CN103762957A - Non-heat elastic damping torsional micro-electro-mechanical resonance device - Google Patents
Non-heat elastic damping torsional micro-electro-mechanical resonance device Download PDFInfo
- Publication number
- CN103762957A CN103762957A CN201410001061.XA CN201410001061A CN103762957A CN 103762957 A CN103762957 A CN 103762957A CN 201410001061 A CN201410001061 A CN 201410001061A CN 103762957 A CN103762957 A CN 103762957A
- Authority
- CN
- China
- Prior art keywords
- torsional
- drive electrode
- brace summer
- torsion
- supporting beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Micromachines (AREA)
Abstract
The invention discloses a non-heat elastic damping torsional micro-electro-mechanical resonance device which comprises a base, a first driving electrode, a second driving electrode, a sensing electrode, a first torsional supporting beam, a second torsional supporting beam and a torsional flat plate. The first driving electrode, the second driving electrode, the sensing electrode, the first torsional supporting beam, the second torsional supporting beam and the torsional flat plate are arranged on the base. The first torsional supporting beam and the second torsional supporting beam are arranged on the same axis. The torsional flat plate is supported by the first torsional supporting beam and the second torsional supporting beam together. The torsional flat plate can rotate around the torsional axis formed by the first torsional supporting beam and the second torsional supporting beam. The first driving electrode and the second driving electrode are arranged on the same side of the torsional axis. The sensing electrode is arranged on the other side of the torsional axis. The horizontal section area of the first torsional supporting beam and the horizontal section area of the second torsional supporting beam are equal. In the micro-electro-mechanical resonance device, the driving electrodes can generate pure torsional moment which causes pure torsional deforming, and pure torsional deforming does not cause heat elastic damping.
Description
Technical field
Invention herein belongs to micro-electromechanical system (MEMS) field, relates to a kind of torsion-type MEMS resonating device having without thermoelastic damping.
Background technology
Quality factor are important performance indexes of MEMS resonating device.For encapsulation device in a vacuum, thermoelastic damping is one of most important energy dissipation factor.Thermoelastic damping is because mechanical structure is compressed, stretched under effect of stress, and volume is changed, and causes heat generation and dissipates, and is also that the vibrational energy of resonating device becomes thermal energy consumption and dissipates.For torsional mode resonating device, current prevailing paradigm is: the result of Elasticity shows [S.A.Chandorkar, R.N.Candler, A.Duwel, R.Melamud, M.Agarwal, K.E.Goodson, T.W.Kenny, Multimode thermoelastic dissipation, Journal of Applied Physics, 105 (2009) 043505.], torsional deflection can not cause that volume changes, so do not have thermoelastic damping.But what in fact, the drive electrode of current torsion device produced is not pure torsional moment.The conventional torsion device schematic diagram that Fig. 2 is current.Owing to only having a drive electrode, the electrostatic force that drive electrode produces not only makes to reverse brace summer and produces torsional deflection, and makes to reverse brace summer generation flexural deformation.The flexural deformation meeting of reversing brace summer causes volume to change, and can produce thermoelastic damping.Why current this be also encapsulation torsion device in a vacuum, not because without thermoelastic damping, and reaches due high quality factor.Fig. 3 a and Fig. 3 b are respectively just the position views of the torsion flat board that causes of the pure torsional deflection of brace summer and torsion-bending Coupling Deformation.In engineering, because drive electrode area is larger, the rigidity of the relative brace summer of electrostatic force is larger.Therefore, ignoring flexural deformation is incorrect in a lot of occasions.
Summary of the invention
Technical problem: the invention provides one and can make to reverse brace summer and produce pure torsional deflection, and can not produce thermoelastic damping without thermoelastic damping reverse microemulsion electromechanical resonance device.
Technical scheme: of the present invention without thermoelastic damping reverse microemulsion electromechanical resonance device, comprise substrate, be arranged on suprabasil the first drive electrode, the second drive electrode, induction electrode, be positioned at first on same axis and reverse brace summer and second and reverse brace summer, and reverse the common torsion flat board supporting of brace summer by the first torsion brace summer and second.Reverse flat board and can reverse the torsion axis rotation that brace summer forms around the first torsion brace summer and second, the first drive electrode and the second drive electrode are arranged on the same side of reversing axis, induction electrode is arranged on the opposite side that reverses axis, and the first transverse cutting area that reverses brace summer and the second torsion brace summer equates.
In the present invention, the first drive electrode, the second drive electrode and induction electrode are all positioned at and reverse dull and stereotyped below, arrange with the dull and stereotyped interval of torsion.
In the present invention, the first drive electrode is arranged on and reverses between axis and the second drive electrode.
In the present invention, the voltage being applied on the first drive electrode equates with the voltage swing on the second drive electrode, single spin-echo.
Of the present invention without in thermoelastic damping reverse microemulsion electromechanical resonance device, in the same side (as shown in Figure 4) of torque shaft, two drive electrodes that area is identical are set: the first drive electrode and the second drive electrode.The first drive electrode phase countershaft arm of force is L
1, the arm of force (L of the second drive electrode
1+ L
2).Be applied to voltage equal and opposite in direction on the first drive electrode and the second drive electrode, but single spin-echo.Like this, the electrostatic force that the first drive electrode and the second drive electrode produce is because equal and opposite in direction, opposite direction, and cancel out each other, but the static moment that the second drive electrode produces is greater than the static moment that the first drive electrode produces.So, reverse brace summer and be only subject to pure torsional moment effect, can not occur bending and deformation.In addition,, in order to produce large pure torsional moment, during design, should make L
1as small as possible, L
2as far as possible large.
It needs to be noted: two drive electrodes also can be symmetrical arranged about rotating shaft.So same energy produces pure torsional moment.But drive electrode and induction electrode, in the same side, arrange the position that has a strong impact on induction electrode.For high sensitivity, induction electrode area is generally all larger.Be arranged in the same side and will have larger difficulty.
Beneficial effect: the present invention compared with prior art, has the following advantages:
Current device only has a drive electrode, cannot produce pure torsional moment, can cause reversing brace summer and produce the distortion of bending-twisted coupling.Flexural deformation meeting causes thermoelastic damping to produce.
Device of the present invention has adopted two identical drive electrodes of area, applies respectively equal and opposite in direction but the voltage of single spin-echo, can produce pure torsional moment, and static actuating force but can be cancelled out each other.Like this, reverse the brace summer distortion that only twists.Can not produce thermoelastic damping.
Accompanying drawing explanation
Fig. 1 is the structural representation of micro-electro-mechanical resonator part of the present invention.
Fig. 2 is current conventional torsion device schematic diagram.
Fig. 3 a is that the torsion flat position schematic diagram that pure torsional deflection causes occurs the torsion brace summer of current conventional torsion device.
Fig. 3 b is the torsion flat position figure that twist-bending Coupling Deformation of the torsion brace summer of current conventional torsion device causes.
Fig. 4 is the end view of micro-electro-mechanical resonator part of the present invention.
In figure, have: reverse flat board 1, the first torsion brace summer 2, the second torsion brace summer 3, substrate 4, the first drive electrode 5, the second drive electrode 6, induction electrode 7, drive electrode 8.
Embodiment
Below in conjunction with embodiment and Figure of description, further illustrate technical solution of the present invention.
Of the present invention without thermoelastic damping reverse microemulsion electromechanical resonance device, comprise substrate 4, be arranged on the first drive electrode 5, the second drive electrode 6, induction electrode 7 in substrate 4, be positioned at first on same axis and reverse brace summer 2 and second and reverse brace summer 3, and reverse the common torsion flat board 1 supporting of brace summer 3 by the first torsion brace summer 2 and second.The first common axis line that reverses brace summer 2 and the second torsion brace summer 3 places forms torsion axis, and reversing dull and stereotyped 1 can be around the rotation of torsion axis.The first drive electrode 5 and the second drive electrode 6 are arranged on the same side of reversing axis, and induction electrode 7 is arranged on the opposite side that reverses axis, and the first transverse cutting area that reverses brace summer 2 and the second torsion brace summer 3 equates.The first drive electrode 5, the second drive electrode 6 and induction electrode 7 are all positioned at the below of reversing dull and stereotyped 1, arrange, and be not all connected with the first torsion brace summer 2 and the second torsion brace summer 3 with reversing dull and stereotyped 1 interval.The first drive electrode 5 is arranged on and reverses between axis and the second drive electrode 6, and it is the arm of force length of the second drive electrode 6 relative torsion axles that the arm of force length of the first drive electrode 5 relative torsion axles is less than.In the present invention, first reverses brace summer 2, the second torsion brace summer 3, the first drive electrode 5, the second drive electrode 6 and torsion dull and stereotyped 1 has formed jointly without thermoelastic damping structure.
Fig. 3 a is the current device desired deflection intending producing (during the pure torsional deflection of brace summer, reversing dull and stereotyped 1 position).But current device only has a drive electrode 8, cannot produce pure torsional moment, electrostatic force also causes brace summer flexural deformation.So real distortion is: brace summer produces the distortion of bending-twisted coupling.When Fig. 3 b is the distortion of brace summer generation bending-twisted coupling, reverse dull and stereotyped 1 position.
As Fig. 1 and Fig. 4, device of the present invention has adopted two drive electrodes that area is identical: the first drive electrode 5 and the second drive electrode 6, apply respectively equal and opposite in direction but the voltage of single spin-echo.The electrostatic force equal and opposite in direction that such the first drive electrode 5 and the second drive electrode 6 produce, opposite direction, cancels out each other, and brace summer can not produce flexural deformation.But the first drive electrode 5 is different with the driving moment that the second drive electrode 6 produces, so last resultant moment is pure torsional moment, reverses brace summer and only have torsional deflection.
In addition, if do not require that two drive electrode areas are identical, so in order to produce equal-sized electrostatic force, the driving voltage of the first drive electrode 5 and the second drive electrode 6 must be different.Requiring like this increases voltage swing conversion equipment, makes device complicated.Only have the first drive electrode 5 identical with the second drive electrode 6 areas, driving voltage size is the same, only need be anti-phase, and electrostatic force just can be cancelled out each other.Anti-phase is very easy.
Claims (4)
1. one kind without thermoelastic damping reverse microemulsion electromechanical resonance device, it is characterized in that, this device comprises substrate (4), be arranged on the first drive electrode (5) in described substrate (4), the second drive electrode (6), induction electrode (7), be positioned at first on same axis and reverse brace summer (2) and the second torsion brace summer (3), and by described first, reverse brace summer (2) and second and reverse the common torsion flat board (1) supporting of brace summer (3), the described flat board (1) that reverses can reverse the torsion axis rotation that brace summer (3) forms around the first torsion brace summer (2) and second, described the first drive electrode (5) and the second drive electrode (6) are arranged on the same side of reversing axis, described induction electrode (7) is arranged on the opposite side that reverses axis, the described first transverse cutting area that reverses brace summer (2) and the second torsion brace summer (3) equates.
According to described in claims 1 without thermoelastic damping reverse microemulsion electromechanical resonance device, it is characterized in that, described the first drive electrode (5), the second drive electrode (6) and induction electrode (7) are all positioned at the below of reversing dull and stereotyped (1), arrange with dull and stereotyped (1) interval of torsion.
3. according to claim 1 and 2ly without thermoelastic damping reverse microemulsion electromechanical resonance device, it is characterized in that, described the first drive electrode (5) is arranged on and reverses between axis and the second drive electrode (6).
4. according to claim 1 and 2ly without thermoelastic damping reverse microemulsion electromechanical resonance device, it is characterized in that, the voltage being applied on the first drive electrode (5) equates with the voltage swing on the second drive electrode (6), single spin-echo.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410001061.XA CN103762957A (en) | 2014-01-02 | 2014-01-02 | Non-heat elastic damping torsional micro-electro-mechanical resonance device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410001061.XA CN103762957A (en) | 2014-01-02 | 2014-01-02 | Non-heat elastic damping torsional micro-electro-mechanical resonance device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103762957A true CN103762957A (en) | 2014-04-30 |
Family
ID=50530138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410001061.XA Pending CN103762957A (en) | 2014-01-02 | 2014-01-02 | Non-heat elastic damping torsional micro-electro-mechanical resonance device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103762957A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111470467A (en) * | 2020-04-22 | 2020-07-31 | 西安交通大学 | Autonomous collision type resonator of seesaw structure |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1345480A (en) * | 1999-01-14 | 2002-04-17 | 密执安大学评议会 | Device including micromechanical resonator having operating requency and method of extending same |
| CN102297741A (en) * | 2010-06-25 | 2011-12-28 | 中国科学院电子学研究所 | Silicon resonant air pressure sensor based on Micro-Electro-Mechanical Systems |
| JP2012109772A (en) * | 2010-11-17 | 2012-06-07 | Panasonic Corp | Mems resonator |
| CN102868384A (en) * | 2012-10-18 | 2013-01-09 | 中国科学院上海微系统与信息技术研究所 | Micromechanical resonator |
| CN203340028U (en) * | 2013-07-10 | 2013-12-11 | 南京信息工程大学 | Micromechanical resonator with adjustable frequency and adjustable quality factors |
-
2014
- 2014-01-02 CN CN201410001061.XA patent/CN103762957A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1345480A (en) * | 1999-01-14 | 2002-04-17 | 密执安大学评议会 | Device including micromechanical resonator having operating requency and method of extending same |
| CN102297741A (en) * | 2010-06-25 | 2011-12-28 | 中国科学院电子学研究所 | Silicon resonant air pressure sensor based on Micro-Electro-Mechanical Systems |
| JP2012109772A (en) * | 2010-11-17 | 2012-06-07 | Panasonic Corp | Mems resonator |
| CN102868384A (en) * | 2012-10-18 | 2013-01-09 | 中国科学院上海微系统与信息技术研究所 | Micromechanical resonator |
| CN203340028U (en) * | 2013-07-10 | 2013-12-11 | 南京信息工程大学 | Micromechanical resonator with adjustable frequency and adjustable quality factors |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111470467A (en) * | 2020-04-22 | 2020-07-31 | 西安交通大学 | Autonomous collision type resonator of seesaw structure |
| CN111470467B (en) * | 2020-04-22 | 2022-08-05 | 西安交通大学 | Autonomous collision type resonator of seesaw structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Wang et al. | A cross-coupled dual-beam for multi-directional energy harvesting from vortex induced vibrations | |
| Mei et al. | A passively self-tuning nonlinear energy harvester in rotational motion: theoretical and experimental investigation | |
| Mei et al. | The benefits of an asymmetric tri-stable energy harvester in low-frequency rotational motion | |
| Zou et al. | Design, modeling and experimental investigation of a magnetically coupled flextensional rotation energy harvester | |
| He et al. | Analysis and experiment of magnetic excitation cantilever-type piezoelectric energy harvesters for rotational motion | |
| Wang et al. | A packaged piezoelectric vibration energy harvester with high power and broadband characteristics | |
| JP6627911B2 (en) | Piezoelectric rotating MEMS resonator | |
| CN104868784A (en) | Piezoelectric oscillator structure for vibration energy recycling | |
| CN102751961B (en) | Resonator and method of controlling the same | |
| CN103888023A (en) | Cantilever mechanism for piezoelectric power generation | |
| CN107093963B (en) | A kind of multi-direction superlow frequency vibrating energy harvester | |
| CN107919816A (en) | Double freedom circular arc type piezoelectric energy collector | |
| Chen et al. | An arch-linear composed beam piezoelectric energy harvester with magnetic coupling: Design, modeling and dynamic analysis | |
| WO2019041757A1 (en) | Four-sided-synchronous-swing dual-mode broadband power generation device | |
| KR100994706B1 (en) | Vibration energy harvester using wind | |
| Zhao et al. | Analysis of single-degree-of-freedom piezoelectric energy harvester with stopper by incremental harmonic balance method | |
| CN105403997A (en) | Piezoelectric driving two-dimensional scanning micro-mirror | |
| CN103762957A (en) | Non-heat elastic damping torsional micro-electro-mechanical resonance device | |
| Wang et al. | Design of micromachined vibratory gyroscope with two degree-of-freedom drive-mode and sense-mode | |
| CN203675063U (en) | Micro-electromechanical resonance device with no-thermoelastic-damping structure torsion | |
| WO2008084195A3 (en) | Gyroscopic torque converter | |
| CN204255978U (en) | A kind of split type difference silicon micro-resonance type accelerometer | |
| CN103244599B (en) | Component-level MEMS (macro-electro-mechanical systems) device active vibration isolator utilizing SMA (shape memory alloy) | |
| CN103780221A (en) | Torsional microcomputer electric resonance device with low thermal elastic damping structure | |
| CN203675064U (en) | Low-thermoelastic damping torsion type micro-electromechanical resonance device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140430 |