CN103868347B - Ventilation denoising structure and vertical oxidation - Google Patents
Ventilation denoising structure and vertical oxidation Download PDFInfo
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- CN103868347B CN103868347B CN201410117676.9A CN201410117676A CN103868347B CN 103868347 B CN103868347 B CN 103868347B CN 201410117676 A CN201410117676 A CN 201410117676A CN 103868347 B CN103868347 B CN 103868347B
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Abstract
The present invention's one ventilation denoising structure, noise when ventilating to vertical oxidation for reducing supply air line, it comprises the inner casing with gas buffer chamber, this gas buffer chamber comprises air inlet buffer cavity and buffer cavity of oppositely giving vent to anger, air inlet buffer cavity and the passage having between buffer cavity and be interconnected of oppositely giving vent to anger, supply air line is connected with air inlet buffer cavity, and wherein, the outgassing direction of buffer cavity of oppositely giving vent to anger is contrary with the airintake direction of air inlet buffer cavity.This ventilation denoising structure can reduce the noise that supply air line produces when vertical oxidation passes into gas effectively, and have manufacture simple, the advantages such as the low and applicability of cost is wide.In addition, present invention also offers a kind of vertical oxidation adopting above-mentioned ventilation denoising structure, it increases above-mentioned one ventilation denoising structure at supply air line end, effectively can reduce noise, stress release treatment, to the injury of surrounding environment and human body, builds a good working environment.
Description
Technical field
The present invention relates to a kind of denoising structure, be specifically related to a kind of denoising structure and use the vertical oxidation of this ventilation denoising structure of ventilating.
Background technique
In semiconductor integrated circuit manufactures, processing particularly oxidation processes to the processing of silicon chip is a very important link, such as, on silicon chip, silica is generated in the mode of thermal oxide growth, for Gate Oxide (gate oxidation), PadOxide (bed course oxidation), Sac Oxide (sacrificing oxidation) or Field Oxide (field oxidation), also can be used as the techniques such as Anneal (annealing) and Well Drive (trap driving).At present, vertical oxidation has replaced horizontal oxidation furnace silicon chip becomes main oxidation treatment device, and it has, and temperature-controlled precision is high, good reliability and be applicable to the advantage of intergrated circuit especially various oxidation in large-scale integrated circuit (LSI) manufacture process, the technique such as annealing and film growth.
In the using process of vertical oxidation, need for avoiding the impact of ambient atmosphere on oxidation technology to inject a large amount of N by the microenvironment in the vertical oxidation furnace of air circulating system
2, to discharge other gases in microenvironment, form a rich N
2environment.And the N in air circulating system
2be be directly connected to by supply air line one end the wind circulation loop being positioned at vertical oxidation to carry out carrying, be connected with at the other end of supply air line and produce N continually
2equipment, wherein, between steam line and vertical oxidation, also there is N
2flowmeter is to control aweather circulation loop conveying N
2amount.
In prior art, because the diameter (about 6 millimeters) of supply air line is less, gas flow is comparatively large, at N
2when directly entering into wind circulation loop (diameter 600mm) by supply air line, also be namely similar to gas to be directly passed in the large space of relative closure, pressure generation great variety before and after gas, its flowing state is caused acutely to change, the problem of obvious noise can be produced, and then surrounding environment and human body are damaged.
For this reason, how a kind of denoising structure and use the vertical oxidation of this ventilation denoising structure of ventilating is provided, the noise produced during effectively to reduce and to pass into gas, stress release treatment is to the injury of surrounding environment and human body, and building a good working environment is one of current industry problem needing solution badly.
Summary of the invention
Object of the present invention is, for the problems referred to above, propose a kind of ventilation denoising structure and vertical oxidation, it can reduce the noise produced when passing into gas effectively, and stress release treatment, to the injury of surrounding environment and human body, builds a good working environment.
For achieving the above object, the present invention's one ventilation denoising structure, noise when ventilating to vertical oxidation for reducing supply air line, it has the inner casing in gas buffer chamber, described gas buffer chamber comprises air inlet buffer cavity and buffer cavity of oppositely giving vent to anger, described air inlet buffer cavity and the described passage having between buffer cavity and be interconnected of oppositely giving vent to anger, described supply air line is connected with described air inlet buffer cavity, wherein, the outgassing direction of described buffer cavity of oppositely giving vent to anger is contrary with the airintake direction of described air inlet buffer cavity; Also comprise the frame with described inner casing outside with certain space distance, wherein, described inner casing and frame have one or more surface of contact, surface of contact described at least one comprise at least one first air outlet hole, have one or more airtight separate cavities between described inner casing and frame; The tube wall being positioned at the described supply air line of described air inlet buffer cavity has at least one second air outlet hole, the port being positioned at the described passage of described buffer cavity side of oppositely giving vent to anger also is connected with a reverse steam outlet pipe, the tube wall of described reverse steam outlet pipe has at least one the 3rd air outlet hole.
In preferred or optional embodiment, the shape of described first air outlet hole is circular, oval or one or more in rectangle.
In preferred or optional embodiment, the shape of described first air outlet hole is circular, and its diameter is 1 ~ 3mm.
In preferred or optional embodiment, in described separate cavities, be filled with air.
In preferred or optional embodiment, also with soundproof material on the outer side wall of described inner casing and/or the madial wall of frame.
In preferred or optional embodiment, described supply air line end port closure or openness, the shape of described second air outlet hole is circular, oval or one or more in rectangle.
In preferred or optional embodiment, the shape of described second air outlet hole is circular, and its diameter is 0.5 ~ 2mm.
In preferred or optional embodiment, described reverse steam outlet pipe end port closure or openness, the shape of described 3rd air outlet hole is circular, oval or one or more in rectangle.
In preferred or optional embodiment, the shape of described 3rd air outlet hole is circular, and its diameter is 0.5 ~ 2mm.
In addition, present invention also offers a kind of vertical oxidation, it comprises above-mentioned said one ventilation denoising structure at the end of supply air line.
As can be seen from technique scheme, the present invention's one ventilation denoising structure, noise when ventilating to vertical oxidation for reducing supply air line, it comprises the inner casing with gas buffer chamber, this gas buffer chamber comprises air inlet buffer cavity and buffer cavity of oppositely giving vent to anger, air inlet buffer cavity and the passage having between buffer cavity and be interconnected of oppositely giving vent to anger, and supply air line is connected with air inlet buffer cavity, wherein, the outgassing direction of buffer cavity of oppositely giving vent to anger is contrary with the airintake direction of air inlet buffer cavity.This ventilation denoising structure can reduce the noise that supply air line produces when vertical oxidation passes into gas effectively, and have manufacture simple, the advantages such as the low and applicability of cost is wide.In addition, present invention also offers a kind of vertical oxidation adopting above-mentioned ventilation denoising structure, it increases above-mentioned one ventilation denoising structure at supply air line end, effectively can reduce noise, stress release treatment, to the injury of surrounding environment and human body, builds a good working environment.
Accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention be described in detail, wherein:
Fig. 1 is the overall schematic of the ventilation denoising structure of the embodiment of the invention;
Fig. 2 is the generalized section of the ventilation denoising structure of the embodiment of the invention;
Fig. 3 is the internal anatomy schematic diagram of the ventilation denoising structure of the embodiment of the invention.
Embodiment
Some exemplary embodiments embodying feature & benefits of the present invention describe in detail in the explanation of back segment.Be understood that the present invention can have various changes in different examples, it neither departs from the scope of the present invention, and explanation wherein and being shown in essence when the use explained, and be not used to limit the present invention.
Above-mentioned and other technical characteristics and beneficial effect, be described in detail 1-3 by reference to the accompanying drawings to a ventilate preferred embodiment of denoising structure and vertical oxidation of the present invention.
Below will illustrate the present invention's one ventilation denoising structure and vertical oxidation, noise when wherein this ventilation denoising structure is ventilated to vertical oxidation for reducing supply air line, it comprises the inner casing with gas buffer chamber, this gas buffer chamber comprises air inlet buffer cavity and buffer cavity of oppositely giving vent to anger, air inlet buffer cavity and the passage having between buffer cavity and be interconnected of oppositely giving vent to anger, supply air line is connected with air inlet buffer cavity, wherein, the outgassing direction of buffer cavity of oppositely giving vent to anger is contrary with the airintake direction of air inlet buffer cavity.This ventilation denoising structure can reduce the noise that supply air line produces when vertical oxidation passes into gas effectively, and have manufacture simple, the advantages such as the low and applicability of cost is wide.In addition present invention also offers a kind of vertical oxidation adopting above-mentioned ventilation denoising structure, it increases above-mentioned one ventilation denoising structure at supply air line end, effectively can reduce noise, stress release treatment, to the injury of surrounding environment and human body, builds a good working environment.
In addition, the end that when ventilating to vertical oxidation for reducing supply air line, the ventilation denoising structure of noise specifically can be arranged on supply air line carries out air feed with the wind circulation loop to vertical oxidation; Certainly this ventilation denoising structure also can be arranged in vertical oxidation, and ventilate in oxidation furnace after supply air line is connected with this ventilation denoising structure, wherein, above-mentioned said gas can be N again
2also can be other gases; This is no longer going to repeat them in the concrete mounting point of this ventilation denoising structure for this reason, all should within protection scope of the present invention.
Refer to Fig. 1-3, as shown in Figure 1, Figure 2 and Figure 3, this ventilation denoising structure comprises the inner casing 3 with gas buffer chamber, with inner casing 3 outside, there is the frame 4 of certain space distance, inner casing 3 and frame 4 have one or more surface of contact, wherein, at least one above-mentioned surface of contact comprises at least one first air outlet hole 1, above-mentioned supply air line 2 is connected with gas buffer chamber.Specifically, buffer function is played to the gas in supply air line in the gas buffer chamber that above-mentioned inner casing 3 surrounds, discharged by above-mentioned first air outlet hole 1 again, flow with mitigation of gases and disperse to discharge, thus reducing the noise produced when gas enters the wind circulation loop of vertical oxidation; Above-mentioned inner casing 3 and frame 4 have one or more surface of contact, make between this inner casing 3 and frame 4, to form one or more airtight separate cavities 5, further, air or some other sound insulation gas can be filled in this separate cavities 5, consider the Economy of this ventilation denoising structure, preferably, fill air in this separate cavities 5, carry out reduction noise by damping function.In addition, the material of above-mentioned frame is 2Cr21Ni12N stainless steel, and it has the advantages such as good turbidity test and durability.
In the present embodiment, there is between above-mentioned inner casing 3 and frame 4 surface of contact, correspondingly there is therebetween a separate cavities 5, be wherein filled with air in this separate cavities 5, by damping function to reduce noise.According between the inner casing 3 in the present embodiment and frame 4, there is a surface of contact, so this surface of contact then at least comprises first air outlet hole 1, preferably, this surface of contact has multiple first air outlet hole 1.Further, the shape of above-mentioned first air outlet hole 1 is circular, one or more in oval or rectangle, in other words, the shape of multiple first air outlet holes 1 on above-mentioned surface of contact can be all circular, ellipse or rectangle, also can be that combination of two or three kinds of figures of above-mentioned figure all have, consider the fluency that air-flow is advanced and avoid unnecessary energy dissipation and the risk that may produce noise, in the present embodiment, on above-mentioned surface of contact, the shape of multiple first air outlet hole 1 is circular, its diameter range is 1 ~ 3mm, the diameter of this first air outlet hole 1 is 2mm particularly.In addition, also can adhere to soundproof material on the madial wall of the outer side wall of above-mentioned inner casing 3 and/or frame 4 for reducing noise, to reduce noise further, can certainly consider that the factor of economic aspect does not do process in this respect.
In addition, the gas buffer chamber that above-mentioned inner casing 3 surrounds comprises air inlet buffer cavity 6 and buffer cavity 7 of oppositely giving vent to anger, and wherein, supply air line is connected with the air inlet buffer cavity 6 in gas buffer chamber.The above-mentioned tube wall being positioned at supply air line 2 end of air inlet buffer cavity 6 has at least one second air outlet hole 2a, wherein, these supply air line 2 end port closure or openness can, preferably, this supply air line 2 end port close.Further, the above-mentioned tube wall being positioned at supply air line 2 end of air inlet buffer cavity 6 has multiple second air outlet hole 2a, wherein, the shape of this second air outlet hole 2a is circular, one or more in oval or rectangle, in other words, the shape of the multiple second air outlet hole 2a on the above-mentioned tube wall being positioned at supply air line 2 end of air inlet buffer cavity 6 can be all circular, ellipse or rectangle, also can be that combination of two or three kinds of figures of above-mentioned figure all have, consider the fluency that air-flow is advanced and avoid unnecessary energy dissipation and the risk that may produce noise, in the present embodiment, the shape of the multiple second air outlet hole 2a on the above-mentioned tube wall being positioned at supply air line 2 end of air inlet buffer cavity 6 is for circular, its diameter range is 0.5 ~ 2mm, the diameter of this second air outlet hole 2a is 1mm particularly.
Further, above-mentioned air inlet buffer cavity 6 and the passage having between buffer cavity 7 and be interconnected of oppositely giving vent to anger, wherein, this access port place being positioned at above-mentioned buffer cavity 7 side of oppositely giving vent to anger also is connected with a reverse steam outlet pipe, the gas in air inlet buffer cavity 6 is made to enter with the opposite direction during air inlet buffer cavity 7 of giving vent to anger, like this by supply air line 2, air inlet buffer cavity 6, the reverse air outlet structure that reverse steam outlet pipe and buffer cavity 7 of giving vent to anger are formed jointly can form reverse sound wave, noise is weakened by the interference of ripple, and further can also cushion gas on this basis, weaken noise.In addition, the material of above-mentioned supply air line 2 and reverse steam outlet pipe can adopt 1/4 stainless steel.
Further, the tube wall of above-mentioned reverse steam outlet pipe has at least one the 3rd air outlet hole 8, wherein, these reverse steam outlet pipe end port closure or openness, preferably, this reverse steam outlet pipe end port closes.In the present embodiment, the tube wall of above-mentioned reverse steam outlet pipe has multiple 3rd air outlet hole 8, wherein, the shape of the 3rd air outlet hole 8 is circular, oval or one or more in rectangle.Further, the shape of the 3rd air outlet hole 8 is circular, and its diameter range is 0.5 ~ 2mm, and the diameter of the 3rd air outlet hole 8 is 1mm particularly.
In addition, present invention also offers a kind of vertical oxidation, it comprises above-mentioned said one ventilation denoising structure at the end of supply air line, effectively can reduce noise, and stress release treatment, to the injury of surrounding environment and human body, builds a good working environment.
In sum, the present invention's one ventilation denoising structure, noise when ventilating to vertical oxidation for reducing supply air line, it comprises the inner casing with gas buffer chamber, this gas buffer chamber comprises air inlet buffer cavity and buffer cavity of oppositely giving vent to anger, above-mentioned air inlet buffer cavity and the passage having between buffer cavity and be interconnected of oppositely giving vent to anger, and supply air line is connected with air inlet buffer cavity, wherein, the outgassing direction of buffer cavity of oppositely giving vent to anger is contrary with the airintake direction of air inlet buffer cavity.This ventilation denoising structure can reduce the noise that supply air line produces when vertical oxidation passes into gas effectively, and have manufacture simple, the advantages such as the low and applicability of cost is wide.In addition, present invention also offers a kind of vertical oxidation adopting above-mentioned ventilation denoising structure, it increases above-mentioned one ventilation denoising structure at supply air line end, effectively can reduce noise, stress release treatment, to the injury of surrounding environment and human body, builds a good working environment.
Above-describedly be only the preferred embodiments of the present invention; described embodiment is also not used to limit scope of patent protection of the present invention; therefore the equivalent variations done of every utilization specification of the present invention and accompanying drawing content, in like manner all should be included in protection scope of the present invention.
Claims (10)
1. a ventilation denoising structure, noise when ventilating to vertical oxidation for reducing supply air line, it is characterized in that, there is the inner casing in gas buffer chamber, described gas buffer chamber comprises air inlet buffer cavity and buffer cavity of oppositely giving vent to anger, described air inlet buffer cavity and the described passage having between buffer cavity and be interconnected of oppositely giving vent to anger, and described supply air line is connected with described air inlet buffer cavity, wherein, the outgassing direction of described buffer cavity of oppositely giving vent to anger is contrary with the airintake direction of described air inlet buffer cavity; Also comprise the frame with described inner casing outside with certain space distance, wherein, described inner casing and frame have one or more surface of contact, surface of contact described at least one comprise at least one first air outlet hole, have one or more airtight separate cavities between described inner casing and frame; The tube wall being positioned at the described supply air line of described air inlet buffer cavity has at least one second air outlet hole, the port being positioned at the described passage of described buffer cavity side of oppositely giving vent to anger also is connected with a reverse steam outlet pipe, the tube wall of described reverse steam outlet pipe has at least one the 3rd air outlet hole.
2. one ventilation denoising structure according to claim 1, is characterized in that, the shape of described first air outlet hole is circular, oval or one or more in rectangle.
3. one ventilation denoising structure according to claim 2, is characterized in that, the shape of described first air outlet hole is circular, and its diameter is 1 ~ 3mm.
4. one ventilation denoising structure according to claim 1, is characterized in that, be filled with air in described separate cavities.
5. one ventilation denoising structure according to claim 1, is characterized in that the outer side wall of described inner casing and/or the madial wall of frame also have soundproof material.
6. one ventilation denoising structure according to claim 1, is characterized in that, described supply air line end port closure or openness, and the shape of described second air outlet hole is circular, oval or one or more in rectangle.
7. one ventilation denoising structure according to claim 6, is characterized in that, the shape of described second air outlet hole is circular, and its diameter is 0.5 ~ 2mm.
8. one ventilation denoising structure according to claim 1, is characterized in that, described reverse steam outlet pipe end port closure or openness, and the shape of described 3rd air outlet hole is circular, oval or one or more in rectangle.
9. one ventilation denoising structure according to claim 8, is characterized in that, the shape of described 3rd air outlet hole is circular, and its diameter is 0.5 ~ 2mm.
10. a vertical oxidation, is characterized in that, comprises the one ventilation denoising structure described in any one of claim 1 to 9 at the end of supply air line.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410117676.9A CN103868347B (en) | 2014-03-27 | 2014-03-27 | Ventilation denoising structure and vertical oxidation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410117676.9A CN103868347B (en) | 2014-03-27 | 2014-03-27 | Ventilation denoising structure and vertical oxidation |
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| CN103868347A CN103868347A (en) | 2014-06-18 |
| CN103868347B true CN103868347B (en) | 2015-08-05 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| GB1496163A (en) * | 1974-08-16 | 1977-12-30 | Foseco Int | Burner quarls |
| CN2318406Y (en) * | 1997-10-10 | 1999-05-12 | 董秀斌 | Purification silencer |
| JP2004124708A (en) * | 2002-09-30 | 2004-04-22 | Honda Motor Co Ltd | Muffler for engine |
| CN101514649A (en) * | 2009-03-24 | 2009-08-26 | 彩虹彩色显像管总厂 | Muffler |
| CN102330587A (en) * | 2011-07-08 | 2012-01-25 | 重庆市北碚区枫火机械制造有限公司 | Microporous silencer |
| CN203798134U (en) * | 2014-03-27 | 2014-08-27 | 北京七星华创电子股份有限公司 | Structure for lowering gas feeding noises and vertical oxidizing furnace |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180119 Address after: No. 8, Wenchang Avenue, Daxing District economic and Technological Development Zone, Beijing City, Beijing Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
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