CN103823669A - Automatic probe station recipe management method - Google Patents
Automatic probe station recipe management method Download PDFInfo
- Publication number
- CN103823669A CN103823669A CN201310613136.5A CN201310613136A CN103823669A CN 103823669 A CN103823669 A CN 103823669A CN 201310613136 A CN201310613136 A CN 201310613136A CN 103823669 A CN103823669 A CN 103823669A
- Authority
- CN
- China
- Prior art keywords
- server
- formula
- probe station
- automatic
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention disclose an automatic probe station recipe management method which comprises a server, a plurality of probe stations and a plurality of automatic testers. The mainframe of one automatic tester is used as the server of all automatic probe stations. The recipes of all automatic probe stations are concentrated on the server for management. The method includes the steps of firstly, the automatic testers transmit probe station recipe instructions needed to be downloaded to the probe stations; secondly, the probe stations automatically download the recipe instructions from the server; thirdly, if the probe stations already have the recipe instructions, the instructions from the server replace the existing recipe instructions of the probe stations, the probe stations feed back to the automatic testers, and the automatic testers perform testing; fourthly, if the server does not have the recipe instructions, downloading fails, the probe stations feed back to the automatic testers, and the automatic testers pause testing.
Description
Technical field
The present invention relates to a kind of WAT technical field of measurement and test, relate in particular to a kind of automatic prober platform process formula management.
Background technology
The formula of automatic prober platform mainly completes the contraposition of probe, the functions such as the contraposition of wafer; The formula of the automatic prober platform of existing WAT test all leaves on automatic prober playscript with stage directions machine, after arranging, some that needs slip-stick artist to remove debugging formula or change formula proceed test in the time causing problem due to the problem of wafer own or some other special external factor, once test needs several hours time of several days even, and therefore slip-stick artist usually can forget about deleting while causing normal lot to test for the formula of in particular cases debug and again goes wrong; The setting (degree of depth of for example having an acupuncture treatment, clear pin frequency etc.) of some formula can not reflect at once in ensuing test, often after the upper a very long time such as grade, just finds that the formula setting of certain automatic prober platform is inconsistent with other board; On a certain automatic prober platform, set up at present formula and also needed to be manually sent to other automatic prober platform, in the time that other board is being surveyed goods, can not transmit, often needed to wait the transmission that just can complete for a long time whole boards.
Patent (publication number: CN201616426) discloses a kind of probe station, comprising: probe; Carry brilliant dish, for bearing wafer above-below direction lifting mechanism, be used for carrying the described brilliant dish that carries, and make the described crystalline substance dish that carries at above-below direction moving track, be used for carrying described above-below direction lifting mechanism and described year brilliant dish, and make the brilliant dish in described above-below direction lifting mechanism and described year in the horizontal direction or vertical direction move, also comprise exhaust fan, described exhaust fan is installed on outside the zone of action of described track.The probe station that this patent provides in the course of the work, exhaust fan by running dispels lubricating oil steam, make it cannot be aloft because meeting the cold lubricated oil droplet that is re-condensed into, avoid the lubricated oil droplet of regelation to drop year brilliant coiling on the wafer carrying, improve probe is carried out performance test accuracy to wafer, can make the yield of wafer improve 1% to 2%.
Patent (publication number: CN201637795) discloses a kind of probe station test macro, comprise probe station and test machine, described probe station is connected with test machine, send the feedback data of test data or reception test machine to test machine, also comprise probe station test display apparatus, described probe station test display apparatus is connected with probe station and test machine, obtains and described test data and feedback data are processed, and generates in real time and shows test distribution file.Also relate to a kind of probe station test display apparatus.The utility model can show test results in real time, is convenient to test man and in test process, finds in time and process problem, and needn't wait for after whole product test finishes and processing.Improve production management, improved production efficiency.And do not need to change existing probe station equipment, provide cost savings, avoided waste.
Summary of the invention
In view of this, the present invention proposes a kind of automatic prober platform process formula management, long to solve above-mentioned debug time, and surveying goods at other board is the problem that can not transmit.
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of automatic prober platform process formula management, comprise server, some probe stations, some auto testing instruments, wherein, server using the main frame of a certain auto testing instrument as all automatic prober platforms, the formula of all automatic prober platforms concentrates on this server and manages, and the step of described method is:
Step 1: auto testing instrument sends and needs the instruction of the probe station of download formula to probe station;
Step 2: probe station is downloaded this formula instruction from server automatically;
Step 3: if existing this formula instruction of probe station, the instruction on server replaces existing formula instruction on this probe station, and probe station feeds back to auto testing instrument, and auto testing instrument is tested;
Step 4: if not this formula instruction on server, failed download, probe station feeds back to auto testing instrument, and auto testing instrument suspends test.
Above-mentioned automatic prober platform process formula management, wherein, has the module of accepting auto testing instrument instruction in described probe station.
Above-mentioned automatic prober platform process formula management, wherein, described probe station can automatically be uploaded and fill a prescription to server.
Above-mentioned automatic prober platform process formula management, wherein, all the other probe stations can be shared formula by server.
The present invention is owing to having adopted above-mentioned technology, and the good effect of generation is:
By use of the present invention, can guarantee that arranging of same formula that every automatic prober platform uses is in full accord; Also can reach after having set up formula upload onto the server on a certain automatic prober platform and not spend and be manually sent to other automatic prober platform, reduce the object of workload.
Accompanying drawing explanation
The accompanying drawing that forms a part of the present invention is used to provide a further understanding of the present invention, and schematic description and description of the present invention is used for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the block diagram of a kind of automatic prober platform process formula management of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, but not as limiting to the invention.
Embodiment:
Shown in Fig. 1, a kind of automatic prober platform process formula management, comprise server, some probe stations, some auto testing instruments, is characterized in that, the server using the main frame of a certain auto testing instrument as all automatic prober platforms, the formula of all automatic prober platforms concentrates on this server and manages, and the step of method is:
Step 1: auto testing instrument sends and needs the instruction of the probe station of download formula to probe station;
Step 2: probe station is downloaded this formula instruction from server automatically;
Step 3: if existing this formula instruction of probe station, the instruction on server replaces existing formula instruction on this probe station, and probe station feeds back to auto testing instrument, and auto testing instrument is tested;
Step 4: if not this formula instruction on server, failed download, probe station feeds back to auto testing instrument, and auto testing instrument suspends test.
The present invention also has following embodiment on the basis of the above, please continue shown in Figure 1,
In further embodiment of the present invention, in probe station, there is the module of accepting auto testing instrument instruction.
In further embodiment of the present invention, probe station can automatically be uploaded and fill a prescription to server.
In further embodiment of the present invention, all the other probe stations can be shared formula by server.
As shown in Figure 1, when board test starts, auto testing instrument sends the instruction of downloading the probe station formula needing to probe station, and probe station just gets on to download this formula from server automatically.If probe station has this formula, replace the formula on probe station with the formula on server.After recipe download completes, test starts, if need the formula of downloading not have on server, this information is fed back to auto testing instrument by probe station, and auto testing instrument provides points out and suspends test.
The foregoing is only preferred embodiment of the present invention; not thereby limit embodiments of the present invention and protection domain; to those skilled in the art; the scheme that being equal to of should recognizing that all utilizations instructions of the present invention and diagramatic content done replaces and apparent variation obtains, all should be included in protection scope of the present invention.
Claims (4)
1. an automatic prober platform process formula management, comprise server, some probe stations, some auto testing instruments, it is characterized in that, server using the main frame of a certain auto testing instrument as all automatic prober platforms, the formula of all automatic prober platforms concentrates on this server and manages, and the step of described method is:
Step 1: auto testing instrument sends and needs the instruction of the probe station of download formula to probe station;
Step 2: probe station is downloaded this formula instruction from server automatically;
Step 3: if existing this formula instruction of probe station, the instruction on server replaces existing formula instruction on this probe station, and probe station feeds back to auto testing instrument, and auto testing instrument is tested;
Step 4: if not this formula instruction on server, failed download, probe station feeds back to auto testing instrument, and auto testing instrument suspends test.
2. automatic prober platform process formula management according to claim 1, is characterized in that, has the module of accepting auto testing instrument instruction in described probe station.
3. automatic prober platform process formula management according to claim 1, is characterized in that, described probe station can automatically be uploaded and fill a prescription to server.
4. automatic prober platform process formula management according to claim 1, is characterized in that, all the other probe stations can be shared formula by server.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310613136.5A CN103823669A (en) | 2013-11-26 | 2013-11-26 | Automatic probe station recipe management method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310613136.5A CN103823669A (en) | 2013-11-26 | 2013-11-26 | Automatic probe station recipe management method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103823669A true CN103823669A (en) | 2014-05-28 |
Family
ID=50758755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310613136.5A Pending CN103823669A (en) | 2013-11-26 | 2013-11-26 | Automatic probe station recipe management method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103823669A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106022101A (en) * | 2016-05-17 | 2016-10-12 | 广东欧珀移动通信有限公司 | Application management method and terminal |
| CN109002021A (en) * | 2018-08-02 | 2018-12-14 | 东南大学 | Semiconductor production remote monitoring system based on OCR image processing techniques |
| CN112306004A (en) * | 2019-07-26 | 2021-02-02 | 长鑫存储技术有限公司 | Semiconductor process recipe management method and system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6505138B1 (en) * | 1999-10-28 | 2003-01-07 | Credence Systems Corporation | Function-based control interface for integrated circuit tester prober and handler devices |
| US8219349B1 (en) * | 2007-12-21 | 2012-07-10 | Intermolecular, Inc. | Test management system |
| CN103018651A (en) * | 2012-12-06 | 2013-04-03 | 中国电子科技集团公司第十三研究所 | On-chip testing system of micro-electromechanical system (MEMS) device and testing method thereof |
| CN103024773A (en) * | 2012-12-10 | 2013-04-03 | 上海斐讯数据通信技术有限公司 | Method, management device and system for upgrading software of wireless router |
| CN103336696A (en) * | 2013-05-27 | 2013-10-02 | 摩比天线技术（深圳）有限公司 | Software updating method and system for testing instrument |
-
2013
- 2013-11-26 CN CN201310613136.5A patent/CN103823669A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6505138B1 (en) * | 1999-10-28 | 2003-01-07 | Credence Systems Corporation | Function-based control interface for integrated circuit tester prober and handler devices |
| US8219349B1 (en) * | 2007-12-21 | 2012-07-10 | Intermolecular, Inc. | Test management system |
| CN103018651A (en) * | 2012-12-06 | 2013-04-03 | 中国电子科技集团公司第十三研究所 | On-chip testing system of micro-electromechanical system (MEMS) device and testing method thereof |
| CN103024773A (en) * | 2012-12-10 | 2013-04-03 | 上海斐讯数据通信技术有限公司 | Method, management device and system for upgrading software of wireless router |
| CN103336696A (en) * | 2013-05-27 | 2013-10-02 | 摩比天线技术（深圳）有限公司 | Software updating method and system for testing instrument |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106022101A (en) * | 2016-05-17 | 2016-10-12 | 广东欧珀移动通信有限公司 | Application management method and terminal |
| CN109002021A (en) * | 2018-08-02 | 2018-12-14 | 东南大学 | Semiconductor production remote monitoring system based on OCR image processing techniques |
| CN112306004A (en) * | 2019-07-26 | 2021-02-02 | 长鑫存储技术有限公司 | Semiconductor process recipe management method and system |
| CN112306004B (en) * | 2019-07-26 | 2022-02-01 | 长鑫存储技术有限公司 | Semiconductor process recipe management method and system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109885939B (en) | Photovoltaic power station construction method and system based on building information model | |
| CN104155563A (en) | Test fixture of circuit board | |
| CN103823669A (en) | Automatic probe station recipe management method | |
| CN102749570A (en) | Wafer test device and wafer test method for probe station | |
| CN103885423A (en) | Statistical process control system and method for wafer acceptance test | |
| CN116540682B (en) | Method, system, device, equipment and medium for testing analog single machine | |
| CN103575996B (en) | Antenna detection device | |
| CN106154768B (en) | A kind of ic substrate re-expose method based on mask plate | |
| CN105700490A (en) | Method and system for enhancing product yield rate | |
| CN202002811U (en) | Reliability test-bed for rotary table of horizontal machining center | |
| CN103412775A (en) | Method for refreshing BMC firmware intelligently and automatically | |
| CN103217558B (en) | A kind of probe maintaining method | |
| CN104390982A (en) | Test method for SMT first article inspection | |
| CN103531498A (en) | Wafer defect analysis system | |
| CN105429713A (en) | System and method for testing wireless device | |
| CN105959070B (en) | Change the test method of frequency based on GNSS receiver radio station | |
| CN102338624A (en) | System and method for testing object by using mechanical arm | |
| CN103116617B (en) | A kind of disposal route of integrated circuit test data | |
| CN204043759U (en) | Liquid level sensor automatic testing equipment | |
| CN102478842A (en) | Measurement process optimization method and device | |
| CN104035022A (en) | Method for automatically testing circuit boards | |
| CN104134620B (en) | The monitoring method and semiconductor manufacturing process of semiconductor fabrication | |
| CN103336935A (en) | Probe card identification device and probe card identification method | |
| CN112420535A (en) | Chip manufacturing method and system | |
| CN105470158A (en) | Wafer test probe station and testing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140528 |