CN103862585A - Heat exchanger and cooling circulatory system based on diamond wire cutting machine - Google Patents
Heat exchanger and cooling circulatory system based on diamond wire cutting machine Download PDFInfo
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- CN103862585A CN103862585A CN201210539876.4A CN201210539876A CN103862585A CN 103862585 A CN103862585 A CN 103862585A CN 201210539876 A CN201210539876 A CN 201210539876A CN 103862585 A CN103862585 A CN 103862585A
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- heat exchanger
- diamond wire
- wire saw
- saw machine
- cutting liquid
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Abstract
The invention discloses a heat exchanger and a cooling circulatory system based on a diamond wire cutting machine. The heat exchanger comprises a cylinder body and a heat exchanging device, the cylinder body is used for containing cutting liquids and provided with a cutting liquid inlet and a cutting liquid outlet, the heat exchanging device is mounted in the cylinder body and used for cooling the cutting liquids in the cylinder body, cutting liquid flowing space is increased so that a cutting liquid flowing channel is not prone to be blocked and convenient to clean, and the problem that pipeline blockage is prone to occur due to silicon powders when the cutting liquids flow through a heat exchanger pipeline in the prior art is solved.
Description
Technical field
The present invention relates to cooling technology field, more particularly, relate to a kind of heat exchanger and cooling recirculation system based on diamond wire saw machine.
Background technology
Diamond wire saw machine is a kind of manufacturing machine that directly cutting material is carried out cutting processing by being solidificated in diamond on firm line, and described cutting material can be silicon rod.
Described diamond wire saw machine comprises cooling recirculation system, and referring to Fig. 1, described cooling recirculation system comprises: cutting liquid liquid storage cylinder 1, supply motor 2 and heat exchanger 3.Thermal cutting liquid after cooling cutting material flows in described cutting liquid liquid storage cylinder 1, and is pumped in the pipeline that is delivered to heat exchanger 3 by described supply motor 2; The cooling pure water of the ducted thermal cutting liquid of described heat exchanger 3 in being contained in heat exchanger 3 housings is cooling, becomes cooling cutting liquid and is delivered to cutting position 4, and carry out cool cycles next time.
But, in described thermal cutting liquid often with the silica flour producing at cutting position 4 in silicon chip cutting process, in the time flowing through heat exchanger 3 pipeline, silica flour is easily adsorbed in inside pipe wall and causes pipeline blockage, thereby cause cutting position 4 place's cutting liquid underfeds, affect quality and the yield rate of silicon chip, even cause steel wire broken string, bring loss to production.
Summary of the invention
In view of this, the invention provides a kind of heat exchanger and cooling recirculation system based on diamond wire saw machine, the problem of being stopped up by silica flour to solve Tube Sheet of Heat Exchanger Louis.
Based on a heat exchanger for diamond wire saw machine, comprising:
Cylinder body and heat-exchanger rig;
Described cylinder body holds cutting liquid and is provided with cutting liquid inflow entrance and cutting liquid flow export;
Described heat-exchanger rig is arranged in described cylinder body.
Alternatively, described heat-exchanger rig is shell and tube heat-exchanger rig.
Alternatively, described heat exchanger also comprises the first screen pack;
Described the first screen pack is arranged at described cutting liquid inflow entrance place.
Alternatively, described the first screen pack is 80 order specifications.
Alternatively, described heat exchanger also comprises the second screen pack;
Described the second screen pack is arranged at described cutting liquid flow export place.
Alternatively, described the second screen pack is 100 order specifications.
Alternatively, described heat exchanger also comprises thermal insulation layer;
Described thermal insulation layer is wrapped in described heat exchanger outer wall of cylinder block.
Alternatively, described heat exchanger also comprises cutoff board;
Described cutoff board is vertically installed between the tandem pipeline that described shell and tube heat-exchanger rig is adjacent.
Based on a cooling recirculation system for diamond wire saw machine, comprising:
Heat exchanger based on diamond wire saw machine of the present invention.
Alternatively, the described cooling recirculation system based on diamond wire saw machine also comprises filter;
Described filter is arranged at the flowmeter entrance point of described cooling recirculation system.
Can find out from above-mentioned technical scheme, the heat exchanger of the embodiment of the present invention comprises cylinder body and heat-exchanger rig, this heat exchanger has concurrently and stores cutting liquid function, described cutting liquid flows and is undertaken cooling by described heat-exchanger rig in described cylinder body, owing to having increased the cutting liquid flowing space, the cutting liquid passage of flowing through is difficult for stopping up and being convenient to clean, solved in prior art cutting liquid in the time flowing through heat exchanger tube owing to easily causing the problem of pipeline blockage with silica flour.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the disclosed a kind of cooling recirculation system structural representation based on diamond wire saw machine of prior art;
Fig. 2 is the disclosed a kind of heat exchanger structure schematic diagram based on diamond wire saw machine of the embodiment of the present invention one;
Fig. 3 is disclosed another the heat exchanger structure schematic diagram based on diamond wire saw machine of the embodiment of the present invention two;
Fig. 4 is disclosed another the heat exchanger structure schematic diagram based on diamond wire saw machine of the embodiment of the present invention three;
Fig. 5 is disclosed another the heat exchanger structure schematic diagram based on diamond wire saw machine of the embodiment of the present invention four;
Fig. 6 is the disclosed a kind of cooling recirculation system structural representation based on diamond wire saw machine of the embodiment of the present invention five;
Fig. 7 is disclosed another the cooling recirculation system structural representation based on diamond wire saw machine of the embodiment of the present invention six.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Embodiment mono-:
Referring to Fig. 2, the embodiment of the present invention one discloses a kind of heat exchanger based on diamond wire saw machine, to solve the susceptible to plugging problem of existing heat exchanger tube, comprising:
Described cylinder body 201 holds cutting liquid and is provided with cutting liquid inflow entrance 203 and cutting liquid flow export 204;
Described heat-exchanger rig 202 is arranged in described cylinder body 201;
In the present embodiment, described heat-exchanger rig 202 is chosen as shell and tube heat-exchanger rig.
Described heat exchanger has the cutting liquid of storage function, cutting liquid flows and is undertaken cooling by described heat-exchanger rig 202 in described cylinder body 201, increase the cutting liquid flowing space, thus, the cutting liquid silica flour that diamond wire saw machine cutting position brings of flowing through, no longer be adsorbed in described heat-exchanger rig 202 inside pipe walls, because the cutting liquid flowing space increases, cutting liquid is flowed through, and passage is difficult to be stopped up and is convenient to clean.
Consider the convenience of described cleaning course, described cylinder body 201 can be provided with the cover plate of being convenient to open, to remove the silica flour that may be adsorbed in heat-exchanger rig 202 outer walls and cylinder body 201 inwalls; Described heat exchanger adopts stainless steel material manufacture, and the sandwich that certainly also can select the homogenous materials such as carbon steel, plastics or enamel or select above-mentioned any different materials to combine simultaneously, does not limit to.
Described cylinder body 201 sizes are determined according to the concrete environment for use of described heat exchanger and cutting liquid desired volume, do not limit to.
It should be noted that, described heat-exchanger rig structural style also can adopt coil pipe type, bushing type, winding tubular type, shell-and-tube or spiral plate type etc., does not limit to.
Embodiment bis-:
Referring to Fig. 3, based on embodiment mono-, the embodiment of the present invention two discloses another heat exchanger based on diamond wire saw machine, and described heat exchanger also comprises: the first screen pack 301 and the second screen pack 302;
Described the first screen pack 301 is arranged at described cutting liquid inflow entrance 203 places;
Described the second screen pack is arranged at described cutting liquid flow export 204 places;
As preferably, described the first screen pack 301 is 80 order specifications; Described the second screen pack 302 is 100 order specifications, but does not limit to;
Described the first screen pack 301, for the contained large granular impurity of the thermal cutting liquid of flowing through after cutting position (more than particle diameter 0.5mm) is filtered for the first time, prevents that cutting liquid circulating path is obstructed.
Described the second screen pack 302, for the contained large granular impurity of cutting liquid (more than particle diameter 0.5mm) is filtered for the second time, further prevents that cutting liquid circulating path is obstructed.
Embodiment tri-:
Referring to Fig. 4, based on embodiment bis-or embodiment mono-, the embodiment of the present invention three discloses another heat exchanger based on diamond wire saw machine, and described heat exchanger also comprises: thermal insulation layer 401;
Described thermal insulation layer 401 is wrapped in described heat exchanger cylinder body 201 outer walls.
Because cutting liquid temperature and ambient temperature after being cooled have a certain distance, the existence of described thermal insulation layer 401 can effectively prevent that the cooling fluid being cooled from being heated by outside air again, ensures the good cooling effect of described cutting liquid to location of cut silicon rod and diamond wire.
Embodiment tetra-:
Referring to Fig. 5, based on embodiment tri-or embodiment mono-, the embodiment of the present invention four discloses another heat exchanger based on diamond wire saw machine, and described heat exchanger also comprises: cutoff board 501;
Described cutoff board 501 is vertically installed between the tandem pipeline that described shell and tube heat-exchanger rig 202 is adjacent.
Described every fluid layer for to cutting liquid, the glide path in heat exchanger cylinder body limits, thermal cutting liquid is entered after heat exchanger cylinder body 201 and the abundant heat exchange of every pipeline of shell and tube heat-exchanger rig 202, the operating efficiency of raising heat exchanger.
Every fluid layer outer wall, described can adopt stainless steel every fluid layer for ease of clean, but not limit to.
Embodiment five:
Referring to Fig. 6, the embodiment of the present invention five discloses a kind of cooling recirculation system based on diamond wire saw machine, comprising:
The heat exchanger based on diamond wire saw machine 601, supply motor 602, flowmeter 603 and cutting liquid circulating line 604 described in embodiment tetra-;
Described cool cycles pipeline 604 is connected between described tubular heat exchanger 601 and cutting position 605;
Described supply motor 602 is connected in cutting liquid flow export and described flowmeter 603 entrance points of described tubular heat exchanger 601;
Described flowmeter 603 is connected on the cutting liquid circulating line 604 of heat exchanger 601 and diamond wire saw machine;
Described flowmeter 603 is for controlling the flow of cutting liquid circulating line 604 cutting liquids of flowing through.
Describe in conjunction with Fig. 2, the thermal cutting liquid after cooling cutting material flows into cylinder body 201 from the cutting liquid inflow entrance 203 of described tubular heat exchanger 601; Undertaken coolingly by described heat-exchanger rig 202, become cooling cutting liquid; And pumped by described supply motor 602, be delivered to cutting position 605 through flowmeter 603, carry out cool cycles next time;
Above-described embodiment is by proposing a kind of cooling recirculation system based on diamond wire saw machine, comprise: the heat exchanger in described cooling-cycle device, owing to having increased the cutting liquid flowing space, the cutting liquid passage of flowing through is difficult for stopping up and being convenient to clean, solved in prior art cutting liquid in the time flowing through heat exchanger tube owing to easily causing the problem of pipeline blockage with silica flour.
Embodiment six:
Referring to Fig. 7, based on embodiment five, the embodiment of the present invention six discloses another cooling recirculation system based on diamond wire saw machine, comprising:
The heat exchanger based on diamond wire saw machine 601, supply motor 602, flowmeter 603, cutting liquid circulating line 604 and filter 701 described in embodiment tetra-;
The described cooling recirculation system operation principle based on diamond wire saw machine, referring to Fig. 6 and explanation thereof, repeats no more;
Described filter 701 is arranged at flowmeter 603 entrance points of described cooling recirculation system, be used for contained large granular impurity (more than particle diameter 0.5mm) in the cutting liquid of inflow cutting liquid circulating line 604 to filter for the third time, further prevent that cutting liquid circulating path is obstructed, and protection flowmeter 603 is not subject to impurity occlusive effects and normally uses;
Described filter 701 can preferentially be selected y-type filter and bag filter, does not limit to.
In sum,
The embodiment of the present invention has proposed a kind of heat exchanger and cooling recirculation system based on diamond wire saw machine, and described heat exchanger comprises cylinder body and heat-exchanger rig: described cylinder body holds cutting liquid and is provided with cutting liquid inflow entrance and cutting liquid flow export; Described heat-exchanger rig is arranged in described cylinder body, for the cutting liquid of cooling cylinder body, owing to having increased the cutting liquid flowing space, cutting liquid is flowed through, and passage is difficult to be stopped up and is convenient to clean, solved in prior art cutting liquid in the time flowing through heat exchanger tube owing to easily causing pipeline blockage problem with silica flour, and then avoid the phenomenon that occurs that cutting position cutting liquid is under-supply, ensure quality and the yield rate of silicon chip.
In this description, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is and the difference of other embodiment, between each embodiment identical similar part mutually referring to.For the disclosed device of embodiment, because it corresponds to the method disclosed in Example, so description is fairly simple, relevant part illustrates referring to method part.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiment, General Principle as defined herein can, in the case of not departing from the spirit or scope of the embodiment of the present invention, realize in other embodiments.Therefore, the embodiment of the present invention will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. the heat exchanger based on diamond wire saw machine, is characterized in that, comprising:
Cylinder body and heat-exchanger rig;
Described cylinder body holds cutting liquid and is provided with cutting liquid inflow entrance and cutting liquid flow export;
Described heat-exchanger rig is arranged in described cylinder body.
2. the heat exchanger based on diamond wire saw machine according to claim 1, is characterized in that, described heat-exchanger rig is shell and tube heat-exchanger rig.
3. the heat exchanger based on diamond wire saw machine according to claim 1 and 2, is characterized in that, also comprises the first screen pack;
Described the first screen pack is arranged at described cutting liquid inflow entrance place.
4. the heat exchanger based on diamond wire saw machine according to claim 3, is characterized in that, described the first screen pack is 80 order specifications.
5. the heat exchanger based on diamond wire saw machine according to claim 3, is characterized in that, also comprises the second screen pack;
Described the second screen pack is arranged at described cutting liquid flow export place.
6. the cooling recirculation system based on diamond wire saw machine according to claim 5, is characterized in that, described the second screen pack is 100 order specifications.
7. according to the heat exchanger based on diamond wire saw machine described in any one claim in claim 1, it is characterized in that, also comprise thermal insulation layer;
Described thermal insulation layer is wrapped in described heat exchanger outer wall of cylinder block.
8. the heat exchanger based on diamond wire saw machine according to claim 2, is characterized in that, also comprises cutoff board;
Described cutoff board is vertically installed between the tandem pipeline that described shell and tube heat-exchanger rig is adjacent.
9. the cooling recirculation system based on diamond wire saw machine, is characterized in that, comprising:
The heat exchanger based on diamond wire saw machine in claim 1-8 described in any one claim.
10. the cooling recirculation system based on diamond wire saw machine according to claim 9, is characterized in that, also comprises filter;
Described filter is arranged at the flowmeter entrance point of described cooling recirculation system.
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CN201210539876.4A CN103862585A (en) | 2012-12-12 | 2012-12-12 | Heat exchanger and cooling circulatory system based on diamond wire cutting machine |
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CN201210539876.4A CN103862585A (en) | 2012-12-12 | 2012-12-12 | Heat exchanger and cooling circulatory system based on diamond wire cutting machine |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108793554A (en) * | 2018-06-12 | 2018-11-13 | 山东大海新能源发展有限公司 | A kind of silicon chip cutting fluid circulatory system and method using diamond wire |
CN112720888A (en) * | 2020-12-25 | 2021-04-30 | 句容协鑫光伏科技有限公司 | Diamond wire-electrode cutting circulation system |
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US20020174861A1 (en) * | 2001-05-10 | 2002-11-28 | Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag | Method for cutting slices from a workpiece |
WO2003069253A1 (en) * | 2002-02-18 | 2003-08-21 | Mitsubishi Rayon Co.,Ltd. | Vertical multi-tubular heat exchanger and distillation tower system |
CN101071010A (en) * | 2007-06-11 | 2007-11-14 | 吴荣华 | Anti-blocking antiscaling open-channel heat exchange trough water source heat pump unit |
CN201012463Y (en) * | 2007-01-05 | 2008-01-30 | 台湾丽伟电脑机械股份有限公司 | Combined water container |
CN201548104U (en) * | 2009-11-23 | 2010-08-11 | 陈尧春 | Heat exchanger with safety and high efficiency |
CN201662345U (en) * | 2010-03-05 | 2010-12-01 | 北京鑫源九鼎科技有限公司 | Cooling pot for mobile refrigerating unit underground |
CN102288053A (en) * | 2011-08-01 | 2011-12-21 | 王英慧 | Shell and tube sewage heat exchanger |
CN202399422U (en) * | 2011-12-31 | 2012-08-29 | 株洲德瑞佳科技有限公司 | Silicon wafer cutting fluid plate-type heat exchange cooling device |
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US20020174861A1 (en) * | 2001-05-10 | 2002-11-28 | Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag | Method for cutting slices from a workpiece |
WO2003069253A1 (en) * | 2002-02-18 | 2003-08-21 | Mitsubishi Rayon Co.,Ltd. | Vertical multi-tubular heat exchanger and distillation tower system |
CN201012463Y (en) * | 2007-01-05 | 2008-01-30 | 台湾丽伟电脑机械股份有限公司 | Combined water container |
CN101071010A (en) * | 2007-06-11 | 2007-11-14 | 吴荣华 | Anti-blocking antiscaling open-channel heat exchange trough water source heat pump unit |
CN201548104U (en) * | 2009-11-23 | 2010-08-11 | 陈尧春 | Heat exchanger with safety and high efficiency |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108793554A (en) * | 2018-06-12 | 2018-11-13 | 山东大海新能源发展有限公司 | A kind of silicon chip cutting fluid circulatory system and method using diamond wire |
CN112720888A (en) * | 2020-12-25 | 2021-04-30 | 句容协鑫光伏科技有限公司 | Diamond wire-electrode cutting circulation system |
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