CN102605338A - Plasma processing equipment having deviation rectifying function and used for processing rolled material - Google Patents
Plasma processing equipment having deviation rectifying function and used for processing rolled material Download PDFInfo
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- CN102605338A CN102605338A CN2012100421853A CN201210042185A CN102605338A CN 102605338 A CN102605338 A CN 102605338A CN 2012100421853 A CN2012100421853 A CN 2012100421853A CN 201210042185 A CN201210042185 A CN 201210042185A CN 102605338 A CN102605338 A CN 102605338A
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Abstract
The invention discloses plasma equipment and aims to provide plasma processing equipment which is used for processing a rolled material, is easy to operate and low in cost, has a deviation rectifying function and can prevent the rolled material from deviating when being rolled. The plasma processing equipment comprises a frame (1); the interior of the frame (1) is vacuumized so that a vacuum cavity (2) is formed; the vacuum cavity (2) is internally provided with a material feeding shaft (3), a material accommodating shaft (4) and a plurality of guiding shafts and is further provided with a plurality of plasma regions (6) and a deviation rectifying device; the plasma regions (6) are composed of negative electrodes and positive electrodes; the deviation rectifying device is composed of a mounting frame (71), two guide rollers (72), a swing motor (73) and a deviation rectifying sensor (4); and the rolled material passes by the two guide rollers (72) and is finally accommodated in the material accommodating shaft (4). The plasma processing equipment can be widely used in the field of plasma equipment.
Description
Technical field
The present invention relates to a kind of plasma processing with processing volume property material of deviation-correcting function.
Background technology
Plasma processing is widely used in plasma cleaning, etching, plasma plating, plasma coated, plasma ashing and occasions such as surface active, modification.Handle through it, can improve the wetting ability of material, make operations such as multiple material can apply, plating, strengthen bounding force, linkage force, remove organic pollutant, greasy dirt or grease simultaneously.In the middle of existing plasma processing, great majority can only be handled single piece of material.For volume property material, could utilize existing plasma processing to handle after must being processed into monolithic more.This not only makes the course of processing complicated, and manufacturing procedure is loaded down with trivial details, and production efficiency is low, and has increased production cost widely.At present, a tame enterprise design in Zhuhai a kind of plasma apparatus that can be directly process volume property material.But the volume property material that is in collecting shaft one side the irregular phenomenon of volume property material at collecting shaft place occurs closing at easily in the rewinding process, need manual work to readjust in use.This has not only increased the cost input, and makes that easily treated volume property material is polluted once more.
Summary of the invention
Technical problem to be solved by this invention is the deficiency that overcomes prior art, and a kind of simple to operate, plasma processing that the property material is rolled up in the processing with deviation-correcting function that practice thrift cost, can directly handle volume property material and can avoid volume property material webs time-out deviation to occur is provided.
The technical scheme that the present invention adopted is: the present invention includes framework; Said framework inside vacuumizes into vacuum chamber; In said vacuum chamber, be provided with dispensing shaft, collecting shaft and some axis of guides; Said dispensing shaft and said collecting shaft are respectively by two driven by servomotor; In said vacuum chamber, also be provided with the some plasma areas that are made up of positive electrode and negative potential, volume property material passes from said plasma area, in said vacuum chamber, also is provided with deviation correcting device; Said deviation correcting device is made up of erecting frame, two guide rollers, rotary actuator and correction inductor blocks, and volume property material is walked around two said guide rollers and closed at said collecting shaft at last through said correction inductor block.
Said two guide rollers are set in parallel on the said erecting frame, are rotatably assorted between said guide roller and the said erecting frame.
The correction accuracy error that the plasma processing of property material is rolled up in said processing with deviation-correcting function is ± 1mm.
Said correction inductor block is the U type, keeps in touch in the middle of the end face of volume property material and the U type of said correction inductor block (74).
Around said plasma area, be provided with metal baffle, said metal baffle comes said plasma area and peripheral vacuum chamber spatial separation.
Said positive electrode is electrically connected said negative potential ground connection with peripheral radio-frequency power supply.
Two said servomotors are connected with collecting shaft with said dispensing shaft respectively through clutch coupling, and said servomotor is provided with the brake assembling.
Be in the said plasma area volume property material all with said positive electrode and negative potential keeping parallelism.
Per two adjacent plasma areas are together with same negative potential.
The width range that the accessible volume property material of plasma processing of property material is rolled up in said processing with deviation-correcting function is 10～500mm.
The invention has the beneficial effects as follows: because the present invention position near said collecting shaft in said vacuum cavity is provided with deviation correcting device; Utilize said correction inductor block induction volume property material whether to squint; Squint if sense volume property material, said rotary actuator is swung and is controlled said guide roller and swings, thereby adjusts the position of volume property material automatically; Avoid occurring skew; So the present invention can make that the volume property material that closes at the collecting shaft place is neat, secondary pollution and the cost of avoiding traditional method to bring increase.In addition, the present invention is simple in structure, and is easy to operate, reduces labor intensity of operating personnel, reduces manufacturing cost.
Because being equipped with metal baffle in said plasma area outer periphery, the present invention comes to come the spatial separation of plasma area with the vacuum chamber of periphery, so, can reduce the influence of plasma gas effectively to peripheral accessory.
Description of drawings
Fig. 1 is a perspective view of the present invention;
Fig. 2 is a Facad structure synoptic diagram of the present invention;
Fig. 3 is the inner Facad structure synoptic diagram of said vacuum cavity;
Fig. 4 is the structural representation that said servomotor is connected with said dispensing shaft and collecting shaft;
Fig. 5 is the structural representation of said volume property material connection portion;
Fig. 6 is the perspective view of said volume property material connection portion;
Fig. 7 is the part-structure synoptic diagram of said deviation correcting device.
Embodiment
To shown in Figure 5, in the present embodiment, the present invention includes framework 1 like Fig. 1, said framework 1 inside vacuumizes into vacuum chamber 2.In said vacuum chamber 2, be provided with dispensing shaft 3, collecting shaft 4 and some axis of guides, said dispensing shaft 3 is driven by two servomotors 5 respectively with said collecting shaft 4.Two said servomotors 5 are connected with collecting shaft 4 with said dispensing shaft 3 respectively through clutch coupling 9, and said servomotor 5 is provided with the brake assembling, can let volume property material keep certain force of strain.In said vacuum chamber 2, also be provided with the some plasma areas 6 that are made up of positive electrode and negative potential, volume property material passes from said plasma area 6.Be in the said plasma area 6 volume property material all with said positive electrode and negative potential keeping parallelism.Said positive electrode is electrically connected said negative potential ground connection with peripheral radio-frequency power supply.Per two adjacent plasma areas 6 are with same negative potential.In the present embodiment, the number of said plasma area 6 is set to two, is made up of positive electrode that is positioned at both sides and the negative potential that is positioned at the mid-way.Volume property material is earlier through the plasma area of a side, walk around the axis of guide after, from the plasma area of opposite side, pass again.
Like Fig. 6 and shown in Figure 7; In said vacuum chamber 2, also be provided with deviation correcting device; Said deviation correcting device is made up of erecting frame 71, two guide rollers 72, rotary actuator 73 and correction inductor blocks 74, and volume property material is walked around two said guide rollers 72 and closed at said collecting shaft 4 at last through said correction inductor block 74.Said two guide rollers 72 are set in parallel on the said erecting frame 71, are rotatably assorted between said guide roller 72 and the said erecting frame 71.Correction accuracy error of the present invention is ± 1mm.Said correction inductor block 74 is the U type, keeps in touch in the middle of the end face of volume property material and the U type of said correction inductor block 74.
As shown in Figure 6, around said plasma area 6, be provided with metal baffle 8, said metal baffle 8 comes said plasma area 6 and peripheral vacuum chamber spatial separation.In the present embodiment, said metal baffle adopts aluminium alloy plate.Said metal baffle is kept apart distinct area of formation to plasma area, and plasma body can not influence peripheral accessory.
The width range that the accessible volume property material of plasma processing of property material is rolled up in said processing with deviation-correcting function is 10～500mm.
When correction inductor block 74 was sensed volume property material skew is arranged, two guide rollers 72 of deviation correcting device swung, and reaching the material rolling has the purpose of correcting effect.
Need to prove, more than be merely the preferred embodiment for the present invention, can not be interpreted as restriction protection domain of the present invention.Should be noted that; For the person of ordinary skill of the art, under the prerequisite that does not break away from the present invention's design, can also make some distortion and improvement; For example: 5 or 9 of said battery lead plate positions, three of plasma reaction zone positions or four etc. are within protection scope of the present invention.
The present invention can be widely used in the plasma apparatus field.
Claims (10)
1. the plasma processing of the processing volume property material with deviation-correcting function; Comprise framework (1); Said framework (1) inside vacuumizes into vacuum chamber (2); In said vacuum chamber (2), be provided with dispensing shaft (3), collecting shaft (4) and some axis of guides; Said dispensing shaft (3) and said collecting shaft (4) are driven by two servomotors (5) respectively; In said vacuum chamber (2), also be provided with the some plasma areas (6) that are made up of positive electrode and negative potential, volume property material passes from said plasma area (6), it is characterized in that: in said vacuum chamber (2), also be provided with deviation correcting device; Said deviation correcting device is made up of erecting frame (71), two guide rollers (72), rotary actuator (73) and correction inductor block (74), and volume property material is walked around two said guide rollers (72) and closed at said collecting shaft (4) at last through said correction inductor block (74).
2. the plasma processing with processing volume property material of deviation-correcting function according to claim 1; It is characterized in that: said two guide rollers (72) are set in parallel on the said erecting frame (71), are rotatably assorted between said guide roller (72) and the said erecting frame (71).
3. the plasma processing with processing volume property material of deviation-correcting function according to claim 1, it is characterized in that: the correction accuracy error that the plasma processing of property material is rolled up in said processing with deviation-correcting function is ± 1mm.
4. the plasma processing with processing volume property material of deviation-correcting function according to claim 1, it is characterized in that: said correction inductor block (74) is the U type, keeps in touch in the middle of the end face of volume property material and the U type of said correction inductor block (74).
5. according to each described plasma processing of claim 1 to 4 with processing volume property material of deviation-correcting function; It is characterized in that: around said plasma area (6), be provided with metal baffle (8), said metal baffle (8) comes said plasma area (6) and peripheral vacuum chamber spatial separation.
6. according to each described plasma processing with processing volume property material of deviation-correcting function of claim 1 to 4, it is characterized in that: said positive electrode is electrically connected said negative potential ground connection with peripheral radio-frequency power supply.
7. according to each described plasma processing of claim 1 to 4 with processing volume property material of deviation-correcting function; It is characterized in that: two said servomotors (5) are connected with collecting shaft (4) with said dispensing shaft (3) respectively through clutch coupling (9), and said servomotor (5) is provided with the brake assembling.
8. according to plasma processing of each described processing volume property material with deviation-correcting function of claim 1 to 4, it is characterized in that: be in the said plasma area (6) volume property material all with said positive electrode and negative potential keeping parallelism.
9. according to each described plasma processing with processing volume property material of deviation-correcting function of claim 1 to 4, it is characterized in that: per two adjacent plasma areas (6) are together with same negative potential.
10. according to each described plasma processing with processing volume property material of deviation-correcting function of claim 1 to 4, it is characterized in that: the width range that the accessible volume property material of plasma processing of property material is rolled up in said processing with deviation-correcting function is 10～500mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100421853A CN102605338A (en) | 2012-02-23 | 2012-02-23 | Plasma processing equipment having deviation rectifying function and used for processing rolled material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100421853A CN102605338A (en) | 2012-02-23 | 2012-02-23 | Plasma processing equipment having deviation rectifying function and used for processing rolled material |
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| CN102605338A true CN102605338A (en) | 2012-07-25 |
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| CN2012100421853A Pending CN102605338A (en) | 2012-02-23 | 2012-02-23 | Plasma processing equipment having deviation rectifying function and used for processing rolled material |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103264920A (en) * | 2013-05-24 | 2013-08-28 | 珠海宝丰堂电子科技有限公司 | Deviation rectifying device capable of adjusting tension in vacuum plasma environment and method thereof |
| CN103592693A (en) * | 2013-11-11 | 2014-02-19 | 珠海宝丰堂电子科技有限公司 | Rectifying device and plasma equipment |
| CN103771183A (en) * | 2014-01-21 | 2014-05-07 | 深圳市奥坤鑫科技有限公司 | Vacuum plasma surface treatment device |
| CN105234130A (en) * | 2015-10-22 | 2016-01-13 | 苏州求是真空电子有限公司 | Plasma cleaning device suitable for deformable materials |
| CN105970180A (en) * | 2016-05-30 | 2016-09-28 | 上海应用技术学院 | Deviation-correcting unwinding mechanism of film coating machine |
| CN110733922A (en) * | 2019-10-05 | 2020-01-31 | 杨建霞 | Metal coiled material plasma treatment equipment with deviation rectifying function |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1969057A (en) * | 2005-02-16 | 2007-05-23 | 株式会社爱发科 | Reel to reel vacuum sputtering apparatus |
| CN201206066Y (en) * | 2008-04-09 | 2009-03-11 | 山东玲珑橡胶有限公司 | Forming machine zero band automatic error correcting device |
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2012
- 2012-02-23 CN CN2012100421853A patent/CN102605338A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1969057A (en) * | 2005-02-16 | 2007-05-23 | 株式会社爱发科 | Reel to reel vacuum sputtering apparatus |
| CN201206066Y (en) * | 2008-04-09 | 2009-03-11 | 山东玲珑橡胶有限公司 | Forming machine zero band automatic error correcting device |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103264920A (en) * | 2013-05-24 | 2013-08-28 | 珠海宝丰堂电子科技有限公司 | Deviation rectifying device capable of adjusting tension in vacuum plasma environment and method thereof |
| CN103264920B (en) * | 2013-05-24 | 2015-06-24 | 珠海宝丰堂电子科技有限公司 | Deviation rectifying device capable of adjusting tension in vacuum plasma environment and method thereof |
| CN103592693A (en) * | 2013-11-11 | 2014-02-19 | 珠海宝丰堂电子科技有限公司 | Rectifying device and plasma equipment |
| CN103771183A (en) * | 2014-01-21 | 2014-05-07 | 深圳市奥坤鑫科技有限公司 | Vacuum plasma surface treatment device |
| CN105234130A (en) * | 2015-10-22 | 2016-01-13 | 苏州求是真空电子有限公司 | Plasma cleaning device suitable for deformable materials |
| CN105234130B (en) * | 2015-10-22 | 2017-10-27 | 苏州求是真空电子有限公司 | Plasma washing equipment suitable for bent material can be disturbed |
| CN105970180A (en) * | 2016-05-30 | 2016-09-28 | 上海应用技术学院 | Deviation-correcting unwinding mechanism of film coating machine |
| CN105970180B (en) * | 2016-05-30 | 2019-05-24 | 上海应用技术学院 | The coating machine unreeling structure that can be rectified a deviation |
| CN110733922A (en) * | 2019-10-05 | 2020-01-31 | 杨建霞 | Metal coiled material plasma treatment equipment with deviation rectifying function |
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Application publication date: 20120725 |