CN103785940B - Ic structure equipped with one kind of aluminum vacuum electron beam welding jig - Google Patents

Ic structure equipped with one kind of aluminum vacuum electron beam welding jig Download PDF

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CN103785940B
CN103785940B CN 201210434040 CN201210434040A CN103785940B CN 103785940 B CN103785940 B CN 103785940B CN 201210434040 CN201210434040 CN 201210434040 CN 201210434040 A CN201210434040 A CN 201210434040A CN 103785940 B CN103785940 B CN 103785940B
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CN 201210434040
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CN103785940A (en )
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乔红超
赵吉宾
于彦凤
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中国科学院沈阳自动化研究所
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Abstract

本发明属于IC装备铝合金结构件焊接领域,具体地说是一种IC装备铝合金结构件真空电子束焊接夹具,包括二维数控平台、横梁架、夹紧滑块、垫板及横板,横板通过立柱安装在二维数控平台上,在横板上设有调整工作距离的调整螺杆;横梁架套在立柱上、并与调整螺杆螺纹连接,通过旋转调整螺杆沿立柱的轴向往复移动;横梁架上套设有将被焊接的工件夹紧在中间的夹紧滑块,工件的一侧由夹紧滑块支撑,另一侧通过放在横梁架上的垫板支撑,夹紧滑块上设有调整夹紧距离的夹紧螺杆。 The present invention belongs to the field of welding equipment IC aluminum structural parts, in particular aluminum structures equipped with an IC-vacuum electron beam welding jig, including two-dimensional numerical platform crossbeam, the clamping slider plate and the transverse plate, lateral plate mounted on the two-dimensional column by the NC platform, adjustment screw is provided to adjust the distance in a cross plate; crossbeam set on the stand and connected to the adjusting screw threads to reciprocate by rotating the adjustment screw in the axial direction of the column ; beam frame welded sleeve is provided to be clamped in the middle of the workpiece clamping slider is supported by the side of the workpiece clamping carriage, on the other side by the cross frame support plate, the clamping slide clamping the clamping screw is provided to adjust the distance of the upper block. 本发明具有结构简单、质量轻、使用方便、成本低等优点,在提高生产效率的同时,保证了焊接质量的均匀性和稳定性。 The present invention has a simple structure, light weight, ease of use, low cost, while improving the productivity, uniformity and stability to ensure the welding quality.

Description

一种IC装备铝合金结构件真空电子束焊接夹具 An IC structure equipped with aluminum vacuum electron beam welding jig

技术领域 FIELD

[0001] 本发明属于IC装备铝合金结构件焊接领域,具体地说是一种IC装备铝合金结构件真空电子束焊接夹具。 [0001] The present invention belongs to the field of welding equipment IC aluminum structural parts, in particular aluminum structures equipped with an IC-vacuum electron beam welding jig.

背景技术 Background technique

[0002] 不同于其他行业零部件的单一功能要求,IC(integrate circuit,集成电路)装备的零部件经常要兼顾强度、应变、抗腐蚀、电子特性、电磁特性、材料纯度等复合功能要求,是各种复杂技术的复杂集成,常采用铝合金材料。 [0002] Unlike single-function components required in other industries, IC (integrate circuit, an integrated circuit) components often equipped to take into account the strength, strain, corrosion resistance, electrical characteristics, electromagnetic properties, a composite material purity functional requirements, is complex complex integration techniques, often used aluminum alloy material. IC装备的结构件普遍加工精度要求极高,为了满足IC装备高精度焊接的要求,解决铝合金难焊接的难题,采用具有不用焊条、不易氧化、工艺重复性好及热变形量小等优点的真空电子束焊接工艺方法。 Structure IC processing equipment generally requires high precision, high accuracy to meet the requirements IC welding equipment, welding is difficult to solve the problem of aluminum alloy, without using welding, easily oxidized, good process repeatability and thermal deformation of the advantages of having a small amount of vacuum electron beam welding process. 铝合金真空电子束焊接时对束流和磁场十分敏感,尤其是对于厚度大于3_的铝合金结构,束流偏小易产生未焊透,束流偏大焊缝金属则易塌陷,磁场存在将会引起电子束偏转,不能实现沿预定轨迹焊接;另外,铝合金强度系数低、热导率大(约为钢的4倍),线膨胀系数大,易产生焊接变形和焊接接头软化,所以设计专用的无磁性的、导电良好的、定位夹紧可靠的专用夹具,将极大地提高IC装备铝合金结构件的焊接质量和生产效率。 Aluminum vacuum electron beam welding of the beam and a magnetic field sensitive, especially 3_ thicker than the aluminum structure, small beam penetration is not easy to produce, is easy to weld metal beam collapse is too large, the magnetic field is present will cause deflection of the electron beam, welding along a predetermined trajectory can not be achieved; Further, a low coefficient of alloy strength, large thermal conductivity (approximately four times that of steel), linear expansion coefficient, and easy to produce welding softening of welded joint deformation, so design of a dedicated non-magnetic, good conductivity, reliable positioning of the clamping fixture, will greatly improve the welding quality and efficiency of IC production equipment of aluminum structures.

发明内容 SUMMARY

[0003] 本发明的目的在于提供一种IC装备铝合金结构件真空电子束焊接夹具。 [0003] The object of the present invention is to provide an IC structure equipped aluminum vacuum electron beam welding jig. 该焊接夹具能够有效夹持IC装备铝合金结构件在现有的真空电子束焊机上进行焊接。 The welding jig is possible to effectively clamp IC structure aluminum welding equipment on conventional vacuum electron beam welder.

[0004] 本发明的目的是通过以下技术方案来实现的: [0004] The object of the present invention is achieved by the following technical solution:

[0005] 本发明包括二维数控平台、横梁架、夹紧滑块、垫板及横板,其中横板通过立柱安装在二维数控平台上,在横板上设有调整工作距离的调整螺杆;所述横梁架套在立柱上、并与所述调整螺杆螺纹连接,通过旋转调整螺杆沿立柱的轴向往复移动;所述横梁架上套设有将被焊接的工件夹紧在中间的夹紧滑块,所述工件的一侧由夹紧滑块支撑,另一侧通过放在横梁架上的垫板支撑,所述夹紧滑块上设有调整夹紧距离的夹紧螺杆。 [0005] The present invention comprises a two-dimensional numerical platform crossbeam, the clamping slider, plate and lateral plate, wherein the horizontal plate is mounted on a two-dimensional column by the NC platform, with the adjustment screw to adjust the working distance in the cross-plate ; the crossbeam sleeve on the column, and the adjustment screw with a threaded connection, an axial reciprocating movement by rotating the adjustment screw in the column; the beam frame welded sleeve is provided to be sandwiched in the middle workholding tight slide, one side of the workpiece is supported by the clamping carriage, on the other side by the cross frame support plate, provided with the clamping screw to adjust the clamping distance of the clamping slider.

[0006] 其中:在夹紧工件的夹紧滑块的两侧分别设有横板,每个横板上均设有调整螺杆,所述调整螺杆的一端转动安装在横板上,另一端为自由端;所述横梁架的两侧分别由两个调整螺杆的自由端套入,并与调整螺杆螺纹连接;位于夹紧滑块的两侧的其中一个横板上的调整螺杆安装在该侧横板的一端,另一个横板上的调整螺杆安装在该侧横板的另一端;所述调整螺杆与立柱相平行;所述夹紧螺杆的一端转动安装在所述工件任一侧的夹紧滑块上,夹紧螺杆的另一端与所述工件另一侧的夹紧滑块螺纹连接;所述与夹紧螺杆螺纹连接的夹紧滑块沿横梁架往复移动,并通过定位锁紧螺钉与横梁架抵接定位;所述夹紧滑块的内侧沿夹紧滑块的长度方向设有第二定位槽,被焊接的两个工件的一侧搭在该第二定位槽上,另一侧搭在所述垫板上;所述被焊接的两个工 [0006] wherein: clamping the workpiece on both sides of the slider are respectively provided with lateral clamping plates, each plate has horizontal adjusting screw, one end of the adjustment screw rotatably mounted in the horizontal plate, the other end a free end; sides of the crossbeam are connected to the threaded adjustment screw to adjust the two screws into the free end of the sleeve, and; located on both sides of the slide clamp wherein the adjustment of a transverse plate mounted on the side of the screw One end of the horizontal plate, the adjustment screw another cross plate mounted on the other end side of the horizontal plate; the adjustment screw parallel with the column; end of the clamping screw is rotatably mounted on either side of the workpiece clamp slider tightening the clamping screw on the other side of the slider and the other end connected to the workpiece clamping screw; screw thread connection with the clamping of the clamping holder slider reciprocated along the beam, and by positioning the locking abutment screw and crossbeam is positioned; the longitudinal direction along the inside of the clamping slider is provided with a second clamping carriage positioning grooves, two side welded workpiece is resting on the second positioning groove, the other resting on one side of the backing plate; the two stations to be welded 另一侧下方的两个垫板之间设有安装在横梁架上的熔渣防护板,被焊接的两个工件之间的焊缝位于该熔渣防护板的正上方; Is provided between the two pads mounted on the other side of the lower cross frame plate protective slag, weld between two workpieces to be welded is located directly above the slag shield plate;

[0007] 所述二维数控平台包括X轴滑台、Y轴滑台及工作台,其中X轴滑台安装在Y轴滑台的丝母上,通过丝母与Y轴滑台的丝杠螺纹连接,沿Y轴滑台的丝杠往复移动;所述工作台安装在X轴滑台的丝母上,通过丝母与X轴滑台的丝杠螺纹连接,沿X轴滑台的丝杠往复移动,并且随X轴滑台沿Y轴滑台的丝杠往复移动;所述立柱的一端与横板相连,另一端通过连接板与所述工作台连接;所述连接板与工作台之间通过定位槽与定位块定位,并通过T型槽与T型螺钉夹紧固定。 [0007] The two-dimensional numerical platform includes an X-axis slide, a Y-axis table and the slider, wherein the X-axis slide table mounted on the Y-axis slide nut, the nut by the Y-axis slide screw thread connecting, along the Y-axis slide reciprocating screw; table mounted on the X-axis slide nut, the nut by the X-axis slide screw threaded connection, along the X-axis slide reciprocating screw move, and with the X-axis slide table slide table along the Y axis to reciprocate the screw; connected to one end of the horizontal plate column, and the other end connected to the table by a web; between the table and the web by positioning the positioning groove and the positioning block, clamped and fixed by the T-slot and the T-screw.

[0008] 本发明的优点与积极效果为: [0008] The advantages and positive effects of the present invention are:

[0009] 1.本发明通过夹紧螺杆可以调节夹紧距离,通过调整螺杆可以调整工作距离,实现了IC装备结构件的自动焊接,可以提高IC装备结构件的生产效率,确保焊接质量的一致性。 [0009] 1. The present invention can be adjusted by a clamping screw clamping distance, the working distance can be adjusted by adjusting the screw, to achieve the automatic welding equipment structure of the IC, IC can improve the production efficiency of the equipment structure, to ensure a consistent weld quality sex.

[0010] 2.本发明能够实现缝隙O〜0.15mm、工件大小约230 X 230 X 200mm、最大重量约30kg的IC装备结构件焊接。 [0010] 2. The present invention enables the slit O~0.15mm, workpiece size of about 230 X 230 X 200mm, IC structural welding equipment about the maximum weight of 30kg.

[0011] 3.本发明在焊缝下方设置了熔渣防护板,既可防止熔渣掉到夹紧螺杆8等夹具体上损伤夹具,又使得电子束流完全稳定后再进行焊接。 [0011] 3. The present invention is provided underneath the weld slag protection plate, can prevent the slag 8 and the like fall into the clamping screw on the clamp jig damage, and so that the electron beam welding and then fully stabilized.

[0012] 4.本发明夹紧定位可靠,极大地提高了IC装备铝合金结构件的焊接质量和生产效率。 [0012] 4. The present invention is clamped in position reliably, which greatly improves the quality and production efficiency of welding of aluminum structures equipped IC.

[0013] 5.本发明具有结构简单、质量轻、使用方便、成本低等优点,在提高生产效率的同时,保证了焊接质量的均匀性和稳定性。 [0013] The present invention has simple structure, light weight, ease of use, low cost, while improving the productivity, uniformity and stability to ensure the welding quality.

[0014] 6.本发明采用铝合金和304不锈钢材料,既保证了夹具的导电性能(保证电子束的电子能够流回大地),又保证了不带磁性(保证电子束不发生偏转),实现电子束流方向稳定可靠。 [0014] 6. The present invention is made of aluminum alloy and stainless steel 304, both to ensure the conductivity of the clamp (electron beam can ensure electron flow back into the earth), and ensure non-magnetic (to ensure that the electron beams not deflected), to achieve the direction of the electron beam is stable and reliable.

附图说明 BRIEF DESCRIPTION

[0015] 图1为本发明的立体结构示意图; [0015] FIG. 1 is a perspective schematic view of the structure of the present invention;

[0016] 其中为X轴滑台,2为Y轴滑台,3为工作台,4为连接板,5为立柱,6为调整螺杆,7为横梁架,8为夹紧螺杆,9为夹紧滑块,10为工件,11为焊缝,12为垫板,13为熔渣防护板,14为定位锁紧螺钉,15为定位块,16为T型槽,17为第一定位槽,18为第二定位槽,19为横板。 [0016] wherein the X-axis slide, a Y-axis slide table 2, table 3, the connecting plate 4, column 5, the adjustment screw 6, 7 for the crossbeam, as a clamping screw 8, 9 of clip tight slider 10 to the workpiece, the weld 11, 12 is a plate, shield plate 13 to the slag, the locking screw 14 is positioned, the positioning block 15, a T-shaped slot 16, as the first positioning groove 17, 18 is a second positioning groove 19 is a cross-plate.

具体实施方式 detailed description

[0017] 下面结合附图对本发明作进一步详述。 [0017] The following drawings in conjunction with the present invention will be further described in detail.

[0018] 如图1所示,本发明包括二维数控平台、横梁架7、夹紧滑块9、垫板12及横板19,其中二维数控平台安装在真空电子束焊机上,包括X轴滑台1、Y轴滑台2及工作台3,X轴滑台I安装在Y轴滑台2的丝母上,通过丝母与Y轴滑台2的丝杠螺纹连接,沿Y轴滑台2的丝杠往复移动;工作台3安装在X轴滑台I的丝母上,通过丝母与X轴滑台I的丝杠螺纹连接,沿X轴滑台I的丝杠往复移动,并且随X轴滑台I沿Y轴滑台2的丝杠往复移动。 [0018] As shown in FIG. 1, the present invention comprises a two dimensional numerical platform crossbeam 7, the clamping slider 9, the pad 12 and the transverse plate 19, which is mounted on a two-dimensional numerical internet vacuum electron beam welding machine, comprising X-axis slide 1, Y-axis slide table 2 and the table 3, X-axis slide table I mounted on the Y-axis slide nut 2, the screw threaded connection slide table 2 through the nut and the Y-axis, along the Y axis slider reciprocating screw 2; table 3 mounted on the X-axis slide nut I is connected to the slide by a screw threaded nut table I is the X-axis, the threaded slide table I reciprocate along the X axis, with the X-axis and the Y-axis slide table I the slide table 2 reciprocating screw. 连接板4与工作台3之间通过定位槽与定位块定位,并通过T型槽与T型螺钉夹紧固定;即连接板4的底面边缘设有多个定位块15,工作台3的上表面边缘相应位置开有数量相同的第一定位槽17,连接板4上的定位块15插入工作台3的第一定位槽17中进行定位;工作台3及连接板4上开有T型槽16,通过T型螺钉将工作台3及连接板4夹紧固定。 4 between the connecting plate and the stage 3 by the positioning groove and the positioning block is positioned, and clamped and fixed by a T-shaped T-slot screw; i.e., the connecting plate 4 is provided with a plurality of edges of the bottom surface of the positioning block 15, the table 3 respective position of the surface edge of the opening have the same number of the first positioning groove 17, the positioning block connecting plate 415 is inserted into the first positioning groove 3 of the table 17 is positioned; T-slot opened on the stage 3 and the connecting plate 4 16, table 3 and the connecting plate 4 is fixed through a T-clamp screws.

[0019] 横板19通过多根立柱5安装在连接板4上,横板19为两个,分别位于被焊接的两个工件10的两侧;本实施例的立柱5为四根,四根立柱5的一端(上端)分别与两个横板19的四端固接,四根立柱5的另一端(下端)则固定在连接板4上。 [0019] The cross plate 19 by a plurality of posts mounted on the connecting plate 4 5, two lateral plates 19, which are located on both sides to be welded of the two workpieces 10; column 5 of the present embodiment is four, four solid four-terminal end of the column 5 (the upper end), respectively two lateral contact plate 19, the other end of the four columns 5 (the lower end) is fixed to the connecting plate 4. 在每个横板19上均安装有调整工作距离的调整螺杆6,每个调整螺杆6的一端(上端)转动安装在横板19上,另一端(下端)为自由端。 In each cross plate 19 are attached to the adjustment screw to adjust the working distance of 6, one end of each adjusting screw 6 (upper end) rotatably mounted on the transverse plate 19, the other end (lower end) is a free end. 其中一侧横板19上的调整螺杆6安装在该侧横板19的一端,另一侧横板19上的调整螺杆6安装在该侧横板19的另一端。 Wherein adjusting the horizontal plate 19 on one side of the screw 6 is mounted on one end side of the horizontal plate 19, adjusting screw on the other side of the horizontal plate 196 mounted on the other end side of the horizontal plate 19.

[0020] 横梁架7为由两个横梁及两个竖梁组成的方形框架结构,两个竖梁的四端分别由四根立柱5穿过,两个横梁则分别由两个调整螺杆6的自由端套入,并与调整螺杆6螺纹连接,通过旋转调整螺杆6使横梁架7整体沿立柱5的轴向往复移动;两个调整螺杆6与四根立柱5相互平行。 [0020] The crossbeam of the frame structure 7 by two square beams and two vertical beams composed of two vertical beams, respectively, four-point crossed by four uprights 5, two beams respectively by the two adjusting screws 6 the free end of the sleeve, and is connected to a threaded adjustment screw 6, by rotating the adjusting screws 6 so that the entire beam frame 7 in the axial direction of the column 5 reciprocates; two adjustment screws 6 and four columns 5 parallel to each other.

[0021] 在横梁架7上套设有将被焊接的工件10夹紧在中间的夹紧滑块9,夹紧滑块9为两个,位于两个横板19之间;每个夹紧滑块9的两端分别套在横梁架7的竖梁上,在夹紧滑块9上设有调整夹紧距离的夹紧螺杆8。 [0021] The sleeve 7 is provided on the workpiece 10 to be welded clamped in between the clamping slider 9, two clamping slider 9 is located between the two lateral plates 19 in the crossbeam; each clamp both ends of the slider 9 are set in the vertical beam crossbeam 7, it is provided to adjust the distance of the clamping clamping screw 8 on the clamping slider 9. 夹紧螺杆8的一端转动安装在任一个夹紧滑块9上,夹紧螺杆8的另一端则与另个夹紧滑块9螺纹连接,通过旋转夹紧螺杆8,使得与夹紧螺杆8螺纹连接的夹紧滑块9沿横梁架7的竖梁往复移动,进而调节夹紧距离。 One end of the clamping screw 8 is rotatably mounted on either one clamping slider 9, the other end of the clamping screw 8 is connected to the other one threaded clamping slider 9, by rotation of the clamping screw 8, so that the clamping screw 8 screw clamping frame 9 connected to the vertical beams along the beam 7 is reciprocated, and further adjusting the clamping distance. 待夹紧距离调整好后,与夹紧螺杆8螺纹连接的夹紧滑块9通过定位锁紧螺钉14与横梁架7的竖梁抵接定位。 After adjusting the distance to be clamped, the clamping slide is connected with the clamping screw 8 screw threaded through the lock 9 is positioned vertical beams 14 and the crossbeam 7 abuts positioning.

[0022] 每个夹紧滑块9的内侧沿夹紧滑块的长度方向设有第二定位槽18,被焊接的两个工件10的一侧搭在该第二定位槽18上,另一侧搭在放在横梁架7两竖梁之间的垫板12上。 [0022] The longitudinal direction of each of the clamping slider 9 along the inside of the clamping carriage 18 is provided with a second positioning groove, one side welding two workpieces 10 resting on the second positioning groove 18, the other side plate resting on the crossbeam 7 between two vertical beams 12. 被焊接的两个工件10另一侧下方的两个垫板12之间设有安装在横梁架7两竖梁之间的熔渣防护板13,被焊接的两个工件10之间的焊缝11位于该熔渣防护板13的正上方。 With slag shielding plate 7 is mounted between the crossbeam between the two vertical beams 13 of the lower plate 12 two other side two workpiece 10 to be welded, the weld seam 10 is welded between the two workpieces 11 is located directly above the guard plate 13 of the slag.

[0023] 横梁架7、夹紧滑块9及横板19通过X轴滑台I和Y轴滑台2的运动实现焊枪沿指定路径进行焊接。 [0023] The crossbeam 7, the clamping table I and the Y-axis slide 2 moving along a specified path to achieve the welding torch 9 and the lateral slide plate 19 through the X-axis slide.

[0024] 本发明的调整螺杆6、横梁架7、夹紧螺杆8、夹紧滑块9、垫板12及熔渣防护板采用导电且不带磁性的铝合金和不锈钢材料。 [0024] In the present invention, adjustment screw 6 crossbeam 7, the clamping screw 8, a clamping slider 9, the pad 12 and the shield plate made of aluminum slag and stainless steel material of the conductive tape not magnetic.

[0025] 本发明的工件原理为: [0025] The work principle of the invention is:

[0026] 使用时,首先将工作台3安装到X轴滑台I上,连接板4上的定位块15与工作台3上的第一定位槽17配合定位后,将T型螺钉放入工作台3及连接板4的T型槽16中,将工作台3与连接板4固定。 [0026] In use, the table 3 is mounted on the X-axis slide table I, the positioning block on the web 4 on the first positioning groove 15 and the table 317 is positioned with the screw into the T-shaped work table 3 and the connecting plate 164 of the T-slot in the table 3 and the connecting plate 4 is fixed. 然后,将垫板12放在横梁架7上,将两个被焊接的工件10放入夹紧滑块9的第二定位槽18中,根据工件10的大小,通过旋转夹紧螺杆8调整其中一个夹紧滑块9的位置,并用定位锁紧螺钉14将其锁定。 Then, the pad holder 12 is placed on the cross member 7, two of the workpiece 10 to be welded into the positioning groove 18 of the second clamping slider 9, 10 according to the size of the workpiece, by rotating the clamping screw 8 adjusting wherein 9 is a clamping position of the slider, and by positioning the locking screw 14 to lock it. 将熔渣防护板13放在焊缝的下方,既可防止熔渣掉到夹紧螺杆8等夹具体上损伤夹具,又使得电子束流完全稳定后再进行焊接。 The slag shielding plate 13 on the bottom of the weld slag can prevent the clamping screw 8 and the like fall on the clamp jig damage, and so that the electron beam welding and then fully stabilized. 最后,旋转调整螺杆6调整至设定的工作距离,移动X、Y轴滑台1、2进行焊接。 Finally, rotation of the adjustment screw 6 is adjusted to set the working distance, a movement X, Y-axis slide 1,2 welding.

Claims (10)

  1. 1.一种IC装备铝合金结构件真空电子束焊接夹具,其特征在于:包括二维数控平台、横梁架(7 )、夹紧滑块(9 )、垫板(12 )及横板(19 ),其中横板(19 )通过立柱(5 )安装在二维数控平台上,在横板(19)上设有调整工作距离的调整螺杆(6);所述横梁架(7)套在立柱(5)上、并与所述调整螺杆(6)螺纹连接,通过旋转调整螺杆(6)沿立柱(5)的轴向往复移动;所述横梁架(7)上套设有将被焊接的工件(10)夹紧在中间的夹紧滑块(9),所述工件(10)的一侧由夹紧滑块(9)支撑,另一侧通过放在横梁架(7)上的垫板(12)支撑,所述夹紧滑块(9)上设有调整夹紧距离的夹紧螺杆(8)。 1. An IC structure equipped aluminum vacuum electron beam welding jig comprising: a two-dimensional numerical platform, crossbeam (7), the clamping slide (9), the pad (12) and the lateral plate (19 ), wherein the horizontal plate (19) through the pillar (5) is mounted on a two-dimensional numerical platform, provided with adjusting screws (6) to adjust the working distance in the lateral plate (19); said crossbeam (7) set in the column (5) and screwed to the adjusting screw (6), by rotating the adjusting screw reciprocating movement (6) along the column (5) in the axial direction; the beam frame (7) provided on the sleeve to be welded a workpiece (10) clamped in the middle of the clamping slider (9), one side of the workpiece (10) supported by the clamping slider (9), on the other side by the crossbeam (7) of the pad plate (12) supporting the clamping slider (9) is provided with a clamping screw to adjust the clamping distance (8).
  2. 2.按权利要求1所述的IC装备铝合金结构件真空电子束焊接夹具,其特征在于:在夹紧工件(10)的夹紧滑块(9)的两侧分别设有横板(19),每个横板(19)上均设有调整螺杆(6),所述调整螺杆(6)的一端转动安装在横板(19)上,另一端为自由端;所述横梁架(7)的两侧分别由两个调整螺杆(6)的自由端套入,并与调整螺杆(6)螺纹连接。 2. Equipment as claimed in claim IC structure aluminum vacuum electron beam welding jig of claim 1, wherein: the workpiece is clamped on both sides (10) of the clamping carriage (9) are provided with lateral plates (19 ), each cross plate (19) are provided on the adjusting screw (6), one end of the adjustment screw (6) is rotatably mounted on the transverse plate (19), and the other end is a free end; said crossbeam (7 ) on both sides are set into the two adjusting screws (6) free end, and (6) screwed to the adjustment screw.
  3. 3.按权利要求2所述的IC装备铝合金结构件真空电子束焊接夹具,其特征在于:位于夹紧滑块(9)的两侧的其中一个横板(19)上的调整螺杆(6)安装在该侧横板(19)的一端,另一个横板(19)上的调整螺杆(6)安装在该侧横板(19)的另一端。 3. Equipment as claimed in claim IC structure aluminum vacuum electron beam welding jig of claim 2, wherein: the adjustment screw located on the clamping carriage (9) wherein both sides of a transverse plate (19) (6 ) attached to one end side of the transverse plate (19), the other lateral plate (19) adjusting screw (6) is mounted on the other end side of the horizontal plate (19).
  4. 4.按权利要求1或2所述的I C装备铝合金结构件真空电子束焊接夹具,其特征在于:所述调整螺杆(6)与立柱(5)相平行。 4. Equipment as claimed in claim aluminum structure I C vacuum electron beam welding fixture of claim 1 or 2, characterized in that: said adjustment screw (6) and the column (5) in parallel.
  5. 5.按权利要求1所述的IC装备铝合金结构件真空电子束焊接夹具,其特征在于:所述夹紧螺杆(8)的一端转动安装在所述工件(10)任一侧的夹紧滑块(9)上,夹紧螺杆(8)的另一端与所述工件(10)另一侧的夹紧滑块(9)螺纹连接。 5. Equipment as claimed in claim IC structure aluminum vacuum electron beam welding jig of claim 1, wherein: one end of the clamping clamping screw (8) is rotatably mounted on either the workpiece (10) on one side of a slider (9), (10) clamping the clamping screw (8) and the other end of the other side of the workpiece (9) a threaded connection.
  6. 6.按权利要求5所述的IC装备铝合金结构件真空电子束焊接夹具,其特征在于:所述与夹紧螺杆(8)螺纹连接的夹紧滑块(9)沿横梁架(7)往复移动,并通过定位锁紧螺钉(14)与横梁架(7)抵接定位。 6. The IC of claim 5, wherein the equipment structure aluminum vacuum electron beam welding jig, wherein: said clamping screw (8) screwed a clamping slider (9) along the beam frame (7) reciprocated, and by positioning the locking screw (14) and the crossbeam (7) abuts against the positioning.
  7. 7.按权利要求5所述的IC装备铝合金结构件真空电子束焊接夹具,其特征在于:所述夹紧滑块(9)的内侧沿夹紧滑块的长度方向设有第二定位槽(18),被焊接的两个工件(10)的一侧搭在该第二定位槽(18)上,另一侧搭在所述垫板(12)上。 7. Equipment as claimed in claim IC structure aluminum vacuum electron beam welding jig 5, characterized in that: the longitudinal direction of the clamping slider (9) along the inner side of the clamping carriage is provided with a second positioning groove (18), one side of the two workpieces (10) are welded to ride on the second positioning groove (18), resting on the other side of the backing plate (12).
  8. 8.按权利要求5所述的IC装备铝合金结构件真空电子束焊接夹具,其特征在于:所述被焊接的两个工件(10)另一侧下方的两个垫板(12)之间设有安装在横梁架(7)上的熔渣防护板(13),被焊接的两个工件(10)之间的焊缝(11)位于该熔渣防护板(13)的正上方。 IC Equipment aluminum structure 8. The vacuum electron beam welding fixture according to claim 5, characterized in that: between the two workpieces to be welded (10) two backing plate (12) below the other side with slag protection plate (13) mounted on the crossbeam (7), the weld between two workpieces (10) are welded (11) located directly above the slag shield plate (13).
  9. 9.按权利要求1所述的IC装备铝合金结构件真空电子束焊接夹具,其特征在于:所述二维数控平台包括X轴滑台(1)、Y轴滑台(2)及工作台(3),其中X轴滑台(I)安装在Y轴滑台(2)的丝母上,通过丝母与Y轴滑台(2)的丝杠螺纹连接,沿Y轴滑台(2)的丝杠往复移动;所述工作台(3)安装在X轴滑台(I)的丝母上,通过丝母与X轴滑台(I)的丝杠螺纹连接,沿X轴滑台(I)的丝杠往复移动,并且随X轴滑台(I)沿Y轴滑台(2)的丝杠往复移动;所述立柱(5)的一端与横板(19)相连,另一端通过连接板(4)与所述工作台(3)连接。 9. Equipment as claimed in claim IC structure aluminum vacuum electron beam welding jig of claim 1, wherein: said two-dimensional numerical platform comprises an X-axis slide (1), the Y-axis slide (2) and the table screw thread (3), wherein the X-axis slide (I) mounted on the nut Y-axis slide (2) by the nut and the Y-axis slide (2) is connected to the Y-axis slide (2) reciprocating screw; of the table (3) is mounted on the X-axis slide nut (I) by the X-axis slide nut table (I) is screw threaded connection, the slide table along the X-axis (I ) reciprocates the screw, and with the X-axis slide (I) sliding along the Y-axis table (2) screw reciprocating movement; the column (5) one end of the horizontal plate (19) and the other end is connected via plate (4) and the table (3) is connected.
  10. 10.按权利要求9所述的I C装备铝合金结构件真空电子束焊接夹具,其特征在于:所述连接板(4)与工作台(3)之间通过定位槽与定位块定位,并通过T型槽与T型螺钉夹紧固定。 10. Equipment as claimed in claim IC structure aluminum vacuum electron beam welding fixture of claim 9, wherein: said plate (4) and the table (3) positioned by the positioning groove and the positioning block, and by T-slot and T-clamp fixing screw.
CN 201210434040 2012-11-02 2012-11-02 Ic structure equipped with one kind of aluminum vacuum electron beam welding jig CN103785940B (en)

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CN104959725B (en) * 2015-06-08 2017-05-31 航天材料及工艺研究所 A large, variable thickness member deformation control method of electron beam welding

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CN202861621U (en) * 2012-11-02 2013-04-10 中国科学院沈阳自动化研究所 Integrated circuit (IC) equipment aluminum alloy structural part vacuum electron beam welding jig

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Publication number Priority date Publication date Assignee Title
US5170028A (en) * 1989-08-28 1992-12-08 Hitachi, Ltd. Process and apparatus, for electron beam welding of a member partially enclosed in vacuum chamber, and the member formed thereby
US6722872B1 (en) * 1999-06-23 2004-04-20 Stratasys, Inc. High temperature modeling apparatus
CN1695896A (en) * 2005-05-26 2005-11-16 上海交通大学 Flexible device for multipoint clamping and positioning spatial 3D thin wall part
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