CN103727167A - Smart vibration isolator for micro-vibration control - Google Patents
Smart vibration isolator for micro-vibration control Download PDFInfo
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- CN103727167A CN103727167A CN201410031922.9A CN201410031922A CN103727167A CN 103727167 A CN103727167 A CN 103727167A CN 201410031922 A CN201410031922 A CN 201410031922A CN 103727167 A CN103727167 A CN 103727167A
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- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 238000002955 isolation Methods 0.000 claims abstract description 16
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 15
- 239000010959 steel Substances 0.000 claims abstract description 15
- 238000000518 rheometry Methods 0.000 claims description 23
- 210000004907 gland Anatomy 0.000 claims description 6
- 238000003754 machining Methods 0.000 abstract description 11
- 230000005284 excitation Effects 0.000 abstract description 6
- 229920001971 elastomer Polymers 0.000 abstract description 5
- 239000000806 elastomer Substances 0.000 abstract description 4
- 230000000638 stimulation Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000013016 damping Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005764 inhibitory process Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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Abstract
The invention proposes a smart vibration isolator for micro-vibration control. The smart vibration isolator for micro-vibration control comprises a housing 1, a magnetorheological elastomer 2, a force output rod 3, a sliding bearing 4, a cover board 5, a magnetic mass block 6, a piezoelectric ceramic pile 7, a pressing bolt 8, a connection base 9, a steel ball 10 and a coil 11. The smart vibration isolator adopts a cascade form of the magnetorheological elastomer and the piezoelectric ceramic pile, selects working states of the piezoelectric ceramic pile and the magnetorheological elastomer by switching control according to the excitation frequency, and achieves semi-active/full-active two-stage vibration isolation of vibration. By adopting the smart vibration isolator for micro-vibration control, the advantages of the stability, the controllability, good dynamic characteristics and large output force of the piezoelectric ceramic pile vibration isolator are considered, effective attenuation of micro-vibration of full-frequency bands including ultralow frequency can be achieved, the problem of vibration caused by uncertain stimulation of precision machining is solved, and meanwhile, the volume and the quality of the vibration isolator are reduced.
Description
Technical field
The present invention relates to vibration control technology, be specifically related to a kind of device that micro-vibration in precision machining process is carried out to vibration suppression.
Background technique
The harmful effect that micro-vibration causes precision machining and precision measuremnt becomes increasingly conspicuous, and is subject in recent years extensive concern.Although its vibration displacement is quite small, in micron dimension, acceleration is at every square of second-time of millimeter, and this micro-vibration is enough to the work of precision machining production and vibration sensing product thereof to cause very serious impact.The vibrational state that is exposed machine camera lens and work stage as the minimum lithographic live width of the key equipment-lithography machine of intergrated circuit manufacture restricts, and causes resolution to improve; The resolution of the Electronic Speculum class precision optical instruments such as optical interference microscope and scanning electron microscope is micron, submicron order, and the micro-vibration of environment can cause test result mistake, even instrument damage.Micro-vibration interference in precision machining and precision measuremnt process not only has from the running of ground, table top instrument and equipment, also has air conditioning air flow and lab assistant to walk about etc., vibration interference wide frequency range.Wherein ground vibration is caused by factors such as rotation of the earth, earth's crust variations, and amplitude generally arrives hundreds of nanometer tens, and vibration frequency is at 0-1Hz; The hunting frequency of building own is generally between 10-100Hz; The caused vibration of ventilation duct, transformer and motor is between 6-65Hz; Lab assistant is walked about caused vibration frequency at 1-3Hz.
And existing micro-vibration control mainly adopts passive vibration isolation technology (as materials such as rubber, air cushions), High-frequency Interference is had to good isolation effect, but huge structure, low frequency inhibition are poor; Active vibration isolation (as piezo actuator) is to low-frequency disturbance control successful, but energy consumption is large, poor stability, and high-frequency suppressing effect is undesirable.Because precision machining platform environment exists the interference of various frequencies, therefore, adopt existing micro-vibration control method cannot obtain desirable micro-vibration suppressioning effect.
Summary of the invention
Poor in order to overcome passive vibration isolation technology low frequency inhibition, large and the poor stability of active vibration isolation energy consumption, the deficiency that high-frequency suppressing effect is undesirable, the present invention proposes to adopt magnetic rheology elastic body and a kind of half active of piezoceramic material design/complete initiatively changeable control intelligent vibration isolator, take into account that stability and controllability and piezoelectric ceramic stack vibration isolator dynamic characteristic are good, the advantage of High power output, the effective attenuation of the full frequency band micro-vibration of realization including ultralow frequency, solve the vibration problem that the uncertain excitation of precision machining causes, reduce vibration isolator volume and quality simultaneously.
Technological scheme of the present invention is as follows:
The present invention proposes a kind of intelligent vibration isolator for micro-vibration control, described intelligent vibration isolator adopts the magnetic rheology elastic body form of connecting with piezoelectric ceramic stack, according to energizing frequency size, by switching controls, select the working state of piezoelectric ceramic stack and magnetic rheology elastic body, realize the half active/complete initiatively two grad vibration isolation of vibration; Described intelligent vibration isolator has shell, magnetic rheology elastic body, power take-off lever, sliding bearing, cover plate, magnetic conduction mass block, piezoelectric ceramic stack, gland nut, connecting base, steel ball and coil, and the assembly relation of each parts is:
Shell, its one end is flange plate-like, is provided with bolt hole on flange plate;
Magnetic conduction mass block, is loaded in shell, between intermediate portion and shell, leaves space, and magnetic conduction mass block has central through bore;
Magnetic rheology elastic body, is ring bodies, is inlaid in respectively the periphery at magnetic conduction mass block two ends, and the periphery of magnetic rheology elastic body is inlaid in again in the inwall annular groove of shell, thus magnetic conduction mass block and shell is coupled together;
Coil, is contained in outside the intermediate portion of magnetic conduction mass block;
Piezoelectric ceramic stack, is contained in the central through bore of magnetic conduction mass block;
Connecting base, is contained in the upper and lower two ends of piezoelectric ceramic stack;
Steel ball respectively arranges one on upper lower connecting base;
Power take-off lever, one end penetrates in the central through bore of magnetic conduction mass block, is pressed on one of them steel ball, and the other end passes the central through bore of magnetic conduction mass block, and passes from relative one end of flange plate of shell;
Sliding bearing, is contained between power take-off lever and central through bore;
Cover plate, covers in sliding bearing outer end, fixing sliding bearing, and described power take-off lever passes by sliding bearing and cover plate;
Gland nut, is contained in magnetic conduction mass block central through bore, compresses another steel ball.
The present invention proposes to adopt magnetic rheology elastic body and a kind of half active of piezoceramic material design/complete initiatively changeable control intelligent vibration isolator, the passive vibration isolation device that is equivalent to one group of rigidity can regulate arbitrarily within the specific limits with damping combines with full active vibration insulator, utilize MR elastomer vibration isolator by externally-applied magnetic field change structure rigidity and damping parameter, take into account stability and controllability and piezoelectric constant vibration isolator dynamic characteristic is good, the advantage of High power output, realized the effective attenuation of the micro-vibration of full frequency band including ultralow frequency, solve the vibration problem that the uncertain excitation of precision machining causes, reduce vibration isolator volume and quality simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of intelligent vibration isolator;
Fig. 2 is the vibration insulation structure schematic diagram that uses intelligent vibration isolator of the present invention on precision machining platform.
In figure, 1-shell, 2-magnetic rheology elastic body, 3-power take-off lever, 4-sliding bearing, 5-cover plate, 6-magnetic conduction mass block, 7-piezoelectric ceramic stack, 8-gland nut, 9-connecting base, 10-steel ball, 11-coil, 12-pedestal, 13-isolation mount, 14-processing platform, 15-precise machining equipment, 16-ground vibration.
Embodiment
Below in conjunction with accompanying drawing, structure of the present invention and principle are described further:
Referring to Fig. 1, this intelligent vibration isolator structure adopts magnetic rheology elastic body form of connecting with piezoelectric ceramic stack, according to energizing frequency size, by method for handover control, select the working state of piezoelectric ceramic stack and magnetic rheology elastic body, realize the half active/complete initiatively two grad vibration isolation of vibration.Wherein 1 is shell, and 2 is magnetic rheology elastic body, and 3 is power take-off lever, and 4 is sliding bearing, and 5 is cover plate, and 6 is magnetic conduction mass block, and 7 is piezoelectric ceramic stack, and 8 is gland nut, and 9 is connecting base, and 10 is steel ball, and 11 is coil.
Concrete structure is as follows:
Magnetic conduction mass block 6 is loaded in shell 1, and two ends are large, between intermediate portion and shell 1, leaves space, and for coil 11 is installed, magnetic conduction mass block 6 has central through bore, for filling piezoelectric ceramic stack 7 etc.
Magnetic rheology elastic body 2 is ring bodies, the inner round portion of ring bodies is inlaid in respectively in the annular groove of periphery at magnetic conduction mass block 6 two ends, the periphery of magnetic rheology elastic body 2 is inlaid in again in the inwall annular groove of shell 1, thus magnetic conduction mass block 6 and shell (1) is coupled together.
Be inlaid in respectively the periphery at magnetic conduction mass block 6 two ends, and be connected and fixed with shell 1.
Piezoelectric ceramic stack 7 is contained in the central through bore of magnetic conduction mass block 6, and its upper and lower two ends are separately installed with connecting base 9.On upper and lower connecting base 9, be respectively provided with again a steel ball 10.Gland nut 8 is contained in the central through bore of magnetic conduction mass block 6, compresses one of them steel ball 10.
Power take-off lever 3 one end penetrate in the central through bore of magnetic conduction mass block 6, are pressed on another steel ball 10, and the other end of power take-off lever 3 passes the central through bore of magnetic conduction mass block 6, and pass from relative one end of flange plate of shell 1.And between power take-off lever 3 and the central through bore of magnetic conduction mass block 6, sliding bearing 4 is set, sliding bearing 4 outer ends are covered fixing by cover plate 5, make capable take-off lever 3 be piercing in shell 1 by sliding bearing 4 and cover plate 5.
Referring to Fig. 2, the present invention is by being arranged on processing platform 14 times by the intelligent vibration isolator structure shown in Fig. 1, as isolation mount 13, be set up in parallel multiplely, precise machining equipment 15 is arranged on processing platform, and intelligent vibration isolator is fixing by bolt and processing platform 14 by the bolt hole of flange plate end, power take-off lever 3 lower ends are supported on pedestal 12, by this intelligent vibration isolator, as isolation mount, can isolate the full range vibration that ground and process equipment cause, working principle is as follows:
When energizing frequency is low frequency signal, adopt piezoelectric ceramic stack 7 as active vibration final controlling element, now magnetic rheology elastic body 2 is not applied to Current Control, its rigidity is constant, is passive vibration isolation device.When being subject to the constraint of vibration isolation object, excitation displacement will produce active force, now give piezoelectric ceramic stack 7 inputs certain voltage of controlling, piezoelectric ceramic stack 7, under control voltage drives, produces axial displacement Driving force take-off lever 3, offset with excitation force, thereby realize vibration suppression.The bending moment producing when wherein steel ball 10 is installed imbalance for eliminating, protection piezoelectric ceramic stack is not damaged.
When energizing frequency is high-frequency signal, adopt magnetic rheology elastic body half ACTIVE CONTROL, now piezoelectric ceramic stack final controlling element is as a rigid device that rigidity is constant.Magnetic rheology elastic body 2 works under shear mode, when coil 11 passes to field current, magnetic conduction mass block 6, magnetic rheology elastic body 2, shell 1 form closed magnetic circuit, under the control in magnetic field, storage shear modulus and the loss modulus of magnetic rheology elastic body change, thereby cause that the rigidity of structure and damping characteristic change, the resonant frequency of system and vibration attenuation rate also change, for the vibrational excitation of different frequency and amplitude, design corresponding control algorithm, thereby obtain different big or small field currents, realize dither inhibition.
Claims (2)
1. the intelligent vibration isolator for micro-vibration control, it is characterized in that, described intelligent vibration isolator adopts the magnetic rheology elastic body form of connecting with piezoelectric ceramic stack, according to energizing frequency size, by switching controls, select the working state of piezoelectric ceramic stack and magnetic rheology elastic body, realize the half active/complete initiatively two grad vibration isolation of vibration; Described intelligent vibration isolator has:
Shell (1), its one end is flange plate-like, is provided with bolt hole on flange plate;
Magnetic conduction mass block (6), described magnetic conduction mass block is loaded in shell (1), between intermediate portion and shell, leaves space, and magnetic conduction mass block (6) has central through bore;
Magnetic rheology elastic body (2), described magnetic rheology elastic body (2) is ring bodies, be inlaid in respectively the periphery at magnetic conduction mass block (6) two ends, the periphery of magnetic rheology elastic body (2) is inlaid in again in the inwall annular groove of shell (1), thus magnetic conduction mass block (6) and shell (1) is coupled together;
Coil (11), described coil (11) is contained in outside the intermediate portion of magnetic conduction mass block (6);
Piezoelectric ceramic stack (7), described piezoelectric ceramic stack (7) is contained in the central through bore of magnetic conduction mass block (6);
Connecting base 9, described connecting base 9 is contained in piezoelectric ceramic stack, and Shang Xia 7 two ends;
Steel ball (10), described steel ball (10) is each on upper lower connecting base (9) arranges one;
Power take-off lever (3), described power take-off lever (3) one end penetrates in the central through bore of magnetic conduction mass block (6), be pressed in one of them steel ball (10) upper, the other end passes the central through bore of magnetic conduction mass block (6), and passes from relative one end of flange plate of shell (1);
Gland nut (8), described gland nut (8) is contained in the central through bore of magnetic conduction mass block (6), compresses another steel ball (10).
2. the intelligent vibration isolator for micro-vibration control according to claim 1, is characterized in that, described intelligent vibration isolator also includes:
Sliding bearing (4), described sliding bearing (4) is contained between power take-off lever (3) and the central through bore of magnetic conduction mass block (6);
Cover plate (5), described cover plate (5) covers in sliding bearing (4) outer end, fixing sliding bearing (4);
Described power take-off lever (3) passes by sliding bearing (4) and cover plate (5).
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104500635A (en) * | 2014-12-26 | 2015-04-08 | 江苏科技大学 | Vibration reduction device of high-speed rotating shaft system |
| CN104747651A (en) * | 2015-01-28 | 2015-07-01 | 合肥工业大学 | Paralleling model semi-active vibration isolator |
| CN105020328A (en) * | 2015-07-24 | 2015-11-04 | 重庆材料研究院有限公司 | Magneto-rheological vibration isolation support based on mixed mode |
| CN105926796A (en) * | 2016-06-21 | 2016-09-07 | 山东大学 | Piezoelectric damping intelligent tuning vibration reduction control device |
| CN106402234A (en) * | 2016-11-08 | 2017-02-15 | 四川工程职业技术学院 | Magnetorheological elastomer shock absorber |
| CN106641082A (en) * | 2017-01-09 | 2017-05-10 | 南京航空航天大学 | Magnetorheological fluid actuator and method for reducing zero field damping torque of magnetorheological fluid actuator |
| CN107524754A (en) * | 2016-06-15 | 2017-12-29 | 本田技研工业株式会社 | Torsional balancer |
| CN109154355A (en) * | 2016-05-17 | 2019-01-04 | 本田技研工业株式会社 | Active vibration control apparatus |
| CN109725174A (en) * | 2019-03-07 | 2019-05-07 | 中国船舶重工集团公司第七0四研究所 | Composite vibrating acceleration transducer |
| CN111911581A (en) * | 2020-07-29 | 2020-11-10 | 同济大学 | Compact low-friction moving-magnetic active suspension structure |
| CN114215872A (en) * | 2021-12-17 | 2022-03-22 | 盐城工学院 | Active and passive integrated damper based on piezoelectric array and vibration isolation method |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104500635A (en) * | 2014-12-26 | 2015-04-08 | 江苏科技大学 | Vibration reduction device of high-speed rotating shaft system |
| CN104747651A (en) * | 2015-01-28 | 2015-07-01 | 合肥工业大学 | Paralleling model semi-active vibration isolator |
| CN104747651B (en) * | 2015-01-28 | 2016-07-20 | 合肥工业大学 | A kind of paralleling model semi-active vibration-isolating device |
| CN105020328A (en) * | 2015-07-24 | 2015-11-04 | 重庆材料研究院有限公司 | Magneto-rheological vibration isolation support based on mixed mode |
| CN109154355A (en) * | 2016-05-17 | 2019-01-04 | 本田技研工业株式会社 | Active vibration control apparatus |
| US10731725B2 (en) | 2016-05-17 | 2020-08-04 | Honda Motor Co., Ltd. | Active vibration control device |
| US10352393B2 (en) | 2016-06-15 | 2019-07-16 | Honda Motor Co., Ltd. | Torsion damper |
| CN107524754A (en) * | 2016-06-15 | 2017-12-29 | 本田技研工业株式会社 | Torsional balancer |
| CN105926796B (en) * | 2016-06-21 | 2017-10-27 | 山东大学 | Piezo-electric damping intelligent tuning damping control device |
| CN105926796A (en) * | 2016-06-21 | 2016-09-07 | 山东大学 | Piezoelectric damping intelligent tuning vibration reduction control device |
| CN106402234A (en) * | 2016-11-08 | 2017-02-15 | 四川工程职业技术学院 | Magnetorheological elastomer shock absorber |
| CN106641082B (en) * | 2017-01-09 | 2018-07-31 | 南京航空航天大学 | Reduce the method and its actuator of magnetorheological fluid actuator null field damping square |
| CN106641082A (en) * | 2017-01-09 | 2017-05-10 | 南京航空航天大学 | Magnetorheological fluid actuator and method for reducing zero field damping torque of magnetorheological fluid actuator |
| CN109725174A (en) * | 2019-03-07 | 2019-05-07 | 中国船舶重工集团公司第七0四研究所 | Composite vibrating acceleration transducer |
| CN109725174B (en) * | 2019-03-07 | 2024-04-30 | 中国船舶重工集团公司第七0四研究所 | Composite vibration acceleration sensor |
| CN111911581A (en) * | 2020-07-29 | 2020-11-10 | 同济大学 | Compact low-friction moving-magnetic active suspension structure |
| CN114215872A (en) * | 2021-12-17 | 2022-03-22 | 盐城工学院 | Active and passive integrated damper based on piezoelectric array and vibration isolation method |
| CN114215872B (en) * | 2021-12-17 | 2023-08-29 | 盐城工学院 | Active and passive integrated damper based on piezoelectric array and vibration isolation method |
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Effective date of registration: 20240723 Address after: No. 11-1, Xuelin Yayuan, Shapingba District, Chongqing 400030, China Patentee after: Yu Miao Country or region after: China Address before: 400030 No. 174 Sha Jie street, Shapingba District, Chongqing Patentee before: Chongqing University Country or region before: China |