CN103811244A - Low-energy electron beam device - Google Patents
Low-energy electron beam device Download PDFInfo
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- CN103811244A CN103811244A CN201210439555.7A CN201210439555A CN103811244A CN 103811244 A CN103811244 A CN 103811244A CN 201210439555 A CN201210439555 A CN 201210439555A CN 103811244 A CN103811244 A CN 103811244A
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- energy
- lens
- low
- univoltage
- unipotential
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Abstract
The invention provides an adjustable minimal-beam electron beam device which has the advantages of simple structure, convenient operation, ultra-low energy, large area, small divergence angle and large dynamic range. The device comprises an electron gun with a grid electrode and a leading-out electrode, a first univoltage lens, a second univoltage lens and two grid meshes arranged in sequence, wherein a deceleration gap is formed between the two grid meshes; guide deflectors are arranged between the first univoltage lens and the second univoltage lens; the first univoltage lens is focused and imaged between the two pairs of deflectors; and the focus of the second univoltage lens is located at the imaging place. According to the low-energy electron beam device, the beams constantly maintain in a high-energy state during the flying process, severe deviation and various quadratic effect influences of the ultra-low energy beam under the interference of an external magnetic field can be avoided; and in addition, when the energy is changed, parallel beams are always outputted only by adjusting the energy value, the adjustment is simple and convenient, and the repeatability and maneuverability of the device are greatly improved.
Description
Technical field
The present invention relates to a kind of accelerator, especially a kind of low-energy electron bundle device.
Background technology
In space research, need the particle detector to using on aircraft before flight, to carry out scale.When scale, need the standard particle source of various energy.Extremely low-energy electron beam is conventional particle source.To the requirement of this device be can export that energy is adjustable, the electron beam at major diameter, the large little line of dynamics range, little loose angle.Existing low-energy electron bundle device, is easily seriously offset, is difficult to export under various energy parallel beam, the very difficult minimum electronic beam current that obtains and measure large dynamics range because utmost point low energy electrons bundle is subject to the interference such as earth magnetism.
Summary of the invention
The invention provides a kind of simple in structure, easy to operate low-energy electron bundle device.
Realize the low-energy electron bundle device of the object of the invention, comprise the electron gun with grid and extraction pole, the first unipotential lens, the second unipotential lens and two aperture plates that set gradually; Between two aperture plates, form deceleration gap; Between described the first and second unipotential lenses, be provided with guiding deflector, the first unipotential lens is focal imaging between two pairs of deflector, and the focus of described the second unipotential lens is positioned at this imaging place.
Described the first unipotential lens and the second unipotential lens are three cylinder types deceleration (or acceleration) unipotential lenses.
The beneficial effect of low-energy electron bundle device of the present invention is as follows:
Owing to restrainting substantially all states in highest energy in whole device, only in the end bundle is decelerated to low energy by deceleration gap place.So the difficulty of having avoided low energy beam to bring, as geomagnetic noise and various quadratic effects etc.
With the electric field of aperture plate shielding deceleration gap, thereby make device can under various energy, not need to regulate any parameter to keep output parallel beam, improved repeatability and the operability of device.
The present invention proposes and can obtain the uniform electron beam of large dynamics range line continuously controllable by four kinds of measures (change filament cathode temperature, change grid voltage, change area of beam and change aperture plate transmittance).
Accompanying drawing explanation
Fig. 1 is the structural representation of low-energy electron bundle device of the present invention.
Embodiment
As shown in Figure 1, low-energy electron bundle device of the present invention, comprises the electron gun with grid and extraction pole 1, the first unipotential lens 2, the second unipotential lens 4 and two aperture plates 5 that set gradually; Between two aperture plates 5, form deceleration gap 6; Between described the first and second unipotential lenses, be provided with two pairs of guiding deflector 3, the first unipotential lenses focal imaging between two pairs of deflector, the focus of described the second unipotential lens 4 is positioned at this imaging place.
Described the first unipotential lens 2 and the second unipotential lens 4 are three cylinder types deceleration (or acceleration) unipotential lenses.
The advantage of low-energy electron bundle device of the present invention is as follows:
Low-energy electron bundle device energy range described in this patent is 0.02-200keV, and line scope is 10
3-10
14electronics/cm
2/ s, bundle area is Φ 1-10cm, loose angle < 1-3 °, uniformity < 10%;
This patent only uses two unipotential lenses in whole accelerator;
This patent relates to substantially flies in higher-energy state bundle in whole device, only makes bundle be reduced to required low energy approaching exit;
This patent relates to the electric field by aperture plate shielding deceleration gap, thereby makes device can under various energy, not need to regulate any parameter to keep output parallel beam;
This patent relates to by many kinds of measures (change filament cathode temperature, change grid voltage, change area of beam and change aperture plate transmittance etc.) and obtains the uniform electron beam of large dynamics range line continuously controllable;
Owing to restrainting substantially all states in highest energy in whole device, only in the end bundle is decelerated to low energy by deceleration gap place, thus the difficulty of having avoided low energy beam to bring, as geomagnetic noise and various quadratic effects etc.;
Low-energy electron bundle device of the present invention, in the time of energy change, only need adjusting energy value, and the always parallel beam of output not only regulates easyly, and has greatly improved repeatability and the operability of device.
Embodiment recited above is described the preferred embodiment of the present invention; not scope of the present invention is limited; design under spiritual prerequisite not departing from the present invention; various distortion and improvement that the common engineers and technicians in this area make technical solution of the present invention, all should fall in the definite protection range of claims of the present invention.
Claims (3)
1. a low-energy electron bundle device, is characterized in that: comprise the electron gun with grid and extraction pole, the first unipotential lens, the second unipotential lens and two aperture plates that set gradually; Between two aperture plates, form deceleration gap; Between described the first and second unipotential lenses, be provided with guiding deflector, the first unipotential lens is focal imaging between two pairs of deflector, and the focus of described the second unipotential lens is positioned at this imaging place.
2. a kind of low-energy electron bundle device according to claim 1, is characterized in that: electron beam substantially flies in higher-energy state in whole device, only makes bundle be reduced to required low energy approaching exit.
3. a kind of low-energy electron bundle device according to claim 1, is characterized in that: with the electric field of aperture plate shielding deceleration gap, thereby make device can under various energy, not need to regulate any parameter to keep output parallel beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210439555.7A CN103811244A (en) | 2012-11-07 | 2012-11-07 | Low-energy electron beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210439555.7A CN103811244A (en) | 2012-11-07 | 2012-11-07 | Low-energy electron beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103811244A true CN103811244A (en) | 2014-05-21 |
Family
ID=50707868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210439555.7A Pending CN103811244A (en) | 2012-11-07 | 2012-11-07 | Low-energy electron beam device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103811244A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105321784A (en) * | 2014-07-16 | 2016-02-10 | 中国科学院空间科学与应用研究中心 | Electron beam current source device and method for providing electron beam current based on same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2866981A1 (en) * | 2004-03-01 | 2005-09-02 | Thomson Licensing Sa | Electron gun for cathode ray tube e.g. picture tube, has magnetic field induction device for inducing magnetic field collinear with axis of gun in zone comprised between extraction grid and mesh electrode |
| CN101026080A (en) * | 2006-02-22 | 2007-08-29 | Fei公司 | Particle-optical apparatus equipped with a gas ion source |
-
2012
- 2012-11-07 CN CN201210439555.7A patent/CN103811244A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2866981A1 (en) * | 2004-03-01 | 2005-09-02 | Thomson Licensing Sa | Electron gun for cathode ray tube e.g. picture tube, has magnetic field induction device for inducing magnetic field collinear with axis of gun in zone comprised between extraction grid and mesh electrode |
| CN101026080A (en) * | 2006-02-22 | 2007-08-29 | Fei公司 | Particle-optical apparatus equipped with a gas ion source |
Non-Patent Citations (1)
| Title |
|---|
| 陈学康等: "用调制法获得等效单色电子束的实验研究", 《真空与低温》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105321784A (en) * | 2014-07-16 | 2016-02-10 | 中国科学院空间科学与应用研究中心 | Electron beam current source device and method for providing electron beam current based on same |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140521 |
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| WD01 | Invention patent application deemed withdrawn after publication |