CN103744302B - A kind of isothermal chemical vapor infiltration PLC-industrial computer IPC control system based on laminar flow reaction power model - Google Patents
A kind of isothermal chemical vapor infiltration PLC-industrial computer IPC control system based on laminar flow reaction power model Download PDFInfo
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 32
- 239000000126 substance Substances 0.000 title claims abstract description 15
- 238000001764 infiltration Methods 0.000 title claims abstract description 13
- 230000008595 infiltration Effects 0.000 title claims abstract description 13
- 238000004891 communication Methods 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 238000004364 calculation method Methods 0.000 claims abstract description 8
- 239000002243 precursor Substances 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 7
- 238000005137 deposition process Methods 0.000 claims description 6
- 239000012141 concentrate Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 20
- 230000008569 process Effects 0.000 abstract description 17
- 230000007246 mechanism Effects 0.000 abstract description 9
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000005457 optimization Methods 0.000 abstract description 2
- 230000009466 transformation Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 42
- 239000012071 phase Substances 0.000 description 7
- 238000005336 cracking Methods 0.000 description 6
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 238000000197 pyrolysis Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 239000005977 Ethylene Substances 0.000 description 3
- 238000004422 calculation algorithm Methods 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000007792 gaseous phase Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 2
- 238000010574 gas phase reaction Methods 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 240000007643 Phytolacca americana Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010504 bond cleavage reaction Methods 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- HPNSNYBUADCFDR-UHFFFAOYSA-N chromafenozide Chemical compound CC1=CC(C)=CC(C(=O)N(NC(=O)C=2C(=C3CCCOC3=CC=2)C)C(C)(C)C)=C1 HPNSNYBUADCFDR-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229920006253 high performance fiber Polymers 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Abstract
The present invention discloses a kind of Programmable Logic Controller (PLC)-industrial computer (IPC) control system of the isothermal chemical vapor infiltration (ICVI) based on laminar flow reaction power model, comprise industrial computer IPC, carry out PLC, vacuum diaphragm pump, heating unit, the mass rate valve of communication with industrial computer IPC, and flow, pressure and temperature sensor and I/O interface, industrial computer IPC comprises man-machine interface (HMI), effectively hold-up time computing unit and flow rate calculation unit; PLC comprises three control loops, is pressure control loop, temperature control loop and flow control circuit.The present invention is based on the advantage of industrial computer IPC and PLC, comprehensive transformation has been carried out to original control system, existing detailed reaction mechanism is applied to the process parameter control of gas-phase permeation stove with in optimization, by the kinetic model of laminar flow, real-time calculating is carried out to this middle measuring amount of effective hold-up time, reach and it is effectively controlled.
Description
Technical field
The present invention relates to a kind of control system containing laminar flow reaction power model kernel, adopting isothermal chemical vapor infiltration reacting furnace to prepare in the process of compound substance pressure, temperature and effective control of hold-up time for realizing.
Background technology
Isothermal/isobaric chemical vapor infiltration technique (Isothermal/IsobaricChemicalVaporInfiltration, ICVI) prepares high-performance fiber to strengthen carbon back and ceramic matric composite is the most important, the technological means that is most widely used.For carbon/carbon compound material manufacture process, its basic process is as follows: one or more gaseous precursor, under suitable pressure condition, reach the temperature of expection through preheating zone; In isothermal section, there is pyrolysis and deposition process, in the surface and hole of precast body, generate different RESEARCH OF PYROCARBON components; Residual gas leaves gas-phase permeation stove after eventually passing through cooling zone.Because the RESEARCH OF PYROCARBON character generated is determined jointly by gas-phase reaction and surface deposition process, therefore the process parameter control of gaseous phase permeation process is particularly important.1969 Bokros [1] just clearly illustrate major parameter affect pyrolytic carbon and deposit: precursor gas kind, pyrolysis reaction temperature and pressure, gas residence time in the reactor and structure of reactor geometric relationship.And Feron [2] and Huettinger etc. [3] also also highlight the hold-up time is under study for action an important parameter, their result shows in level pressure situation, along with the prolongation of gas hold-up time, there is the variation tendency of smooth layer (SL)-> rough layer (GL)-> smooth layer (SL) in the microstructure of pyrolytic carbon.Current for isothermal ICVI process system, according to pressure and temperature sensor, so these two technological parameters that can directly measure usually can reach and accurately control.And the hold-up time refers to that gas (comprising precursor gas and diluents) can flow freely the space time used from being filled to the isothermal region of discharging precast body place completely completely, i.e. effective hold-up time.This space just refers to the cylindric annular space space in Fig. 1 around sample.
The computing formula of ideal conditions lower hold-up time is as follows:
The hold-up time is represented, s in formula τ; V represents precast body surrounding space volume; Q represents precursor gas volumetric flow rate; T
0represent inlet temperature, K; P
0represent porch pressure, kPa; T represents isothermal region temperature, K; P represents isothermal region pressure, kPa.When formulation technological parameter, first the hold-up time will be determined, and the technological parameter such as temperature, pressure, and then calculating required volumetric flow rate according to these parameters according to formula (1), the flow value obviously calculated according to formula (1) and the kind of inlet gas have nothing to do.But for different inlet gas, the reaction of its vapour-phase pyrolysis causes the amount of the gaseous matter reacting front and back to be generally unequal, cause ICVI reacting furnace inner volume fluctuations in discharge larger, be difficult in actual process measure this parameter of effective hold-up time, so formula (1) only can be relied on to calculate the apparent hold-up time, then just likely find out optimum process condition corresponding thereto based on a large amount of experiment statisticses.
Summary of the invention
Due to the problems referred to above that prior art exists, the object of the invention is to propose a kind of isothermal chemical vapor infiltration PLC-industrial computer IPC control system based on laminar flow reaction power model, by the intrinsic heat scission reaction mechanism of given presoma, solve reaction Kinetics Model, the real-time calculating to isothermal region section effective hold-up time is realized in gaseous phase permeation process, and according to the relation of this indirect measurement and inlet volumetric flow, each key process parameter in accurate control isothermal chemical vapor infiltration technique, improve the understanding to pyrocarbon matrix or ceramic matrix formation mechenism, strengthen a kind of control system of the controllability of micromechanism and composition in preparation process.
To achieve these goals, the present invention is achieved by the following technical programs: based on the isothermal chemical vapor infiltration PLC-industrial computer IPC control system of laminar flow reaction power model, comprise industrial computer IPC, the PLC of communication is carried out with industrial computer IPC, vacuum diaphragm pump, heating unit, flow valve, and flow, pressure and temperature sensor and I/O interface, industrial computer IPC comprises HMI, effective hold-up time and flow rate calculation unit, this PLC comprises three control loops, is respectively pressure control loop, temperature control loop and hold-up time control loop, this pressure control loop is that gas is successively through the first gas admittance valve, pressure transducer, pressure controller, vacuum diaphragm pump, ICVI reactor returns this first gas admittance valve and forms, and this temperature control loop is that gas is successively through the second gas admittance valve, temperature sensor, temperature controller, heating unit, ICVI reactor returns the second gas admittance valve and forms, and this hold-up time control loop is that gas is successively through the 3rd gas admittance valve, flow sensor, flow controller, flow valve, ICVI reactor returns the 3rd gas admittance valve and formed, industrial computer IPC, according to the setting value of user to effective hold-up time, provides the expectation value of mass rate, and sends to flow controller.
As further feature of the present invention, described effective hold-up time computing unit is a TcCOM assembly operating in XAE (ExtendedAutomationEngineer) engineering on IPC, namely the Component Object Model ComponentObjectModel under TwinCAT automated software environment), it comprises laminar flow reaction power model and a PI control algolithm, the parameter can preset according to described HMI and the pressure of actual measurement and temperature, calculate the effective hold-up time in isothermal section.
As further feature of the present invention, described flow rate calculation unit is another TcCOM assembly, it adopts (LookupTable) module of tabling look-up of MATLAB, according to the relation of the effective hold-up time of presoma different under given deposition process conditions in reactor and its presoma volume space velocity at standard conditions, the modified value of calculated mass flow.
As further feature of the present invention, described pressure, temperature and flow control circuit concentrate in a PLC and complete, for realizing the vaporous precursors in above-mentioned ICVI reactor in the pressure of isothermal section, temperature and the control of effective hold-up time.
As further feature of the present invention, between described industrial computer IPC and PLC, adopt TCP/IP or RS232 communication modes.
As further feature of the present invention, described I/O interface carries out communication by EtherCAT bus and host CPU.
Owing to adopting above technical scheme, the isothermal chemical vapor infiltration PLC-IPC control system based on laminar flow reaction power model of the present invention compared with prior art has following advantage:
In traditional ICVI control technology, the hold-up time, always as a reference quantity, adopts a formula simplified, obtains corresponding volumetric flow rate in actual control system, reaches by controlling volumetric flow rate the object controlling the hold-up time.But this formula of reduction does not consider the complicated cracking process of presoma in ICVI reacting furnace.In cracking process, the volumetric flow rate of mixed gas can change a lot, and therefore needs the volumetric flow rate constantly regulating entrance in real time, cannot realize the accurate control to the hold-up time at all.Current going deep into along with the research of presoma pyrolysis mechanism, increasing detailed reaction mechanism is suggested and verifies, the present invention is exactly the advantage utilizing PLC programmable logic controller (PLC), comprehensive transformation has been carried out to original control system, existing complex reaction meachanism is applied to the process parameter control of gas-phase permeation stove with in optimization, by the reaction Kinetics Model of laminar flow, real-time calculating is carried out to this middle measuring amount of effective hold-up time, reach and it is effectively controlled, in addition by exploitation control software design, control system is also based on the switching value between IPC and PLC, the communication of analog quantity and digital quantity, achieve real-time display and the storage of Controlling Technology parameter.Putting into operation of this control system shows, its working stability is reliable, and control accuracy is high, drastically increases research and production efficiency.
Accompanying drawing explanation
The invention will be further described with specific embodiment with reference to the accompanying drawings below:
Fig. 1 is isothermal chemical vapor infiltration poke schematic diagram;
Fig. 2 is the annexation of control system each several part;
Fig. 3 is isothermal chemical vapor infiltration steering logic figure;
Fig. 4 is hold-up time control loop schematic diagram;
Fig. 5 is the graph of a relation of the hold-up time of different presoma in reactor and its volume space velocity at standard conditions;
Fig. 6 is cracking of ethylene reaction rate figure (temperature 1000 DEG C, pressure 2kPa, hold-up time 1s, the relative consumption speed of numeral component);
Fig. 7 is the graph of a relation (curved lines is expectation value, and symbol is measured value) that in cracking of ethylene process, main gas component changed with the hold-up time
Embodiment
As Fig. 2, shown in 3, based on the isothermal chemical vapor infiltration PLC-industrial computer IPC control system of laminar flow reaction power model, comprise industrial computer IPC, carry out PLC, vacuum diaphragm pump, heating unit, mass rate valve, flow, the pressure and temperature sensor of communication with industrial computer IPC.Industrial computer IPC comprises HMI, effectively hold-up time and flow rate calculation unit, this PLC controls three control loops respectively, for pressure control loop, temperature control loop and hold-up time control loop, this pressure control loop is that gas is successively through the first gas admittance valve, pressure transducer, pressure controller, vacuum diaphragm pump, ICVI reactor, return this first gas admittance valve and form, this temperature control loop is that gas is successively through the second gas admittance valve, temperature sensor, temperature controller, heating unit, ICVI reactor, return the second gas admittance valve and form, this hold-up time control loop is that gas is successively through the 3rd gas admittance valve, flow sensor, flow controller, flow valve, ICVI reactor, return the 3rd gas admittance valve formed, industrial computer IPC is according to the setting value of user to effective hold-up time, provide the expectation value of mass rate, and send to flow controller.
Industry IPC comprises Human machine interface, effectively hold-up time and flow rate calculation unit three parts.User can carry out the definition of model parameter, Real time displaying and Data Post by HMI.By this part, user can be arranged the equivalent dimension of intrinsic reaction mechanism, tubular reactor, initial flow and expectation hold-up time curve; The journal file of output parameter in experimentation, and aftertreatment is carried out to parameter.Effective hold-up time computing unit is a TcCOM assembly operating in XAE (ExtendedAutomationEngineer) engineering on IPC, namely the Component Object Model ComponentObjectModel under TwinCAT automated software environment), it comprises laminar flow reaction power model and a PI control algolithm, the parameter can preset according to described HMI and the pressure of actual measurement and temperature, calculate the effective hold-up time in isothermal section; Flow rate calculation unit it adopt (LookupTable) module of tabling look-up of MATLAB, according to the relation of the effective hold-up time of presoma different under given deposition process conditions in reactor and its presoma volume space velocity at standard conditions, the modified value of calculated mass flow, and the instruction providing modified flow rate thus.Because the real-time aspect of flow correction instruction is less demanding, the communication therefore between IPC and controller adopts TCP/IP or RS232 communication modes just can meet the demands, and can simplify system like this, reduce costs.PLC mainly completes the instruction of heating unit, membrane pump and flow valve to gas-phase permeation stove, controls the dynamic perfromance of temperature, pressure and flow.
The XAE engineering that the present invention runs at industrial computer IPC, it contains the TcCOM assembly of multiple execution different task.First task is the C program in machine code of effective hold-up time calculating of the ICVI reactor run based on laminar flow reaction Kinetics Model, obtains the effective hold-up time of presoma in reactor; Second task is the LookupTable module adopting MATLAB, by the family curve of hold-up time of obtaining in advance and presoma volume space velocity, obtains the revision directive of mass rate; 3rd task completes setting to important parameter in gaseous phase permeation process, storage, calculating, display and aftertreatment.
Fluid is done laminar flow flowing and is had following feature in pipe: the mobile phase on vertical cross-section can be ignored for axial flow velocity; The mixing between fluid particle is there is not, without air-teturning mixed phenomenon in the direction of fluid flowing.Therefore plug flow model can be adopted to occur in equivalent simulation gas-phase permeation the chemical dynamics process of isothermal section, also effectively calculate effective hold-up time of precursor gas fast.
For first order reaction, the concentration of hold-up time and reactant obeys the distribution of exponential function, and for multistage complicated cracking reaction, must be as follows from the governing equation of the mass conservation of control volume, transfer components and energy conservation equation derivation laminar flow flowing:
pM＝ρRT(5)
Here ρ represents the density kgm of mixed gas
-1, u is axial speed ms
-1, A
cfor the cross-sectional area m of pipeline
2, Z is axial position m, A
sfor the surface area m in unit length, kg are the quantity of gaseous component, M
kfor the molal quantity kgmol of component k
-1, Y
kthe massfraction of component k,
for mole increment molm of the component k that gas-phase reaction causes
-3s
-1, C
pfor the specific heat Jkg of mixed gas
-1k
-1, T is the temperature K of gas, and scope is 273 ~ 1500K, h
kfor the specific enthalpy Jkg of component k
-1, U is the heat transfer coefficient Jm of mixed gas
-2k
-1s
-1, p is pressure Pa, the average molar mass kgmol of scope to be 0 ~ 100kPa, M be mixed gas
-1, T
wfor the temperature K of reacting furnace wall.
Can by following Solving Partial Differential Equations in effective hold-up time of isothermal section:
Here τ
calrepresent effective hold-up time, scope at 0 ~ 30s, i.e. the hold-up time of mixed gas in reaction chamber.Initial volumetric flow rate can be arranged by formula (1).The structure of foundation reactor and the arrangement of precast body in reaction chamber can determine the cross-sectional area of the plug flow model of equivalence, and this area can change with axial location from the inlet to the outlet.Then by solving laminar flow reaction Kinetics Model formula (2-6), effective hold-up time τ is obtained
cal.In this control system, this part work is completed by the one section of C code implanted in IPC, and concrete steering logic is as Fig. 4.And by the volume space velocity family curve based on hold-up time in reactor of the different presomas of this model generation and its presoma at standard conditions as Fig. 5, adopt two-dimentional look-up table to calculate the volumetric flow rate of correction.
The emphasis of the ICVI control system that the present invention improves with the addition of a hold-up time controller to existing ICVI control system.The logic of control system as shown in Figure 3, includes four control loops: pressure control loop, temperature control loop, flow control circuit and hold-up time control loop.First three loop mainly completes the control to system dynamic characteristic, reaches the control of constant temperature, constant voltage and flow, and real-time is very strong.And be non real-time to the control of hold-up time, there is a time cycle, when the deviation in mass rate limited range can be allowed, after going beyond the scope, then recalculate effective hold-up time according to IPC, and provide the flow correction instruction of flow controller.The logic of hold-up time controller as shown in Figure 4.
Industrial computer IPC also runs based on Matlab the gui interface of GUIDE too development, mainly in order to realize:
(1) user is to the input of temperature, pressure and hold-up time expectation value;
(2) the real-time display of data;
(3) storage of various data and history data inquiry and data sheet printing;
(4) display of system running state, as normal, warning, fault etc.
In the present invention, industrial computer adopts times good fortune built-in industrial control IPC, Inteli5 dual core processor, 8GBCFast card, in-built WES7 embedded OS.Have multiple PORT COM (RS232, CANopen, Ethernet), its I/O is by EtherCAT bus and host CPU communication, and analogue collection module is EL3124, and gather 4-20mA standard signal, current resolution is 16.Analog output module is EL4124, and export 4-20mA standard signal, current resolution is 16.
Controller comprises three parts: mass rate control loop, temperature control loop and pressure control loop.Mass flow controller adopts pid control algorithm, and the mass rate for the vaporous precursors to ICVI technique controls.Gas enters from the gas access of mass flow controller, and its flow, after flow sensor is measured, flows out from the outlet of flow control valve.PLC continuously changes the aperture of flow valve thus the flow of continuous adjustments of gas by sending mass rate instruction, and the measuring-signal of flow is carried out communication by ICP/IP agreement and industrial computer IPC, the accuracy of flow is ± 1%S.P simultaneously.Temperature controller also adopts pid control algorithm, with temperature control for core.In control loop, temperature in the middle part of K type thermocouple measurement ICVI reacting furnace uniform temperature zone, and be the temperature control loop that electric signal sends PLC to by the temperature transition recorded, controller exports 0-5V standard control signal, thus controlling the heating of heating unit, the close-loop feedback realizing temperature controls.The measuring-signal of temperature is carried out communication by ICP/IP agreement and industrial computer IPC simultaneously.Stress control take vacuum cavitations as major control object.Vacuum diaphragm pump adopts variable frequency control, makes membrane pump rotating speed adjustable, more accurately can control vacuum pressure, the measuring-signal of pressure is carried out communication by ICP/IP agreement and industrial computer IPC simultaneously by inverter motor and PLC.
During concrete enforcement: 1. user's setting pressure, temperature, initial flow and reference value of hold-up time on gui interface, these data provide by the file of function and discrete point.Then in reaction mechanism storehouse, the reaction of high order mechanism of presoma is selected, as the splitting mechanism of ethene.Then according to the structure of reactor and the putting position of precast body, calculate the equivalent cross-sectional area of piston flow reactor, and set the parameter of laminar flow kinetic model;
2.IPC read flow measurements by certain sampling period, flow expectation value and the flow measurements fed back by PLC are compared, if the difference of measured value and expectation value exceedes certain limit, then according to the C code of user to the calculating that the input data run of model is built-in effective hold-up time, obtain effective hold-up time, then according to the family curve of the hold-up time of different presoma in reactor under given deposition process conditions and its presoma volume space velocity at standard conditions as Fig. 5, obtain the modified value of volumetric flow rate, and send the instruction of volumetric flow rate reference value to mass flow controller,
3. adopt the HMI user of IPC can self-defined hold-up time curve, sent to the feedback of flow expectation value in PLC and flow sensor by IPC by ICP/IP protocol, instruction is sent to actuator flow valve, reach the control to flow;
4. adopt the HMI of IPC, user defines pressure and temperature reference value, pressure control loop in PLC and temperature control loop is sent to by ICP/IP protocol, and finally sending to corresponding actuator by pid control algorithm: membrane pump and heating unit, reach the control of constant voltage and constant temperature;
5. in the exit of gas-phase permeation stove, gas chromatography mass spectrometry equipment GC/MS can be adopted to carry out the analysis of effective ingredient to the mixed gas leaving reacting furnace, verify whether the complex reaction meachanism adopted under the hold-up time condition preset predicts the change of gaseous component exactly;
Fig. 6 gives under selection cracking of ethylene reaction mechanism, expects that the hold-up time is the result of 0 ~ 1s even variation.It is 1000 DEG C in temperature, when pressure is 2kPa, the mixed gas leaving reacting furnace is carried out to the analysis of effective ingredient, curved lines is the expectation value generating gas molar mark, symbol is measured value, and result represents that control system can reach the set goal substantially as Fig. 7.
But above-mentioned embodiment is exemplary, being to better enable those skilled in the art understand this patent, can not being interpreted as it is restriction this patent being comprised to scope; As long as according to this patent disclose any equivalent change done or the modification of spirit, all fall into the scope that this patent comprises.
Claims (6)
1., based on an isothermal chemical vapor infiltration PLC-industrial computer IPC control system for laminar flow reaction power model, comprise industrial computer IPC, the PLC of communication is carried out with industrial computer IPC, vacuum diaphragm pump, heating unit, flow valve, and flow, pressure and temperature sensor and I/O interface, is characterized in that: industrial computer IPC comprises HMI, effective hold-up time computing unit and flow rate calculation unit, this PLC comprises control three control loops respectively, is pressure control loop, temperature control loop and flow control circuit, this pressure control loop is that gas is successively through the first gas admittance valve, pressure transducer, pressure controller, vacuum diaphragm pump, ICVI reactor returns this first gas admittance valve and forms, and this temperature control loop is that gas is successively through the second gas admittance valve, temperature sensor, temperature controller, heating unit, ICVI reactor returns the second gas admittance valve and forms, and this flow control circuit is that gas is successively through flow sensor, 3rd gas admittance valve, flow controller, flow valve, ICVI reactor returns the 3rd gas admittance valve and formed, industrial computer IPC, according to the setting value of user to effective hold-up time, provides the expectation value of mass rate, and sends to flow controller.
2. control system according to claim 1, it is characterized in that: described effective hold-up time computing unit is a TcCOM assembly operating in the XAE engineering on IPC, it comprises laminar flow reaction power model and a PI control algolithm, the parameter can preset according to described HMI and the pressure of actual measurement and temperature, calculate the effective hold-up time in isothermal section.
3. control system according to claim 1 and 2, it is characterized in that: described flow rate calculation unit is another TcCOM assembly, it adopts the table look-up module of MATLAB, according to the relation of the effective hold-up time of presoma different under given deposition process conditions in reactor and its presoma volume space velocity at standard conditions, the modified value of calculated mass flow.
4. control system according to claim 3, it is characterized in that: described pressure, temperature and flow control circuit concentrate in a PLC and complete, for realizing the vaporous precursors in above-mentioned ICVI reactor in the pressure of isothermal section, temperature with effectively the hold-up time controls.
5. control system according to claim 4, is characterized in that: adopt TCP/IP or RS232 communication modes between described industrial computer IPC and PLC.
6. control system according to claim 5, is characterized in that: described I/O interface carries out communication by EtherCAT bus and host CPU.
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| US20160091903A1 (en) * | 2014-09-30 | 2016-03-31 | Honeywell International Inc. | Safety and programmable logic integration system |
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| EP3647459A1 (en) | 2018-10-31 | 2020-05-06 | Petroceramics S.p.A. | Method and an assembly by chemical vapor infiltration of porous components |
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| CN116736817B (en) * | 2023-08-11 | 2023-11-03 | 西安启银致远企业管理有限公司 | Intelligent control method for hydrophilic silver fiber dressing production and processing |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4823734A (en) * | 1986-02-10 | 1989-04-25 | Societe Europeenne De Propulsion | Installation for the chemical vapor infiltration of a refractory material other than carbon |
| CN101003896A (en) * | 2007-01-23 | 2007-07-25 | 锦州市三特真空冶金技术工业有限公司 | Distributed control equipment of vacuum inductive chemical vapor deposition / penetration system |
| CN203561850U (en) * | 2013-11-27 | 2014-04-23 | 上海大学 | Isothermal chemical vapor infiltration PLC-IPC control system based on plug flow reaction dynamic model |
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| US20070184179A1 (en) * | 2006-02-09 | 2007-08-09 | Akshay Waghray | Methods and apparatus to monitor a process of depositing a constituent of a multi-constituent gas during production of a composite brake disc |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4823734A (en) * | 1986-02-10 | 1989-04-25 | Societe Europeenne De Propulsion | Installation for the chemical vapor infiltration of a refractory material other than carbon |
| CN101003896A (en) * | 2007-01-23 | 2007-07-25 | 锦州市三特真空冶金技术工业有限公司 | Distributed control equipment of vacuum inductive chemical vapor deposition / penetration system |
| CN203561850U (en) * | 2013-11-27 | 2014-04-23 | 上海大学 | Isothermal chemical vapor infiltration PLC-IPC control system based on plug flow reaction dynamic model |
Non-Patent Citations (1)
| Title |
|---|
| 一种制备C/C复合材料的高效等温ICVI 工艺;白瑞成, 李贺军, 徐向阳, 熊信柏, 李爱军;《航空学报》;20050331;第26卷(第2期);全文 * |
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