CN103805172A - Cerium-terbium co-doped calcium sulfate luminous film and preparation method and application thereof - Google Patents
Cerium-terbium co-doped calcium sulfate luminous film and preparation method and application thereof Download PDFInfo
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- CN103805172A CN103805172A CN201210459965.8A CN201210459965A CN103805172A CN 103805172 A CN103805172 A CN 103805172A CN 201210459965 A CN201210459965 A CN 201210459965A CN 103805172 A CN103805172 A CN 103805172A
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Abstract
The invention discloses a cerium-terbium co-doped calcium sulfate luminous film with chemical formula of Ca(1-x-y)SO4:xCe<3+>, yTb<3+>, wherein 0.01<=x<=0.05, 0.01<=y<=0.08, Ca(1-x-y)SO4 is the matrix, and the cerium element and terbium element are active elements. In the electroluminescence spectrum (EL) of the cerium-terbium co-doped calcium sulfate luminous film, strong luminescence peaks appear at the positions of 490nm and 510nm, and the cerium-terbium co-doped calcium sulfate luminous film can be applied to a film electroluminescent display. The invention also provides a preparation method of the cerium-terbium co-doped calcium sulfate luminous film and an application thereof.
Description
[technical field]
The present invention relates to a kind of cerium terbium codope calcium sulfate light-emitting film and preparation method thereof and membrane electro luminescent device and preparation method thereof.
[background technology]
Thin-film electroluminescent displays (TFELD), due to its active illuminating, total solids, the advantage such as shock-resistant, reaction is fast, visual angle is large, Applicable temperature is wide, operation is simple, has caused and paid close attention to widely, and development rapidly.At present, research colour and extremely panchromatic TFELD, the luminous film of exploitation multiband, is the developing direction of this problem.But, can be applicable to the cerium terbium codope calcium sulfate light-emitting film of thin-film electroluminescent displays, have not yet to see report.
[summary of the invention]
Based on this, be necessary to provide a kind of cerium terbium codope calcium sulfate light-emitting film that can be applicable to membrane electro luminescent device and preparation method thereof and membrane electro luminescent device and preparation method thereof.
A kind of cerium terbium codope calcium sulfate light-emitting film, its chemical formula is Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
In a preferred embodiment, the thickness of cerium terbium codope calcium sulfate light-emitting film is 50nm～300nm.
A preparation method for cerium terbium codope calcium sulfate light-emitting film, comprises the following steps:
According to Ca
1-x-ysO
4: xCe
3+, yTb
3+the stoichiometric ratio of each element is by CaSO
4, CeO
2and Tb
4o
7powder, after mixing, at 900 ℃～1300 ℃, sintering obtains target;
Substrate is packed in the reaction chamber of chemical vapor depsotition equipment, and the vacuum tightness of reaction chamber is set to 1.0 × 10
-3pa～1.0 × 10
-5pa;
Regulating base target spacing is 45mm～95mm, and substrate temperature is 250 ℃～750 ℃, and the flow of working gas is 10sccm～40sccm, and operating pressure is 0.5Pa～5Pa, and pulsed laser energy is 80W～300W, and carrying out pulsed laser deposition, to obtain chemical formula be Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
In a preferred embodiment, base target spacing is 60mm, and substrate temperature is 500 ℃, and the flow of working gas is 20sccm, and operating pressure is 3Pa, and pulsed laser energy is 150W.
In a preferred embodiment, the thickness of cerium terbium codope calcium sulfate light-emitting film is 50nm～300nm.
A kind of membrane electro luminescent device, this membrane electro luminescent device comprises the substrate, anode layer, luminescent layer and the cathode layer that stack gradually, the material of described luminescent layer is cerium terbium codope calcium sulfate light-emitting film, and the chemical formula of this cerium terbium codope calcium sulfate light-emitting film is Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
In a preferred embodiment, the thickness of luminescent layer is 50nm～300nm.
A preparation method for membrane electro luminescent device, comprises the following steps:
The substrate with anode is provided;
On described anode, form luminescent layer, the material of described luminescent layer is cerium terbium codope calcium sulfate light-emitting film, and the chemical formula of this cerium terbium codope calcium sulfate light-emitting film is Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements;
On described luminescent layer, form negative electrode.
In a preferred embodiment, the preparation of described luminescent layer comprises the following steps:
According to Ca
1-x-ysO
4: xCe
3+, yTb
3+the stoichiometric ratio of each element is by CaSO
4, CeO
2and Tb
4o
7powder, after mixing, at 900 ℃～1300 ℃, sintering obtains target;
Substrate is packed in the reaction chamber of chemical vapor depsotition equipment, and the vacuum tightness of reaction chamber is set to 1.0 × 10
-3pa～1.0 × 10
-5pa;
Regulating base target spacing is 45mm～95mm, and substrate temperature is 250 ℃～750 ℃, and the flow of working gas is 10sccm～40sccm, and operating pressure is 0.5Pa～5Pa, and pulsed laser energy is 80W～300W, and carrying out pulsed laser deposition, to obtain chemical formula be Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
Above-mentioned cerium terbium codope calcium sulfate light-emitting film (Ca
1-x-ysO
4: xCe
3+, yTb
3+) electroluminescent spectrum (EL) in, have very strong glow peak at 490nm and 510nm position, can be applied in thin-film electroluminescent displays.
[accompanying drawing explanation]
Fig. 1 is the structural representation of the membrane electro luminescent device of an embodiment;
Fig. 2 is the electroluminescent spectrogram of the cerium terbium codope calcium sulfate light-emitting film prepared of embodiment 1;
Fig. 3 is the XRD figure of the cerium terbium codope calcium sulfate light-emitting film prepared of embodiment 1.
Fig. 4 is voltage and electric current and the brightness relationship figure of the membrane electro luminescent device prepared of embodiment 1.
[embodiment]
Below in conjunction with the drawings and specific embodiments, cerium terbium codope calcium sulfate light-emitting film, its preparation method and membrane electro luminescent device and preparation method thereof are further illustrated.
The cerium terbium codope calcium sulfate light-emitting film of one embodiment, its chemical formula is Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
Preferably, the thickness of cerium terbium codope calcium sulfate light-emitting film is 50nm～300nm, and x is that 0.02, y is 0.04.
Preferred, the thickness of cerium terbium codope calcium sulfate light-emitting film is 130nm.
Ca in this cerium terbium codope calcium sulfate light-emitting film
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.In the electroluminescent spectrum (EL) of this cerium terbium codope calcium sulfate light-emitting film, there is very strong glow peak at 490nm and 510nm wavelength zone, can be applied in thin-film electroluminescent displays.
The preparation method of above-mentioned cerium terbium codope calcium sulfate light-emitting film, comprises the following steps:
Step S11, according to Ca
1-x-ysO
4: xCe
3+, yTb
3+the stoichiometric ratio of each element is by CaSO
4, CeO
2and Tb
4o
7powder, after mixing, at 900 ℃～1300 ℃, sintering obtains target;
Substrate is packed in the reaction chamber of chemical vapor depsotition equipment, and the vacuum tightness of reaction chamber is set to 1.0 × 10
-3pa～1.0 × 10
-5pa.
In the present embodiment, substrate is indium tin oxide glass (ITO), be appreciated that in other embodiments, also can be for fluorine doped tin oxide glass (FTO), mix the zinc oxide (AZO) of aluminium or mix the zinc oxide (IZO) of indium; Substrate is successively with toluene, acetone and ethanol ultrasonic cleaning 5 minutes, then clean with distilled water flushing, after nitrogen is air-dry, sends into reaction chamber.
Preferably, at 1250 ℃, sintering obtains target; The vacuum tightness of reaction chamber is 5.0 × 10
-4pa.
Step S13, adjusting base target spacing are 45mm～95mm, substrate temperature is 250 ℃～750 ℃, and the flow of working gas is 10sccm～40sccm, and operating pressure is 0.5Pa～5Pa, pulsed laser energy is 80W～300W, and carrying out pulsed laser deposition, to obtain chemical formula be Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
In a preferred embodiment, base target spacing is 60mm, and substrate temperature is 500 ℃, and the flow of working gas is 20sccm, and operating pressure is 3Pa, and pulsed laser energy is 150W.
In a preferred embodiment, the thickness of cerium terbium codope calcium sulfate light-emitting film is 50nm～300nm.
In a preferred embodiment, working gas is oxygen.
Step S14, carrying out chemical vapour deposition, to obtain its chemical formula of cerium terbium codope calcium sulfate light-emitting film be Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
Refer to Fig. 1, the membrane electro luminescent device 100 of an embodiment, this membrane electro luminescent device 100 comprises the substrate 1, anode 2, luminescent layer 3 and the negative electrode 4 that stack gradually.
Substrate 1 is glass substrate.Anode 2 is for being formed at the tin indium oxide (ITO) in glass substrate.The material of luminescent layer 3 is cerium terbium codope calcium sulfate light-emitting film, and the chemical formula of this cerium terbium codope calcium sulfate light-emitting film is Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.The material of negative electrode 4 is silver (Ag).
The preparation method of above-mentioned membrane electro luminescent device, comprises the following steps:
Step S21, provide the substrate 1 with anode 2.
In present embodiment, substrate 1 is glass substrate, and anode 2 is for being formed at the tin indium oxide (ITO) in glass substrate.Be appreciated that in other embodiments, also can be for fluorine doped tin oxide glass (FTO), mix the zinc oxide (AZO) of aluminium or mix the zinc oxide (IZO) of indium; The substrate 1 with anode 2 is successively with acetone, dehydrated alcohol and deionized water ultrasonic cleaning and use it is carried out to oxygen plasma treatment.
Step S22, on anode 2, form luminescent layer 3, the material of luminescent layer 3 is cerium terbium codope calcium sulfate light-emitting film, and the chemical formula of this cerium terbium codope calcium sulfate light-emitting film is Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
In present embodiment, luminescent layer 3 is made by following steps:
First, according to Ca
1-x-ysO
4: xCe
3+, yTb
3+the stoichiometric ratio of each element is by CaSO
4, CeO
2and Tb
4o
7powder, after mixing, at 900 ℃～1300 ℃, sintering obtains target;
Substrate is packed in the reaction chamber of chemical vapor depsotition equipment, and the vacuum tightness of reaction chamber is set to 1.0 × 10
-3pa～1.0 × 10
-5pa,
Moreover, to regulate base target spacing be 45mm～95mm, substrate temperature is 250 ℃～750 ℃, and the flow of working gas is 10sccm～40sccm, and operating pressure is 0.5Pa～5Pa, pulsed laser energy is 80W～300W, and carrying out pulsed laser deposition, to obtain chemical formula be Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
In a preferred embodiment, base target spacing is 60mm, and substrate temperature is 500 ℃, and the flow of working gas is 20sccm, and operating pressure is 3Pa, and pulsed laser energy is 150W.
In a preferred embodiment, working gas is oxygen.
Step S23, on luminescent layer 3, form negative electrode 4.
In present embodiment, the material of negative electrode 4 is silver (Ag), is formed by evaporation.
Be specific embodiment below.
Embodiment 1
By 0.94mmol CaSO
4, 0.02mmol CeO
2with 0.01mmol Tb
4o
7powder is after even mixing, at 1250 ℃, sinter into and be of a size of diameter 50, thickness is that the ceramic target of 2mm is the shape of cake, and target is packed in vacuum cavity, be ito glass by substrate, successively use toluene, acetone and ethanol ultrasonic cleaning 5 minutes, then clean with distilled water flushing, and use it is carried out to oxygen plasma treatment, put into vacuum cavity.The distance of target and substrate is set as to 60mm, the vacuum tightness of cavity is evacuated to 5.0 × 10 with mechanical pump and molecular pump
-4pa; Adopt oxygen as working air current, working gas flow is 20sccm, and pressure is adjusted to 3.0Pa, and underlayer temperature is 500 ℃, pulsed laser energy 150W, the deposition of beginning film.The thickness of film is deposited into 130nm, and the chemical general formula of the cerium terbium codope calcium sulfate light-emitting film that taking-up sample obtains is Ca
0.94sO
4: 0.02Ce
3+, 0.04Tb
3+.Finally evaporation one deck Ag on light-emitting film, as negative electrode.
The chemical general formula of the cerium terbium codope calcium sulfate light-emitting film obtaining in the present embodiment is Ca
0.94sO
4: 0.02Ce
3+, 0.04Tb
3+, wherein Ca
0.94sO
4be matrix, Ce elements and terbium element are active elements.
Refer to Fig. 2, Figure 2 shows that the electroluminescence spectrum (EL) of the cerium terbium codope calcium sulfate light-emitting film obtaining.As seen from Figure 2, in electroluminescence spectrum, there is very strong glow peak can be applied in thin-film electroluminescent displays at 490nm and 510nm.
Refer to Fig. 3, Fig. 3 is the XRD curve of the cerium terbium codope calcium sulfate light-emitting film prepared of embodiment 1, test comparison standard P DF card.As can be seen from Figure 3, reference standard PDF card, the diffraction peak in figure is the peak crystallization of calcium sulfate, does not occur the diffraction peak of doped element and other impurity, illustrates that the product that this preparation method obtains has good crystalline quality.
Refer to Fig. 4, Fig. 4 is voltage and electric current and the brightness relationship figure of the membrane electro luminescent device prepared of embodiment 1, and in accompanying drawing 4, curve 1 is voltage and current density relation curve, can find out that device starts from 5.5V luminous, curve 2 is voltage and brightness relationship curve, and high-high brightness is 78cd/m
2, show that device has the good characteristics of luminescence.
Embodiment 2
By 0.96mmol CaSO
4, 0.05mmol CeO
2with 0.0025mmol Tb
4o
7powder is after even mixing, at 900 ℃, sinter into and be of a size of diameter 50, thickness is the ceramic target of 2mm, and target is packed in vacuum cavity, be ito glass by substrate, successively use toluene, acetone and ethanol ultrasonic cleaning 5 minutes, then clean with distilled water flushing, and use it is carried out to oxygen plasma treatment, put into vacuum cavity.The distance of target and substrate is set as to 60mm, the vacuum tightness of cavity is evacuated to 1.0 × 10 with mechanical pump and molecular pump
-3pa; Adopt oxygen as working air current, working gas flow is 10sccm, and pressure is adjusted to 0.5Pa, and underlayer temperature is 250 ℃, pulsed laser energy 80W, the deposition of beginning film.The thickness of film is deposited into 300mm, and the chemical general formula of the cerium terbium codope calcium sulfate light-emitting film that taking-up sample obtains is Ca
0.94sO
4: 0.05Ce
3+, 0.01Tb
3+.Finally evaporation one deck Ag on light-emitting film, as negative electrode.
Embodiment 3
By 0.91mmol CaSO
4, 0.01mmol CeO
2with 0.02mmol Tb
4o
7powder is after even mixing, at 1300 ℃, sinter into and be of a size of diameter 50, thickness is the ceramic target of 2mm, and target is packed in vacuum cavity, be ito glass by substrate, successively use toluene, acetone and ethanol ultrasonic cleaning 5 minutes, then clean with distilled water flushing, and use it is carried out to oxygen plasma treatment, put into vacuum cavity.The distance of target and substrate is set as to 95mm, the vacuum tightness of cavity is evacuated to 1.0 × 10 with mechanical pump and molecular pump
-5pa; Adopt oxygen as working air current, working gas flow is 40sccm, and pressure is adjusted to 5.0Pa, and underlayer temperature is 750 ℃, pulsed laser energy 300W, the deposition of beginning film.The thickness of film is deposited into 50nm, and the chemical general formula of the cerium terbium codope calcium sulfate light-emitting film that taking-up sample obtains is Ca
0.94sO
4: 0.01Ce
3+, 0.08Tb
3+.Finally evaporation one deck Ag on light-emitting film, as negative electrode.
By 0.98mmol CaSO
4, 0.01mmol CeO
2with 0.0025mmol Tb
4o
7powder is after even mixing, at 1250 ℃, sinter into and be of a size of diameter 50, thickness is the ceramic target of 2mm, and target is packed in vacuum cavity, be ito glass by substrate, successively use toluene, acetone and ethanol ultrasonic cleaning 5 minutes, then clean with distilled water flushing, and use it is carried out to oxygen plasma treatment, put into vacuum cavity.The distance of target and substrate is set as to 60mm, the vacuum tightness of cavity is evacuated to 5.0 × 10 with mechanical pump and molecular pump
-4pa; Adopt oxygen as working air current, working gas flow is 20sccm, and pressure is adjusted to 3.0Pa, and underlayer temperature is 500 ℃, pulsed laser energy 150W, the deposition of beginning film.The thickness of film is deposited into 80nm, and the chemical general formula of the cerium terbium codope calcium sulfate light-emitting film that taking-up sample obtains is Ca
0.98sO
4: 0.01Ce
3+, 0.01Tb
3+.Finally evaporation one deck Ag on light-emitting film, as negative electrode.
By 0.87mmol CaSO
4, 0.05mmol CeO
2with 0.02mmol Tb
4o
7powder is after even mixing, at 900 ℃, sinter into and be of a size of diameter 50, thickness is the ceramic target of 2mm, and target is packed in vacuum cavity, be ito glass by substrate, successively use toluene, acetone and ethanol ultrasonic cleaning 5 minutes, then clean with distilled water flushing, and use it is carried out to oxygen plasma treatment, put into vacuum cavity.The distance of target and substrate is set as to 45mm, the vacuum tightness of cavity is evacuated to 1.0 × 10 with mechanical pump and molecular pump
-3pa; Adopt oxygen as working air current, working gas flow is 10sccm, and pressure is adjusted to 0.5Pa, and underlayer temperature is 250 ℃, pulsed laser energy 80W, the deposition of beginning film.The thickness of film is deposited into 180nm, and the chemical general formula of the cerium terbium codope calcium sulfate light-emitting film that taking-up sample obtains is Ca
0.87sO
4: 0.05Ce
3+, 0.08Tb
3+.Finally evaporation one deck Ag on light-emitting film, as negative electrode.
By 0.9mmol CaSO
4, 0.04mmol CeO
2with 0.015mmol Tb
4o
7powder is after even mixing, at 1300 ℃, sinter into and be of a size of diameter 50, thickness is the ceramic target of 2mm, and target is packed in vacuum cavity, be ito glass by substrate, successively use toluene, acetone and ethanol ultrasonic cleaning 5 minutes, then clean with distilled water flushing, and use it is carried out to oxygen plasma treatment, put into vacuum cavity.The distance of target and substrate is set as to 95mm, the vacuum tightness of cavity is evacuated to 1.0 × 10 with mechanical pump and molecular pump
-5pa; Adopt oxygen as working air current, working gas flow is 40sccm, and pressure is adjusted to 5.0Pa, and underlayer temperature is 750 ℃, pulsed laser energy 300W, the deposition of beginning film.The thickness of film is deposited into 250nm, and the chemical general formula of the cerium terbium codope calcium sulfate light-emitting film that taking-up sample obtains is Ca
0.94sO
4: 0.04Ce
3+, 0.06Tb
3+.Finally evaporation one deck Ag on light-emitting film, as negative electrode.
The above embodiment has only expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a cerium terbium codope calcium sulfate light-emitting film, is characterized in that, its chemical formula is Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
2. cerium terbium codope calcium sulfate light-emitting film according to claim 1, is characterized in that, the thickness of described cerium terbium codope calcium sulfate light-emitting film is 50nm～300nm.
3. a preparation method for cerium terbium codope calcium sulfate light-emitting film, is characterized in that, comprises the following steps:
According to Ca
1-x-ysO
4: xCe
3+, yTb
3+the stoichiometric ratio of each element is by CaSO
4, CeO
2and Tb
4o
7powder, after mixing, at 900 ℃～1300 ℃, sintering obtains target;
Substrate is packed in the reaction chamber of pulsed laser deposition equipment, and the vacuum tightness of reaction chamber is set to 1.0 × 10
-3pa～1.0 × 10
-5pa;
Regulating base target spacing is 45mm～95mm, and substrate temperature is 250 ℃～750 ℃, and the flow of working gas is 10sccm～40sccm, and operating pressure is 0.5Pa～5Pa, and pulsed laser energy is 80W～300W, and carrying out pulsed laser deposition, to obtain chemical formula be Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
4. the preparation method of cerium terbium codope calcium sulfate light-emitting film according to claim 3, is characterized in that, described base target spacing is 60mm, substrate temperature is 500 ℃, the flow of working gas is 20sccm, and operating pressure is 3Pa, and pulsed laser energy is 150W.
5. the preparation method of cerium terbium codope calcium sulfate light-emitting film according to claim 3, is characterized in that, the thickness of described cerium terbium codope calcium sulfate light-emitting film is 50nm～300nm.
6. a membrane electro luminescent device, this membrane electro luminescent device comprises the substrate, anode layer, luminescent layer and the cathode layer that stack gradually, it is characterized in that, the material of described luminescent layer is cerium terbium codope calcium sulfate light-emitting film, and the chemical formula of this cerium terbium codope calcium sulfate light-emitting film is Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
7. membrane electro luminescent device according to claim 6, is characterized in that, the thickness of described luminescent layer is 50nm～300nm.
8. a preparation method for membrane electro luminescent device, is characterized in that, comprises the following steps:
The substrate with anode is provided;
On described anode, form luminescent layer, the film of described luminescent layer is cerium terbium codope calcium sulfate light-emitting film, and the chemical formula of this cerium terbium codope calcium sulfate light-emitting film is Ca
1-x-ysO
4: xCe
3+, yTb
3+, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements;
On described luminescent layer, form negative electrode.
9. the preparation method of membrane electro luminescent device according to claim 8, is characterized in that, the preparation of described luminescent layer comprises the following steps:
According to Ca
1-x-ysO
4: xCe
3+, yTb
3+the stoichiometric ratio of each element is by CaSO
4, CeO
2and Tb
4o
7powder, after mixing, at 900 ℃～1300 ℃, sintering obtains target;
Described substrate is packed into the reaction chamber of chemical vapor depsotition equipment, and the vacuum tightness of reaction chamber is set to 1.0 × 10
-3pa～1.0 × 10
-5pa;
Regulating base target spacing is 45mm～95mm, and substrate temperature is 250 ℃～750 ℃, and the flow of working gas is 10sccm～40sccm, and operating pressure is 0.5Pa～5Pa, and pulsed laser energy is 80W～300W, and carrying out pulsed laser deposition, to obtain chemical formula be Ca
1-x-ysO
4: xCe
3+, yTb
3+cerium terbium codope calcium sulfate light-emitting film, wherein, 0.01≤x≤0.05,0.01≤y≤0.08, Ca
1-x-ysO
4be matrix, Ce elements and terbium element are active elements.
10. the preparation method of membrane electro luminescent device according to claim 9, is characterized in that, described base target spacing is 60mm, and substrate temperature is 500 ℃, and the flow of working gas is 20sccm, and operating pressure is 3Pa, and pulsed laser energy is 150W.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106747193A (en) * | 2016-12-27 | 2017-05-31 | 广西钦华陶艺开发有限公司 | The manufacture craft of Nixing pottery gypsum mold |
| CN111548791A (en) * | 2020-05-18 | 2020-08-18 | 广东拾传拾美新材料有限公司 | Luminous film of calcium carbonate nano array and preparation method thereof |
-
2012
- 2012-11-15 CN CN201210459965.8A patent/CN103805172A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106747193A (en) * | 2016-12-27 | 2017-05-31 | 广西钦华陶艺开发有限公司 | The manufacture craft of Nixing pottery gypsum mold |
| CN106747193B (en) * | 2016-12-27 | 2019-03-05 | 广西钦华陶艺开发有限公司 | The manufacture craft of Nixing pottery gypsum mold |
| CN111548791A (en) * | 2020-05-18 | 2020-08-18 | 广东拾传拾美新材料有限公司 | Luminous film of calcium carbonate nano array and preparation method thereof |
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