CN103728991A - Gas mass flow control system - Google Patents
Gas mass flow control system Download PDFInfo
- Publication number
- CN103728991A CN103728991A CN201310750547.9A CN201310750547A CN103728991A CN 103728991 A CN103728991 A CN 103728991A CN 201310750547 A CN201310750547 A CN 201310750547A CN 103728991 A CN103728991 A CN 103728991A
- Authority
- CN
- China
- Prior art keywords
- mass flow
- gas mass
- energy
- control system
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention relates to a gas mass flow control system. The gas mass flow control system comprises a gas mass flow controller, an energy capturing device and an energy storage device. The gas mass flow controller is connected with a gas pipeline and used for metering or controlling the mass or the flow of gas passing through the gas pipeline, the energy capturing device is used for capturing the mechanical energy in the surrounding environment of the gas mass flow control system, one end of the energy storage device is connected with the energy capturing device and used for storing the captured mechanical energy and the other end of the energy storage device is connected with the gas mass flow controller and used for supplying power to the gas mass flow controller. An external power source does not need to be used for supplying power to the gas mass flow control system, therefore, the system is simplified and the equipment failure rate can be lowered easily; the gas mass flow control system saves energy, and is low in carbon emission, environmentally friendly and convenient to popularize and apply in the industry.
Description
Technical field
The present invention relates to gas flow control technology field, more particularly, relate to a kind of gas mass flow amount control system.
Background technology
Gas mass flow controller (Mass Flow Controller, be called for short MFC) for gas mass flow is carried out to precision measurement and control, be mainly used in the research and production of the multiple fields such as semiconductor integrated circuit technique, special material, chemical industry, petroleum industry, medicine, environmental protection and vacuum.The gas mass flow controller that prior art provides is comprised of shunt, sensor, Electromagnetic Flow variable valve and CPU, driving, control circuit board, and Fig. 1 illustrates the module map of this gas mass flow controller.
Gas flow is through shunt 100, again through being connected to the gas pipeline output of variable valve 109, wherein, shunt 100 is used in conjunction with sensor, sensor generally includes a sensing pipe 101 being connected with shunt and two sensing filament winding groups 1021, 1022, sensing pipe 101 is in charge of for an arm or the bypass of shunt 100, two sensing filament winding groups 1021, 1022 and two non-essential resistances 1031, 1032 form an electric bridge, by constant current source 104, powered, output signal is processed by CPU107 through amplifier 105 to A/D converter 106, CPU107 also can carry out data communication with external interface, and open/close action by driver part 108 regulating and controlling valves 109.During work, small part of gas flows through by sensing pipe 101, with flowing through the difference of flow, at sensing pipe 101, produce the temperature variation of different range, sensing filament winding group 1021,1022 senses the variation of temperature, be converted to the variation of resistance, after electric bridge power supply, A/D converter 106 output terminals are exported corresponding electric signal, calculate corresponding gas flow, and for subsequent conditioning circuit, for example CPU107 processes.
Wherein, non-essential resistance 1031,1032, constant current source 104, amplifier 105, A/D converter 106 and CPU107, driver part 108 can be arranged on same circuit board 11.This circuit board also provides power supply 110, and it connects external power source, to provide operating voltage to above-mentioned each parts respectively.
On the one hand, during the work of above-mentioned gas mass flow controller, need to consume certain electric energy, thereby need to, by external power source, use in some scenarios very inconvenient.If power supply breaks down or power supply power-fail, system blackout so gas mass flow controller just cannot work, even cause catastrophic consequence.In addition, in some special occasions, introduce externally fed power supply and cable and can make the system relative complex that becomes, the fault probability that gas mass flow controller produces because of power supply becomes how much levels to increase.
If gas mass flow controller itself does not need external power source, so for gas mass flow controller, only need an order wire can realize the information interaction with gas mass flow controller, gas mass flow controller carries out corresponding control operation according to user's command adapted thereto.So both saved the energy, low-carbon environment-friendly, and simplified again system, reduced the failure rate of equipment.
On the other hand, at occurring in nature, exist various forms of energy, as sun power, thermal gradient energy, energy of vibration, wind energy, water flow energy, electromagnetic energy and biological energy source etc.And for mechanical components and parts or structure, its vibrational energy can be caught by energy capture device, convert it to electric energy, store for mini electrical equipment.
It will be appreciated by those skilled in the art that noise in gas mass flow controller working environment or vibration are almost ubiquitous, for example automobile causes that through judder, the factory's lathe work causing surrounding environment ceaselessly vibrates.Gas mass flow controller is when work, and the gas piping that gas flow is crossed controller and is attached thereto, all can ceaselessly vibrate.Gas mass flow controller is not when working, and due to the vibration effect of surrounding environment, controller also can be done the vibration of certain frequency.In transportation, controller itself is along with the motion of transportation equipment is also ceaselessly being vibrated.If these vibrational energies are caught, changed and storage, and supply with controller itself and use, can depart from the mode of operation that relies on external power source.
Therefore, expectation acquisition is a kind of in the industry does not need external power source, thus the gas mass flow amount control system of simplification system, reduction equipment failure rate.
Summary of the invention
The object of the present invention is to provide a kind of gas mass flow amount control system that does not need external power source.
For achieving the above object, the present invention's one technical scheme is as follows:
A gas mass flow amount control system, comprising: gas mass flow controller, and it is connected with a gas piping, for measuring or control gaseous mass or the flow of gas coming through pipeline; Energy capture device, for catching the mechanical energy of gas mass flow amount control system surrounding environment; And, energy storing device, its one end connects energy capture device, and for storing the mechanical energy of catching, its other end is connected with gas mass flow controller, for powering to gas mass flow controller.
Preferably, energy capture device be electrostatic catch can device, electromagnetic type catch can device or piezoelectric type catch any in can device.
Preferably, energy capture device is that a piezoelectric type is caught energy device, and it comprises a support and many group elastic beams, and each elastic beam is vertically fixed on support, at least one side of elastic beam is laid with piezoelectric, and the piezoelectric of each elastic beam is connected with energy storing device by circuit respectively.
Preferably, each elastic beam is fixed with respectively a mass away from one end of described support.
Preferably, energy storing device is a group storage battery or one group of chargeable lithium cell.
Gas mass flow amount control system provided by the invention, do not need external power source, but catch the vibrational energy in surrounding environment by energy capture device, convert it to electric energy, store for system, thereby simplified system, be conducive to reduce equipment failure rate; And saved the energy, low-carbon environment-friendly, be convenient in industry apply.
Accompanying drawing explanation
Fig. 1 illustrates a gas mass flow controller structural representation in prior art;
Fig. 2 illustrates the gas mass flow amount control system structural representation that first embodiment of the invention provides;
Fig. 3 illustrates the energy capture apparatus structure schematic diagram that one embodiment of the invention provides.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
As shown in Figure 2, the gas mass flow amount control system that first embodiment of the invention provides comprises: gas mass flow controller, energy capture device 302 and energy storing device 301.Wherein, gas mass flow controller is connected with a gas piping, for measuring or control gaseous mass or the flow of gas coming through pipeline; Energy capture device 302 is for catching the mechanical energy of gas mass flow amount control system surrounding environment; Energy storing device 301, its one end connects energy capture device 302, and for storing the mechanical energy of catching, its other end is connected with gas mass flow controller, for powering to gas mass flow controller.
Particularly, gas mass flow controller comprises: gas diverter 200, its access gas pipeline leading portion; Sensor for sense gasses air in pipeline flow, it comprises sensing pipe 201, it is in charge of for an arm or the bypass of shunt 200, and 2021,2022 and two non-essential resistances of two sensing filament winding groups 2031,2032 form an electric bridge, by constant current source 204, are powered; Sensor sense gasses flow, correspondingly outputting analog signal, is processed by CPU207 to A/D converter 206 through amplifier 205, and CPU207 also can carry out data communication with external interface, and by the action of driver part 208 regulating and controlling valves 209, with adjusting gas flow.In this gas mass flow controller the properties and applications of each parts can with prior art scheme in similar.
Wherein, the power consumption parts in gas mass flow controller, that is: non-essential resistance 2031,2032, constant current source 204, amplifier 205, A/D converter 206 and CPU207, driver part 208, can be arranged on same control circuit board 21 jointly.The sensor of gas mass flow controller, variable valve 209 are adjacent to gas pipeline setting, are convenient to measure and control gas flow.
This control circuit board 21 need be by external power source, and provides power supply by energy storing device 301, and the electric energy of energy storing device 301 stored energy acquisition equipments 302 outputs is required for the normal work of control circuit board 21.
Energy capture device can be electrostatic catch can device, electromagnetic type catch can device or piezoelectric type catch any in can device.
Preferred implementation according to the above embodiment of the present invention, energy capture device is that a piezoelectric type is caught energy device, it comprises a support 40 and many group elastic beams 41, as shown in Figure 3, each elastic beam 41 is vertically fixed on support 40, at least one side of elastic beam 41 is laid with piezoelectric 411, and the piezoelectric 411 of each elastic beam 41 is connected with energy storing device 301 by circuit respectively.
When ambient vibration passes to elastic beam 41, cause elastic beam 41 vibrations.Elastic beam 41 is when vibration, and piezoelectric 411 is subject to the physical actions such as tension and compression, produces electric energy, to energy storing device 301 outputs.Because elastic beam 41 has a lot of groups, the therefore abundant vibrational energy in capturing ambient.Be no matter the vibrational energy producing in the energy of vibration that produces at work or transportation, all by energy capture device 302, caught, thereby all can produce electric energy in any environment.Especially the large energy of catching in transportation, can be stored and be done accumulation more than needed by energy storing device 301, while waiting until on control circuit board 21 each power consumption component working, uses.
Further, piezoelectric is piezoelectric ceramics or PZT piezoelectric membrane.
The energy storing device adopting in this embodiment can be a group storage battery or one group of chargeable lithium cell.Further, it also comprises an external charging interface, for being charged to it by external power source.
According to the further improvement of above-described embodiment, each elastic beam 41 is fixed with respectively a mass 412 away from one end of support 40, shown in Figure 3, mass 412 on each elastic beam 41 can be different, it is for changing different vibration frequencies, to realize the resonance of vibration source in part elastic beam 41 and external environment, to improve the efficiency that vibrational energy is caught.
Be appreciated that gas mass flow controller, energy capture device and being integral property of energy storing device structure.Or gas mass flow controller, energy capture device and energy storing device arrange separately respectively, energy capture device be arranged on gas piping or external vibration source on.
The gas mass flow amount control system that the above embodiment of the present invention provides is by self-contained energy capture device and energy storing device, catch the mechanical vibrational energy in external environment, the power consumption parts that supply gas mass rate is controlled are used, and make mass flow controller become a passive work system.This mass rate control system only needs a communication line can realize the data interaction with external user, thereby system architecture is simplified and is conducive to reduce equipment failure rate; And save the energy, low-carbon environment-friendly, be convenient in industry apply.
Be appreciated that, according to thought of the present invention, on support 40, can be uniformly distributed a plurality of elastic beams 41, elastic beam 41 can be fixed in a face or two faces of support 40, and the size of each elastic beam 41 can be identical, also can there are differences, the quality of each mass can be identical, also can there are differences, as long as adopt piezoelectric principle that vibrational energy is converted to electric energy, the power consumption parts of supplied gas mass flow controller are used, and all can realize the intent of the present invention, therefore, should fall into scope of the present invention.
Be appreciated that above-described embodiment is only a kind of specific implementation of energy capture device, energy capture device should not be limited to that above-mentioned piezoelectric type catches can device, and can be comprise electrostatic catch can device or electromagnetic type catch can device other catch can device.With other devices, catch the physical energy in external diameter environment, and the use of the power consumption parts of supply gas mass flow controller, all should be considered as simple deformation design of the present invention.
Above-described is only the preferred embodiments of the present invention; described embodiment is not in order to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization instructions of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.
Claims (10)
1. a gas mass flow amount control system, comprising:
Gas mass flow controller, it is connected with a gas piping, for measuring or control flow through gaseous mass or the flow of described gas piping;
Energy capture device, for catching the mechanical energy of described gas mass flow amount control system surrounding environment; And,
Energy storing device, its one end connects described energy capture device, and for the mechanical energy of catching described in storing, its other end is connected with described gas mass flow controller, for to described gas mass flow controller power supply.
2. gas mass flow amount control system as claimed in claim 1, is characterized in that, described energy capture device be electrostatic catch can device, electromagnetic type catch can device or piezoelectric type catch any in can device.
3. gas mass flow amount control system as claimed in claim 2, it is characterized in that, described energy capture device is that a piezoelectric type is caught energy device, it comprises a support and many group elastic beams, described in each, elastic beam is vertically fixed on described support, at least one side of described elastic beam is laid with piezoelectric, and described in each, the piezoelectric of elastic beam is connected with described energy storing device by circuit respectively.
4. gas mass flow amount control system as claimed in claim 3, is characterized in that, described piezoelectric is piezoelectric ceramics or PZT piezoelectric membrane.
5. gas mass flow amount control system as claimed in claim 3, is characterized in that, described in each, elastic beam is fixed with respectively a mass away from one end of described support.
6. gas mass flow amount control system as claimed in claim 1, is characterized in that, described energy storing device is a group storage battery or one group of chargeable lithium cell.
7. gas mass flow amount control system as claimed in claim 6, is characterized in that, described energy storing device also comprises an external charging interface, for being charged to it by external power source.
8. the gas mass flow amount control system as described in any one in claim 1 to 7, it is characterized in that, described gas mass flow controller comprises: a shunt that is connected in described gas piping leading portion, form the sensing pipe that a bypass of shunt is in charge of, two sensing filament winding groups of sensing pipe described in pile warp, form two non-essential resistances of an electric bridge with described two sensing filament winding groups, for the constant current source to described electric bridge power supply, one amplifier, one A/D converter and a CPU, one driver part, be connected in a variable valve of described gas piping back segment, wherein, described sensing pipe senses flow is through the gas flow of described gas piping, described sensing filament winding group output is corresponding to the simulating signal of described gas flow, through described amplifier, amplify, through described A/D converter, be converted to digital signal again, described CPU processes described digital signal, and control described variable valve by described driver part, to regulate the gas flow in described gas piping.
9. gas mass flow amount control system as claimed in claim 8, is characterized in that, described gas mass flow controller, energy capture device and being integral property of energy storing device structure.
10. gas mass flow amount control system as claimed in claim 8, it is characterized in that, described gas mass flow controller, energy capture device and energy storing device arrange separately respectively, and described energy capture device is arranged on described gas piping or on external vibration source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310750547.9A CN103728991B (en) | 2013-12-31 | 2013-12-31 | Gas mass flow control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310750547.9A CN103728991B (en) | 2013-12-31 | 2013-12-31 | Gas mass flow control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103728991A true CN103728991A (en) | 2014-04-16 |
| CN103728991B CN103728991B (en) | 2017-01-11 |
Family
ID=50453105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310750547.9A Active CN103728991B (en) | 2013-12-31 | 2013-12-31 | Gas mass flow control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103728991B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104571149A (en) * | 2014-06-12 | 2015-04-29 | 北京七星华创电子股份有限公司 | Mass flow control device and control method for integrated gas conveying system |
| CN106774467A (en) * | 2016-12-21 | 2017-05-31 | 北京七星华创电子股份有限公司 | A kind of gas mass flow amount control system with automatic diagnostic function |
| CN109428510A (en) * | 2017-08-25 | 2019-03-05 | 青岛因菲尼思微电子科技有限公司 | A kind of gas gauge based on fluid energy collector |
| WO2020014995A1 (en) * | 2018-07-18 | 2020-01-23 | 北京七星华创流量计有限公司 | Gas flow regulation apparatus and mass flow controller |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1333270A1 (en) * | 2002-02-04 | 2003-08-06 | AVL List GmbH | Exhaust emissions analysis system |
| JP4974000B2 (en) * | 2007-10-01 | 2012-07-11 | 日立金属株式会社 | Mass flow controller and actual gas mass flow control method |
| CN202404454U (en) * | 2011-11-18 | 2012-08-29 | 北京七星华创电子股份有限公司 | Novel sensor based flow adjusting system |
| US20120279317A1 (en) * | 2011-05-02 | 2012-11-08 | Endress + Hauser Flowtec Ag | Measuring transducer of vibration type and measuring system |
| CN202948334U (en) * | 2012-12-12 | 2013-05-22 | 北京七星华创电子股份有限公司 | Solar mass flow controller |
| CN103328937A (en) * | 2010-11-29 | 2013-09-25 | 气体产品与化学公司 | Method and apparatus for measuring the mass flow rate of a gas |
-
2013
- 2013-12-31 CN CN201310750547.9A patent/CN103728991B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1333270A1 (en) * | 2002-02-04 | 2003-08-06 | AVL List GmbH | Exhaust emissions analysis system |
| JP4974000B2 (en) * | 2007-10-01 | 2012-07-11 | 日立金属株式会社 | Mass flow controller and actual gas mass flow control method |
| CN103328937A (en) * | 2010-11-29 | 2013-09-25 | 气体产品与化学公司 | Method and apparatus for measuring the mass flow rate of a gas |
| US20120279317A1 (en) * | 2011-05-02 | 2012-11-08 | Endress + Hauser Flowtec Ag | Measuring transducer of vibration type and measuring system |
| CN202404454U (en) * | 2011-11-18 | 2012-08-29 | 北京七星华创电子股份有限公司 | Novel sensor based flow adjusting system |
| CN202948334U (en) * | 2012-12-12 | 2013-05-22 | 北京七星华创电子股份有限公司 | Solar mass flow controller |
Non-Patent Citations (1)
| Title |
|---|
| 陈文艺等: "微型振动能量收集器的研究现状及发展趋势", 《微纳电子技术》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104571149A (en) * | 2014-06-12 | 2015-04-29 | 北京七星华创电子股份有限公司 | Mass flow control device and control method for integrated gas conveying system |
| CN104571149B (en) * | 2014-06-12 | 2017-10-17 | 北京七星华创电子股份有限公司 | Mass flow control appts and control method for the integrated induction system of gas |
| CN106774467A (en) * | 2016-12-21 | 2017-05-31 | 北京七星华创电子股份有限公司 | A kind of gas mass flow amount control system with automatic diagnostic function |
| CN109428510A (en) * | 2017-08-25 | 2019-03-05 | 青岛因菲尼思微电子科技有限公司 | A kind of gas gauge based on fluid energy collector |
| WO2020014995A1 (en) * | 2018-07-18 | 2020-01-23 | 北京七星华创流量计有限公司 | Gas flow regulation apparatus and mass flow controller |
| US11320055B2 (en) | 2018-07-18 | 2022-05-03 | Beijing Sevenstar Flow Co., Ltd. | Gas flow regulating device and mass flow controller |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103728991B (en) | 2017-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103728991B (en) | Gas mass flow control system | |
| CN104836478B (en) | A kind of piezoelectricity electromagnetism combined type broad band low frequency energy accumulator | |
| Fan et al. | Design and experimental verification of a bi-directional nonlinear piezoelectric energy harvester | |
| CN102227868B (en) | Vibration power generator, vibration power generating apparatus, and communication apparatus having vibration power generating apparatus mounted thereon | |
| KR101709886B1 (en) | Sensor device and monitoring system | |
| CN103731065B (en) | Based on the self-powered type wireless tunnel health monitoring device of vibrating power-generation | |
| WO2021017850A1 (en) | Loudspeaker system and electronics device | |
| Wang et al. | Broadband vibration energy harvesting for wireless sensor node power supply in train container | |
| CN103176091A (en) | System and method for electric leakage detection of electronic device | |
| JP2016526774A (en) | Method for controlling air flow in a fuel cell power system | |
| CN101702594A (en) | Field apparatus with process automation facility for acquiring electric energy locally | |
| CN102565520A (en) | Battery voltage measurement system and battery voltage measurement method | |
| US20130154599A1 (en) | Methods for Reducing Power Consumption of Electronic Systems | |
| CN209088587U (en) | A kind of buffer starting device of electric power supply system of fuel cell | |
| Yang et al. | Investigation on behavior of the vibration-based piezoelectric energy harvester array in ultracapacitor charging | |
| EL HMAMSY et al. | Study and design the circuit for piezoelectric vibration energy harvester to charge a datalogger | |
| CN104158435A (en) | Efficient piezoelectric generator | |
| Fan et al. | Performance of a multipurpose piezoelectric energy harvester | |
| KR102356691B1 (en) | Energy harvesting system using multiple ambient energy sources | |
| Park et al. | Development of piezoelectric energy harvesting modules for impedance-based wireless structural health monitoring system | |
| CN202486120U (en) | Gas balance device | |
| CN112923008A (en) | Magnetorheological damping integrated device and Internet of things system | |
| CN208226298U (en) | A kind of power supply unit and constant-current source of semiconductor laser | |
| CN207853562U (en) | A kind of load condition monitoring device micro-capacitance sensor early period | |
| CN202856446U (en) | Power supply switcher |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: BEIJING SEVENSTAR ELECTRONICS Co.,Ltd. |
|
| CP03 | Change of name, title or address |