CN103780005A - Rotating motor device - Google Patents
Rotating motor device Download PDFInfo
- Publication number
- CN103780005A CN103780005A CN201210408236.XA CN201210408236A CN103780005A CN 103780005 A CN103780005 A CN 103780005A CN 201210408236 A CN201210408236 A CN 201210408236A CN 103780005 A CN103780005 A CN 103780005A
- Authority
- CN
- China
- Prior art keywords
- electric rotating
- transmission shaft
- bearing
- stator
- motor magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention provides a rotating motor device which comprises a rotating motor box body, a DC motor rotor, a rotor load, a motor magnet stator assembly, a stator transmission shaft, a stator load, a rolling bearing, and a rotor transmission shaft bearing. The stator transmission shaft is supported on the rotating motor box body through the rolling bearing. Two ends of the stator transmission shaft are respectively connected with the motor magnet stator assembly and the stator load. The device also comprises a rotating bearing assembly which is fixedly connected to the rotating motor box body. The motor magnet stator assembly and the rotating motor box body are connected by using the rotating bearing assembly such that the motor magnet stator assembly can freely move in a rotating detection so as to eliminate the reacting force generated in the working of the rotating motor device. According to the rotating motor device, the vibration source is eliminated essentially, and a good vibration reduction effect is achieved.
Description
Technical field
The present invention relates to machine field, particularly a kind of electric rotating machinery apparatus with vibration-damping function.
Background technology
Along with the development of ultra tiny process and assemble technology, ultra precise measurement technology, the impact of micro-vibration becomes more and more outstanding.A vibrative motor that important vibration source is transmission device, the reaction force producing of high-speed rotary motor can produce periodic excitation to external world.When this periodic excitation overlaps with the natural frequency of device structure, can cause mesomerism, cause equipment precision to decline, even produce structural deterioration.Therefore vibration how to control electric rotating machine generation becomes the important topic of people's research.
Mask aligner, due to the needs of design, need to use a large amount of electric rotating machines as transmission device.Electric rotating machine its counter-force in the time of work can produce larger vibration to mask aligner external frame and disturb.Thereby the vibration of outside framework finally can be delivered to the inner crucial subsystem impact of mask aligner exposure.Unaffected for guaranteeing mask aligner precision, the vibration that need produce electric rotating machine is processed.Traditional method be all adopt passive vibration isolation mode vacuum pump vibration source is vibrated to isolation, fundamentally do not eliminate vibration source, the effect of vibration isolation is limited.
Existing technical scheme is that electric rotating machine is directly fixed on framework, or is fixed on framework by block rubber, thereby the reaction force that electric rotating machine produces in the time of work can be delivered to generation vibration on framework.
Chinese patent 200520089317.3 discloses a kind of Combined electric machine vibration reducer, the both sides of damping ring and shock-reducing sleeve fixed electrical machinery housing by U-shaped, damping ring opposite side is fixed on vibration reduction support plate, formed by vibration reduction support ring and vibration reduction support plate two-stage vibration damping, thereby play the effect of isolating vibration source.
Chinese patent 200520089319.2 discloses a kind of support plate type electric machine vibration reducer, one end of vibration reduction support plate is by cushion blocking, spring and securing member locking thereof, the other end is assembled on crossbeam, the vibration reduction support seat that is sleeved on crossbeam two ends is fixed with clamp respectively, thereby plays the effect of isolation vibration source.
Patent 200520089317.3 and patent 200520089317.3 be all adopt passive vibration isolation mode vibration source is vibrated to isolation, fundamentally do not eliminate vibration source, the effect of vibration isolation is limited.This patent, according to principle of conservation of momentum, adopts spin balancing piece technology, from eliminating in essence vibration source, thereby plays good effectiveness in vibration suppression.
Summary of the invention
The technical problem to be solved in the present invention is the vibration source of eliminating in electric rotating machinery apparatus.
In order to solve the problems of the technologies described above, the invention provides a kind of electric rotating machinery apparatus, comprise electric rotating machine casing, direct current machine mover, mover load, motor magnet stator module, stator power transmission shaft, stator load, rolling bearing, mover transmission shaft bearing, described stator power transmission shaft is bearing on described electric rotating machine casing by described rolling bearing, described stator power transmission shaft two ends connect respectively described motor magnet stator module and described stator load
Also comprise the swivel bearing assembly being fixedly connected on described electric rotating machine casing, described motor magnet stator module adopts described swivel bearing assembly to be connected with described electric rotating machine casing, make the described motor magnet stator module can free movement in direction of rotation, the reaction force producing when eliminating electric rotating machinery apparatus work.
Preferably, described swivel bearing assembly is annular air-bearing composition.
Preferably, described swivel bearing assembly is rolling bearing composition.
Further, also comprise central axis component, described central axis component one end is bearing on described stator power transmission shaft by described mover transmission shaft bearing.
Further, also comprise direct current machine commutation assembly, for direct current reversing, described direct motor commutation assembly is fixed by gusset and described motor magnet stator module.
The invention has the advantages that the spin balancing piece technology that adopts, adopt bearing that motor case body is kept apart the magnet stator module of motor, thereby from eliminating in essence the impact of the reaction force producing when motor rotates on frame vibration, from eliminating in essence vibration source, thereby play good effectiveness in vibration suppression.
Accompanying drawing explanation
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Fig. 1 is electric rotating machine structural principle schematic diagram;
Fig. 2 is electric rotating machine reversing principle schematic diagram;
Fig. 3 is swivel bearing assembly the first execution mode schematic diagram;
Fig. 4 is swivel bearing assembly the second execution mode schematic diagram.
Embodiment
Describe specific embodiments of the invention in detail below in conjunction with accompanying drawing.
Extreme ultraviolet lithography (Extreme Ultraviolet Lithography (EUVL)) meets 22nm and the Next Generation Lithography most with application prospect with lower node thereof, has caused the great attention of global semiconductor industry.The feature that EUVL is the most basic is the 13.5nm ultraviolet light that has adopted wavelength extremely short, and because extreme ultraviolet is easily absorbed, the subsystem relevant to optic path all must be in high vacuum environment.The required vacuum environment of EUVL mask aligner need realize with the pump drainage of vacuum pump.
EUVL mask aligner, due to the needs of vacuum framework and complete machine layout, need to be placed on vacuum pump in complete machine external frame.Vacuum pump adopts electric rotating machine to realize the pump drainage of gas, and its counter-force producing in the time of work can produce larger vibration to external frame and disturb.Thereby the vibration of outside framework finally can be delivered to the inner crucial subsystem impact of mask aligner exposure.Unaffected for guaranteeing mask aligner precision, the vibration that need produce vacuum pump is processed.
The present invention is based on electric rotating machine vibration-proof structure scheme, adopt principle of conservation of momentum and spin balancing piece technology, adopt swivel bearing that motor case body is kept apart the magnet stator module of motor, thereby from eliminating in essence the reaction force producing when electric rotating machine rotates, thereby reach the object of vibration damping.
As shown in Figure 1, electric rotating machinery apparatus comprises electric rotating machine casing 101, direct current machine mover 103, mover load 107, motor magnet stator module 108, stator power transmission shaft 109, stator load 110, rolling bearing 111, mover transmission shaft bearing 112.Stator power transmission shaft 109 is bearing on electric rotating machine casing 101 by rolling bearing 111, and its two ends connect respectively motor magnet stator module 108 and stator load 110.Central axis component 106 one end are bearing on stator power transmission shaft 109 by mover transmission shaft bearing 112.When traditional electric rotating machine is worked, owing to having Lorentz force action between direct current machine mover 103 and motor magnet stator module 108, the reaction force that motor magnet stator module 108 can produce motor passes on pedestal by fixing with it electric rotating machine casing 101.In the present invention, electric rotating machine also comprises swivel bearing assembly 102, between motor magnet stator module 108 and electric rotating machine casing 101, adopt swivel bearing assembly 102 to connect, swivel bearing assembly 102 use screws are connected on electric rotating machine casing 101, make the motor magnet stator module 108 can free movement in direction of rotation.Swivel bearing assembly 102 can be annular air supporting block assembly, can be also rolling bearing assembly.In the time that electric rotating machine is worked, Lorentz force action between direct current machine mover 103 and motor magnet stator module 108 is on motor magnet stator module 108, motor magnet stator module 108 can be in direction of rotation free movement by swivel bearing assembly 102, the reaction force producing so just can eliminate electric rotating machine work time.
As shown in Figure 2, direct current machine commutation assembly 104 in electric rotating machinery apparatus is fixed together by gusset and motor magnet stator module 108, under DC power supply effect, when electric rotating machine work, be while there is Lorentz force action between direct current machine mover 103 and motor magnet stator module 108, direct current machine mover 103 and the 108 meeting reverse rotations of motor magnet stator module, direct current machine commutation assembly 104 and motor magnet stator module 108 can carry out the rotation of equal angular, thereby play the effect of electric current commutation, produce and continue to promote the Lorentz force that direct current machine mover 103 rotates.Direct current machine commutation assembly 104 is communicated with external circuit 105.
As shown in Figure 3, swivel bearing assembly 102 is made up of two groups of annular air-bearings, be arranged in motor magnet stator module 108 two ends, every group of annular air-bearing has and is no less than 4 annular air supporting pieces 1021, annular air supporting piece 1021 fixing end faces are fixed by screws on electric rotating machine casing 101, other end is that working face is connected with pneumatically supported form noncontact with motor magnet stator module 108, can be similar to without friction rotation thereby realize motor magnet stator module 108.
As shown in Figure 4, swivel bearing assembly 102 replaces with two groups of rolling bearings, be that annular air supporting piece 1021 use axis of rolling supporting blocks 1022 substitute, can be similar to without friction rotation, its another way of realization that is swivel bearing thereby realize motor magnet stator module 108.
Described in this specification is preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (5)
1. an electric rotating machinery apparatus, comprise electric rotating machine casing, direct current machine mover, mover load, motor magnet stator module, stator power transmission shaft, stator load, rolling bearing, mover transmission shaft bearing, described stator power transmission shaft is bearing on described electric rotating machine casing by described rolling bearing, described stator power transmission shaft two ends connect respectively described motor magnet stator module and described stator load
It is characterized in that, also comprise the swivel bearing assembly being fixedly connected on described electric rotating machine casing, described motor magnet stator module adopts described swivel bearing assembly to be connected with described electric rotating machine casing, make the described motor magnet stator module can free movement in direction of rotation, the reaction force producing when eliminating electric rotating machinery apparatus work.
2. electric rotating machinery apparatus according to claim 1, is characterized in that, described swivel bearing assembly is annular air-bearing composition.
3. electric rotating machinery apparatus according to claim 1, is characterized in that, described swivel bearing assembly is rolling bearing composition.
4. electric rotating machinery apparatus according to claim 1, is characterized in that, also comprises central axis component, and described central axis component one end is bearing on described stator power transmission shaft by described mover transmission shaft bearing.
5. electric rotating machinery apparatus according to claim 1, is characterized in that, also comprises direct current machine commutation assembly, and for direct current reversing, described direct motor commutation assembly is fixed by gusset and described motor magnet stator module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210408236.XA CN103780005A (en) | 2012-10-24 | 2012-10-24 | Rotating motor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210408236.XA CN103780005A (en) | 2012-10-24 | 2012-10-24 | Rotating motor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103780005A true CN103780005A (en) | 2014-05-07 |
Family
ID=50571953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210408236.XA Pending CN103780005A (en) | 2012-10-24 | 2012-10-24 | Rotating motor device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103780005A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103995094A (en) * | 2014-06-14 | 2014-08-20 | 开滦(集团)有限责任公司技术中心 | Experiment device of rotatably disturbing coal body rich in gas |
| CN105720728A (en) * | 2014-12-17 | 2016-06-29 | 东芝三菱电机产业系统株式会社 | Rotating electrical motor and resonance avoidance method |
| CN109014993A (en) * | 2018-08-17 | 2018-12-18 | 中原工学院 | A kind of embedded fast tool servo device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1035211A (en) * | 1988-09-13 | 1989-08-30 | 曾剑良 | Double-rotor machine |
| US5486965A (en) * | 1993-02-18 | 1996-01-23 | Hitachi, Ltd. | Rotary information recording/reproducing apparatus carriage actuator arrangement |
| US20040174083A1 (en) * | 2003-03-04 | 2004-09-09 | Lg Electronics Inc. | Single phase induction motor |
| CN101286681A (en) * | 2008-02-05 | 2008-10-15 | 杜文达 | Electric powered magnetic differential driver |
| CN102055287A (en) * | 2009-10-29 | 2011-05-11 | 周宗元 | Double-rotating low-speed motor device |
-
2012
- 2012-10-24 CN CN201210408236.XA patent/CN103780005A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1035211A (en) * | 1988-09-13 | 1989-08-30 | 曾剑良 | Double-rotor machine |
| US5486965A (en) * | 1993-02-18 | 1996-01-23 | Hitachi, Ltd. | Rotary information recording/reproducing apparatus carriage actuator arrangement |
| US20040174083A1 (en) * | 2003-03-04 | 2004-09-09 | Lg Electronics Inc. | Single phase induction motor |
| CN101286681A (en) * | 2008-02-05 | 2008-10-15 | 杜文达 | Electric powered magnetic differential driver |
| CN102055287A (en) * | 2009-10-29 | 2011-05-11 | 周宗元 | Double-rotating low-speed motor device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103995094A (en) * | 2014-06-14 | 2014-08-20 | 开滦(集团)有限责任公司技术中心 | Experiment device of rotatably disturbing coal body rich in gas |
| CN105720728A (en) * | 2014-12-17 | 2016-06-29 | 东芝三菱电机产业系统株式会社 | Rotating electrical motor and resonance avoidance method |
| CN105720728B (en) * | 2014-12-17 | 2018-06-19 | 东芝三菱电机产业系统株式会社 | Electric rotating machine and resonance avoiding method |
| CN109014993A (en) * | 2018-08-17 | 2018-12-18 | 中原工学院 | A kind of embedded fast tool servo device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101807010B (en) | Nano-precision six-freedom-degree magnetic suspension jiggle station and application | |
| US8084897B2 (en) | Micro stage with 6 degrees of freedom | |
| Asama et al. | Effects of permanent-magnet passive magnetic bearing on a two-axis actively regulated low-speed bearingless motor | |
| CN103780005A (en) | Rotating motor device | |
| Ooshima et al. | Magnetic suspension performance of a bearingless motor/generator for flywheel energy storage systems | |
| CN102880009A (en) | Six-degree-of-freedom micro-motion worktable | |
| CN103226295A (en) | Lithography machine silicon wafer bench micro-motion workbench | |
| CN103226296A (en) | Rough-fine-movement laminated workbench with laser interferometer measurement | |
| US9791789B2 (en) | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | |
| He et al. | Development of a novel 5-DOF controlled maglev local actuator for high-speed electrical discharge machining | |
| CN102398214A (en) | Static pressure workbench for extra-large vertical grinder | |
| Zhou et al. | One-axis hysteresis motor driven magnetically suspended reaction sphere | |
| Liu | Survey of bearingless motor technologies and applications | |
| Abdel-Khalik et al. | A bearingless coaxial magnetic gearbox | |
| Sugimoto et al. | A vibration reduction method of one-axis actively position regulated single-drive bearingless motor with repulsive passive magnetic bearings | |
| JP2003341844A (en) | Transfer device | |
| Asama et al. | A novel concept of a single-drive bearingless motor | |
| CN203275876U (en) | Micromotion working platform of silicon wafer platform of a photoetching machine | |
| Kumar et al. | Design and analysis of a radial active magnetic bearing for vibration control | |
| CN105827096A (en) | Voice coil motor | |
| Ohji et al. | Conveyance test by oscillation and rotation to a permanent magnet repulsive-type conveyor | |
| CN105186812A (en) | Totally-enclosed horizontal-type dual-rotor power generation equipment | |
| CN209892623U (en) | Axial radial electromagnetic magnetic bearing | |
| Bagaric et al. | Design and characterization of a bearingless cross-flow fan | |
| CN220227524U (en) | Hybrid suspension bearing mechanism and motor-driven hybrid suspension rotor system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140507 |