CN103771718A - Spraying device, spraying method, manufacturing method of oil-proof glass substrate, and device for manufacturing oil-proof glass substrate - Google Patents
Spraying device, spraying method, manufacturing method of oil-proof glass substrate, and device for manufacturing oil-proof glass substrate Download PDFInfo
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- CN103771718A CN103771718A CN201210394742.8A CN201210394742A CN103771718A CN 103771718 A CN103771718 A CN 103771718A CN 201210394742 A CN201210394742 A CN 201210394742A CN 103771718 A CN103771718 A CN 103771718A
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Abstract
The invention discloses a spraying device, a spraying method, a manufacturing method of oil-proof glass substrate, and a device for manufacturing the oil-proof glass substrate. A spraying device comprises a cylindrical main body, a rotation shaft, a driving part, a nozzle part, a liquid feeding route, and a blowing air feeding route; the rotation shaft is rotatingly arranged in the main body around the axis of the rotation shaft; the driving part provides a rotation force to the rotation shaft; the nozzle part and the rotation shaft are integrated into a whole body, wherein the nozzle part is rotatingly arranged on the front end of the rotation shaft, the nozzle part is made into a cup shape with an opening part, and the opening part is made into a spraying opening which comes out from the front end of the main body; the liquid feeding rout provides spraying liquid for the nozzle part, the blowing air feeding route blows air to periphery of the nozzle part, and then the air blows the spraying liquid in the spraying opening so as to spray liquid out of the spraying opening. The spraying liquid is supplied to the nozzle part, then air is blown to the periphery of the nozzle part, at the same time the nozzle part rotates, thus the spaying liquid is radially dispersed and atomized by the centrifugal force, and the spraying direction of the spraying opening is front.
Description
Technical field
The present invention relates to spraying plant, possess the manufacture method of the grease proofness glass substrate of manufacturing installation, spray method and this spray method of use of the grease proofness glass substrate of this spraying plant.
Background technology
In recent years, in the display equipments such as flat-panel monitor, the contour function portable terminal of smart mobile phone, by people's finger, utensil contacts the touch pad of input message demand with display surface are expanded.The surface of this touch pad, is made up of the transparent substrates such as glass substrate and the lip-deep protective membrane that is formed on this transparent substrate.Such protective membrane, except the thinness of the film of the homogeneity of weather resistance, visual confirmation, thickness, nano-scale etc., the fingerprint that also requires to possess in the time making finger contact to touch pad surperficial adheres to difficulty, i.e. grease proofness.
In patent documentation 1, the manufacture method of the transparent protection material of a kind of display part for portable terminal etc. is disclosed, this transparent protection material possess to fingerprint from the teeth outwards adhere to the film suppressing.In this manufacture method, the fluoro-resin liquid that has dissolved fluoro-resin in solvent is coated on transparent substrate, form to fingerprint the lip-deep film suppressing that adheres at transparent substrate.
Prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2008-136963 communique
Summary of the invention
Invent problem to be solved
But, in the manufacture method of patent documentation, by using spin-coating method coating fluoro-resin liquid, on transparent substrate, form film, manufacture transparent protection material.If use like this spin-coating method to form film on base material, because between neighbouring with the end of film near Mo center, thickness easily produces deviation, so, be difficult to form with uniform thickness the film being formed by coating liquid on base material.
In addition, as for form method to the film suppressing adhering to of fingerprint on transparent base material, the spraying plants such as known use spray gun are to the method for carrying out coating liquid spraying on base material.The spraying plant using in this method, has installed spray nozzle at the front end of apparatus main body with the state of fixing, and carries out coating liquid spraying from this spray nozzle.If use such spraying plant to carry out coating liquid spraying, because be difficult to make coating liquid to be evenly dispersed on the surface of base material, so, be difficult to form film according to uniform thickness.
In addition, as for form other method to the film suppressing adhering to of fingerprint on transparent base material, known by base material direct impregnation the method in coating liquid.But, in this method, because thickness becomes blocked up, so, be difficult to form the film of nano-scale.
Disclosed technology is in the present invention the technology of making in view of above-mentioned problem.Disclosed in this manual technology, it is a kind of by carrying out the spraying of spraying fluid that object is to provide, and can on substrate, form roughly spraying plant and the spray method of the film of thickness uniformly.And then object is also to provide a kind of superior and manufacture method of the manufacturing installation of the grease proofness glass substrate of the film of thickness and such grease proofness glass substrate uniformly roughly of grease proofness that formed from the teeth outwards.
In order to solve the means of problem
Disclosed in this manual technology, relates to a kind of spraying plant, possesses main part, turning axle, driving part, ozzle portion, liquid supply road and the winding-up air supply road of tubular;
This turning axle can be in its axle center be arranged on described main part rotatably, this driving part is given revolving force to described turning axle, this ozzle portion can be with this turning axle as the front end that is integrally rotatably arranged on described turning axle, be made into the cup-shaped that its front end has peristome, and described peristome is made into the fog nozzle exposing from the front end of described main part, described in this liquid supply road direction, ozzle portion supplies with spraying fluid, surrounding's supply winding-up air of ozzle portion described in this winding-up air supply road direction, this winding-up air is to the described spraying fluid winding-up from described fog nozzle spraying; By supplying with described spraying fluid to described ozzle portion, to the described winding-up air of surrounding's supply of described ozzle portion, and make the rotation of described ozzle portion, make described spraying fluid be dispersion radially while atomization is sprayed towards front from described fog nozzle by its centrifugal force.
According to above-mentioned spraying plant, one side is given centrifugal force by the rotation of ozzle portion to spraying fluid, passes through on one side by winding-up air blown spraying fluid, and spraying fluid is dispersion radially while atomization is sprayed towards front.Therefore, make ozzle portion rotation while carry out the spraying of spraying fluid towards front by such, carry out compared with the situation of spraying plant in the past of the spraying of spraying fluid with having used the rotation that is not accompanied by ozzle portion, can with thinner (number nano-scales) and also roughly uniformly thickness form film.In addition, be not defined about the method for turning axle being given to revolving force.For example, air turbine also can be set around turning axle, by this air turbine air supply, give revolving force to turning axle; Also turning axle can be connected with electro-motor, by by this electro-motor of driven by power, give revolving force to turning axle.
Another form of disclosed technology in this manual, relate to a kind of spray method, this spray method uses spraying plant to carry out the spraying of spraying fluid, it is characterized in that, this spraying plant possesses main part, turning axle, driving part, ozzle portion, liquid supply road and the winding-up air supply road of tubular; This turning axle can be in its axle center be arranged on described main part rotatably, this driving part is given revolving force to described turning axle, this ozzle portion can be with this turning axle as the front end that is integrally rotatably arranged on described turning axle, be made into the cup-shaped that its front end has peristome, and described peristome is made into the fog nozzle exposing from the front end of described main part, described in this liquid supply road direction, ozzle portion supplies with spraying fluid, surrounding's supply winding-up air of ozzle portion described in this winding-up air supply road direction, this winding-up air is to the described spraying fluid winding-up from described fog nozzle spraying; By supplying with described spraying fluid to described ozzle portion, to the described winding-up air of surrounding's supply of described ozzle portion, and make the rotation of described ozzle portion, make described spraying fluid be dispersion radially while atomization is sprayed towards front from described fog nozzle by its centrifugal force.
Another form of disclosed technology in this specification sheets, relates to a kind of manufacture method of grease proofness glass substrate, possesses matting, plasma treatment operation, film formation process and drying process; This matting, by the air to glass substrate winding-up high pressure, cleans described glass substrate; This plasma treatment operation, after described matting, irradiates plasma body to described glass substrate, and the organism on described glass substrate is removed; This film formation process, after described plasma treatment operation, by using the above-mentioned spray method of stating that the Liniment that contains the fluorine series compounds with perfluoroalkyl ether is sprayed on described glass substrate as described spraying fluid, on described glass substrate, form the film being formed by described fluorine series compounds; This drying process, after described film formation process, makes described glass substrate at drying oven inner drying.
According to the manufacture method of above-mentioned grease proofness glass substrate, make the ozzle portion rotation of spraying plant by one side, on one side the Liniment that contains fluorine series compounds is sprayed on glass substrate, Liniment is atomized while is radially and disperses, and on glass substrate, sprays.Thus, compared with not carrying out to accompanying rotation the situation of spraying of Liniment, can on glass substrate, form thinner (number nano-scales) and the film being formed by fluorine series compounds of thickness uniformly roughly.In addition, by carrying out above-mentioned a series of operation, the film by film forming on glass substrate is fixed on glass substrate.And, the film being formed by the fluorine series compounds with perfluoroalkyl ether, grease proofness is superior.Therefore, the grease proofness glass substrate of being manufactured by above-mentioned manufacture method, for example, can be effective as for the coating of touch pad fingerprint and adhere to the glass substrate utilization that prevents film (anti-soil film).
In described film formation process, also can make described spraying plant plate face direction at this glass substrate on described glass substrate move, and control the adhesion amount of the described Liniment of the per unit area on this glass substrate on one side, carry out the spraying of described Liniment on one side.
According to such manufacture method, can on the glass substrate of wide region, form the film being formed by fluorine series compounds.
In described film formation process, also can make diameter is that the described fog nozzle of the described ozzle portion of 10mm to 120mm approaches with the distance in the scope of 5mm to 200mm with respect to the surface of described glass substrate, make described ozzle portion with the speed of rotation rotation in the scope of 10000rpm to 150000rpm, and described spraying plant is moved on one side with the speed in the scope of 1m/min to 100m/min in the plate face direction of described glass substrate, carry out the spraying of described Liniment with the amount in the scope of per unit area 1cc/min to 500cc/min on one side.
According to such manufacture method, can be provided for forming the roughly concrete condition of the film being formed by fluorine series compounds of uniform thickness of nano-scale on glass substrate.
In described film formation process, also can by induction electrode is configured in described ozzle portion near, between this induction electrode and described ozzle portion, apply voltage, make from by electrical resistance carried out the liquid droplet charged of the described Liniment of the described spraying plant spraying of ground connection, and by described drop is sprayed on the surface of described glass substrate, induced on the surface of described glass substrate by dielectric polarization and the electric charge of described drop opposite polarity, by electrostatic force, described drop is attached on the surface of this glass substrate.
According to such manufacture method, can carry out the spraying of Liniment in rotary-atomizing mode on one side, carry out the electrostatic coating of so-called induction charging formula on one side.Thus, can improve the deposit efficiency with respect to glass substrate of the drop of Liniment, can suppress the usage quantity of Liniment.
Another form of disclosed technology in this specification sheets, relates to a kind of manufacturing installation of grease proofness glass substrate, it is characterized in that possessing washing unit, plasma treatment appts, film deposition system, running gear, control device and drying installation; This washing unit, by the air to glass substrate winding-up high pressure, cleans this glass substrate; This plasma treatment appts irradiates plasma body to described glass substrate, and the organism on this glass substrate is removed; This film deposition system possesses spraying plant claimed in claim 1, by using this spraying plant that the Liniment that contains the fluorine series compounds with perfluoroalkyl ether is sprayed on described glass substrate, on this glass substrate, form the film being formed by described fluorine series compounds; This running gear moves described spraying plant plate face direction at this glass substrate on described glass substrate; The adhesion amount of the described Liniment of the per unit area on movement and the described glass substrate of this control device to described spraying plant is controlled; This drying installation has drying oven, and the described glass substrate that has made to form described film in this drying oven is dry.
Described film deposition system, also can have induction electrode and voltage applying mechanism, this induction electrode be configured in described ozzle portion near, voltage applying mechanism this induction electrode and by electrical resistance ground ground connection described spraying plant between apply voltage.
Accompanying drawing explanation
Fig. 1 is the longitudinal section of the spraying plant 2 in embodiment 1.
Fig. 2 is the sectional elevation of spraying plant 2.
Fig. 3 is the amplification view that has amplified the ozzle portion 30 in spraying plant 2.
Fig. 4 is the mode chart that represents an example of the use form of spraying plant 2.
Fig. 5 is the front view of the film deposition system in embodiment 2.
Fig. 6 is the side-view of film deposition system 100.
Fig. 7 is the vertical view cutaway drawing of film deposition system 100.
Fig. 8 is the sectional view of film deposition system 100.
Fig. 9 is the front view that represents the position relationship of spraying plant 2 and glass substrate in film deposition system 100.
Figure 10 is the vertical view that represents the position relationship of spraying plant 2 and glass substrate in film deposition system 100.
Figure 11 is the sectional view nearby of peristome 232 that represents ozzle portion 230 in the spraying plant 202 of the induction charging formula in embodiment 3.
Figure 12 is the photo that represents the surface structure of spraying plant.
Figure 13 is the photo that represents the surface structure of washing unit.
Figure 14 is the photo that represents the surface structure of plasma treatment appts.
Figure 15 is the photo that represents the surface structure of thermostatic bath.
Embodiment
< embodiment 1>
With reference to accompanying drawing, embodiment 1 is described.Embodiment 1 illustrates spraying plant 2, and this spraying plant 2 is for carrying out the spraying of spraying fluid to base materials such as glass substrates.In addition, in Fig. 1, Fig. 2 and Fig. 3, the front side using the left side of figure as spraying plant 2, the rear side using the right side of figure as spraying plant 2.As shown in Figures 1 and 2, spraying plant 2 possesses the main part cylindraceous 22 that forms its outward appearance.Front end region in main part 22 forms with the air guide member 42 of the inner side that is located at this air cap 15 by being made into capitellate air cap 15.Be provided with the ozzle portion 30 that forms as a whole tubular in the inner side of air guide member 42.Air cap 15 and air guide member 42, be all made in interior week and periphery and all formed the circular tubular concentric with ozzle portion 30.Ozzle portion 30, has formed the cup-shaped that its front end is opened towards outside, and the mode that its peristome becomes front side configures.The peristome of ozzle portion 30, becomes the fog nozzle 32 that spraying fluid is sprayed, and exposes from the front end of main part 22.
In main part 22, be provided with the liquid supply road 24 of extending at fore-and-aft direction at main part 22 center, formation stationary shaft 20 cylindraceous and the air supply road 6 of extending at fore-and-aft direction.Stationary shaft 20, is supported with the state that is limited rotation with respect to main part 22.The inside of stationary shaft 20 has been made into hollow, becomes the part on liquid supply road 24.At the front end of stationary shaft 20, fix thinner than stationary shaft 20 and be made into the supply-pipe 12 concentric with stationary shaft 20 with respect to stationary shaft 20 with the form outstanding towards front.Spraying plant 2, with liquid supply described later source 50(with reference to Fig. 4) and air supply source (not shown) be connected.Be pressed to the spraying fluid of spraying plant 2 from liquid supply source 50, supply with to supply-pipe 12 by the liquid supply road 24 in stationary shaft 20.
Be pressed to the forced air of spraying plant 2 from air supply source, by air supply road 6, in main part 22, be branched off into the air that flows to turbine air supply road (not shown) and the air that flows to winding-up air supply described later road 14.The forced air that flows to turbine supply road is used as turbine air, for driving driving part 8 described later.On the other hand, the forced air on flow direction winding-up air supply road 14 is used as winding-up air.Winding-up air, sprays from the air ejiction opening 17 of the peripheral end that is arranged on ozzle portion 30, makes thus the spraying fluid of spraying from fog nozzle 32 disperse towards front, and, for arranging the pattern of the spraying fluid of spraying from fog nozzle 32.In addition, air adjustment valve 4 has been installed on the rear end of spraying plant 2.By this air adjustment valve 4 is rotated, can adjust the flow of the forced air that flows through air supply road 6.
In the periphery of stationary shaft 20, be provided with in main part 22 at fore-and-aft direction extension and the formation cylindraceous hollow turning axle 16 concentric with stationary shaft 20.Turning axle 16, being supported to by the bearing 10 in outside that is located at this turning axle 16 can be rotatable around its axle center.In addition,, supply with a part for forced air from air supply road 6 to turning axle 16 around, turning axle 16 is the state support to suspend by this forced air.In the periphery of turning axle 16, be provided with integratedly with turning axle 16 conducts the driving part 8 that is used as air turbine.Driving part 8, is made up of turbine vane 9 and pressure-bearing portion 18.Discharge the turbine air of supplying with from air supply road 6 by the pressure-bearing portion 18 to this driving part 8, turbine vane 9 starts rotation by the turbine air pressure of its discharge.Thus, made and given revolving force to turning axle 16, turning axle 16 is to be rotated at a high speed the structure of driving.The sense of rotation of this turning axle 16, is to become anticlockwise direction towards front, the direction of turning left.At the front end of turning axle 16, fix the rear end (with the end of fog nozzle 32 side opposition sides) of above-mentioned ozzle portion 30.Therefore, ozzle portion 30 carries out one rotation with turning axle 16.Therefore, the sense of rotation of this ozzle portion 30, similarly becomes left-hand rotation with the sense of rotation of turning axle 16.
Interior all leading sections of the air cap that is located at front end region 15 in main part 22, as shown in Figure 3, have formed the taper inner peripheral surface 44 diminishing towards front internal diameter.Be connected to the rear end of taper inner peripheral surface 44 at the certain sizing inner peripheral surface 46 of fore-and-aft direction internal diameter.This sizing inner peripheral surface 46, becomes the same size of internal diameter with the rear end of taper inner peripheral surface 44.In addition, in the rear end of sizing inner peripheral surface 46, be step-like and conjointly formed that internal diameter is larger than sizing inner peripheral surface 46, internal diameter is at the certain hole enlargement inner peripheral surface 11 of fore-and-aft direction.
At the periphery leading section of air guide member 42, form the taper periphery 40 that internal diameter diminishes towards front and has been made into the tapering identical with taper inner peripheral surface 44.The front end of taper periphery 40, is used as the position identical with the front end cardinal principle of taper inner peripheral surface 44.On the other hand, be connected to the rear end of taper periphery 40 at the certain sizing periphery 45 of fore-and-aft direction external diameter.The internal diameter of this sizing periphery 45, is the size identical with the external diameter of the rear end of taper periphery 40, has been made into the diameter less than sizing inner peripheral surface 46.At fore-and-aft direction, it is identical position, the rear end of taper inner peripheral surface 44 that the rear end of sizing periphery 45 has been made into the front end of sizing inner peripheral surface 46.
Between taper inner peripheral surface 44 and sizing periphery 45, form substantially continuous circular winding-up air supply road 14.In addition, between air cap 15 and air guide member 42, form with the front end on winding-up air supply road 14 and be communicated with, and continuous narrow and small slit 31 substantially.The front end of slit 31, becomes the substantially circular air ejiction opening 17 of opening of front end at spraying plant 2.The position of the air ejiction opening 17 of fore-and-aft direction, compared with the fog nozzle 32 of ozzle portion 30 in rear.Be pressed to the winding-up air on winding-up air supply road 14, by slit 31, the front ejection from air ejiction opening 17 towards spraying plant 2.
Next, the position of cup-shaped of the front end that is located at ozzle portion 30 is described.At being made into of ozzle portion 20 inside at position of cup-shaped, as shown in Figure 3, be provided with storing chamber 38.In storing chamber 38, connect the front end of supply-pipe 12, and be communicated with supply-pipe 12.The recess 33 that is provided with the plate-like that forms circular concentric on before ozzle portion 30, the interior Zhou Chengwei of recess 33 is towards the conical surface 34 of front hole enlargement.On the partition wall of separating recess 33 and storing chamber 38, multiple peripheries from storing chamber 38 are formed and have penetrated into the communicating aperture 36 of the minor diameter of the conical surface 34 every ground at the circumferential empty standard width of a room in an old-style house.
Be more than the structure of spraying plant 2, next, the method that uses this spraying plant 2 to carry out the spraying of spraying fluid described.In the case of using spraying plant 2 to carry out the spraying of spraying fluid, as shown in Figure 4, spraying plant 2 and liquid supply source 50 and not shown air supply source are connected.The spraying fluid being drawn up from liquid supply source 50 by pump 52, in feed tube for liquid 54, is pressed to spraying plant 2.In addition, in the way of feed tube for liquid 54, strainer 56 has been installed.In addition, the forced air of supplying with from air supply source, is pressed to spraying plant 2 by not shown air supply pipe.In addition, in the time supplying with spraying fluid and forced air to spraying plant 2, adjusted in advance from air supply source to the feed rate of the forced air of spraying plant 2 force feeds with from liquid supply source to the feed rate of the spraying fluid of spraying plant 2 force feeds by not shown control device.
Be supplied to the forced air of spraying plant 2 from air supply source, by air supply road 6, be divided into turbine air and winding-up air.As the forced air of turbine air, be pressed to driving part 8, be discharged to as described above the pressure-bearing portion 18 of driving part 8, thus, give revolving force to turning axle 16, the ozzle portion 30 being fixed on turning axle 16 is rotated driving with high speed.On the other hand, as the forced air of winding-up air, be pressed to winding-up air supply road 14, by after slit 31, spray from air ejiction opening 17.
Be supplied to the spraying fluid of spraying plant 2 from liquid supply source 40, successively by liquid supply road 24, in supply-pipe 12.Arrive the spraying fluid in supply-pipe 12, dripped in the storing chamber 38 of ozzle portion 30 from the front end of supply-pipe 12.The spraying fluid dripping in storing chamber 38, by the centrifugal force of rotation that is accompanied by ozzle portion 30, is sent to the conical surface 34 of recess 33 by communicating aperture 36.Deliver to the spraying fluid of the conical surface 34, moved towards front along the conical surface 34 by the centrifugal force of the rotation that is accompanied by ozzle portion 30 equally, arrive the peripheral end (fog nozzle 32 of ozzle portion 30) of the conical surface 34, be and disperse radially atomization on one side from the peripheral end of the conical surface 34 on one side, emit towards the front of spraying plant 2.In addition, the rotating speed of the time per unit of ozzle portion 30, is adjusted in advance by above-mentioned control device.
As above, in the spraying plant 2 of present embodiment, rotate by ozzle portion 30, give centrifugal force to spraying fluid on one side, on one side by winding-up air blown spraying fluid, spraying fluid is dispersion radially while atomization is sprayed towards front.Now, atomization spraying fluid, by be blowed air blown in emitting, be organized into substantially pattern uniformly.Thus, carried out the vaporific spraying fluid of spraying, to restrain while the state that has been organized into the pattern of regulation shape be applied on the surface of base material.Be formed on the lip-deep film of base material by such Liniment, compared with having used the situation of spraying plant in the past of the spraying of carrying out rotatably spraying fluid that is not accompanied by ozzle portion, become thinner (number nano-scales) and thickness uniformly roughly.Therefore, spraying plant 2 by using present embodiment is to the spraying of the spraying fluid with grease proofness of the Liniment that contains fluorine series compounds on the surface of glass substrate etc. etc., can on glass substrate, be formed on and have the roughly film of thickness uniformly that has been made into nano-scale in grease proofness.Form the glass substrate of such film, can be as the member on surface etc. that forms touch pad.
< embodiment 2>
With reference to the accompanying drawings of embodiment 2.Embodiment 2, the manufacturing installation of illustration grease proofness glass substrate.In addition, the spraying plant 2 having used in the present embodiment, because structure and effect are identical with the device having illustrated in embodiment 1, so the description thereof will be omitted.This device is by becoming by the glass substrate 150(of film forming object with reference to Fig. 8～Figure 10) the upper device that forms thin film fabrication and have the glass substrate 150 of grease proofness.This manufacturing installation possesses washing unit (not shown), plasma treatment appts (not shown), thermostatic bath (not shown) and film deposition system 100 as drying installation.
Washing unit, is that the air by making high pressure contacts with respect to glass substrate 150, and the dust on glass substrate 150 etc. is removed, and cleans the device of glass substrate 150.Plasma treatment appts, is by glass substrate 150 is irradiated to plasma body, the device that the organism on glass substrate 150 is removed.Thermostatic bath is for making to have formed the dry device of glass substrate 150 after film.Washing unit, plasma treatment appts, thermostatic bath, all can use known device.
Forming on the running gear 102 of film deposition system 100, be provided with for making spraying plant 2 in movably above-below direction travel mechanism 112 and for making the plate face direction movably Ban Mian direction travel mechanism 114 of spraying plant 2 at glass substrate 150 of above-below direction.Spraying plant 2, is bearing in above-below direction travel mechanism 112 through the arm 110 with multiple joints at this fog nozzle 32 under the state of downside (platform 120 sides).In addition, spraying plant 2, is connected with outside not shown liquid supply source and the air supply source that are located at film deposition system 100.In addition, the spraying plant 2 using in the method, the diameter of its fog nozzle 32 is in the scope of 10mm to 120mm.
In the face side of spraying portion 104 that forms film deposition system 100, be provided with the door 122 of moving into be opened/closed.In addition, platform 120, at the fore-and-aft direction (by the direction shown in the arrow of Fig. 7 and Fig. 8) of film deposition system 100 slidably.In the case of by becoming and being placed in spraying portion 104 by the glass substrate 150 of film forming object, after the state of moving into door 122 to have opened makes platform 120 slide towards the front of film deposition system 100, glass substrate 150 is positioned on platform 120.After this, by making platform 120 (in spraying portion 104) slip towards the rear, and close and move into door 122, placing glass substrate 150.
In the exhaust portion 106 that forms film deposition system 100, be provided with from exhaust portion 106 towards upside the outlet opening 130 that (spraying portion 104 sides) spread all over whole ground opening of exhaust portion 106.Outlet opening 130 is communicated with the venting port 132 of the outside opening to film deposition system 100.Become the air being filled in spraying portion 104 and flow into from outlet opening 130, from the structure of venting port 132 exhausts.
Next, the method that uses the manufacturing installation of present embodiment to manufacture grease proofness glass substrate is described.In the method, first, the glass substrate 150 becoming by film forming object is dropped in washing unit, to the air of the high pressure of jetting on glass substrate 150.Thus, the dust on glass substrate 150 etc. is removed, cleaned glass substrate 150(matting).Then, glass substrate 150 is dropped in plasma treatment appts, glass substrate 150 is irradiated to plasma body.Thus, the organism on glass substrate 150 is removed to (plasma treatment operation).In addition, by carrying out plasma treatment operation, can make the weather resistance of the film of film forming on glass substrate 150 improve.
Then, the glass substrate 150 that has carried out plasma treatment is arranged on the platform 120 of film deposition system 100, is placed in the spraying portion 104 of film deposition system 100.Then,, by the control device 108 being located in film deposition system 100, the feed rate of the Liniment of supplying with respect to the speed of relative movement of glass substrate 150 with to spraying plant 2 to spraying plant 2 is adjusted.Then, supply with Liniment with the feed rate of having been adjusted by control device 108 to spraying plant 2.In addition, in the method, as Liniment, used the Liniment that contains the fluorine series compounds with perfluoroalkyl ether.Then, on one side with the speed of relative movement of having been adjusted by control device 108, spraying plant 2 is relatively moved with respect to glass substrate 150, on one side to the spraying of carrying out Liniment on glass substrate 150.Thus, on glass substrate 150, form the film (film formation process) being formed by Liniment.
Here, the position of the spraying plant 2 when the position A in Fig. 9 and Figure 10 represents spraying beginning, the position of the in-plane of the spraying plant 2 when position B represents spraying end.Specifically, one side from the speed of relative movement of 1m/min to 100m/min, spraying plant 2 is moved at in-plane, is carried out the spraying of Liniment according to the arrow shown in Fig. 3 (according to the order of A1, A2, B1, B2) on one side.Now, using actual region of spraying as the region around of the glass substrate 150 take transverse width X as 220mm, take longitudinal width Y as 300mm, using overlapping application width (making the distance of spraying plant 2 when the figure transverse shifting) W1 as 8mm.In addition, in the manufacture method of present embodiment, so that the distance H 1(between spraying plant 2 and glass substrate 150 is with reference to Fig. 9) be close to the state of the distance in the scope of 5mm to 200mm, carry out the spraying of Liniment.In addition, in the method, make the 30(of ozzle portion of spraying plant 2 with reference to embodiment 1) the scope of speed of rotation in 10000rpm to 150000rpm in, the mode that is 1cc/min to 500cc/min according to the spray amount of the per unit area with respect to glass substrate 150 that makes Liniment is adjusted.
Finally, the glass substrate 150 that film formation process is through with drops in thermostatic bath, make on glass substrate 150 film forming film drying (drying process).Thus, can make the degree of connecting airtight between glass substrate 150 and film improve.By above operation, can manufacture the film being formed by the Liniment that contains the fluorine series compounds with perfluoroalkyl ether by film forming glass substrate 150, i.e. grease proofness glass substrate.
As above, in the manufacture method of present embodiment, in film deposition system 100, by one side, the ozzle portion 30 of spraying plant 2 is rotated, on one side to the spraying of the Liniment that contains fluorine series compounds on glass substrate 150, Liniment is and is dispersed radially while atomization, is sprayed on glass substrate 150.Thus, compared with not being accompanied by the situation of the spraying of carrying out rotatably Liniment of ozzle portion 30, can on glass substrate 150, form thinner (number nano-scales) roughly film being formed by fluorine series compounds of thickness uniformly.In addition, by carrying out above-mentioned a series of operation, the film being formed on glass substrate 150 is fixed on glass substrate 150.And then, the film being formed by the fluorine series compounds with perfluoroalkyl ether, grease proofness is superior.Therefore, the grease proofness glass substrate of being manufactured by present embodiment, for example, can be effective as for the coating of touch pad fingerprint and adhere to and prevent that the glass substrate of film (anti-soil film) from using.
In addition, according to the manufacture method of present embodiment, in film formation process, spraying plant 2 plate face direction at glass substrate 150 on glass substrate 150 is moved, and the adhesion amount of the Liniment of the per unit area on glass substrate 150 is controlled on one side, carry out the spraying of Liniment on one side.Therefore, can on the glass substrate of wide region 150, form the film being formed by fluorine series compounds.
< embodiment 3>
Below, with reference to accompanying drawing, embodiment 3 is described.Embodiment 3, the spraying plant 202 of illustration induction charging formula.The spraying plant 202 of present embodiment is the device that has configured induction electrode 260 around the fog nozzle 232 of the spraying plant 2 having been illustrated by embodiment 1.In addition, in Figure 11, numeral 200 is added in to the position in the reference marks of Fig. 3, because be the structure same with the position having illustrated, so the description thereof will be omitted in embodiment 1.In addition, in the present embodiment, will be by film forming object as glass substrate 150, using the Liniment of spraying as containing the Liniment with the fluorine series compounds of perfluoroalkyl ether and the high electroconductibility of specific inductivity.In the present embodiment, be fed into the Liniment of spraying plant 202, carried out ground connection through not shown liquid supply source.
In the present embodiment, the whole region of cardinal principle of the main part 222 of spraying plant 202 is formed by the material of insulativity.In addition, around the fog nozzle 232 of the ozzle portion 230 in spraying plant 202, the induction electrode 260 that has configured ring-type to surround the form of this fog nozzle 232.Induction electrode 260, is connected with not shown circuit mechanism, can apply the voltage from thousands of to tens thousand of volts.In addition, induction electrode 260 is covered by the dielectric body of insulativity.Therefore, be configured in the induction electrode 260 of the state of the surrounding of fog nozzle 232, its surface can not be exposed to outside, has prevented from, from induction electrode 260, corona discharge occurs.
Using the spraying plant 202 of present embodiment in the case of as film forming on by the glass substrate 150 of film forming object, on induction electrode 260, applied negative voltage by circuit mechanism, and apply positive voltage in ozzle portion 230, or make ozzle portion 230 ground connection.So, between induction electrode 260 and ozzle portion 230, produce strong electric field.Thus, being about to leave from fog nozzle 232 drop 262 surfaces of Liniment before atomization, because of static induction induce in large quantities as with the positive electric charge of induction electrode 260 opposite polarities.Therefore, from fog nozzle 232 leave and atomization the drop 262 of Liniment, become with the state of positive electricity.
Leave and with the drop 262 of Liniment of state of positive electricity, because the reason of the electric field producing between induction electrode 260 and ozzle portion 230 is subject to the power towards induction electrode 260 sides from ozzle portion 230.But the drop 262 of the Liniment having left from fog nozzle 232, by the ozzle portion 230 of high speed rotating and the winding-up air that sprays from air ejiction opening 217, is subject to the strong power towards the front of ozzle portion 230.Therefore, the drop 262 of the Liniment having left from fog nozzle 232, can be towards induction electrode 260 sides, but the conduct that is transported to the front that is positioned at ozzle portion 230 is by near the glass substrate 150 of film forming object.
Here, because as being isolator by the glass substrate 150 of film forming object, so, if with the Liniment of positive electricity to be sprayed to its surface upper, induce negative electric charge by dielectric polarization being attached on the lip-deep Liniment of glass substrate 150 surface.So, between the positive charge of the drop 262 of Liniment and the negative charge that is induced on glass substrate 150 surfaces, being played a role by the magnetism of generation of static electricity, the drop 262 of Liniment is subject to the power on the Liniment surface on glass substrate 150.Rely on the strong power that is subject to by the magnetism of this generation of static electricity with from the ozzle portion 230 of spraying plant 2 the two, the drop 262 of Liniment is attached on the surface of glass substrate 150.Be attached to the partly ground connection of drop 262 of the lip-deep Liniment of glass substrate 150, the positive charge in the drop 262 of Liniment disappears.
As in the embodiment, make ozzle portion 230 high speed rotating of spraying plant 2 by one side, carry out the spraying of the drop 262 of Liniment on one side, can make the drop 262 of Liniment be to disperse atomization on one side radially and spray, can on the surface of glass substrate 150, form the roughly film of uniform thickness of nano-scale.And then, by being accompanied by the electrostatic coating of so-called induction charging formula, compared with not following the situation of electrostatic coating, can improve the deposit efficiency with respect to glass substrate 150 of the drop 262 of Liniment.Therefore, can suppress the usage quantity of Liniment.
In addition, as in the embodiment, even because using as the glass substrate 150 of isolator as being sprayed by film forming object, electric charge is also along the Liniment surface on glass substrate 150 towards ground connection side shifting, so phase specific energy improves spray efficiency during with non-induction charging.And then, by arrangements of components that may be charged on glass substrate 150 in the situation that, because electric charge can not move to this element from the glass substrate 150 as isolator, so, can prevent that this element is exceedingly charged.Therefore, the spraying plant 202 of present embodiment, in the case of film is formed on on the glass substrate 150 of electronics etc. effectively.
Below enumerate the variation (other embodiment) of the respective embodiments described above.
(1) in the respective embodiments described above,, exemplified with by the driving part that has been made into air turbine in spraying plant being driven by turbine air, make the driving method of turning axle rotation, but the driving method of turning axle is not defined.For example,, also by electro-motor is connected with turning axle, by this electro-motor of driven by power, the structure of turning axle being given to revolving force.
(2), in above-mentioned embodiment 3, exemplified with making from the structure of the drop positively charged of the Liniment of spraying plant spraying, but also by apply positive voltage on induction electrode, make the electronegative structure of drop of Liniment.
(3), except the respective embodiments described above, structure, the shape etc. of spraying plant, can suitably change.
In the respective embodiments described above, exemplified with in order to form film on by film forming object and use the structure of spraying plant, but spraying plant can be also the device for carrying out application, also can be the device for cleaning, can be also the device for other object.
Above, understand in detail the embodiments of the present invention, but they are only to illustrate, and claim are not limited.In the technology of recording in claim, comprise the technology that above illustrative concrete example has been carried out to various distortion, change.
In addition, the technology essential factor having illustrated in this specification sheets or accompanying drawing, is separately or by the technology essential factor of the availability of various combination performance technology, the combination of claim record while being not limited to apply for.In addition, in this specification sheets or accompanying drawing exemplified with technology be the technology that can simultaneously reach multiple objects, be the technology of the availability that self possesses skills by reaching one of them object.
Embodiment
Below, enumerate embodiment, illustrate in greater detail the present invention.In addition, the invention is not restricted to following embodiment.In the present embodiment, the spraying plant (coating machine) by making ozzle portion rotation while spray, to the spraying of carrying out Liniment on glass substrate, has formed film on glass substrate.And, the film after film forming is being implemented after scratch test, by the pure water that drips, measure its contact angle on film, indirectly measure the homogeneity of the thickness of film.In the present embodiment, using film require thickness as 3～5nm, the contact angle requiring is set as more than 110 °.
The > such as < using appts
Rising sun Sha Nake (rising sun サ Na ッ Network) company's coating machine processed (NC Bel (NC ベ Le) ASG-10), rising sun Sha Nake company syringe pump processed (PCF-10), film device (PCS3747) is made by rising sun Sha Nake company, Hong Tian motor company plasma treatment appts processed (AT-3000), rising sun Sha Nake company one chip washing unit processed, Ya Matuo (ヤ マ ト) scientific company thermostatic bath processed (DHS42), Coat Well company wear test processed (scratch test) device (F-339), the consonance portable contact angle instrument of interface science company system (PCA-1), experimental situation (25.6 ℃ of temperature, humidity 43.5%)
The > such as < material
Dong Lidawukening (East レ ダ ウ コ ー ニ Application グ) company's Liniment processed (DOW CORNING(R) 2634 COATING), soda-lime glass (horizontal 55mm × vertical 110mm × thick 1.1mm), Virahol (IPA).
The cleaning on < liquid supply road and the confirmation > of output
Use syringe pump, by IPA to cleaning in liquid supply road.Then, be replaced as Liniment, Liniment is discharged from the fog nozzle of spraying machine.Then, use measuring container to confirm from NC Bel's output.
< matting and plasma treatment operation >
Drop in washing unit (with reference to Figure 13) becoming by the glass substrate of film forming object, cleaned by the air of high pressure.Then, this glass substrate is dropped in plasma treatment appts (with reference to Figure 14), glass substrate is irradiated to plasma body, thus, the organism on glass substrate is removed.
< glass substrate > is set
Be arranged on central authorities on the platform in film deposition system by having carried out the glass substrate after plasma treatment, fixed by masking tape.
< film formation process >
Use the film deposition system (device of Liao Xu Sha Nake company spraying machine processed (with reference to Figure 12) is installed) having illustrated in embodiment 2, on glass substrate, formed film with the method same with embodiment 2.In addition, using the speed of rotation of ozzle portion in the condition having illustrated in embodiment 2, spraying plant as 50000rpm, distance H 1(between spraying plant 2 and glass substrate is with reference to Fig. 9) as 20mm, using the translational speed of spraying plant as 30m/min, other condition is same with the condition having illustrated in embodiment 2.
< drying process >
Glass substrate after film formation process is taken out from film deposition system, drop in thermostatic bath, make its dry (with reference to Figure 15).Drying conditions is 100 degree, 60 minutes.In addition, in the input of glass substrate, to the pure water that drops into 200cc in thermostatic bath, produced water vapour.
< scratch test >
After drying process, more than glass substrate is placed to an evening under general environment, the film on glass substrate is fixed.Then,, in order to investigate the weather resistance of film, the glass substrate as sample has been carried out to scratch test.In scratch test, use steel wool, using load as 250g/1cm, using stroke as 5cm, using friction velocity as 50 come and go/min, carried out respectively 1500 come and go and 3000 come and go.
< contact angle determination >
To having carried out the film on the glass substrate after scratch test, use contact angle instrumentation to determine contact angle.Contact angle is to carry out 5 times about 1 sample to measure, and has calculated its mean value.
< result >
In scratch test, about having carried out 1500 round samples, 110 ° of above contact angles are obtained.And then, about having carried out 3000 round samples, obtain 110 ° of above contact angles.Can infer from this result roughly film thickness, that there is grease proofness uniformly that has formed at glass substrate that to possess weather resistance and thickness be 3～5nm.Form the glass substrate of such film, can expect to be used as the glass substrate that touch pad is used above.
Nomenclature:
2: spraying plant, 4: air adjustment valve, 6: air supply road, 8: driving part, 9: turbine vane, 12: supply-pipe, 14: winding-up air supply road, 15: air cap, 16: turning axle, 18: pressure-bearing portion, 20: stationary shaft, 22: main part, 24: liquid supply road, 30: ozzle portion, 32: fog nozzle, 34: the conical surface, 38: storing chamber, 42: air guide member, 50: liquid supply source, 100: film deposition system, 108: control device, 120: platform, 150: glass substrate, 260: induction electrode.
Claims (8)
1. a spraying plant, possesses main part, turning axle, driving part, ozzle portion, the liquid supply road of tubular and the air supply road of jetting;
This turning axle can be in its axle center be arranged on described main part rotatably,
This driving part is given revolving force to described turning axle,
This ozzle portion can be with this turning axle as the front end that is integrally rotatably arranged on described turning axle, is made into its front end and has the cup-shaped of peristome, and described peristome is made into the fog nozzle exposing from the front end of described main part,
Described in this liquid supply road direction, ozzle portion supplies with spraying fluid,
Surrounding's supply winding-up air of ozzle portion described in this winding-up air supply road direction, this winding-up air is to the described spraying fluid winding-up from described fog nozzle spraying;
By supplying with described spraying fluid to described ozzle portion, to the described winding-up air of surrounding's supply of described ozzle portion, and make the rotation of described ozzle portion, make described spraying fluid be dispersion radially while atomization is sprayed towards front from described fog nozzle by its centrifugal force.
2. a spray method, this spray method uses spraying plant to carry out the spraying of spraying fluid, it is characterized in that, and this spraying plant possesses main part, turning axle, driving part, ozzle portion, liquid supply road and the winding-up air supply road of tubular; This turning axle can be in its axle center be arranged on described main part rotatably, this driving part is given revolving force to described turning axle, this ozzle portion can be with this turning axle as the front end that is integrally rotatably arranged on described turning axle, be made into the cup-shaped that its front end has peristome, and described peristome is made into the fog nozzle exposing from the front end of described main part, described in this liquid supply road direction, ozzle portion supplies with spraying fluid, surrounding's supply winding-up air of ozzle portion described in this winding-up air supply road direction, this winding-up air is to the described spraying fluid winding-up from described fog nozzle spraying;
By supplying with described spraying fluid to described ozzle portion, to the described winding-up air of surrounding's supply of described ozzle portion, and make the rotation of described ozzle portion, make described spraying fluid be dispersion radially while atomization is sprayed towards front from described fog nozzle by its centrifugal force.
3. a manufacture method for grease proofness glass substrate, possesses matting, plasma treatment operation, film formation process and drying process;
This matting, by the air to glass substrate winding-up high pressure, cleans described glass substrate;
This plasma treatment operation, after described matting, irradiates plasma body to described glass substrate, and the organism on described glass substrate is removed;
This film formation process, after described plasma treatment operation, require the spray method described in 2 that the Liniment that contains the fluorine series compounds with perfluoroalkyl ether is sprayed on described glass substrate as described spraying fluid by right to use, on described glass substrate, form the film being formed by described fluorine series compounds;
This drying process, after described film formation process, makes described glass substrate at drying oven inner drying.
4. the manufacture method of grease proofness glass substrate according to claim 3, it is characterized in that, in described film formation process, described spraying plant plate face direction at this glass substrate on described glass substrate is moved, and control the adhesion amount of the described Liniment of the per unit area on this glass substrate on one side, carry out the spraying of described Liniment on one side.
5. the manufacture method of grease proofness glass substrate according to claim 4, it is characterized in that, in described film formation process, making diameter is that the described fog nozzle of the described ozzle portion of 10mm to 120mm approaches with the distance in the scope of 5mm to 200mm with respect to the surface of described glass substrate, make described ozzle portion with the speed of rotation rotation in the scope of 10000rpm to 150000rpm, and described spraying plant is moved on one side in the plate face direction of described glass substrate with the speed in the scope of 1m/min to 100m/min, carry out the spraying of described Liniment with the amount in the scope of per unit area 1cc/min to 500cc/min on one side.
6. according to the manufacture method of the grease proofness glass substrate described in any one in claim 3 to 5, it is characterized in that, in described film formation process, by induction electrode is configured in described ozzle portion near, between this induction electrode and described ozzle portion, apply voltage, make from by electrical resistance carried out the liquid droplet charged of the described Liniment of the described spraying plant spraying of ground connection, and by described drop is sprayed on the surface of described glass substrate, on the surface of described glass substrate, induced the electric charge with described drop opposite polarity by dielectric polarization, by electrostatic force, described drop is attached on the surface of this glass substrate.
7. a manufacturing installation for grease proofness glass substrate, is characterized in that, possesses washing unit, plasma treatment appts, film deposition system, running gear, control device and drying installation;
This washing unit, by the air to glass substrate winding-up high pressure, cleans this glass substrate;
This plasma treatment appts irradiates plasma body to described glass substrate, and the organism on this glass substrate is removed;
This film deposition system possesses spraying plant claimed in claim 1, by using this spraying plant that the Liniment that contains the fluorine series compounds with perfluoroalkyl ether is sprayed on described glass substrate, on this glass substrate, form the film being formed by described fluorine series compounds;
This running gear moves described spraying plant plate face direction at this glass substrate on described glass substrate;
The adhesion amount of the described Liniment of the per unit area on movement and the described glass substrate of this control device to described spraying plant is controlled;
This drying installation has drying oven, and the described glass substrate that has made to form described film in this drying oven is dry.
8. the manufacturing installation of grease proofness glass substrate according to claim 7, it is characterized in that, described film deposition system has induction electrode and voltage applying mechanism, this induction electrode be configured in described ozzle portion near, voltage applying mechanism this induction electrode and by electrical resistance ground ground connection described spraying plant between apply voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210394742.8A CN103771718A (en) | 2012-10-17 | 2012-10-17 | Spraying device, spraying method, manufacturing method of oil-proof glass substrate, and device for manufacturing oil-proof glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210394742.8A CN103771718A (en) | 2012-10-17 | 2012-10-17 | Spraying device, spraying method, manufacturing method of oil-proof glass substrate, and device for manufacturing oil-proof glass substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103771718A true CN103771718A (en) | 2014-05-07 |
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ID=50564555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210394742.8A Pending CN103771718A (en) | 2012-10-17 | 2012-10-17 | Spraying device, spraying method, manufacturing method of oil-proof glass substrate, and device for manufacturing oil-proof glass substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103771718A (en) |
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2012
- 2012-10-17 CN CN201210394742.8A patent/CN103771718A/en active Pending
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Application publication date: 20140507 |