CN103728157A - Sampling system of iodine pentafluoride or antimony fluoride - Google Patents
Sampling system of iodine pentafluoride or antimony fluoride Download PDFInfo
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- CN103728157A CN103728157A CN201310726784.1A CN201310726784A CN103728157A CN 103728157 A CN103728157 A CN 103728157A CN 201310726784 A CN201310726784 A CN 201310726784A CN 103728157 A CN103728157 A CN 103728157A
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Abstract
The invention discloses a sampling system of iodine pentafluoride or antimony fluoride. The sampling system comprises a liquid storage pot, a nitrogen decompressor, a sampling bottle and a pumping negative pressure device, wherein the upper end of the liquid storage pot is provided with an air inlet/outlet, a material inlet/outlet, an inlet/outlet pipe; one end of the inlet/outlet pipe stretches into the liquid of the liquid storage pot, and the other end of the inlet/outlet pipe is connected with the material inlet/outlet; the nitrogen decompressor comprises a high pressure nitrogen cylinder and a gas dryer, one end of the gas dryer is communicated with an air outlet of the high pressure nitrogen cylinder through a pipeline, the other end of the gas dryer is communicated with the air inlet/outlet arranged on the liquid storage pot through the pipeline, and a bottle port of the sampling bottle is provided with a choke plug, a feeding pipe and an exhaust pipe are inserted on the choke plug, one end of the feeding pipe stretches into the bottom end of the sampling bottle, and the other end of the feeding pipe is communicated with the liquid storage pot through the pipeline; and the pumping negative pressure device comprises a vacuum machine and an air exhaust cover, the air exhaust cover is mutually communicated with a pumping port of the vacuum machine, and the air exhaust cover is positioned on the upper end of the sampling bottle. The sampling system provided by the invention has the advantages that the sampling is safe and reliable, the operation is easy, and the environment is not polluted.
Description
Technical field
The present invention relates to the sampling system of iodine pentafluoride or antimony pentafluoride.
Background technology
1. iodine pentafluoride
Proterties: be the colourless toxic liquid of corrosivity with pungent odour under normal temperature and pressure.
Dissolubility: can be hydrolyzed very soon in water and generate hydrofluorite and acid iodide.
Stability: the better heat stability of iodine pentafluoride only just can resolve into iodine and iodine heptafluoride at the temperature that is greater than 400 ℃.Even if the Long contact time such as argent, magnesium, copper, iron are little and IF5 effect also.But nonmetal sulphur, selenium, tellurium, phosphorus, silicon, arsenic, boron etc. at room temperature, just can react with IF5 and generate corresponding fluoride.
The toxicity of iodine pentafluoride is the spitting image of the toxicity of fluorine.Its steam pungency is extremely strong.After suction, can cause the symptoms such as asthma, cough, acute respiratory inflammation, larynx or bronchial spasm, pulmonary edema.Other is referring to hydrogen fluoride.
2. antimony pentafluoride
Antimony pentafluoride, hazardous chemical.Be mainly used in producing antimonial.Mankind's eyes, skin, mucous membrane and respiratory tract are had to strong impulse effect.Suction may be due to larynx, bronchial spasm, oedema, inflammation, chemical pneumonia, pulmonary edema and lethal.In addition, for environment, also there is certain harm.
Be heated or meet water decomposition heat release, emitting poisonous corrosive fume.Be corrosive.With a lot of compound vigorous reactions, usually discharge poisonous hydrogen fluoride, it almost produces and reacts with at present known all compounds.
Owing to all thering is the colourless toxic liquid of corrosivity of pungent odour under iodine pentafluoride and antimony pentafluoride normal temperature and pressure, be heated or meet water decomposition heat release, emitting poisonous corrosive fume, be corrosive, therefore when general sampling, can affect operating personnel's safety, simultaneously contaminated environment.
Summary of the invention
Goal of the invention of the present invention is to solve the problems of the technologies described above, provide a kind of guarantee sampling safe, reliable, can operate, iodine pentafluoride free from environmental pollution or the sampling system of antimony pentafluoride again.
In order to realize foregoing invention object, the technological means that the present invention adopts is:
A sampling system for iodine pentafluoride or antimony pentafluoride, comprises fluid reservoir, nitrogen decompressor, sampling jar and takes out negative pressure device;
Described fluid reservoir upper end is provided with air inlet/outlet, feed inlet and outlet and feed and exhaust tube, and described feed and exhaust tube one end is stretched in the liquid of fluid reservoir, and the other end connects feed inlet and outlet;
Nitrogen decompressor comprises high-pressure nitrogen bottle and gas flow dryer, described gas flow dryer one end is by the gas outlet of pipeline communication high-pressure nitrogen bottle, the other end is by the air inlet/outlet on pipeline communication fluid reservoir, in corresponding pipeline, be respectively equipped with controlled valve, the gas outlet of described nitrogen cylinder is provided with reduction valve, and the controlled valve between described gas flow dryer and the gas outlet of high-pressure nitrogen bottle is the first valve;
The bottleneck of described sampling jar is provided with plug, is plugged with feed pipe and gas outlet on described plug, and sampling jar bottom is stretched in described feed pipe one end, the be open to the custom feed inlet and outlet of pipeline and fluid reservoir of the other end, and pipeline is provided with controlled valve;
The described negative pressure device of taking out comprises vacuum machine and draft hood, and described draft hood is connected with the bleeding point of vacuum machine, and draft hood is positioned at sampling jar upper end.
In order effectively to control gaseous tension, the present invention further optimizes, and the controlled valve between the air inlet/outlet on described gas flow dryer and fluid reservoir is two, and series connection arranges, and is respectively the second valve and the 3rd valve; Controlled valve between feed inlet and outlet on fluid reservoir and the feed pipe of sampling jar is two, and series connection arranges, and is respectively the 4th valve and the 5th valve; Between described the second valve and the 3rd valve, by between a pipeline and the 4th valve and the 5th valve, be connected, this pipeline is provided with a controlled valve, is the 6th valve.
Wherein, the volume of described sampling jar is 500ml.
Beneficial effect of the present invention is: by controlling nitrogen pressure, extrude setting sample to sampling jar, whole operation is by taking out negative pressure device control, mainly to have poison gas to be taken out negative pressure device to take away for what guarantee to come up, and free from environmental pollution, extremely simple, safety and reliable that while personnel operate.
Accompanying drawing explanation
Fig. 1 is the structural representation of sampling system of the present invention;
Wherein,
1: high-pressure nitrogen bottle; 11: reduction valve;
2: gas flow dryer;
3: fluid reservoir; 31: air inlet/outlet; 32: feed inlet and outlet; 33: feed and exhaust tube;
4: sampling jar; 41: plug; 42:: feed pipe; 43: gas outlet;
5: draft hood; 6: vacuum machine;
71: the first valves; 72: the second valves; 73: the three valves; 74: the four valves; 75: the five valves; 76: the six valves.
Embodiment
By describing technology contents of the present invention, structural attitude in detail, being realized object and effect, below in conjunction with embodiment and coordinate accompanying drawing to be explained in detail.
See also Fig. 1, as shown in the figure, the sampling system of iodine pentafluoride of the present invention or antimony pentafluoride, comprises fluid reservoir 3, nitrogen decompressor, sampling jar 4 and takes out negative pressure device; Described fluid reservoir 3 upper ends are provided with air inlet/outlet 31, feed inlet and outlet 32 and feed and exhaust tube 33, and described feed and exhaust tube 33 one end are stretched in the liquid of fluid reservoir 3, and the other end connects feed inlet and outlet 32; Nitrogen decompressor comprises high-pressure nitrogen bottle 1 and gas flow dryer 2, described gas flow dryer 2 one end are by the gas outlet of pipeline communication high-pressure nitrogen bottle 1, the other end is by the air inlet/outlet 31 on pipeline communication fluid reservoir 3, in corresponding pipeline, be respectively equipped with controlled valve, the gas outlet of described nitrogen cylinder 1 is provided with reduction valve 11, and the controlled valve between described gas flow dryer 2 and the gas outlet of high-pressure nitrogen bottle 1 is the first valve 71; The volume of described sampling jar 4 is 500ml, the bottleneck of sampling jar 4 is provided with plug 41, is plugged with feed pipe 42 and gas outlet 43 on described plug 41, and sampling jar bottom is stretched in described feed pipe 42 one end, the be open to the custom feed inlet and outlet 32 of pipeline and fluid reservoir 3 of the other end, pipeline is provided with controlled valve; The described negative pressure device of taking out comprises vacuum machine 6 and draft hood 5, and described draft hood 5 is connected with the bleeding point of vacuum machine 5, and draft hood 5 is positioned at sampling jar 4 upper ends.
In the present embodiment, in order effectively to control gaseous tension, the controlled valve between the air inlet/outlet 31 on described gas flow dryer 2 and fluid reservoir 3 is two, and series connection arranges, and is respectively the second valve 72 and the 3rd valve 73; Controlled valve between feed inlet and outlet 32 on fluid reservoir 3 and the feed pipe 42 of sampling jar 4 is two, and series connection arranges, and is respectively the 4th valve 74 and the 5th valve 75; Between described the second valve 72 and the 3rd valve 73, by between a pipeline and the 4th valve 71 and the 5th valve 75, be connected, this pipeline is provided with a controlled valve, is the 6th valve 76.
By said structure, sampling operation method:
Suppress: lay successively reduction valve, the first valve and the second valve, and regulate reduction valve top hole pressure to be less than 0.1mpa, then open the 3rd valve, until pressure steadily after and remain on 0.05-0.1mpa, close successively the 3rd valve, the second valve, the first valve and reduction valve.
Sampling: after fluid reservoir is suppressed, start and take out negative pressure device, sampling jar is installed, sampling jar is positioned over draft hood lower end, opens the 4th valve, more slowly opens the 5th valve, samples.
Purge: after sampling amount reaches requirement, close the 5th valve and the 4th valve, rear slow unlatching the 6th valve, after the material in stopple coupon purges totally completely, closes after the 6th valve, screws off immediately sampling jar, covers bottle cap, and screws on an empty bottle at once.Now whole operation all can not from draft hood too away from, be mainly to have poison gas to be taken out negative pressure device to take away for what guarantee to come up, and free from environmental pollution.By controlling nitrogen pressure, extrude setting sample to sampling jar, whole operation is by taking out negative pressure device control, and free from environmental pollution, while personnel operate extremely simply, safety and reliable.
The foregoing is only embodiments of the invention; not thereby limit the scope of the claims of the present invention; every equivalent structure or conversion of equivalent flow process that utilizes instructions of the present invention and accompanying drawing content to do; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (3)
1. a sampling system for iodine pentafluoride or antimony pentafluoride, is characterized in that, comprises fluid reservoir, nitrogen decompressor, sampling jar and takes out negative pressure device;
Described fluid reservoir upper end is provided with air inlet/outlet, feed inlet and outlet and feed and exhaust tube, and described feed and exhaust tube one end is stretched in the liquid of fluid reservoir, and the other end connects feed inlet and outlet;
Nitrogen decompressor comprises high-pressure nitrogen bottle and gas flow dryer, described gas flow dryer one end is by the gas outlet of pipeline communication high-pressure nitrogen bottle, the other end is by the air inlet/outlet on pipeline communication fluid reservoir, in corresponding pipeline, be respectively equipped with controlled valve, the gas outlet of described nitrogen cylinder is provided with reduction valve, and the controlled valve between described gas flow dryer and the gas outlet of high-pressure nitrogen bottle is the first valve;
The bottleneck of described sampling jar is provided with plug, is plugged with feed pipe and gas outlet on described plug, and sampling jar bottom is stretched in described feed pipe one end, the be open to the custom feed inlet and outlet of pipeline and fluid reservoir of the other end, and pipeline is provided with controlled valve;
The described negative pressure device of taking out comprises vacuum machine and draft hood, and described draft hood is connected with the bleeding point of vacuum machine, and draft hood is positioned at sampling jar upper end.
2. the sampling system of iodine pentafluoride according to claim 1 or antimony pentafluoride, is characterized in that, the controlled valve between the air inlet/outlet on described gas flow dryer and fluid reservoir is two, and series connection arranges, and is respectively the second valve and the 3rd valve; Controlled valve between feed inlet and outlet on fluid reservoir and the feed pipe of sampling jar is two, and series connection arranges, and is respectively the 4th valve and the 5th valve; Between described the second valve and the 3rd valve, by between a pipeline and the 4th valve and the 5th valve, be connected, this pipeline is provided with a controlled valve, is the 6th valve.
3. the sampling system of iodine pentafluoride according to claim 1 or antimony pentafluoride, is characterized in that, the volume of described sampling jar is 500ml.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310726784.1A CN103728157A (en) | 2013-12-25 | 2013-12-25 | Sampling system of iodine pentafluoride or antimony fluoride |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310726784.1A CN103728157A (en) | 2013-12-25 | 2013-12-25 | Sampling system of iodine pentafluoride or antimony fluoride |
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| CN103728157A true CN103728157A (en) | 2014-04-16 |
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| CN201310726784.1A Pending CN103728157A (en) | 2013-12-25 | 2013-12-25 | Sampling system of iodine pentafluoride or antimony fluoride |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019040554A1 (en) * | 2017-08-22 | 2019-02-28 | Praxair Technology, Inc. | Antimony-containing materials for ion implantation |
| US11098402B2 (en) | 2017-08-22 | 2021-08-24 | Praxair Technology, Inc. | Storage and delivery of antimony-containing materials to an ion implanter |
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| US10711343B2 (en) | 2017-08-22 | 2020-07-14 | Praxair Technology, Inc. | Storage and delivery of antimony-containing materials to an ion implanter |
| US11098402B2 (en) | 2017-08-22 | 2021-08-24 | Praxair Technology, Inc. | Storage and delivery of antimony-containing materials to an ion implanter |
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Application publication date: 20140416 |
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