CN103793437A - Wafer test data processing method and system - Google Patents
Wafer test data processing method and system Download PDFInfo
- Publication number
- CN103793437A CN103793437A CN201210433640.2A CN201210433640A CN103793437A CN 103793437 A CN103793437 A CN 103793437A CN 201210433640 A CN201210433640 A CN 201210433640A CN 103793437 A CN103793437 A CN 103793437A
- Authority
- CN
- China
- Prior art keywords
- information
- test data
- data
- form test
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F11/00—Error detection; Error correction; Monitoring
- G06F11/22—Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
- G06F11/2268—Logging of test results
Abstract
The invention discloses a wafer test data processing method and system. The method includes steps of 1, testing wafers through a machine, and acquiring text format testing data; 2, extracting the text format testing data, and converting into XML format testing data; 3, performing multiple address storage on the converted XML format testing data. According to the method, data arrangement and classifying are performed on the text format testing data acquired by the system, and the text format testing data are converted into superimposed and nested XML format testing data, so that multiple information can be extracted in a separated manner, international factory requirements can be met, and data can be prevented from being stored in other formats; meanwhile, according to architecture design of XML format data, format remains consistently, processing efficiency is high, the architecture design can be applied in other systems and methods, data analysis is facilitated, and factory production requirements and future test scalability can be met.
Description
Technical field
The present invention relates to semiconductor test technical field, particularly relate to a kind of wafer sort data processing method and system thereof.
Background technology
Wafer sort data of the prior art are that a line a line is arranged line by line, and what only need to adopt that Reading text mode carries out order to form below reads and store data.At present, to the reading only on Lucent test macro of data, WINDOWS system there is no efficient reading manner, when data volume is large, reads very slow.With regard to current situation, very unfavorable to data analysis.Existing technology can be carried out reading of data to above-mentioned form, but special format can't realize, so it is very urgent to change the status quo.The data of class text form are generated in the time testing automatically by unix environment Lucent test macro, are also the functions that test macro carries, and can not meet the growing shared needs of multisystem multi-data source.
Extend markup language (Extensible Markup Language, XML), make it have structural markup language for electroactive marker son file, can be used for flag data, definition data type, it is the source language that a kind of user of permission defines the markup language of oneself, XML is the subset of standard generalized markup language (SGML), be applicable to very much Web transmission, and XML can provide unified method to describe and exchange the structural data that is independent of application program or supplier.
Therefore,, for above-mentioned technical matters, be necessary to provide a kind of wafer sort data processing method and system thereof.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of wafer sort data processing method and system thereof, it can realize the format conversion of test data.
To achieve these goals, the technical scheme that the embodiment of the present invention provides is as follows:
A kind of wafer sort data processing method, said method comprising the steps of:
S1, board are tested successively to wafer, obtain class text form test data;
S2, extraction class text form test data, and convert XML form test data to;
S3, by conversion after XML form test data carry out multiaddress storage.
As a further improvement on the present invention, the XML form test data in described step S2 comprises that test obtains LOT information, WAFER information and the SITE information in class text form test data.
As a further improvement on the present invention, described step S2 is specially:
Document information in S21, extraction class text form test data;
LOT information in S22, extraction class text form test data, and be nested under document information node;
WAFER information in S23, extraction class text form test data, and be nested under LOT information node;
SITE information in S24, extraction class text form test data, and be nested under WAFER information node;
Test number in S25, extraction class text form test data, and be nested under SITE information node.
As a further improvement on the present invention, described LOT information comprises lot number information, and ProductName information measures temporal information, factory's name information, authority file information, technique name information, implementor name information, operating personnel's information; Described WAFER information comprises that sheet counts information, the information of counting, number of parameters information, start time information, end time information, test duration information, qualified information, inefficacy item No. information; Described SITE information comprises period information, dotted state, X coordinate information, Y coordinate information.
As a further improvement on the present invention, described step S2 also comprises:
Irrelevant information in ignore class text formatting test data, described irrelevant information comprises store path, data bound.
The XML form test data of storing in described step S3 as a further improvement on the present invention, comprises data for backing up, for the data that use in system with for the outer data that use of system.
Correspondingly, a kind of wafer sort data handling system, described system comprises:
Test module, for wafer is tested successively, obtains class text form test data;
Modular converter, becomes XML form test data for extracting class text form test data conversion;
Memory module, for carrying out multiaddress storage by the XML form test data after conversion.
As a further improvement on the present invention, the XML form test data obtaining in described modular converter comprises LOT information, WAFER information and the SITE information of class text test data in test module.
As a further improvement on the present invention, the XML form test data obtaining in described modular converter comprises:
Document information;
Be nested in the LOT information under document information node;
Be nested in the WAFER information under LOT information node;
Be nested in the SITE information under WAFER information node;
Be nested in the test number under SITE information node.
As a further improvement on the present invention, described LOT information comprises lot number information, and ProductName information measures temporal information, factory's name information, authority file information, technique name information, implementor name information, operating personnel's information; Described WAFER information comprises that sheet counts information, the information of counting, number of parameters information, start time information, end time information, test duration information, qualified information, inefficacy item No. information; Described SITE information comprises period information, dotted state, X coordinate information, Y coordinate information.
The invention has the beneficial effects as follows: the present invention carries out data preparation and classification by the class text test data that system is obtained, convert the nested XML form test data of stack to, can realize multiple information and carry out separation and Extraction, be applicable to international factory, without the data at other form of storage, simultaneously, the architecture design of XML formatted data, form is consistent, treatment effeciency is high, can be used in other system and instrument, data analysis is more convenient, more meets Production requirement and following extensibility of testing in factory.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, the accompanying drawing the following describes is only some embodiment that record in the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the particular flow sheet of wafer sort data processing method in an embodiment of the present invention;
Fig. 2 is the XML form test data schematic diagram after conversion in an embodiment of the present invention;
Fig. 3 is the module diagram of wafer sort data handling system in an embodiment of the present invention.
Embodiment
In order to make those skilled in the art person understand better the technical scheme in the present invention, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, should belong to the scope of protection of the invention.
Shown in ginseng Fig. 1, a kind of wafer sort data processing method of the present invention, comprises the following steps:
S1, board are tested successively to wafer, obtain class text form test data:
Join following table 1 and be depicted as the class text form test data of obtaining in an embodiment of the present invention, class text formatted data letter amount is very large, comprise the information such as CODE, LOT, sheet number, board, store path, temperature, the large class of technique, operator name, SPEC bound, every point value, but these information mix, in the time that needs are processed in test data a certain data, need to from whole class text form test data, search for, extract corresponding data, because test data information is very large, so data-handling efficiency is very low.
Table 1: class text form test data
S2, extraction class text form test data, and convert XML form test data to, preferably, the XML form test data in present embodiment comprises that test obtains LOT information, WAFER information and the SITE information in class text form test data.
Extend markup language (Extensible Markup Language, XML), making it have structural markup language for electroactive marker son file, can be used for flag data, definition data type, is the source language that a kind of user of permission defines the markup language of oneself.XML is the subset of standard generalized markup language (SGML), is applicable to very much Web transmission, and XML provides unified method to describe and exchange the structural data that is independent of application program or supplier.
In XML, adopt following grammer:
Any start-tag all must have an end-tag;
Can adopt another kind of reduced grammar, can in a label, represent starting and ending label simultaneously.This grammer is for example, immediately following an oblique line (/), <tag/> before is-greater-than symbol.XML resolver can be translated into <tag></tagGreatT .GreaT.GT;
Label must be undertaken by suitable order nested, so end-tag must be by mirror image order coupling start-tag.This cans be compared to is regard starting and ending label as left and right bracket in mathematics: before there is no closeall inner bracket, be the bracket that can not close outside;
All characteristics all must have value;
All characteristics all must add double quotation marks around value.
In present embodiment, after class text form test data is arranged and classified, for all information, be categorized as 3 classes and carry out design integration, level stack is nested, comprising: LOT information, WAFER information and SITE information.
Consider the multiclass sample of test macro in the future, in order to adapt to long-term need of production, field is expanded reserved, increase the version (SpecfileVersion) of authority file newly, control pin card name (ProbeCard), responsible official (Owner), client codes (CustomerPartID), goods is criticized type (LotType), flat edge direction (FlatOrientation), standard (Criteria), to sheet failure sheet number (AlignFailID), start time (startTime), end time (endTime), qualified (WaferPass), inefficacy item No. (Fail_ItemID), (SiteCount) counts, the information such as dotted state (SiteStatus).
S3, by conversion after XML form test data carry out multiaddress storage.In present embodiment, XML form test data divides 3 addresses to store, and is respectively data for backing up, for the data that use in system with for the outer data that use of system.
Wherein, in step S2, data-switching is specially:
Document information in S21, extraction class text form test data;
LOT information in S22, extraction class text form test data, and be nested under document information node;
WAFER information in S23, extraction class text form test data, and be nested under LOT information node;
SITE information in S24, extraction class text form test data, and be nested under WAFER information node;
Test number in S25, extraction class text form test data, and be nested under SITE information node.
For the irrelevant information in original class text form test data, while conversion as store path, data bound etc., ignore and do not carry out collecting data.
Shown in ginseng Fig. 2, in the present invention's one preferred implementation, test data final field information is after treatment as follows:
ADB_DOCUMENT: record document information;
ETEST_LOT_RUN: record LOT information.As: lot number (Lot), ProductName (Product), measurement time (MeasureTime), factory's name (Fab), authority file (Limitfile), technique name (Technology), implementor name (Equipment), operating personnel (Operator) etc.;
ETEST_WAFER_RUN: record WAFER information.As: sheet number (WaferNumber), count (SiteCount), number of parameters (ParameterCount), start time (startTime), end time (endTime), test duration (testTime), qualified (WaferPass), inefficacy item No. (Fail_ItemID) etc.;
SITE: record SITE information.As: period (SiteID), dotted state (SiteStatus), X coordinate (SiteX), Y coordinate (SiteY) etc.;
T: the test number that records every value.
Correspondingly, shown in ginseng Fig. 3, a kind of wafer sort data handling system of the present invention, comprising:
Wherein, shown in ginseng Fig. 2, the XML form test data obtaining in modular converter 20 comprises:
Document information;
Be nested in the LOT information under document information node;
Be nested in the WAFER information under LOT information node;
Be nested in the SITE information under WAFER information node;
Be nested in the test number under SITE information node.
In the time of read test data, carry out entering of node one by one according to the type of structure in Fig. 2, and carry out the extraction of individual node multielement information.
Class text form test data in the past can only be carried out order and be read, and the form that the present invention reads any information is all fixing locations of structures, even if data volume is large again, also can not affect the speed reading, and takes out all very convenient of any information.
The present invention realizes real-time data-switching under unix environment, in the time carrying out wafer sort, often test a slice data, automatically operation formula is carried out data-switching, the operation of conversion formula has a trigger point, this triggering is implanted to original test macro, carries out format conversion as long as test achievement triggering.After converting, the storage of data multiaddress be will carry out, data crawl and data file backup use carried out for each Database Systems.The action that each analytic system captures and deletes data is to discharge more storage space, and each link staples together, indispensable.
Can be found out by technique scheme, the present invention carries out data preparation and classification by the class text test data that system is obtained, convert the nested XML form test data of stack to, can realize multiple information and carry out separation and Extraction, be applicable to international factory, without the data at other form of storage, simultaneously, the architecture design of XML formatted data, form is consistent, and treatment effeciency is high, can be used in other system and instrument, data analysis is more convenient, more meets Production requirement and following extensibility of testing in factory.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and in the situation that not deviating from spirit of the present invention or essential characteristic, can realize the present invention with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, is therefore intended to all changes that drop in the implication and the scope that are equal to important document of claim to include in the present invention.Any Reference numeral in claim should be considered as limiting related claim.
In addition, be to be understood that, although this instructions is described according to embodiment, but be not that each embodiment only comprises an independently technical scheme, this narrating mode of instructions is only for clarity sake, those skilled in the art should make instructions as a whole, and the technical scheme in each embodiment also can, through appropriately combined, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (10)
1. a wafer sort data processing method, is characterized in that, said method comprising the steps of:
S1, board are tested successively to wafer, obtain class text form test data;
S2, extraction class text form test data, and convert XML form test data to;
S3, by conversion after XML form test data carry out multiaddress storage.
2. method according to claim 1, is characterized in that, the XML form test data in described step S2 comprises that test obtains LOT information, WAFER information and the SITE information in class text form test data.
3. method according to claim 2, is characterized in that, described step S2 is specially:
Document information in S21, extraction class text form test data;
LOT information in S22, extraction class text form test data, and be nested under document information node;
WAFER information in S23, extraction class text form test data, and be nested under LOT information node;
SITE information in S24, extraction class text form test data, and be nested under WAFER information node;
Test number in S25, extraction class text form test data, and be nested under SITE information node.
4. method according to claim 2, is characterized in that, described LOT information comprises lot number information, and ProductName information measures temporal information, factory's name information, authority file information, technique name information, implementor name information, operating personnel's information; Described WAFER information comprises that sheet counts information, the information of counting, number of parameters information, start time information, end time information, test duration information, qualified information, inefficacy item No. information; Described SITE information comprises period information, dotted state, X coordinate information, Y coordinate information.
5. method according to claim 3, is characterized in that, described step S2 also comprises:
Irrelevant information in ignore class text formatting test data, described irrelevant information comprises store path, data bound.
6. method according to claim 1, is characterized in that, the XML form test data of storing in described step S3 comprises data for backing up, for the data that use in system with for the outer data that use of system.
7. a wafer sort data handling system as claimed in claim 1, is characterized in that, described system comprises:
Test module, for wafer is tested successively, obtains class text form test data;
Modular converter, becomes XML form test data for extracting class text form test data conversion;
Memory module, for carrying out multiaddress storage by the XML form test data after conversion.
8. system according to claim 7, is characterized in that, the XML form test data obtaining in described modular converter comprises LOT information, WAFER information and the SITE information of class text test data in test module.
9. system according to claim 8, is characterized in that, the XML form test data obtaining in described modular converter comprises:
Document information;
Be nested in the LOT information under document information node;
Be nested in the WAFER information under LOT information node;
Be nested in the SITE information under WAFER information node;
Be nested in the test number under SITE information node.
10. system according to claim 8, is characterized in that, described LOT information comprises lot number information, and ProductName information measures temporal information, factory's name information, authority file information, technique name information, implementor name information, operating personnel's information; Described WAFER information comprises that sheet counts information, the information of counting, number of parameters information, start time information, end time information, test duration information, qualified information, inefficacy item No. information; Described SITE information comprises period information, dotted state, X coordinate information, Y coordinate information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210433640.2A CN103793437A (en) | 2012-11-01 | 2012-11-01 | Wafer test data processing method and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210433640.2A CN103793437A (en) | 2012-11-01 | 2012-11-01 | Wafer test data processing method and system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103793437A true CN103793437A (en) | 2014-05-14 |
Family
ID=50669115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210433640.2A Pending CN103793437A (en) | 2012-11-01 | 2012-11-01 | Wafer test data processing method and system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103793437A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105574039A (en) * | 2014-10-16 | 2016-05-11 | 中芯国际集成电路制造(上海)有限公司 | Wafer test data processing method and system |
| CN106126511A (en) * | 2015-12-30 | 2016-11-16 | 宁夏巨能机器人系统有限公司 | A kind of data base management system for intelligence production line and data managing method thereof |
| CN110175129A (en) * | 2019-05-30 | 2019-08-27 | 立讯精密工业股份有限公司 | Test method and test macro |
| CN113297157A (en) * | 2020-02-24 | 2021-08-24 | 长鑫存储技术有限公司 | Machine file processing method and system |
| CN113393557A (en) * | 2021-05-31 | 2021-09-14 | 深圳米飞泰克科技有限公司 | Wafer map file generation method, device, equipment and storage medium |
| CN113407531A (en) * | 2021-05-24 | 2021-09-17 | 芯天下技术股份有限公司 | Wafer test data analysis method, platform, electronic device and storage medium |
| CN116737482A (en) * | 2023-08-10 | 2023-09-12 | 上海孤波科技有限公司 | Method and device for collecting chip test data in real time and electronic equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1497473A (en) * | 2002-09-30 | 2004-05-19 | Metod and device for text structurng | |
| US20050015439A1 (en) * | 2003-07-15 | 2005-01-20 | Ekambaram Balaji | Flexible architecture component (FAC) for efficient data integration and information interchange using web services |
| US20070043762A1 (en) * | 2005-08-17 | 2007-02-22 | Texas Instruments Incorporated | Object-oriented system and method for transforming and loading wafer test data |
| CN102331967A (en) * | 2011-06-15 | 2012-01-25 | 烽火通信科技股份有限公司 | Method for managing chip verification test cases |
-
2012
- 2012-11-01 CN CN201210433640.2A patent/CN103793437A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1497473A (en) * | 2002-09-30 | 2004-05-19 | Metod and device for text structurng | |
| US20050015439A1 (en) * | 2003-07-15 | 2005-01-20 | Ekambaram Balaji | Flexible architecture component (FAC) for efficient data integration and information interchange using web services |
| US20070043762A1 (en) * | 2005-08-17 | 2007-02-22 | Texas Instruments Incorporated | Object-oriented system and method for transforming and loading wafer test data |
| CN102331967A (en) * | 2011-06-15 | 2012-01-25 | 烽火通信科技股份有限公司 | Method for managing chip verification test cases |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105574039A (en) * | 2014-10-16 | 2016-05-11 | 中芯国际集成电路制造(上海)有限公司 | Wafer test data processing method and system |
| CN105574039B (en) * | 2014-10-16 | 2019-05-24 | 中芯国际集成电路制造(上海)有限公司 | A kind of processing method and system of wafer test data |
| CN106126511A (en) * | 2015-12-30 | 2016-11-16 | 宁夏巨能机器人系统有限公司 | A kind of data base management system for intelligence production line and data managing method thereof |
| CN110175129A (en) * | 2019-05-30 | 2019-08-27 | 立讯精密工业股份有限公司 | Test method and test macro |
| CN113297157A (en) * | 2020-02-24 | 2021-08-24 | 长鑫存储技术有限公司 | Machine file processing method and system |
| WO2021169808A1 (en) * | 2020-02-24 | 2021-09-02 | 长鑫存储技术有限公司 | Machine file processing method and system |
| CN113407531A (en) * | 2021-05-24 | 2021-09-17 | 芯天下技术股份有限公司 | Wafer test data analysis method, platform, electronic device and storage medium |
| CN113407531B (en) * | 2021-05-24 | 2023-07-25 | 芯天下技术股份有限公司 | Wafer test data analysis method, platform, electronic equipment and storage medium |
| CN113393557A (en) * | 2021-05-31 | 2021-09-14 | 深圳米飞泰克科技有限公司 | Wafer map file generation method, device, equipment and storage medium |
| CN116737482A (en) * | 2023-08-10 | 2023-09-12 | 上海孤波科技有限公司 | Method and device for collecting chip test data in real time and electronic equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103793437A (en) | Wafer test data processing method and system | |
| CN103227779B (en) | A kind of communication control method of building equipment, system and device | |
| CN103944973A (en) | Method and device for collecting logs | |
| CN107423211A (en) | A kind of SDNS interfaces automatization test system and method | |
| CN106294222A (en) | A kind of method and device determining PCIE device and slot corresponding relation | |
| CN106547918B (en) | Statistical data integration method and system | |
| CN103095823A (en) | Object description method and object information interaction system in Internet of Things system | |
| CN108388640B (en) | Data conversion method and device and data processing system | |
| CN101944128A (en) | Data export and import method and device | |
| CN103178998A (en) | Test and control data transmission method and device | |
| CN103425585A (en) | OSGI (Open Service Gateway Initiative) integration testing method | |
| CN101309178B (en) | Parsing method and apparatus for automatic exchanging optical network systematic log information | |
| CN103002318A (en) | Automatic test method and automatic test system of digital television receiving terminal | |
| CN110769002A (en) | LabVIEW-based message analysis method, system, electronic device and medium | |
| CN105335516A (en) | Construction method of universal acquisition system | |
| CN101930362B (en) | Method for integrating TTCN language and data description language | |
| CN104678987A (en) | Voice interaction-based fault diagnosis method | |
| CN104298671A (en) | Data statistics analysis method and device | |
| CN101286879A (en) | System for displaying data acquired by base stations and displaying method of data acquired by base stations | |
| CN103164532A (en) | Classification and partitioning extract method of power grid model data and system | |
| CN107643968A (en) | Crash log processing method and processing device | |
| CN100432954C (en) | Inlaid system detection method and system | |
| CN109240926A (en) | A kind of software compatibility system safety testing device and method | |
| CN107506339B (en) | Character offset-based SCD node verification error positioning method and device | |
| CN114138789A (en) | Vehicle-mounted data acquisition method, related equipment and system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140514 |