CN103760378A - Electrostatic rotation speed sensor based on electret - Google Patents
Electrostatic rotation speed sensor based on electret Download PDFInfo
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- CN103760378A CN103760378A CN201410007209.0A CN201410007209A CN103760378A CN 103760378 A CN103760378 A CN 103760378A CN 201410007209 A CN201410007209 A CN 201410007209A CN 103760378 A CN103760378 A CN 103760378A
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Abstract
The invention discloses an electrostatic rotation speed sensor based on an electret, and belongs to the technical field of rotation speed sensors. The electrostatic rotation speed sensor is formed by sequentially laminating a substrate, electrodes and an electret layer, the electrodes are manufactured on the substrate and the electrodes are covered with electret materials. The electrodes are insulated from each other. The electrostatic rotation speed sensor based on the electret does not require a detected object to be a ferromagnetic device, and has the advantages that the electrostatic rotation speed sensor is wide in testing material, simple in structure and low in cost, the requirements for ferromagnetic materials do not exist, any conductive materials can be used, and micromachining technology compatibility is good.
Description
Technical field
The invention belongs to speed probe technical field, be specifically related to a kind of electrostatic speed probe based on electret.
Background technology
Speed probe is widely used in auto industry and other industrial circles (Fredrik Gustafsson, " Rotational Speed Sensors:Limitations; Pre-processing and Automotive Applications ", IEEE Instrumentation & Measurement Magazine, April, 2010).Traditionally, typical speed probe mainly contains Hall element and laser code formula sensor.Wherein, hall sensor requires measurand to consist of ferrimagnet, and laser sensor complicated structure.
Summary of the invention
The object of the present invention is to provide a kind of electrostatic speed probe based on electret.The variation of described sensor based on electrostatic field carrys out the rotational speed of detecting object.
In order to achieve the above object, technical scheme of the present invention is:
Based on an electrostatic speed probe for electret, mainly by substrate, electrode and electret layer, stack gradually and form, on substrate, make electrode, electrode is covered by electret; Between electrode, insulate.
Described substrate is insulating material or in metal substrate, sprays insulating material making insulation course.
Described electrode is manufactured moulding by the method for sputter-photoetching-etching.
The material of described electret is teflon, teflon, perfluoroethylene-propylene, polypropylene, tygon, Kynoar or SiO
2/ Si
3n
4.
Described electret provides electrostatic field.
The effect of described electrode is near the electric field change responsive electret, and converts this variation to signal output.
Described substrate supports as extra physical construction.The employing of substrate does not affect the electrical characteristics of electrostatic speed probe of the present invention, and the relative position of electrode and substrate there is no constraint, as long as the variation of the electric field intensity that also can responsive be caused by testee among the electric field that electrode produces in electret.
Electrostatic speed probe based on electret of the present invention does not require that testee is ferromagnetic device, there is extensively (do not require ferrimagnet, any conductive material all can), the plurality of advantages such as micro fabrication compatibility is good, simple in structure, cost is low of test material.
Accompanying drawing explanation
Fig. 1 is the principle schematic of the electrostatic speed probe based on electret.
Fig. 2 is the structural representation of the electrostatic speed probe based on electret.
Embodiment
Below in conjunction with accompanying drawing and instantiation, the electrostatic speed probe based on electret of the present invention is described further.
Based on an electrostatic speed probe for electret, by substrate, electrode and electret layer, stack gradually and form, on substrate, make electrode, electrode is covered by electret; Between electrode, insulate.
Principle of the present invention:
The testee that utilizes the electrostatic speed probe based on electret of the present invention to measure need to have one " recognition structure ", as shown in Figure 1." recognition structure " refers to that shape on testee, dielectric coefficient or conductivity are obviously different from the structure in other regions: this structure can be (shape are different from other structures) such as keyway on gear tooth, rotary body, screws, also can insulate, a high-k material on low-k rotary body etc. (dielectric coefficient is different from other structures), can be also the insulating material (conductivity is different from other structures) on electrically-conducting paint or the conduction rotary body on insulated rotary body.
Electret is by after electret, and electret can produce induced charge on underlayer electrode.And when rotational structure rotates, recognition structure can be periodically close away from electret surface.And then the induced charge quantity on electrode is changed.This charge fluctuation being produced by testee rotation can produce corresponding voltage signal, can measure the rotation of testee by this signal.
Embodiment 1
As shown in Figure 2, a kind of electrostatic speed probe based on electret of the present invention, is stacked gradually and is formed by substrate, electrode and the electret with insulation course.
Substrate is aluminium sheet, and effect is to provide mechanical support for whole device.Insulation course is polytetrafluorethylecoatings coatings.With the method for sputter and etching by electrode fabrication on insulation course.Above electrode, attach teflon adhesive tape as electret.
Testee-gear consists of aluminium, also can be by other conductive materials (as, cast iron, steel, other non-ferrous metals, graphite, conductive rubber or any material with conductive characteristic) or specific inductive capacity the material much larger than 1.In the time of need to be near the gear teeth of gear skim over electrode, can change near Electric Field Distribution electrode, make the charge variation on electrode be enough to be recorded by instrument.This instrument can be that oscillograph analog to digital converter or other signal processing circuits are made, and is testee.The gear teeth on gear are " recognition structure " in Fig. 1.Device output corresponding signal when gear rotates.
With the method polarization electret of Corona charge, now electret surface maintains negative charge.The characteristic of electret itself can not disappear these electric charges for a long time.These electric charges produce induced charge at electrode surface.When gear tooth is near electrode when top, tooth surface can produce positive polarity induced charge.These induced charges can affect near Electric Field Distribution electrode, and induced charge on electrode is reduced.On electrode, the increase and decrease of induced charge quantity shows as external output current, i.e. output signal.
When gear rotates near sensor component, can produce two kinds of induced charges: near device one side, producing positive charge (with electret opposite polarity), away from device one side, producing negative charge (guaranteeing that gear is totally electric neutrality).If gear ground connection, can eliminate the negative charge away from device one side, make it can not offset near near the device one side positive charge impact that electric field produces device.But because electret sheet surface charge is limited, and that gear volume is compared device is very large, the positive charge that therefore gear opposite side induces can be ignored near electric field influence device.
Device is the mode by produce induced charge on testee, rather than the mode of responsive testee current potential is responded to testee rotation.Therefore testee itself does not need ground connection.
Claims (4)
1. the electrostatic speed probe based on electret, is characterized in that, mainly by substrate, electrode and electret layer, is stacked gradually and is formed, and makes electrode on substrate, and electrode is covered by electret; Between electrode, insulate.
2. the electrostatic speed probe based on electret according to claim 1, is characterized in that, described substrate is insulating material or in metal substrate, sprays insulating material making insulation course.
3. the electrostatic speed probe based on electret according to claim 1, is characterized in that, described electrode is manufactured moulding by the method for sputter-photoetching-etching.
4. the electrostatic speed probe based on electret according to claim 1, is characterized in that, the material of described electret is teflon, teflon, perfluoroethylene-propylene, polypropylene, tygon, Kynoar or SiO
2/ Si
3n
4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410007209.0A CN103760378B (en) | 2014-01-07 | 2014-01-07 | A kind of electrostatic speed probe based on electret |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410007209.0A CN103760378B (en) | 2014-01-07 | 2014-01-07 | A kind of electrostatic speed probe based on electret |
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| Publication Number | Publication Date |
|---|---|
| CN103760378A true CN103760378A (en) | 2014-04-30 |
| CN103760378B CN103760378B (en) | 2017-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410007209.0A Active CN103760378B (en) | 2014-01-07 | 2014-01-07 | A kind of electrostatic speed probe based on electret |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105738644A (en) * | 2016-03-01 | 2016-07-06 | 西安交通大学 | Rotation speed measurement device |
| CN106248989A (en) * | 2016-07-15 | 2016-12-21 | 华北电力大学 | Metallic rotator rotary speed measurement apparatus based on electrostatic transducer and method |
| WO2017021734A3 (en) * | 2015-08-05 | 2017-04-13 | Hextern Sensor Technologies Ltd | Movement sensor and method of manufacture thereof |
| CN107329005A (en) * | 2016-12-02 | 2017-11-07 | 北京理工大学 | A kind of the orientation detection device and its detection method of the mobile electrical body based on electret effect |
| CN112437870A (en) * | 2018-07-26 | 2021-03-02 | 威里利生命科学有限责任公司 | Electrostatic rotary encoder |
| CN113932836A (en) * | 2020-07-14 | 2022-01-14 | 昆山微电子技术研究院 | Non-contact spatial position sensing device based on electret |
Citations (2)
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|---|---|---|---|---|
| CN2641600Y (en) * | 2003-06-30 | 2004-09-15 | 孙殿佩 | Pulse counting switch for intelligent watermeter |
| JP2010175475A (en) * | 2009-01-30 | 2010-08-12 | Sumitomo Electric Ind Ltd | Wheel speed sensor and on-board sensor |
-
2014
- 2014-01-07 CN CN201410007209.0A patent/CN103760378B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2641600Y (en) * | 2003-06-30 | 2004-09-15 | 孙殿佩 | Pulse counting switch for intelligent watermeter |
| JP2010175475A (en) * | 2009-01-30 | 2010-08-12 | Sumitomo Electric Ind Ltd | Wheel speed sensor and on-board sensor |
Non-Patent Citations (1)
| Title |
|---|
| 夏钟福等: "驻极体研究—电子材料和换能器领域的重要分支", 《自然杂志》, vol. 14, no. 10, 31 October 1991 (1991-10-31) * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017021734A3 (en) * | 2015-08-05 | 2017-04-13 | Hextern Sensor Technologies Ltd | Movement sensor and method of manufacture thereof |
| CN105738644A (en) * | 2016-03-01 | 2016-07-06 | 西安交通大学 | Rotation speed measurement device |
| CN105738644B (en) * | 2016-03-01 | 2019-07-19 | 西安交通大学 | A kind of rotation-speed measuring device |
| CN106248989A (en) * | 2016-07-15 | 2016-12-21 | 华北电力大学 | Metallic rotator rotary speed measurement apparatus based on electrostatic transducer and method |
| CN107329005A (en) * | 2016-12-02 | 2017-11-07 | 北京理工大学 | A kind of the orientation detection device and its detection method of the mobile electrical body based on electret effect |
| CN112437870A (en) * | 2018-07-26 | 2021-03-02 | 威里利生命科学有限责任公司 | Electrostatic rotary encoder |
| CN113932836A (en) * | 2020-07-14 | 2022-01-14 | 昆山微电子技术研究院 | Non-contact spatial position sensing device based on electret |
| CN113932836B (en) * | 2020-07-14 | 2024-04-05 | 昆山微电子技术研究院 | Non-contact type spatial position sensing device based on electrets |
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|---|---|
| CN103760378B (en) | 2017-04-05 |
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