CN103771027A - Ozone-water water tank - Google Patents
Ozone-water water tank Download PDFInfo
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- CN103771027A CN103771027A CN201410025743.4A CN201410025743A CN103771027A CN 103771027 A CN103771027 A CN 103771027A CN 201410025743 A CN201410025743 A CN 201410025743A CN 103771027 A CN103771027 A CN 103771027A
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- water
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Abstract
The invention discloses an ozone-water water tank. The ozone-water water tank comprises a closed vessel, wherein the closed vessel consists of a first shell and a second shell; the closed vessel is provided with an ozone water inlet and an ozone water outlet, and the water inlet is communicated with an ozone-water generating device; the closed vessel also comprises an air inlet, and the air inlet is connected with a high-pressure air source; the closed vessel is provided with a pressure releasing valve. Through the high-pressure air source, the solubility of the ozone in the water is increased; moreover, the supply speed of the ozone water can be adjusted by adjusting the air pressure of the high-pressure air source in the process for supplying the ozone water to a machine board; the closed vessel can buffer the fluctuation of the concentration of the inputted ozone water, and the concentration of the ozone water which is supplied to the machine board can be prevented from being severely fluctuated.
Description
Technical field
The present invention relates to a kind of semiconductor processing equipment, especially a kind of Ozone Water water tank.
Background technology
The manufacturing process of semiconductor devices comprises the steps such as etching, oxidation, deposition, removing photoresistance.These steps are all the sources of causing substrate surface to pollute, and the pollution of substrate surface can have a strong impact on the yield of semiconductor devices, therefore must be through repeated multiple times cleaning process in the manufacturing process of semiconductor devices.The widely used wet-cleaned technology of industry mainly relies on acid or aqueous slkali to remove the source of pollution such as organic contaminant, fire coat and metal pollutant.Although these method of cleaning are efficient, these cleaning procedures can consume great lot of water resources and produce a large amount of strong acid and strong base solution, and these waste liquids cannot directly discharge, and after processing, still can cause serious pollution.Relative in this, Ozone Water not only has good cleaning effect, and the ozone comprising in the waste liquid of Ozone Water can be degraded to oxygen, so Ozone Water is purging medium desirable in semiconductor devices manufacturing process.
But the half life period at pure ozone in water only has tens of minutes, so the storing technology of ozone solution is a large bottleneck of ozone clean solution large-scale application.In semiconductor devices production process, the concentration of Ozone Water directly affects the electrical property of product.Be different from the required low concentration ozone of traditional industry (1ppm is with interior extremely several ppm), quartz conductor and photoelectricity cleaning step need long-time stable supply middle and high concentration Ozone Water (within the scope of tens of ppm), mostly the Ozone Water of this concentration scale is to adopt high-concentrated ozone water generator to produce, but the concentration of the ozone ozone in water of high-concentrated ozone water generator output is extremely unstable, and this has a strong impact on the conformability of product.
Summary of the invention
The invention reside in a kind of Ozone Water water tank is provided, the Ozone Water that high-concentrated ozone Water generator is produced is temporarily stored, and this Ozone Water water tank can effectively solve the consistency of ozone water excessive problem that fluctuates.
Technical scheme of the present invention comprises a kind of Ozone Water water tank, and it comprises: a leakproof tank; Described leakproof tank offers an Ozone Water water inlet and an Ozone Water water outlet, and described water inlet and ozone water generator are communicated with; Described leakproof tank also comprises an admission port, and described admission port is connected in a high-pressure air source; On described leakproof tank, be provided with a blowdown valve.Arranging of high-pressure air source can increase the solubility of ozone in water, and to the supply rate that can adjust by adjusting the air pressure of high-pressure air source Ozone Water in the process of board supply Ozone Water; And sealing container can play to the fluctuation of concentration of the Ozone Water of input the effect of buffering, prevent that the consistency of ozone water that is fed to board fluctuates excessive.
Ozone Water water tank of the present invention further improves and is: described leakproof tank comprises the first housing and the second housing, described the first housing is positioned at the outermost layer of described leakproof tank, described the second enclosure interior is arranged on the first enclosure interior, between described the second housing and the first housing, it is water tank interlayer, the top of described the second housing is provided with through hole, and described the second housing is communicated with by described through hole and described water tank interlayer.
Ozone Water water tank of the present invention further improves and is: described the second housing comprises a water inlet water pipe, Ozone Water water inlet and described the second housing described in described water inlet cross current, described the second housing also comprises a water outlet water pipe, Ozone Water water outlet and described the second housing described in described water outlet cross current.
Ozone Water water tank of the present invention further improves and is: described leakproof tank inside is provided with the pressure sensor that detects the level sensor of Ozone Water liquid level, the ozone concentration sensor that detects ozone Measuring Ozone Concentration in Water and detection leakproof tank air pressure inside.Described sensor can be controlled the liquid level in Ozone Water water tank, pressure and ozone concentration accurately in conjunction with control unit.
Ozone Water water tank of the present invention further improves and is: described high-pressure air source is to described leakproof tank inner inflatable, and the pressure of described Ozone Water water tank inside remains on 0.12Mp to 0.26Mp.
Ozone Water water tank of the present invention further improves and is: described blowdown valve is opened in the time that described leakproof tank internal pressure is greater than given value.
Ozone Water water tank of the present invention further improves and is: described blowdown valve at described ozone water generator to opening when injection of ozone water in described leakproof tank.
Ozone Water water tank of the present invention further improves and is: described high-pressure air source is the compound of oxygen, carbon dioxide, nitrogen to the high pressure gas that inject in described leakproof tank.
Ozone Water water tank of the present invention further improves and is: in described the second housing, be full of the high pressure gas that described high-pressure air source provides.
Accompanying drawing explanation
Fig. 1 is the section drawing of type Ozone Water water tank of the present invention.
Wherein description of reference numerals is as follows:
10: leakproof tank; 11: the first housings;
12: the second housings; 13: Ozone Water water inlet;
14: Ozone Water water outlet; 15: water inlet water pipe;
16: water outlet water pipe; 17: admission port;
18: blowdown valve; 19: water tank interlayer;
20: pressure sensor; 21: level sensor;
22: ozone concentration sensor;
The specific embodiment
Ozone Water is purging medium desirable in semiconductor devices manufacturing process.But the half life period at pure ozone in water only has tens of minutes, so the storing technology of ozone solution is a large bottleneck of ozone clean solution large-scale application.In semiconductor devices production process, the concentration of Ozone Water directly affects the electrical property of product.Be different from the required low concentration ozone of traditional industry (1ppm is with interior extremely several ppm), quartz conductor and photoelectricity cleaning step need long-time stable supply middle and high concentration Ozone Water (within the scope of tens of ppm), mostly the Ozone Water of this concentration scale is to adopt high-concentrated ozone water generator to produce, but the concentration of the ozone ozone in water of high-concentrated ozone water generator output is extremely unstable, and this has a strong impact on the conformability of product.So contriver provides a kind of Ozone Water water tank, it can provide concentration stabilize Ozone Water.
Below, by specific instantiation explanation embodiments of the present invention, those skilled in the art can understand other advantages of the present invention and effect easily by the disclosed content of this specification sheets.The present invention can also be implemented or be applied by the other different specific embodiment, and the every details in this specification sheets also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present invention.
It should be noted that, appended graphic the illustrated structure of this specification sheets, ratio, size etc., all contents in order to coordinate specification sheets to disclose only, understand and read for person skilled in the art scholar, not in order to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, not affecting under effect that the present invention can produce and the object that can reach, all should still drop on disclosed technology contents and obtain in the scope that can contain.Simultaneously, in this specification sheets, quote as " on ", the term of D score, " left side ", " right side ", " centre " and " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, changing under technology contents, when being also considered as the enforceable category of the present invention without essence.
Fig. 1 is the section drawing of Ozone Water water tank of the present invention.As shown in Figure 1, the main body of Ozone Water water tank of the present invention is a leakproof tank 10, offers Ozone Water water inlet 13 in a side of leakproof tank 10, and Ozone Water water inlet is connected with ozonated water generator; Be provided with Ozone Water water outlet 14 in the bottom of leakproof tank 10, the Ozone Water of leakproof tank 10 inside is supplied to board by Ozone Water water outlet 14; Be provided with admission port 17 at the top of leakproof tank 10, admission port 17 connects a high-pressure air source, and high-pressure air source is filled with high pressure gas to leakproof tank inside.
As shown in Figure 1, in technical solution of the present invention, leakproof tank 10 is made up of double hull, double hull is respectively: the first housing 11 and the second housing 12, the first housing 11 is positioned at the outermost layer of leakproof tank 10, the second housing 12 is positioned at the inside of the first housing 11, between the first housing 11 and the second housing 12, it is water tank interlayer 19, in described water tank interlayer 19, be full of the high pressure gas that admission port 17 is introduced, top at the second housing 12 offers through hole, so the second housing 12 is communicated with by this through hole and water tank interlayer 19.The outer setting of the second housing 12 has into water water pipe 15, and water inlet water pipe 15 and Ozone Water water inlet 13 are communicated with, and are provided with water outlet water pipe 16 in the bottom of the second housing 12, and this water outlet water pipe 16 and Ozone Water outlet 14 are communicated with.In leakproof tank 10, the Ozone Water that ozone water generator generates flows into the second housing 12 inside by Ozone Water water inlet 13 and water inlet water pipe 15, and the Ozone Water of the second housing 12 inside is supplied to board by Ozone Water water outlet 14 and water outlet water pipe 16 and uses.Described the second housing 12 inside are provided with the level sensor 21 of Ozone Water, and level sensor 21 is connected with controller, and controller control ozone water generator makes the liquid level of the Ozone Water in the second housing 12 in given range.
As shown in Figure 1, high-pressure air source is injected into leakproof tank 10 inside by high pressure gas from admission port 17, because the top of the second housing 12 is provided with through hole, so the air pressure at the top of water tank interlayer 19 inside and the second housing 12 is identical, have the pressure sensor 20 that detects leakproof tank 10 air pressure inside in the outer setting of the first housing 11, pressure sensor is connected with controller.In technical scheme of the present invention, the air pressure of the first housing 11 inside need to be stabilized between 0.12Mp to 0.26Mp, and the object of doing is like this that the pressure by improving leakproof tank 10 inside improves the solubility of ozone in Ozone Water.And the pressure of leakproof tank inside can constantly increase in the process to the inner injection of ozone water of leakproof tank 10, therefore be provided with blowdown valve 18 at the top of leakproof tank 10, blowdown valve 18 in the time that leakproof tank 10 air pressure inside are greater than given value or leakproof tank 10 just in the process of injection of ozone water, open, blowdown valve 18 has guaranteed that the air pressure of leakproof tank 10 inside is in safe range.Controller control high-pressure air source, pressure sensor and blowdown valve 18 cooperations make the pressure of leakproof tank 10 inside be stabilized in predetermined value in addition, can adjust the outwards speed of supply Ozone Water of leakproof tank 10 by adjusting leakproof tank 10 internal gas pressure.The high pressure gas that lead in the present embodiment leakproof tank 10 inside are the compound of oxygen, carbon dioxide and nitrogen.
As shown in Figure 1, be provided with ozone concentration sensor 22 in the second housing 12 inside, this ozone concentration sensor 22 is connected with controller.Controller Main Basis ozone concentration sensor 22 and level sensor 21 data measureds are adjusted the concentration of the Ozone Water of ozone water generator generation.Suppose: the concentration of the Ozone Water of a certain moment the second housing 12 inside is too small, controller calculates according to the liquid level of the second enclosure interior Ozone Water and hydrometer quantity and the concentration that ozone water generator needs generating ozone liquid so, leakproof tank 10 coordinates its device processed to guarantee the stable of the second housing 12 inner consistency of ozone water by said method, and therefore the of short duration fluctuation of the concentration of ozone water generator generating ozone liquid can not cause excessive shock to the concentration of the Ozone Water that is fed to board.
The above is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, but not in order to limit the present invention, any those skilled in the art, not departing from the scope of technical solution of the present invention, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solution of the present invention, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (9)
1. an Ozone Water water tank, is characterized in that, comprising: a leakproof tank; Described leakproof tank offers an Ozone Water water inlet and an Ozone Water water outlet, and described water inlet and ozone water generator are communicated with; Described leakproof tank also comprises an admission port, and described admission port is connected in a high-pressure air source; On described leakproof tank, be provided with a blowdown valve.
2. Ozone Water water tank as claimed in claim 1, it is characterized in that, described leakproof tank comprises the first housing and the second housing, described the first housing is positioned at the outermost layer of described leakproof tank, described the second enclosure interior is arranged on the first enclosure interior, between described the second housing and the first housing, be water tank interlayer, the top of described the second housing is provided with through hole, and described the second housing is communicated with by described through hole and described water tank interlayer.
3. Ozone Water water tank as claimed in claim 2, it is characterized in that, described the second housing comprises a water inlet water pipe, Ozone Water water inlet and described the second housing described in described water inlet cross current, described the second housing also comprises a water outlet water pipe, Ozone Water water outlet and described the second housing described in described water outlet cross current.
4. Ozone Water water tank as claimed in claim 1, it is characterized in that, described leakproof tank inside is provided with the pressure sensor that detects the level sensor of Ozone Water liquid level, the ozone concentration sensor that detects ozone Measuring Ozone Concentration in Water and detection leakproof tank air pressure inside.
5. Ozone Water water tank as claimed in claim 1, is characterized in that, described high-pressure air source is to described leakproof tank inner inflatable, and the pressure of described Ozone Water water tank inside remains on 0.12Mp to 0.26Mp.
6. Ozone Water water tank as claimed in claim 1, is characterized in that, described blowdown valve is opened in the time that described leakproof tank internal pressure is greater than given value.
7. Ozone Water water tank as claimed in claim 1, is characterized in that, described blowdown valve at described ozone water generator to opening when injection of ozone water in described leakproof tank.
8. Ozone Water water tank as claimed in claim 1, is characterized in that, described high-pressure air source is the compound of oxygen, carbon dioxide and nitrogen to the high pressure gas that inject in described leakproof tank.
9. Ozone Water water tank as claimed in claim 2, is characterized in that, in described the second housing, is full of the high pressure gas that described high-pressure air source provides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410025743.4A CN103771027A (en) | 2014-01-21 | 2014-01-21 | Ozone-water water tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410025743.4A CN103771027A (en) | 2014-01-21 | 2014-01-21 | Ozone-water water tank |
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| Publication Number | Publication Date |
|---|---|
| CN103771027A true CN103771027A (en) | 2014-05-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410025743.4A Pending CN103771027A (en) | 2014-01-21 | 2014-01-21 | Ozone-water water tank |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1137687A (en) * | 1995-03-10 | 1996-12-11 | 株式会社东芝 | Semiconductor chip surface treatment liquor and treatment method and device using the same |
| CN1277594A (en) * | 1997-10-29 | 2000-12-20 | Fsi国际公司 | Method and system to increase the quantity of dissolved gas in a liquid and to maintain this increased quantity until utilized |
| CN1450606A (en) * | 2002-04-09 | 2003-10-22 | 夏普株式会社 | Semiconductor wafer cleaning apparatus |
| CN1649100A (en) * | 2004-07-23 | 2005-08-03 | 王文 | System and its method for high efficiency ozone water cleaning semiconductor wafer |
| JP2006332467A (en) * | 2005-05-27 | 2006-12-07 | Sekisui Chem Co Ltd | Method and apparatus for removing resist |
| JP2009209434A (en) * | 2008-03-06 | 2009-09-17 | Mitsui Eng & Shipbuild Co Ltd | Thin film forming apparatus |
-
2014
- 2014-01-21 CN CN201410025743.4A patent/CN103771027A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1137687A (en) * | 1995-03-10 | 1996-12-11 | 株式会社东芝 | Semiconductor chip surface treatment liquor and treatment method and device using the same |
| CN1277594A (en) * | 1997-10-29 | 2000-12-20 | Fsi国际公司 | Method and system to increase the quantity of dissolved gas in a liquid and to maintain this increased quantity until utilized |
| CN1450606A (en) * | 2002-04-09 | 2003-10-22 | 夏普株式会社 | Semiconductor wafer cleaning apparatus |
| CN1649100A (en) * | 2004-07-23 | 2005-08-03 | 王文 | System and its method for high efficiency ozone water cleaning semiconductor wafer |
| JP2006332467A (en) * | 2005-05-27 | 2006-12-07 | Sekisui Chem Co Ltd | Method and apparatus for removing resist |
| JP2009209434A (en) * | 2008-03-06 | 2009-09-17 | Mitsui Eng & Shipbuild Co Ltd | Thin film forming apparatus |
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Application publication date: 20140507 |