CN103748439B - Equipment for measuring gas flow rate - Google Patents

Equipment for measuring gas flow rate Download PDF

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Publication number
CN103748439B
CN103748439B CN201280040110.XA CN201280040110A CN103748439B CN 103748439 B CN103748439 B CN 103748439B CN 201280040110 A CN201280040110 A CN 201280040110A CN 103748439 B CN103748439 B CN 103748439B
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China
Prior art keywords
gas flow
flow rate
signal
detection
equipment
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CN201280040110.XA
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Chinese (zh)
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CN103748439A (en
Inventor
铃木和纪
中田圭一
佐藤亮
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Hitachi Astemo Ltd
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Hitachi Automotive Systems Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/64Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696Circuits therefor, e.g. constant-current flow meters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00Measuring a proportion of the volume flow

Abstract

The invention provides a kind of equipment for measuring gas flow rate correction precision when flow signal is revised improved.Equipment for measuring gas flow rate has: be configured in the one or more resistors in gas flow path; Detection of gas flow rate circuit, it, by detecting the electric current flowed in above-mentioned resistor or the voltage correspondingly produced with this electric current, exports the detection of gas flow rate signal corresponding to the gas flow flowed in above-mentioned gas stream; With the gas temperature detecting element for detecting the gas temperature in above-mentioned gas stream or the substrate temperature detecting element for detecting substrate temperature being arranged on IC interior, above-mentioned gas flow rate-measuring device carries out the characteristic revision of flow signal according to their temperature detection signal, above-mentioned gas flow rate-measuring device possesses signal conversion unit, this signal conversion unit to the target property from above-mentioned gas flow detecting signal depart from a certain amount of more than characteristic distortion revise.

Description

Equipment for measuring gas flow rate
Technical field
The present invention relates to equipment for measuring gas flow rate, particularly the intake air flow of engine measures.
Background technology
In engine for automobile, in order to control fuel injection amount, need to measure intake air flow.As the one of the device of this mensuration intake air flow, there is TR equipment for measuring gas flow rate.Even if expect the output signal temperature of this TR equipment for measuring gas flow rate change output signal change also little, namely temperature-independent error is little.
In order to reduce this temperature-independent error, need the temperature-independent error from gas temperature, substrate temperature detection signal correction detection of gas flow rate signal.
In order to improve necessary minimal resolution, existing and utilizing the correction chart of unequal interval to improve the technology recorded in the Japanese Unexamined Patent Publication 2007-071889 publication of resolution (resolution characteristic) partly.General in TR equipment for measuring gas flow rate, possesses computing circuit, this computing circuit has the table data relevant to air mass flow-output characteristics, by the region segmentation of these table data, calculate air mass flow at the amendment type of each air mass flow area change output characteristics, the region segmentation of above-mentioned table data is split more imperceptibly than high flow volume region the low flow volume region of air mass flow.Thereby, it is possible to improve low discharge precision with not increasing the data number of table terrifically.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2007-071889 publication
Summary of the invention
Invent problem to be solved
General in numeral correction in order to reduce round-off error and realize high precision int in whole flow region, need the resolution improving table, but increase due to the data number of table, retrieve data increases, and calculation process is slack-off.
In patent documentation 1, in the correction and the dependent correction of gas temperature of gas flow signals, by not utilizing that function carries out interpolation and use table is revised, can to gas flow signals and gas temperature be dependent non-linearly revises.But when use table is revised, because determine to revise precision according to data number, although so data number is more many more can carry out high-precision correction, when data number is few, round-off error becomes large.
Therefore, although consider the data number of increase table to improve precision, the cost increase because computing circuit becomes large.In addition, putting forward high-precision method with increasing as not making the data number of table, considering that the data break shown by order is become unequal interval and improves resolution partly.But, use during the table of unequal interval and there is the problem that computational load becomes greatly, calculation process is slack-off.
Further, in order to improve resolution partly beyond low discharge, need the data break predetermining table.
The object of the invention is to, improve correction precision when flow signal is revised.
For the mode of dealing with problems
In order to achieve the above object, equipment for measuring gas flow rate of the present invention has: detection of gas flow rate circuit, it is being configured at the electric current flowed in the one or more resistors in gas flow path or the voltage correspondingly produced with this electric current by detecting, and exports the detection of gas flow rate signal corresponding to the gas flow flowed in above-mentioned gas stream; With the gas temperature detecting element for detecting the gas temperature in above-mentioned gas stream or the substrate temperature detecting element for detecting substrate temperature being arranged on IC interior, this equipment for measuring gas flow rate is according to the temperature detection signal obtained from above-mentioned gas detector unit or aforesaid substrate detector unit, carry out the characteristic revision of above-mentioned gas flow detecting signal, the feature of this equipment for measuring gas flow rate is:
Possess signal conversion unit, this signal conversion unit to the target property from above-mentioned gas flow detecting signal depart from a certain amount of more than characteristic distortion (characteristic bend) revise.
The effect of invention
According to the present invention, correction precision when flow signal is revised can be improved.
Accompanying drawing explanation
Fig. 1 is the installation diagram of air flow rate measuring device when being mounted to main body.
Fig. 2 is the A-A ' sectional view of Fig. 1.
Fig. 3 is the circuit diagram of the air flow rate measuring device of the first embodiment.
Fig. 4 is the characteristic of air mass flow detection signal.
Fig. 5 is the transition diagram of the detection signal of the first embodiment.
Fig. 6 is the coordinate conversion figure of flow signal.
Fig. 7 is the characteristic distortion of the air mass flow detection signal in the first embodiment.
Fig. 8 is the figure of flow signal characteristic conversion.
Fig. 9 is the process flow diagram of the correction that use table carries out.
Figure 10 is the air flow rate measuring device of roundabout secondary passage shape installation diagram when being mounted to main body.
Figure 11 is the air flow rate measuring device of コ font secondary passage shape installation diagram when being mounted to main body.
Figure 12 is the air flow rate measuring device of α shape secondary passage shape installation diagram when being mounted to main body.
Figure 13 is the transition diagram of the detection signal in the second embodiment.
Figure 14 is the transition diagram of the detection signal in the 3rd embodiment.
Figure 15 is the coordinate conversion constitutional diagram in the 3rd embodiment.
The explanation of Reference numeral
1 gas temperature detecting element
2 air flow rate measuring devices
3 main bodys
4 detection of gas flow rate elements
5 substrates
6 primary paths
7 secondary paths
The flowing of 8 air
9 fixed resistances
10 digital signal processing DSP
11 analogue-to-digital converters AD1
Temperature sensor in 12 integrated circuit
13 analogue-to-digital converters AD2
14 analogue-to-digital converters AD3
15PROM(programmable read only memory: Programmableread-onlymemory)
16 digital-analog convertor DA1
17 free running counter FRC1
18 digital-analog convertor DA2
19 free running counter FRC2(freerunningcounter)
20 oscillators
21 integrated circuit
22 gas temperature testing circuits
23 adjusters (regulator)
24 multiplexer (multiplexer) MUX1
25 multiplexer MUX2
26 control unit of engine ECU
27 secondary path entrances
28 secondary lane exits
Embodiment
Be described with reference to the embodiment of accompanying drawing to air flow rate measuring device of the present invention.Below, air flow rate measuring device is described.
First, use Fig. 1 to Fig. 6 that the first embodiment of the present invention is described.
In FIG, the air flow rate measuring device 2 being provided with suction temperature detecting element 1 is inserted in gas flow path main body 3.
In fig. 2, air flow rate measuring device 2 is configured to, and is arranged in the gas passage main body 3 of the air-breathing stream forming internal combustion engine, is exposed to the gas 8 of flowing in primary path 6.Therefore, the side, upstream of air flow rate measuring device 2 is arranged in gas temperature detecting element (being also called as thermistor (thermistor) or gas temperature mensuration resistor) 1 mode being directly exposed to aspiration fluid.In addition, detection of gas flow rate element 4 is installed on the substrate 5, and the part being only provided with detection of gas flow rate element 4 is arranged in secondary path 7.Also be provided with gas temperature testing circuit 22 on the substrate 5, isolate with secondary path 7.
In figure 3, the gas temperature detected by gas temperature detecting element 1 is converted into voltage signal by the gas temperature testing circuit 22 on substrate 5, is transfused to analog converter AD314.In addition, in integrated circuit 21, in order to detect the temperature sensor 12 in integrated circuit that substrate temperature is provided with for detecting the temperature suitable with substrate 5.Thereby, it is possible to gas temperature and the respective temperature of air flow rate measuring device 2 detected.
In addition, gas temperature testing circuit 22 is formed being connected in series at the gas temperature detecting element 1 of air-breathing flow arrangement and fixed resistance 9, and what supply that adjuster 23 exports to gas temperature testing circuit 22 determines voltage.
In addition, when revising, the digital value obtained according to utilizing analogue-to-digital converters AD111 to be carried out changing by the detection of gas flow rate signal Q from detection of gas flow rate element 4, utilizing analogue-to-digital converters AD213 to be carried out changing by the substrate temperature signal from the temperature sensor 12 in integrated circuit and the digital value obtained, utilizing analogue-to-digital converters AD314 to be carried out changing by the gas temperature signal Ta from gas temperature detecting element 1 and the digital signal of these values of digital value obtained, utilization table is revised.So-called table refers to, is that lattice-shaped carries out arranging and the table that obtains by the correction constant for the gas flow signals be standardized and gas temperature signal, will use this table, and calculate the method for modified value be called table correction according to flow signal and temperature signal.The intersection point of the flow signal be standardized and temperature signal is called grid point, gives and revise constant.The correction constant that table uses in revising carries out correction calculation process by digital signal processing DSP10 according to the constant be kept in advance in PROM15.The gas flow signals be corrected like this and the digital value of gas temperature signal, carried out analog-converted by use digital-analog convertor DA116 and digital-analog convertor DA218, be output as voltage signal.On the other hand, using free running counter (self-operating counter: freerunningcounter)) FRC117 is when carrying out analog-converted to the digital value of gas flow signals, and the digital value of gas flow signals is output as frequency signal.Equally, when using free running counter FRC219 to carry out analog-converted to the digital value of gas temperature signal, the digital value of gas temperature signal is output as frequency signal.The selection of digital-analog convertor DA116 and free running counter FRC117 can be carried out selection by the setting of multiplexer (multiplexer) MUX124 and implement, and the selection of digital-analog convertor DA218 and free running counter FRC219 can be carried out selection by the setting of multiplexer (multiplexer) MUX225 and implement.In addition, oscillator 20 is utilized to drive whole circuit.And then air flow rate measuring device is electrically connected with ECU26.
Fig. 4 represents that detection of gas flow rate signal and target export.There is laminar flow and turbulent flow (turbulent flow) at fluid, there is the point that laminar flow changes to turbulent flow, under this impact, produce characteristic distortion in detection of gas flow rate signal.This characteristic distortion is according to the structure of air flow rate measuring device, and the structure particularly near detection of gas flow rate element 4, the size of characteristic distortion is different with the generation position of characteristic distortion.So-called characteristic distortion herein refer to from the target property shown in Fig. 4 depart from a certain amount of more than and formed bending.
Fig. 5 represents the method for revising characteristic distortion.Each use signal gas flow signals, substrate temperature signal, gas temperature signal being converted to digital value to revise time, about temperature signal, be provided with the switch can selected which use in substrate temperature signal Tl and gas temperature signal Ta, this switch can switch according to the constant in PROM15.According to the first coordinate conversion table, detection of gas flow rate signal Q is converted to Q1, according to the second coordinate conversion table, gas temperature detection signal Ta is converted to T1.Now, the first coordinate conversion table is the table for carrying out characteristic conversion to gas flow signals Q, is the table with 17 grid points.On the other hand, the second coordinate conversion table is the table for carrying out characteristic conversion to gas temperature signal Tl, is the table with 5 grid points.Gas flow signals is different from the characteristic of gas temperature signal, and therefore coordinate conversion table also uses different coordinate conversion tables.Like this, coordinate conversion is carried out to original characteristic, use signal Q1, T1 of having carried out characteristic conversion, utilize correction chart to carry out correction to compare with use Q with Ta thus, utilize Q1 and T1 to carry out revising resolution near the characteristic distortion that more can improve and utilize correction chart to carry out.The output Q2 revised utilizing correction chart adds original detection of gas flow rate signal Q and exports.Rely on error by the gas flow signals that these Q1, T1 obtained utilizing correction chart as input signal and gas temperature to revise, the resolution near the characteristic distortion that can improve temperature and flow, revises accurately.Characteristic before and after the conversion of Fig. 6 denotation coordination.Carry out characteristic conversion by the part utilizing coordinate conversion large to characteristic distortion, the grid number being assigned to the part of characteristic distortion increases, and resolution is improved.
On the other hand, in order to revise the characteristic distortion part of local accurately, need to utilize the first coordinate conversion table and the second coordinate conversion table that the resolution of characteristic distortion part is improved.Therefore, the size of the characteristic distortion using Fig. 7 to illustrate local judges, determines according to bending size the method for the resolution near characteristic distortion.Fig. 7 is that transverse axis represents gas flow signals Q, the longitudinal axis represents that target exports the chart with the difference Δ Y of the detection of gas flow rate signal utilizing detection of gas flow rate element 4 to detect.But this chart represents to export relative to target and carries out zero apart from difference during adjustment at high flow capacity and these two points of low discharge to detection of gas flow rate signal.Herein, in the judgement of characteristic distortion, the value of (1) formula is used to judge.
[several 1]
Σ q = a b | d ( ΔY ) d ( Q ) | q ( 1 ) Formula
S is the value of the size of characterization distortion, is judged the size of characteristic distortion, judge where there is characteristic distortion in the scope of a-b by the size of this value.Like this, by by position and size specific, the Segmentation Number that the first coordinate conversion table and the second coordinate conversion table determine near characteristic distortion portion can be utilized.As shown in Figure 8, when a and b that S becomes more than 0.055 is respectively a=60kg/h, b=220kg/h, utilizes coordinate conversion table to carry out characteristic conversion and make the raster resolution between 60kg/h and 220kg/h become more than 2 times.S 0.055 is equivalent to about 2% in flow error.The mode that a and b distorts with coverage property determines.This is because, correctly can not calculate S when characteristic distortion only enters half between a and b.Therefore, the interval of a and b is determined according to the size of characteristic distortion.When the size of characteristic distortion is large, the interval of a and b is large, when the interval of characteristic distortion hour a and b is also little.
Like this, in the present embodiment, be Q making gas flow, make that to have carried out zero value adjusted apart from (zerospan) to the output of the output characteristics of the detection of gas flow rate signal as revised target and the gas flow signals of above-mentioned resistor be Δ Y, the minimum value making the region of search (scope) of above-mentioned characteristic distortion is a, the maximal value of the region of search of above-mentioned characteristic distortion is made to be b, the Segmentation Number between a and b is made to be n, the value that the gradient sum of Δ Y and the Q in each interval that order is carried out splitting and obtained between a and b obtains divided by Segmentation Number and between a and b, Δ Y is maximum time value Δ Y maxor value Δ Y when Δ Y is minimum between a and b minamass as S time, utilize the position that a and b search attribute distorts, judge the size of characteristic distortion according to the size of S, at the absolute value of S | when the value of S| is more than 0.055, value according to a and b and S is revised above-mentioned gas flow detecting signal, makes | and the value of S| becomes less than 0.055.
In addition, when using table in the first coordinate conversion and the second coordinate conversion, the table shown in Fig. 9 is used.S according to the size of characterization distortion decides conversion amount Y, represents that the table of the relation of input X and conversion amount Y is made up of multiple data (being input as n of x1 ~ xn, the n that amount of changing is y1 ~ yn).Output Δ Y after conversion calculates by adding the conversion amount Y that utilization table calculates on input X.But although data number n more corrections precision of table is higher, the data capacity write in PROM15 increases, and cost increase.On the contrary, because the fewer data capacity write in PROM15 of data number n is less, so cost increase can be prevented, precise decreasing is revised even so.Therefore, the data number n used in table needs size, quantity set optimum data number according to the characteristic distortion of detection of gas flow rate signal.By adopting the method for this use table, calculation process amount can be reduced compared with using the modification method of function.
Above, as described, in the present embodiment, by carrying out characteristic conversion to flow signal, the data number and not making not increasing table is spaced apart unequal interval (namely with at equal intervals) and just can revises the bending of local accurately, therefore, it is possible to improve the precision of flow measurement.
In addition, the present embodiment can not only be applied to the structure of the such shape parallel with primary path 6 of secondary path 7 as shown in Figure 2, secondary path 7 as shown in Figure 10 can also be applied to like that in the shape of a spiral, the structure that the gas entered from secondary path entrance 27 is gone out from secondary lane exit 28 along secondary path 7 by detection of gas flow rate element 4.And then, the secondary paths such as コ font as shown in Figure 11, α shape as shown in Figure 12 can also be utilized except spiral fashion to implement.
In addition, the embodiment of air flow rate measuring device is illustrated the situation measuring air, the situation that the flow of the gas that the present invention can also be applied to beyond to air detects.
Then, Figure 13 is used to be described the second embodiment.In this second embodiment, as shown in figure 13, different from the signal of the use gas temperature of the first embodiment, and use the signal of substrate temperature.Gas temperature signal Ta is used to revise temperature-independent error.But gas temperature detecting element 1 is arranged on the side, upstream of air flow rate measuring device 2 to detect gas temperature in the mode being directly exposed to aspiration fluid.When gas temperature detecting element 1 breaks, can not gas temperature be detected, therefore can not carry out gas temperature and rely on error correction.Therefore, in integrated circuit 21, in order to detect the temperature sensor 12 in integrated circuit that substrate temperature is provided with for detecting the temperature suitable with substrate 5, carry out temperature-independent error correction according to this temperature signal Tl.The temperature signal used to carry out temperature-independent error correction uses the temperature signal Ta from gas temperature detecting element 1 still to use from the temperature signal Tl for detecting the temperature sensor in the integrated circuit of substrate temperature, can switch according to the information preset in PROM15.Like this, by using the temperature signal Tl from the temperature sensor in integrated circuit, and the terminal of Support gas flow detecting element is not used, not broken string.In addition, the temperature sensor in integrated circuit is not directly exposed to aspiration fluid, therefore stained unlike gas temperature detecting element.Therefore, the impact of the change of the resistance value caused of can not tarnishing, therefore, it is possible to the durable change reducing temperature characterisitic, precision is improved.
Then, Figure 14 is used to be described the 3rd embodiment.Relative to the first embodiment and the second embodiment, coordinate conversion does not use table, and uses N function.By the first coordinate conversion, detection of gas flow rate signal Q is converted to Q1.This coordinate conversion is changed by N function.In addition, by the second coordinate conversion, gas temperature signal T is converted to T1.This coordinate conversion also uses N function to change.As shown in figure 15, in this first coordinate conversion and the second coordinate conversion, there is the combination of the conversion of some tables and N function.Can conversion in the following manner revise: the first coordinate conversion and the second coordinate conversion conversion, the first coordinate conversion utilization table and the second coordinate conversion that all utilization table carries out utilize conversion that N time function carries out, the first coordinate conversion utilizes N function and the conversion that the second coordinate conversion utilization table carries out or the first coordinate conversion and the second coordinate conversion all utilize the conversion that N time function carries out.Although can either utilize correction chart that N function also can be utilized to revise, when utilizing correction chart to revise, be difficult to the characteristic distortion utilizing the corresponding detection of gas flow rate signal of function, in table, the resolution in characteristic distortion portion reduces.On the other hand, in the first coordinate conversion and the second coordinate conversion, because be the nonlinear conversion for relaxing gas flow signals and gas temperature signal respectively, the conversion of resolution for utilizing correction chart to improve characteristic distortion portion, so also can by N function correspondence.When the first coordinate conversion utilization table, the second coordinate conversion utilize N function, precision can be improved similarly to Example 1.First coordinate conversion table and the second coordinate turn the table at equal intervals that table also can be any Segmentation Number.

Claims (8)

1. an equipment for measuring gas flow rate, is characterized in that, comprising:
Detection of gas flow rate circuit, it is being configured at the electric current flowed in the one or more resistors in gas flow path or the voltage correspondingly produced with this electric current by detecting, and exports the detection of gas flow rate signal corresponding to the gas flow flowed in described gas flow path; With
For detecting the gas temperature detecting element of the gas temperature in described gas flow path or being arranged on the substrate temperature detecting element for detecting substrate temperature of IC interior,
Described equipment for measuring gas flow rate, according to the temperature detection signal obtained from described gas temperature detecting element or described substrate temperature detecting element, carries out the characteristic revision of described detection of gas flow rate signal,
Described equipment for measuring gas flow rate possesses signal conversion unit, described signal conversion unit when exist depart from from the target property of described detection of gas flow rate signal a certain amount of more than characteristic distortion, being a making the minimum value of the region of search of described characteristic distortion, making the maximal value of the region of search of described characteristic distortion be b, when making the Segmentation Number between a and b be n, increase described Segmentation Number n according to the size of the characteristic distortion between a and b and carry out revise goal characteristic.
2. equipment for measuring gas flow rate as claimed in claim 1, is characterized in that:
Described signal conversion unit,
In season gas flow be Q, make to the output of the output characteristics of the detection of gas flow rate signal as revised target and the gas flow signals of described resistor carried out zero apart from the value of adjustment be Δ Y,
The value that the gradient sum of Δ Y and the Q in each interval that order is carried out splitting and obtained between described a and described b obtains divided by Segmentation Number and between a and b, Δ Y is maximum time value Δ Y maxor value Δ Y when Δ Y is minimum between a and b minamass as S time,
The position of described characteristic distortion is searched for according to described a and b, the size of described characteristic distortion is judged according to the size of described S, at the absolute value of described S | when the value of S| is more than 0.055, value according to described a and b and S is revised described detection of gas flow rate signal, makes | and the value of S| becomes less than 0.055.
3. equipment for measuring gas flow rate as claimed in claim 2, is characterized in that:
Described signal conversion unit has correction chart, and described correction chart has:
First coordinate conversion table, it is for relaxing the non-linear of described detection of gas flow rate signal; With
Second coordinate conversion table, it is for relaxing the non-linear of described temperature detection signal,
Described correction chart is revised based on the signal carrying out coordinate conversion.
4. equipment for measuring gas flow rate as claimed in claim 3, is characterized in that:
Described first coordinate conversion table and described second coordinate conversion table are the tables at equal intervals of any Segmentation Number.
5. equipment for measuring gas flow rate as claimed in claim 2, is characterized in that:
Described equipment for measuring gas flow rate comprises integrated circuit, described integrated circuit is by the output from described detection of gas flow rate circuit and be converted to digital signal from the output signal of described gas temperature detecting element, the output signal revised is converted to simulating signal and exports each signal.
6. equipment for measuring gas flow rate as claimed in claim 3, is characterized in that:
The gas temperature detection signal used in described correction chart is the gas temperature signal from described gas temperature detecting element.
7. equipment for measuring gas flow rate as claimed in claim 3, is characterized in that:
The gas temperature detection signal used in described correction chart is the temperature signal from the substrate temperature sensor be arranged in described integrated circuit.
8. equipment for measuring gas flow rate as claimed in claim 2, is characterized in that:
Input be converted into digital signal described gas temperature detection signal, from the substrate temperature detection signal of the substrate temperature sensor be arranged in described integrated circuit and the detection of gas flow rate signal from described detection of gas flow rate circuit, carry out correction calculation process according to inputted digital signal.
CN201280040110.XA 2011-09-30 2012-08-16 Equipment for measuring gas flow rate Active CN103748439B (en)

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PCT/JP2012/070807 WO2013046981A1 (en) 2011-09-30 2012-08-16 Gas flow rate measuring apparatus

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WO2013046981A1 (en) 2013-04-04

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