam that this LASER Light Source is sent; This dielectric grating edge is parallel to the incident direction setting of this laser beam, and forms a diffraction type optical waveguide lens to assemble this laser beam with this planar light waveguide; Thereby between this modulator electrode and this two ground electrodes, change the focal length of this diffraction type optical waveguide lens to change the refractive index of this planar light waveguide by electrooptical effect for load-modulate electric field.
2. optically coupled device as claimed in claim 1, is characterized in that, this substrate adopts lithium columbate crystal to make.
3. optically coupled device as claimed in claim 1, is characterized in that, this planar light waveguide diffuses into Titanium simple substance and forms in lithium niobate.
4. optically coupled device as claimed in claim 1, is characterized in that, this dielectric grating diffuses into Titanium simple substance and forms in lithium niobate.
5. optically coupled device as claimed in claim 1, is characterized in that, this substrate is rectangular, and comprises first end face and second end face being connected with this first end face; This planar light waveguide is rectangular, be positioned on this first end face, and comprise that second end face opposing with this first end face and one are connected with this second end face and with coplanar the second side, this first side; This is arranged at dielectric grating on this second end face, and comprise one with opposing the 3rd end face of this second end face; This optical coupling device by the 3rd end face that comprises the 3rd end face lithium niobate blank at plate Titanium simple substance then high temperature Titanium diffused into this lithium niobate blank have the lithium niobate part of Titanium to be formed for making the diffusion of this planar light waveguide and this dielectric grating, and do not have diffusion to have the lithium niobate part of Titanium to be this substrate, then on the 3rd end face, be etched to this second end face with form this dielectric grating and this dielectric grating both sides partially-etched to this first end face of this substrate to form this planar light waveguide.
6. optically coupled device as claimed in claim 5, is characterized in that, this dielectric grating is a chirp grating.
7. optically coupled device as claimed in claim 6, is characterized in that, this dielectric grating comprises medium part multiple rectangles, that be arranged in parallel, and the plurality of medium part arranges perpendicular to this first side and this second side, and highly basic identical; The number of the plurality of medium part is odd number, and symmetrical about an axis of symmetry, and along this axis of symmetry to the direction away from this axis of symmetry, the width of this medium part is more and more less, and the gap of adjacent two these medium parts is also more and more less.
8. optically coupled device as claimed in claim 6, is characterized in that, taking the Width of this dielectric grating as
axle, this axis of symmetry with
the joining of axle is initial point, along this axis of symmetry to the direction away from this axis of symmetry is
axle forward, of this medium part
individual border
meet following condition:
, wherein,
,
for positive integer,
and
for constant and relevant to the focal length of this diffraction type optical waveguide lens.
9. optically coupled device as claimed in claim 1, is characterized in that, the length of this modulator electrode and these two ground electrodes is greater than or equal to the length of this dielectric grating.
10. optically coupled device as claimed in claim 1, is characterized in that, the height of these two ground electrodes is less than the height of this planar light waveguide.
11. optically coupled devices as claimed in claim 1, it is characterized in that, this optically coupled device also comprises a cushion being arranged between this dielectric grating and this substrate and this modulator electrode and this two ground electrodes, for preventing that light wave from being absorbed by this modulator electrode and this two ground electrodes.
12. optically coupled devices as claimed in claim 11, is characterized in that, this cushion adopts silicon dioxide to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210547422.1A CN103869424B (en) | 2012-12-17 | 2012-12-17 | Optically coupled device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210547422.1A CN103869424B (en) | 2012-12-17 | 2012-12-17 | Optically coupled device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103869424A true CN103869424A (en) | 2014-06-18 |
| CN103869424B CN103869424B (en) | 2017-07-07 |
Family
ID=50908151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210547422.1A Expired - Fee Related CN103869424B (en) | 2012-12-17 | 2012-12-17 | Optically coupled device |
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| Country | Link |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111751927A (en) * | 2020-07-23 | 2020-10-09 | 中国科学院上海微系统与信息技术研究所 | Adjustable grating coupler |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4816912A (en) * | 1985-06-08 | 1989-03-28 | Brother Kogyo Kabushiki Kaisha | Laser-beam printer with improved optical deflector |
| US5111447A (en) * | 1982-10-14 | 1992-05-05 | Omron Tateisi Electronics Co. | Integral pick up for an optical digital disc using saw deflection and lense |
| CN1417620A (en) * | 2001-11-11 | 2003-05-14 | 华为技术有限公司 | Lithium niobate modulator and its making process |
| US20040247225A1 (en) * | 2003-06-04 | 2004-12-09 | Robert Tavlykaev | Waveguide modulators having bias control with reduced temperature dependence |
| CN1682144A (en) * | 2002-09-12 | 2005-10-12 | 住友大阪水泥股份有限公司 | Optical modulator |
| CN1764026A (en) * | 2004-10-20 | 2006-04-26 | 中国科学院半导体研究所 | The semiconductor laser high-frequency encapsulation is with having the heat sink of microstrip structure |
-
2012
- 2012-12-17 CN CN201210547422.1A patent/CN103869424B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5111447A (en) * | 1982-10-14 | 1992-05-05 | Omron Tateisi Electronics Co. | Integral pick up for an optical digital disc using saw deflection and lense |
| US4816912A (en) * | 1985-06-08 | 1989-03-28 | Brother Kogyo Kabushiki Kaisha | Laser-beam printer with improved optical deflector |
| CN1417620A (en) * | 2001-11-11 | 2003-05-14 | 华为技术有限公司 | Lithium niobate modulator and its making process |
| CN1682144A (en) * | 2002-09-12 | 2005-10-12 | 住友大阪水泥股份有限公司 | Optical modulator |
| US20040247225A1 (en) * | 2003-06-04 | 2004-12-09 | Robert Tavlykaev | Waveguide modulators having bias control with reduced temperature dependence |
| CN1764026A (en) * | 2004-10-20 | 2006-04-26 | 中国科学院半导体研究所 | The semiconductor laser high-frequency encapsulation is with having the heat sink of microstrip structure |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111751927A (en) * | 2020-07-23 | 2020-10-09 | 中国科学院上海微系统与信息技术研究所 | Adjustable grating coupler |
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|---|---|
| CN103869424B (en) | 2017-07-07 |
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