CN103808738A - X-ray focus tester based on slit method - Google Patents
X-ray focus tester based on slit method Download PDFInfo
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- CN103808738A CN103808738A CN201210442212.6A CN201210442212A CN103808738A CN 103808738 A CN103808738 A CN 103808738A CN 201210442212 A CN201210442212 A CN 201210442212A CN 103808738 A CN103808738 A CN 103808738A
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Abstract
The invention discloses focus X-ray precision testing equipment used for the field of industrial radiation testing, more specially relates to an X-ray focus tester based on slit method, and belongs to the field of nondestructive automatic testing equipment. The X-ray focus tester based on slit method comprises a microfocus X-ray source, a radiation image receiver, an X-ray emission source, a multi-angle rotation three-dimensional testing device of the radiation image receiver, a four-axis moving platform of samples to be tested, and a computer and hierarchical control system. According to the X-ray focus tester, sizes of X-ray spots are determined via slit grating imaging, the line spread function and modulation transfer function (MTF) of the light source are obtained via slit imaging, and then the light spot size of the light source is determined based on a spatial frequency corresponding to MTF of 0.5. The X-ray focus tester based on slit method is nondestructive testing equipment of a new generation, is especially used for testing of electronic products and production testing of a plurality of medical facilities, and can be used in the fields of medical treatment, spaceflight, military, and industry.
Description
Technical field
The invention belongs to technical field of nondestructive testing, relate to a kind of x-ray focus detector, particularly relate to a kind of x-ray focus tester based on slit method.
Background technology
In Chinese patent bulletin CN1736513A (patent No. is 200510060618.8), disclose " localization method of the dynamic focus of gamma ray therapeutic apparatus ", disclose a kind of localization method of dynamic focus of gamma ray therapeutic apparatus.Gamma-ray therapeutic is established each frame Worm Wheel System and is rotated, moves along X-axis with lead screw pair transmission around C axle, and treatment head is rotated around B axle by worm and gear auxiliary driving, and therapeutic bed is made Y by lead screw pair transmission, the motion of Z direction.Connection+SV power supply after an installation treatment reference sphere and therapeutic bed reference sphere, makes B, and C axial coordinate is in 0.Position, maneuvering device is respectively along X, and Y and the motion of Z direction, make a treatment reference sphere and therapeutic bed reference sphere that five collisions occur, and determines respectively the residing X of equipment dynamic focus, three zero-bit coordinate figures on Y and Z axis; Like this, treatment coordinate X, Y, Z, B, the coordinate relation between C is all set up.The precision of this localization method can be accomplished tens microns, establishes respectively and exceed that ' to two magnitudes, the treatment precision of equipment and therapeutic efficiency improve, and method is simple, practical, and automaticity is high than conventional therapy.
Existing x-ray focus detection technique also comprises: disclosed in disclosed Chinese patent bulletin CN101011255A on August 8th, 2007 (patent No. is 200710007962.X) " focus one detector means of measuring for phase correlation with X ray optical grating ", in disclosed Chinese patent bulletin CN2822001Y on September 27th, 2006 (patent No. is 2005200924576) disclosed " general inductive charger for mobile phone ", in disclosed Chinese patent bulletin CN102338756A on February 1st, 2012 (patent No. is 201110163982.2) disclosed " micro-focus X-ray precise perspective imaging detection equipment " etc.
Above-mentioned various x-ray focus checkout equipment records the diameter error of focus of X ray all in millimeter magnitude, in addition, can only detect larger focus diameter, and therefore, existing x-ray focus detector has certain limitation.
Summary of the invention
The object of the invention is to overcome the shortcoming of above-mentioned existing x-ray focus detector, the technology that provides a kind of x-ray focus based on slit method to detect.
X-ray focus tester based on slit method, belong to the full-automatic checkout equipment of not damaged, application slit diaphragm imaging method is measured X ray spot size, comprise Multi-angle rotating three-dimensional detecting device, measured object four axes motion platform and computing machine and the hierarchy system of microfocus X-ray source, ray image receiver, X ray emissive source and receiver, obtain line spread function and the modulation transfer function of light source by slit image, the value that is then 0. 5 corresponding spatial frequencys from MTF is determined the spot size of light source.The present invention is not damaged checkout equipment of new generation, is especially applied to the detection of electronic product and the production testing of various Medical Devices, thereby can be applied to medical treatment, space flight, military and industrial circle.
The aforesaid x-ray focus tester based on slit method, wherein, equipment application slit diaphragm imaging method is measured X ray spot size.
The aforesaid x-ray focus tester based on slit method, wherein, microfocus X-ray pipe is made up of the filament utmost point, focusing electrode and anode.
The aforesaid x-ray focus tester based on slit method, wherein, computing machine and hierarchy system complete image acquisition and processing and the motion control to Multi-angle rotating three-dimensional detecting device and measured object four axes motion platform respectively.
advantage of the present invention and beneficial effect:conventionally measuring the most direct method of X ray spot size is pinhole imaging system method, but due to strong penetration capacity and the intense radiation characteristic of sigmatron, bring certain difficulty to experiment test and data processing, traditional pinhole imaging system method is because the difficulty of proving installation processing and experiment centering is difficult to application.
The x-ray focus tester based on slit method that the present invention proposes, it is indirectly measuring method of one, obtain the line spread function of light source by slit image, calculate thus the modulation transfer function of light source, determine the spot size of light source take MTF as the value of the spatial frequency of 0. 5 correspondences.The radius degree of accuracy of the x-ray focus recording is high, can better be applied to the detection of electronic product and the production testing of various Medical Devices, thereby can be applied to medical treatment, space flight, military and industrial circle.
Accompanying drawing explanation
Fig. 1 is experiment test layout.
Fig. 2 is the graph of a relation of X ray actual focal spot and drug effect focus.
In figure, the 1st, cathode filament, the 2nd, plate target, the 3rd, actual focal spot, the 4th, effective focal spot.
Specific embodiments
Embodiment mono-: x-ray focus detection experiment test layout as shown in Figure 1, on X-ray path, arrange slit diaphragm, slit is to adopt enough thick two heavy metals tungsten plate holders to live the poly (methyl methacrylate) plate formation that thick layer is d, d is much smaller than spot size, the thickness of tungsten plate can make X ray enough decay, and will receive well-bedded black Density Distribution image i (x) on egative film thereafter.
By the known D of geometric relationship of Fig. 1
0=[DL
1-d(L
2+ L
1)]/L
1this experimental layout is on X-ray stroke, to arrange a stairs device, is close to step and places egative film, when experiment, is receiving on egative film and will obtain fuzzy step picture, and this step looks like the fuzzy message that comprises negative film system.
Embodiment bis-: focal spot size depends primarily on shape and the size of X ray tube cathode filament.Plate target is called actual focal spot by the part of electron impact; Actual focal spot is called effective focal spot in the projection of ray window, as Fig. 2, suppose the approximate directive anode abreast of electron beam, then utilize aperture imaging principle that actual focal spot is projected on film, by the projection size on egative film, can obtain the size of effective focal spot by Related Formula.
Claims (4)
1. the x-ray focus tester based on slit method, belong to the full-automatic checkout equipment of not damaged, application slit diaphragm imaging method is measured X ray spot size, comprise Multi-angle rotating three-dimensional detecting device, measured object four axes motion platform and computing machine and the hierarchy system of microfocus X-ray source, ray image receiver, X ray emissive source and receiver, obtain line spread function and the modulation transfer function of light source by slit image, the value that is then 0. 5 corresponding spatial frequencys from MTF is determined the spot size of light source.
2. x-ray focus tester according to claim 1, is characterized in that: described application slit diaphragm imaging method is measured X ray spot size.
3. x-ray focus tester according to claim 1, is characterized in that: described microfocus X-ray pipe is made up of the filament utmost point, focusing electrode and anode.
4. x-ray focus tester according to claim 1, is characterized in that: described computing machine and hierarchy system complete image acquisition and processing and the motion control to Multi-angle rotating three-dimensional detecting device and measured object four axes motion platform respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210442212.6A CN103808738A (en) | 2012-11-08 | 2012-11-08 | X-ray focus tester based on slit method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210442212.6A CN103808738A (en) | 2012-11-08 | 2012-11-08 | X-ray focus tester based on slit method |
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| CN103808738A true CN103808738A (en) | 2014-05-21 |
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| CN201210442212.6A Pending CN103808738A (en) | 2012-11-08 | 2012-11-08 | X-ray focus tester based on slit method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105021417A (en) * | 2015-07-09 | 2015-11-04 | 天津大学 | Slit-method measurement method for modulation transfer function of digital X-ray imaging system |
| CN107680699A (en) * | 2017-11-06 | 2018-02-09 | 遵义市产品质量检验检测院 | A kind of screening arrangement for being used to test x-ray focus |
| CN109269774A (en) * | 2018-09-17 | 2019-01-25 | 浙江万森电子科技有限公司 | Using the X-ray tube Microfocus X-ray tester of digital photographing technique |
-
2012
- 2012-11-08 CN CN201210442212.6A patent/CN103808738A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105021417A (en) * | 2015-07-09 | 2015-11-04 | 天津大学 | Slit-method measurement method for modulation transfer function of digital X-ray imaging system |
| CN107680699A (en) * | 2017-11-06 | 2018-02-09 | 遵义市产品质量检验检测院 | A kind of screening arrangement for being used to test x-ray focus |
| CN109269774A (en) * | 2018-09-17 | 2019-01-25 | 浙江万森电子科技有限公司 | Using the X-ray tube Microfocus X-ray tester of digital photographing technique |
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Application publication date: 20140521 |