CN103688092B - Multi-vane throttle valve - Google Patents

Abstract

The present invention relates to the Multi-vane throttle valve for vacuum processing chamber, including: having throttle chamber's main body of the inside being exposed to described vacuum processing chamber and the outside being exposed to atmospheric pressure, described throttle chamber main body forms the pass through openings for controlling the indoor vacuum of described application of vacuum；Being arranged in described pass through openings and flow through multiple rotatable blades of described pass through openings controlling gas, each of which rotatable blades includes in flow communication and along its longitudinally disposed cooling fluid pathways；And be arranged on the outside of described throttle chamber main body and connected drive mechanism, for rotating the plurality of rotatable blades to change the flowing of process gas.

Description

Multi-vane throttle valve

Technical field

The present invention generally relates to the valve of processing system.In particular it relates to for vacuum system Choke valve.

Background technology

Design the valve of number of different types for vacuum flush system.The type of valve include gate valve, butterfly valve, Leafy valve etc..Some gate valve design become to have opening and closing position so that gaseous flow physical ability flows completely through this valve Or do not have gaseous fluid to flow through this valve.Butterfly valve design is relatively easy, but the ability realizing linear conduction response has Limit.Leafy valve is compared butterfly valve and is provided more precise control.

One example of leafy valve is described in the United States Patent (USP) 6,293,306 (Brenes, 2001).This patent is public Having opened a kind of throttling gate valve, it includes upright, of generally rectangular valve casing.Having in valve casing inner position can be linear The gate valve of movement, for blocking the pass through openings formed in valve casing bottom.Pneumatic actuator assembly is used for Open and close mobile gate valve between position.Throttle valve component room forms the downside of valve casing, constitutes pass through openings Framework and include one group of throttle vanes being rotatably positioned in pass through openings.Actuator is driven to be used for revolving Rotating vane sheet also includes driving actuator room and for controlling the motor of the position of throttle vanes.Drive and perform Mechanism seals by driving actuator to stretch into bellows shield within valve casing.

Another type of leafy valve is by MeiVac, Inc, take " Vari-Q " as the choke valve sold of trade mark. MeiVac choke valve includes circular valve chamber, and it comprises multiple reverse rotation, triangle (i.e. pie shaped) leaf Sheet, these blades are interconnected by low friction cable drive system.

A type of leafy valve is also had to be by Ferrotec (USA) Corporation, with " Temescal " be The leaf valve of the stationary positioned that trade mark is sold, part number is 0627-0624-0.This leafy valve non-real meaning The valve of justice, because all blades are in the fixed position of 30-45 degree scope, it is in fluid communication with cryopump. Each in these blades is soldered to cross on the vaned stainless steel tube of institute.These blades are used as heat shielding And heat is passed to stainless steel tube, it is included in the cooling water flow through.Figure 1A and 1B shows aforementioned The example of fixing leafy valve, respectively illustrates facing of the structural relation between cooling tube and multiple fixing blade Figure and side cross-sectional view.

Summary of the invention

Vacuum flush system is generally of the process chamber type and vacuum pump being usually used in manufacturing computer chip, its For emptying process room.High-vacuum pump generally runs under the pressure less than plasma treatment pressure.All Leafy valve attempts to realize that processing environment carries out bigger control and protection high-vacuum pump avoids heating and avoids broken Bits enter process chamber.Leafy valve by the gas flow in regulation process chamber to produce pressure reduction so that true across this valve Empty pump can run under high vacuum levels and keep correct processing pressure in process chamber to be operated simultaneously.Tool The Multi-vane throttle valve having rotatable blades is right by the whole ranges of operation offer Linear Control across leafy valve Correct processing pressure in process chamber provides bigger control.The shortcoming of prior art Multi-vane throttle valve exists In its protection high-vacuum pump from heating and/or chip impact limited in one's ability.

The present invention aim at offer be used in vacuum flush system, gamut linear conduction can be provided The Multi-vane throttle valve controlled.Another of the present invention aims at offer and is able to carry out as the heat for vacuum pump The Multi-vane throttle valve of shielding.The present invention another aims at offer, and it is the heat with blade cooling ability The Multi-vane throttle valve of shielding.Another of the present invention aim at provide have simplification, for keeping blade The Multi-vane throttle valve of the structure of the vacuum seal integrity between room and atmospheric side.

The present invention is by providing for controlling the conduction in vacuum pump Pukou and avoiding vacuum pump to be exposed to chip and heat Amount Multi-vane throttle valve and realize these and other target.

In one embodiment, the Multi-vane throttle valve for vacuum processing chamber includes having and is exposed to application of vacuum The inside of room and be exposed to throttle chamber's main body of outside of atmospheric pressure, this throttle chamber's main body formed be used for controlling true The pass through openings of the vacuum that vacancy reason is indoor, it is interior to control gas that multiple rotatable blades are arranged on pass through openings Flowing through this pass through openings, each of which rotatable blades includes in flow communication and longitudinally disposed cold along it But fluid passage and include being arranged on the outside of throttle chamber's main body and connected drive mechanism is many to rotate Individual rotatable blades thus change the flowing of process gas.

In another embodiment of the invention, cooling fluid pathways is along the longitudinally disposed cooling of rotatable blades Pipeline.

In the further embodiment of the present invention, cooling pipe be selected from lower group: straight tube, sinusoidal pipe, Square waveform pipe, a pair pipe tunnel and at one end have connection this to the horizontal pipeline of pipe tunnel, in inner tube And between outer tube, form a pair concentric pipe of stream and longitudinal heat pipe.

In another embodiment of the invention, each blade serial interlinkage in multiple rotatable blades is to be formed Single continuous flow path.

In another embodiment of the invention, drive mechanism include drive arm, be fixedly attached to each rotatable The turning arm of blade and make the turning arm of the turning arm of a rotatable blades and the adjacent rotatable blades of series connection Pivotally connected pitman arm, wherein a pitman arm is connected to drive arm.

In another embodiment of the invention, one end of turning arm is connected to rotatable blades and the other end connects To pitman arm.

In another embodiment of the invention, choke valve includes each blade linking in multiple rotatable blades Chip cover.

In another embodiment of the invention, throttle chamber's main body includes the first body flange, the second body flange And the vane room shell being connected between the first body flange and the second body flange, wherein vane room shell bag Containing multiple rotatable blades.

In another embodiment of the invention, vane room shell include top board, base plate, the first Room sidewall, Two Room sidewalls and link the blade support feedthrough of the first Room sidewall, it supports the cooling stream of rotatable blades Body path also keeps the pressure reduction between vacuum processing chamber and atmospheric pressure.

In another embodiment of the invention, choke valve is included in application of vacuum chamber interior and the air of choke valve Press the vacuum feedthrough of each blade supported between outside in multiple rotatable blades.

In another embodiment, Multi-vane throttle valve be included in throttle chamber's main body inside and outside between, one End supports the magnetic fluid vacuum feedthrough of each blade in rotatable blades.

In another embodiment, Multi-vane throttle valve includes the rotation being connected to one end of each rotatable blades Adapter is to transport cooling fluid between each rotatable blades.

In another embodiment of Multi-vane throttle valve, when cooling pipe is heat pipe, choke valve also includes using In the refrigerating module of the one end rotatably receiving heat pipe, it is in the outside of vane room shell.Not necessarily, Refrigerating module can be flow module or electrothermal module or a combination thereof.

In another embodiment of Multi-vane throttle valve, rotatable blades includes along the longitudinal direction of rotatable blades Heart line horizontal expansion also enters the cooling tube transporting the swivel joint cooling down fluid between each rotatable blades Road.

In another embodiment of Multi-vane throttle valve, rotatable blades includes having indulging along rotatable blades To centrage horizontal expansion and enter between each rotatable blades transport cooling fluid swivel joint one Cooling pipe to concentric tube.

In another embodiment of Multi-vane throttle valve, rotatable blades is included in its longitudinal centre line side and sets Put the first cooling pipe on blade and the second cooling being arranged on blade at its longitudinal centre line opposite side Pipeline.First cooling pipe and the second cooling pipe are in fluid communication, and two cooling pipes revolve with each The swivel joint fluid communication of cooling fluid is transported between rotating vane sheet.

In another embodiment of Multi-vane throttle valve, rotatable blades includes the chip arranged on one side thereof Cover.

In another embodiment of Multi-vane throttle valve, this valve includes the coolant selected from water, cryogenic material etc..

Accompanying drawing explanation

Figure 1A is the front view of a leafy valve gear of prior art.

Figure 1B is the side view of prior-art devices shown in Figure 1A.

Fig. 2 is the perspective view of an embodiment of Multi-vane throttle valve of the present invention.

Fig. 3 is the upward view of embodiment shown in Fig. 2.

Fig. 4 is the exploded view of embodiment shown in Fig. 2, illustrated therein is chip cover and magnetic fluid feedthrough.

Fig. 5 is the perspective view of an embodiment of the rotatable blades of the present invention, illustrated therein is pair of parallel, Straight cooling pipe.

Fig. 5 A is the perspective view of another embodiment of rotatable blades, illustrated therein is a pair mirror image, square wave Cooling pipe.

Fig. 6 is the perspective view of an embodiment of the chip cover of the present invention.

Fig. 7 is the side view of an embodiment of rotatable blades, illustrated therein is magnetic fluid support member and rotation The sectional view of adaptor.

Fig. 8 is the perspective exploded view of the swivel joint of the present invention.

Fig. 9 is the perspective view of another embodiment of the swivel joint of the present invention.

Figure 10 is the amplification of fluid line, partial section, illustrated therein is at least two rotatable blades Between connection and flowed to by the fluid of fluid line.

Figure 11 is the side view of an embodiment of the blade of the present invention, illustrated therein is and has single rotary valve The rotary valve of housing.

Figure 12 is the side view of another embodiment of the blade of the present invention, illustrated therein is coolant duct, It is the single tube of the vertical central axis location along blade.

Figure 13 is the sectional view of another embodiment of the blade of the present invention, illustrated therein is a pair along blade The concentric tube of vertical central axis location.

Figure 13 A is this amplification sectional view to the sealed end of concentric tube, illustrated therein is two of cooling fluid One of possible flow passage.

Figure 14 is the sectional view of another embodiment of the blade of the present invention, illustrated therein is the longitudinal direction along blade The heat pipe of central shaft location.

Figure 15 is the perspective view of an embodiment of the feedthrough of the present invention.

Figure 16 A is the perspective view of the four sides O that an embodiment of the feedthrough of the present invention includes.

Figure 16 B is the sectional view of the four sides O shown in Figure 16 A.

Figure 17 is the side view of the magnetic fluid feedthrough of the present invention.

Detailed description of the invention

The preferred embodiments of the present invention are as shown in Fig. 2-17.Fig. 2 shows the Multi-vane throttle valve of the present invention One embodiment of 10.Choke valve 10 includes throttle chamber's main body 20, multiple rotatable blades 40 and driving machine Structure 80.Throttle chamber's main body 20 has vane room shell 20a, inner surface 21 and outer surface 22, is formed multiple The pass through openings 23 that rotatable blades 40 is located therein.Drive mechanism 80 is positioned at outside throttle chamber's main body 20 On surface 22 and connected with mobile multiple rotatable blades 40 thus change the flowing of process gas.Drive Motivation structure 80 has driving motor 81, and it has the driving arm 82 being connected to releasable pitman arm 83, connecting rod Arm 83 is releasable and is rotatably connected to turning arm 84.Fluid line 85 and multiple rotatable blades 40 In each blade interconnection.

Fig. 3 is the upward view of Multi-vane throttle valve 10.From this angle it can be seen that throttle chamber's main body 20 is wrapped Include the first body flange 24 for vacuum pump side and the second body flange 26 for process chamber side.In the first method Being pass through openings 23 between blue template 24 and the second body flange 26, it includes vane room 28, multiple revolves Rotating vane sheet 40 is arranged in vane room 28.Vane room 28 has base plate 30, it is provided be installed to cold But the cooling fluid inlet 32 of fluid header 34 and cooling fluid issuing 33.

With reference now to Fig. 4, it illustrates the exploded view of the embodiment of the Multi-vane throttle valve 10 shown in Fig. 1. Can be seen more clearly from from it, throttle chamber's main body 20 has pass through openings 23, indicates and the second flange The vane room 28 that template 26 is adjacent.Vane room 28 has the first Room sidewall 28a, and it has multiple equidistantly opens Mouth 29, installs vacuum seal feedthrough 70 in each opening 29.Each vacuum seal feedthrough 70 receives That one end 41 through this feedthrough of one of multiple rotatable blades 40.Vacuum seal feedthrough 70 can be revolved Turn ground support blade 40.

Each in multiple rotatable blades 40 is rotatable by the bearing 35 being arranged on the second sidewall paneling 36 Be supported on the other end 42.Second sidewall paneling 36 seals with multiple bolt 36a but is removably attached to the To facilitate access to vane room 28 when needs maintenance and repairing on two sidewall 28b.In this embodiment, often One blade 40 has link that side towards process chamber of blade 40, nonessential chip cover 43.Broken Bits cover 43 preferably uses when blade 40 is by copper production.When blade 40 is manufactured by rustless steel, it is not necessary to chip Cover.

When process chamber is generally used for chemical gaseous phase deposition, including for target being entered in process chamber The chip of the various different chemical goods of row coating is easier to remove from rustless steel, compares for copper is removed. It addition, rotatable blades 40 is also prevented from chip arrives vacuum pump, owing to its repair cost is higher, thus anti- Only chip entrance vacuum pump is one of importance of the present invention.

Another importance is the heat carrying out in the process chamber relating to during technique.Owing to vacuum pump generally exists Run continuously during technique, process the gas after the heating involved by chamber processes and discharged by vacuum pump.Come Also vacuum pump is caused to damage from the heat of gas.Even if multiple blades 40 have when being in fully closed position Help alleviate this consequence, its most feasible solution, because the purpose of throttle vanes 40 is more preferably Ground controls application of vacuum, completely closes them and does not reaches target.

Another importance of the present invention is to include the cooling system for cooling down each rotatable blades 40. In the present invention, multiple blades 40 include being disposed therein and the length of each blade along multiple blades 40 The cooling pipe 44 of degree direction longitudinal extension.Outside cooling fluid flows through cooling pipe 44 to remove from leafy The heat that vacuum pump pass through openings 23 expellant gas of sheet choke valve 10 absorbs.Cooling pipe 44 with include The fluid line 85 of multiple swivel joints 87 is in fluid communication.Nonessential drive mechanism cover 110 may be installed To surround and protection driving arm 82, pitman arm 83 and turning arm above drive mechanism 80 and swivel joint 87 84。

With reference now to Fig. 5, it illustrates the perspective view of an embodiment 40 of the blade of the present invention.In this enforcement In example, blade 40 has nearly blade end 45 and remote blade end 46.Remote blade end 46 has far-end support member 47, it is configured to be connected to remote blade end 46 with rotatable relation the second sidewall paneling of throttle chamber's main body 20 Cooperation support member in 36.Nearly blade end 45 has proximal support part 48, be configured to nearly blade end 45 with Rotatable relation is connected to the cooperation support member in the first Room sidewall 28a of throttle chamber's main body 20.Blade 40 have the first cooling pipe 44a of the half extending longitudinally through blade 40 and extend longitudinally through blade Second half the second cooling pipe 44b of 40.Connect cooling pipe 44c(and see Fig. 7) at neighbouring remote blade Hold at 46 with the first cooling pipe 44a and the second cooling pipe 44b cross connection to produce continuous print cooling tube Road 44.Although showing linear cooling fluid pathways or pipeline, it should be noted that cooling pipe can have other knot Structure, such as straight tube, sinusoidal pipe, square waveform pipe, a pair pipe tunnel and at one end have connection this is right The horizontal pipeline of pipe tunnel, a pair concentric pipe forming stream between the inner and outer pipe sections and longitudinal heat Pipe.Fig. 5 A shows the blade with a pair square waveform cooling pipe.

Fig. 6 shows the perspective view of nonessential chip cover 43.The side of blade 40 linked by chip cover 43, It is preferably exposed to that side of process chamber, to prevent the damaging material from process chamber from entering vacuum pump. Chip cover 43 can make to link blade 40 by any known method, includes but not limited to soldering, uses machinery Securing member, connecting elements so that chip cover to be buckled in blade 40 first-class.Chip cover 43 is preferably by stainless steel Become, but also can be by protecting blade 40 during one or more vacuum chambers process and keep chip cover complete Any metal and/or the nonmetallic materials of whole property are made.

Fig. 7 is the side-looking partial section of the vane embodiment 40 shown in Fig. 5, has coolant feeding member With coolant return.As it was earlier mentioned, this vane embodiment 40 includes nearly blade end 45 and remote blade end 46.Remote blade end 46 has far-end support member 47, and nearly blade end 45 has proximal support part 48.Blade 40 have along or by the first cooling pipe 44a of the half longitudinal extension of blade 40 and along or pass through blade Second cooling pipe 44b of second half longitudinal extension of 40.Connect cooling pipe 44c in neighbouring remote blade end With the first cooling pipe 44a and the second cooling pipe 44b cross connection to produce continuous print cooling pipe at 46 44.At nearly blade end 45, proximal support part 48 is configured to a pair concentric tube 49a(outer tube), 49b (inner tube), forms outer tube room 48a and inner tube room 48b, its middle external tube room 48a and the first cooling pipe 44a Fluid communication, inner tube room 48b and the second cooling pipe 44b fluid communication.Inner tube room and outer tube room 48a, 48b extends in swivel adapter 50, and each in inner tube room and outer tube room 48a, 48b is respectively with cold But liquid supply mouth 60a connects with return port 60b.

Fig. 8 shows the decomposition diagram of the swivel adapter 50 shown in Fig. 7.At swivel adapter 50 This embodiment in, adapter 50 include the first shell of revolution 52 and with first rotate columella be aligned and fixed to Second shell of revolution 54 thereon.Adapter 50 also includes quill shaft 53, and it is axially disposed within the first shell of revolution In 52 and be configured to receive through quill shaft 53 inner tube 49b that enters the second shell of revolution 54.Revolve in hollow Interval 52a, this interval is formed between a part and the inwall of the first shell of revolution 52 of the outer surface of rotating shaft 53 52a is in fluid communication with the outer tube room 48a of proximal support part 48.As shown in Figure 7, coolant supply mouth 60a is physically connected to the first shell of revolution 52, and coolant return port 60b is physically connected to the second shell of revolution 54. This embodiment realizes coolant and passes in and out blade 40 by nearly blade end 45.

Fig. 9 shows the perspective partial cross-sectional figure of another embodiment of swivel adapter 50.In this embodiment, Swivel adapter 50 only includes single shell of revolution 56 and the rotary shaft 57 changed.Shell of revolution 56 provide with There is the first the same function of shell of revolution 52 of coolant supply mouth 60a.Rotary shaft 57 extends through rotation Shell 56 also terminates with coolant return port 60b.This embodiment reduces part needed for swivel adapter 50 Quantity, thus make assembling and maintenance be easier to and reduce swivel adapter 50 while providing said function Cost.

Figure 10 is rotary valve 50 and the amplification sectional view of proximal support part 48, illustrated therein is for cooling down leaf The fluid flowing of sheet 40.In this embodiment, as it can be seen, the outer tube 49a of proximal support part 48 is by wearing Logical support member 70 is pivotably supported, and it is fixed to the first Room sidewall 28a, and inner tube 49b extends beyond break-through Support member 70 also enters rotary valve 50.Arrow 150 indicates coolant to flow into blade 40, and arrow 160 refers to Show that coolant flows out blade 40.Although provide the description about rotary valve 50 above in conjunction with Fig. 8, but should Working as understanding, when two or more blade 40 is linked coolant supply mouth, a rotary valve 50 will make rotation Shell 56 one end is axially coupled to coolant supply mouth 60a and is coupled laterally to coolant return port 60b, for Next adjacent blades 40 being connected with previous blade 40 serial flow, rotary valve 50 will make shell of revolution 56 One end is axially coupled to coolant return port 60b and is coupled laterally to coolant supply mouth 60a.For each Other blade 40, coolant supply mouth 60a and coolant return port 60b is axially or transversally connected to rotate Distributing alternate to form the continuous coo1ing liquid loop by blade 40 of shell 56.

With reference now to Figure 11, it is shown that have and combine shown in Fig. 9 and the blade 40 of described rotary valve 50 Side view.Similar with the embodiment of the blade 40 shown in Fig. 5, this embodiment of blade 40 includes having The nearly blade end 45 of proximal support part 48 and the remote blade end 46 with far-end support member 47.Blade 40 has The the first cooling pipe 44a and second half by blade 40 that have half longitudinal extension by blade 40 are indulged To the second cooling pipe 44b extended.Connect cooling pipe 44c cold with first at neighbouring remote blade end 46 But pipeline 44a and the second cooling pipe 44b cross connection are to produce continuous print cooling pipe 44.At nearly blade At the proximal support part 48 of end 45, swivel adapter 50 only includes single shell of revolution 56 and the rotation changed Rotating shaft 57.Shell of revolution 56 provides the function as first shell of revolution 52 with coolant supply mouth 60a. Rotary shaft 57 is in fluid communication through shell of revolution 56 and with coolant return port 60b.

Figure 12 shows another embodiment of blade 40.In this embodiment, blade 40 has single cooling Liquid pipeline 44, it extends to far-end support member 47 along the vertical central axis proximally support member 48 of blade 40. Proximal support part 48 is pivotably supported by feedthrough 70 and includes single break-through ring 72.Due to feedthrough 70 Being pivotably supported near-end blade support 48, coolant supply mouth 60a can be fixedly attached to break-through ring 72, Wherein proximal support part 48 is single tube rather than a pair concentric tube.Moreover, it is noted that due to coolant duct 44 is the single tube of the vertical central axis extension along blade 40, and fluid coolant has to enter into one end of blade 40 (i.e. near blade end 45 or remote blade end 46) also exits at the other end.Therefore, far-end support member 47 also must Must include feedthrough 70 and the break-through ring 72 being similar to, coolant return port 60b links break-through ring 72.As above Described, when two or more blade 40 is included in choke valve 10, coolant supply mouth 60a and Coolant return port 60b distributes to break-through ring 72 by alternate at nearly blade end 45 and remote blade end 46 To form the continuous coo1ing liquid loop by blade 40.

Figure 13 shows that blade 40(is not shown) another embodiment of coolant duct 44, wherein cool down Fluid i.e. coolant enters from same one end (i.e. near blade end 45) of blade 40 and exits.In this embodiment In, coolant duct 44 is a pair concentric tube 44d(outer tube) and 44e(inner tube), it is along blade 40 Vertical central axis extends, thus produces outer tube room 44f and inner tube room 44g.Coolant enter pipe room in the lump Exited by another pipe room.Figure 13 A shows the enlarged drawing of the coolant duct 44 at remote blade end 46. Arrow 200 indicates coolant along the internal flow of coolant duct 44.In the structure shown here, rotary valve 50 is even The proximal support part 48 formed by coolant duct 44 at nearly blade end 45 it is supported on together with feedthrough 70. As it was earlier mentioned, for the assembly with two or more blade, coolant relative to outer and inner pipe room 44f, The direction of 44g flowing is by alternate.

Figure 14 shows another embodiment of the blade 40 with cooling pipe.In this embodiment, blade The cooling system of 40 includes the heat pipe 130 arranged along the vertical central axis of blade 40, and it has heat pipe near-end 132 and heat pipe far-end 150.Heat pipe far-end 150 is by the bearing 152 being arranged in bearing body 154 rotatably Supporting, cartridge housing 154 links the second sidewall 36 of throttling shell main body 22.Heat pipe near-end 132 is by feedthrough 70 are pivotably supported and extend to throttle the outsides of shell main body 22 and enter swivel adapter 50.Heat pipe is near The end 132a of end 132 is rotatably retained in swivel adapter 50.Swivel adapter 50 can be cold But liquid module, its shell of revolution 56 with formation adapter chamber 56a and adapter chamber 56a fluid communication Coolant supply mouth 60a and coolant return port 60b.Heat pipe near-end in being arranged on adapter chamber 56a 132 surroundings connect multiple heat pipe radiating fins 131, and these fin are thermally connected to heat pipe 130.Replace coolant Module, one or more electrothermal modules can be as a part for swivel adapter 50, and its offer is used for cooling down The cooling body of heat pipe near-end 132.Heat pipe 130 and electrothermal module have the typical case of these components and run and knot Structure characteristic and for persons skilled in the art it is known that thus without its operation is explained or describes.

Figure 15 shows the perspective view of an embodiment of feedthrough 70.Feedthrough 70 has for by feedthrough The break-through flange 74 of 70 sidewalls linking vane room 28 and fixing nut 75.Feedthrough 70 also include for The quill shaft 76 of the end of reception and support blade 40.Quill shaft 76 rotates in feedthrough 70 and keeps The sealing between outside under being in the inside reduced under pressure and be in atmospheric pressure of throttle vanes valve.

Figure 16 A and 16B shows for being pivotably supported proximal support part 48 and indulging along blade 40 Feedthrough 70 close of far-end support member 47 it is pivotably supported when central shaft arranges single coolant duct One embodiment of seal structure.In the embodiment shown in Figure 16 A and 16B, feedthrough 70 includes four sides O Shape ring 77 ring seal is so that the vacuum within throttle body 22 and the isolated from atmosphere outside throttle body 22. O 77 includes in two sealing surfaces 77a, 77b on O periphery and O inner circumferential on four sides Two sealing surfaces 77c, 77d.O 77 is compared standard O and is provided the reliability increased on four sides.

Figure 17 shows the side view of the preferred embodiment of feedthrough 70.In this embodiment, feedthrough 70 Including magnetic fluid seal and for forming the relevant parts of this sealing member.Preferably magnetic fluid feedthrough 70 can be from Ferrotec (USA) Corporation of state of New Hampshire Bedford with customed product HS- 500-SFBSC obtains.

Although the preferred embodiment of the present invention is described at this, above description is merely illustrative. Invention disclosed herein can be revised by the technical staff in relevant art field further, all such modifications It is accordingly to be regarded as in invention scope defined in the appended claims.

Claims (19)

1., for the Multi-vane throttle valve of vacuum processing chamber, described valve includes:

There is throttle chamber's main body of the inside being exposed to described vacuum processing chamber and the outside being exposed to atmospheric pressure, Described throttle chamber main body forms the pass through openings for controlling the indoor vacuum of described application of vacuum；

It is arranged on the interior multiple rotatable blades flowing through described pass through openings with control gas of described pass through openings, Each of which rotatable blades includes proximal support part, far-end support member and extends through proximal support part and remote The cooling fluid pathways of at least one in end support member, described cooling fluid pathways and each rotatable blades Fluid communication is the most longitudinally disposed along it；The cooling fluid pathways of each of which rotatable blades is in described throttle chamber Extend outside main body and extend to have in the swivel adapter of coolant supply mouth and coolant return port；Its Middle proximal support part is rotatably connected to swivel adapter, and each swivel adapter is exposed to atmospheric pressure, And the cooling fluid pathways of each rotatable blades supplies mouth by the coolant of swivel adapter and coolant is returned Answering back and be in fluid communication with adjacent rotatable blades, wherein cooling fluid pathways is formed by multiple rotatable blades Continuous flow path；And

It is arranged on the outside of described throttle chamber main body and connected drive mechanism, is used for rotating described many Individual rotatable blades is to change the flowing of process gas；Described drive mechanism can rotate simultaneously be fixedly attached to The turning arm of each proximal support part of the plurality of rotatable blades.

Multi-vane throttle valve the most according to claim 1, wherein said cooling fluid pathways is that edge can The cooling pipe that rotating vane is longitudinally disposed.

Multi-vane throttle valve the most according to claim 2, wherein said cooling pipe is selected from lower group: Straight tube, sinusoidal pipe, square waveform pipe, a pair pipe tunnel and at one end have connection this to longitudinal pipe The horizontal pipeline in road, a pair concentric pipe forming stream between the inner and outer pipe sections and longitudinal heat pipe.

Multi-vane throttle valve the most according to claim 1, in wherein said multiple rotatable blades Each blade includes along its longitudinally disposed parallel series interconnection to form the cooling pipe of single continuous flow path.

Multi-vane throttle valve the most according to claim 1, wherein said drive mechanism include drive arm, The turning arm being fixedly attached to each rotatable blades and the turning arm making a rotatable blades and the phase connected The pitman arm that the turning arm of adjacent rotatable blades is pivotally connected, wherein a pitman arm is connected to described driving arm.

Multi-vane throttle valve the most according to claim 5, one end of wherein said turning arm is connected to Rotatable blades and the other end are connected to described pitman arm.

Multi-vane throttle valve the most according to claim 1, also includes linking the plurality of rotatable leaf The chip cover of each blade in sheet.

Multi-vane throttle valve the most according to claim 1, wherein said throttle chamber main body includes first Body flange, the second body flange and be connected between described first body flange and described second body flange Vane room shell, described vane room shell comprises the plurality of rotatable blades.

Multi-vane throttle valve the most according to claim 8, wherein said vane room shell include top board, Base plate, the first Room sidewall, the second Room sidewall and link the blade support feedthrough of the first Room sidewall, its Support the cooling fluid pathways of rotatable blades and keep the pressure reduction between vacuum processing chamber and atmospheric pressure.

Multi-vane throttle valve the most according to claim 1, is additionally included in the vacuum processing chamber of choke valve The vacuum feedthrough of each blade in the plurality of rotatable blades is supported between internal and atmospheric pressure outside.

11. Multi-vane throttle valve according to claim 10, wherein said vacuum feedthrough is magnetic Fluid vacuum feedthrough.

12. Multi-vane throttle valve according to claim 3, wherein when cooling pipe is heat pipe, institute Stating choke valve and also include the refrigerating module of the one end for rotatably receiving heat pipe, it is at vane room shell Outside.

13. Multi-vane throttle valve according to claim 12, wherein said refrigerating module is selected from lower group: Flow module or electrothermal module.

14. use choke valve to provide gamut linear conduction control during vacuum chamber processes in vacuum processing chamber The method of system, described method includes:

Obtain the Multi-vane throttle valve being used together with described vacuum processing chamber, including being arranged on throttle chamber's main body Vane room shell in multiple rotatable blades；Each of which peace in wherein said multiple rotatable blades Described choke valve is flow through with control gas in being contained in the pass through openings that described throttle chamber main body is formed；

Each blade in the plurality of rotatable blades is configured with proximal support part, far-end support member With the cooling fluid pathways of at least one extended through in proximal support part and far-end support member, described cooling Fluid passage is in fluid communication and longitudinally disposed along it with each rotatable blades；Each of which rotatable blades Cooling fluid pathways extends outside described throttle chamber main body and extends to have coolant supply mouth and coolant In the swivel adapter of return port；Wherein proximal support part is rotatably connected to swivel adapter, Mei Yixuan Turn adapter and be exposed to atmospheric pressure, and the cooling fluid pathways of each rotatable blades passes through swivel adapter Coolant supply mouth and coolant return port be in fluid communication with adjacent rotatable blades, wherein cool down fluid logical Road forms the continuous flow path by multiple rotatable blades；

Cooling fluid is made to flow through the cooling pipe of each rotatable blades；And

The orientation being rotatably adjustable each rotatable blades carries during the application of vacuum in vacuum processing chamber Control for linear conduction.

15. methods according to claim 14, wherein said constitution step includes described cooling tube Road is configured to one of the following: straight tube, sinusoidal pipe, square waveform pipe, a pair pipe tunnel at one end Have and connect this to the horizontal pipeline of pipe tunnel, a pair concentric tube forming stream between the inner and outer pipe sections Road, longitudinal heat pipe or a combination thereof.

16. methods according to claim 14, wherein said constitution step include making the plurality of can The cooling pipe serial fluid of each blade in rotating vane connects.

17. methods according to claim 14, also include linking chip cover the plurality of rotatable Each blade in blade.

18. methods according to claim 14, wherein said acquisition step includes that acquisition has magnetic The choke valve of fluid feedthrough, described magnetic fluid feedthrough is used for being pivotably supported cooling pipe and can revolving Rotating vane sheet.

19. methods according to claim 15, also include: when cooling fluid pathways is heat pipe, Refrigerating module is connected to heat pipe described choke valve atmospheric side, be positioned at vane room housing exterior that End, wherein said refrigerating module is pivotably supported the described end of described heat pipe.