CN103794535A - Parallel rolling wheel device with crystalline silicon solar cells conveyed in chained mode - Google Patents
Parallel rolling wheel device with crystalline silicon solar cells conveyed in chained mode Download PDFInfo
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- CN103794535A CN103794535A CN201410018744.6A CN201410018744A CN103794535A CN 103794535 A CN103794535 A CN 103794535A CN 201410018744 A CN201410018744 A CN 201410018744A CN 103794535 A CN103794535 A CN 103794535A
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- roller
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- solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Photovoltaic Devices (AREA)
Abstract
A parallel rolling wheel device with crystalline silicon solar cells conveyed in a chained mode comprises a row of rolling wheels arranged in a chemical tank in parallel, protrusions distributed at intervals are arranged on the surfaces of the rolling wheels, downward concave areas are formed between the adjacent protrusions, the protrusions on the same rolling wheels are distributed in a staggered mode, and the conveying directions of the protrusions on the rolling wheels are not in the same straight line. The influence of a supporting point on a silicon wafer is eliminated by reducing the supporting and contact area and changing the supporting mode, the surface texturing of the silicon wafer is more even, and meanwhile a subsequent silicon nitride vapor deposition procedure is facilitated better. Due to the fact that the even texturing enables the thickness of a silicon nitride film to be controlled better, meanwhile, the color is more even, the problem of chromatic aberration can be greatly reduced, the cells with bad appearances are reduced, that is, cost is lowered, profits are improved, and in addition, due to the reduction of reflectance, the short circuit currents of the solar cells can be improved, that is, the photoelectric conversion rate of the solar cells is improved.
Description
Technical field
The present invention relates to crystal silicon solar cell sheet processing unit (plant), the parallel roller devices that especially a kind of crystal silicon solar cell sheet making herbs into wool and wet etching chain delivery roller use.
Background technology
In the production technology of current crystal silicon, use the delivery roller of the chemical tank of chemicals to mainly contain one: to be exactly the part by protruding, to contact with silicon chip and conduct transmission power.
The matte quality of solar battery sheet, has affected the conversion efficiency of polycrystal silicon cell and the yields of outward appearance in very large degree.The quality of matte is mainly characterized by uniformity and two parameters of reflection of light rate of matte entirety.The developing direction of matte is that matte particle is little and many, and need to be evenly distributed in the surface of silicon chip entirety.Because in the time that matte granular size is inhomogeneous, except the reflectivity of silicon chip surface improves, the silicon nitride film plating through vapour deposition also can be inhomogeneous, therefore causes the problems such as irregular colour one and aberration.But little and uniform silicon wafer suede particle can effectively reduce the reflectivity of silicon chip, increase the absorption of light, improve short circuit current, thereby improve conversion efficiency.Matte is more even, is more conducive to follow-up silicon nitride gas-phase deposition, and color is more even, also more favourable for the control of the thickness of silicon nitride, has reduced bad order sheet, reduces the sheet of doing over again, and effectively promotes the photoelectric conversion rate of solar battery sheet.
The chemical tank delivery roller that current solar battery sheet uses while manufacture, is transmitting a position contacting with silicon chip, and the general easy silicon chip surface that causes has " rolling wheel stamp ".So-called rolling wheel stamp in fact, it forms reason is that the region that roller contacts with silicon chip can not contact with chemical solution, reduce battery slice etching effect, with roller contact and not different with the silicon wafer suede of roller contact, and cause the continuous color distortion of follow-up work, also reduce the photoelectric conversion rate of solar battery sheet simultaneously.
In the process of transmission silicon chip, roller is for supporting and transmit silicon chip, therefore to contact with silicon chip be necessary to roller, at present for reaching better flocking effect, employing reduces the contact area of roller and silicon chip, as the patent No. be 201220591109.3 a kind of delivery roller and chemical corrosion device, in this device, the cross section of delivery roller is gear-like, reduce the contact area of delivery roller and silicon chip in transport process, can only play like this and reduce the area that matte destroys, and in this structure delivery roller compared with plain cylindrical form roller, the contact area of itself and silicon chip is similar, there is no improvement.
As the patent No. conveyer belt for delivery of heterojunction solar battery sheet that is 201220425433.8, comprise transfer roller and article-carrying belt, article-carrying belt both sides are provided with some support columns, and support column is for supporting silicon chip, support column, for transfer roller or article-carrying belt, has reduced the contact area with silicon chip.
In the prior art that to sum up provided, be all to adopt the destruction that reduces to reduce with the contact area of silicon chip cell piece matte, can only accomplish to reduce the damage area of cell piece flocking.But in the situation that reducing contact-making surface, also will reach the more than 5% of the silicon chip gross area for the area of supporting silicon chip, this contact area contacts with chemical solution because failing in transport process, leaves rolling wheel stamp, has reduced the photoelectric conversion rate of solar battery sheet.
Summary of the invention
The present invention will solve the shortcoming of above-mentioned prior art, a kind of parallel roller devices of crystal silicon solar cell sheet chain delivery is provided, not only reduce the contact area of roller and silicon chip, and ceaselessly change Support Position in course of conveying, the matte of silicon chip surface is distributed completely.
The present invention solves the technical scheme that its technical problem adopts: the parallel roller devices of this crystal silicon solar cell sheet chain delivery, comprise that a row is set in parallel in the roller in chemical tank, the surface of roller is provided with salient point spaced apart, between adjacent salient point, form recessed area, salient point on same roller is interspersed, the salient point of a row on roller on direction of transfer all not on same straight line.This structure is not in needing to revise any chain equipment, and the roller devices that only needs change to transmit just can complete.The parallel roller devices of this crystal silicon solar cell sheet chain delivery adopts the plastic material of anti-soda acid, has little small salient point equidistant and that be evenly distributed on the prepared parallel roller of material.Salient point on parallel roller is the position contacting with silicon chip, this small salient point is except rising the function of transmission, another effect of these salient points is exactly to form recessed area at salient point and salient point, making to leave space between silicon chip and roller can allow chemical solution see through, and then guarantee that chemical solution infiltrates silicon chip surface and fully reacts, prevent that rolling wheel stamp from forming.Simultaneously in the process of carrying, while rotation on roller due to salient point, height is changing, therefore can produce difference in height, difference in height can produce too greatly the power of larger collision silicon chip in the time rotating, salient point on same roller is interspersed, and can reduce so adjacent salient point and replace the difference in height producing, and reduces collision, salient point is contacted lighter with silicon chip, protect better silicon chip surface; The salient point of one row on roller on direction of transfer all not on same straight line, the position that salient point is supported on silicon chip lower surface is like this in ceaselessly variation, can not repeat to be supported in same position, make like this contact-making surface originally supporting expose and fully react with chemical solution, can reach like this appearance that roller-less prints.
For further perfect, adjacent salient point is divided into 1～30mm between left and right.Before and after adjacent salient point, be spaced apart 1～30mm.The height of salient point is 1～20mm.Meanwhile, salient point can be arbitrary shape, and salient point can be cylinder, cuboid or hemisphere structure.
The two ends of roller are provided with mounting head, and mounting head is provided with the L shaped draw-in groove of installing.The mounting head that parallel roller is one can design draw-in groove, can change according to different equipment, and the activity roller mounting head of other end also can make an amendment according to different equipment.
The mechanism of parallel roller has mainly been covered with reciprocity staggered point on roller, and roller installation fixes and movable slip place can customize because of the equipment of different manufacturers.This is simple in structure, also stable for the transmission of solar silicon wafers, main is effectively to allow solution infiltrate through the position in space between roller, allows reacting of filling between chemical solutions and silicon chip part, and do not have the appearance of occlusion effect, and cause " rolling wheel stamp " or reaction not to fill part.
The effect that the present invention is useful is: the present invention is by the mode that reduces to support contact area and change Support Position, solve the impact of the strong point on silicon chip, make the surperficial matte of silicon chip more even, the surface reflectivity of full wafer solar silicon wafers is also lower, simultaneously more favourable for follow-up silicon nitride vapour deposition operation, because matte can make the THICKNESS CONTROL of silicon nitride film obtain better uniformly, color is also more even simultaneously, the problem of aberration also can significantly reduce, the cell piece minimizing of bad order that is to say and reduces costs raising profit, in addition the reduction of reflectivity can improve the short circuit current of solar battery sheet, be the photoelectric conversion rate that improves solar battery sheet.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of the single roller of the present invention;
Fig. 3 is the structural representation of bumps of the present invention roller while being cuboid;
Fig. 4 is the scheme of installation of roller of the present invention in chemical tank.
Description of reference numerals: roller 1, salient point 2, recessed area 3, mounting head 4, draw-in groove 4-1, chemical tank 5, silicon chip of solar cell 6.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described:
With reference to accompanying drawing: the parallel roller devices of this crystal silicon solar cell sheet chain delivery, comprise that a row is set in parallel in the roller 1 in chemical tank 5, the surface of roller 1 is provided with salient point spaced apart 2, between adjacent salient point 2, form recessed area 3, salient point 2 on same roller 1 is interspersed, the salient point 2 of a row on roller 1 on direction of transfer all not on same straight line.Adjacent salient point 2 is divided into 1～30mm between left and right, and adjacent salient point 2 front and back are spaced apart 1～30mm, and the height of salient point 2 is 1～20mm.Salient point on roller can be arbitrary shape, such as being cylinder, cuboid or hemisphere structure etc.The two ends of roller 1 are provided with mounting head 4, and mounting head 4 is provided with the L shaped draw-in groove 4-1 installing.
Although the present invention illustrates and describes by reference to preferred embodiment,, those skilled in the art should understand, and in the scope of claims, can do the various variation in form and details.
Claims (6)
1. the parallel roller devices of a crystal silicon solar cell sheet chain delivery, comprise that a row is set in parallel in the roller (1) in chemical tank, it is characterized in that: the surface of described roller (1) is provided with salient point spaced apart (2), between adjacent salient point (2), form recessed area (3), salient point (2) on same roller (1) is interspersed, the salient point (2) on row roller (1) on direction of transfer all not on same straight line.
2. the parallel roller devices of crystal silicon solar cell sheet chain delivery according to claim 1, is characterized in that: adjacent described salient point (2) is divided into 1～30mm between left and right.
3. the parallel roller devices of crystal silicon solar cell sheet chain delivery according to claim 1, is characterized in that: before and after adjacent described salient point (2), be spaced apart 1～30mm.
4. the parallel roller devices of crystal silicon solar cell sheet chain delivery according to claim 1, is characterized in that: the height of described salient point (2) is 1～20mm.
5. the parallel roller devices of crystal silicon solar cell sheet chain delivery according to claim 1, is characterized in that: described salient point (2) is cylinder, cuboid or hemisphere structure.
6. the parallel roller devices of crystal silicon solar cell sheet chain delivery according to claim 1, is characterized in that: the two ends of described roller (1) are provided with mounting head (4), and mounting head (4) is provided with the L shaped draw-in groove (4-1) of installing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410018744.6A CN103794535B (en) | 2014-01-16 | 2014-01-16 | Parallel rolling wheel device with crystalline silicon solar cells conveyed in chained mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410018744.6A CN103794535B (en) | 2014-01-16 | 2014-01-16 | Parallel rolling wheel device with crystalline silicon solar cells conveyed in chained mode |
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| Publication Number | Publication Date |
|---|---|
| CN103794535A true CN103794535A (en) | 2014-05-14 |
| CN103794535B CN103794535B (en) | 2017-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410018744.6A Active CN103794535B (en) | 2014-01-16 | 2014-01-16 | Parallel rolling wheel device with crystalline silicon solar cells conveyed in chained mode |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104538339A (en) * | 2014-12-10 | 2015-04-22 | 苏州润阳光伏科技有限公司 | Novel conveying roller used for silicon wafer chained texturing |
| CN104695026A (en) * | 2015-03-20 | 2015-06-10 | 青海大学 | Texturizing method of polycrystalline silicon wafer |
| CN105932108A (en) * | 2016-06-13 | 2016-09-07 | 中国科学院物理研究所 | Chain crystalline silicon texturing equipment and preparation method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201725783U (en) * | 2010-06-12 | 2011-01-26 | 无锡尚德太阳能电力有限公司 | Roller assembly and conveying equipment for conveying semi-conductor thin sheet |
| CN202329094U (en) * | 2011-11-16 | 2012-07-11 | 杨桂玲 | Roller-way type solar cell silicon wafer sintering furnace |
| US20130270111A1 (en) * | 2012-04-13 | 2013-10-17 | Bo-Hwan PARK | Sputtering device |
| CN203644745U (en) * | 2014-01-16 | 2014-06-11 | 浙江绿远光伏科技有限公司 | Parallel roller device capable of realizing chain type transmission of crystalline silicon solar cells |
-
2014
- 2014-01-16 CN CN201410018744.6A patent/CN103794535B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201725783U (en) * | 2010-06-12 | 2011-01-26 | 无锡尚德太阳能电力有限公司 | Roller assembly and conveying equipment for conveying semi-conductor thin sheet |
| CN202329094U (en) * | 2011-11-16 | 2012-07-11 | 杨桂玲 | Roller-way type solar cell silicon wafer sintering furnace |
| US20130270111A1 (en) * | 2012-04-13 | 2013-10-17 | Bo-Hwan PARK | Sputtering device |
| CN203644745U (en) * | 2014-01-16 | 2014-06-11 | 浙江绿远光伏科技有限公司 | Parallel roller device capable of realizing chain type transmission of crystalline silicon solar cells |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104538339A (en) * | 2014-12-10 | 2015-04-22 | 苏州润阳光伏科技有限公司 | Novel conveying roller used for silicon wafer chained texturing |
| CN104695026A (en) * | 2015-03-20 | 2015-06-10 | 青海大学 | Texturizing method of polycrystalline silicon wafer |
| CN105932108A (en) * | 2016-06-13 | 2016-09-07 | 中国科学院物理研究所 | Chain crystalline silicon texturing equipment and preparation method |
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| Publication number | Publication date |
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| CN103794535B (en) | 2017-02-22 |
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