CN103187332A - Semiconductor technology monitoring method and semiconductor technology monitoring device - Google Patents
Semiconductor technology monitoring method and semiconductor technology monitoring device Download PDFInfo
- Publication number
- CN103187332A CN103187332A CN2011104535897A CN201110453589A CN103187332A CN 103187332 A CN103187332 A CN 103187332A CN 2011104535897 A CN2011104535897 A CN 2011104535897A CN 201110453589 A CN201110453589 A CN 201110453589A CN 103187332 A CN103187332 A CN 103187332A
- Authority
- CN
- China
- Prior art keywords
- monitoring
- data acquisition
- acquisition system
- data
- semiconductor technology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a semiconductor technology monitoring method and a semiconductor technology monitoring device. The method includes the steps of: a. collecting technological data of semiconductor technology processes with a data collection system; b. sending backup monitoring request data to the data collection system at a set time; and c. generating a promote message that the data collection system stops running to promote a user to select the backup monitoring system to continue to collect technological data if monitoring response data returned from the data collection system is queried out to be not received. According to the method, the promote message that the data collection system stops running is generated to promote a user to select the backup monitoring system to continue to collect technological data when monitoring response data returned from the data collection system is queried out to be not received, and thus the condition that the technological data of the technology processes are not collected is avoided effectively.
Description
Technical field
The present invention relates to microelectronics technology, particularly a kind of semiconductor technology monitoring method and semiconductor technology monitoring device.
Background technology
In semiconductor fabrication process, unusual if final process results occurs, then need the process data in the collection process process and analyze unusual reason occurring according to the process data of collecting.It is a lot of that the complexity of semiconductor processes causes final process results unusual reason to occur, and the various process datas of therefore collecting in the whole technical process are most important to diagnose out for analyzing the unusual reason of final process results appearance.
Usually adopt special data acquisition system to collect by the various process datas in the technical process of semiconductor manufacturing equipment execution.For the semiconductor manufacturing equipment of complexity, except data acquisition system also needs to have data analysis and fault diagnosis system process data is handled.For example: advanced technologies control (Advanced Process Control, be called for short: APC) system, this APC system integration data acquisition system and data analysis and fault diagnosis system.This APC software system function complexity needs a large amount of process datas of storage, therefore usually this APC system is arranged separately, for example: can be arranged on the special computer or server.At this moment, distributed data acquisition system arranges separately with respect to process control system, when data acquisition system is the collection that stops when closing or withdrawing from unusually process data by the people, process control system is not learning that data acquisition system can continue the control semiconductor equipment under stopping the situation of process data collection and carry out technical process, thus the situation that causes the process data in the technical process not gathered.
Summary of the invention
The invention provides a kind of semiconductor technology monitoring method and semiconductor technology monitoring device, the situation of not gathered in order to the process data of avoiding in the technical process.
For achieving the above object, the invention provides a kind of semiconductor technology monitoring method, comprise the following steps:
Process data by data acquisition system collection semiconductor technical process;
In setting-up time, send backup monitoring request msg to described data acquisition system;
If inquire and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, then generate data acquisition system information out of service, the prompting user selects to back up monitoring system and continues the collection process data.
Further, generating described information also comprises afterwards:
The fill order of judging user's input continues the monitoring order or stops the monitoring order for selecting the backup monitoring system, continues the monitoring order if judge described fill order for selecting the backup monitoring system, continues the collection process data by the backup monitoring system.
Further, be the described monitoring order that stops if judging described fill order, stop to described data acquisition system transmitting supervisory request msg.
Further, also comprise before the described process data by data acquisition system collection semiconductor technical process: expired times are carried out zero clearing handle, described expired times are for carrying out the number of times that whether receives the monitoring reply data that described data acquisition system returns in the inquiry fixed time.
Further, do not receive the monitoring reply data that described data acquisition system is returned in the fixed time if inquire, expression is replied overtime, also needs further execution:
Judge that whether described expired times are greater than predetermined number of times;
If judge described expired times greater than described predetermined number of times, carry out the step of described generation data acquisition system information out of service.
Further, if judging expired times is less than or equal to predetermined number of times, carry out the described step of passing through the process data of data acquisition system collection semiconductor technical process.
Further, described inquiring also comprises after not receiving the monitoring reply data that described data acquisition system returns in the fixed time:
Described expired times are added 1 handle, and carry out and describedly judge that expired times are whether greater than the step of predetermined number of times.
For achieving the above object, the present invention also provides a kind of semiconductor technology monitoring device, comprising: data acquisition system and backup monitoring system, wherein:
Described data acquisition system is used for the process data of collection semiconductor technical process and returns the monitoring reply data to described backup monitoring system;
Described backup monitoring system comprises:
Sending module is used for sending backup monitoring request msg in setting-up time inbound data acquisition system;
Enquiry module is used for whether receiving the monitoring reply data that described data acquisition system is returned in the inquiry fixed time;
Generation module, be used for if described enquiry module inquires and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, generate data acquisition system information out of service, the prompting user selects to back up monitoring system and continues the collection process data;
Data collection module is used for the collection process data.
Further, described backup monitoring system also comprises:
First judge module, be used for judging that the fill order of user's input continues the monitoring order or stops the monitoring order for selecting the backup monitoring system, continue the monitoring order if described first judge module is judged described fill order for selecting the backup monitoring system, then trigger described data collection module and continue the collection process data.
Further, described backup monitoring system also comprises:
The expiry notification module, being used for if described first judge module is judged described fill order is the described monitoring order that stops, send expiry notification to described sending module, stop to send backup monitoring request msg to described data acquisition system to notify described sending module.
Further, described backup detecting/monitoring system also comprises:
Dump block is used for that expired times are carried out zero clearing and handles, and described expired times are for carrying out the number of times that whether receives the monitoring reply data that described data acquisition system returns in the inquiry fixed time.
Further, described backup monitoring system also comprises:
Second judge module, be used for if described enquiry module inquires and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, judge that whether described expired times are greater than predetermined number of times, if judge described expired times greater than described predetermined number of times, trigger described generation module and generate data acquisition system information out of service.
Further, if described second judge module is judged expired times and is less than or equal to predetermined number of times, send backup monitoring request msg by described sending module to data acquisition system.
Further, described backup monitoring system also comprises:
Accumulator module, be used for if described enquiry module inquires and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, described expired times are added 1 handle, and judge that by described second judge module whether expired times are greater than predetermined number of times.
The present invention has following beneficial effect:
In the technical scheme provided by the invention, when inquiring the information out of service that generates the reminder-data acquisition system after not receiving the monitoring reply data that data acquisition system returns in the fixed time, the prompting user selects to back up monitoring system and continues the collection process data, thus the situation of effectively having avoided the process data in the technical process not gathered.
Description of drawings
The flow chart of a kind of semiconductor technology monitoring method that Fig. 1 provides for the embodiment of the invention one;
The flow chart of a kind of semiconductor technology monitoring method that Fig. 2 provides for the embodiment of the invention two;
The structural representation of a kind of semiconductor technology monitoring device that Fig. 3 provides for the embodiment of the invention three;
The structural representation of a kind of semiconductor technology monitoring device that Fig. 4 provides for the embodiment of the invention four.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, below in conjunction with accompanying drawing semiconductor technology monitoring method provided by the invention and semiconductor technology monitoring device are described in detail.
The flow chart of a kind of semiconductor technology monitoring method that Fig. 1 provides for the embodiment of the invention one, as shown in Figure 1, this method comprises:
For example: this backup monitoring request msg can be ordered for ping.In actual applications, can carry out self-defined to backup monitoring request msg as required.
Whether receive the monitoring reply data that data acquisition system is returned in the inquiry fixed time, do not receive this monitoring reply data in the fixed time if inquire, generate data acquisition system information out of service.Wherein, do not receive this monitoring reply data in the fixed time if inquire, show that this data acquisition system is out of service, can not the collection technology data.At this moment, can directly generate data acquisition system information out of service, this information can point out the user to select to back up monitoring system continuation collection process data.Wherein, data acquisition system out of service can comprise that data acquisition system withdraws from unusually or data acquisition system by the people for closing.
The semiconductor technology monitoring method that present embodiment provides comprises the process data by data acquisition system collection semiconductor technical process, send backup monitoring request msg in setting-up time inbound data acquisition system, do not receive the monitoring reply data that data acquisition system is returned in fixed time if inquire, generate data acquisition system information out of service, the prompting user selects to back up monitoring system and continues the collection process data.In the present embodiment when inquiring the information out of service that generates the reminder-data acquisition system after not receiving the monitoring reply data that data acquisition system returns in the fixed time, the prompting user selects to back up monitoring system and continues the collection process data, thus the situation of effectively having avoided the process data in the technical process not gathered.
The flow chart of a kind of semiconductor technology monitoring method that Fig. 2 provides for the embodiment of the invention two, as shown in Figure 2, this method comprises:
Each step can be carried out by the semiconductor technology monitoring device in the present embodiment.Wherein, setting-up time can set in advance as required.
In the present embodiment, can send backup monitoring request msg to data acquisition system by the Inter-Process Communication technology, for example: this Inter-Process Communication technology can comprise socket technology or Remoting technology.
Whether step 203, inquiry receive the monitoring reply data that data acquisition system is returned in the fixed time, and if not, then execution in step 204; If then execution in step 209.
If inquire and receive the monitoring reply data that data acquisition system is returned in the fixed time, show that data acquisition system normally moves, can the collection technology data, then continue execution in step 209; Do not receive the monitoring reply data that data acquisition system is returned in fixed time if inquire, show that this data acquisition system might be out of service, whether this data acquisition system is out of service particularly also will further determine by subsequent step, therefore continues execution in step 204.
In the present embodiment, after every execution one query goes out not receive in the fixed time monitoring reply data that data acquisition system returns, expired times are added 1 handle, with the record expired times.The initial value of expired times can be set to 0, when inquire first do not receive the monitoring reply data that data acquisition system returns in the fixed time after, expired times are added 1 handle so that the value of expired times is 1, the rest may be inferred.
In the present embodiment, do not receive the monitoring reply data that data acquisition system is returned in the fixed time if inquire in the step 203, expression is replied overtime, then needs further execution in step 205.Wherein, predetermined number of times can set in advance as required.If judge expired times greater than predetermined number of times, show in predetermined number of times time query script all not receive the monitoring reply data that data acquisition system is returned, the specified data acquisition system is out of service, can not the collection technology data, thus continue execution in step 206; If judging expired times is less than or equal to predetermined number of times, execution in step 201, thus begin to carry out the step that next time sends backup monitoring request msg to data acquisition system.
In the present embodiment, this information can play to the effect out of service of user prompt data acquisition system, and this information can point out the user to select to back up monitoring system continuation collection process data.For example: information can comprise warning (alarm) information, light beacon information and/or buzzing information.Wherein, warning message can show in user interface, and lighting beacon information, can to control beacon shinny, and buzzing information can be controlled buzzer and send buzzing.The user sees warning message in user interface, when seeing that beacon is shinny and/or hearing that buzzer sends buzzing, know that data acquisition system is out of service.
The fill order of step 207, judgement user input continues to monitor order for selecting the backup monitoring system as if judging fill order for selecting backup monitoring system continuation monitoring order or stopping the monitoring order, and then execution in step 208; If judge fill order for stopping the monitoring order, then execution in step 210.Fill order is that the user imports according to information.
The user under the prompting of information, that is: know that by information data acquisition system is out of service after, can be on user interface to the monitoring device input fill order of data acquisition system.If fill order backs up monitoring system continuation monitoring order for selecting, show that then the user sets by the observation process of backup monitoring system continuation execution to the data acquisition system; If fill order shows then that for stopping the monitoring order user sets the observation process that stops the data acquisition system.Further, fill order can also be set to other order as required, selects for the user.
In the present embodiment, the monitoring device of data acquisition system sends backup monitoring request msg in setting-up time inbound data acquisition system, but receive user's input stop to stop to send backup monitoring request msg to data acquisition system after the monitoring order.
In the method that present embodiment provides, the information that generates can make the user know the situation that data acquisition system is out of service timely and point out the user to select to back up monitoring system continuation collection process data, avoided the user can't in time know the situation that data acquisition system is out of service, thereby effectively avoided under the unwitting situation of user, the situation that process data is not gathered occurring; In the method that present embodiment provides, can select to continue monitoring or stop monitoring by the backup monitoring system according to the fill order of user's input, thereby improve the flexibility ratio that scheme is carried out; The method that present embodiment provides is controlled expired times by predetermined number of times, can realize repeating the step that whether receives the monitoring reply data in the inquiry fixed time, inquire the probability that receives the monitoring reply data thereby increased, the method by overtime monitoring makes the result of monitoring more accurate.
Alternatively, can also the direct-execution system default action after step 206 generates information among the embodiment two.Particularly, direct execution in step 209 after the step 206, this moment, system default was operating as backup monitoring system continuation collection process data; Perhaps direct execution in step 210 after the step 206, system default is operating as and stops the data acquisition system is monitored at this moment.In such cases, information can play to the effect out of service of user prompt data acquisition system.
The structural representation of a kind of semiconductor technology monitoring device that Fig. 3 provides for the embodiment of the invention three, as shown in Figure 3, this device comprises data acquisition system 2 and backup monitoring system 1, data acquisition system 2 is used for the process data of collection semiconductor technical process and returns the monitoring reply data to backup monitoring system 1, and the backup monitoring system comprises: sending module 11, enquiry module 12, generation module 13 and data collection module 14.
Sending module 11 is used for sending backup monitoring request msg in setting-up time inbound data acquisition system.Enquiry module 12 is used for whether receiving the monitoring reply data that data acquisition system is returned in the inquiry fixed time.Generation module 13 is used for generating data acquisition system information out of service if enquiry module 12 inquires and do not receive the monitoring reply data that data acquisition system is returned in the fixed time, and the prompting user selects to back up monitoring system and continues the collection process data.Data collection module 14 is used for the collection process data.
The monitoring device of the data acquisition system that present embodiment provides comprises sending module, enquiry module, generation module and data collection module, sending module is used for sending backup monitoring request msg to data acquisition system, enquiry module is used for whether receiving the monitoring reply data that described data acquisition system is returned in the inquiry fixed time, generation module is used for not receiving the monitoring reply data generation data acquisition system information out of service that described data acquisition system is returned in the fixed time if inquire, the prompting user selects to back up monitoring system and continues the collection process data, and data collection module is used for the collection process data.Semiconductor technology monitoring device in the present embodiment generates reminder-data acquisition system information out of service when inquiring after not receiving the monitoring reply data that data acquisition system returns in the fixed time, the prompting user selects to back up monitoring system and continues the collection process data, thus the situation of effectively having avoided the process data in the technical process not gathered.
The structural representation of a kind of semiconductor technology monitoring device that Fig. 4 provides for the embodiment of the invention four, as shown in Figure 4, this installs on the basis of above-described embodiment one, and the backup monitoring system further can also comprise: first judge module 15.First judge module 15 is used for judging that the fill order of user's input continues the monitoring order or stops the monitoring order for selecting backup, continue the monitoring order if first judge module 15 is judged fill order for selecting backup, then trigger data collection module 14 continues the collection process data.Fill order is that the user imports according to described information.
Further, this backup monitoring system can also comprise: expiry notification module 16.Expiry notification module 16 is used for sending expiry notification if first judge module 15 is judged fill order for stopping the monitoring order to sending module 11, stops to send backup monitoring request msg to data acquisition system with notice sending module 11.
Further, this backup monitoring system can also comprise: dump block 17.Dump block 17 is used for that expired times are carried out zero clearing to be handled, and expired times are for carrying out the number of times that whether receives the monitoring reply data that described data acquisition system returns in the inquiry fixed time.Dump block 17 specifically can be used for expired times being carried out zero clearing handling if enquiry module 12 inquires and receives the monitoring reply data that data acquisition system is returned in the fixed time, and passes through the process data of data acquisition system collection semiconductor technical process; Perhaps, dump block 17 specifically can be used for continuing the monitoring order if first judge module 15 is judged fill order for selecting the backup monitoring system, and trigger data collection module 14 continues the collection process data.
Further, this backup monitoring system can also comprise: second judge module 18.Second judge module 18 is used for if enquiry module 12 inquires and do not receive the monitoring reply data that data acquisition system is returned in the fixed time, judge that whether expired times are greater than predetermined number of times, if judge expired times greater than predetermined number of times, trigger generation module 13 and generate data acquisition system information out of service.Further, if second judge module 18 is judged expired times and is less than or equal to predetermined number of times, send backup monitoring request msg by sending module 11 to data acquisition system.
Further, this backup monitoring system can also also comprise: accumulator module 19.Accumulator module 19 is used for expired times being added 1 handling, and judge that by second judge module 18 whether expired times are greater than predetermined number of times if enquiry module 12 inquires and do not receive the monitoring reply data that data acquisition system 1 is returned in the fixed time.
The information that the device that present embodiment provides generates can make the user know the situation that data acquisition system is out of service timely, avoided the user can't in time know the situation that data acquisition system is out of service, and point out the user to select to back up monitoring system and continue the collection process data, thereby effectively avoided under the unwitting situation of user, the situation that process data is not gathered occurring; The device that present embodiment provides can be selected to be continued monitoring or stopped monitoring by the backup monitoring system according to the fill order of user's input, thereby has improved the flexibility ratio that scheme is carried out; The device that present embodiment provides is controlled expired times by predetermined number of times, can realize repeating the step that whether receives the monitoring reply data in the inquiry fixed time, inquire the probability that receives the monitoring reply data thereby increased, the method by overtime monitoring makes the result of monitoring more accurate.
Be understandable that above execution mode only is the illustrative embodiments that adopts for principle of the present invention is described, yet the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement also are considered as protection scope of the present invention.
Claims (14)
1. a semiconductor technology monitoring method is characterized in that, comprises the following steps:
Process data by data acquisition system collection semiconductor technical process;
In setting-up time, send backup monitoring request msg to described data acquisition system;
If inquire and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, then generate data acquisition system information out of service, the prompting user selects to back up monitoring system and continues the collection process data.
2. semiconductor technology monitoring method according to claim 1 is characterized in that, generates described information and also comprises afterwards:
The fill order of judging user's input continues the monitoring order or stops the monitoring order for selecting the backup monitoring system, continues the monitoring order if judge described fill order for selecting the backup monitoring system, continues the collection process data by the backup monitoring system.
3. semiconductor technology monitoring method according to claim 2 is characterized in that, is the described monitoring order that stops if judging described fill order, stops to described data acquisition system transmitting supervisory request msg.
4. semiconductor technology monitoring method according to claim 1 and 2, it is characterized in that, also comprise before the described process data by data acquisition system collection semiconductor technical process: expired times are carried out zero clearing handle, described expired times are for carrying out the number of times that whether receives the monitoring reply data that described data acquisition system returns in the inquiry fixed time.
5. semiconductor technology monitoring method according to claim 4 is characterized in that, does not receive the monitoring reply data that described data acquisition system is returned in the fixed time if inquire, and expression is replied overtime, also needs further execution:
Judge that whether described expired times are greater than predetermined number of times;
If judge described expired times greater than described predetermined number of times, carry out the step of described generation data acquisition system information out of service.
6. semiconductor technology monitoring method according to claim 5 is characterized in that, if judging expired times is less than or equal to predetermined number of times, carries out the described step of passing through the process data of data acquisition system collection semiconductor technical process.
7. semiconductor technology monitoring method according to claim 5 is characterized in that, described inquiring also comprises after not receiving the monitoring reply data that described data acquisition system returns in the fixed time:
Described expired times are added 1 handle, and carry out and describedly judge that expired times are whether greater than the step of predetermined number of times.
8. a semiconductor technology monitoring device is characterized in that, comprising: data acquisition system and backup monitoring system, wherein:
Described data acquisition system is used for the process data of collection semiconductor technical process and returns the monitoring reply data to described backup monitoring system;
Described backup monitoring system comprises:
Sending module is used for sending backup monitoring request msg in setting-up time inbound data acquisition system;
Enquiry module is used for whether receiving the monitoring reply data that described data acquisition system is returned in the inquiry fixed time;
Generation module, be used for if described enquiry module inquires and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, generate data acquisition system information out of service, the prompting user selects to back up monitoring system and continues the collection process data;
Data collection module is used for the collection process data.
9. semiconductor technology monitoring device according to claim 8 is characterized in that, described backup monitoring system also comprises:
First judge module, be used for judging that the fill order of user's input continues the monitoring order or stops the monitoring order for selecting the backup monitoring system, continue the monitoring order if described first judge module is judged described fill order for selecting the backup monitoring system, then trigger described data collection module and continue the collection process data.
10. semiconductor technology monitoring device according to claim 9 is characterized in that, described backup monitoring system also comprises:
The expiry notification module, being used for if described first judge module is judged described fill order is the described monitoring order that stops, send expiry notification to described sending module, stop to send backup monitoring request msg to described data acquisition system to notify described sending module.
11. according to Claim 8 or 9 described semiconductor technology monitoring devices, it is characterized in that described backup detecting/monitoring system also comprises:
Dump block is used for that expired times are carried out zero clearing and handles, and described expired times are for carrying out the number of times that whether receives the monitoring reply data that described data acquisition system returns in the inquiry fixed time.
12. semiconductor technology monitoring device according to claim 9 is characterized in that, described backup monitoring system also comprises:
Second judge module, be used for if described enquiry module inquires and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, judge that whether described expired times are greater than predetermined number of times, if judge described expired times greater than described predetermined number of times, trigger described generation module and generate data acquisition system information out of service.
13. semiconductor technology monitoring device according to claim 12 is characterized in that, if described second judge module is judged expired times and is less than or equal to predetermined number of times, sends backup monitoring request msg by described sending module to data acquisition system.
14. semiconductor technology monitoring device according to claim 10 is characterized in that, described backup monitoring system also comprises:
Accumulator module, be used for if described enquiry module inquires and do not receive the monitoring reply data that described data acquisition system is returned in the fixed time, described expired times are added 1 handle, and judge that by described second judge module whether expired times are greater than predetermined number of times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110453589.7A CN103187332B (en) | 2011-12-29 | 2011-12-29 | Semiconductor technology monitoring method and semiconductor technology monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110453589.7A CN103187332B (en) | 2011-12-29 | 2011-12-29 | Semiconductor technology monitoring method and semiconductor technology monitoring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103187332A true CN103187332A (en) | 2013-07-03 |
| CN103187332B CN103187332B (en) | 2015-12-09 |
Family
ID=48678430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110453589.7A Active CN103187332B (en) | 2011-12-29 | 2011-12-29 | Semiconductor technology monitoring method and semiconductor technology monitoring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103187332B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103794024A (en) * | 2014-02-20 | 2014-05-14 | 北京七星华创电子股份有限公司 | Alarm processing method of semiconductor technology |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060106921A1 (en) * | 2004-11-15 | 2006-05-18 | Tech Semiconductor Singapore Pte. Ltd. | Method for data collection during manufacturing processes |
| CN1795422A (en) * | 2003-05-30 | 2006-06-28 | 东京毅力科创株式会社 | Method for data pre-population |
-
2011
- 2011-12-29 CN CN201110453589.7A patent/CN103187332B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1795422A (en) * | 2003-05-30 | 2006-06-28 | 东京毅力科创株式会社 | Method for data pre-population |
| US20060106921A1 (en) * | 2004-11-15 | 2006-05-18 | Tech Semiconductor Singapore Pte. Ltd. | Method for data collection during manufacturing processes |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103794024A (en) * | 2014-02-20 | 2014-05-14 | 北京七星华创电子股份有限公司 | Alarm processing method of semiconductor technology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103187332B (en) | 2015-12-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112612675B (en) | Distributed big data log link tracking method and system under micro-service architecture | |
| CN102929773B (en) | information collecting method and device | |
| CN110581773A (en) | automatic service monitoring and alarm management system | |
| CN110888783A (en) | Monitoring method and device of micro-service system and electronic equipment | |
| CN106034051B (en) | Network monitoring data processing method and network monitoring data processing unit | |
| CN102694871A (en) | Server long-distance monitoring and fault processing device and method based on short message of mobile phone | |
| CN110169016A (en) | Handle method, control node, network element and the system of network event in telecommunication network | |
| CN104022904A (en) | Unified management platform for IT devices in distributed computer rooms | |
| CN104486109A (en) | Fault detection and recovery methods and devices | |
| CN101877618A (en) | Monitoring method, server and system based on proxy-free mode | |
| CN110765189A (en) | Exception management method and system for Internet products | |
| CN112835792B (en) | Pressure testing system and method | |
| CN112994972B (en) | Distributed probe monitoring platform | |
| CN103763127A (en) | Device state alarm monitoring method and system | |
| CN108092847A (en) | A kind of electric power LTE wireless terminal remote on-line monitoring methods | |
| CN112134754A (en) | Pressure testing method and device, network equipment and storage medium | |
| CN111625419A (en) | Log acquisition method, system, equipment and computer readable storage medium | |
| CN107204868B (en) | Task operation monitoring information acquisition method and device | |
| CN103701657A (en) | Device and method for monitoring and processing dysfunction of continuously running data processing system | |
| CN101252477A (en) | Determining method and analyzing apparatus of network fault root | |
| CN103187332A (en) | Semiconductor technology monitoring method and semiconductor technology monitoring device | |
| CN108989116B (en) | Big data collection and analysis system and method | |
| CN105703942B (en) | Log collection method and device | |
| CN109526045A (en) | A kind of boiler information tracing method and device for Design of Intelligent Workshop | |
| CN101917699B (en) | Random reported signaling tracking method and device based on users |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |