CN103700612B - A kind of end effector component - Google Patents
A kind of end effector component Download PDFInfo
- Publication number
- CN103700612B CN103700612B CN201310634087.3A CN201310634087A CN103700612B CN 103700612 B CN103700612 B CN 103700612B CN 201310634087 A CN201310634087 A CN 201310634087A CN 103700612 B CN103700612 B CN 103700612B
- Authority
- CN
- China
- Prior art keywords
- support chip
- protuberance
- fixed block
- end effector
- bottom fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012636 effector Substances 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 abstract description 11
- 239000000758 substrate Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a kind of end effector component, including: bottom fixed block and support chip, the two ends of described bottom fixed block are provided with protuberance, and described support chip is provided with the connecting portion matched with described protuberance.It is fixed by the protuberance of bottom fixed block and the connecting portion of support chip between support chip and bottom fixed block in this end effector component, bottom fixed block is fixed on mechanical arm, change the support chip having only to be fixed on by snap fit on the fixed block of bottom in the process of support chip to take off, change new support chip, whole Renewal process need not turn screw, ductility just with support chip carries out just completing replacement operation, compared with mounting means of the prior art, eliminate dismounting and the trouble of bottom support block is installed, screw need not be turned, reduce the time changing support chip, improve the mobility of whole equipment.
Description
Technical field
The present invention relates to display fabrication techniques field, particularly relate to a kind of end effector component.
Background technology
In recent years, flourish along with semiconductor technologies, portable type electronic product and flat-panel screens product also rise therewith.TFT (ThinFilmTransistor, thin film transistor (TFT)) liquid crystal display, owing to having the advantages such as operation voltage line scattering low, radiationless, lightweight and volume are little, has been increasingly becoming the standard output device of various electronic product.Wherein the processing technique of TFT needs repeatedly in the deposition of the enterprising row metal film of substrate, dielectric film and semiconductor film and etching, and these techniques are typically all and complete in processing chamber length by length, and processing chamber is typically all the environment of vacuum, high temperature.In order to improve the efficiency of processes, equipment in workshop is equipped with multiple processing chamber, a transfer chamber and a loading lock chamber, and wherein the vacuum mechanical-arm in transfer chamber realizes substrate transmission between processing chamber and loading lock chamber.
Along with the increase of substrate area, the cavity space size manufacturing equipment is also required to increase therewith, transmits the vacuum mechanical-arm of substrate and face a lot of technical challenge also with the increase of substrate area in transfer chamber.Such as, being provided with a series of end effector in the vacuum robot transmitting substrate, substantial amounts of support chip is installed on end effector, the direct contact substrate of support chip, therefore in use needs these support chips are changed termly.
The composition structure front view of traditional support sheet is as it is shown in figure 1, the schematic perspective view of support chip and the mounting means of vacuum robot is as in figure 2 it is shown, 5 be wherein vacuum robot, and 1 for being positioned at bottom support block, and 2 is support chip, and 3 is fixed block, and 4 is screw.Support chip 2 is positioned at the top of bottom support block 1, bottom support block 1 in Fig. 2 is prismatoid, support chip 2 bends along the shape of bottom support block 1, centre is positioned on bottom support block 1, both sides and vacuum robot 5 are close to, and offer porose at the two ends of support chip 2, are arranged on fixed block 3 central aperture at support chip 2 two ends, for screw 4 traverse fixed block 3 and support chip 2, in order to support chip 2 is fixed in vacuum robot.If support chip and vacuum robot mechanical system carry out installing and fixing in employing Fig. 2, the process changing support chip needs to expend the operating time of the unscrewing-change of two screws-tighten, time is longer, whole equipment will be stopped, to be supported replacing just can proceed after completing, and therefore the mobility of whole equipment is produced large effect.
Summary of the invention
(1) to solve the technical problem that
For drawbacks described above, the technical problem to be solved in the present invention is how to reduce the time that support chip needs of changing in vacuum robot, improves the mobility of whole equipment.
(2) technical scheme
For solving the problems referred to above, the invention provides a kind of end effector component, including: bottom fixed block and support chip, the two ends of described bottom fixed block are provided with protuberance, and described support chip is provided with the connecting portion matched with described protuberance.
Further, described bottom fixed block includes prismatoid, and the plane of mechanical arm is close in bottom surface, and end face is close to the middle part of described support chip.
Further, the protuberance of described bottom fixed block includes the first protuberance and the second protuberance, it is separately positioned on the both sides on described prismatoid inclined-plane, and the bottom surface of described first protuberance and described second protuberance is higher than the bottom surface of described prismatoid, and between described mechanical arm, there is space.
Further, the prismatoid in the fixed block of described bottom is one-body molded with protuberance.
Further, the junction of described prismatoid and described protuberance is provided with via, and described bottom fixed block is fixed on described mechanical arm by screw by described via.
Further, the shape of cross section of described protuberance is square, circular or oval.
Further, the two ends of described support chip are provided with described connecting portion, and described connecting portion is provided with the link slot matched with described protuberance, and described support chip is fixed by described protuberance by described link slot.
Further, being shaped as of the link slot on described support chip is square, circular or oval, and consistent with the shape of cross section of described protuberance.
Further, support chip has ductility.
(3) beneficial effect
The invention provides a kind of end effector component, this assembly includes: bottom fixed block and support chip, and the two ends of bottom fixed block are provided with protuberance, and support chip is provided with the connecting portion matched with described protuberance.It is fixed by the protuberance of bottom fixed block and the connecting portion of support chip between support chip and bottom fixed block in end effector component provided by the invention, bottom fixed block is fixed on mechanical arm, change the support chip having only to be fixed on by snap fit on the fixed block of bottom in the process of support chip to take off, change new support chip, whole Renewal process need not turn screw, ductility just with support chip carries out just completing replacement operation, compared with mounting means of the prior art, eliminate dismounting and the trouble of fixed block is installed, screw need not be turned, reduce the time changing support chip, improve the mobility of whole equipment.
Accompanying drawing explanation
Fig. 1 is the composition structure front view of traditional support sheet；
Fig. 2 is the mounting means schematic perspective view of traditional support sheet and vacuum robot；
The front schematic view of a kind of end effector component that Fig. 3 provides for the embodiment of the present invention；
The front schematic view of bottom fixed block in a kind of end effector component that Fig. 4 provides for the embodiment of the present invention；
The schematic perspective view of bottom fixed block in a kind of end effector component that Fig. 5 provides for the embodiment of the present invention；
The schematic top plan view of bottom fixed block in a kind of end effector component that Fig. 6 provides for the embodiment of the present invention；
Perspective view after a kind of end effector component combination that Fig. 7 provides for the embodiment of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following example are used for illustrating the present invention, but are not limited to the scope of the present invention.
Embodiments providing a kind of end effector component, front schematic view is as it is shown on figure 3, include: bottom fixed block 100 and support chip 200, and the two ends of bottom fixed block 100 are provided with protuberance, and support chip 200 is provided with the connecting portion matched with protuberance.
It is different in that with the annexation of traditional support chip Yu mechanical arm, bottom fixed block is fixed on mechanical arm 5 by the embodiment of the present invention, it is supported in the process that sheet is changed to be supported the fixing of sheet and to connect by turning screw, the ductility utilizing this province of support chip is only needed to can be achieved with replacement operation, whole Renewal process eliminates dismounting and installs the trouble of fixed block, screw need not be turned, reduce the time changing support chip, improve the mobility of whole equipment.
It should be noted that the mechanical arm in the present embodiment refers to the vacuum robot in vacuum transmission cavity.
Preferably, bottom fixed block 100 structure in the embodiment of the present invention includes prismatoid 101, and the plane of mechanical arm 5 is close in the bottom surface of prismatoid 101, and the end face of prismatoid 101 is close to the middle part of support chip 200.Bottom fixed block 100 also includes protuberance 102, specifically include the first protuberance 102a and the second protuberance 102b, it is separately positioned on the both sides on prismatoid 101 inclined-plane, and first the bottom surface of protuberance 102a and the second protuberance 102b higher than the bottom surface of prismatoid 101, and having space between mechanical arm 5, this space is used for ensureing that support chip 200 can engage and is contained in protuberance 102.
Preferably, the prismatoid 101 in bottom fixed block 100 and protuberance 102 are one-body molded when making, and front view is as shown in Figure 4.Further, fixing in order to what realize with mechanical arm, the junction of prismatoid 101 and protuberance 102 is provided with three vias A, B and C, and bottom fixed block 100 is fixed on mechanical arm 5 by via A, B and C by screw, axonometric chart as it is shown in figure 5, top view as shown in Figure 6.It should be noted that, Fig. 4-Fig. 6 is provided with three vias on bottom fixed block 100 for being fixed in mechanical arm 5, but the number of via is not specifically limited by the present embodiment, Fig. 4-Fig. 6 of the present embodiment is solely for the purpose of illustration, may be arranged as 2 in other embodiments of the invention or more than 3, as long as ensure that and being fixed on mechanical arm 5 by bottom fixed block 100.
Preferably, the shape of cross section of the protuberance 102 in the present embodiment is square, circular or oval, illustrates for square in above-mentioned Fig. 4-Fig. 6.
Further, the two ends of the support chip 200 in the embodiment of the present invention are provided with connecting portion, and connecting portion is provided with the link slot 201 matched with protuberance, and support chip 200 is fixed by protuberance by link slot 201.
Further, being shaped as of the link slot 201 and 202 on the support chip 200 in the embodiment of the present invention is square, circular or oval, and consistent with the shape of cross section of protuberance, also illustrates for square in above-mentioned Fig. 4-Fig. 6.
Further, the support chip 200 in the embodiment of the present invention has ductility, and only support chip 200 has its being fixed with bottom fixed block 100 in ductility guarantee installation process.
By above-mentioned bottom fixed block 100 and support chip 200 by snap-in structure fixing after, the perspective view of the end effector of formation is as shown in Figure 7.
Embodiment of above is merely to illustrate the present invention; and it is not limitation of the present invention; those of ordinary skill about technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes fall within scope of the invention, and the scope of patent protection of the present invention should be defined by the claims.
Claims (7)
1. an end effector component, it is characterised in that including: bottom fixed block and support chip, the two ends of described bottom fixed block are provided with protuberance, and described support chip is provided with the connecting portion matched with described protuberance；
Wherein, described bottom fixed block includes prismatoid, and the plane of mechanical arm is close in bottom surface, and end face is close to the middle part of described support chip；The protuberance of described bottom fixed block includes the first protuberance and the second protuberance, it is separately positioned on the both sides on described prismatoid inclined-plane, and the bottom surface of described first protuberance and described second protuberance is higher than the bottom surface of described prismatoid, and between described mechanical arm, there is space.
2. end effector component as claimed in claim 1, it is characterised in that the prismatoid in the fixed block of described bottom is one-body molded with protuberance.
3. end effector component as claimed in claim 1, it is characterised in that the junction of described prismatoid and described protuberance is provided with via, and described bottom fixed block is fixed on described mechanical arm by screw by described via.
4. the end effector component as according to any one of claim 1,2,3, it is characterised in that the shape of cross section of described protuberance is square, circular or oval.
5. end effector component as claimed in claim 4, it is characterized in that, the two ends of described support chip are provided with described connecting portion, and described connecting portion is provided with the link slot matched with described protuberance, and described support chip is fixed by described protuberance by described link slot.
6. end effector component as claimed in claim 5, it is characterised in that being shaped as of the link slot on described support chip is square, circular or oval, and consistent with the shape of cross section of described protuberance.
7. end effector component as claimed in claim 1, it is characterised in that support chip has ductility.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310634087.3A CN103700612B (en) | 2013-12-02 | 2013-12-02 | A kind of end effector component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310634087.3A CN103700612B (en) | 2013-12-02 | 2013-12-02 | A kind of end effector component |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103700612A CN103700612A (en) | 2014-04-02 |
| CN103700612B true CN103700612B (en) | 2016-06-29 |
Family
ID=50362100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310634087.3A Expired - Fee Related CN103700612B (en) | 2013-12-02 | 2013-12-02 | A kind of end effector component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103700612B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200908195A (en) * | 2007-04-27 | 2009-02-16 | Brooks Automation Inc | Inertial wafer centering end effector and transport apparatus |
| US7669903B2 (en) * | 2007-10-11 | 2010-03-02 | Crossing Automation, Inc. | Ultra low contact area end effector |
| CN102119438A (en) * | 2008-08-08 | 2011-07-06 | 应用材料公司 | Magnetic pad for end-effectors |
| CN103258776A (en) * | 2012-02-17 | 2013-08-21 | 诺发系统公司 | Mass damper for semiconductor wafer handling end effector |
-
2013
- 2013-12-02 CN CN201310634087.3A patent/CN103700612B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200908195A (en) * | 2007-04-27 | 2009-02-16 | Brooks Automation Inc | Inertial wafer centering end effector and transport apparatus |
| US7669903B2 (en) * | 2007-10-11 | 2010-03-02 | Crossing Automation, Inc. | Ultra low contact area end effector |
| CN102119438A (en) * | 2008-08-08 | 2011-07-06 | 应用材料公司 | Magnetic pad for end-effectors |
| CN103258776A (en) * | 2012-02-17 | 2013-08-21 | 诺发系统公司 | Mass damper for semiconductor wafer handling end effector |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103700612A (en) | 2014-04-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100536069C (en) | Plasma processing device, plasma processing method and storage medium | |
| CN102156360B (en) | Flexible display device and manufacturing method thereof | |
| US9960195B2 (en) | Method for manufacturing TFT backplane and structure of TFT backplane | |
| CN111736398B (en) | Display panel and display device | |
| US8939289B2 (en) | Packing box for liquid crystal display panel and waterproof structure thereof | |
| US9335012B2 (en) | Light bar structure and light source device | |
| WO2014149773A1 (en) | Heat exchange assembly for an electronic display | |
| US9690216B2 (en) | Display manufacturing method and photo alignment process | |
| CN105405852B (en) | Array substrate and its manufacturing method, display device | |
| JP6720349B2 (en) | Liquid crystal panel and thin film transistor array substrate thereof | |
| CN110656305B (en) | Deposition apparatus | |
| CN103700612B (en) | A kind of end effector component | |
| CN104654135A (en) | Light source module and backlight module and liquid crystal display with light source module | |
| US20200391961A1 (en) | Substrate transferring apparatus and substrate transferring method using the same | |
| US11137643B2 (en) | Optical component fool-proof structure for backlight module and display panel | |
| CN104752296A (en) | Positioning device of ejector pin mechanism and reaction chamber | |
| CN101989005B (en) | Structural substrate, conveying device and box pairing device | |
| US20210183895A1 (en) | Electronic device | |
| KR100830237B1 (en) | A structure for susceptor in large area substrate processing system | |
| KR101134341B1 (en) | Vacuum drying device and method | |
| CN107170835B (en) | Thin film transistor, preparation method thereof and array substrate | |
| CN109523914B (en) | Protection device, display panel and electron device of flexible screen | |
| US8905619B2 (en) | Backlight module and display panel | |
| CN107740042B (en) | Mask plate | |
| KR101243317B1 (en) | Apparatus For Transferring Substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160629 |