CN103794024A - Alarm processing method of semiconductor technology - Google Patents
Alarm processing method of semiconductor technology Download PDFInfo
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- CN103794024A CN103794024A CN201410058336.3A CN201410058336A CN103794024A CN 103794024 A CN103794024 A CN 103794024A CN 201410058336 A CN201410058336 A CN 201410058336A CN 103794024 A CN103794024 A CN 103794024A
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Abstract
The invention discloses an alarm processing method of a semiconductor technology. The alarm processing method is used for carrying out corresponding processing on different alarming events generated by all technological steps of the semiconductor processing technology. The alarm processing method comprises the steps of setting up corresponding groups according to different technological steps of all alarming events, wherein in the different technological steps, the same alarming event corresponds to completely different groups; obtaining the group corresponding to the alarming event according to the technological step of the alarming event; carrying out processing according to the processing mode corresponding to the group. The invention further provides an alarm processing system which can differentially treat the same alarming event in different technological steps according to the actual conditions, and the success rate of the semiconductor technology is improved.
Description
Technical field
The present invention relates to semiconductor manufacturing equipment control technology field, particularly a kind of alarm processing method of semiconductor technology.
Background technology
When generation equipment in semiconductor processes operates when abnormal, can send warning message and carry out respective handling, thereby reaching the object of service procedure safety, protection semiconductor equipment.At present, the alarm processing method adopting in semiconductor processes is to set the corresponding processing mode of each warning message by a database file, thus in the time sending warning message, according to the corresponding processing mode processing of this warning message.But the defect of this processing mode is, no matter in any case, the processing mode after Same Alarm information produces is fixed.Due in each processing step of semiconductor processes; the impact that identical warning message produces technique is not quite similar; if therefore in different process step; all treat Same Alarm information with identical processing mode; for example stop technique,, when this warning message exerts an influence hour to processing step, also can make technique stop; be unfavorable for the protection to equipment, more can cause the success ratio of production loss, reduction technique.
Summary of the invention
Fundamental purpose of the present invention aims to provide and a kind ofly can realize the method for same alert event being carried out different disposal in different process step, and the loss bringing to reduce abnormal conditions improves the success ratio of technique.
For reaching above-mentioned purpose, the invention provides a kind of alarm processing method of semiconductor technology, to process accordingly for the different alert events that each processing step of semiconductor processes is produced, described alarm processing method comprises the following steps:
S1: set corresponding group according to different described processing steps for alert event described in each; Wherein, in different described processing steps, the identical corresponding group of described alert event is incomplete same;
S2: obtain the corresponding group of this alert event according to the processing step that alert event occurs; And
S3: process with the corresponding processing mode of this group.
Preferably, step S1 further comprises: set up and each processing step multiple alert event tables one to one of described semiconductor processes, wherein the whole described alert events of alert event table record and group corresponding to alert event described in each described in each.
Preferably, step S2 comprises:
S21: set the first parameter and the second parameter for processing step described in each in process menu, described the first parameter is for representing the alert event table corresponding to this processing step, and described the second parameter is for representing whole corresponding processing modes of described group;
S22: according to described alert event table corresponding to the first gain of parameter setting for the processing step that this alert event occurs in described process menu;
S23: obtain the group that this alert event is corresponding according to this alert event table.
Preferably, step S2 processes with the corresponding processing mode of this group according to the second parameter setting for the processing step that this alert event occurs in described process menu.
Preferably, according to the setting of described the second parameter, the corresponding processing mode of group identical in described multiple alert event tables is identical or different.
Preferably, described processing mode comprises: ignore alert event, suspend processing step, stop processing step and skip processing step.
The present invention also provides a kind of alarm processing system of semiconductor technology, processes accordingly for the different alert events that each processing step of semiconductor processes is produced.Described alarm processing system comprises alert event group setting module, alert event analysis module and alert event processing module, wherein alert event group setting module is for setting corresponding group for alert event described in each according to different described processing steps; Wherein, in different described processing steps, the identical corresponding group of described alert event is incomplete same; Alert event analysis module is for obtaining the corresponding group of this alert event according to the processing step that alert event occurs; Alert event processing module is for processing with the corresponding processing mode of this group.
Preferably, described alert event group setting module is set up each processing step multiple alert event tables one to one with described semiconductor processes, wherein the whole described alert events of alert event table record and group corresponding to alert event described in each described in each.
Preferably, described alert event analysis module comprises that setting parameter submodule and alert event group obtain submodule.Wherein setting parameter submodule is for setting the first parameter and the second parameter in process menu for processing step described in each, described the first parameter is for representing the alert event table corresponding to this processing step, and described the second parameter is for representing whole corresponding processing modes of described group; Alert event group is obtained described alert event table corresponding to first gain of parameter of submodule for setting for the processing step that this alert event occurs according to described process menu, and obtains according to this alert event table the group that this alert event is corresponding.
Preferably, described alert event processing module is processed with the corresponding processing mode of this group according to the second parameter setting for the processing step that this alert event occurs in described process menu.
Preferably, the setting according to described setting parameter submodule to described the second parameter, the corresponding processing mode of group identical in described multiple alert event tables is identical or different.
Preferably, described processing mode comprises: ignore alert event, suspend processing step, stop processing step and skip processing step.
The alarm processing method of semiconductor technology proposed by the invention and system can be treated with a certain discrimination Same Alarm event according to actual conditions in different process step, can reduce thus the loss that abnormal conditions are brought, and improve the success ratio of semiconductor technology.
Accompanying drawing explanation
Fig. 1 is the calcspar of the alarm processing system of semiconductor technology of the present invention;
Fig. 2 is the process flow diagram of the alarm processing method of semiconductor technology of the present invention;
Fig. 3 is the schematic diagram of multiple alert event tables in the warning system of semiconductor technology of the present invention;
Fig. 4 is the schematic diagram that shows the first parameter and the second argument section in the warning system of semiconductor technology of the present invention in process menu.
Embodiment
For making content of the present invention more clear understandable, below in conjunction with Figure of description, content of the present invention is described further.Certainly the present invention is not limited to this specific embodiment, and the known general replacement of those skilled in the art is also encompassed in protection scope of the present invention.
Fig. 1 is the calcspar of the alarm processing system of semiconductor technology of the present invention; Fig. 2 is the process flow diagram of the alarm processing method of semiconductor technology of the present invention, and below with reference to Fig. 1 and Fig. 2, alarm method and the system to semiconductor technology of the present invention describes.
The warning system of semiconductor technology comprises alert event group setting module 10, alert event analysis module 20 and alert event processing module 30.Wherein, alert event analysis module 10, for performing step S1, is set corresponding group for each alert event according to different processing steps; Wherein, in different processing steps, the corresponding group of identical alert event is incomplete same.Alert event analysis module 20, for performing step S2, obtains the corresponding group of this alert event according to the processing step that alert event occurs.Alert event processing module 30, for performing step S3, is processed with the corresponding processing mode of group being obtained.
Specifically, first, alert event group setting module 10 is set up multiple alert event tables, has comprised all alert events and the corresponding group of each alert event in each alert event table.In Same Alarm event table, the corresponding group of different alert events can be identical or not identical.In Same Alarm event table, the corresponding group of different alert events might not contain whole groups.
In the time that a certain alert event produces, alert event analysis module 20 obtains the corresponding group of this alert event.Concrete, alert event analysis module 20 further comprises that setting parameter submodule 21 and alert event group obtain submodule 22.Setting parameter submodule 21 is set the first parameter and the second parameter for each processing step in process menu, wherein the first parameter is the parameter that represents to select for this processing step which alert event table, the second parameter is the parameter that represents the processing mode corresponding with whole groups, and processing mode can comprise to be ignored alert event, suspend processing step, stops processing step and skip processing step etc.According to the setting of the second parameter, the corresponding processing mode of group identical in each time of fire alarming table can be identical or not identical.In the time that a certain alert event produces, alert event group is obtained submodule 13 can be according to the corresponding alert event table of the current processing step of the first parameter query setting for current processing step in process menu, the alert event of recording according to this alert event table again and the corresponding relation of group, table look-up and obtain the corresponding group of alert event of generation.Then, alert event processing module 30 obtains the corresponding processing mode of this group according to the second parameter for current processing step in process menu, and processes with this processing mode.
Fig. 3 and Fig. 4 are the schematic diagram that shows the first parameter and the second argument section in the configuration file schematic diagram that comprises multiple alert event tables in the alarm processing system of the present invention's one specific embodiment and process menu, describe the implementation procedure of alarm processing system of the present invention and method below with reference to Fig. 3 and Fig. 4 in detail.
As shown in Figure 3, alert event group setting module 10 has been set up the configuration file that comprises multiple alert event tables, each alert event table has comprised whole alert events " warning 1 ", " reporting to the police 2 " and " reporting to the police 3 ", and the corresponding group of each alert event.As in the first alert event table Table0, " reporting to the police 1 " corresponding group is Group1, and " reporting to the police 2 " corresponding group is Group5, and " reporting to the police 3 " corresponding group is Group4.It should be noted that in multiple alert event tables, the group that identical alert event is corresponding is incomplete same.For example, for " report to the police 1 ", at alert event table Table0, Table1, Table2, Table3, group corresponding in Table4 is respectively Group1, Group3, Group5, Group5, Group7.Please refer to Fig. 4, setting parameter submodule 21 carries out the setting of the first parameter and the second parameter in process menu for each processing step.For the processing step of the first step, be Table0 according to its corresponding alert event table of the setting of the first parameter, according to the corresponding processing mode of the whole group Group1～Group10 of the setting of the second parameter.For the processing step of second step, its corresponding alert event table is Table2, and all group has each self-corresponding processing mode equally.Wherein, according to the setting of the second parameter, the corresponding processing mode of identical group in different alert event tables can be identical, also can be different.
Suppose in the time that semiconductor technology runs to the processing step of the first step have an alert event of " reporting to the police 1 " by name to produce.First alert event group is obtained the first parameter query that submodule 22 sets for first step processing step from process menu and is known that the alert event table corresponding to processing step of this first step is Table0, and then under Table0 from configuration file, to find the corresponding group of alert event of " reporting to the police 1 " by name be Group1 group.The processing mode that the second gain of parameter that last alert event processing module 30 sets for first step processing step from process menu again belongs to Group1 group is Ignore, and the processing mode that this warning processing module 30 is taked is to ignore alert event.
In the time that semiconductor technology runs to the processing step of second step, the alert event of same " reporting to the police 1 " by name produces.It is Table2 that alert event group is obtained the first gain of parameter alert event table that submodule 22 sets for second step processing step from process menu, Table2 from configuration file finds the corresponding group of alert event of " reporting to the police 1 " by name again, is Group5 group.The processing mode that the second gain of parameter that last alert event processing module 30 sets for the second processing step from process menu belongs to Group5 group is Hold, and the processing mode that this warning processing module 30 is taked is to suspend technique.This has just reached for Same Alarm event " warning 1 " can carry out different processing in the first step and second processing step.
In sum, the alarm processing method of semiconductor technology of the present invention and alarm processing system, by the corresponding group of alert event in different process step is configured, make the group that identical alert event is corresponding incomplete same; By the setting parameter of process menu, the processing mode of each group is configured again, can realize according to actual conditions and in different process step, Same Alarm event being treated with a certain discrimination thus, thus the success ratio of the loss that reduction abnormal conditions are brought, raising semiconductor technology.
Although the present invention discloses as above with preferred embodiment; so described many embodiment only give an example for convenience of explanation; not in order to limit the present invention; those skilled in the art can do some changes and retouching without departing from the spirit and scope of the present invention, and the protection domain that the present invention advocates should be as the criterion with described in claims.
Claims (12)
1. an alarm processing method for semiconductor technology, processes accordingly for the different alert events that each processing step of semiconductor processes is produced, and it is characterized in that, described alarm processing method comprises:
S1: set corresponding group according to different described processing steps for alert event described in each; Wherein, in different described processing steps, the identical corresponding group of described alert event is incomplete same;
S2: obtain the corresponding group of this alert event according to the processing step that alert event occurs; And
S3: process with the corresponding processing mode of this group.
2. alarm processing method according to claim 1, it is characterized in that, step S1 comprises: set up and each processing step multiple alert event tables one to one of described semiconductor processes, wherein the whole described alert events of alert event table record and group corresponding to alert event described in each described in each.
3. alarm processing method according to claim 2, is characterized in that, step S2 comprises:
S21: set the first parameter and the second parameter for processing step described in each in process menu, described the first parameter is for representing the alert event table corresponding to this processing step, and described the second parameter is for representing whole corresponding processing modes of described group;
S22: according to described alert event table corresponding to the first gain of parameter setting for the processing step that this alert event occurs in described process menu;
S23: obtain the group that this alert event is corresponding according to this alert event table.
4. alarm processing method according to claim 3, is characterized in that, step S3 processes with the corresponding processing mode of this group according to the second parameter setting for the processing step that this alert event occurs in described process menu.
5. alarm processing method according to claim 1, is characterized in that, according to the setting of described the second parameter, the corresponding processing mode of group identical in described multiple alert event tables is identical or different.
6. alarm processing method according to claim 1, is characterized in that, described processing mode comprises: ignore alert event, suspend processing step, stop processing step and skip processing step.
7. an alarm processing system for semiconductor technology, processes accordingly for the different alert events that each processing step of semiconductor processes is produced, and it is characterized in that, described alarm processing system comprises:
Alert event group setting module, for setting corresponding group for alert event described in each according to different described processing steps; Wherein, in different described processing steps, the identical corresponding group of described alert event is incomplete same;
Alert event analysis module, for obtaining the corresponding group of this alert event according to the processing step that alert event occurs; And
Alert event processing module, for processing with the corresponding processing mode of this group.
8. alarm processing system according to claim 7, it is characterized in that, described alert event group setting module is set up each processing step multiple alert event tables one to one with described semiconductor processes, wherein the whole described alert events of alert event table record and group corresponding to alert event described in each described in each.
9. alarm processing system according to claim 8, is characterized in that, described alert event analysis module comprises:
Setting parameter submodule, for setting the first parameter and the second parameter in process menu for processing step described in each, described the first parameter is for representing the alert event table corresponding to this processing step, and described the second parameter is for representing whole corresponding processing modes of described group; And
Alert event group is obtained submodule, for described alert event table corresponding to the first gain of parameter setting for the processing step that this alert event occurs according to described process menu, and obtains according to this alert event table the group that this alert event is corresponding.
10. alarm processing system according to claim 9, it is characterized in that, described alert event processing module is processed with the corresponding processing mode of this group according to the second parameter setting for the processing step that this alert event occurs in described process menu.
11. alarm processing systems according to claim 10, is characterized in that, the setting according to described setting parameter submodule to described the second parameter, and the corresponding processing mode of group identical in described multiple alert event tables is identical or different.
12. alarm processing systems according to claim 7, is characterized in that, described processing mode comprises: ignore alert event, suspend processing step, stop processing step and skip processing step.
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| CN110827523A (en) * | 2019-09-23 | 2020-02-21 | 北京北方华创微电子装备有限公司 | Alarm management system for semiconductor equipment |
| CN111725089A (en) * | 2019-03-19 | 2020-09-29 | 北京北方华创微电子装备有限公司 | Alarm configuration method and device |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180111 Address after: 100176 No. 8, Wenchang Avenue, Daxing District economic and Technological Development Zone, Beijing Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |