CN103728991B - Gas mass flow control system - Google Patents
Gas mass flow control system Download PDFInfo
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- CN103728991B CN103728991B CN201310750547.9A CN201310750547A CN103728991B CN 103728991 B CN103728991 B CN 103728991B CN 201310750547 A CN201310750547 A CN 201310750547A CN 103728991 B CN103728991 B CN 103728991B
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Abstract
The invention relates to a gas mass flow control system. The gas mass flow control system comprises a gas mass flow controller, an energy capturing device and an energy storage device. The gas mass flow controller is connected with a gas pipeline and used for metering or controlling the mass or the flow of gas passing through the gas pipeline, the energy capturing device is used for capturing the mechanical energy in the surrounding environment of the gas mass flow control system, one end of the energy storage device is connected with the energy capturing device and used for storing the captured mechanical energy and the other end of the energy storage device is connected with the gas mass flow controller and used for supplying power to the gas mass flow controller. An external power source does not need to be used for supplying power to the gas mass flow control system, therefore, the system is simplified and the equipment failure rate can be lowered easily; the gas mass flow control system saves energy, and is low in carbon emission, environmentally friendly and convenient to popularize and apply in the industry.
Description
Technical field
The present invention relates to gas flow and control technical field, more particularly, it relates to a kind of gas matter
Amount flow control system.
Background technology
Gas mass flow controller (Mass Flow Controller is called for short MFC) is for right
Gas mass flow carries out accurate measurement and control, be mainly used in semiconductor integrated circuit technique,
The scientific research of the multiple fields such as special material, chemical industry, petroleum industry, medicine, environmental protection and vacuum
In producing.Prior art provide a gas mass flow controller by diverter, sensor,
Electromagnetic current adjustable valve and CPU, driving, control circuit plate composition, Fig. 1 illustrates this gas matter
The module map of amount flow controller.
Flow through bypass device 100, then through being connected to regulate the gas pipeline output of valve 109, wherein,
Diverter 100 and sensor with the use of, sensor generally includes a biography being connected with diverter
Sense pipe 101 and two sensing filament winding groups 1021,1022, sensor tube 101 is of diverter 100
Pipe or bypass are in charge of, two sensing 1021,1022 and two non-essential resistances 1031,1032 of filament winding group
Forming an electric bridge, constant-current source 104 power, output signal turns through amplifier 105 to A/D
Parallel operation 106 is processed by CPU 107, and CPU 107 also can carry out data communication with external interface, and
The open/close action of valve 109 is controlled to adjust by driver part 108.Small part of gas during work
Flow through by sensor tube 101, produce different range with the difference flowing through flow at sensor tube 101
Variations in temperature, sensing filament winding group 1021,1022 senses the change of temperature, is converted to resistance
Change, after electric bridge is powered, A/D converter 106 outfan export the corresponding signal of telecommunication, calculate
Go out corresponding gas flow, and for subsequent conditioning circuit, such as CPU 107 processes.
Wherein, non-essential resistance 1031,1032, constant-current source 104, amplifier 105, A/D change
Device 106 and CPU 107, driver part 108 may be disposed on same circuit board 11.Should
Circuit board also provides for power supply 110, and it connects external power source, to provide work to above-mentioned each parts respectively
Make voltage.
On the one hand, need to consume certain electric energy during the work of above-mentioned gas mass flow controller, from
And need to be powered by external power source, use very inconvenient in some scenarios.If power supply electricity
Break down in source or power supply power-fail, system blackout so gas mass flow controller just cannot work
Make, even cause catastrophic consequence.Additionally, in some special occasions, introduce externally fed
Power supply and cable can make system become relative complex, and gas mass flow controller produces because of power supply
Fault probability become geometry level to increase.
Power if gas mass flow controller itself need not external power source, then for gas
For mass flow controller, it is only necessary to an order wire can realize and gas mass flow control
The information of device is mutual, and gas mass flow controller is controlled accordingly according to the command adapted thereto of user
System operation.The most both saved the energy, low-carbon environment-friendly, and in turn simplify system, reduce equipment
Fault rate.
On the other hand, in nature, there is various forms of energy, such as solar energy, the temperature difference
Energy, vibrational energy, wind energy, current energy, electromagnetic energy and bioenergy etc..And for mechanical components or
For structure, its vibrational energy can be captured by energy capture device, converts it to electric energy,
Store for mini electrical equipment.
It will be appreciated by those skilled in the art that the noise in gas mass flow controller working environment or shake
Dynamic nearly ubiquitous, such as automobile causes week through the judder caused, factory's lathe work
Collarette border ceaselessly vibrates.Gas mass flow controller operationally, gas flow through controller with
And the gas piping being attached thereto, all can ceaselessly vibrate.Gas mass flow controller is in not work
When making, due to the vibration effect of surrounding, controller also can do the vibration of certain frequency.In fortune
During defeated, controller itself is also ceaselessly vibrating along with the motion of transporting equipment.If by these
Vibrational energy catches, changes and store, and supply controller itself uses, and can depart from outside dependence
The mode of operation of portion's power supply.
Therefore, expect that in the industry acquisition one is not required to external power source and powers, thus simplified system, reduction
The gas mass flow amount control system of equipment failure rate.
Summary of the invention
It is an object of the invention to provide and a kind of be not required to the gas mass flow control that external power source is powered
System processed.
For achieving the above object, the present invention one technical scheme is as follows:
A kind of gas mass flow amount control system, including: gas mass flow controller, it is with one
Gas piping connects, for measuring or control gaseous mass or the flow of gas coming through pipeline；Energy
Acquisition equipment, for capturing the mechanical energy in gas mass flow amount control system surrounding；With
And, energy storing device, its one end connects energy capture device, for storing the mechanical energy of capture
Amount, its other end is connected with gas mass flow controller, for gas mass flow controller
Power supply；Described energy storing device also includes an external charging interface, is used for by external power source to it
Charging；Described gas mass flow controller, energy capture device are the most single with energy storing device
Solely arranging, described energy capture device is arranged on described gas piping or on external vibration source, and
Its energy captured in transit, is stored by energy storing device and makees accumulation more than needed, remain work
Time use.
Preferably, energy capture device be electrostatic catch can device, electromagnetic type catch can device or piezoelectricity
Formula catches any one in energy device.
Preferably, energy capture device be a piezoelectric type catch can device, it includes a support and many groups
Spring beam, each spring beam is perpendicularly fixed on support, and spring beam at least one side is laid with piezoresistive material
Material, the piezoelectric of each spring beam is connected with energy storing device by circuit respectively.
Preferably, each spring beam is respectively fixed with a mass away from one end of described support.
Preferably, energy storing device is a group storage battery or one group of chargeable lithium cell.
The gas mass flow amount control system that the present invention provides, is not required to external power source and powers, but logical
Cross the vibrational energy in energy capture device capture surrounding, convert it to electric energy, store
For system, thus simplify system, advantageously reduce equipment failure rate；And saved energy
Source, low-carbon environment-friendly, it is simple to popularization and application in industry.
Accompanying drawing explanation
Fig. 1 illustrates a gas mass flow controller structural representation in prior art；
Fig. 2 illustrates the gas mass flow Control system architecture signal that first embodiment of the invention provides
Figure；
Fig. 3 illustrates the energy capture apparatus structure schematic diagram that one embodiment of the invention provides.
Detailed description of the invention
Below in conjunction with the accompanying drawings, the detailed description of the invention of the present invention is described in further detail.
As in figure 2 it is shown, the gas mass flow amount control system that first embodiment of the invention provides includes:
Gas mass flow controller, energy capture device 302 and energy storing device 301.Wherein,
Gas mass flow controller and a gas piping connect, and are used for measuring or control gas coming through pipeline
Gaseous mass or flow；Energy capture device 302 is used for capturing gas mass flow amount control system
Mechanical energy in surrounding；Energy storing device 301, its one end connects energy capture device
302, for storing the mechanical energy of capture, its other end is connected with gas mass flow controller,
For powering to gas mass flow controller.
Specifically, gas mass flow controller includes: gas diverter 200, and it accesses gas
Pipeline leading portion；For the sensor of sense gasses air in pipeline flow, it includes sensor tube 201,
It is in charge of for arm of diverter 200 or bypass, two sensing filament winding groups 2021,2022 with
Two non-essential resistances 2031,2032 form an electric bridge, constant-current source 204 power；Sensor
Sense gasses flow, correspondingly exports analogue signal, through amplifier 205 to A/D converter 206
Being processed by CPU 207, CPU 207 also can carry out data communication with external interface, and by driving
Parts 208 control to adjust the action of valve 209, with adjusting gas flow.This gas mass flow control
In device processed, the performance of each parts can be similar with prior art with purposes.
Wherein, the power-consuming component in gas mass flow controller, it may be assumed that non-essential resistance 2031,2032,
Constant-current source 204, amplifier 205, A/D converter 206 and CPU 207, driver part 208,
Can jointly be arranged on same control circuit plate 21.The sensor of gas mass flow controller,
Regulation valve 209 is adjacent to gas pipeline and arranges, it is simple to measures and controls gas flow.
This control circuit plate 21 is not required to be powered by external power source, and is carried by energy storing device 301
Power supply source, energy storing device 301 stores the electric energy of energy capture device 302 output, for control
Circuit board 21 processed normally works required.
Energy capture device can be that electrostatic catching device, electromagnetic type can be caught and device or piezoelectric type can catch energy
Any one in device.
Preferred implementation according to the above embodiment of the present invention, energy capture device is a piezoelectric type
Catching energy device, it includes a support 40 and many group spring beams 41, as it is shown on figure 3, each spring beam
41 are perpendicularly fixed on support 40, and spring beam 41 at least one side is laid with piezoelectric 411,
The piezoelectric 411 of each spring beam 41 is connected with energy storing device 301 by circuit respectively.
When ambient vibration passes to spring beam 41, spring beam 41 is caused to vibrate.Spring beam 41 exists
During vibration, piezoelectric 411, by physical actions such as tension and compression, produces electric energy, to energy storage dress
Put 301 outputs.Owing to spring beam 41 has a lot of groups, therefore can abundant shaking in capturing ambient
Energy.The vibrational energy that the vibrational energy produced the most at work produces in still transporting, all
Captured by energy capture device 302, thus in any environment, all can produce electric energy.Especially transport
The big energy of defeated middle capture, can be stored by energy storing device 301 and make accumulation more than needed, remain
Use during the work of each power-consuming component on control circuit plate 21.
Further, piezoelectric is piezoelectric ceramics or PZT piezoelectric membrane.
The energy storing device used in this embodiment can be a group storage battery or one group of chargeable lithium
Battery.Further, it also includes an external charging interface, for being charged to it by external power source.
According to the further improvement of above-described embodiment, each spring beam 41 divides away from one end of support 40
It is not fixed with a mass 412, shown in Figure 3, mass 412 on each spring beam 41
Can be different, it is for changing different frequency of vibration, to realize part spring beam 41 with outer
The resonance of vibration source in boundary's environment, to improve the efficiency to vibrational energy capture.
It is appreciated that gas mass flow controller, energy capture device and energy storing device can
Integral property structure.Or, gas mass flow controller, energy capture device store with energy
Device is individually arranged, and energy capture device is arranged on gas piping or on external vibration source.
The gas mass flow amount control system that the above embodiment of the present invention provides is by self-contained
Energy capture device and energy storing device, the mechanical vibrational energy in capture external environment, supply
The power-consuming component that gas mass flow controls uses, and makes mass flow controller become a passive work
Make system.This mass flow control system only needs a communication line can realize and external user
Data interaction, system structure simplify thus advantageously reduce equipment failure rate；And the saving energy,
Low-carbon environment-friendly, it is simple to popularization and application in industry.
It is appreciated that the thought according to the present invention, support 40 can be uniformly distributed multiple spring beam
41, spring beam 41 can be fixed in a face or two faces, the chi of each spring beam 41 of support 40
Very little can identical, also can there are differences, the quality of each mass can identical, also can there are differences, only
Vibrational energy is converted to electric energy, the power consumption of supplied gas mass flow controller by piezoelectric principle to be used
Parts use, and all can realize the intent of the present invention, therefore, should fall into the scope of the present invention.
It is appreciated that above-described embodiment is only a kind of specific implementation of energy capture device, energy
Amount acquisition equipment should not be limited to above-mentioned piezoelectric type and catches energy device, and can be to include that electrostatic catching can fill
Put or electromagnetic type catch can device catch at interior other can device.With in other devices capture external diameter environment
Physical energy, and the power-consuming component of supply gas mass flow controller uses, and is regarded as this
The simple deformation design of invention.
The above-described the preferred embodiments of the present invention that are only, described embodiment also is not used to limit this
The scope of patent protection of invention, the description of the most every utilization present invention and accompanying drawing content are made
Equivalent structure changes, and in like manner should be included in protection scope of the present invention.
Claims (8)
1. a gas mass flow amount control system, including:
Gas mass flow controller, it is connected with a gas piping, flows through for metering or control
The gaseous mass of described gas piping or flow；
Energy capture device, for capturing in described gas mass flow amount control system surrounding
Mechanical energy；And,
Energy storing device, its one end connects described energy capture device, is used for storing described capture
Mechanical energy, its other end is connected with described gas mass flow controller, for described gas
Weight flow controller is powered；Described energy storing device also includes an external charging interface, uses
In being charged to it by external power source；
Described gas mass flow controller, energy capture device are with energy storing device individually
Arranging, described energy capture device is arranged on described gas piping or on external vibration source, and its
The energy captured in transit, is stored by energy storing device and makees accumulation more than needed, when remaining work
Use.
2. gas mass flow amount control system as claimed in claim 1, it is characterised in that institute
State energy capture device be electrostatic catch can device, electromagnetic type catch can device or piezoelectric type catch can device
In any one.
3. gas mass flow amount control system as claimed in claim 2, it is characterised in that institute
Stating energy capture device is that a piezoelectric type catches energy device, and it includes a support and organize spring beam more, respectively
Described spring beam is perpendicularly fixed on described support, and described spring beam at least one side is laid with piezoelectricity
Material, the piezoelectric of each described spring beam is respectively by circuit with described energy storing device even
Connect.
4. gas mass flow amount control system as claimed in claim 3, it is characterised in that institute
Stating piezoelectric is piezoelectric ceramics or PZT piezoelectric membrane.
5. gas mass flow amount control system as claimed in claim 3, it is characterised in that each
Described spring beam is respectively fixed with a mass away from one end of described support.
6. gas mass flow amount control system as claimed in claim 1, it is characterised in that institute
Stating energy storing device is a group storage battery or one group of chargeable lithium cell.
7. the gas mass flow amount control system as according to any one of claim 1 to 6, its
Being characterised by, described gas mass flow controller includes: be connected to described gas piping leading portion
One diverter, be formed as described in sensor tube that a bypass of diverter is in charge of, pile warp the two of sensor tube
Sensing filament winding group and described two sensing filament winding groups form two non-essential resistances of an electric bridge, for institute
State a constant-current source, an amplifier, an A/D converter and a CPU, a driving that electric bridge is powered
Parts, be connected to described gas piping back segment one regulation valve, wherein, described sensor tube sensing stream
Through the gas flow of described gas piping, described sensing filament winding group exports corresponding to described gas flow
Analogue signal, amplify through described amplifier, then through described A/D converter be converted to numeral letter
Number, described CPU processes described digital signal, and controls described regulation valve by described driver part,
To regulate the gas flow in described gas piping.
8. gas mass flow amount control system as claimed in claim 7, it is characterised in that institute
State gas mass flow controller, energy capture device and energy storing device integral property structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310750547.9A CN103728991B (en) | 2013-12-31 | 2013-12-31 | Gas mass flow control system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310750547.9A CN103728991B (en) | 2013-12-31 | 2013-12-31 | Gas mass flow control system |
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| CN103728991A CN103728991A (en) | 2014-04-16 |
| CN103728991B true CN103728991B (en) | 2017-01-11 |
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| CN104571149B (en) * | 2014-06-12 | 2017-10-17 | 北京七星华创电子股份有限公司 | Mass flow control appts and control method for the integrated induction system of gas |
| CN106774467A (en) * | 2016-12-21 | 2017-05-31 | 北京七星华创电子股份有限公司 | A kind of gas mass flow amount control system with automatic diagnostic function |
| CN109428510A (en) * | 2017-08-25 | 2019-03-05 | 青岛因菲尼思微电子科技有限公司 | A kind of gas gauge based on fluid energy collector |
| CN110735930A (en) * | 2018-07-18 | 2020-01-31 | 北京七星华创流量计有限公司 | Gas flow regulating device and mass flow controller |
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| US6823268B2 (en) * | 2002-02-04 | 2004-11-23 | Avl North America Inc. | Engine exhaust emissions measurement correction |
| JP4974000B2 (en) * | 2007-10-01 | 2012-07-11 | 日立金属株式会社 | Mass flow controller and actual gas mass flow control method |
| EP2458348B1 (en) * | 2010-11-29 | 2013-08-14 | Air Products And Chemicals, Inc. | Method of, and apparatus for, measuring the mass flow rate of a gas |
| US8863589B2 (en) * | 2011-05-02 | 2014-10-21 | Endress + Hauser Flowtec Ag | Measuring transducer of vibration type and measuring system |
| CN202404454U (en) * | 2011-11-18 | 2012-08-29 | 北京七星华创电子股份有限公司 | Novel sensor based flow adjusting system |
| CN202948334U (en) * | 2012-12-12 | 2013-05-22 | 北京七星华创电子股份有限公司 | Solar mass flow controller |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: BEIJING SEVENSTAR ELECTRONICS Co.,Ltd. |
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