CN103803493A - Hydrogen recovery system and power generation system - Google Patents

Hydrogen recovery system and power generation system Download PDF

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Publication number
CN103803493A
CN103803493A CN201210579017.8A CN201210579017A CN103803493A CN 103803493 A CN103803493 A CN 103803493A CN 201210579017 A CN201210579017 A CN 201210579017A CN 103803493 A CN103803493 A CN 103803493A
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hydrogen
ammonia
power generation
waste gas
recovery system
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CN201210579017.8A
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CN103803493B (en
Inventor
林育立
施惠雅
黄廷位
林弘萍
李寿南
阎明宇
纪岩勋
林孟昌
谢文安
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Industrial Technology Research Institute ITRI
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Industrial Technology Research Institute ITRI
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/36Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

Abstract

The invention provides a hydrogen recovery system and a power generation system. The hydrogen recovery system is adapted to recover hydrogen from an exhaust gas containing hydrogen, ammonia and other gases. The hydrogen recovery system comprises an adsorption device, an ammonia decomposition device and a hydrogen filtering device. The adsorption device is used for adsorbing the other gases in the waste gas. The ammonia decomposition device is connected with the adsorption device and is used for decomposing ammonia into nitrogen and hydrogen. The hydrogen filtering device is connected with the ammonia gas decomposition device and is used for separating nitrogen and hydrogen. The power generation system is suitable for generating power by using hydrogen in waste gas containing hydrogen, ammonia and other gases. The power generation system comprises a fuel cell, the adsorption device and the ammonia decomposition device. The fuel cell is connected with an ammonia decomposition device. The invention can not only prevent the environmental pollution, but also recover the hydrogen and has economic value.

Description

Hydrogen recovery system and power generation system
Technical field
The invention relates to a kind of hydrogen recovery system and power generation system.
Background technology
General partly lead technique body and photoelectricity technique and finish after, in remaining process gas (being waste gas), conventionally contain ammonia (NH 3), silicomethane (SiH 4), silicoethane (Si 2h 6), phosphuret-(t)ed hydrogen (PH 3), hydrogen arsenide (AsH 3), trimethyl-gallium (Ga (CH 3) 3) with the hydrogen of high density, wherein ammonia, silicomethane, silicoethane, phosphuret-(t)ed hydrogen, hydrogen arsenide, trimethyl-gallium is all environmental pollutant.
At present, normally waste gas is directly disposed in atmosphere after persulfuric acid or hypochlorous acid washing for the processing mode of above-mentioned environmental pollutant.But this processing mode has many shortcomings.For example, the nitrogen concentration in waste water after treatment reaches tens thousand of ppm, far above statutory standard.In addition, hydrogen is directly disposed to the risk in atmosphere with blast, and causes the waste of Hydrogen Energy.
Summary of the invention
The invention provides a kind of hydrogen recovery system, it can contain recover hydrogen in the waste gas of hydrogen, ammonia and other gases certainly.
The present invention also provides a kind of power generation system, and it can utilize the hydrogen gas generation in the waste gas that contains hydrogen, ammonia and other gases.
For achieving the above object, the present invention proposes a kind of hydrogen recovery system, and it is suitable for recover hydrogen in the waste gas that contains hydrogen, ammonia and other gases, and this hydrogen recovery system comprises adsorption unit, ammonia decomposer and filter hydrogen production device.Adsorption unit is in order to adsorb above-mentioned other gases in waste gas.Ammonia decomposer is connected with adsorption unit, in order to ammonia is decomposed into nitrogen and hydrogen.Filter hydrogen production device is connected with ammonia decomposer, in order to separation of nitrogen and hydrogen.
For achieving the above object, the embodiment of the present invention also proposes a kind of power generation system, and it is suitable for utilizing the hydrogen gas generation in the waste gas that contains hydrogen, ammonia and other gases.This power generation system comprises adsorption unit, ammonia decomposer and fuel cell.Adsorption unit is in order to adsorb above-mentioned other gases in waste gas.Ammonia decomposer is connected with adsorption unit, in order to ammonia is decomposed into nitrogen and hydrogen.Fuel cell is connected with ammonia decomposer.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Accompanying drawing explanation
Fig. 1 is the block schematic diagram of hydrogen recovery system of the present invention;
Fig. 2 is the block schematic diagram of the power generation system of one embodiment of the invention;
Fig. 3 is the block schematic diagram of the power generation system of another embodiment of the present invention.
Wherein, Reference numeral
10: hydrogen recovery system
20,30: power generation system
100: waste gas
102: adsorption unit
104: ammonia decomposer
106: filter hydrogen production device
108,110,202,302: pipeline
112: hydrogen
200,300: fuel cell
Embodiment
Fig. 1 is the block schematic diagram of hydrogen recovery system of the present invention.Please refer to Fig. 1, in the present embodiment, hydrogen recovery system 10 is recover hydrogen in the waste gas 100 that contains hydrogen, ammonia and other gases.Waste gas 100 is for example remaining waste gas after semiconductor technology or photoelectricity technique complete, and it contains hydrogen, ammonia and other process gass (combinations of for example silicomethane, silicoethane, phosphuret-(t)ed hydrogen, hydrogen arsenide, trimethyl-gallium or these gases).Due to ammonia, silicomethane, silicoethane, phosphuret-(t)ed hydrogen, hydrogen arsenide, trimethyl-gallium all can make pollution to environment, and hydrogen can be recycled and have economic worth, therefore the hydrogen recovery system 10 of the present embodiment is in order to recover hydrogen in waste gas 100 and avoid remaining gas to environment.
Hydrogen recovery system 10 comprises adsorption unit 102, ammonia decomposer 104 and filter hydrogen production device 106.Adsorption unit 102 is connected to each other by pipeline 108 with ammonia decomposer 104, and ammonia decomposer 104 is connected to each other by pipeline 110 with filter hydrogen production device 106.
Adsorption unit 102 is in order to adsorb other gases except hydrogen and ammonia in waste gas 100.In detail, in the time reclaiming the hydrogen in waste gas 100 with hydrogen recovery system 10, waste gas 100 is introduced in adsorption unit 102.In adsorption unit 102, there is the sorbing material of other gases except hydrogen and ammonia in adsorbable waste gas 100.Sorbing material can be metal oxide (for example cupric oxide, zinc oxide, ferric oxide, aluminum oxide or magnesium oxide), zeolite, activated carbon or its combination.The selection of sorbing material is determined by the gaseous species in waste gas 100, and the embodiment of the present invention is not construed as limiting this.Thus, after waste gas 100 enters adsorption unit 102, the gas except hydrogen and ammonia can be adsorbed at this, and the hydrogen not being adsorbed and ammonia enter ammonia decomposer 104 via pipeline 108.
Ammonia decomposer 104 is in order to be decomposed into ammonia nitrogen and hydrogen.After hydrogen and ammonia enter ammonia decomposer 104 via pipeline 108, ammonia is decomposed into nitrogen and hydrogen by ammonia decomposer 104.Ammonia decomposition catalyst in ammonia decomposer 104 can be metal (such as platinum, iridium, rhodium, palladium, iron, nickel, copper, cobalt etc.) or metal oxide (such as nickel oxide, ferric oxide, rhodium oxide, iridium oxide, platinum oxide, palladous oxide etc.).So far, gas that can be to environment in waste gas 100 (ammonia, silicomethane, silicoethane, phosphuret-(t)ed hydrogen, hydrogen arsenide, trimethyl-gallium) has all been adsorbed or has decomposed and do not exist, and hydrogen and nitrogen enter and filter hydrogen production device 106 via pipeline 110.
Filter hydrogen production device 106 is in order to separation of nitrogen and hydrogen.When hydrogen and nitrogen enter filter hydrogen production device 106 via pipeline 110 after, filter hydrogen production device 106 is opened hydrogen and nitrogen separation.Therefore, hydrogen production device 106 and the hydrogen 112 that obtains can be recovered and recycle after filtration.Filter hydrogen production device 106 can be filter hydrogen film, and it is for example pure palladium film, palladium/silverskin, palladium/copper film, palladium/golden film or contains the metallic films such as vanadium, tantalum, niobium.Filter hydrogen production device 106 can be also variable-pressure adsorption bed, and it contains zeolite or gac equimolecular sieve material.Or filter hydrogen production device 106 can be also filter hydrogen film and variable-pressure adsorption bed combination.In addition, with the also visual actual demand and be recovered and recycle of the nitrogen of Hydrogen Separation.
Special one carry be, in hydrogen recovery system 10, because ammonia is decomposed into hydrogen and nitrogen by ammonia decomposer 104, therefore compared with hydrogen content in waste gas 100, the amounts of hydrogen reclaiming through hydrogen recovery system 10 can increase, thereby has more economic benefit.
Above-mentioned hydrogen recovery system 10 can further be done combination with fuel cell, to form power generation system.Below will be further described this.
Fig. 2 is the block schematic diagram of the power generation system of one embodiment of the invention.Please refer to Fig. 2, hydrogen recovery system 10 is connected and is formed power generation system 20 by pipeline 202 with fuel cell 200.In detail, after waste gas 100 enters hydrogen recovery system 10, the hydrogen 112(of generation is as shown in Figure 1) enter fuel cell 200 and as its fuel via pipeline 202.That is to say, the power generation system 20 of the embodiment of the present invention is to utilize the hydrogen in technology waste gas to generate electricity, and in technology waste gas, environmentally harmful gas is all adsorbed or decomposes, therefore the power generation system 20 of the embodiment of the present invention, except effectively utilizing hydrogen in technology waste gas generates electricity, has also solved the problem of technology waste gas to environment.
In power generation system 20, between fuel cell 200 and ammonia decomposer 104, dispose filter hydrogen production device 106.In other embodiments, also can omit filter hydrogen production device 106.
Fig. 3 is the block schematic diagram of the power generation system of another embodiment of the present invention.Please refer to Fig. 3, in power generation system 30, omitted pipeline 110 and filter hydrogen production device 106 in hydrogen recovery system 10, and fuel cell 300 is directly connected with ammonia decomposer 104 by pipeline 302.In detail, after waste gas 100 enters adsorption unit 102, hydrogen and ammonia enter ammonia decomposer 104 via pipeline 108.After ammonia is decomposed into hydrogen and nitrogen by ammonia decomposer 104, hydrogen and nitrogen enter fuel cell 300 via pipeline 302 simultaneously.Because nitrogen is rare gas element, therefore can't affect the running of fuel cell 300.That is to say, the hydrogen that the power generation system 30 of the embodiment of the present invention also can effectively utilize in technology waste gas generates electricity and solves the problem of technology waste gas to environment.
Based on above-mentioned, the hydrogen recovery system of the embodiment of the present invention is first with other gases except hydrogen and ammonia in adsorption unit absorbing process waste gas, then utilize ammonia decomposer that ammonia is decomposed into hydrogen and nitrogen, recycling filter hydrogen production device by Hydrogen Separation out, therefore can also recycle by efficient recovery hydrogen, and solve the problem of technology waste gas to environment.
In addition, in the power generation system of the embodiment of the present invention, fuel cell is combined with above-mentioned hydrogen recovery system, or fuel cell is combined with above-mentioned adsorption unit and ammonia decomposer, the hydrogen that therefore can effectively utilize in technology waste gas generates electricity, and also can solve the problem of technology waste gas to environment.
Certainly; the present invention also can have other various embodiments; in the situation that not deviating from spirit of the present invention and essence thereof; those of ordinary skill in the art are when making according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.

Claims (11)

1. a hydrogen recovery system, is suitable for recover hydrogen in the waste gas that contains hydrogen, ammonia and other gases, it is characterized in that, described hydrogen recovery system comprises:
Adsorption unit, in order to adsorb described other gases in described waste gas;
Ammonia decomposer, is connected with described adsorption unit, in order to ammonia is decomposed into nitrogen and hydrogen; And
Filter hydrogen production device, is connected with described ammonia decomposer, in order to separation of nitrogen and hydrogen.
2. hydrogen recovery system as claimed in claim 1, is characterized in that, described other gases be silicomethane, silicoethane, phosphuret-(t)ed hydrogen, hydrogen arsenide, trimethyl-gallium or its combination.
3. hydrogen recovery system as claimed in claim 1, is characterized in that, the sorbing material in described adsorption unit is metal oxide, zeolite, activated carbon or its combination.
4. hydrogen recovery system as claimed in claim 1, is characterized in that, the ammonia decomposition catalyst in described ammonia decomposer is metal or metal oxide.
5. hydrogen recovery system as claimed in claim 1, is characterized in that, described filter hydrogen production device is filter hydrogen film, variable-pressure adsorption bed or its combination.
6. a power generation system, is suitable for utilizing the hydrogen gas generation in the waste gas that contains hydrogen, ammonia and other gases, it is characterized in that, described power generation system comprises:
Adsorption unit, in order to adsorb described other gases in described waste gas;
Ammonia decomposer, is connected with described adsorption unit, in order to ammonia is decomposed into nitrogen and hydrogen; And
Fuel cell, is connected with described ammonia decomposer.
7. power generation system as claimed in claim 6, is characterized in that, described other gases be silicomethane, silicoethane, phosphuret-(t)ed hydrogen, hydrogen arsenide, trimethyl-gallium or its combination.
8. power generation system as claimed in claim 6, is characterized in that, the sorbing material in described adsorption unit is metal oxide, zeolite, activated carbon or its combination.
9. power generation system as claimed in claim 6, is characterized in that, the ammonia decomposition catalyst in described ammonia decomposer is metal or metal oxide.
10. power generation system as claimed in claim 6, is characterized in that, also comprises filter hydrogen production device, and described filter hydrogen production device is connected between described ammonia decomposer and described fuel cell, and described filter hydrogen production device is in order to separation of nitrogen and hydrogen.
11. power generation systems as claimed in claim 10, is characterized in that, described filter hydrogen production device is filter hydrogen film, variable-pressure adsorption bed or its combination.
CN201210579017.8A 2012-11-08 2012-12-27 Hydrogen recovery system and power generation system Active CN103803493B (en)

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TW101141676A TWI478864B (en) 2012-11-08 2012-11-08 Hydrogen recycling system and power generating system
TW101141676 2012-11-08

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Cited By (2)

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CN106517092A (en) * 2015-09-09 2017-03-22 苏州恒大净化设备有限公司 Ammonia decomposition hydrogen-production purification equipment
WO2020063143A1 (en) * 2018-09-29 2020-04-02 鼎佳能源股份有限公司 Hydrogen recovery and reuse system

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JP2021145084A (en) * 2020-03-13 2021-09-24 キオクシア株式会社 Semiconductor device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106517092A (en) * 2015-09-09 2017-03-22 苏州恒大净化设备有限公司 Ammonia decomposition hydrogen-production purification equipment
WO2020063143A1 (en) * 2018-09-29 2020-04-02 鼎佳能源股份有限公司 Hydrogen recovery and reuse system

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TWI478864B (en) 2015-04-01
TW201418151A (en) 2014-05-16

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