CN103776846A - X-ray inspection apparatus - Google Patents

X-ray inspection apparatus Download PDF

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Publication number
CN103776846A
CN103776846A CN201210406171.5A CN201210406171A CN103776846A CN 103776846 A CN103776846 A CN 103776846A CN 201210406171 A CN201210406171 A CN 201210406171A CN 103776846 A CN103776846 A CN 103776846A
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China
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ray
axle
driving shaft
arranged side
power transmission
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CN201210406171.5A
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CN103776846B (en
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寺岡璋
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Da Ying Co Ltd
DYNE CORP
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Da Ying Co Ltd
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Abstract

The objective of the invention is to provide an X-ray inspection apparatus which can greatly shorten time needed in one tomography (to less than 1 s) and realize high-speed and high-precision inspection of installation states of electronic components under the condition of no reduction in precision (dissociation energy) of tomography and is composed of cheap parts. The X-ray inspection apparatus comprises a circular moving mechanism 25 and a circular moving mechanism 24, wherein the circular moving mechanism 25 allows an X-ray emission surface 12a to be parallel to a carrying surface of a sample, a straight line connecting two certain points on the X-ray emission surface 12a to maintain at a certain direction and an X-ray generator 12 to carry out circular movement with an axis L1 as the center and a length r as the radius, the circular moving mechanism 24 allows an X-ray reception surface I to be parallel to the carrying surface, a straight line connecting two certain points on the X-ray reception surface I to maintain at a certain direction and an X-ray detector 11 to carry out circular movement with the axis L1 as the center, the circular moving mechanism 25 and the circular moving mechanism 24 are mechanically connected through a power transmission mechanism 26 which transmits power from a motor M11, and under the driving of the power transmission mechanism 26, the X-ray detector 11 and the X-ray generator 12 synchronously carry out circular movement.

Description

X ray checking device
Technical field
The present invention relates to X ray checking device, in more detail, relate to utilizing the BGA(Ball Grid Array of X-ray examination Miniature high-density), CSP(Chip Scale Package) etc. electronic unit to the X ray checking device of the installment state of substrate (installation base plate).
Background technology
In PC (Personal Computer), portable terminal device, reflection speech equipment etc., aspect its high performance, there is pippin.Wherein, as one of its core, become propelling power, the densification of the installation base plate of the core of these equipment.Particularly, BGA, CSP etc. are adopted numerously in the IC of excellence aspect sub-ization of multiterminal encapsulation in recent years.
But, although BGA, CSP etc. to be encapsulated in sub-ization of multiterminal aspect very excellent, but in the time being installed to the situation of printed base plate, in its structure, because encapsulation main body has hidden encapsulation and the junction surface of printed base plate, people's visual examination is to be certainly difficult to, though the visual examination of optical profile type be also difficult to confirm engagement state well whether.
So, utilize the inspection that sees through the X ray that object character is strong to receive publicity.As by the testing fixture of X ray, have object to becoming checked object radiation X ray, by detect perspective that the described X ray that sees through object obtains described object as roentgenoscope, obtain with the face of the main surface parallel of printed base plate on the X-ray tomograph etc. of faultage image cutting into slices.
(for example use roentgenoscope, with reference to following patent documentation 1), can look like to observe using the interior shape that can not observe from outside as perspective, roentgenoscope has the effect that has or not the better simply underproof essential factor of geometric ratio that detects scolder bridge joint (short circuit), solder void the having or not of (bubble comprising in the inside of solder bonds portion), scolder fragment.But roentgenoscope, is difficult to detect the very few underproof essential factor such as too much of open circuit (departing from defective), the scolder of soldered ball portion.
On the other hand, known use X-ray tomograph, the detection of the very few defective essential factor such as too much of the open circuit in butt welding bulb in principle, scolder bridge joint, scolder has effect.But detect clearly the open circuit of soldered ball portion, be actually be with very much inconvenient.In addition, whether allow to detect well, which type of defective state is also difficult to detect is.
So the inventor had previously proposed about can precision good, the X ray checking device that utilizes the installment state to substrate of the electronic unit of tomography X to BGA, CSP etc. to check low price.Figure 15 is the block scheme that has roughly shown the major part of disclosed X ray checking device in the previous following patent documentation 2 of inventing of the inventor.In figure, Smp represents to become the sample of checked object, and sample Smp is positioned in central portion and is formed with on the sample stage 1 through the transmitting plate 1a of X ray.
Across sample stage 1, configuration has X-ray detector 11 Hes of X ray sensitive surface I in opposite directions, comprise the x ray generator 12 that x-ray focus forms, from x-ray focus S1 radiation X ray, see through the X ray of transmitting plate 1a and sample Smp, detected on the X ray sensitive surface I of X-ray detector 11.In addition, in figure T1 represent to comprise from the optical axis OA of the X ray of x-ray focus S1 radiation and, the face of the intersection point O1 of the axle L1 intersecting vertically with the mounting surface of sample stage 1, face T1 becomes tomography face FP.
X-ray detector 11 with portrait handling part 2 be connected, with draw a portrait accordingly at the detected X ray of X-ray detector 11 data (image signal) to portrait handling part 2 export.Portrait handling part 2, improve the signal processing of image quality etc., and the portrait data of having processed through signal are exported to display (non-diagram), microcontroller 3.
Circular travel mechanism 4, be subject to from the revolving force of engine M1 and drive, to use so that the mounting surface keeping parallelism of X ray sensitive surface I and sample stage 1, and make the direction of the straight line that connects upper certain 2 point of X sensitive surface I remain on certain direction, make X-ray detector around axle L1, centered by axle L1, do circular mobile mechanism.
On the other hand, circular travel mechanism 5, be subject to from the revolving force of engine M2 and drive, to use so that the mounting surface keeping parallelism of X ray emitting surface 12a and sample stage 1, and make the direction of the straight line that connects certain 2 point on X ray emitting surface 12a remain on certain direction, make x ray generator 12 centered by axle L1, do circular mobile mechanism take the distance r from axle L1 to x-ray focus S1 as radius (, make x-ray focus S1, the mechanism rotating centered by axle L1).
These engines M1, M2 are controlled by microcontroller 3, and x-ray focus S1 moves to synchronize with the circle of X-ray detector 11 and has the phase differential of 180 °, to its control, it is rotated centered by axle L1.
In addition, horizontal mobile mechanism 6, be subject to from the revolving force of engine M3 and drive, to use so that the mechanism that the mounting surface of X-ray detector 11 and sample stage 1 moves abreast, vertical movement mechanism 7 is subject to drive from the revolving force of engine M4, is the mechanism that x ray generator 12 is moved in the direction of axle L1.These engines M3, M4 are also controlled by microcontroller 3.In addition, operating portion 8 is connected on microcontroller 3.
About the running of X-ray detector 11 and x-ray focus S1, the schematic diagram that uses Figure 16～18 to show elaborates.Figure 16 shows that oblique view, Figure 17 show front view, Figure 18 display plane figure.X-ray detector 11, around the axle L1 intersecting vertically with the mounting surface of sample stage (non-diagram), centered by axle L1, is done circular mobile.Therefore, X-ray detector 11 is not merely to rotate centered by axle L1, but make X ray sensitive surface I remain on the face of regulation and the direction that makes to connect certain straight line of 2 on X ray sensitive surface I (for example, the direction of straight line α β of tie point α and some β) remain on certain direction, centered by axle L1 for example to I 1～I 3do circular mobile.
On the other hand, x-ray focus S1, as shown in Figure 16～Figure 18, moves to synchronize with the circle of X-ray detector 11 and has the phase differential of 180 °, centered by axle L1 to S1 1～S1 3do circular mobile.
If it is circular mobile that X-ray detector 11 and x-ray focus S1 are done as described above, the optical axis OA of X ray that the some O1(existing on face T1 is so radiated by x-ray focus S1 and the intersection point of axle L1), the detection position of some P1 on X ray sensitive surface I, with an O1 1～O1 3, some P11～P13 do circular mobile irrelevant, always in same position.This is due to take an O1 as benchmark, and X ray point of intersection S 1 and the geometric relation of X ray sensitive surface I keep certain cause.
In addition, if the distance of the some O1 using from x-ray focus S1 to face T1 is as D1, by the some O1 from X ray sensitive surface I 1～O1 3arrive the distance of some O1 as d1, so at △ S1 1o1 1p1 1with, △ S1 2o1 2p1 2with, △ S1 3o1 3p1 3in, following formula is set up.
O1 1P1 1=?O1 2P1 2=?O1 3P1 3?=?O1 1P1 1（D1+d1）/D1
By the way, (D1+d1)/D1 is the geometric amplification degree of tomography portrait.
On the other hand, about not being to be present in face T1 above, for example, in the detection position on X ray sensitive surface I of the upper some Q1 existing of another one face T1 ' (with reference to Figure 16), make x-ray focus S1 to S1 1～S1 3, X ray sensitive surface I is to I 1～I 3when mobile, to a Q1 1～Q1 3change., the input position of the picture of some Q1 changes, and as fuzzy, no longer becomes the object depending on recognizing.
Like this, with respect to making X-ray detector 11(X ray sensitive surface I) and x-ray focus S1 do as described above under circular mobile situation, be present in the detection position on X ray sensitive surface I of the point (for example putting O1, some P1) on face T1, always, in identical position, the non-detection position on X ray sensitive surface I that is present in the point (for example putting Q1) on face T1 changes.Therefore, circular mobile by X-ray detector 11 and x-ray focus S1 are done as described above, can obtain the picture (, the tomography of face T1 portrait) only existing on face T1.
Therefore, by using this X ray checking device, can obtain the tomography portrait of the sample Smp being positioned on sample stage 1, be difficult to observe from outside thereby can positively detect, the very few defective reason too much etc. of the open circuit of soldered ball portion, scolder bridge joint, scolder.
; due to the X ray checking device of this (utilizing tomography portrait to check the installment state to substrate of electronic unit); be difficult to carry out fast tomography; therefore before, do not imagine in the manufacture line that puts it to electronic unit; use as the automatic checking device of so-called on-line operation, normally in the other medium use of inspection operation separating with the manufacture line of electronic unit.
On the other hand, in recent years, in order further to improve the productivity etc. of electronic unit, strongly need can be put in the manufacture line of electronic unit, can be used as the X ray checking device of the automatic checking device utilization of on-line operation, also inquire into about the rapid of tomography, but fully rapid as tackling possible testing fixture in line, also do not realize.
So, the inventor, about utilizing above-mentioned X ray checking device, the rapid of the tomography of former technical elements difficulty inquired into.In above-mentioned X ray checking device, control 2 engines,, drive circular travel mechanism 4 engine M1 and, drive the engine M2 of circular travel mechanism 5, control makes the x-ray focus S1 of x ray generator 12 move to synchronize with the circle of X-ray detector 11 to have the phase differential of 180 °, rotate.Therefore, in order to realize the rapid of tomography, consider to improve respectively the revolving force of engine M1, M2, control and make X-ray detector 11 and the circle of x ray generator 12 move more rapid.
By in above-mentioned X ray checking device, improve respectively the revolving force of engine M1, M2, make X-ray detector 11 rapid with the circus movement of x ray generator 12, thus can be by the degree of the time shorten to 3 that tomography is wanted of 1 time second.
But, when the testing fixture using X ray checking device as on-line operation utilizes, the tomography of 1 time to be that 1 second degree is desirable below the time.Therefore, if further improve again the revolving force of engine M1, M2, X-ray detector 11 and the circle of x ray generator 12 are moved to further high speed again, and X-ray detector 11 moves and is offset with the circle of x ray generator 12, and the phenomenon of coordination dislocation occurs.
This phenomenon, think rapid due to what move along with described circle, become very large by X-ray detector 11 and the difference of the inertial force bringing of poor quality of x ray generator 12, the revolving force (horsepower) of 2 engine M1, M2 could not perform and produce with the adjustment control of sensitivity (gain).X-ray detector 11 moves and is offset with the circle of x ray generator 12, even because coordination a little misplaces, the resolution of tomography shooting portrait reduces, and the picture of making a video recording is fuzzy, becomes and is difficult to obtain high-precision tomography portrait.
In former X ray checking device, do not reduce the precision (resolution) of tomography portrait, and the desired degree of testing fixture (degree was following in 1 second) that the tomography required time that makes 1 time significantly shortens to as on-line operation is difficult to, and still has unconsummated problem as tackling possible fast automatic testing fixture in line.
Prior art document
Patent documentation
Patent documentation 1 Japanese kokai publication hei 10-239253 communique
Patent documentation 2 TOHKEMY 2008-256441 communiques
Summary of the invention
For solving means and the effect thereof of problem
The present invention is in view of above-mentioned problem, object is to provide a kind of X ray checking device, described X ray checking device does not reduce the precision (resolution) of tomography portrait, 1 tomography can be wanted the time significantly to shorten (to 1 second below degree), can fast and carry out accurately the inspection of the installment state of the electronic unit of BGA, the CSP etc. of Miniature high-density, and can form on low price ground, can be put in manufacture (installation) line of electronic unit as the testing fixture of on-line operation.
To achieve these goals, the X ray checking device (1) the present invention relates to, it is characterized in that, dispose in opposite directions the x ray generator and the X-ray detector that comprise x-ray focus in the mounting surface across sample, radiate from described x-ray focus, in the X ray checking device forming in described X-ray detector detection through the X ray of described sample, there is the X ray emitting surface and the described mounting surface keeping parallelism that make described x ray generator, and the direction that connects certain straight line of 2 on described X ray emitting surface remains on certain direction, make described x ray generator, centered by the axle intersecting vertically with described configuration plane, length from this axle to described x-ray focus be radius do circular mobile generator mobile means and, make X ray sensitive surface and the described mounting surface keeping parallelism of described X-ray detector, and the direction that connects certain straight line of 2 on described X ray sensitive surface remains on certain direction, make described x ray generator around described axle, make circular mobile detecting device mobile means centered by this axle time, described generator mobile means and described detecting device mobile means, by mechanically transmitting the power transmission means from the power of drive source, mechanically link, by the driving of this power transmission means, described x ray generator moves to synchronize with the circle of described X-ray detector and carries out and form.
According to above-mentioned X ray checking device (1), due to described x ray generator, make described X ray emitting surface and described mounting surface keeping parallelism, and make the direction that connects certain straight line of 2 on described X ray emitting surface remain on certain direction, centered by the axle intersecting vertically with described mounting surface, do circular movement take the length from this axle to described x-ray focus as radius, so described x-ray focus rotates centered by described axle.
On the other hand, described X-ray detector, makes described X ray sensitive surface and described mounting surface keeping parallelism, and, the direction that connects certain straight line of 2 of described X ray sensitive surface remains on certain direction, around described axle, does circular mobile centered by this axle.
The running of described X-ray detector and described x-ray focus, identical with X-ray detector 11 and the operating in principle of x-ray focus S1 of Figure 16～Figure 18 explanation, make to move and synchronize with the circle centered by described axle of described X-ray detector, can make described x-ray focus rotate centered by described axle, can obtain the tomography portrait of described sample.
And then, in above-mentioned X ray checking device (1), with so that described X-ray detector and described x-ray focus are made circular mobile described generator mobile means and described detecting device mobile means, mechanically link by mechanically transmitting from the power transmission means of the power of drive source, by the driving of this power transmission means, the circle movement of described generator mobile means and described detecting device mobile means can mechanically synchronously form.Therefore, even if improve the horsepower of described drive source, make the circle of described x ray generator and described X-ray detector move rapid, because being mechanically transmits the power from described drive source by described power transmission means to described generator mobile means and described detector mobile means, so the synchronous dislocation (rotation offset) that can make the circle of described X-ray detector move to move with the circle of described x ray generator does not occur.
Accordingly, the high-speed photograph of high-precision section portrait becomes possibility, can significantly foreshorten to 1 second below degree by obtaining 1 the tomography portrait time of wanting, can realize the device of manufacture (installation) line (the interior correspondence of line) that can be put into electronic unit.
The X ray checking device (2) the present invention relates to, it is characterized in that, in above-mentioned X ray checking device (1), described power transmission means comprise the 1st the power transmission shaft that mechanically links with described generator mobile means and, the 2nd the power transmission shaft mechanically linking with described detecting device mobile means and, mechanically link described the 1st power transmission shaft and the 2nd power transmission shaft the 3rd power transmission axle and form, described drive source and described in any one the 1st～3rd power transmission shaft link.
According to above-mentioned X ray checking device (2), because described power transmission means is that the formation linking with described the 1st, the 2nd, the 3rd power transmission shaft realizes, so can low price and save and realize spatially the mechanically mechanism to described generator mobile means and described detecting device mobile means by the power transmission from described drive source, thereby cost of restraining device significantly.
In addition, the X ray checking device (3) the present invention relates to, it is characterized in that, in above-mentioned X ray checking device (2), described generator mobile means comprise the state to link with described the 1st power transmission shaft be disposed in support sector the driving shaft take described axle as axle center and, be disposed in described support sector and described driving shaft axle arranged side by side arranged side by side and, in order to by the joint portion of described driving shaft and described axle arranged side by side and described x ray generator combination and, be suspended on the suspension transmission means between described driving shaft and described axle arranged side by side and form, described x ray generator is by described joint portion, from described driving shaft and described axle arranged side by side axle center separately to same direction be offset described length position, so that the axle center spacing of the distance between described axle fulcrum and described driving shaft and described axle arranged side by side is identical and supported by axle.
According to described X ray checking device (3), because described x ray generator is supported by axle at different 2, so its mobile alignment is by specifically for one.In addition, due to these axle fulcrums, in the position that is offset described length from described driving shaft and described axle arranged side by side axle center separately to same direction, so can make described x ray generator with the axle center of described driving shaft (, the axle intersecting vertically with described mounting surface) centered by, do circular mobile take described length as radius.
In addition, if the circle of described x ray generator and described X-ray detector is moved (parallel rotating motion) rapid, just can not ignore the impact at the dead point of the power of not rotating, likely there is the rotation offset of moment at this dead point, but according to above-mentioned X ray checking device (3), owing to being hung with the transmission means that hang between described driving shaft and described axle arranged side by side, so the power of described driving shaft (revolving force) is transferred to described axle arranged side by side by hanging transmission means, drives described driving shaft and described axle arranged side by side thereby can supplement.Therefore, by mobile rapid described circle, can remove forcibly the impact at occurred dead point, thereby can make the rotation offset of the moment of described x ray generator not occur, can really obtain the tomography portrait that resolution is high.Described suspension transmission means, can for example, by (being separately fixed at rotary body on described driving shaft and described axle arranged side by side, band wheel component, geared parts etc.) and, hang (frame draws) sprung parts (for example, wheel tape member, chain part etc.) on these rotary bodies and form.
In addition, the X ray checking device (4) the present invention relates to, it is characterized in that, in above-mentioned X ray checking device (3), described joint portion comprise the swing axial region that rotates centered by described driving shaft and, the swing axial region rotating centered by described axle arranged side by side and, be offset the position of described length to same direction from described driving shaft and described axle arranged side by side axle center separately, swung by these swivel plate that axial region axles support, this swivel plate engages with allowing the guide means that directly moves to the running of the X-direction intersecting vertically with described driving shaft and Y direction.
According to above-mentioned X ray checking device (4), the described swivel plate that is swung the support of axial region axle by these engages with allowing the guide means to the X-direction intersecting vertically with described driving shaft and Y direction running.Described swivel plate is in the time making above-mentioned circular mobile situation, due to described straight moving guide means, running is restricted, even so by described circular mobile rapid situation, also moving-limiting forcibly, described swivel plate can not left from described circular mobile correct path, when by described circular mobile rapid situation, can more positively make the rotation of described swivel plate and described x ray generator depart from and not occur, can more positively obtain the tomography portrait that resolution is high.
In addition, the X ray checking device (5) the present invention relates to, it is characterized in that, in described X ray checking device (3) or (4), described x ray generator has the installation portion being mounted, this installation portion is by described joint portion, be offset to same direction the position of described length from described driving shaft and described axle arranged side by side axle center separately, so that axle length of support from the axle center of described driving shaft and described axle arranged side by side between distance identical and when being supported by axle, there is the direction of principal axis mobile means that described installation portion is moved to described direction of principal axis.
According to above-mentioned X ray checking device (5), owing to thering is the direction of principal axis mobile means that described installation portion is moved towards the direction of principal axis intersecting vertically with described mounting surface, so can make described x ray generator move to described direction of principal axis.In the time that described x ray generator is moved to described direction of principal axis, owing to can making described x-ray focus move to described direction of principal axis, thus can not change geometric amplification degree, and change tomography face.Thereby, due to can be on different faces and with same amplification degree, obtain the tomography portrait of the sample loading in described mounting surface, so can obtain the portrait of 3 dimensions of described sample.
In addition the X ray checking device (6) the present invention relates to, it is characterized in that, in above-mentioned any one X ray checking device (2)～(5), described detecting device mobile means comprises the state to link with the described the 2nd power transmission axle, be disposed in support sector, driving shaft centered by described axle and, be disposed in described support sector, with described driving shaft axle arranged side by side arranged side by side and, in order to by described driving shaft and described axle arranged side by side and joint portion that described X-ray detector is combined and described driving shaft and be suspended on described driving shaft and described axle arranged side by side between suspension transmission means and form, described X-ray detector, by described joint portion, in the position of leaving specified length from described driving shaft and described axle arranged side by side axle center separately to same direction, supported by axle so that distance between the axle center of the distance between axle fulcrum and described driving shaft and described axle arranged side by side is identical.
According to above-mentioned X ray checking device (6), because described X-ray detector is supported by axle at different 2, so its mobile alignment is by specifically for one.In addition, due to these axle fulcrums, in position from described axle arranged side by side axle center separately to same direction that leave described specified length from described driving shaft and, so can make described X-ray detector centered by the axle center of described driving shaft (axle intersecting vertically with described mounting surface), do circular mobile take the length of described regulation as radius.In addition, if the length of described regulation is more than the radius of sensitive surface of described X-ray detector, making described X-ray detector, is possible doing circular movement around described axle centered by this axle.
In addition, if the circle of described x ray generator and described X-ray detector is moved to (parallel rotating moves) high speed, just can not ignore the impact at the dead point of the power of not rotating, likely there is the skew of moment rotation at this dead point, but according to above-mentioned X ray checking device (6), owing to being hung with described suspension transmission means between described driving shaft and described axle arranged side by side, so power of described driving shaft (revolving force), transfer to described axle arranged side by side by hanging transmission means, can addedly drive described driving shaft and described axle arranged side by side.Thereby the impact at the described dead point occurring can remove forcibly the mobile high speed of described circle time, can make the rotation offset of the moment of described X-ray detector also not occur, can really obtain the tomography portrait that resolution is high.Described suspension transmission means can by be separately fixed at described driving shaft and described axle arranged side by side rotary body (for example, band wheel component, geared parts) and, hang (frame draws) sprung parts (for example, wheel tape member, chain part) formation at these rotary bodies.
In addition the X ray checking device (7) the present invention relates to, it is characterized in that, in described X ray checking device (6), described joint portion comprise the swing axial region that rotates centered by described driving shaft and, the swing axial region rotating centered by described axle arranged side by side and, leave the position of described specified length from described driving shaft and described axle arranged side by side axle center separately to same direction, swung by these swivel plate that axial region axles support; This swivel plate engages with allowing the straight moving guide means to the running of the X-direction intersecting vertically with described driving shaft and Y direction.
According to above-mentioned X ray checking device (7), swung by these described swivel plate that axial region axles support, engage with allowing the straight moving guide means to the running of the X-direction intersecting vertically with described driving shaft and Y direction.In the situation that described swivel plate is done above-mentioned circular movement, because running is limited by described straight moving guide means, even so in the situation of the mobile high speed of circle, also can make described swivel plate not leave from described circular mobile correct path, moving-limiting forcibly, can more positively make described swivel plate under the mobile high speed situation of described circle and the rotation offset of described X-ray detector not occur, can more positively obtain the tomography portrait that resolution is high.
In addition, in above-mentioned any one X ray checking device (1)～(7), between described x ray generator and described X-ray detector, be equipped with in order to described sample is loaded, the conveyance means that conveyance auto levelizer is inside and outside, these conveyance means have by sample be placed on the conveyance direction of described sample side by side the wheel of configuration bring carrying tyre type conveyance means and, make the inspection position that described tyre type conveyance means move in the direction intersecting vertically with the conveyance direction of described sample adjust means, described tyre type conveyance means also can have the wheel band interval at the interval of adjusting the described wheel band arranging side by side and adjust means and form.
According to this formation, by described tyre type conveyance means, the state that can bring the two end portions of described sample is placed on to the wheel that arranges side by side with the conveyance direction of described sample, to the inside and outside conveyance of device, can be at the top of the X ray emitting surface of described x ray generator, the interval of guaranteeing tomography scope.In addition,, due in described tyre type conveyance means, be equipped with the described band interval of taking turns and adjust means, so can adjust these intervals of taking turns band to be applicable to the size (wide) of sample for reference.And then, make described tyre type conveyance means adjust means in the inspection position that direction moves that intersects vertically of the conveyance direction for described sample owing to being equipped with, so can comply with the inspection position of described sample, mobile described position of taking turns with conveyance means, thus can suitably carry out the inspection of various form samples.
In addition, use above-mentioned any one X ray checking device (1)～(7), in online, check the connection status of the solder bonds portion of electronic unit, the tomography portrait data based on obtaining, can realize the inspection method of judging the certified products of described electronic unit and the electronic unit of unacceptable product.
According to the inspection method of above-mentioned electronic unit, want the time can significantly foreshorten to 1 second above-mentioned X ray checking device below degree by using 1 tomography, the engagement state of the interior solder bonds portion that checks electronic unit online, tomography portrait data based on obtaining, judge certified products and the unacceptable product of described electronic unit.
Thereby, can realize and could not realize in the past, based on manufacturing (installations) line, tomography portrait data, the whether qualified High-Speed Automatic inspection of judgement electronic unit, can improve the production efficiency of electronic unit by leaps and bounds.
In addition, any one in above-mentioned X ray checking device (1)～(7), as the automatic checking device of the solder bonds portion of electronic unit,
Can realize the production system that group enters the electronic unit of the production line of electronic unit.
According to the production system of above-mentioned electronic unit, due to any of above-mentioned X ray checking device (1)～(7), as the automatic checking device of the solder bonds portion of electronic unit, group enters production (installation) line of electronic unit, so can realize in this production line, the whether qualified self-verifying of judging of the electronic unit based on tomography portrait data, can improve the production efficiency of electronic unit by leaps and bounds.
Accompanying drawing explanation
Fig. 1 is the block scheme of the major part of the X ray checking device that roughly shown that embodiments of the present invention relate to.
Fig. 2 is the key diagram that the running of the x ray generator in the X ray checking device that embodiment relates to is described.
Fig. 3 is the key diagram that the moving range of the x ray generator in the X ray checking device that embodiment relates to is described.
Fig. 4 is the block scheme that has roughly shown the major part of the manufacturing system of the electronic unit that has adopted the X ray checking device that embodiment relates to.
Fig. 5 is the process flow diagram of the processing action carried out of the microcontroller of the X ray checking device that shown that embodiment relates to.
Fig. 6 is that the part of the major part of the X ray checking device that shown that embodiment 1 relates to sees through front view.
Fig. 7 is that the part of the major part of the X ray checking device that shown that embodiment 1 relates to sees through side view.
Fig. 8 is that the part that has shown the major part of the upside of the X ray checking device in Fig. 7 sees through side view.
Fig. 9 is the sectional view of the IX-IX line part in Fig. 6.
Figure 10 is that the part that has shown the major part of the downside of the X ray checking device in Fig. 7 sees through side view.
Figure 11 is the sectional view of the XI-XI line part in Fig. 6.
Figure 12 is that the part that has shown the major part of the transport mechanism in the X ray checking device that embodiment 1 relates to sees through planimetric map.
Figure 13 is the schematic plan view that has shown the running of the swivel plate in circular moving structure.
Figure 14 is the schematic plan view that has shown the running of the swivel plate in circular moving structure.
Figure 15 has roughly shown the previously block scheme of the major part of the X ray checking device of invention of the inventor.
Figure 16 is the figure that the running of X ray sensitive surface in the X ray checking device of previously invention of the inventor and x-ray focus is described.
Figure 17 is the figure that the running of X ray sensitive surface in the X ray checking device of previously invention of the inventor and x-ray focus is described.
Figure 18 is the figure that the running of X ray sensitive surface in the X ray checking device of previously invention of the inventor and x-ray focus is described.
Embodiment
The embodiment of the X ray checking device the present invention relates to based on accompanying drawing explanation below.Fig. 1 is the block scheme of the major part of the X ray checking device that roughly shown that embodiment relates to.But, to the component part identical with the X ray checking device showing in Figure 15, mark prosign, the description thereof will be omitted.
In figure, Smp represents to become the sample (for example, the substrate of electronic unit being installed on one side or two sides) of checked object, sample Smp by 21 conveyances of conveyance member to the inspection position of installing internal rules.Across transport mechanism 21, configuration has X-ray detector 11 Hes of X ray sensitive surface I in opposite directions, comprises the x ray generator 12 that x-ray focus S1 forms.From the x-ray focus S1 radiation X ray of x ray generator 12, see through the X ray of sample Smp, on the X ray sensitive surface I at X-ray detector 11, detected.And, in figure T1 be comprise the X ray being radiated by x-ray focus S1 optical axis OA and, the face of the intersection point O1 of the axle L1 intersecting vertically with the mounting surface T2 of sample Smp, face T1 becomes tomography face FP.
X-ray detector 11 is connected with portrait handling part 22, becomes the portrait data (image signal) corresponding with the X ray detecting at X-ray detector 11 are exported to portrait handling part 22.Portrait handling part 22, improves the signal processing of image quality etc., becomes the portrait data of processing through signal are exported to display (non-diagram), or export to microcontroller 23.
Circular travel mechanism (detecting device mobile means) 24 and circular travel mechanism (generator mobile means) 25, mechanically links from the power transmission mechanism 26 of the power (revolving force) of engine M11 by transmission, become and be subject to the revolving force of ultromotivity transport sector 26 and synchronously driving.Power transmission mechanism 26, comprises most power transmission shafts and the mechanical important document of gear that these power transmission shafts can be transmitted to power and link etc. forms.
; circular travel mechanism 24; be subject to the revolving force of ultromotivity transport sector 26 and drive; make the mounting surface T2 keeping parallelism of the sample of X ray sensitive surface I and transport mechanism 21; and the direction that connects certain straight line of 2 on X ray sensitive surface I remains on certain direction; make X-ray detector 11 around axle L1, centered by axle L1, carry out circular mobile mechanism.
In addition, circular travel mechanism 25, identical with circular travel mechanism 24, be subject to the revolving force of ultromotivity transport sector 26 and drive, make X ray emitting surface 12a and mounting surface T2 keeping parallelism, and make the direction that connects certain straight line of 2 on X ray emitting surface 12a remain on certain direction, make x ray generator 12 centered by axle L1, do circular mobile mechanism (mechanism that, x-ray focus S1 is rotated centered by axle L1) take the distance r from axle L1 to x-ray focus S1 as radius.And about the running of X-ray detector 11 and x-ray focus S1 the principle of tomography (can), because the content illustrated with using Figure 16～Figure 18 is identical, description thereof is omitted here.
The engine M11 linking on power transmission mechanism 26 is controlled by microcontroller 23, and the x-ray focus S1 of x ray generator 12, moves and synchronize with the circle of X-ray detector 11, is keeping the phase differential of 180 °, centered by axle L1, rotates.; due to the revolving force of same engine M11; by power transmission mechanism 26; mechanically (without the generation of synchronous dislocation) be transferred to circular travel mechanism 24 and circular travel mechanism 25; even if therefore improve the revolving force of engine M11; make the circle of X-ray detector 11 and x ray generator 12 move rapid situation, also make positively to make these circular mobile possibilities that synchronously becomes.
Vertical movement mechanism 27, is subject to from the revolving force of engine M12 and drives, and is the mechanism that x ray generator 12 is moved in axle L1 direction.Becoming engine M12 is also to be controlled by microcontroller 23.
Transport mechanism 21, be subject to from the revolving force of engine M13 and drive, have sample Smp is placed on to the wheel arranging side by side with the conveyance direction (directions X) of sample is brought and the tyre type transport mechanism of conveyance and, make described tyre type conveying unit at the mobile inspection position adjusting mechanism of the direction (Y-direction) intersecting vertically with the conveyance direction (directions X) of sample, in addition, on tyre type transport mechanism, also equip the size (wide) of promising applicable sample and adjust the wheel band interval adjusting mechanism at the interval of the wheel band that arranges side by side.
Attended operation portion 28 on microcontroller 23, can carry out various input settings for desired inspection etc.Microcontroller 23 comprises CPU, RAM, ROM and forms, and has remembered based on tomography portrait, in order to carrying out the whether qualified program of judging of solder bonds portion, in order to drive the program etc. of controlling various piece in ROM.In addition, on microcontroller 23, connect the memory portion (non-diagram) that checks data etc. in order to memory.By above-mentioned formation, form the X ray checking device 10 that embodiment relates to.
The X ray checking device 10 relating to according to above-mentioned embodiment, X-ray detector 11, make the mounting surface T2 keeping parallelism of X ray sensitive surface I and transport mechanism 21, and the direction that connects certain straight line of 2 on X ray sensitive surface I remains on certain direction, around axle L1, centered by axle L1, doing circular movement.
On the other hand, x ray generator 12, make the mounting surface T2 keeping parallelism of X ray emitting surface 12a and transport mechanism 21, and the direction that connects certain straight line of 2 on X ray emitting surface 12a remains on certain direction, centered by axle L1, do circular movement take the distance r from axle L1 to x-ray focus S1 as radius, rotate centered by axle L1 thereby become x-ray focus S1.In addition, x-ray focus S1, becomes to move to synchronize with the circle of X-ray detector 11 and has the phase differential of 180 °, centered by axle L1, rotates.
And then, in X ray checking device 10, with so that the x-ray focus S1 of X-ray detector 11 and x ray generator 12 does circular mobile circular travel mechanism 24,25, mechanically link by mechanically transmitting from the power transmission mechanism 26 of the power of engine M11, by the driving of power transmission mechanism 26, synchronously form according to the circular mechanically moving ground of the X-ray detector 11 of circular travel mechanism 24,25 and x-ray focus S1.
Therefore, even if improving the horsepower (revolving force) of engine M11, make under the situation of the mobile high speed of circle of X-ray detector 11 and x ray generator 12, due to by power transmission mechanism 26 by the power machine from engine M11 transfer to circular travel mechanism 24,25, can not occur thereby can make the circle of X-ray detector 11 move the dislocation (rotation offset) of synchronizeing of moving with the circle of x ray generator 12.
Thereby, even if make under the situation of the mobile high speed of described circle, according to the identical principle illustrated with using Figure 16～Figure 18, also can precision obtain well the picture that only exists (on face T1, the tomography portrait of face T1), can within the short time (0.5～1 second degree of each tomography portrait), obtain the tomography portrait of the sample Smp of the upper mounting of mounting surface T2 of transport mechanism 21, can really and at high speed detect and to be difficult to observe from outside, the disconnection of soldered ball portion, scolder bridge joint, the defective reason of the very few too much grade of scolder, can realize the device of (corresponding in line) in manufacture (installation) line that can be put into electronic unit.
In addition, the X ray checking device 10 relating to according to above-mentioned embodiment, is not only the tomography of sample Smp and draws a portrait, and also certainly can obtain about perspective picture.And then, by vertical movement mechanism 27, can make x ray generator 12 move in axle L1 direction, x-ray focus S1 is moved in axle L1 direction.By x-ray focus S1 is moved in axle L1 direction, can, in the situation that not making geometric amplification degree change, change tomography face FP.
Thereby due to can be at differing heights, and with same amplification degree, the tomography portrait of the sample Smp that fast fetching must load on the mounting surface T2 of transport mechanism 21, so can fast fetching obtain the portrait of 3 dimensions of sample Smp.Accordingly, can be in more detail, and check rapidly the installment state to substrate of electronic unit.
In addition, x ray generator 12, is centered by axle L1, makes circular mobile (with reference to Fig. 2, Fig. 3) take the distance r from axle L1 to x-ray focus S1 as radius.In addition, as shown in Figure 3, the moving range of x ray generator 12, in the E of region, is being x by axial the x of x ray generator 12 length 12, the axial length of y is y 12situation under, known x ray generator 12 on x direction of principal axis at x 12mobile in the scope of+2r, on y direction of principal axis at y 12mobile in the scope of+2r.In addition, not rotate be obvious to x ray generator 12.Thereby, do not make x ray generator 12 make the tomography portrait of yet can obtaining in rotary moving.In addition, from Fig. 3, can obviously learn, the moving range of x ray generator 12 can be controlled to necessary Min., in addition, can make not occur twist and warping bent on the feed cable being connected with x ray generator 12 (non-diagram).
Fig. 4 is the block scheme that has roughly shown the manufacturing system (surface mount system) of the electronic unit that has added the X ray checking device 10 that embodiment relates to.
The manufacturing system of the electronic unit that embodiment relates to, comprise solder paste printer (also referred to as screen process press) 200, chip mounter (surface stick-mounting machine) 300, reflow welding device 400, X ray checking device described above 10 and form, between these devices, suitably dispose shovel loader (automatic supplying machine), the unloader (automatically take out of machine) etc. of conveyance as the substrate of sample, manufacturing process's robotization.
Solder paste printer 200 is the devices in order to be coated with soldering paste (add scaling powder on scolder, make it have proper viscosity) on the pad of printed base plate.Chip mounter 300 is, by solder paste printer 200 applied printed base plate after scolder really load the electronic unit of (installation) BGA, CSP etc. on allocation, for example, the electronic unit of supplying with from assembly supply device (non-diagram) with nozzle sorption, is loaded in the substrate device of allocation really.
Reflow welding device 400 is, by scolder welding, electronic unit is fixed on to the device of printed base plate in order to heat that the printed base plate making by chip mounter 300 after electronic unit location positioning is loaded is applied to regulation.X ray checking device 10 is the solder bonds portion of the installation base plate that has passed through reflow welding device 400 to be carried out fast to (in each section 0.5～1 second) tomography, judgement engagement state, differentiation certified products and unacceptable product, the device of taking out of.
Fig. 5 is the process flow diagram of the check processing action that shown that the microcontroller 23 in the X ray checking device 10 that embodiment relates to carries out.And, this processing action, the time interval according to the rules operation quiescent interval of the manufacture line based on designed carries out repeatedly.
First, in the 1st stage, the shovel loader of removing inlet side with the substrate that is disposed in device carries out the exchange of signal, at official hour point, open substrate and move into mouth, the installation base plate that has passed through reflow welding device 400 is placed on to the mounting surface (wheel is brought) of transport mechanism 21, carries out as conveyance is to the control (the driving controls of engine M13 etc.) of the inspection position of regulation.And, also can with move into roughly the same time point, the unloader of taking out of a mouthful side with the substrate that is disposed in device carries out signal exchange, opens substrate and takes out of mouth, controls so that check that the installation base plate being through with takes out of.
In the 2nd stage, count the inspection number corresponding with the installation base plate of moving into into, remember processing as inspection data in memory portion, in the 3rd stage, carry out the location positioning processing of installation base plate.The location positioning of installation base plate, is to detect in substrate end, adjusts the processing of correction location dislocation, inclination etc.
In next the 4th stage, carry out crooked detection and the correction of installation base plate and process.Installation base plate crooked, at the crooked height of pre-determined position probing, carries out automatic compensation with respect to tomography height.In next the 5th stage, carry out the tomography processing of the solder bonds portion of installation base plate.Drive engine M11, the circle of carrying out at a high speed X-ray detector 11 and x ray generator moves, and can carry out tomography 0.5 second～1 second degree to 1 section.According to quantity, the size etc. of electronic unit that is arranged on substrate, implement the tomography of the necessary number of times of judgement that carries out engagement state.
In the 6th stage, according to photographed section portrait, for example by photographed section portrait with, the section of the certified products of registration portrait is compared in advance, carries out the qualified underproof automatic judgement of solder bonds portion.As the defective state of the solder bonds portion detecting by X ray checking device 10, can enumerate very few etc. the state of the departing from of disengaging, soldered ball, the scolder of soldered ball.
In the 7th stage, the corresponding mark of inspection number with the 2nd stage memory, checks the preservation processing of (portrait, whether qualified judge) data in memory portion, in the 8th stage thereafter, checks the processing of taking out of of the installation base plate that is through with.The unloader of taking out of a mouthful side with the substrate that is disposed in device carries out signal exchange, at official hour point, to open substrate and take out of mouth, the installation base plate conveyance after inspection is finished is to outlet, carry out as conveyance is to the control (the driving controls of engine M13 etc.) of unloader, end process afterwards.
The inspection method of the electronic unit relating to according to above-mentioned embodiment, the tomography of 1 time can be wanted the time significantly to foreshorten to 1 second X ray checking device 10 below degree by using, the engagement state of the solder bonds portion of interior self-verifying electronic unit online, according to the tomography portrait data that obtain, judge certified products and the unacceptable product of electronic unit.
Therefore, before can realizing, do not realize, draw a portrait data according to tomography on (installations) line manufacturing, the whether qualified High-Speed Automatic inspection of judging of electronic unit, can be within the desired operation quiescent interval, carry out sufficient self-verifying, can improve by leaps and bounds the production efficiency of electronic unit.
In addition, the manufacturing system of the electronic unit relating to according to embodiment, X ray checking device 10, as testing fixture in the line of the solder bonds portion of electronic unit, owing to being added in manufacture (installation) line of electronic unit, so in this manufacture line, can realize according to the whether qualified High-Speed Automatic inspection of judging of the electronic unit of tomography portrait data, can leap the production efficiency that improves electronic unit.
Embodiment
Fig. 6 is that the part of the major part of the X ray checking device that shown that embodiment 1 relates to sees through front view.Fig. 7 is that the part of the major part of the X ray checking device that shown that embodiment 1 relates to sees through side view.Fig. 8 is, shown that the part of the major part of the upside of the X ray checking device in Fig. 7 sees through side view, and Fig. 9 shows the sectional view of the IX-IX line part in Fig. 6.Figure 10 is that the part that has shown the major part of the downside of the X ray checking device in Fig. 7 sees through side view.Figure 11 is the sectional view of the XI-XI line part in Fig. 6.Figure 12 is that the part that has shown conveyance structure periphery sees through planimetric map.
In figure, 21 is to be placed with sample Smp, by the transport mechanism of (directions X) inside and outside sample Smp conveyance auto levelizer, up and down across transport mechanism 21, configure in opposite directions X-ray detector 11 and x ray generator 12, radiate X ray by x ray generator 12, the X ray that sees through sample detects at X-ray detector 11.
Above X-ray detector 11, be combined with circular travel mechanism 24, x ray generator 12 below with having vertical movement mechanism 27 and circular travel mechanism 25, circular travel mechanism 24 and circular travel mechanism 25, by mechanically transmitting power transmission mechanism 26(from the power of engine M11 with reference to Fig. 7) link.
Power transmission mechanism 26, comprise that one end and engine M11 link, in the horizontal direction the 1st power transmission shaft 26a of horizontally set and, lower end links by the other end of conical gear 29a, 29b and the 1st power transmission shaft 26a, stand in the vertical direction to arrange the 3rd power transmission shaft 26c and, upper end by conical gear 29c, 29d and the 3rd power transmission shaft 26c links, in the horizontal direction the 2nd power transmission shaft 26b of horizontally set and forming.
The 1st power transmission shaft 26a, links by the driving shaft 81 of conical gear 29e, 29f and circular travel mechanism 25, and the 2nd power transmission shaft 26b links by the driving shaft 41 of conical gear 29g, 29h and circular travel mechanism 24.The 1st power transmission shaft 26a, by bearing bridge 30a, 30b etc., supported by the brace table 85 of circular travel mechanism 25 with the state that can carry out back rotation, 2nd, the 3rd power transmission shaft 26b, 26c be by bearing bridge 30c～30i etc., supports can carry out the support frame 32 that the state of back rotation is fixed in device basket 31.In addition,, about conical gear 29a～29h, in order to make there is no backlash (gap) between engaged gear, carry out the adjustment of installment state.
The formation of circular travel mechanism 24 is below described.In figure, 41 is driving shafts centered by axle L1, and the upper end of driving shaft, by conical gear (bevel gear) 29h, 29g, links with the 2nd power transmission shaft 26b, and driving shaft 41 is subject to rotarily actuate from the revolving force of the 2nd power transmission shaft 26b.
Driving shaft 41 is kept by bearing 42,43, maintaining part 44 and holding plate 45, is supported by support frame 32 by holding appliance 46.In addition, conclude and have rotary sleeve in the lower end of driving shaft 41, rotary sleeve 47 is also the rotation based on the 2nd power transmission shaft 26b, centered by axle L1, rotates.
On rotary sleeve 47, be bonded to (centered by axle L2) axis of swing 48, axis of swing 48 is also the rotation based on power transmission mechanism 26, centered by axle L1, rotates.In addition, axis of swing 48, in the axle center from driving shaft 41, (axle L1) leaves the position (axle L2) of distance R, is rotated plate 50 rotary axis of earth support back and forth by bearing 49.
In addition, axle 51 is by bearing 52,53 side by side with driving shaft 41 (centered by axle L3) arranged side by side, and maintaining part 54 is kept plate 45 and supports, and holding plate 45 is supported on support frame 32 by holding appliance 46.Conclude and have rotary sleeve 55 in the lower end of axle 51 arranged side by side, on rotary sleeve 55, be bonded to the axis of swing 56 of (take axle L4 as axle center).
In the axle center from axle 51 arranged side by side, (axle L3) leaves the position (axle L4) of distance R to axis of swing 56, for making distance between axle fulcrum and driving shaft 41 and the axle center spacing of axle 51 is identical side by side, by bearing 57 back and forth rotary axis of earth be supported on swivel plate 50.
In addition, on driving shaft 41 and axle 51 arranged side by side, timing belt pulley (being denoted as below belt wheel) 58,59 is installed respectively, between these belt wheels 58,59, frame has drawn positive hour wheel band (being denoted as below wheel band) 60, the revolving force of driving shaft 41 is with 60 by belt wheel 58,59 and wheel, is transferred to axle 51 arranged side by side.On swivel plate 50, be fixed with X-ray detector 11 by holding appliance 61.And, on X-ray detector 11, connect the cable (non-diagram) in order to send portrait data.
In addition,, between swivel plate 50 and holding plate 45, be equipped with straight moving guide 70.As shown in Figure 9 (in addition, in Fig. 9, in order easily to describe, driving shaft 41 and the record of axle 51 parts are side by side omitted), 4 corners on the swivel plate 50 of approximate rectangular shape, are bonded to Y-direction line slideway (leading axle) 62a, 62b and insert straight line axle bush (bearing cartridge parts) 63 wherein.In the both ends of the surface of line slideway 62a, the 62b of the Y-direction of inserting, be bonded to respectively web 64a, 64b in these straight line axle bushes 63, at the two ends of these webs 64a, 64b, be bonded to directions X line slideway 65a, 65b and insert straight line axle bush 66 wherein.The directions X line slideway 65a inserting on straight line axle bush 66, the both ends of the surface of 65b, be bonded to web 67a, 67b, and web 67a, 67b are by bearing tool 68 and holding plate 45 combinations.Straight moving guide 70 comprises these Y-direction line slideways 62a, 62b, straight line axle bush 63, directions X line slideway 65a, 65b, straight line axle bush 66 formations such as grade.
Figure 13 has shown based on being subject to from the power of engine M1 and the rotation of the power transmission mechanism 26 driving, axle center L2, the L4 of axis of swing 48,56, and the schematic plan view of the running of swivel plate 50.As shown in Figure 13 (a)～(c), according to the rotation of engine M1, swivel plate 50, centered by the axle center of driving shaft 41 (axle L1), take distance R as radius, is done circular mobile.
Due to X-ray detector 11, by setting tool 61, be arranged on swivel plate 50, so with swivel plate 50 interlocks, carry out the movement same with swivel plate 50., X-ray detector 11, based on the rotation of power transmission mechanism 26, centered by axle L1, does circular mobile take distance R as radius.Thereby, X-ray detector 11, the mounting surface keeping parallelism that X ray sensitive surface I and coaxial L1 are intersected vertically, and the direction that connects certain straight line of 2 on X ray sensitive surface I remains on certain direction, around axle L1, centered by axle L1, do circular mobile.
The formation of circular travel mechanism 25 is described below.In figure, 81(is with reference to Figure 10), be the driving shaft take axle L1 as axle center, the lower end of driving shaft 81, by conical gear (bevel gear) 29f, 29e, is attached at the 1st power transmission shaft 26a upper, and driving shaft 81 is subject to rotarily actuate from the rotation masterpiece of the 1st power transmission shaft 26a.
Driving shaft 81, supports by bearing 82,83 and supported 85 of maintaining part 84.In addition, be combined with rotary sleeve 86 in the upper end of driving shaft, rotary sleeve 86 is the rotation based on the 1st power transmission shaft 26a also, centered by axle L1, rotates.
On rotary sleeve 86, (centered by axle L5) is bonded to axis of swing 87, and axis of swing 87 is the rotation based on the 1st power transmission shaft 26a also, centered by axle L1, rotates.In addition, axis of swing 87, in the axle center from driving shaft 81, (axle L1) leaves the length of the x-ray focus S1 from axle L1 to x ray generator 12 apart from r() position (axle L5), can be supported on rotatably on swivel plate 89 by axle by bearing 88.
In addition, (using axle L6 as axle center) arranged side by side axle 91 arranged side by side with driving shaft 81 passes through bearing 92,93 and maintaining part 94, is supported on brace table 85.Side by side the upper end of axle 91 is bonded to rotary sleeve 95, at rotary sleeve 95(using axle L7 as axle center) the upper axis of swing 96 that engages.
Axis of swing 96, is leaving the position (axle L7) apart from r from the axle center (axle L6) of axle 91 arranged side by side, makes the distance between axle fulcrum identical with the axle center spacing of driving shaft 81 and axle 91 arranged side by side, can be supported on swivel plate 89 by axle rotatably by bearing 97.
In addition, on driving shaft 81 and axle 91 arranged side by side, respectively in conjunction with belt wheel 98,99, between these belt wheels 98,99, frame draws wheel to be with 100, and the revolving force of driving shaft 81 is with 100 to be transferred to axle 91 arranged side by side by belt wheel 98,99 and wheel.
In addition,, on swivel plate 89, be equipped with vertical movement mechanism 27.By bearing 101, driving shaft 102 can be rotatably inserted in the both sides of swivel plate 89 back and forth.In the lower end of driving shaft 102, engaging bevel gear 103, conical gear 103 be bonded on by from engine M12(Fig. 6) the driving shaft 104 that drives of revolving force on conical gear 105(Fig. 6) interlock, the revolving force of the driving shaft 104 that driving shaft 102 drives by launched machine M12 rotarilys actuate.
In addition, on swivel plate 89, stand side by side to leading axle 106,107 is set with driving shaft 102, on leading axle 106,107, be inserted in the parts of bearings 108,109 sliding on axle.On the driving shaft 102 of screw shape, screw the installation portion 110 of tubular, installation portion 110 and parts of bearings 108,109, be combined in and be provided with the arranging on plate 111 of x ray generator 12, arranging on plate 111 by fixing x ray generators 12 such as holding appliances.
The direction of principal axis that be rotated in driving shaft 102 of installation portion 110 based on engine M12 moves.That is, be arranged on the rotary actuation of the x ray generator 12 arranging on plate 111 based on engine M12, mobile at the direction of principal axis (vertical direction) of driving shaft 102.And, on x ray generator 12, connect feed cable (non-diagram).
In addition,, between swivel plate 89 and brace table 85, be provided with straight moving guide 120.As shown in figure 11 (and, in Figure 11, in order to make explanation easily, show the major part of straight moving guide 120), 4 corners on the swivel plate 89 of approximate rectangular shape, are combined with Y-direction line slideway (leading axle) 121a, 121b and insert straight line axle bush (bearing cartridge parts) 122 wherein.On two end surfaces of Y-direction line slideway 121a, the 121b inserting on these straight line axle bushes 122, respectively in conjunction with web 123a, 123b, at the two ends of these webs 123a, 123b, insert straight line axle bush 125 wherein in conjunction with directions X line slideway 124a, 124b.On two end surfaces of directions X line slideway 124a, the 124b inserting on straight line axle bush 125, in conjunction with web 126a, 126b, web 126a, 126b are combined on brace table 85 by bearing tool 127.Guide 120 comprises these Y- direction line slideways 121a, 121b, straight line axle bush 122, directions X line slideway 124a, 124b, straight line axle bush 125 formations such as grade.
Figure 14 is the rotation showing based on being subject to the power transmission mechanism 26 that drives from the power of engine M1, axle center L5, the L7 of axis of swing 87,96, and the schematic plan view of the running of swivel plate 89.As shown in Figure 14 (a)～(c), the rotation of swivel plate 89 based on engine M1, centered by the axle center of driving shaft 81 (axle L1), take apart from r as radius, do circular mobile.
Due to x ray generator 12, by plate 111 and driving shaft 102 are set, be arranged on swivel plate 89, so with turning axle 89 interlocks, carry out the movement identical with swivel plate 89.That is, based on the rotation of engine M1, centered by axle L1, take apart from r as radius, do circular mobile.Thereby, become x-ray focus S1 and rotate centered by axle L1.
The formation of transport mechanism 21 is described below.Figure 12 shows that transport mechanism 21 part around sees through planimetric map.Transport mechanism 21 is subject to drive from the revolving force of engine M13, there are tyre type transport mechanism 130 Hes at conveyance direction (X-direction) the conveyance sample Smp of sample, upper in the direction (Y direction) intersecting vertically with the conveyance direction (X-direction) of sample, the inspection position adjusting mechanism 131 (with reference to Fig. 7) that tyre type transport mechanism 130 is moved.In addition,, on tyre type transport mechanism 130, be equipped with being intervally adjusted to and the matched interval of size (wide) adjusting mechanism 132 of sample the wheel band arranging side by side.
Comprise at the inspection position adjusting mechanism 131 shown in Fig. 7, be disposed in engine M14 on bracket (supporting method) 140, driven control by microcontroller 23, driving shaft 141 with engine M14 link, keep driving shaft 141 freely to carry out the bearing bridge 142,143 of back rotation, the throw-over gear (cartridge) 144 that can insert to precession along the driving shaft 141 that is formed with screw thread and forming.By made driving shaft rotation by engine M14, can make throw-over gear 144 come and go in Y direction mobile.
Throw-over gear 144, is bonded on the transport table 145 that is equipped with tyre type transport mechanism 130.The tyre type transport mechanism 130 arranging on transport table 145 possesses the engine M13 in order to driving wheel band, wheel band driving shaft 146 with engine M13 link, wheel is with longitudinal moving axis 147, at wheel with driving shaft 146 and the belt wheel 148,149 installed respectively with the fore-end of longitudinal moving axis 147 of wheel, the conveyance wheel band 150(that frame draws between these belt wheels is with reference to Fig. 7), keep wheel freely to carry out the bearing bridge 151～154 of back rotation with longitudinal moving axis 147 with driving shaft 146 and wheel, these bearing bridge are bonded on transport table 145.
In addition, tyre type transport mechanism 130 possesses, can be inserted in respectively slidably wheel with driving shaft 146 and take turns with the barrel bearing parts (comprising splined nut, bearing bridge etc.) 155,156 on longitudinal moving axis 147, the belt wheel 157,158 arranging on these barrel bearing parts, the conveyance wheel band 159(of the Rack that frame draws between these belt wheels is with reference to Fig. 7), the movable plate 160 engaging between these barrel bearing parts.
In addition, between belt wheel 148,149 (part midway with 150 is taken turns in conveyance), dispose the rotation idler pulley 161,162 that conveyance wheel is imposed to the force of pushing to upward with 150 recovery one side, rotation idler pulley 161,162, by bearing apparatus 163,164 in conjunction with on transport table 145.In addition, at belt wheel 157,158(conveyance wheel with 159 part midway) between, on the position on rotation idler pulley 161,162 opposites, be also provided with rotation idler pulley 165,166, the axial region 167,168 of rotation idler pulley 165,166 is bonded on movable plate 160.
Belt wheel interval adjusting mechanism 132, comprise adjusting the engine M15 at belt wheel interval, be attached at the driving shaft 169 on engine M15, keep driving shaft 169 freely to carry out the bearing bridge 170,171 of back rotation, the throw-over gear (cartridge) 172 that can insert to precession along the driving shaft 169 that is formed with screw thread and forming, throw-over gear 172, is bonded on movable plate 160.In addition,, between wheel band driving shaft 146 and wheel band driving shaft 147, be equipped with the asessory shaft (transmission shaft) 175,176 that the cylinder part 173,174 that is bonded on movable plate 160 can be slidably inserted into.Therefore, by driving shaft 169 being rotated by engine M15, the movable plate 160 that can make to be bonded on throw-over gear 172 comes and goes together with being with 159 with conveyance wheel mobile in Y-direction, can coordinate the size of sample, suitably adjusts conveyance wheel with 150,159 interval.
In the X ray checking device that above-described embodiment 1 relates to, with so that X-ray detector 11 and x-ray focus S1 do circular mobile circular travel mechanism 24, 25, by mechanically transmitting power transmission mechanism 26(the 1st～3rd power transmission shaft 26a～26c from the power of engine M11) mechanically link, thereby can low price and save realize spatially by the power machine from engine M11 transfer to circular travel mechanism 24, 25 mechanism, by the driving of power transmission mechanism 26, make to utilize circular travel mechanism 24, the circular mechanically moving ground of 25 X-ray detector 11 and x-ray focus S1 synchronously forms.
Therefore, even if improving the horsepower (revolving force) of engine M11, make under the situation of the mobile high speed of circle of X-ray detector 11 and x ray generator 12, due to by power transmission mechanism 26 by the power machine from engine M11 transfer to circular travel mechanism 24,25, so can not occur the circle of X-ray detector 11 move move with the circle of x ray generator 12 synchronize dislocation (dislocation that the anglec of rotation is poor, rotation offset etc.).
Thereby, even by the situation of the mobile high speed of described circle, also can precision obtain well the picture that only exists (on face T1, the tomography portrait of face T1), can obtain the tomography portrait of the sample Smp on the mounting surface T2 that is positioned in transport mechanism 21 short time (each tomography portrait is 0.5～1 second degree), can be really and high speed detection be difficult to observe from outside, the disconnection of soldered ball portion, scolder bridge joint, the very few defective reason such as too much of scolder, thereby can realize the device (corresponding in line) in manufacture (installation) line that can be added to electronic unit.
The explanation of Reference numeral
10 X ray checking devices
11 X-ray detectors
12 x ray generators
22 portrait handling parts
23 microcontrollers
24,25 circular travel mechanisms
26 power transmission mechanisms
26a～26c the 1st～3rd power transmission shaft
27 vertical movement mechanism
41,81 driving shafts
51,91 axles arranged side by side
47,55,86,95 rotary sleeves
48,56,87,96 axis of swing
I X ray sensitive surface
L1～L7 axle
M11～M15 engine
S1 x-ray focus

Claims (9)

1. an X ray checking device, across the mounting surface of sample, configuration comprises x ray generator and the X-ray detector that x-ray focus forms in opposite directions, radiate from described x-ray focus, the X ray that sees through described sample detects and forms at described X-ray detector, it is characterized in that, in this x-ray detection device, having:
Make X ray emitting surface and the described mounting surface keeping parallelism of described x ray generator, and the direction that connects certain straight line of 2 on described X ray emitting surface remains on certain direction,
Make described x ray generator, centered by the axle intersecting vertically with described mounting surface, do take the length from this axle to described x-ray focus as radius circular mobile generator mobile means and;
Make X ray sensitive surface and the described mounting surface keeping parallelism of described X-ray detector, and the direction that connects certain straight line of 2 on described X ray sensitive surface remains on certain direction,
Make described x ray generator around described axle, make circular mobile detecting device mobile means centered by this axle time;
Described generator mobile means and described detecting device mobile means, mechanically link by mechanically transmitting from the power transmission means of the power of drive source, by the driving of this power transmission means, the circle of described x ray generator and described X-ray detector moves synchronously carries out and forms.
2. X ray checking device according to claim 1, is characterized in that,
Described power transmission means comprises,
The 1st the power transmission shaft mechanically linking with described generator mobile means and;
The 2nd the power transmission shaft mechanically linking with described detecting device mobile means and;
Mechanically link described the 1st power transmission shaft and the 2nd power transmission shaft the 3rd power transmission shaft and form; Described drive source and described in any one the 1st～3rd power transmission shaft link.
3. X ray display device according to claim 2, is characterized in that,
Described generator mobile means comprises,
The state linking with described the 1st power transmission shaft is disposed in support portion, the driving shaft take described axle as axle center and,
Be disposed in described support portion, with described driving shaft axle arranged side by side arranged side by side and,
In order to by the joint portion of described driving shaft and described axle arranged side by side and described x ray generator combination and,
Be suspended on the suspension transmission means between described driving shaft and described axle arranged side by side and form;
Described x ray generator, by described joint portion, in the position that is offset described length from described driving shaft and described axle arranged side by side axle center separately to same direction, supported by axle so that distance between the axle center of the distance between described axle fulcrum and described driving shaft and described axle arranged side by side is identical.
4. X ray checking device according to claim 3, it is characterized in that, described joint portion comprises, the swing axial region rotating centered by described driving shaft and, the swing axial region rotating centered by described axle arranged side by side and, be offset the position of described length from described driving shaft and described axle arranged side by side axle center separately to same direction, swung by these swivel plate that axial region axles support;
This swivel plate engages with allowing the straight moving guide means to the movement of the X-direction intersecting vertically with described driving shaft and Y direction.
5. according to claim 3 or X ray checking device claimed in claim 4, it is characterized in that,
Possesses to install the installation portion of described x ray generator;
This installation portion, by described joint portion, be offset on the position of described length to same direction at described driving shaft and described axle arranged side by side axle center separately, so that axle length of support is from identical with the axle center spacing of described driving shaft and described axle arranged side by side and when being supported by axle;
Possesses the direction of principal axis mobile means that described installation portion is moved to described direction of principal axis.
6. according to the X ray checking device described in any one of claim 2～4, it is characterized in that,
Described detecting device mobile means comprises,
Be disposed in support portion with the state that links with described the 2nd power transmission shaft, the driving shaft take described axle as axle center and,
Be disposed in described support portion, with described driving shaft axle arranged side by side arranged side by side and,
In order to by the joint portion of described driving shaft and described axle arranged side by side and described X-ray detector combination and,
Be suspended on the suspension transmission means between described driving shaft and described axle arranged side by side and form;
Described X-ray detector, by described joint portion, in position from described axle arranged side by side axle center separately to same direction that leave specified length from described driving shaft and, so that the axle center spacing of the distance between axle fulcrum and described driving shaft and described axle arranged side by side is identical and supported by axle.
7. X ray checking device according to claim 5, is characterized in that,
Described detecting device mobile means comprises,
Be disposed in support portion with the state that links with described the 2nd power transmission shaft, the driving shaft take described axle as axle center and
Be disposed in described support portion, with described driving shaft axle arranged side by side arranged side by side and,
In order to by described driving shaft and described axle arranged side by side and joint portion that described X-ray detector is combined and,
Be suspended on the suspension transmission means of described driving shaft and described between centers arranged side by side and form;
Described X-ray detector, by described joint portion, in position from described axle arranged side by side axle center separately to same direction that leave specified length from described driving shaft and, so that axle length of support is from identical with the axle center spacing of described driving shaft and described axle arranged side by side and supported by axle.
8. X ray checking device according to claim 6, is characterized in that,
Described joint portion comprise the swing axial region that rotates centered by described driving shaft and, the swing axial region rotating centered by described axle arranged side by side and, at position from described axle arranged side by side axle center separately to same direction that leave specified length from described driving shaft and, the swivel plate being supported by axle by these axis of swing;
This swivel plate, engages with allowing the straight moving guide means moving to the X-direction intersecting vertically with described driving shaft and Y direction.
9. X ray checking device according to claim 7, is characterized in that,
Described joint portion, comprise the swing part that rotates centered by described driving shaft and, the swing part rotating centered by described axle arranged side by side and, at position from described axle arranged side by side axle center separately to same direction that leave described specified length from described driving shaft and, the swivel plate being supported by axle by these swing parts;
This swivel plate, engages with allowing the straight moving guide means moving to the X-direction intersecting vertically with described driving shaft and Y direction.
CN201210406171.5A 2012-10-22 2012-10-22 X ray checking device Expired - Fee Related CN103776846B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112394074A (en) * 2019-08-16 2021-02-23 株式会社理学 Sample holder for X-ray analysis

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JPH10239253A (en) * 1997-02-28 1998-09-11 Techno Enami:Kk Silhouette image pick-up method and device and object inspection method and device
JP2004212200A (en) * 2002-12-27 2004-07-29 Akira Teraoka X-ray inspection system, and method of using x-ray inspection system
JP2008256441A (en) * 2007-04-03 2008-10-23 Dyne:Kk X-ray inspection device
CN102192919A (en) * 2010-03-12 2011-09-21 欧姆龙株式会社 X-ray inspection apparatus, X-ray inspection method, X-ray inspection program, and X-ray inspection system
CN102265143A (en) * 2008-12-22 2011-11-30 欧姆龙株式会社 X-ray inspection method and x-ray inspection apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10239253A (en) * 1997-02-28 1998-09-11 Techno Enami:Kk Silhouette image pick-up method and device and object inspection method and device
JP2004212200A (en) * 2002-12-27 2004-07-29 Akira Teraoka X-ray inspection system, and method of using x-ray inspection system
JP2008256441A (en) * 2007-04-03 2008-10-23 Dyne:Kk X-ray inspection device
CN102265143A (en) * 2008-12-22 2011-11-30 欧姆龙株式会社 X-ray inspection method and x-ray inspection apparatus
CN102192919A (en) * 2010-03-12 2011-09-21 欧姆龙株式会社 X-ray inspection apparatus, X-ray inspection method, X-ray inspection program, and X-ray inspection system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112394074A (en) * 2019-08-16 2021-02-23 株式会社理学 Sample holder for X-ray analysis

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