CN103817813B - Inner circle cutting machine synchronous rotary manipulator - Google Patents
Inner circle cutting machine synchronous rotary manipulator Download PDFInfo
- Publication number
- CN103817813B CN103817813B CN201410086191.8A CN201410086191A CN103817813B CN 103817813 B CN103817813 B CN 103817813B CN 201410086191 A CN201410086191 A CN 201410086191A CN 103817813 B CN103817813 B CN 103817813B
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- Prior art keywords
- arm
- straight
- slide carriage
- fixed
- inner circle
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Abstract
The invention discloses a kind of inner circle cutting machine synchronous rotary manipulator, belong to inner circle cutting machine parts; Aim to provide a kind of inner circle cutting machine material-receiving device avoiding otch end face to remain boss or pit.It comprises the leading screw be fixed on track base, drives the motor of this leading screw, is located at the slide carriage that described track base is driven by described leading screw, and this slide carriage has mechanical arm; Described mechanical arm comprises the straight-arm (11) be located at by the first bearing pin (21) on slide carriage (17), the clamping screw (19) be fixed on through the first mounting hole (20) on this straight-arm on slide carriage (17), the transverse arm (3) hinged with straight-arm (11), be located at the receiver (7) on this transverse arm, the lock-screw (9) be fixed on straight-arm (11) by bearing.The present invention easily remains the defect of boss or pit at wafer end face core when thoroughly overcoming cut crystal, be a kind of and the matching used material-receiving device of inner circle cutting machine.
Description
Technical field
The present invention relates to a kind of inner circle cutting machine, particularly relate to a kind of be arranged on inner circle cutting machine for support bar and with the manipulator of its synchronous rotary.
Background technology
Inner circle cutting machine is the common equipment of the hard brittle crystal material such as cutting processing monocrystalline silicon, pottery, glass, sapphire; Current inner circle cutting machine usually by frame, the main shaft assembly be located in this frame, the workbench be fixed in this frame, be located at the traverse feed assembly that this workbench can be done transverse movement and be located at the feeding assembly that this traverse feed assembly can move up and down and form.There is following defect in this traditional inner circle cutting machine:
1) because the Workpiece clamping head be fixed on feeding assembly can not rotate, only utilize main shaft band moving knife ring to rotate sliced crystal bar, therefore cut lengths receive the restriction of interior circular knife physical dimension, and cut lengths are less.
2) contact of crystal bar and interior circular knife is that circular arc line contacts, and the length of this circular arc line present in cutting process by short elongated, again by the long cyclically-varying shortened, therefore cutting force also present change from small to big, cyclically-varying from large to small again; Easily cause interior circular knife Fast Wearing or extremely damage.
3) due in cutting process the size of cutting force be cyclically-varying, if within the cutting force of circular knife when just contacting with crystal bar be that benchmark determines a higher cutting speed, then can owing to damaging blade because cutting force increases gradually when being cut to bar core; Otherwise, if within the cutting force of circular knife when being cut to bar core be that benchmark determines a lower cutting speed, although blade can not damage, cutting efficiency then can decline to a great extent.
For this reason, applicant proposes on February 9th, 2012 utility model patent that name is called " inner circle cutting machine ", application number is " 201220041815.0 ", although this patent can effectively solve the problem, but when inner circle blade cuts is to crystal bar core, due to factor impacts such as wafer deadweights, can be pulled off or twist off between wafer and bar, thus remain boss or pit at otch end face, affect wafer quality, even cause waste product.In order to avoid above-mentioned situation, the slide carriage of this utility model patent is provided with the mechanical arm for support wafer; But, because this mechanical arm is uncontrollable stationary structure, when end face and the bar axis out of plumb of bar, the receiver on mechanical arm can not form good face with bar end face and contact, and still exists and be pulled off or twist off possibility between wafer and bar.
Summary of the invention
In order to overcome the defect existed in prior art, the present invention aims to provide a kind of inner circle cutting machine synchronous rotary manipulator avoiding otch end face to remain boss or pit.
To achieve these goals, the present invention by the following technical solutions: it comprises the leading screw be fixed on track base, drives the motor of this leading screw, is located at the slide carriage that described track base is driven by described leading screw, and this slide carriage has mechanical arm; Described mechanical arm comprises the straight-arm be located at by the first bearing pin on slide carriage, the clamping screw be fixed on through the first mounting hole on this straight-arm on slide carriage, the transverse arm hinged with straight-arm, be located at the receiver on this transverse arm, the lock-screw be fixed on straight-arm by bearing.
Have the first governor motion between slide carriage and straight-arm, this first governor motion by the extension spring be fixed between slide carriage with straight-arm, be fixed on the adjustment screw that slide carriage contacts with straight-arm and form; Mechanical arm has the second governor motion, this second governor motion by the second mounting hole be located on straight-arm, be located at the axle shape nut on straight-arm, the connecting axle be located on transverse arm, the adjusting screw that is flexibly connected with connecting axle through axle shape nut and the second mounting hole form; Transverse arm there is photoelectric sensor, receiver is fixed with anti-dazzling screen; Receiver is fixed with rubber ring.
Compared with the prior art, the present invention is owing to have employed technique scheme, change the mechanical arm of original stationary structure into movable structure, therefore by regulate X-direction ensure that receiver and bar end face have good face to contact with the rotational freedom of Y direction, thus make receiver under the effect of frictional force with crystal bar synchronous axial system; Thoroughly overcoming wafer when being about to cut-off, being easily pulled off or twisting off because being in vacant state and the defect that remains boss or pit at end face core.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the C place enlarged drawing in Fig. 1;
Fig. 4 is the A-A sectional view in Fig. 1;
Fig. 5 is the C-C sectional view in Fig. 2;
Fig. 6 is the B-B sectional view in Fig. 2.
In figure: motor 1, track base 2, transverse arm 3, mandrel 4, crystal bar 5, anti-dazzling screen 6, receiver 7, photoelectric sensor 8, lock-screw 9, second bearing pin 10, straight-arm 11, second mounting hole 12, adjusting screw 13, mount pad 14, extension spring 15, adjustment screw 16, slide carriage 17, leading screw 18, clamping screw 19, first mounting hole 20, first bearing pin 21, rubber ring 22, connecting axle 23, axle shape nut 24.
Detailed description of the invention
Below in conjunction with accompanying drawing and specific embodiment, the invention will be further described:
In Fig. 1 ~ 6, track base 2 is fixed with leading screw 18 and drives the motor 1 of this screw turns, the slide carriage 17 coordinated with leading screw 18 by feed screw nut can be moved up and down on track base 2; Slide carriage 17 there is mechanical arm.This mechanical arm by the straight-arm 11 be located at by the first bearing pin 21 on slide carriage 17, to be fixed on through the first mounting hole 20 be located on this straight-arm the clamping screw 19 on slide carriage 17, the locking nut (not indicating in figure) be located on this clamping screw 19, by the second bearing pin 10 transverse arm 3 hinged with slide carriage 17, be located at the receiver 7 on this transverse arm by bearing, the lock-screw 9 be fixed on straight-arm 11 forms.
For the ease of regulating, between slide carriage 17 and straight-arm 11, be provided with the first governor motion; This first governor motion by the extension spring 15 be fixed between slide carriage 17 with straight-arm 11, be fixed on the adjustment screw 16 that slide carriage 17 contacts with straight-arm 11 and form; Namely rotate adjustment screw 16 regulates whole mechanical arm along the rotational freedom of X-direction by straight-arm 11.In like manner, in order to the rotational freedom along Y direction conveniently can be regulated, mechanical arm is provided with the second governor motion; This second governor motion by the second mounting hole 12 be located on straight-arm 11, the mount pad 14 be fixed on straight-arm 11, the axle shape nut 24 be located in this mount pad, be fixed on transverse arm 3 another mount pad 14(figure in do not indicate), the connecting axle 23 be located in this mount pad, the adjusting screw 13 that coordinates the other end to be flexibly connected with connecting axle 23 through second mounting hole 12 one end and axle shape nut 24 form.Obviously, axle shape nut 24 also can directly be hinged on straight-arm 11; In like manner, connecting axle 23 also can directly be hinged on transverse arm 3.
For the ease of controlling slide carriage 17 movement travel upwards, avoiding mechanical arm to be broken by bar, transverse arm 3 is fixed with the photoelectric sensor 8 be electrically connected with controller (not shown); Receiver 7 is fixed with anti-dazzling screen 6.
For the ease of controlling receiver 7 and the dynamics of crystal bar 5 end contact, simultaneously also in order to increasing friction force, guarantee receiver 7 and crystal bar 5 synchronous axial system, receiver 7 is fixed with rubber ring 22.
Operation principle: be fixed on mandrel 4 by crystal bar 5 during cutting, rotation adjustment screw 16 can push straight-arm 11 and drive transverse arm 3 to rotate around the first bearing pin 21, until receiver 7 is parallel with the end face of crystal bar 5 in X-direction, then that locking nut is locked.Namely rotate adjusting screw 13 drives transverse arm 3 to swing up and down around the second bearing pin 10 within the specific limits by connecting axle 23, when receiver 7 is when Y direction is parallel with the end face of crystal bar 5, then passes through lock-screw 9 by locked for transverse arm 3; In adjustment process, adjusting screw 13 can swing up and down around the axis of axle shape nut 24.Starter motor 1, namely leading screw 18 moves upward by slide carriage 17 driving mechanical arm; When rubber ring 22 contacts with crystal bar 5, receiver 7 just can under the effect of frictional force with crystal bar 5 synchronous axial system; When anti-dazzling screen 6 on receiver 7 forwards the position of photoelectric sensor 8 to, this photoelectric sensor can by signal transmission to control system, and control system sends halt instruction immediately, and motor 1 stops operating, slide carriage 17 stop motion.The Light deformation of cushion rubber 22 can not be compromised by available protecting crystal bar 5.In order to avoid be cut when crystal bar 5 near axis time and twisted off, soon cut-off and when being enough to when bearing twist-off force size at crystal bar 5, control system instruction mandrel 4 stops the rotation, and cutting is still being carried out, until wafer is cut off.Due to the bottom having receiver 7 to hold crystal bar 5, therefore can effectively prevent and to be pulled off between wafer (needing cutout) and crystal bar 5 or to twist off generation.If there is crystal bar 5 end face and axis off plumb situation, when cutting the first cutter, cushion rubber just can not form good contact with crystal bar 5 lower surface, thus likely affects the first cutter cutting effect.If this occurs, then realize receiver cushion rubber by rotation adjustment screw 16 with adjusting screw 13 and contact with the effective of crystal bar lower surface, thus ensure the cutting effect of the first cutter.
Claims (3)
1. an inner circle cutting machine synchronous rotary manipulator, comprises the leading screw be fixed on track base, drives the motor of this leading screw, is located at the slide carriage that described track base is driven by described leading screw, this slide carriage has mechanical arm; It is characterized in that: described mechanical arm comprises the straight-arm (11) be located at by the first bearing pin (21) on slide carriage (17), the clamping screw (19) be fixed on through the first mounting hole (20) on this straight-arm on slide carriage (17), the transverse arm (3) hinged with straight-arm (11), be located at the receiver (7) on this transverse arm, the lock-screw (9) be fixed on straight-arm (11) by bearing; Have the first governor motion between slide carriage (17) and straight-arm (11), this first governor motion by the extension spring (15) be fixed between slide carriage (17) with straight-arm (11), be fixed on the upper adjustment screw (16) contacted with straight-arm (11) of slide carriage (17) and form; Mechanical arm has the second governor motion, and this second governor motion is made up of the second mounting hole (12) be located on straight-arm (11), the axle shape nut (24) be located on straight-arm (11), the connecting axle (23) be located on transverse arm (3), the adjusting screw (13) that is flexibly connected with connecting axle (23) through axle shape nut (24) and the second mounting hole (12).
2. inner circle cutting machine synchronous rotary manipulator according to claim 1, is characterized in that: transverse arm (3) has photoelectric sensor (8), receiver (7) is fixed with anti-dazzling screen (6).
3. inner circle cutting machine synchronous rotary manipulator according to claim 1 and 2, is characterized in that: receiver (7) is fixed with rubber ring (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410086191.8A CN103817813B (en) | 2014-03-11 | 2014-03-11 | Inner circle cutting machine synchronous rotary manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410086191.8A CN103817813B (en) | 2014-03-11 | 2014-03-11 | Inner circle cutting machine synchronous rotary manipulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103817813A CN103817813A (en) | 2014-05-28 |
| CN103817813B true CN103817813B (en) | 2015-11-18 |
Family
ID=50753233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410086191.8A Expired - Fee Related CN103817813B (en) | 2014-03-11 | 2014-03-11 | Inner circle cutting machine synchronous rotary manipulator |
Country Status (1)
| Country | Link |
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| CN (1) | CN103817813B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104384770B (en) * | 2014-11-18 | 2015-12-30 | 无锡恒富科技有限公司 | Slide carriage retaining mechanism on the driven slide carriage of numerical control cutting machine |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1167672A (en) * | 1996-06-12 | 1997-12-17 | 边希武 | Super thin stone sheet saw |
| CN102528948A (en) * | 2012-02-09 | 2012-07-04 | 贵州华龙电子设备有限公司 | Inner circle cutting machine |
| CN203752353U (en) * | 2014-03-11 | 2014-08-06 | 贵州华龙电子设备有限公司 | Synchronous rotation mechanical arm of inner circle cutting machine |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58212138A (en) * | 1983-05-25 | 1983-12-09 | Hitachi Ltd | Slicing apparatus |
| JPH05177628A (en) * | 1991-12-27 | 1993-07-20 | Kyushu Electron Metal Co Ltd | Method for cutting inner-diameter blade for silicon wafer |
| US7021305B2 (en) * | 2002-08-26 | 2006-04-04 | Wy Peron Lee | Cutting guide arrangement for power saw machine |
| JP2008188769A (en) * | 2005-05-16 | 2008-08-21 | Juichi Hanada | Cutter and work vehicle loaded with the same |
-
2014
- 2014-03-11 CN CN201410086191.8A patent/CN103817813B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1167672A (en) * | 1996-06-12 | 1997-12-17 | 边希武 | Super thin stone sheet saw |
| CN102528948A (en) * | 2012-02-09 | 2012-07-04 | 贵州华龙电子设备有限公司 | Inner circle cutting machine |
| CN203752353U (en) * | 2014-03-11 | 2014-08-06 | 贵州华龙电子设备有限公司 | Synchronous rotation mechanical arm of inner circle cutting machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103817813A (en) | 2014-05-28 |
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| PB01 | Publication | ||
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151118 Termination date: 20200311 |
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| CF01 | Termination of patent right due to non-payment of annual fee |