CN103681181B - For the cathode electron gun of microfocus x ray tube - Google Patents

For the cathode electron gun of microfocus x ray tube Download PDF

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Publication number
CN103681181B
CN103681181B CN201310603688.8A CN201310603688A CN103681181B CN 103681181 B CN103681181 B CN 103681181B CN 201310603688 A CN201310603688 A CN 201310603688A CN 103681181 B CN103681181 B CN 103681181B
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electrode
microfocus
electron gun
filament
cathode electron
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CN103681181A (en
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刘骏
吴爱军
王刘成
李育林
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WUXI UNICOMP TECHNOLOGY Co Ltd
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WUXI UNICOMP TECHNOLOGY Co Ltd
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Abstract

The invention discloses a kind of cathode electron gun for microfocus X-ray pipe, comprise glass stem, ceramic electrode, filament cap, cathode shield, electrode holder, filament; Two in eight electrodes of described glass stem are connected with described ceramic electrode one end, and six are connected with described filament cap; Described ceramic electrode is fixed on described electrode holder, and the described ceramic electrode other end is connected with described filament, and described electrode holder is fixed in described filament cap, and described filament cap is located in described cathode shield.Under the high voltage electric field effect of 100KV, thermionic current can reach 30 μm in the convergence focus at 15mm stroke place, make focus 30 μm of tube voltages be that the x-ray tube of 100KV becomes possibility.

Description

For the cathode electron gun of microfocus x ray tube
Technical field
The present invention relates to electron gun technical field, especially a kind of cathode electron gun for microfocus x ray tube.
Background technology
At present, the X-ray tube of domestic production is large focal spot X-ray tube, and its minimum focus can accomplish 0.3mm × 0.3mm; Be commonly used to health care and the flaw detection of high-power technique, the fields such as safety check.Along with the development of sciemtifec and technical sphere, there is surface mount (i.e. SMT) technology.Use SMT technology can make electronic product reduced volume 40 ~ 60%, weight reduction 60 ~ 80%.But the thing followed is traditional detection means, and common focus X-ray ray machine etc. can not meet the existing quality of production product and the requirement of reliability, especially cannot find out the defect of components and parts inside.So just there is new detection means, microfocus X-ray machine, the core devices of this equipment is microfocus X-ray pipe, the size of this light pipe focus depends on again cathode electron gun (i.e. the cathode assembly of light pipe), want the X-ray tube making little focus, electron stream that just must be superfine, the at present domestic X-ray tube also not having focus < 300 μm.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, propose a kind of cathode electron gun for microfocus X-ray pipe, is the X-ray tube of focus < 300 μm.
In order to realize foregoing invention object, the invention provides following technical scheme: a kind of cathode electron gun for microfocus X-ray pipe, comprising glass stem, ceramic electrode, filament cap, cathode shield, electrode holder, filament; Two in eight electrodes of described glass stem are connected with described ceramic electrode one end, and six are connected with described filament cap; Described ceramic electrode is fixed on described electrode holder, and the described ceramic electrode other end is connected with described filament, and described electrode holder is fixed in described filament cap, and described filament cap is located in described cathode shield.
Further, described two electrodes are connected with described ceramic electrode through copper-nickel alloy sheet wire.
Further, described two electrodes are molybdenum electrode.
Further, described six electrodes be connected with described filament cap are the electrode that molybdenum maybe can cut down making.
Further, described ceramic electrode and described electrode holder are adopted and are screwed.
Further, described filament cap, described cathode shield or described electrode holder adopt 304 stainless steel materials to make.
Further, described ceramic electrode adopts 95% aluminium oxide ceramics and carries out ceramic metallization process.
Further, described filament adopts pure tungsten to make.
Further, described six electrodes adopt 304 stainless steels to be connected location with described filament cap.
Compared with prior art, the present invention has the following advantages: under the high voltage electric field effect of 100KV, thermionic current can reach 30 μm in the convergence focus at 15mm stroke place, make focus 30 μm of tube voltages be that the x-ray tube of 100KV becomes possibility.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
In figure:
1, glass stem; 2, ceramic electrode; 3, filament cap; 4, cathode shield; 5, copper-nickel alloy sheet wire; 6, ceramic electrical electrode seat; 7, filament.
Embodiment
Describe the present invention below in conjunction with accompanying drawing, the description of this part is only exemplary and explanatory, should not have any restriction to protection scope of the present invention.
A kind of cathode electron gun for microfocus X-ray pipe as shown in Figure 1, comprises glass stem 1, ceramic electrode 2, filament cap 3, cathode shield 4, copper-nickel alloy sheet wire 5, electrode holder 6, filament 7; Two in eight electrodes of described glass stem 1 are connected with described ceramic electrode 2 one end through described copper-nickel alloy sheet wire 5, and six are connected with described filament cap 3; Described ceramic electrode 2 is fixed on described electrode holder 6, and described ceramic electrode 2 other end is connected with described filament 7, and described electrode holder 6 is fixed in described filament cap 3, and described filament cap 3 is located in described cathode shield 4.
Wherein, described two electrodes be connected with described ceramic electrode 2 are molybdenum electrode.Other six electrodes be connected with described filament cap 3 are the electrode that molybdenum maybe can cut down making, adopt 304 stainless steels to be connected location with described filament cap 3.
Described ceramic electrode 2 and described electrode holder 6 are adopted and are screwed.Described filament cap 3, described cathode shield 4 or described electrode holder 6 adopt 304 stainless steel materials to make.Described ceramic electrode 2 adopts 95% aluminium oxide ceramics and carries out ceramic metallization process.Described filament 7 adopts pure tungsten to make.
The present invention, by new thought, adopts high-tech design, enables domestic production manufacture the x-ray tube of tube voltage 100KV focus 30 μm.

Claims (9)

1. for a cathode electron gun for microfocus X-ray pipe, it is characterized in that: comprise glass stem, ceramic electrode, filament cap, cathode shield, electrode holder, filament; Two in eight electrodes of described glass stem are connected with described ceramic electrode one end, and six are connected with described filament cap; Described ceramic electrode is fixed on described electrode holder, and the described ceramic electrode other end is connected with described filament, and described electrode holder is fixed in described filament cap, and described filament cap is located in described cathode shield.
2. as claimed in claim 1 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described two electrodes are connected with described ceramic electrode through copper-nickel alloy sheet wire.
3. as claimed in claim 2 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described two electrodes are molybdenum electrode.
4. as claimed in claim 1 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described six electrodes be connected with described filament cap are the electrode that molybdenum maybe can cut down making.
5. as claimed in claim 1 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described ceramic electrode and described electrode holder are adopted and be screwed.
6. as claimed in claim 1 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described filament cap, described cathode shield or described electrode holder adopt 304 stainless steel materials to make.
7. as claimed in claim 1 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described ceramic electrode adopts 95% aluminium oxide ceramics and carries out ceramic metallization process.
8. as claimed in claim 1 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described filament adopts pure tungsten to make.
9. according to claim 1 for the cathode electron gun of microfocus X-ray pipe, it is characterized in that: described six electrodes adopt 304 stainless steels to be connected location with described filament cap.
CN201310603688.8A 2013-11-26 2013-11-26 For the cathode electron gun of microfocus x ray tube Active CN103681181B (en)

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104934284B (en) * 2015-06-17 2018-01-16 无锡日联科技股份有限公司 Multistage beam forming cathode electron gun for atomic focal spot x-ray tubes
CN105321786B (en) * 2015-10-19 2017-07-14 中国原子能科学研究院 A kind of device and method for obtaining X-ray spot light

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3935498A (en) * 1968-05-24 1976-01-27 General Electric Company Electron gun assembly
US4075415A (en) * 1977-01-06 1978-02-21 Raytheon Company Tube with terminal end cap
US6381305B1 (en) * 1998-02-06 2002-04-30 Hamamatsu Photonics K.K. X-ray tube having a hood electrode
US6487272B1 (en) * 1999-02-19 2002-11-26 Kabushiki Kaisha Toshiba Penetrating type X-ray tube and manufacturing method thereof
CN1572011A (en) * 2001-10-19 2005-01-26 浜松光子学株式会社 X-ray tube and method of producing the same
CN201780959U (en) * 2010-08-05 2011-03-30 中航华东光电有限公司 Electron gun for airborne head-up display tube
CN203553096U (en) * 2013-11-26 2014-04-16 无锡日联科技有限公司 Cathode electron gun used for micro-focus X-ray tube

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5077777A (en) * 1990-07-02 1991-12-31 Micro Focus Imaging Corp. Microfocus X-ray tube
KR100739059B1 (en) * 2000-07-27 2007-07-12 삼성에스디아이 주식회사 Stem for cathode ray tube
JP2006164819A (en) * 2004-12-09 2006-06-22 Hitachi Medical Corp Microfocus x-ray tube and x-ray device using it
CN202888120U (en) * 2012-10-31 2013-04-17 丹东奥龙射线仪器有限公司 Plug and play type lamp filament device of open type microfocus X ray tube
CN103219212B (en) * 2013-05-08 2015-06-10 重庆启越涌阳微电子科技发展有限公司 Graphene serving as cathode of X-ray tube and X-ray tube thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3935498A (en) * 1968-05-24 1976-01-27 General Electric Company Electron gun assembly
US4075415A (en) * 1977-01-06 1978-02-21 Raytheon Company Tube with terminal end cap
US6381305B1 (en) * 1998-02-06 2002-04-30 Hamamatsu Photonics K.K. X-ray tube having a hood electrode
US6487272B1 (en) * 1999-02-19 2002-11-26 Kabushiki Kaisha Toshiba Penetrating type X-ray tube and manufacturing method thereof
CN1572011A (en) * 2001-10-19 2005-01-26 浜松光子学株式会社 X-ray tube and method of producing the same
CN201780959U (en) * 2010-08-05 2011-03-30 中航华东光电有限公司 Electron gun for airborne head-up display tube
CN203553096U (en) * 2013-11-26 2014-04-16 无锡日联科技有限公司 Cathode electron gun used for micro-focus X-ray tube

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