CN103791826A - Aero-engine rotor electric drive assembly method and device based on capacitance sensing measurement - Google Patents
Aero-engine rotor electric drive assembly method and device based on capacitance sensing measurement Download PDFInfo
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Abstract
The invention discloses an aero-engine rotor electric drive assembly method and device based on capacitance sensing measurement and belongs to the mechanical assembly technology. According to a measuring method and device, rotation standards are determined based on an air and magnetism combined rotating shaft system; angle positioning of a rotary table is determined according to an inductosyn; based on the four-measuring-head measuring device, the radial error of the radial assembly faces of rotors and the tilt error of the axial assembly faces of the rotors are extracted, and the influence weights of the rotors on the coaxiality obtained after assembly of the rotors are obtained; all the rotors needed during assembly are measured respectively, and the influence weights of the rotors on the coaxiality obtained after assembly of the rotors are obtained; vector optimization is conducted on the weights of the rotors, and the assembly angles of the rotors are obtained. The aero-engine rotor electric drive assembly method and device based on capacitance sensing measurement can effectively solve the problem that the coaxiality obtained after assembly of the aero-engine rotors is low, and have the advantages that the coaxiality obtained after assembly of the aero-engine rotors is high, vibration is reduced, installation is easy, the flexibility ratio is high, and engine performance is improved.
Description
Technical field
The invention belongs to mechanical assembly technique, relate generally to a kind of aeroengine rotor electric drive assembly method and device of measuring based on capacitance sensing.
Background technology
Aeromotor assembling is the final tache in aeromotor manufacture process, is also one of of paramount importance manufacture link.Under existing Aeroengine Design scheme and process technology level conditions, the quality of assembling and work efficiency have material impact for quality, performance and the production efficiency of engine.So will improve as much as possible the right alignment of rotor after installing in assembling process, and then reduce the vibration of aeromotor, improve the performance of aeromotor.But, in reality is produced, the assembling of aeromotor is complete manual setting, the height of assembly precision and whether stablize the assembler's that places one's entire reliance upon operating experience and technical merit, lack a kind of method that high speed effectively instructs aeroengine rotor assembling, and then raising efficiency of assembling, reduce aeromotor vibration, improve the performance of aeromotor.
Along with aeromotor assembling measuring technology more and more comes into one's own, aeromotor assembling measuring technology more and more comes into one's own, and becomes the focus of research.Increasing researchist has carried out deep discussion for aeroengine rotor, and Rools-Royce proposes a kind of scheme (System and method for improving the damage tolerance of a rotor assembly.European Patent Publication No: EP2525049A2), main by each sub-test macro being obtained to the stress signal of the each position of rotor, main system is analyzed the signal of each subsystem collection, damage the impact of parameter analysis on assembling from the appearance of each rotor, and then improved the assembling of aeroengine rotor.The problem that the method exists is: do not analyze the geometric sense aspect of rotor to the impact of assembling, cannot improve the impact of geometric sense on assembling.
Xi'an Communications University proposes a kind of method for testing assembly performance of rotor of aircraft engine (a kind of method for testing assembly performance of rotor of aircraft engine.Publication number: CN101799354A).First the method adopts vibrator exciting aeroengine rotor, utilizes vibration transducer and signal acquiring system software to obtain the impulse response signal of the aeroengine rotor of a multicarrier coupling; Then the impulse response signal of the aeroengine rotor to obtained a multicarrier coupling adopts dual-tree complex wavelet transform method to analyze, and obtains the impulse response subsignal of the aeroengine rotor of eight single carriers; Finally the impulse response subsignal of the aeroengine rotor to eight obtained single carriers extracts average assembly performance index, if the average assembly performance desired value of gained is more than or equal to 10, judge that this aeroengine rotor assembling is qualified, if the mean value of gained is less than 10, judge defective, the rebuilding of need to doing over again.The problem that the method exists is: to aeroengine rotor, assembling is not instructed.
Luoxin Precision Parts (shanghai) Co., Ltd. proposes a kind of right alignment equipment (a kind of axiality measuring apparatus of measuring.Publication number: CN202024752U).This device comprises a pair of transmission main shaft being rotated by synchronizing linkage synchro control being arranged on apparatus subject, and this transmission main shaft the inner respectively correspondence is provided with measuring head and positioning reference plane; Between described measuring head, top, position has transducer probe assembly.It mainly solves the right alignment of existing precision component, the measurement of beating.The problem that the method exists is: only measure the right alignment of measured piece, do not solve the rear poor problem of right alignment of rotor assembling.
Liming Aeroplane Engine (Group) Co., Ltd., Shenyang City proposes a kind of gap measuring method (non-contact measuring method for leaf apex radial clearance of engine rotor.Publication number: CN102175135A).The method adopts capacitance measurement technology, and measuring process is as follows, first assembles measuring system, calibration sensor, determines the relation between blade tip radial play and voltage, then sensor is fixed on blade, finally measures engine rotor blade tip radial play.The problem that the method exists is: do not consider in rotor assembling process the impact after axially installed surface is on rotor assembling.
The tested object of aeromotor assembling is stators and rotor, and under the condition meeting the demands in component processing precision, final inspection is by the Determines after coordinating is installed, and the index of evaluation is mainly the right alignment parameter of rotor after assembling.Engine rotation produces high pressure, and its rotor is made up of multiple single parts of combining, ideal when the revolving shaft of each parts and the dead in line of whole engine.High Rotation Speed speed when high-performance enginer work is greater than 10000rpm, single part axially or radial beat will inevitably cause turbine disk misalignment engine rotation axis, under such condition, can produce very large centrifugal force, the imbalance that causes rotor to rotate, cause engine luggine, thereby guarantee that the right alignment after each parts assembling is the Focal point and difficult point of installing.
One does not use the Model Mounting of right alignment optimization method, axially and radially the beating because machining precision restriction exists of all parts, eccentric, inclination equal error.If directly assembled randomly, just may form the bending situation that is similar to " banana ", upper component has been accumulated bias or the droop error of all parts below, causes the beat of the rear entirety of assembling and tilts huge, cause the non-constant of engine rotor right alignment, be difficult to meet request for utilization.
At present, domestic engine assembly still adopts traditional assembly method, tests manually as main take clock gauge.According to assembled in sequence engine from top to bottom, to assemble parts and measure afterwards, the entirety of guaranteeing at every turn to increase after parts can meet the threshold condition of right alignment, and then another parts are upwards installed.All using previous parts as benchmark, finally require overall right alignment within the specific limits at every turn.This method expends a large amount of time, and the possibility of doing over again is large, efficiency and one-time success rate that very impact is installed, and once successfully assembling needs 4 to 5 days conventionally.And, because be not optimum assembling position, conventionally need dismounting 4 to 5 times, also need workman to assemble with rich experiences, each assembling all needs to experience hot-working and cold working.So current aeromotor assembly method installation effectiveness is low, be difficult for installing, and after assembling, right alignment is poor, affects engine performance.
Summary of the invention
The deficiency existing for above-mentioned prior art, a kind of aeroengine rotor electric drive assembly method and device of measuring based on capacitance sensing proposed, to solve the low problem of right alignment after aeroengine rotor assembling, reach right alignment after rotor assembling high, reduce vibration, be easy to install, flexibility ratio is high, the object of improving engine performance.
The object of the present invention is achieved like this:
An aeroengine rotor electric drive assembly method of measuring based on capacitance sensing, this measuring method step is as follows:
Measured rotor is positioned over to aligning to be adjusted on the worktable that inclines fixing; The axial capacitive transducer of measuring axial datum clamp face is measured to the axial datum clamp face of measured rotor, inclined for adjusting; Measure the radially radially capacitive transducer of datum clamp face and measure radially datum clamp face, for aligning; Revolution turntable adjusts the worktable that inclines to drive measured rotor at the uniform velocity to rotate with the speed of 6～10r/min through aligning, the axial capacitive transducer of measuring axial datum clamp face carries out equal interval sampling on the axial datum clamp face of measured rotor, measures the radially radially capacitive transducer of datum clamp face and carry out equal interval sampling on the radially datum clamp face of measured rotor; Sampling number should meet 1000～2000 points of every circle; Sampled data on the radially datum clamp face of measured rotor, by Least Square Circle matching, is assessed to offset, the axial datum clamp face up-sampling data of measured rotor, by least square plane matching, are assessed to tilt quantity; According to the size of offset and angle, regulate aligning to adjust the aligning knob of the worktable that inclines; According to the size of tilt quantity and angle, regulate aligning to adjust the tune of worktable of the inclining knob that inclines, until aligning adjusts size that the worktable that inclines meets radial reference face offset within the scope of 0～3 μ m, axially the size of reference field tilt quantity is 0～2 " in scope; The axial capacitive transducer of measuring the face that axially installs and measures is measured to the face that axially installs and measures of measured rotor, the radially capacitive transducer of measuring the face that radially installs and measures is measured the face that radially installs and measures of measured rotor; Revolution turntable at the uniform velocity rotates with the speed of 6～10r/min, measure the axial capacitive transducer that axially installs and measures face measured rotor axially install and measure equal interval sampling on face, the radially capacitive transducer of measuring the face that radially installs and measures is is radially installing and measuring equal interval sampling on face respectively; Sampling number should meet 1000～2000 points of every circle; By measure the radially capacitive transducer that radially installs and measures face in the data of the face that radially the installs and measures up-sampling of measured rotor by Least Square Circle matching and assess concentricity; By measure the axial capacitive transducer that axially installs and measures face in the data of the face that axially the installs and measures up-sampling of measured rotor by least square plane matching and assess verticality; Combined axis, to radius and this measured rotor and final difference in height of assembling rotor of the face of installing and measuring, obtains this rotor to assembling the weights that affect of rear rotor coaxial degree; Measure respectively the required whole rotors of assembling, obtain each rotor to assembling the weights that affect of rear rotor coaxial degree; Adopt genetic algorithm to carry out vector optimization the weights of each rotor, obtain the angle of assembling of each rotor, the account form that affects weights of rotor coaxial degree is:
in formula: C represents that measured rotor radially installs and measures the concentricity of face,
represent radially to install and measure the eccentric angle in the face matching center of circle, H represents measured rotor and final difference in height of assembling rotor, R represents the radius of the face that axially installs and measures, P represents that measured rotor axially installs and measures the verticality of face, and θ represents the angle at the fit Plane peak place of the face that axially installs and measures.
A kind of structure of the aeroengine rotor electric drive assembling device of measuring based on capacitance sensing is that rotary axis system is nested on pedestal center, described rotary axis system is by rotary main shaft, worktable, platen on revolving shaft, revolving shaft pressing disc, inductosyn scale, inductosyn slide rule, permanent magnet, coil, motor stator and rotor form, described worktable is configured on revolving shaft on platen upper end, on revolving shaft, platen is configured on rotary main shaft upper end, rotary main shaft is configured on revolving shaft pressing disc upper end, inductosyn slide rule is nested on revolving shaft pressing disc outer shroud, inductosyn scale fits over pedestal center lower inside admittedly, and be positioned at inductosyn slide rule top, permanent magnet is enclosed within on rotary main shaft outer shroud, and be fixed on revolving shaft pressing disc upper end, coil is enclosed within on rotary main shaft outer shroud, and be fixed on base interior, apart from 5-10cm place, permanent magnet top, rotor is nested on revolving shaft pressing disc outer shroud, and is positioned at inductosyn slide rule bottom, and motor stator fits over pedestal center lower inside admittedly, and is positioned at inductosyn scale bottom and rotor outside, aligning adjusts the worktable that inclines to be configured on rotary axis system center, and delta air chuck is configured in aligning tune and inclines on worktable center, left column and right column are symmetrically distributed in the both sides of rotary axis system and are packed on pedestal, on left column, be set with to removable adjusting successively from top to bottom upper left mast web member and lower-left mast web member, the horizontal measuring staff level in upper left is nested on the mast web member of upper left, the horizontal measuring staff in upper sensor adaptor and upper left is connected, and upper axial capacitive transducer and upper sensor adaptor are connected, the horizontal measuring staff level in lower-left is nested on the mast web member of lower-left, and the horizontal measuring staff in lower sensor adaptor and lower-left is connected, and lower axial capacitive transducer and lower sensor adaptor are connected, on right column, be set with to removable adjusting successively from top to bottom upper right mast web member and bottom right mast web member, the horizontal measuring staff level in upper right is nested on the mast web member of upper right, on radially the horizontal measuring staff of capacitive transducer and upper right be connected, the horizontal measuring staff level in bottom right is nested on the mast web member of bottom right, under radially the horizontal measuring staff of capacitive transducer and bottom right be connected.
Compared with prior art, feature of the present invention is:
The present invention can obtain the right alignment weights of each rotor by measuring the concentricity of each rotor and verticality, again the right alignment weights of each rotor are carried out to vector optimization, just can obtain instructing setting angle, save 40% set-up time and expense, 98% one-step installation success ratio, measurable installation progress, improve engine stabilization, reduce engine luggine, save motor fuel consumption, reduce CO
2discharge, reduces engine noise and pollutes.
Accompanying drawing explanation:
Fig. 1 is four gauge head measurement mechanism structural representations
Fig. 2 is rotary axis system structural representation
Piece number in figure: 1-pedestal, 2-rotary axis system, 2a-rotary main shaft, 2b-worktable, platen on 2c-revolving shaft, 2d-revolving shaft pressing disc, 2e-inductosyn scale, 2f-inductosyn slide rule, 2g-permanent magnet, 2h-coil, 2i-motor stator, 2j-rotor, 3-aligning is adjusted the worktable that inclines, 4-delta air chuck, 5a-left column, 5b-right column, the horizontal measuring staff in 6a-lower-left, the horizontal measuring staff in 6b-bottom right, the horizontal measuring staff in 6c-upper left, the horizontal measuring staff in 6d-upper right, 7a-lower-left mast web member, 7b-bottom right mast web member, 7c-upper left mast web member, 7d-upper right mast web member, axial capacitive transducer under 8a-, the upper axial capacitive transducer of 8b-, capacitive transducer radially under 9a-, capacitive transducer radially on 9b-, 10a-lower sensor adaptor, 10b-upper sensor adaptor.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail:
Aeroengine rotor electric drive assembly method and the device measured based on capacitance sensing, described method and apparatus is: delta air chuck 4 is configured in aligning tune and inclines on worktable 3 centers.Left column 5a and right column 5b are symmetrically distributed in the both sides of rotary axis system 2 and are packed on pedestal 1.On left column 5a, be set with to removable adjusting successively from top to bottom upper left mast web member 7c and lower-left mast web member 7a, upper left horizontal measuring staff 6c level is nested on the mast web member 7c of upper left, the horizontal measuring staff 6c in upper sensor adaptor 10b and upper left is connected, and upper axial capacitive transducer 8b and upper sensor adaptor 10b are connected; It is upper that lower-left horizontal measuring staff 6a level is nested in lower-left mast web member 7a, and the horizontal measuring staff 6a in lower sensor adaptor 10a and lower-left is connected, and lower axial capacitive transducer 8a and lower sensor adaptor 10a are connected.On right column 5b, be set with to removable adjusting successively from top to bottom upper right mast web member 7d and bottom right mast web member 7b, it is upper that upper right horizontal measuring staff 6d level is nested in upper right mast web member 7d, on radially capacitive transducer 9b and the horizontal measuring staff 6d in upper right are connected; It is upper that bottom right horizontal measuring staff 6b level is nested in bottom right mast web member 7b, under radially capacitive transducer 9a and the horizontal measuring staff 6b in bottom right are connected.Rotary axis system 2 is nested on pedestal 1 center, described rotary axis system 2 is by rotary main shaft 2a, worktable 2b, platen 2c on revolving shaft, revolving shaft pressing disc 2d, inductosyn scale 2e, inductosyn slide rule 2f, permanent magnet 2g, coil 2h, motor stator 2i and rotor 2j form, described worktable 2b is configured on revolving shaft on platen 2c upper end, on revolving shaft, platen 2c is configured on rotary main shaft 2a upper end, rotary main shaft 2a is configured on revolving shaft pressing disc 2d upper end, inductosyn slide rule 2f is nested on revolving shaft pressing disc 2d outer shroud, inductosyn scale 2e fits over pedestal 1 center lower inside admittedly, and be positioned at inductosyn slide rule 2f top, permanent magnet 2g is enclosed within on rotary main shaft 2a outer shroud, and be fixed on revolving shaft pressing disc 2d upper end, coil 2h is enclosed within on rotary main shaft 2a outer shroud, and be fixed on pedestal 1 inside, apart from 5-10cm place, permanent magnet 2g top, rotor 2j is nested on revolving shaft pressing disc 2d outer shroud, and is positioned at inductosyn slide rule 2f bottom, and motor stator 2i fits over pedestal 1 center lower inside admittedly, and is positioned at inductosyn scale 2e bottom and rotor 2j outside, rotary axis system 2 drives measured rotor at the uniform velocity to rotate with the speed of 6～10r/min, lower axial capacitive transducer 8a carries out equal interval sampling on the axial datum clamp face of measured rotor, under radially capacitive transducer 9a on the radially datum clamp face of measured rotor, carry out equal interval sampling, sampling number should meet 1000～2000 points of every circle, sampled data on the radially datum clamp face of measured rotor is passed through to Least Square Circle matching, assess offset, the axial datum clamp face up-sampling data of measured rotor are passed through to least square plane matching, assess tilt quantity, aligning adjusts the worktable 3 that inclines to be configured on rotary axis system 2 centers, according to the size of offset and angle, regulate aligning to adjust to incline worktable 3 until the size that meets radial reference face offset within the scope of 0～3 μ m, according to the size of tilt quantity and angle, regulate aligning to adjust to incline worktable 3 until the size that meets axial reference field tilt quantity 0～2 " in scope, upper right mast web member 7d is vertically nested in the upside of right column 5b, upper right horizontal measuring staff 6d level is nested on the mast web member 7d of upper right, on radially capacitive transducer 9b and the horizontal measuring staff 6d in upper right are connected, upper radially capacitive transducer 9b is measured to the face that radially installs and measures of measured rotor, upper left mast web member 7c is vertically nested in the upside of left column 5a, upper left horizontal measuring staff 6c level is nested on the mast web member 7c of upper left, upper axial capacitive transducer 8b and upper sensor adaptor 10b are connected, upper axial capacitive transducer 8b measures the face that axially installs and measures of measured rotor, rotary axis system 2 at the uniform velocity rotates with the speed of 6～10r/min, on radially capacitive transducer 9b measured rotor radially install and measure equal interval sampling on face, upper axial capacitive transducer 8b axially installs and measures equal interval sampling on face measured rotor, sampling number should meet 1000～2000 points of every circle, by upper radially capacitive transducer 9b in the data of the face that radially the installs and measures up-sampling of measured rotor by Least Square Circle matching and assess concentricity, by upper axial capacitive transducer 8b in the data of the face that axially the installs and measures up-sampling of measured rotor by least square plane matching and assess verticality, combined axis, to radius and this measured rotor and final difference in height of assembling rotor of the face of installing and measuring, obtains this rotor to assembling the weights that affect of rear rotor coaxial degree, measure respectively the required whole rotors of assembling, obtain each rotor to assembling the weights that affect of rear rotor coaxial degree, adopt genetic algorithm to carry out vector optimization the weights of each rotor, obtain the angle of assembling of each rotor, the account form that affects weights of rotor coaxial degree is:
in formula: C represents that measured rotor radially installs and measures the concentricity of face,
represent radially to install and measure the eccentric angle in the face matching center of circle, H represents measured rotor and final difference in height of assembling rotor, R represents the radius of the face that axially installs and measures, P represents that measured rotor axially installs and measures the verticality of face, and θ represents the angle at the fit Plane peak place of the face that axially installs and measures.
Claims (2)
1. an aeroengine rotor electric drive assembly method of measuring based on capacitance sensing, is characterized in that this measuring method is: measured rotor is positioned over to aligning and adjusts on the worktable that inclines fixing; The axial capacitive transducer of measuring axial datum clamp face is measured to the axial datum clamp face of measured rotor, inclined for adjusting; Measure the radially radially capacitive transducer of datum clamp face and measure radially datum clamp face, for aligning; Revolution turntable adjusts the worktable that inclines to drive measured rotor at the uniform velocity to rotate with the speed of 6～10r/min through aligning, the axial capacitive transducer of measuring axial datum clamp face carries out equal interval sampling on the axial datum clamp face of measured rotor, measures the radially radially capacitive transducer of datum clamp face and carry out equal interval sampling on the radially datum clamp face of measured rotor; Sampling number should meet 1000～2000 points of every circle; Sampled data on the radially datum clamp face of measured rotor, by Least Square Circle matching, is assessed to offset, the axial datum clamp face up-sampling data of measured rotor, by least square plane matching, are assessed to tilt quantity; According to the size of offset and angle, regulate aligning to adjust the aligning knob of the worktable that inclines; According to the size of tilt quantity and angle, regulate aligning to adjust the tune of worktable of the inclining knob that inclines, until aligning adjusts size that the worktable that inclines meets radial reference face offset within the scope of 0～3 μ m, axially the size of reference field tilt quantity is 0～2 " in scope; The axial capacitive transducer of measuring the face that axially installs and measures is measured to the face that axially installs and measures of measured rotor, the radially capacitive transducer of measuring the face that radially installs and measures is measured the face that radially installs and measures of measured rotor; Revolution turntable at the uniform velocity rotates with the speed of 6～10r/min, measure the axial capacitive transducer that axially installs and measures face measured rotor axially install and measure equal interval sampling on face, the radially capacitive transducer of measuring the face that radially installs and measures is is radially installing and measuring equal interval sampling on face respectively; Sampling number should meet 1000～2000 points of every circle; By measure the radially capacitive transducer that radially installs and measures face in the data of the face that radially the installs and measures up-sampling of measured rotor by Least Square Circle matching and assess concentricity; By measure the axial capacitive transducer that axially installs and measures face in the data of the face that axially the installs and measures up-sampling of measured rotor by least square plane matching and assess verticality; Combined axis, to radius and this measured rotor and final difference in height of assembling rotor of the face of installing and measuring, obtains this rotor to assembling the weights that affect of rear rotor coaxial degree; Measure respectively the required whole rotors of assembling, obtain each rotor to assembling the weights that affect of rear rotor coaxial degree; Adopt genetic algorithm to carry out vector optimization the weights of each rotor, obtain the angle of assembling of each rotor, the account form that affects weights of rotor coaxial degree is:
in formula: C represents that measured rotor radially installs and measures the concentricity of face,
represent radially to install and measure the eccentric angle in the face matching center of circle, H represents measured rotor and final difference in height of assembling rotor, R represents the radius of the face that axially installs and measures, P represents that measured rotor axially installs and measures the verticality of face, and θ represents the angle at the fit Plane peak place of the face that axially installs and measures.
2. an aeroengine rotor electric drive assembling device of measuring based on capacitance sensing, it is characterized in that rotary axis system (2) is nested on pedestal (1) center, described rotary axis system (2) is by rotary main shaft (2a), worktable (2b), platen on revolving shaft (2c), revolving shaft pressing disc (2d), inductosyn scale (2e), inductosyn slide rule (2f), permanent magnet (2g), coil (2h), motor stator (2i) and rotor (2j) form, described worktable (2b) is configured on platen on revolving shaft (2c) upper end, platen on revolving shaft (2c) is configured on rotary main shaft (2a) upper end, rotary main shaft (2a) is configured on revolving shaft pressing disc (2d) upper end, inductosyn slide rule (2f) is nested on revolving shaft pressing disc (2d) outer shroud, inductosyn scale (2e) fits over pedestal (1) center lower inside admittedly, and be positioned at inductosyn slide rule (2f) top, permanent magnet (2g) is enclosed within on rotary main shaft (2a) outer shroud, and be fixed on revolving shaft pressing disc (2d) upper end, coil (2h) is enclosed within on rotary main shaft (2a) outer shroud, and be fixed on pedestal (1) inside, apart from 5-10cm place, permanent magnet (2g) top, rotor (2j) is nested on revolving shaft pressing disc (2d) outer shroud, and be positioned at inductosyn slide rule (2f) bottom, motor stator (2i) fits over pedestal (1) center lower inside admittedly, and is positioned at inductosyn scale (2e) bottom and rotor (2j) outside, aligning adjusts the worktable (3) that inclines to be configured on rotary axis system (2) center, and delta air chuck (4) is configured in aligning tune and inclines on worktable (3) center, left column (5a) and right column (5b) are symmetrically distributed in the both sides of rotary axis system (2) and are packed in pedestal (1) upper, on left column (5a), removable adjusting ground is set with upper left mast web member (7c) and lower-left mast web member (7a) successively from top to bottom, the horizontal measuring staff in upper left (6c) level is nested on upper left mast web member (7c), upper sensor adaptor (10b) is connected with upper left horizontal measuring staff (6c), and upper axial capacitive transducer (8b) is connected with upper sensor adaptor (10b), the horizontal measuring staff in lower-left (6a) level is nested on lower-left mast web member (7a), lower sensor adaptor (10a) is connected with lower-left horizontal measuring staff (6a), and lower axial capacitive transducer (8a) is connected with lower sensor adaptor (10a), on right column (5b), removable adjusting ground is set with upper right mast web member (7d) and bottom right mast web member (7b) successively from top to bottom, it is upper that the horizontal measuring staff in upper right (6d) level is nested in upper right mast web member (7d), on radially capacitive transducer (9b) be connected with upper right horizontal measuring staff (6d), it is upper that the horizontal measuring staff in bottom right (6b) level is nested in bottom right mast web member (7b), under radially capacitive transducer (9a) be connected with bottom right horizontal measuring staff (6b).
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| CN109581961A (en) * | 2017-09-28 | 2019-04-05 | 上海微电子装备（集团）股份有限公司 | A kind of shaft rotary corner measuring device and method |
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