CN103771183A - Vacuum plasma surface treatment device - Google Patents
Vacuum plasma surface treatment device Download PDFInfo
- Publication number
- CN103771183A CN103771183A CN201410035309.4A CN201410035309A CN103771183A CN 103771183 A CN103771183 A CN 103771183A CN 201410035309 A CN201410035309 A CN 201410035309A CN 103771183 A CN103771183 A CN 103771183A
- Authority
- CN
- China
- Prior art keywords
- storehouse
- rolling
- deflector roll
- auxiliary guide
- guide roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention provides a vacuum plasma surface treatment device which is used for treating a winding material. The vacuum plasma surface treatment device comprises an unreeling cabin, a rolling cabin and a plasma treatment cabin, wherein an unreeling guide roll and an unreeling tension auxiliary guide roll are arranged inside the unreeling cabin, the junction of the unreeling cabin and the plasma treatment cabin is provided with an opening which is used for placing the winding material into the plasma treatment cabin through the unreeling cabin; the plasma treatment cabin is provided with a supporting auxiliary guide roll, an upper electrode plate and a lower electrode plate, the supporting auxiliary guide roll is used for supporting the winding material and preventing the material from falling onto the upper electrode plate and the lower electrode plate, and an upper tangential surface of the supporting auxiliary guide roll is arranged on the center of the lower electrode plate and the upper electrode plate; a deviation correction system, a rolling tension auxiliary guide roll and a rolling guide roll are installed inside the rolling cabin, and the deviation correction system is used for guiding and correcting the position of the deviated winding material. The winding material is automatically rolled and unreeled, and the plasma surface treatment of the winding material is automatically completed under the vacuum, so that the production efficiency can be greatly improved.
Description
Technical field
The present invention relates to plasma treatment technical field, relate in particular to a kind of vacuum plasma surface processing equipment.
Background technology
Ion processing equipment is widely used in the occasions such as plasma cleaning, etching, plasma plating, plasma coated, plasma ashing and surface active, modification.Process by it, can improve the moisturing capacity of material, make the operations such as multiple material can apply, plating, strengthen binding power, bonding force, remove organic contaminant, greasy dirt or grease simultaneously.In the middle of existing vacuum plasma treatment facility, great majority can only be processed single piece of material.For coiling material, could utilize existing plasma processing to process after more must being processed into monolithic.This not only makes course of processing complexity, and manufacturing procedure is loaded down with trivial details, and production efficiency is low, and has increased productive costs widely.Current have few part can accomplish that under vacuum, automatic deploying and retracting involves in row plasma surface treatment, but it is because positive-negative electrode plate is that perpendicular separation placement and spacing are less, cause around roll of material walk material very difficult, efficiency is not high, and easily material and facility is polluted.And its intake uniformity and plasma isolation performance also have larger defect, the protection of the treatment effect to coiling material and equipment itself has adverse effect.
In summary,, obviously there is in actual use inconvenience and defect in existing vacuum plasma surface processing equipment, so be necessary to be improved.
Summary of the invention
For above-mentioned defect, the object of the present invention is to provide a kind of vacuum plasma surface processing equipment, adopt automatic releasing volume winding, under vacuum, automatically complete the plasma surface treatment operation of coiling material, can greatly enhance productivity.
To achieve these goals, the invention provides a kind of vacuum plasma surface processing equipment, for the treatment of coiling material, described treatment facility comprise unreel storehouse, rolling storehouse and be connected to described in unreel the plasma treatment storehouse between storehouse and rolling storehouse, wherein:
The described inside, storehouse that unreels is provided with and unreels deflector roll and unwinding tension auxiliary guide roll, and described in unreel that storehouse is connected with plasma treatment storehouse locate to be provided with opening, for described coiling material is penetrated into described plasma treatment storehouse by the described storehouse that unreels;
Described plasma treatment storehouse is provided with supports auxiliary guide roll and upper and lower battery lead plate, the auxiliary deflector roll of described support is used for supporting described coiling material and prevents the described material described upper and lower battery lead plate that hangs, and the upper edge of described support auxiliary guide roll is positioned at the center of described lower electrode plate and electric pole plate;
Inside, described rolling storehouse is provided with deviation-rectifying system, winding tension auxiliary guide roll and rolling deflector roll, and described deviation-rectifying system is for guiding correction to the position of the described coiling material departing from.
According to vacuum plasma surface processing equipment of the present invention, the described deflector roll that unreels is two end supports, and described in unreel deflector roll one end fix, the other end can slip off and be furnished with latching device, when described latching device is decontroled, the described deflector roll that unreels, can transverse rotation take described fixing one end as the center of circle.
According to vacuum plasma surface processing equipment of the present invention, described in unreel deflector roll rear portion and be connected with the drive motor with brake gear by magnetic-powder clutch.
According to vacuum plasma surface processing equipment of the present invention, described unwinding tension auxiliary guide roll is two end supports, and described unwinding tension auxiliary guide roll is provided with tension control assembly, for detection of the tension force that unreels coiling material described in side.
According to vacuum plasma surface processing equipment of the present invention, described plasma treatment storehouse has visits, described lower electrode plate is connected to below described plasma treatment storehouse interior by insulating element, and described electric pole plate is connected to visiting of described plasma treatment storehouse by insulating element.
According to vacuum plasma surface processing equipment of the present invention, described deviation-rectifying system comprises guidance system and deflection correction sensor.
According to vacuum plasma surface processing equipment of the present invention, described deflection correction sensor is U-shaped structure, described coiling material edge from the center of described U-shaped deflection correction sensor through, described deflection correction sensor, according to the position of described coiling material, is controlled the deflecting direction of described guidance system.
According to vacuum plasma surface processing equipment of the present invention, described deflection correction sensor judges the position of described coiling material by responding to infrared or super sonic.
According to vacuum plasma surface processing equipment of the present invention, described rolling deflector roll rear portion links by magnetic-powder clutch and the drive motor with brake gear, and described drive motor can drive any positive and negative rotation of described rolling deflector roll.
According to vacuum plasma surface processing equipment of the present invention, described winding tension auxiliary guide roll is two end supports, and described winding tension auxiliary guide roll is equipped with tension control assembly, for detection of the tension force of coiling material described in rolling side,
Described rolling deflector roll is two end supports, and one end of described rolling deflector roll is fixed, the other end can slip off and be furnished with latching device, when described latching device is decontroled, described rolling deflector roll is take one end of fixing as the center of circle, can transverse rotation, and described rolling deflector roll is Pneumatic core shaft structure, for locking the coiled material roll heart.
The present invention unreels storehouse, rolling storehouse and plasma treatment storehouse by setting coiling material is processed, wherein: unreel inside, storehouse and be provided with and unreel deflector roll and unwinding tension auxiliary guide roll, and what unreel that storehouse is connected with plasma treatment storehouse locates to be provided with opening, for coiling material is penetrated into plasma treatment storehouse by unreeling storehouse; Plasma treatment storehouse is provided with supports auxiliary guide roll and upper and lower battery lead plate, support auxiliary deflector roll be used for supporting described coiling material and described in prevent the material described upper and lower battery lead plate that hangs, and the upper edge that supports auxiliary guide roll is positioned at the center of lower electrode plate and electric pole plate; Inside, rolling storehouse is provided with deviation-rectifying system, winding tension auxiliary guide roll and rolling deflector roll, for the position of the described coiling material departing from is guided to correction.The present invention adopts automatic releasing volume winding, automatically completes the plasma surface treatment operation of coiling material under vacuum, has greatly improved production efficiency.
Accompanying drawing explanation
Fig. 1 is vacuum plasma surface processing equipment the first structural representation of the present invention;
Fig. 2 is vacuum plasma surface processing equipment the second structural representation of the present invention;
Fig. 3 is vacuum plasma surface processing equipment the 3rd structural representation of the present invention;
Fig. 4 is vacuum plasma surface processing equipment the 4th structural representation of the present invention.
The specific embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Referring to Fig. 1～Fig. 4, the invention provides a kind of vacuum plasma surface processing equipment, it is for the surface treatment to coiling material.This treatment facility comprises integral-rack 1, unreels storehouse 2, rolling storehouse 3 and be connected to described in unreel the plasma treatment storehouse 4 between storehouse 2 and rolling storehouse 3, wherein:
Described 2 inside, storehouse that unreel are provided with and unreel deflector roll 21 and unwinding tension auxiliary guide roll 22, and described in unreel that storehouse 2 is connected with plasma treatment storehouse 4 locate to be provided with opening, for coiling material is penetrated into described plasma treatment storehouse 4 by unreeling storehouse 2.
Described plasma treatment storehouse 4 is provided with supports auxiliary guide roll 41, electric pole plate 43 and lower electrode plate 42.The auxiliary deflector roll 41 of described support is for supporting described coiling material and preventing the material described upper and lower battery lead plate that hangs, and better, the upper edge of described support auxiliary guide roll 41 is positioned at the center of described lower electrode plate 42 and electric pole plate 43.
3 inside, described rolling storehouse are provided with deviation-rectifying system 31, winding tension auxiliary guide roll 32 and rolling deflector roll 33.Deviation-rectifying system 31 is for guiding correction to the position of the described coiling material departing from.
The coiling material maximum width of processing of the present invention is 500mm, is 0.1-3m/min to the processing speed of coiling material, and all cavitys and battery lead plate include but not limited to be made up of aluminum alloy materials.And pole plate of the present invention adopts unidirectional continuous placement, and top crown can move or open, and when workman walks to expect, only need be pulled through unidirectional coiling material, avoids material contamination, strengthened practicality.
Need explanation, the plasma treatment storehouse 4 in diagram only illustrates two herein, but the present invention can be according to real work needs, can process the corresponding increase in storehouse or reduce and process by plasma, but minimum need retains one.
In one embodiment of the invention, unreeling storehouse 2 has two doors, lays respectively at top and the side away from plasma treatment storehouse 4, and side door is for coiling material is loaded and unloaded and unreels deflector roll, and roof door is used for facilitating workman's cloth, walks material.
Unwinding tension auxiliary guide roll 22 is two end supports, and wherein one section is equipped with tension control assembly, for detection of the tension force that unreels side coiling material, guarantees the tensioning dynamics of coiling material, prevents that material from pulling or dragging pendant, plays the effect of protective material.
The top in plasma treatment storehouse 4 is the design of can opening the door, and visits 44 the backward back upper place of hinge can be installed open, also can vertical-lift.Meanwhile, if visiting of plasma treatment storehouse 4 is 44 heavier, the present invention can install hydraulic stem additional or cylinder comes pilot switch and lifting.Further, respectively there is elongated open at 4 two ends, plasma treatment storehouse, pass for coiling material.
Preferably, the quantity of each plasma storehouse 4 inner support auxiliary guide rolls 41 is three or four, plays support coiling material, and prevents the hang effect of pole plate of material.
Preferably, support auxiliary guide roll 41 upper edges are positioned at the center of lower electrode plate 42 and electric pole plate 43.
In addition, in a plasma treatment storehouse 4, there are upper and lower two lower electrode plates 42 and electric pole plate 43, are connected respectively to the low and high level of plasma power supply.And lower electrode plate 42 is connected to by insulating element below plasma treatment storehouse 4 interior, what electric pole plate 43 was connected to plasma treatment storehouse 4 by insulating element visits 44.When visiting 44 while opening, electric pole plate 43 44 promotes with visiting, and supports auxiliary guide roll 41 is exposed completely, facilitates workman's cloth, walks material, is also convenient to maintenance, installation simultaneously.
In embodiments of the invention, there are two doors in rolling storehouse 3, lays respectively at top and the side away from plasma treatment storehouse 4.Side door is for coiling material is loaded and unloaded and unreels deflector roll, and roof door is used for facilitating workman's cloth, walks material.
There is little opening in rolling storehouse 3 in the part being connected with plasma treatment storehouse 4, for coiling material being penetrated into plasma treatment storehouse 4.
The deviation-rectifying system 31 in rolling storehouse 3 comprises guidance system and deflection correction sensor.Deflection correction sensor is U-shaped structure, coiling material edge from then on U-shaped center through, deflection correction sensor judges the position of coiling material by responding to the technology such as infrared or super sonic, control whereby guidance system deflecting direction, coiling material is led back to both allocations, can reach ± 1mm of its control accuracy.
Winding tension auxiliary guide roll 32 is two end supports, and wherein one section is equipped with tension control assembly, for detection of the tension force of rolling side coiling material, guarantees the tensioning dynamics of coiling material, prevents that material from pulling or dragging pendant, plays the effect of protective material.
Rolling deflector roll 33 is two end supports, and one end is fixed, and the other end can slip off and be furnished with latching device, and when latching device is decontroled, deflector roll, can transverse rotation, convenience and handling coiled material take fixed end as the center of circle.Better, rolling deflector roll 33 can be Pneumatic core shaft structure, can lock the coiled material roll heart, prevents that it from arbitrarily sliding.In addition, rolling deflector roll 33 rear portions link by magnetic-powder clutch and the drive motor with brake gear, can pass through any positive and negative rotation of driven by motor deflector roll, realize whereby the rapid starting/stopping of unwinding and rewinding.
In sum, the present invention unreels storehouse, rolling storehouse and plasma treatment storehouse by setting coiling material is processed, wherein: unreel inside, storehouse and be provided with and unreel deflector roll and unwinding tension auxiliary guide roll, and what unreel that storehouse is connected with plasma treatment storehouse locates to be provided with opening, for coiling material is penetrated into plasma treatment storehouse by unreeling storehouse; Plasma treatment storehouse is provided with supports auxiliary guide roll and upper and lower battery lead plate, support auxiliary deflector roll be used for supporting described coiling material and described in prevent the material described upper and lower battery lead plate that hangs, and the upper edge that supports auxiliary guide roll is positioned at the center of lower electrode plate and electric pole plate; Inside, rolling storehouse is provided with deviation-rectifying system, winding tension auxiliary guide roll and rolling deflector roll, for the position of the described coiling material departing from is guided to correction.The present invention adopts automatic releasing volume winding, automatically completes the plasma surface treatment operation of coiling material under vacuum, has greatly improved production efficiency.
Certainly; the present invention also can have other various embodiments; in the situation that not deviating from spirit of the present invention and essence thereof; those of ordinary skill in the art are when making according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (10)
1. a vacuum plasma surface processing equipment, for the treatment of coiling material, is characterized in that, described treatment facility comprise unreel storehouse, rolling storehouse and be connected to described in unreel the plasma treatment storehouse between storehouse and rolling storehouse, wherein:
The described inside, storehouse that unreels is provided with and unreels deflector roll and unwinding tension auxiliary guide roll, and described in unreel that storehouse is connected with plasma treatment storehouse locate to be provided with opening, for described coiling material is penetrated into described plasma treatment storehouse by the described storehouse that unreels;
Described plasma treatment storehouse is provided with supports auxiliary guide roll and upper and lower battery lead plate, the auxiliary deflector roll of described support is used for supporting described coiling material and prevents the described material described upper and lower battery lead plate that hangs, and the upper edge of described support auxiliary guide roll is positioned at the center of described lower electrode plate and electric pole plate;
Inside, described rolling storehouse is provided with deviation-rectifying system, winding tension auxiliary guide roll and rolling deflector roll, and described deviation-rectifying system is for guiding correction to the position of the described coiling material departing from.
2. vacuum plasma surface processing equipment according to claim 1, it is characterized in that, the described deflector roll that unreels is two end supports, and described in unreel deflector roll one end fix, the other end can slip off and be furnished with latching device, when described latching device is decontroled, described in unreel deflector roll take described fixing one end as the center of circle, can transverse rotation.
3. vacuum plasma surface processing equipment according to claim 2, is characterized in that, described in unreel deflector roll rear portion and be connected with the drive motor with brake gear by magnetic-powder clutch.
4. vacuum plasma surface processing equipment according to claim 3, it is characterized in that, described unwinding tension auxiliary guide roll is two end supports, and described unwinding tension auxiliary guide roll is provided with tension control assembly, for detection of the tension force that unreels coiling material described in side.
5. vacuum plasma surface processing equipment according to claim 1, it is characterized in that, described plasma treatment storehouse has visits, described lower electrode plate is connected to below described plasma treatment storehouse interior by insulating element, and described electric pole plate is connected to visiting of described plasma treatment storehouse by insulating element.
6. vacuum plasma surface processing equipment according to claim 1, is characterized in that, described deviation-rectifying system comprises guidance system and deflection correction sensor.
7. vacuum plasma surface processing equipment according to claim 6, it is characterized in that, described deflection correction sensor is U-shaped structure, described coiling material edge from the center of described U-shaped deflection correction sensor through, described deflection correction sensor, according to the position of described coiling material, is controlled the deflecting direction of described guidance system.
8. vacuum plasma surface processing equipment according to claim 7, is characterized in that, described deflection correction sensor judges the position of described coiling material by responding to infrared or super sonic.
9. vacuum plasma surface processing equipment according to claim 8, it is characterized in that, described rolling deflector roll rear portion links by magnetic-powder clutch and the drive motor with brake gear, and described drive motor can drive any positive and negative rotation of described rolling deflector roll.
10. vacuum plasma surface processing equipment according to claim 9, is characterized in that, described winding tension auxiliary guide roll is two end supports, and described winding tension auxiliary guide roll is equipped with tension control assembly, for detection of the tension force of coiling material described in rolling side;
Described rolling deflector roll is two end supports, and one end of described rolling deflector roll is fixed, the other end can slip off and be furnished with latching device, when described latching device is decontroled, described rolling deflector roll is take one end of fixing as the center of circle, can transverse rotation, and described rolling deflector roll is Pneumatic core shaft structure, for locking the coiled material roll heart.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410035309.4A CN103771183A (en) | 2014-01-21 | 2014-01-21 | Vacuum plasma surface treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410035309.4A CN103771183A (en) | 2014-01-21 | 2014-01-21 | Vacuum plasma surface treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103771183A true CN103771183A (en) | 2014-05-07 |
Family
ID=50564036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410035309.4A Pending CN103771183A (en) | 2014-01-21 | 2014-01-21 | Vacuum plasma surface treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103771183A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105170576A (en) * | 2015-05-11 | 2015-12-23 | 柏弥兰金属化研究股份有限公司 | Cleaning method and system for a reel-to-reel polyimide film |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4551310A (en) * | 1980-07-30 | 1985-11-05 | Hitachi, Ltd. | Continuous vacuum treating apparatus |
| CN101592890A (en) * | 2008-05-30 | 2009-12-02 | 佳能株式会社 | Sheet feeding apparatus and imaging device |
| CN101627147A (en) * | 2007-02-26 | 2010-01-13 | 莱博德光学有限责任公司 | Vacuum treatment of strip-shaped substrates |
| CN102605338A (en) * | 2012-02-23 | 2012-07-25 | 珠海宝丰堂电子科技有限公司 | Plasma processing equipment having deviation rectifying function and used for processing rolled material |
| CN102899628A (en) * | 2011-07-29 | 2013-01-30 | 日东电工株式会社 | Method for double-side vacuum film formation and laminate obtainable by the method |
| CN103264920A (en) * | 2013-05-24 | 2013-08-28 | 珠海宝丰堂电子科技有限公司 | Deviation rectifying device capable of adjusting tension in vacuum plasma environment and method thereof |
| CN203667694U (en) * | 2014-01-21 | 2014-06-25 | 深圳市奥坤鑫科技有限公司 | Vacuum plasma surface treating device |
-
2014
- 2014-01-21 CN CN201410035309.4A patent/CN103771183A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4551310A (en) * | 1980-07-30 | 1985-11-05 | Hitachi, Ltd. | Continuous vacuum treating apparatus |
| CN101627147A (en) * | 2007-02-26 | 2010-01-13 | 莱博德光学有限责任公司 | Vacuum treatment of strip-shaped substrates |
| CN101592890A (en) * | 2008-05-30 | 2009-12-02 | 佳能株式会社 | Sheet feeding apparatus and imaging device |
| CN102899628A (en) * | 2011-07-29 | 2013-01-30 | 日东电工株式会社 | Method for double-side vacuum film formation and laminate obtainable by the method |
| CN102605338A (en) * | 2012-02-23 | 2012-07-25 | 珠海宝丰堂电子科技有限公司 | Plasma processing equipment having deviation rectifying function and used for processing rolled material |
| CN103264920A (en) * | 2013-05-24 | 2013-08-28 | 珠海宝丰堂电子科技有限公司 | Deviation rectifying device capable of adjusting tension in vacuum plasma environment and method thereof |
| CN203667694U (en) * | 2014-01-21 | 2014-06-25 | 深圳市奥坤鑫科技有限公司 | Vacuum plasma surface treating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105170576A (en) * | 2015-05-11 | 2015-12-23 | 柏弥兰金属化研究股份有限公司 | Cleaning method and system for a reel-to-reel polyimide film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209767009U (en) | automatic cable laying system and cable laying device thereof | |
| WO2019127987A1 (en) | Cable winding device and mobile-and-position-purposed lift-off winding system | |
| KR101447737B1 (en) | House of Commons of the keys for the roof crane | |
| KR101261457B1 (en) | A wiring apparatus of drum cable | |
| KR102616986B1 (en) | Device and method for installing cable, and moving cart | |
| CN203667694U (en) | Vacuum plasma surface treating device | |
| KR102616987B1 (en) | Device and method for installing cable, and moving cart | |
| KR101244370B1 (en) | Stahe setting apparatus | |
| CN103771183A (en) | Vacuum plasma surface treatment device | |
| US8789811B2 (en) | Wire puller | |
| CN106938809A (en) | Cable winder and vehicle-mounted removable detection device | |
| CN207774679U (en) | A kind of indoor electric disk cabinet lifting handling device | |
| CN208881162U (en) | A kind of high performance membrane material plasma processing equipment | |
| JP2015174738A (en) | cable drum fixture | |
| CN110980396A (en) | Unwinding device is used in installation of ground heating coil | |
| US20220042374A1 (en) | Winch utility | |
| CN210710357U (en) | Hook device for cable coil | |
| CN210234927U (en) | Intelligent vehicle's maintenance device | |
| CN205328556U (en) | Flexible positioning and clamping device that promotes of wire rope dish | |
| JP2017073842A (en) | Movable cable frame | |
| CN105645197A (en) | Cable reel and self-propelled hoist conveying device using same | |
| CN103997013A (en) | Cable pay-off device | |
| WO2015136824A1 (en) | Installation assistance device | |
| CN205397649U (en) | Leveling device and have opening a book of this leveling device and integrate mechanism | |
| CN113415678B (en) | Temporary supporting structure for laying power line |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140507 |
|
| RJ01 | Rejection of invention patent application after publication |