CN103837929A - WGM element preparation method - Google Patents
WGM element preparation method Download PDFInfo
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- CN103837929A CN103837929A CN201210473692.2A CN201210473692A CN103837929A CN 103837929 A CN103837929 A CN 103837929A CN 201210473692 A CN201210473692 A CN 201210473692A CN 103837929 A CN103837929 A CN 103837929A
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Abstract
The invention discloses a WGM element preparation method. A WGM element comprises a coupling device which can couple a light into or out of an echo wall mode resonant cavity, a micro resonant cavity which can limit the light inside, a film which is used for controlling the coupling distance, and a clamping device which can fix the micro resonant cavity. A coating method is used to precisely control the coupling distance, which avoids the influence of overall coating of an end face on the inside cavity. According to the invention, a glass tube clamping method is used to reduce the influence on an inside cavity mode.
Description
Technical field
The present invention relates to optical device, relate in particular to the laser optics device based on micro resonant cavity.
Background technology
Waveguide ring and the discoidal resonator cavity of dielectric miniature bead, plane become more and more and are concerned by people in the application aspect of optical communication and sensor.Its application is mainly the characteristic that depends on the high Q value of micro resonant cavity.Can optically-coupled be entered to bead and excite the pattern of its intrinsic by the light wave that suddenly dies, conventionally be referred to as Whispering-gallery-mode (hereinafter to be referred as WGM).Because micro resonant cavity has very high Q value, light can, in inner longer time, very narrow spectral line width and the high energy density of being detained of microballoon, can be used in the research of optical delay, high-quality filtering and some other nonlinear optics this device.Moreover pattern in microcavity can experience the variation of extraneous parameter such as temperature, density etc. by the effect of evanescent wave, therefore also can be used as a kind of sensing device.The above, the resonator cavity of Whispering-gallery-mode, there being important application aspect scientific research, medical science, biology and measurement, optical communication, is more and more concerned by people.Because the resonator cavity of Whispering-gallery-mode and the coupling of optical device are to realize by the effect of evanescent wave, therefore wanting to realize high coupling efficiency just needs appropriate control coupling distance.But the just magnitude suitable with wavelength of the EFFECTIVE RANGE of actual evanescent wave, and the light intensity of evanescent wave and distance be exponential relationship and change, therefore very high to the control requirement of coupling distance.Only having the accurate control that has realized coupling distance, could be that application lays the foundation.
About the implementation of coupling mainly contains contract angle coupling fiber, prism-coupled and conical fiber coupling.
Fig. 1 is contract angle optical fiber 100 coupling scheme, and light wave B1a, by wrapping in the fibre core 102 of covering 101 inside, is coupled into micro resonant cavity 104 by the evanescent wave of contract angle end face total reflection, forms Whispering-gallery-mode C1a.
Fig. 2 is prism 106 coupling scheme, and light wave B1b, by prism 106, is coupled into micro resonant cavity 105 by the evanescent wave of prism facets 107, forms Whispering-gallery-mode C1b.
Fig. 3 is conical fiber 110 coupling scheme, and light wave B1c, by wrapping in the fibre core 108 of covering 109 inside, is coupled into micro resonant cavity 121 by the evanescent wave of La Zhui district 120 total reflections, forms Whispering-gallery-mode C1c.
Small-sized due to micro resonant cavity and coupled apparatus, can be integrated in various optics and electric lighting system device, realizes commercialization application.But this wherein can relate to the requirement of simplification, repeatability and the reliability of assembling.
The present invention relates generally to two aspects: on the one hand, in plated film, if adopt the whole plated films of coupling regime, not only the complicacy of system increases, and because interface can be caused the reduction of coupling efficiency too much, the method for utilizing the indirect command range of plated film using in this patent has more advantage.On the other hand, from the angle of device reliability, need to fix the relative position of each device, but also there is no at present the data introduction of the scheme of immobilising device about how, the scheme of the present invention to this proposition, has filled this part blank.
Summary of the invention
The effective operating distance of evanescent wave is in the scope of a wavelength.Present optically coated precision can reach the rank of nanometer, can meet the requirement of the control accuracy of micro resonant cavity coupling distance completely.The present invention is based on optical coating and realized the accurate control of coupling distance.
The object of the invention is to, a kind of WGM element method for making that can accurately control coupling distance is provided.
To achieve these goals, the following technical scheme of the present invention:
A kind of WGM element method for making, WGM element comprises: the coupled apparatus, restriction light that optically-coupled is entered or is coupled out Whispering-gallery-mode micro resonant cavity at inner micro resonant cavity, control the film of coupling distance and the clamping device of fixing micro resonant cavity, described WGM element method for making is to realize coupling distance control based on optical coating, and described coupling distance control comprises the steps:
The first step, plates thin film at substrate of glass upper surface, and the distance that the thickness of film will be controlled for when coupling, using entirety as a mould;
Second step is placed micro resonant cavity on described mould film, and glass devices clamps described micro resonant cavity and vertically places near substrate of glass, and by bite, described micro resonant cavity and described glass devices is fixed;
The 3rd step, will take off by the fixing micro resonant cavity of bite and glass devices entirety, is close to coupled apparatus and places, more described glass devices is cohered with the end face adhesive that contacts of described coupled apparatus;
Air buffer between described coupled apparatus and described micro resonant cavity, by being plated film thickness, has been realized the control of coupling distance.
Another kind of WGM element method for making, WGM element comprises: the coupled apparatus, restriction light that optically-coupled is entered or is coupled out Whispering-gallery-mode resonator cavity at inner micro resonant cavity, control the film of coupling distance and the clamping device of fixing miniature resonant, described WGM element method for making is to realize coupling distance control based on optical coating, and described coupling distance control comprises the steps:
The first step, places resonator cavity at substrate of glass upper surface, and glass devices clamps described micro resonant cavity and vertically places near substrate of glass, by bite, described micro resonant cavity and described glass devices is fixed;
Second step is implemented mask plated film on coupled apparatus, the distance that the thickness of film will be controlled for when coupling;
The 3rd step, will take off by the fixing micro resonant cavity of bite and glass devices entirety, and the film of being close on coupled apparatus is placed, more described glass devices is cohered with the end face adhesive that contacts of described coupled apparatus upper film;
Air buffer between described coupled apparatus and described micro resonant cavity, by being plated film thickness, has been realized the control of coupling distance.
Described coupled apparatus is prism, contract angle optical fiber or conical fiber.
Described glass devices is two glass sheet or oval-shaped glass tube.
Described method of clamping is that two glass sheet or oval-shaped glass tube xsect major axis are parallel with the optics equatorial plane of microlaser cavity.
Beneficial effect of the present invention is:
In the present invention, relate to optical coupling device, film, glass devices clamping device and micro resonant cavity.Wherein optical coupling device can be realized the coupling discrepancy of light; The distance that will control when film is realized coupling; Glass devices clamping device is realized the fixing of micro resonant cavity.Utilize the method for plated film accurately coupling distance to be controlled indirectly, there is more obvious advantage.Adopt oval-shaped glass tube to fix micro resonant cavity, reduce impact device being caused due to asymmetric.
Brief description of the drawings
Below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation:
Fig. 1 is the side view of the coupling of existing contract angle optical fiber and micro resonant cavity;
Fig. 2 is the side view of existing prism and micro resonant cavity;
Fig. 3 is the side view of existing conical fiber and micro resonant cavity;
Fig. 4 is one of the first embodiment of the present invention structural representation;
Fig. 5 is two structural representations of the first embodiment of the present invention;
Fig. 6 is three structural representations of the first embodiment of the present invention;
Fig. 7 is four structural representations of the first embodiment of the present invention;
Fig. 8 is one of the second embodiment of the present invention structural representation;
Fig. 9 is two structural representations of the second embodiment of the present invention;
Figure 10 is three structural representations of the second embodiment of the present invention;
Figure 11 is four structural representations of the second embodiment of the present invention;
Figure 12 is one of the third embodiment of the present invention structural representation;
Figure 13 is two structural representations of the third embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing, various embodiments of the present invention are further illustrated.Multi-instance of the present invention is discussed.But should be understood that the detailed description providing about these accompanying drawings here, only for explanatory purposes, is not the interest field of restriction this patent.
Refer to one of Fig. 4-Fig. 7, in connection with accompanying drawing, the first embodiment of the present invention is further illustrated.
A kind of WGM element method for making, WGM element comprises: the coupled apparatus 206, restriction light micro resonant cavity 204, the control film 201 of coupling distance and the glass devices of fixing micro resonant cavity clamping 203 devices therein that optically-coupled are entered or is coupled out Whispering-gallery-mode micro resonant cavity, described WGM element method for making is to realize coupling distance control based on optical coating, and described coupling distance control comprises the steps:
The first step, plates thin film 201 at substrate of glass 200 upper surfaces, and the distance that the thickness of film 201 will be controlled for when coupling, using entirety as a mould;
Second step is placed micro resonant cavity 204 on described mould film 201, and micro resonant cavity 204 is vertically placed near substrate of glass 200 described in glass devices clamping 203, and by bite 205, described micro resonant cavity 204 and described glass devices 203 is fixed;
The 3rd step, to take off by the fixing micro resonant cavity 204 of bite 205 and glass devices 203 entirety, being close to coupled apparatus 206 places, described glass devices 203 is cohered with the end face adhesive that contacts of described coupled apparatus 206, the air buffer between described coupled apparatus 206 and described micro resonant cavity 204 is by being plated film thickness again.
In this embodiment, micro resonant cavity 204 and coupled apparatus 206 can have various different materials to make, in the present embodiment, micro resonant cavity 204 is made up of fused quartz, refractive index is about 1.45, and coupled apparatus 206 is prism, and film 201 adopts the method for vacuum sputtering to be plated in region of interest.
In order to reduce to greatest extent the impact of thermal effect on micro resonant cavity 204 patterns, glass devices clamping has adopted symmetrical, one-piece type structure.Because the refractive index of prism 206 is 1.7447, the refractive index of micro resonant cavity 204 is 1.46 herein.The MgF that Coating Materials selective refraction rate is 1.39
2or the refractive index ultra-violet curing epoxy resin glue material that is 1.4355.The concrete thickness of glass devices 203 affects faint on the present invention, as long as meet fixing requirement easily, adopt the glass devices 203 of 4 millimeter thickness in the present invention.
The present embodiment concrete steps are as follows:
The first step, plates thin film 201 at substrate of glass 200 upper surfaces, and the distance that the thickness of film 201 will be controlled for when coupling, using entirety as a mould, as shown in Figure 4; The Coating Materials that the present embodiment is selected is MgF2 or ultra-violet curing epoxide-resin glue, but should understand that Coating Materials has more than is to be limited to this bi-material, Coating Materials in the present invention, as long as meet the material that facilitates plated film, is easy to control, can also be selected the materials such as SiO2.In the present invention, plated film selectivity used is larger than existing direct coating method, due to.Clearance layer between micro resonant cavity 204 and coupled apparatus 206 is air, has met total reflection condition, and does not require that Coating Materials will meet total reflection condition in interface.
Second step, on described mould film 201, place micro resonant cavity 204, two glass sheet 203 clamp described resonator cavity 204 and vertically place near substrate of glass 200, by bite 205, described micro resonant cavity 204 is fixing with described two glass sheet 203, method of clamping is that two glass sheet 203 are parallel with the optics equatorial plane of micro resonant cavity 204, as shown in Figure 5;
The optics equatorial plane described in the present invention refers to the plane at light maximum loop place in the ring-type light belt of micro resonant cavity 204 interior formation, be described further please refer to Fig. 6 and Fig. 7, the optics equatorial plane is parallel with the face at the normal place of prism facets incidence point with incident ray B2e in Fig. 7.Certainly, 203 liang of glass sheet of glass holder part or glass tube clamping micro resonant cavity 204 are vertically put on coupled apparatus 206, and the line between two point of contacts is parallel with coupled apparatus 206 prism facets.
The 3rd step, by taking off by the fixing micro resonant cavity 204 of bite 205 and two glass sheet 203 entirety, is close to coupled apparatus 206 and places, more described two glass sheet 203 are cohered with the end face ultraviolet glue that contacts of described coupled apparatus 206, as shown in Figure 6; The adhesive that the present embodiment is selected is ultraviolet glue, is to be limited to this bi-material but should understand that adhesive has more than, and Coating Materials in the present invention is as long as meet and can play fixation,
Air buffer between described coupled apparatus 206 and described micro resonant cavity 204, by being plated film thickness, has been realized the control of coupling distance, as shown in Figure 7;
Best coupling distance refers to and is coupled into the light wave of micro resonant cavity 204 distance maximum time, and the parameter of this and concrete material, shape, size etc. are relevant, are not unalterable, and the present invention adopts the typical range of the incident wavelength of 0.1 to 3 times;
Fig. 7 is that Fig. 6 rotates the side view after 90 degree around vertical axes, if when the plane of incidence of light is parallel with glass surface, adopts two opposite fixed sturctures can reduce the impact on micro resonant cavity pattern.
Referring to one of Fig. 8-Figure 11, in connection with accompanying drawing, the second embodiment of the present invention is further illustrated.
Another kind of WGM element method for making, WGM element comprises: the coupled apparatus 306, the restriction light that optically-coupled are entered or is coupled out Whispering-gallery-mode micro resonant cavity install in inner micro resonant cavity 304, the control film 301 of coupling distance and the glass devices 303 of fixing micro resonant cavity, it is characterized in that: described WGM element method for making is to realize coupling distance control based on optical coating, and described coupling distance control comprises the steps:
The first step, places micro resonant cavity 304 at substrate of glass 300 upper surfaces, and glass devices 303 clamps described micro resonant cavity 304 and vertically places near substrate of glass 300, by bite 305, described micro resonant cavity 304 is fixing with described glass devices 303;
Second step is implemented mask plated film on coupled apparatus 306, the distance that the thickness of film 301 will be controlled for when coupling;
The 3rd step, to take off by the fixing micro resonant cavity 304 of bite 305 and glass devices 303 entirety, the film 301 of being close on coupled apparatus 306 is placed, described glass devices 303 is cohered with the end face adhesive that contacts of described coupled apparatus 306 upper films 301, the air buffer between described coupled apparatus 306 and described micro resonant cavity 304 is by being plated film thickness again.
The present embodiment embodiment and the first embodiment of the present invention are similar, and difference is only plated in film 301 on coupled apparatus 306 in the present embodiment.
The present embodiment is the second embodiment of the present invention, and step is as follows:
The first step, place micro resonant cavity 304 at substrate of glass 300 upper surfaces, two glass sheet 303 clamp described micro resonant cavity 304 and vertically place near substrate of glass 300, by bite 305, described micro resonant cavity 304 is fixing with described two glass sheet 203, as shown in Figure 8;
Second step is implemented mask plated film on coupled apparatus 306, the distance that the thickness of film 301 will be controlled for when coupling, as shown in Figure 9;
The 3rd step, to take off by the fixing micro resonant cavity 304 of bite 305 and two glass sheet 303 entirety, be close on coupled apparatus 306 film 301 and place, more described two glass sheet 303 are cohered with the end face ultraviolet glue that contacts of described coupled apparatus 306 upper films 301, as shown in figure 10;
Air buffer between described coupled apparatus 306 and described micro resonant cavity 304, by being plated film thickness, has been realized the control of coupling distance.
Figure 10 obtains Figure 11 after vertical axes 90-degree rotation.
In above-mentioned two kinds of embodiment, mentioned and used two sheet glass sheets to fix micro resonant cavity, but because both separate, in cohering, unavoidable meeting causes asymmetric, device, under the impact of thermal effect, can cause unstable properties.
For this reason, the invention provides another kind of preferred version
Figure 12 and Figure 13 are the third embodiments of the present invention.
In this embodiment, refer to Figure 12, using xsect is that oval-shaped thickness is that the glass tube 403 of 4 millimeter fixes micro resonant cavity 404, the contact point of glass tube 403 and micro resonant cavity 404 also only has two, in another vertical direction, do not contact, Figure 13 is the vertical view of Figure 12, and the method is simple, cost is low, reliability is high.If when in this structure, the plane of incidence of light is parallel with oval major axis, this structure can not cause very large impact to the pattern in chamber.But also reduce in above-mentioned two embodiment due to the asymmetric impact causing.In this preferred version, the control of coupling distance, can copy method in above-mentioned two embodiment.
By the detailed description of above embodiment, wish more to know description feature of the present invention, belong to the claims in the present invention and equivalent technologies scope thereof if those skilled in the art carries out various changes and distortion to the present invention, the present invention is also including these changes and distortion.
Claims (5)
1. a WGM element method for making, WGM element comprises: the coupled apparatus, restriction light that optically-coupled is entered or is coupled out Whispering-gallery-mode resonator cavity at inner micro resonant cavity, control the film of coupling distance and the clamping device of fixing micro resonant cavity, it is characterized in that: described WGM element method for making is to realize coupling distance control based on optical coating, and described coupling distance control comprises the steps:
The first step, plates thin film at substrate of glass upper surface, and the distance that the thickness of film will be controlled for when coupling, using entirety as a mould;
Second step is placed micro resonant cavity on described mould film, and glass devices clamps described micro resonant cavity and vertically places near substrate of glass, and by bite, described micro resonant cavity and described glass devices is fixed;
The 3rd step, to take off by the fixing micro resonant cavity of bite and glass devices entirety, being close to coupled apparatus places, described glass devices is cohered with the end face adhesive that contacts of described coupled apparatus, the air buffer between described coupled apparatus and described micro resonant cavity is by being plated film thickness again.
2. a WGM element method for making, WGM element comprises: the coupled apparatus, restriction light that optically-coupled is entered or is coupled out Whispering-gallery-mode micro resonant cavity at inner micro resonant cavity, control the film of coupling distance and the clamping device of fixing micro resonant cavity, it is characterized in that: described WGM element method for making is to realize coupling distance control based on optical coating, and described coupling distance control comprises the steps:
The first step, places micro resonant cavity at substrate of glass upper surface, and glass devices clamps described micro resonant cavity and vertically places near substrate of glass, by bite, described micro resonant cavity and described glass devices is fixed;
Second step is implemented mask plated film on coupled apparatus, the distance that the thickness of film will be controlled for when coupling;
The 3rd step, to take off by the fixing micro resonant cavity of bite and glass devices entirety, the film of being close on coupled apparatus is placed, described glass devices is cohered with the end face adhesive that contacts of described coupled apparatus upper film, the air buffer between described coupled apparatus and described micro resonant cavity is by being plated film thickness again.
3. WGM element method for making according to claim 1 and 2, is characterized in that: described coupled apparatus is prism, contract angle optical fiber or conical fiber.
4. WGM element method for making according to claim 1 and 2, is characterized in that: described glass devices is two glass sheet or oval-shaped glass tube.
5. WGM element method for making according to claim 1 and 2, is characterized in that: described method of clamping is that two glass sheet or oval-shaped glass tube xsect major axis are parallel with the optics equatorial plane of micro resonant cavity.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107121157A (en) * | 2017-05-04 | 2017-09-01 | 重庆大学 | Couple the measurement filter of optical fiber and Echo Wall microcavity |
| CN108692828A (en) * | 2018-05-14 | 2018-10-23 | 南昌航空大学 | A kind of temperature sensor coupled with ordinary optic fibre based on D-type optical fiber |
| CN109031520A (en) * | 2018-08-03 | 2018-12-18 | 广州米德红外科技有限公司 | A kind of sulphur system microballoon on piece coupling device of high stability |
| CN109787072A (en) * | 2019-02-22 | 2019-05-21 | 南京信息工程大学 | Multi-carrier optical signal generating device and method based on doping echo squash |
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| US20060193557A1 (en) * | 2002-06-20 | 2006-08-31 | Arryx, Inc. | Optical switches and routers and optical filters |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107121157A (en) * | 2017-05-04 | 2017-09-01 | 重庆大学 | Couple the measurement filter of optical fiber and Echo Wall microcavity |
| CN108692828A (en) * | 2018-05-14 | 2018-10-23 | 南昌航空大学 | A kind of temperature sensor coupled with ordinary optic fibre based on D-type optical fiber |
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| CN109787072B (en) * | 2019-02-22 | 2020-06-30 | 南京信息工程大学 | Multi-carrier optical signal generating device and method based on doped echo squash ball |
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