CN103713157B - Resonant type acceleration sensor - Google Patents
Resonant type acceleration sensor Download PDFInfo
- Publication number
- CN103713157B CN103713157B CN201410009866.9A CN201410009866A CN103713157B CN 103713157 B CN103713157 B CN 103713157B CN 201410009866 A CN201410009866 A CN 201410009866A CN 103713157 B CN103713157 B CN 103713157B
- Authority
- CN
- China
- Prior art keywords
- shakes
- contiguous block
- fixed block
- base portion
- flexible bridges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
The invention discloses a kind of resonant type acceleration sensor, including resonant sensitive element, U-shaped mass, the first flexible bridges, the second flexible bridges, C shape contiguous block, tie-beam, annular contiguous block, the first fixed block and the second fixed block.Described resonant sensitive element is by the first base portion, the second base portion and is fixed in beam and second beam that shakes that shakes of first therebetween and constitutes, the two beam fronts that shake are provided with rectangular recess, the opening direction of this groove is vertical with the two vibration of beam directions that shake, the inwall of described groove is coated with the first exciting electrode, the shake two side of beam has been covered each by the second exciting electrode, and first beam and second beam that shakes that shakes makes both direction of vibration contrary by electrode with the connection of excitation power supply.The present invention is conducive to the microminiaturization of device, and can effectively promote beam resonance stability of shaking, and the sensitivity of device is higher, reduces the manufacture difficulty of electrode simultaneously.
Description
Technical field
The present invention relates to the resonant mode acceleration detection technology of rate-adaptive pacemaker, be specifically related to a kind of resonant type acceleration sensor, belong to technical field of inertial.
Background technology
Inertial navigation, as a kind of independent navigation mode, disguised and strong interference immunity, is all widely used in weaponry and civilian consumption electronic product.Accelerometer and gyroscope are the core sensing elements of inertial navigation, and navigation accuracy will be produced conclusive impact by the height of its precision.Resonance type accelerometer adopts resonance principle detection acceleration, there are multiple advantages such as rate-adaptive pacemaker and accuracy of detection height, resonance type accelerometer stability relatively other material based on quartz material is better, is more and more applied in high accuracy acceleration detection field.
The quartz resonance accelerometer of girder construction of shaking is most commonly seen a kind of structure type, difference according to girder construction of shaking, the quartz resonance accelerometer of girder construction of shaking can be divided into double; two Liang Hedan that shakes to shake two kinds of beam, represents the Honeywell company of the respectively U.S. of company and the Onera of France.Honeywell company adopts double; two girder construction of shaking, and other supplementary structure such as beam and mass that shakes is fabricated separately, and then passes through the mode such as bonding and is assemblied together.This kind of structure range ability width, but processing technology is loaded down with trivial details and volume big, is not suitable for producing in enormous quantities；Additionally, the beam section that shakes of this kind of structure is rectangle, electrode excitation efficiency is low, and the big sensitivity of beam equivalent width of shaking is low.France Onera innovatively by all structure fabrications of quartz vibration beam accelerometer on single structure, volume is little and assembling is simple, and synthesis precision has reached 100ug.
But, the cantilever thickness that shakes of the quartz vibration beam accelerometer of France Onera is only small, the back side is be made after wet etching deep trouth, electrode patterning difficulty is bigger, the beam that shakes is encouraged by its solution adopted for only making single-side electrode in the beam front that shakes, but the launching efficiency of single-side electrode is relatively low, shake beam resonance time motional impedance big, poor stability.
Summary of the invention
For prior art above shortcomings, it is an object of the invention to provide a kind of microminiaturization, electrode fabrication is simple and launching efficiency is high, the resonant type acceleration sensor of highly sensitive, good stability.
To achieve these goals, the technical solution used in the present invention is as follows:
Resonant type acceleration sensor, including resonant sensitive element, U-shaped mass, first flexible bridges, second flexible bridges, C shape contiguous block, tie-beam, annular contiguous block, first fixed block and the second fixed block, it is characterized in that: described resonant sensitive element is by the first base portion, second base portion and first beam and second beam that shakes that shakes being fixed in therebetween and working in the structure of width flexure resonance mode identical are constituted, first beam and second beam that shakes that shakes just is provided with rectangular recess facing to identical and front, the opening direction of this groove is vertical with first beam and the second vibration of beam direction that shakes that shakes, the inwall of described groove is coated with the first exciting electrode, the shake two side of beam has been covered each by the second exciting electrode, first beam and second beam that shakes that shakes makes both direction of vibration contrary by electrode with the connection of excitation power supply；
Both ends in opposite directions and are connected by U-shaped mass and C shape contiguous block opening by the first flexible bridges and the second flexible bridges, described resonant sensitive element is positioned at U-shaped mass and C shape contiguous block surrounds the region of formation, and resonant sensitive element two ends are connected with in the middle part of U-shaped mass open center and C shape contiguous block respectively through the first base portion, the second base portion；The back of C shape contiguous block connects annular contiguous block by tie-beam；Annular contiguous block two ends are connected with the first fixed block and the second fixed block, and annular contiguous block, the first fixed block, the second fixed block and U-shaped mass outline entirety are rounded.
Further, resonant type acceleration sensor of the present invention is processed to form on the same substrate, namely constitute the first base portion of senser element, the second base portion, the first shake beam, the second shake beam, U-shaped mass, the first flexible bridges, the second flexible bridges, C shape contiguous block, tie-beam, annular contiguous block, the first fixed block and the second fixed block integral production on same base material form, for monoblock type.It is the quartz crystal with piezoelectric effect that described resonant type acceleration sensor makes base material.
Described first shakes beam and the second groove shaking on beam is made up of central slot and the both ends groove between central slot and two base portions, the separation of end recesses and central slot with shake beam resonance time node overlap；The opposite polarity that first exciting electrode of the end recesses inwall of the same beam that shakes is connected with excitation power supply with the first exciting electrode of central slot inwall.
Described first shakes beam and the second groove shaking on beam is one, this groove along the Boundary Nearest of Y-direction in the node of the beam that shakes.
The present invention beam front that shakes can arrange central slot and end recesses simultaneously；If shaken, beam is shorter, then central slot and end recesses are wholely set, or only arrange central slot and be not provided with end recesses.
The present invention is by integrated for the supplementary structures such as resonant sensitive element and mass, and the beam front that shakes in resonant sensitive element is provided with groove, to reduce exciting electrode operating distance and the equivalent width of the Beam Vibration that shakes.When having acceleration to input, inertia force produced by mass causes the deflection deformation of flexible bridges and the change of shake beam strain vertically and resonant frequency, can obtain input acceleration value by resolving the beam resonant frequency changing value that shakes.
It follows that beneficial effects of the present invention concrete manifestation is in the following areas:
1, the Liang Weishuan that shakes shakes girder construction, and two beams that shake work in flexural vibration mode in opposite direction, during vibration, power produced by base portion and moment is cancelled out each other, and stability is better, and carries out vibration isolation without isolating frame, and volume is less.
, the beam front that shakes be provided with groove, the launching efficiency of electrode is greatly improved, overcome the beam that shakes smaller time the weak shortcoming of oscillation energy, be conducive to the further microminiaturized of device size, and can effectively promote beam resonance stability of shaking.
, the sensitivity of device be inversely proportional to the quadratic power of the beam equivalent width that shakes, the beam front that shakes arranges equivalent width after groove and reduces, and the sensitivity of device is higher.
, the beam surface that shakes exciting electrode only cover groove inner wall and the beam sidewall that shakes, the back side need not cover electrode, reduces the manufacture difficulty of electrode.
Accompanying drawing explanation
Fig. 1 is the structure chart of the resonant type acceleration sensor using the embodiment of the present invention 1.
Fig. 2 a is the structure chart of resonant sensitive element in the embodiment of the present invention 1.
Fig. 2 b is the A1-A1 sectional view of Fig. 2 a.
Fig. 2 c is the B1-B1 sectional view of Fig. 2 a.
Fig. 3 is the structure chart of resonant sensitive element in the embodiment of the present invention 2.
Fig. 4 is the structure chart of resonant sensitive element in the embodiment of the present invention 3.
Wherein: 1-resonant type acceleration sensor；2-resonant sensitive element；3-U type mass；4-the first flexible bridges；5-the second flexible bridges；6-C shape contiguous block；7-tie-beam；8-annular contiguous block；9-the first fixed block；10-the second fixed block；20-the first base portion；21-the second base portion；22-first shakes beam；23a-the first central slot；23b-first end groove；24-second shakes beam；25a-the second central slot；25b-the second end groove；26-the first exciting electrode；27-the second exciting electrode.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in further detail.
As it is shown in figure 1, resonant type acceleration sensor 1 provided by the invention, including resonant sensitive element 2, U-shaped mass 3, the first flexible bridges 4, the second flexible bridges 5, C shape contiguous block 6, tie-beam 7, annular contiguous block 8, the first fixed block 9, the second fixed block 10.Described resonant sensitive element 2 is made up of first base portion the 20, second base portion 21 and first beam 22 and second beam 24 that shakes that shakes that is fixed in therebetween and works in the structure of width flexure resonance mode identical, first beam 22 beam 24 that shakes with second that shakes just is provided with rectangular recess facing to identical and front, and the opening direction of this groove is vertical with first beam and the second vibration of beam direction that shakes that shakes.The inwall of described groove is coated with the first exciting electrode 26, and the two side of the beam that shakes has been covered each by the second exciting electrode 27, and first beam 22 and second beam 24 that shakes that shakes makes both direction of vibration contrary by electrode with the connection of excitation power supply.
Both ends in opposite directions and are connected by type mass 3 and C shape contiguous block 6 opening by the first flexible bridges 4 and the second flexible bridges 5, described resonant sensitive element 2 is positioned at U-shaped mass 3 and C shape contiguous block 6 surrounds the region of formation, and resonant sensitive element 2 two ends are connected with in the middle part of U-shaped mass 3 open center and C shape contiguous block 6 respectively through first base portion the 20, second base portion 21；The back of C shape contiguous block 6 connects annular contiguous block 8 by tie-beam 7；Annular contiguous block 8 two ends are connected with the first fixed block 9 and the second fixed block 10, and annular contiguous block the 8, first fixed block the 9, second fixed block 10 and U-shaped mass 3 outline entirety are rounded.
Resonant type acceleration sensor of the present invention is processed to form on the same substrate, namely constitute first base portion the 20, second base portion 21 of senser element, first shake beam 22, second shake beam 24, U-shaped mass the 3, first flexible bridges the 4, second flexible bridges 5, C shape contiguous block 6, tie-beam 7, annular contiguous block the 8, first fixed block 9 and the second fixed block 10 integral production on same base material form, for monoblock type.It is the quartz crystal with piezoelectric effect that described resonant type acceleration sensor makes base material.
The present invention the first flexible bridges 4 and the second flexible bridges 5 are used for supporting mass 3；First fixed block 9 and the second fixed block 10 are used for supporting whole resonant type acceleration sensor 1.When there being Z-direction acceleration to input, the inertia force that mass 3 causes makes the first flexible bridges 4 and the second flexible bridges 5 produce deflection deformation, first base portion 20 of resonant sensitive element 2 is produced to stretch or compression stress by this deformation, and be transmitted to two and shake on beam, causing the change of its resonant frequency, the changing value of resonant frequency can be used for detecting input acceleration value.
Compared with the beam that shakes of square-section, when equal driving voltage, make the operating distance shortening between two electrodes on the beam that shakes of fluted structure, effective excitation electrical field intensity is remarkably reinforced, and the oscillation intensity of the beam that shakes increases, and motional impedance value reduces, even if reducing the size of element, the excitation amplitude of beam of shaking declines also less, and stability is better, is more suitable for the microminiaturization of senser element.
Embodiment 1
As a preferred embodiment of the present invention, as shown in Figure 2 a, first shake beam 22 and second shake the groove in beam 24 front be three-central slot between the end recesses and end recesses at two ends, the separation of end recesses and central slot with shake beam resonance time node (P1, P2, P3, P4) overlap, to improve electrode excitation efficiency and resonance stability.The second exciting electrode of beam two side of shaking is divided into independent three section of correspondence, with corresponding with inside grooves the first exciting electrode.
As shown in figs. 2 b and 2 c, the opposite polarity that the first exciting electrode of the end recesses inwall of the same beam that shakes is connected with excitation power supply with the first exciting electrode of central slot inwall.Namely the opposite polarity that the electrode of first end groove 23a and the first central slot 23b is connected with excitation power supply, the opposite polarity that the electrode of the second end groove 25a and the second central slot 25b is connected with excitation power supply, make to shake beam resonance time, shake one end of girder connection is extended state, and the other end is compressive state.
The opposite polarity that the electrode of first end groove 23a and the second end groove 25a is connected with excitation power supply, the opposite polarity that first central slot 23b and the second central slot 25b electrode are connected with excitation power supply, first shake beam 22 and the second direction of an electric field shaken in beam 24 is contrary, and two beam vibrations that shake are in opposite direction.
Embodiment 2
As it is shown on figure 3, the differing only in of the present embodiment 2 and embodiment 1: first shakes beam 22 and the second front shaking beam 24 only arranges central slot and is not provided with end recesses, and namely groove only has one.
When the beam length that shakes shortens further, if shaking, beam front makes central slot and end recesses simultaneously, and the electrode patterning difficulty on surface can increase, the probability of the first exciting electrode 26 and the second exciting electrode 27 short circuit can increase, and yield rate and reliability that resonant type acceleration sensor makes all can reduce.Girder construction of shaking in the present embodiment, the making of the resonant type acceleration sensor that the beam length that is more suitable for shaking is shorter.
Embodiment 3
As shown in Figure 4, the present embodiment 3 differs only in embodiment 1: first beam 22 and second that shakes shakes the end recesses in beam 24 front and central slot integrated setting, and does not make exciting electrode in end recesses.For prominent planform, not shown electrode pattern in Fig. 4.
When the beam length that shakes is shorter, the influence degree of launching efficiency can be significantly increased by the central slot in the beam front that shakes and end recesses boundary (being not provided with the near nodal of groove), reduces the beam resonant intensity that shakes.By in beam front integrated setting end recesses and the central slot of shaking, can effectively reduce the boundary impact on launching efficiency, improve the beam resonant intensity that shakes.
Groove is made as can be seen here in the front of the beam that shakes, shake the sidewall of beam and the inwall of groove is covered with electrode, electrode applies voltage so that the excitation electrical field that two beam internal generation directions of an electric field that shake are contrary, inverse piezoelectric effect encourage two beams that shake to produce back-flexing vibration.Compared with the beam that shakes of square-section, when equal driving voltage, effective excitation electrical field intensity of the beam that shakes making fluted structure is remarkably reinforced, the oscillation intensity of beam of shaking increases, and resonance efficiency is high, and motional impedance value reduces, stable performance, is conducive to the further microminiaturized of senser element structure；The equivalent width of the beam that shakes arranging groove structure is reduced, and the sensitivity of senser element is higher.
The above embodiment of the present invention is only for example of the present invention is described, and is not the restriction to embodiments of the present invention.For those of ordinary skill in the field, other multi-form change and variations can also be made on the basis of the above description.Here cannot all of embodiment be given exhaustive.Every belong to apparent change that technical scheme amplified out or the variation row still in protection scope of the present invention.
Claims (2)
1. resonant type acceleration sensor, including resonant sensitive element, U-shaped mass, first flexible bridges, second flexible bridges, C shape contiguous block, tie-beam, annular contiguous block, first fixed block and the second fixed block, it is characterized in that: described resonant sensitive element is by the first base portion, second base portion and first beam and second beam that shakes that shakes being fixed in therebetween and working in the structure of width flexure resonance mode identical are constituted, first beam and second beam that shakes that shakes just is provided with rectangular recess facing to identical and front, the opening direction of this groove is vertical with first beam and the second vibration of beam direction that shakes that shakes, the inwall of described groove is coated with the first exciting electrode, the shake two side of beam has been covered each by the second exciting electrode, first beam and second beam that shakes that shakes makes both direction of vibration contrary by electrode with the connection of excitation power supply；
Both ends in opposite directions and are connected by U-shaped mass and C shape contiguous block opening by the first flexible bridges and the second flexible bridges, described resonant sensitive element is positioned at U-shaped mass and C shape contiguous block surrounds the region of formation, and resonant sensitive element two ends are connected with in the middle part of U-shaped mass open center and C shape contiguous block respectively through the first base portion, the second base portion；The back of C shape contiguous block connects annular contiguous block by tie-beam；Annular contiguous block two ends are connected with the first fixed block and the second fixed block, and annular contiguous block, the first fixed block, the second fixed block and U-shaped mass outline entirety are rounded；
First flexible bridges and the second flexible bridges are used for supporting mass；First fixed block and the second fixed block are used for supporting whole resonant type acceleration sensor；
Described first shakes beam and the second groove shaking on beam is made up of central slot and the both ends groove between central slot and two base portions, the separation of end recesses and central slot with shake beam resonance time node overlap；The second exciting electrode of beam two side of shaking is divided into independent three section of correspondence, with corresponding with inside grooves the first exciting electrode；The opposite polarity that first exciting electrode of the end recesses inwall of the same beam that shakes is connected with excitation power supply with the first exciting electrode of central slot inwall；
Described first base portion, the second base portion, the first shake beam, the second shake beam, U-shaped mass, the first flexible bridges, the second flexible bridges, C shape contiguous block, tie-beam, annular contiguous block, the first fixed block and the second fixed block have integral production on the quartz crystal base material of piezoelectric effect at same and form.
2. resonant type acceleration sensor, including resonant sensitive element, U-shaped mass, first flexible bridges, second flexible bridges, C shape contiguous block, tie-beam, annular contiguous block, first fixed block and the second fixed block, it is characterized in that: described resonant sensitive element is by the first base portion, second base portion and first beam and second beam that shakes that shakes being fixed in therebetween and working in the structure of width flexure resonance mode identical are constituted, first beam and second beam that shakes that shakes just is provided with rectangular recess facing to identical and front, the opening direction of this groove is vertical with first beam and the second vibration of beam direction that shakes that shakes, the inwall of described groove is coated with the first exciting electrode, the shake two side of beam has been covered each by the second exciting electrode, first beam and second beam that shakes that shakes makes both direction of vibration contrary by electrode with the connection of excitation power supply；
Both ends in opposite directions and are connected by U-shaped mass and C shape contiguous block opening by the first flexible bridges and the second flexible bridges, described resonant sensitive element is positioned at U-shaped mass and C shape contiguous block surrounds the region of formation, and resonant sensitive element two ends are connected with in the middle part of U-shaped mass open center and C shape contiguous block respectively through the first base portion, the second base portion；The back of C shape contiguous block connects annular contiguous block by tie-beam；Annular contiguous block two ends are connected with the first fixed block and the second fixed block, and annular contiguous block, the first fixed block, the second fixed block and U-shaped mass outline entirety are rounded；
First flexible bridges and the second flexible bridges are used for supporting mass；First fixed block and the second fixed block are used for supporting whole resonant type acceleration sensor；
Described first shakes beam and the second groove shaking on beam is one, and this groove is adjacent to the node of the beam that shakes along the two ends of resonant sensitive element length direction；
Described first base portion, the second base portion, the first shake beam, the second shake beam, U-shaped mass, the first flexible bridges, the second flexible bridges, C shape contiguous block, tie-beam, annular contiguous block, the first fixed block and the second fixed block have integral production on the quartz crystal base material of piezoelectric effect at same and form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410009866.9A CN103713157B (en) | 2014-01-09 | 2014-01-09 | Resonant type acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410009866.9A CN103713157B (en) | 2014-01-09 | 2014-01-09 | Resonant type acceleration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103713157A CN103713157A (en) | 2014-04-09 |
| CN103713157B true CN103713157B (en) | 2016-07-13 |
Family
ID=50406291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410009866.9A Active CN103713157B (en) | 2014-01-09 | 2014-01-09 | Resonant type acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103713157B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104121984B (en) * | 2014-08-16 | 2016-08-31 | 中北大学 | A kind of high-sensitivity resonance formula MEMS vector hydrophone structure |
| CN110389307B (en) * | 2018-04-16 | 2021-12-28 | 南京理工大学 | Quartz resonance type MEMS magnetic field sensor |
| CN110260841A (en) * | 2019-06-10 | 2019-09-20 | 东南大学 | Obliquity sensor |
| WO2020258176A1 (en) * | 2019-06-27 | 2020-12-30 | 瑞声声学科技(深圳)有限公司 | Differential resonator and mems sensor |
| CN112311352B (en) * | 2020-11-09 | 2024-05-03 | 中国电子科技集团公司第二十六研究所 | Multi-degree-of-freedom buffer quartz chip |
| CN112730892A (en) * | 2020-12-10 | 2021-04-30 | 北京自动化控制设备研究所 | Vibration beam structure and vibration beam accelerometer sensitive structure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033647A (en) * | 2012-12-25 | 2013-04-10 | 中国电子科技集团公司第二十六研究所 | Closed-loop control type accelerometer |
| CN103471760A (en) * | 2013-09-18 | 2013-12-25 | 中国电子科技集团公司第二十六研究所 | Force sensing resonant element and manufacturing method thereof |
| CN203630154U (en) * | 2014-01-09 | 2014-06-04 | 中国电子科技集团公司第二十六研究所 | Resonant-type acceleration sensing device |
-
2014
- 2014-01-09 CN CN201410009866.9A patent/CN103713157B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033647A (en) * | 2012-12-25 | 2013-04-10 | 中国电子科技集团公司第二十六研究所 | Closed-loop control type accelerometer |
| CN103471760A (en) * | 2013-09-18 | 2013-12-25 | 中国电子科技集团公司第二十六研究所 | Force sensing resonant element and manufacturing method thereof |
| CN203630154U (en) * | 2014-01-09 | 2014-06-04 | 中国电子科技集团公司第二十六研究所 | Resonant-type acceleration sensing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103713157A (en) | 2014-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103713157B (en) | Resonant type acceleration sensor | |
| US10033305B2 (en) | Energy harvesting device and method for forming the same | |
| JP5772910B2 (en) | Vibrating piece, vibrator, sensor and electronic component | |
| EP3210303B1 (en) | Compound spring mems resonator for oscillators and real-time clock applications | |
| US8289092B2 (en) | Microelectromechanical resonant structure having improved electrical characteristics | |
| US10501310B2 (en) | Microelectromechanical resonator with improved electrical features | |
| US8225662B2 (en) | Acceleration sensing device | |
| CN103760382B (en) | The micro-resonant acceleration sensor chip of a kind of electrostatic stiffness formula silicon | |
| US8887567B2 (en) | Double-ended tuning fork with outrigger excitation | |
| WO2016064677A1 (en) | Multiple coil spring mems resonator for oscillators and real-time clock applications | |
| CN103808961A (en) | Cantilever part and resonant acceleration sensor using the same | |
| CN101363731B (en) | Rock quartz micro mechanical gyroscope based on shear stress detection and method for making same | |
| CN203630154U (en) | Resonant-type acceleration sensing device | |
| US9383205B2 (en) | Vibrator and vibrating gyroscope | |
| JP2005249395A (en) | Angular velocity sensor | |
| CN107796996B (en) | Bending beam micro-resonance type electrostatic meter with single free end and charge detection method | |
| CN103697875A (en) | Pin-type piezoelectric gyroscope for matching solid fluctuation modes | |
| CN102762954B (en) | The micromechanical resonator improved | |
| CN105917193B (en) | Inertial sensor with nested excitor mass and the method for manufacturing such sensor | |
| CN103471760B (en) | Manufacturing method of force sensing resonant element | |
| JP4420038B2 (en) | Stress sensitive element | |
| CN101738184B (en) | Shearing stress detection-based quartz micromechanical gyro with criss-cross structure | |
| CN107702704B (en) | Quartz micro-vibration gyro | |
| CN101339028A (en) | All solid dual spindle gyroscopes possessing double nested square shape groove structure piezoelectric vibrator | |
| CN105424021B (en) | A kind of double-ended tuning fork angular-rate sensor chip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |