CN103866357B - A kind of electrochemical deposition equipment and utilize its method carrying out depositing - Google Patents
A kind of electrochemical deposition equipment and utilize its method carrying out depositing Download PDFInfo
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- CN103866357B CN103866357B CN201210527974.6A CN201210527974A CN103866357B CN 103866357 B CN103866357 B CN 103866357B CN 201210527974 A CN201210527974 A CN 201210527974A CN 103866357 B CN103866357 B CN 103866357B
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Abstract
The invention discloses a kind of electrochemical deposition equipment and utilize it to carry out the method deposited, relating to electrochemical deposition technique field.Electrochemical deposition equipment of the present invention includes electrochemical deposition groove and is arranged in dislodger the least one set pipeline for liquid medicine flow, and described often group pipeline includes suction pipe and the jet pipe that centrage is parallel to each other, and described suction pipe and jet pipe have hole.The present invention uses suction pipe to draw the medicinal liquid in electrochemical deposition groove, jet pipe ejection is coordinated to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work, thus increase the uniformity of electrochemical deposition coating.
Description
Technical field
The present invention relates to electrochemical deposition technique field, particularly to a kind of electrochemical deposition equipment and utilize its method carrying out depositing.
Background technology
Electrochemical deposition is the method plating metal, alloy, quasiconductor or other electric conductors on the product surface of conduction, and this method makes the ion deposition in electrochemical deposition medicinal liquid to product surface.The purpose of electrochemical deposition is to change the surface characteristic of material, or produces the material layer of special component and performance.The coating of the different attributes such as such as mar proof coating, corrosion-resistant protectiveness coating, lubricity coating, high temperature oxidation resistance coating, electrical property coating, optical property coating, quasiconductor coating, pcb plating layer, decorative coating.Also what can be applied to make coating make up the demand that surface of the work thickness is not enough.Separately can also produce workpiece in electroforming mode, coating forms Hou to be separated with ground, and coating becomes individual work pieces.Electrochemical deposition is employed the most widely, including electronics, automobile, wrist-watch, illumination, photovoltaic etc..
In electrochemical deposition process, topmost quadrinomial parameter is the flowing at product surface of electric current, temperature, the concentration of the various composition of medicinal liquid and liquid.First three items has various method to control, but medicinal liquid is in the design of flowing electrochemical deposition the to be leaned on equipment of product surface, as with air in medicinal liquid rise drive medicinal liquid flowing, with mechanical agitation medicinal liquid, with nozzle ejection medicinal liquid drive the flowing of medicinal liquid, with mobile product to produce relative flowing etc., it is not easy on controlling, to be often especially added with, by using low current and use, the problem that agent solves to cause because liquid medicine flow is uneven.
In printed substrate copper-plating technique, traditional rack plating uses air stirring and product to swing initiation medicinal liquid flowing in PCB surface and hole, but because relative flowing velocity is slow, it is impossible to by higher electric current density.Developing into vertical continuous copper facing in the recent period, nozzle sprays plating solution on the two sides, left and right of wiring board, uses high current density, more can increase the uniformity of coating.In this technical process, nozzle the liquid sprayed can form a disc after needing to spray a segment distance.It is formed uniformly a suitable face to ensure that hydrojet compares, needs workpiece and spray hole are adjusted to a suitable distance.This most just increases the volume of medicinal liquid cylinder, needs to increase the usage amount of medicinal liquid.
Summary of the invention
It is an object of the invention to overcome the above-mentioned deficiency in the presence of prior art, it is provided that a kind of increase the uniformity of electrochemical deposition coating, reduce the electrochemical deposition equipment of medicinal liquid consumption and utilize its method carrying out depositing.
In order to realize foregoing invention purpose, the invention provides techniques below scheme:
A kind of electrochemical deposition equipment, including electrochemical deposition groove and in being arranged at dislodger for often organizing suction pipe and the jet pipe that pipeline includes that centrage is parallel to each other described in the least one set pipeline of liquid medicine flow, described suction pipe and jet pipe have hole.The present invention uses suction pipe to draw the medicinal liquid in electrochemical deposition groove, jet pipe ejection is coordinated to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work, thus increase the uniformity of electrochemical deposition coating；Often group pipeline can be a suction pipe, two jet pipes, or two suction pipes, jet pipes, or many suction pipes, the combination in any of many jet pipes, selects according to size, the shape of workpiece.
Preferably, in above-mentioned electrochemical deposition equipment, often suction pipe described in group pipeline be one, described jet pipe be one.Suction pipe is corresponding to jet pipe quantity, and the flowing velocity that can make electrochemical deposition groove inner liquid medicine is uniform, increases the uniformity of electrochemical deposition coating.
Preferably, in above-mentioned electrochemical deposition equipment, described suction pipe is one or more narrow strip hole with the hole on jet pipe.Hole on pipeline is set to strip so that produces and is more prone to；And temperature is up to 60-70 degree Celsius in electrochemical deposition groove, the length of hole is less than 5cm, hole can be avoided to deform in high temperature, it is ensured that the stability of hole.
Preferably, in above-mentioned electrochemical deposition equipment, the distance between centrage and the centrage of jet pipe of described suction pipe is less than four times of two pipe diameter summations.Distance between suction pipe and jet pipe crosses the liquid medicine flow speed that conference affects between jet pipe and suction pipe, affects the uniformity of electrochemical deposition coating.
Preferably, in above-mentioned electrochemical deposition equipment, described straw diameter is 5mm～80mm；Described jet size is 5mm～80mm.Suction pipe can select according to the size of workpiece with the diameter of jet pipe, and workpiece is the biggest, and the diameter of pipeline is the biggest.
Preferably, in above-mentioned electrochemical deposition equipment, the direction of described suction pipe cross section central point to hole and suction pipe cross section central point to surface of the work are also perpendicular to the direction of surface of the work and have the angle of 0～75 degree；Described jet pipe cross section central point has the angle of 15～180 degree to the direction of hole and the direction of jet pipe cross section central point to suction pipe cross section central point.Suction pipe and the direction of hole on jet pipe and surface of the work shape certain angle and the direction of liquid medicine flow can be made to keep almost parallel relative to surface of the work, thus increase the uniformity of electrochemical deposition coating.
Preferably, in above-mentioned electrochemical deposition equipment, surface of the work is pointed in the direction of described jet pipe cross section central point to described suction pipe cross section central point, and is perpendicular to surface of the work.Suction pipe can reduce the volume of electrochemical deposition groove closer to surface of the work, thus reduces the usage amount of medicinal liquid.The mode of current commonly used spray carries out the electrochemical deposition of surface of the work, workpiece is typically placed in parallel in pipeline group side or places near jet pipe, but inventor in experiments it is found that, when workpiece is positioned over suction pipe dead ahead, medicinal liquid is inhaled to move and medicinal liquid can be made the most more stable in the flowing velocity of surface of the work by suction pipe, greatly adds the uniformity of the electrochemical deposition coating of surface of the work.
Preferably, in above-mentioned electrochemical deposition equipment, described pipeline is two rows, and a discharge pipe carries out electrochemical deposition for the front for workpiece, and another discharge pipe is for the back side electrochemical deposition for workpiece.Use two discharge pipes front and back to workpiece can carry out electrochemical deposition simultaneously, increase work efficiency.
A kind of utilize above-mentioned electrochemical deposition equipment to carry out the method deposited, comprise the following steps:
(1) suction pipe is utilized to draw the medicinal liquid in electrochemical deposition groove, coordinate jet pipe ejection to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work relative to the direction of suction pipe；
(2) making workpiece relative to pipette movement, its moving direction is for being parallel to surface of the work and being perpendicular to center suction tube line direction；
(3) in electrochemical deposition groove, medicinal liquid is supplemented by jet pipe.
Preferably, in the method for designing of above-mentioned electrochemical deposition equipment, described suction pipe and jet pipe are PP pipe or pvc pipe or the metal tube scribbling politef.
Compared with prior art, beneficial effects of the present invention:
1, the present invention uses suction pipe to draw the medicinal liquid in electrochemical deposition groove, jet pipe ejection is coordinated to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work, thus increase the uniformity of electrochemical deposition coating.
2, workpiece and suction pipe have relative movement in the present invention, and this rolling average is perpendicular to the difference of liquid stream on suction pipe and jet pipe direction, thus reach uniform on workpiece planarization of coating.
3, owing to the suction pipe in the present invention is closer to surface of the work, the volume of electrochemical deposition groove can be reduced, thus reduce the usage amount of medicinal liquid.
4, the medicinal liquid in the jet pipe in the present invention sprays into electrochemical deposition groove supplements the medicinal liquid in suction pipe sucking-off electrochemical deposition groove, it is to avoid supplements medicinal liquid in cell body endogenous cause of ill and affects the flow direction of medicinal liquid and speed and then have influence on the uniformity of electrochemical deposition coating.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of electrochemical deposition equipment of the present invention.
Fig. 2 is the sectional drawing of electrochemical deposition equipment of the present invention.
Fig. 3 is the structural representation of embodiment 2 in electrochemical deposition equipment of the present invention.
Fig. 4 is the structural representation of embodiment 3 in electrochemical deposition equipment of the present invention.
Fig. 5 is the structural representation of embodiment 4 in electrochemical deposition equipment of the present invention.
Labelling in figure: 1-workpiece, 2-suction pipe, 3-jet pipe, 4-hole.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, the present invention is described in further detail.But this should not being interpreted as, the scope of the above-mentioned theme of the present invention is only limitted to below example, and all technology realized based on present invention belong to the scope of the present invention.
Embodiment
1
A kind of electrochemical deposition equipment, as shown in Figure 1, including electrochemical deposition groove and be arranged in dislodger the pipeline for liquid medicine flow, described pipeline includes a suction pipe 2 that centrage is parallel to each other and a jet pipe 3, hole 4 is had on described pipeline, described hole 4 is a plurality of narrow strip hole, and the hole on pipeline is set to strip so that produces and is more prone to；And temperature is up to 60-70 degree Celsius in electrochemical deposition groove, the length of hole is less than 5cm, hole can be avoided to deform in high temperature, it is ensured that the stability of hole.It is respectively arranged with four round holes, as in figure 2 it is shown, described suction pipe 2 cross section central point is α to the direction of hole and suction pipe cross section central point to the angle in workpiece 1 surface the direction being perpendicular to workpiece 1 surface on described suction pipe 2 and jet pipe 31、α2, wherein α1It is 30 °, α2It it is 50 °；Described jet pipe 3 cross section central point is respectively β to the direction of hole and the angle of jet pipe cross section central point to the direction of suction pipe cross section central point1、β2, wherein β1It is 80 °, β2It it is 100 °.
Described suction pipe 2 and described a diameter of 5mm～80mm of jet pipe 3, suction pipe can select according to the size of workpiece with the diameter of jet pipe, and workpiece is the biggest, and the diameter of pipeline is the biggest.Distance between centrage and the centrage of jet pipe 3 of described suction pipe 2 is less than four times of two pipe diameter summations.Described jet pipe cross section central point points to surface of the work to the direction of described suction pipe cross section central point, and is perpendicular to surface of the work；Suction pipe can reduce the volume of electrochemical deposition groove closer to surface of the work, thus reduces the usage amount of medicinal liquid；When workpiece is positioned over suction pipe dead ahead, medicinal liquid is inhaled to move and medicinal liquid can be made the most more stable in the flowing velocity of surface of the work by suction pipe, greatly adds the uniformity of the electrochemical deposition coating of surface of the work.
A kind of utilize above-mentioned electrochemical deposition equipment to carry out the method deposited, comprise the following steps:
(1) suction pipe is utilized to draw the medicinal liquid in electrochemical deposition groove, coordinate jet pipe ejection to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work relative to the direction of suction pipe；
(2) making workpiece relative to pipette movement, its moving direction is for being parallel to surface of the work and being perpendicular to center suction tube line direction；
(3) in electrochemical deposition groove, medicinal liquid is supplemented by jet pipe.
Described suction pipe and jet pipe are PP pipe.
The present invention uses suction pipe to draw the medicinal liquid in electrochemical deposition groove, jet pipe ejection is coordinated to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work, thus increase the uniformity of electrochemical deposition coating.One group of suction pipe and the one side that jet pipe is a flat work pieces carry out electrochemical deposition, suction pipe and jet pipe provide uniform at the liquid stream of duct orientation for workpiece, it is different at the liquid stream that this side up that workpiece moves left and right equalization in the direction level of vertical what pipeline, thus reaches coating on the surface of the workpiece uniform.
Embodiment
2
A kind of electrochemical deposition equipment, as shown in Figure 3, including electrochemical deposition groove and be arranged in dislodger for the multi units tube road of liquid medicine flow, pipeline shown in figure is wherein two groups, described pipeline is the pipeline of bending, its curvature coordinates the curvature of surface of the work, and the pipeline of bending is more conducive to the workpiece of bending and carries out electrochemical deposition；Having hole 4 on described pipeline, described hole 4 is a plurality of narrow strip hole so that produces and is more prone to；The most often group pipeline includes a suction pipe 2 and a jet pipe 3, and the centrage of suction pipe 2 and jet pipe 3 is the curve being parallel to each other；It is respectively arranged with four round holes 4, as in figure 2 it is shown, described suction pipe 2 cross section central point is α to the direction of hole and suction pipe cross section central point to the angle in workpiece 1 surface the direction being perpendicular to workpiece 1 surface on described suction pipe 2 and jet pipe 31、α2, wherein α1It is 15 °, α2It it is 35 °；Described jet pipe 3 cross section central point is respectively β to the direction of hole and the angle of jet pipe cross section central point to the direction of suction pipe cross section central point1、β2, wherein β1It is 50 °, β2It it is 70 °.
Described suction pipe 2 and described a diameter of 5mm～80mm of jet pipe 3, suction pipe can select according to the size of workpiece with the diameter of jet pipe, and workpiece is the biggest, and the diameter of pipeline is the biggest.Distance between centrage and the centrage of jet pipe 3 of described suction pipe 2 is less than four times of two pipe diameter summations.Described jet pipe cross section central point points to surface of the work to the direction of described suction pipe cross section central point, and is perpendicular to surface of the work；Suction pipe can reduce the volume of electrochemical deposition groove closer to surface of the work, thus reduces the usage amount of medicinal liquid；When workpiece is positioned over suction pipe dead ahead, medicinal liquid is inhaled to move and medicinal liquid can be made the most more stable in the flowing velocity of surface of the work by suction pipe, greatly adds the uniformity of the electrochemical deposition coating of surface of the work.
A kind of utilize above-mentioned electrochemical deposition equipment to carry out the method deposited, comprise the following steps:
(1) suction pipe is utilized to draw the medicinal liquid in electrochemical deposition groove, coordinate jet pipe ejection to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work relative to the direction of suction pipe；
(2) making workpiece relative to pipette movement, its moving direction is for being parallel to surface of the work and being perpendicular to center suction tube line direction；
(3) in electrochemical deposition groove, medicinal liquid is supplemented by jet pipe.
Described suction pipe and jet pipe are pvc pipe.
The present invention uses suction pipe to draw the medicinal liquid in electrochemical deposition groove, jet pipe ejection is coordinated to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work, thus increase the uniformity of electrochemical deposition coating.The suction pipes organizing installation and the one side that jet pipe is a workpiece carry out electrochemical deposition more, the curvature of suction pipe and jet pipe coordinates the curvature of surface of the work, often group suction pipe and jet pipe provide uniform liquid stream in duct orientation, workpiece is from while the liquid stream shifted between two groups of adjacent channels of another side equalization is different, thus reach coating on the surface of the workpiece uniform, and the electrochemical deposition time of workpiece can be saved in multi units tube road, increase work efficiency.
Embodiment
3
A kind of electrochemical deposition equipment, as shown in Figure 4, including electrochemical deposition groove and be arranged in dislodger for the multi units tube road of liquid medicine flow, pipeline shown in figure is wherein eight groups, described pipeline is two rows, one discharge pipe carries out electrochemical deposition for the front for workpiece, and another discharge pipe is for the back side electrochemical deposition for workpiece.Use two discharge pipes front and back to workpiece can carry out electrochemical deposition simultaneously, increase work efficiency.
The most often group pipeline includes a suction pipe 2 that centrage is parallel to each other and a jet pipe 2；Described suction pipe 2 has hole 4 on jet pipe 3, and described hole 4 is a plurality of narrow strip hole, and the hole 4 on pipeline is set to strip, and production can be made to be more prone to；And temperature is up to 60-70 degree Celsius in electrochemical deposition groove, the length of hole is less than 5cm, hole can be avoided to deform in high temperature, it is ensured that the stability of hole；It is respectively arranged with four round holes, as in figure 2 it is shown, described suction pipe 2 cross section central point is α to the direction of hole and suction pipe cross section central point to the angle in workpiece 1 surface the direction being perpendicular to workpiece 1 surface on described suction pipe 2 and jet pipe 31、α2, wherein α1It is 50 °, α2It it is 70 °；Described jet pipe 3 cross section central point is respectively β to the direction of hole and the angle of jet pipe cross section central point to the direction of suction pipe cross section central point1、β2, wherein β1It is 130 °, β2It it is 150 °.
Described suction pipe 2 and described a diameter of 5mm～80mm of jet pipe 3, suction pipe 2 can select according to the size of workpiece with the diameter of jet pipe 3, and workpiece is the biggest, and the diameter of pipeline is the biggest.Distance between centrage and the centrage of jet pipe 3 of described suction pipe 2 is less than four times of two pipe diameter summations.Described jet pipe 3 cross section central point points to workpiece 1 surface to the direction of described suction pipe 2 cross section central point, and is perpendicular to workpiece 1 surface；Suction pipe 2 can reduce the volume of electrochemical deposition groove closer to workpiece 1 surface, thus reduces the usage amount of medicinal liquid；When workpiece is positioned over suction pipe dead ahead, medicinal liquid is inhaled to move and medicinal liquid can be made the most more stable in the flowing velocity of surface of the work by suction pipe, greatly adds the uniformity of the electrochemical deposition coating of surface of the work.
A kind of utilize above-mentioned electrochemical deposition equipment to carry out the method deposited, comprise the following steps:
(1) suction pipe is utilized to draw the medicinal liquid in electrochemical deposition groove, coordinate jet pipe ejection to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work relative to the direction of suction pipe；
(2) making workpiece relative to pipette movement, its moving direction is for being parallel to surface of the work and being perpendicular to center suction tube line direction；
(3) in electrochemical deposition groove, medicinal liquid is supplemented by jet pipe.
Described suction pipe and jet pipe are PP pipe.
The present invention uses suction pipe to draw the medicinal liquid in electrochemical deposition groove, jet pipe ejection is coordinated to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work, thus increase the uniformity of electrochemical deposition coating.Many groups of vertically arranged suction pipes of two row and the two sides that jet pipe is a flat work pieces carry out electrochemical deposition, often group suction pipe and jet pipe provide uniform liquid stream in duct orientation, workpiece is from while the liquid stream shifted between two groups of adjacent channels of another side equalization is different, thus reach uniform on workpiece two sides of coating, and the electrochemical deposition time of workpiece can be saved in two row's multi units tube roads, increase work efficiency.
Embodiment
4
A kind of electrochemical deposition equipment, as it is shown in figure 5, for four groups of pipelines of liquid medicine flow in including electrochemical deposition groove and being arranged at dislodger, described pipeline has hole 4, described hole 4 is a plurality of narrow strip hole；Described often group pipeline includes the suction pipe 2 that is parallel to each other along drum-shaped workpiece 1 radial distribution and centrage and a jet pipe 3, described four groups of pipelines are distributed in drum-shaped workpiece 1 with drum-shaped workpiece 1 center, and pipe centerline is parallel to the centrage of drum-shaped workpiece 1；Described pipe diameter is less than 1/5th of drum-shaped workpiece 1 diameter.Suction pipe 2 can select according to the size of workpiece with the diameter of jet pipe 3, and workpiece is the biggest, and the diameter of pipeline is the biggest.
A kind of utilize above-mentioned electrochemical deposition equipment to carry out the method deposited, comprise the following steps:
(1) suction pipe is utilized to draw the medicinal liquid in electrochemical deposition groove, coordinate jet pipe ejection to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at drum-shaped work piece inner surface relative to the direction of suction pipe；
(2) making workpiece do rotation movement along work centre line relative to pipette movement, workpiece, i.e. its moving direction is for being parallel to surface of the work and being perpendicular to center suction tube line direction；
(3) in electrochemical deposition groove, medicinal liquid is supplemented by jet pipe.
Described suction pipe and jet pipe are the metal tube scribbling politef.
The present invention uses suction pipe to draw the medicinal liquid in electrochemical deposition groove, jet pipe ejection is coordinated to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work, thus increase the uniformity of electrochemical deposition coating.Workpiece does rotation movement along work centre line；In electrochemical deposition groove, medicinal liquid is supplemented by jet pipe.Drum-shaped work piece inner surface is made to obtain uniform coating.
Claims (8)
1. an electrochemical deposition equipment, including electrochemical deposition groove and be arranged in dislodger the least one set pipeline for liquid medicine flow, it is characterized in that, described often group pipeline includes suction pipe and the jet pipe that centrage is parallel to each other, and described suction pipe and jet pipe have hole；
Described suction pipe cross section central point to surface of the work to direction and the suction pipe cross section central point of hole and is perpendicular to the direction of surface of the work and has the angle of 0～75 degree；Described jet pipe cross section central point has the angle of 15～180 degree to the direction of hole and the direction of jet pipe cross section central point to suction pipe cross section central point；
Described jet pipe cross section central point points to surface of the work to the direction of described suction pipe cross section central point, and is perpendicular to surface of the work.
Electrochemical deposition equipment the most according to claim 1, it is characterised in that often suction pipe described in group pipeline be one, described jet pipe be one.
Electrochemical deposition equipment the most according to claim 2, it is characterised in that described suction pipe is one or more narrow strip hole with the hole on jet pipe.
Electrochemical deposition equipment the most according to claim 2, it is characterised in that the distance between centrage and the centrage of jet pipe of described suction pipe is less than four times of two pipe diameter summations.
Electrochemical deposition equipment the most according to claim 2, it is characterised in that described straw diameter is 5mm～80mm；Described jet size is 5mm～80mm.
Electrochemical deposition equipment the most according to claim 1, it is characterised in that described pipeline is two rows, a discharge pipe carries out electrochemical deposition for the front for workpiece, and another discharge pipe is for the back side electrochemical deposition for workpiece.
7. one kind utilizes in claim 1-6 the method that the electrochemical deposition equipment described in any one carries out depositing, it is characterised in that comprise the following steps:
(1) suction pipe is utilized to draw the medicinal liquid in electrochemical deposition groove, coordinate jet pipe ejection to cover the medicinal liquid in electrochemical deposition groove to drive medicinal liquid in the flowing of surface of the work, make the medicinal liquid in electrochemical deposition groove have uniform liquid medicine flow speed at surface of the work relative to the direction of suction pipe；
(2) making workpiece relative to pipette movement, its moving direction is for being parallel to surface of the work and being perpendicular to center suction tube line direction；
(3) in electrochemical deposition groove, medicinal liquid is supplemented by jet pipe.
The method that electrochemical deposition equipment the most according to claim 7 carries out depositing, it is characterised in that described suction pipe and jet pipe are PP pipe or pvc pipe or the metal tube scribbling politef.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210527974.6A CN103866357B (en) | 2012-12-10 | 2012-12-10 | A kind of electrochemical deposition equipment and utilize its method carrying out depositing |
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| CN201210527974.6A CN103866357B (en) | 2012-12-10 | 2012-12-10 | A kind of electrochemical deposition equipment and utilize its method carrying out depositing |
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| CN103866357A CN103866357A (en) | 2014-06-18 |
| CN103866357B true CN103866357B (en) | 2016-08-24 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06256991A (en) * | 1993-03-05 | 1994-09-13 | Nkk Corp | Continuous electroplating device for steel strip |
| CN2296607Y (en) * | 1997-04-25 | 1998-11-04 | 华通电脑股份有限公司 | Electroplating bath for circuit board |
| JP2004332019A (en) * | 2003-05-01 | 2004-11-25 | Atotech Japan Kk | Chemical treatment device |
-
2012
- 2012-12-10 CN CN201210527974.6A patent/CN103866357B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06256991A (en) * | 1993-03-05 | 1994-09-13 | Nkk Corp | Continuous electroplating device for steel strip |
| CN2296607Y (en) * | 1997-04-25 | 1998-11-04 | 华通电脑股份有限公司 | Electroplating bath for circuit board |
| JP2004332019A (en) * | 2003-05-01 | 2004-11-25 | Atotech Japan Kk | Chemical treatment device |
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| CN103866357A (en) | 2014-06-18 |
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