CN103676971A - Vacuum ultraviolet radiation intensity control device and method - Google Patents

Vacuum ultraviolet radiation intensity control device and method Download PDF

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Publication number
CN103676971A
CN103676971A CN201310647605.5A CN201310647605A CN103676971A CN 103676971 A CN103676971 A CN 103676971A CN 201310647605 A CN201310647605 A CN 201310647605A CN 103676971 A CN103676971 A CN 103676971A
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detector
irradiation
sample board
ultraviolet
intensity
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CN103676971B (en
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傅立
刘刚
杨碧琦
刘继超
万峰
王惠芬
张丽新
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Shanghai Institute of Satellite Equipment
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Abstract

The invention provides a radiation intensity control device for a vacuum ultraviolet radiation test. The device comprises vacuum equipment, a vacuum ultraviolet intensity detector, a detector power supply, a detector moving mechanism, a detector servo motor, a detector servo motor power supply, a charge amplifier, a data acquisition card, an ultraviolet radiation sample board, a sample board moving mechanism, a sample board moving guide rail, a sample board servo motor, a sample board servo motor power supply, a controller and a computer. The invention further provides a radiation intensity control method for the vacuum ultraviolet radiation test. According to the method, the total radiation quantity of a light source is obtained by means of the vacuum ultraviolet intensity detector, the distance between the vacuum ultraviolet light source and a radiation sample is adjusted through the servo motors by means of the closed-loop control principle, and vacuum ultraviolet radiation intensity borne by the sample is kept constant. The radiation intensity control device has the advantages of being simple in structure, high in universality, convenient to apply, high in precision, fast in response, and capable of effectively reducing the cost for the vacuum ultraviolet radiation test of spacecraft products and improving test precision.

Description

VUV Irradiation strength control device and control method
Technical field
The present invention relates to VUV Irradiation test field, particularly, relate to a kind of VUV Irradiation strength control device and control method.
Background technology
The wavelength of vacuum ultraviolet is 115-200nm, can only under vacuum state, propagate.The vacuum ultraviolet being produced by the sun under space environment can cause degeneration and the degraded of related coatings device for Optical Properties of Materials, mechanical property and chemical property.VUV Irradiation test is exactly the VUV Irradiation under ground simulation vacuum environment, and its intensity is generally 5-10 times of evacuated solar ultraviolet irradiation intensity, and requires in process of the test, to keep constant.The general deuterium lamp adopting with MgF window of VUV Irradiation test, its luminous form is conical.Due to the pollution of volatile matter to MgF window in the performance degradation of luminophor itself and irradiation process, the luminous intensity of light source can reduce gradually with service time, thereby irradiation intensity also can cause test accuracy poor along with test period reduces gradually, be therefore necessary irradiation intensity to compensate; On the other hand, in order to meet the accuracy requirement to irradiation intensity, guarantee the constant of ultraviolet irradiation intensity, VUV Irradiation test is just scrapped when not reaching serviceable life with deuterium lamp, has greatly increased experimentation cost.
At present, NASA has set up the equipment that is used for carrying out the test of Spacecraft Material VUV Irradiation, has obtained the VUV Irradiation performance degradation curve of multiple material, for spacecraft thermal control design and structural design have played supporting role.Domestic correlative study mechanism has also carried out some pilot studys in VUV Irradiation field, but does not also possess the ability of VUV Irradiation test, can only carry out near ultraviolet radiation test more than 200nm.
Summary of the invention
For the technological gap of current VUV Irradiation test, for improving test accuracy, the object of this invention is to provide a kind of VUV Irradiation test irradiation intensity control device and control method.This VUV Irradiation experiment irradiation intensity control device is based on loop control theory, by the monitoring to ultraviolet source total radiation, distance between change irradiated sample plate and vacuum ultraviolet light source is to revise the irradiation intensity on sample board irradiation face, guarantee the constant of VUV Irradiation test irradiation intensity, installation and flexible adjustment, convenient application.
According to an aspect of the present invention, provide a kind of VUV Irradiation test irradiation intensity control device, comprising: vacuum equipment, vacuum ultraviolet intensity detector, detector power supply, detector moving mechanism, detector servomotor, detector power supply, charge amplifier, data collecting card, ultraviolet irradiation sample board, sample board travel mechanism, sample board moving guide rail, sample board servomotor, sample board servo motor power supply, controller and computing machine, vacuum ultraviolet intensity detector, detector moving mechanism, ultraviolet irradiation sample board, sample board travel mechanism and sample board moving guide rail are arranged on vacuum equipment inside, other parts are arranged on vacuum equipment outside, sample board moving guide rail two ends are connected with vacuum equipment is affixed, sample board travel mechanism is connected with sample board moving guide rail, ultraviolet irradiation sample board is connected with sample board travel mechanism, sample board servomotor one end is connected with sample board travel mechanism, and the other end is connected to controller by sample board servo motor power supply, detector moving mechanism is arranged between ultraviolet source and ultraviolet irradiation sample board, vacuum ultraviolet intensity detector is connected with detector moving mechanism, detector servomotor one end is connected with vacuum ultraviolet intensity detector, and the other end is connected to controller by detector servo motor power supply, charge amplifier is connected with vacuum ultraviolet intensity detector, and data collecting card one end is connected with charge amplifier, and the other end is connected to controller, and computing machine is connected with controller, and detector power supply is connected with vacuum ultraviolet intensity detector.
Preferably, ultraviolet irradiation sample board irradiation plane and light source irradiation face keeping parallelism.
Preferably, sample board travel mechanism is not more than 10cm/min along the translational speed of sample board moving guide rail direction.
Preferably, detector moving mechanism is at light source irradiation rotation with in surface, and the distance d of plane of living in and light source 0remain unchanged.
Preferably, vacuum ultraviolet intensity detector is used MgF window, in vacuum tightness, is 10 -3under the environment of Pa, normally use, and vacuum ultraviolet intensity detector service time was no longer than 1000 hours.
Preferably, sample board travel mechanism slides on sample board moving guide rail, and the distance between sample board travel mechanism and light source is at certain limit [d 1, d 2] interior adjustment automatically, and be greater than detector moving mechanism apart from the distance of light source.
According to another aspect of the present invention, a kind of irradiation intensity control method for VUV Irradiation test is provided, utilize the total radiation of the light source that vacuum ultraviolet intensity detector obtains, adopt loop control theory, regulate the distance between vacuum ultraviolet light source and irradiation sample, guarantee that the VUV Irradiation intensity that sample is subject to is constant, specifically comprise the following steps:
The first step, utilizes standard vacuum ultraviolet source to carry out the intensity calibration of vacuum ultraviolet detector in 115-200nm wave band, i.e. vacuum ultraviolet intensity/output current;
Second step, installs detector, sample, the vacuum equipment trystate of starting shooting;
The 3rd step, opens ultraviolet source, is controlling the UV radiation intensity S that inputs the expectation of ultraviolet irradiation sample board on computing machine rwith exposure time T;
The 4th step, vacuum ultraviolet detector moving, to being subject to irradiation zone, obtains current light source total radiation;
The 5th step, based on feedback current light source total radiation, computing machine is controlled servomotor by controller and is moved the distance d between ultraviolet source and ultraviolet irradiation sample board, makes the vacuum ultraviolet intensity on ultraviolet irradiation sample board reach S r, test the beginning of clocking;
The 6th step, vacuum ultraviolet intensity detector return, goes to the 4th step after 20 minutes;
The 7th step, exposure time reaches T, off-test.
Preferably, in the 5th step, if the distance d between ultraviolet source and ultraviolet irradiation sample board reaches the minimum value d of mobile range 1, computer prompted is changed light source.
Principle of work of the present invention is: the vacuum ultraviolet total amount that light source sends is certain, and along with the variation of irradiation face and light source distance, the effective area of irradiation on irradiation face and VUV Irradiation intensity also change thereupon.At a fixed position place, VUV Irradiation intensity detector is installed, according to itself and the distance of light source and the emission angle of light source, is utilized the irradiation intensity recording on detector, Computer is calculated the total radiation of light source.According to the total radiation of light source, in conjunction with irradiation intensity required on irradiation plate, obtain the distance between ultraviolet sample irradiation plate and light source.Test is in the process of carrying out, light source total radiation is significant with the decay of test period, thereby computing machine is by controller Control Assay plate servomotor, drive sample board travel mechanism to slide on sample board moving guide rail, drive ultraviolet irradiation sample board to move, constantly to adjust the distance of ultraviolet irradiation sample board and light source, keep the ultraviolet irradiation intensity on sample board constant.
Especially, because the response that the precision of vacuum ultraviolet intensity detector is polluted organic volatile is very strong, therefore in order to guarantee the precision of vacuum ultraviolet intensity detector, computing machine is controlled detector servomotor by controller, adopt periodically (20min) light source total radiation to be measured and adjusted the position of irradiation plate, other times VUV Irradiation intensity detector, outside effective irradiation region, reduces measuring accuracy to guarantee it not polluted.Must not be greater than 1000h the service time of VUV Irradiation intensity detector, according to the method described above, in 1000h, can guarantee its precision.
Apparatus of the present invention are simple in structure, and corresponding physical construction is tending towards modularization, easy to operate.Based on close-loop feedback principle, by adjusting the distance between ultraviolet irradiation sample board and light source, make the irradiation intensity on sample board keep constant; Adopt elaborate servo kinetic control system, positioning precision is high, fast response time; More effectively utilize light source, more than making service time of light source to have brought up to 250h from 100h, reduced experimentation cost.
In sum, that the present invention has advantages of is simple in structure, versatility is high, application is convenient, precision is high, it is fast to respond, and can effectively reduce the experimentation cost of spacecraft product VUV Irradiation, improves test accuracy.
Accompanying drawing explanation
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1 is the structural representation of VUV Irradiation test irradiation intensity control device of the present invention;
Fig. 2 is VUV Irradiation strength control principle schematic of the present invention.
In figure: 1 is ultraviolet irradiation sample board, 2 is vacuum ultraviolet intensity detector, and 3 is sample board travel mechanism, 4 is sample board moving guide rail, and 5 is detector moving mechanism, and 6 is detector power supply, 7 is charge amplifier, and 8 is data collecting card, and 9 is controller, 10 is computing machine, 11 is sample board servomotor, and 12 is sample board servo motor power supply, and 13 is detector servo motor power supply, 14 is detector servomotor, and 15 is vacuum equipment.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art further to understand the present invention, but not limit in any form the present invention.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, can also make some distortion and improvement.These all belong to protection scope of the present invention.
Refer to Fig. 1, Fig. 2, a kind of VUV Irradiation strength control device, comprise: vacuum equipment, vacuum ultraviolet intensity detector, detector power supply, detector moving mechanism, detector servomotor, detector power supply, charge amplifier, data collecting card, ultraviolet irradiation sample board, sample board travel mechanism, sample board moving guide rail, sample board servomotor, sample board servo motor power supply, controller and computing machine, vacuum ultraviolet intensity detector, detector moving mechanism, ultraviolet irradiation sample board, sample board travel mechanism and sample board moving guide rail are arranged on vacuum equipment inside, other parts are arranged on vacuum equipment outside, sample board moving guide rail two ends are connected with vacuum equipment is affixed, sample board travel mechanism is connected with sample board moving guide rail, ultraviolet irradiation sample board is connected with sample board travel mechanism, sample board servomotor one end is connected with sample board travel mechanism, the other end is connected to controller by sample board servo motor power supply, detector moving mechanism is arranged between ultraviolet source and ultraviolet irradiation sample board, vacuum ultraviolet intensity detector is connected with detector moving mechanism, detector servomotor one end is connected with vacuum ultraviolet intensity detector, and the other end is connected to controller by detector servo motor power supply, charge amplifier is connected with vacuum ultraviolet intensity detector, and the small current amplify that vacuum ultraviolet detector is exported is to needs multiple, data collecting card one end is connected with charge amplifier, and the vacuum ultraviolet intensity currents simulating signal dress amplifying through charge amplifier is changed to digital signal, the other end of data collecting card is connected to controller, computing machine is connected with controller, controller can pass to computing machine by the vacuum ultraviolet strength signal of feedback, according to the program of setting and the intensity results of feedback, computing machine regulates the output current of two servo motor power supplies by controller, to reach the object of mobile ultraviolet irradiation sample board position, detector power supply is connected with vacuum ultraviolet intensity detector.
Further, ultraviolet irradiation sample board irradiation plane and light source irradiation face keeping parallelism.
Further, sample board travel mechanism is positioned on sample board moving guide rail, can slide along guide rail direction, sample board travel mechanism is connected with the sample board servomotor that is placed in vacuum equipment outside, and sample board servomotor is controlled the position of ultraviolet irradiation sample board on guide rail by sample board travel mechanism.Sample board travel mechanism is not more than 10cm/min along the translational speed of sample board moving guide rail direction.
Further, detector moving mechanism can be at light source irradiation rotation with in surface, and detector moving mechanism is between ultraviolet source and ultraviolet irradiation sample board, and the distance (d of plane of living in and light source 0) remain unchanged.
Further, it is outside that vacuum ultraviolet intensity detector is placed in vacuum ultraviolet light source irradiation zone under the effect of detector moving mechanism, and can get back to as required in the effective irradiation region of vacuum ultraviolet light source.
Further, vacuum ultraviolet intensity detector is used MgF window, can be 10 in vacuum tightness -3under the environment of Pa, normally use, and vacuum ultraviolet intensity detector generally must not be longer than 1000 hours service time.
Further, sample board travel mechanism can slide on sample board moving guide rail, and the distance between sample board travel mechanism and light source is at [d 1, d 2] automatically adjustable in scope, and be greater than detector moving mechanism optically focused distance d far away 0.
Based on above-mentioned VUV Irradiation test irradiation intensity control device, a kind of method that the present invention also provides VUV Irradiation test irradiation intensity to control, utilize the vacuum ultraviolet intensity of the light source that vacuum ultraviolet intensity detector obtains, adopt loop control theory, regulate the distance between vacuum ultraviolet light source and irradiation sample, guarantee that the VUV Irradiation intensity that sample is subject to is constant, its specific implementation process is:
The first step, utilizes standard vacuum ultraviolet source to carry out the intensity calibration of vacuum ultraviolet detector in 115-200nm wave band, i.e. vacuum ultraviolet intensity/output current;
Second step, installs detector, sample, the vacuum equipment trystate of starting shooting;
The 3rd step, opens ultraviolet source, is controlling the UV radiation intensity S that inputs the expectation of ultraviolet irradiation sample board on computing machine rwith exposure time T;
The 4th step, vacuum ultraviolet detector moving, to being subject to irradiation zone, obtains current light source total radiation;
The 5th step, based on feedback current light source total radiation, controls computing machine and moves the distance d between ultraviolet source and ultraviolet irradiation sample board by servomotor, makes ultraviolet irradiation sample board vacuum ultraviolet intensity reach S r, test the beginning of clocking;
The 6th step, vacuum ultraviolet intensity detector return, goes to the 4th step after 20 minutes;
The 7th step, exposure time reaches T, off-test.
Further, if the distance d between ultraviolet source and ultraviolet irradiation sample board reaches the minimum value d of mobile range 1, computer prompted is changed light source.
Refer to Fig. 2, principle of work of the present invention is: the vacuum ultraviolet total amount A that light source sends is certain, along with the variation of irradiation face and light source distance d, the effective area of irradiation on irradiation face (radius R) and VUV Irradiation intensity (S) also change thereupon.In fixed position, VUV Irradiation intensity detector is installed at place, and the VUV Irradiation intensity on it is S 0, computing machine is according to the distance (d of itself and light source 0) and emission angle (the effective irradiation radius R of light source 0), can calculate the total radiation of light source.According to the total radiation of light source, in conjunction with irradiation intensity required on irradiation plate, obtain the distance between ultraviolet sample irradiation plate and light source.By the above-mentioned total radiation that obtains light source, be:
A=SπR 2=S 0πR 0 2；
Obtain S = S 0 R 0 2 R 2 = S 0 d 0 2 d 2 .
In formula, S is the VUV Irradiation intensity on ultraviolet irradiation sample board.Test is in the process of carrying out, and light source total radiation is significant with the decay of test period, i.e. S 0temporal evolution, thereby to keep constant (the expectation value S of ultraviolet irradiation intensity on sample board r), it need to constantly adjust by computer-controlled servo motor the distance of ultraviolet irradiation sample board and light source.
By S = S R = S 0 d 0 2 d 2 Can obtain
d = d 0 S 0 S R ;
S in formula 0for the measured value of vacuum ultraviolet intensity detector, d 0for the distance between vacuum ultraviolet intensity detector and ultraviolet source, S rfor being desirably in the irradiation intensity on ultraviolet sample board.
Especially, because the response that the precision of vacuum ultraviolet intensity detector is polluted organic volatile is very strong, therefore in order to guarantee the precision of vacuum ultraviolet intensity detector, adopt periodically (20min) light source total radiation to be measured and adjusted the position of irradiation plate, other times VUV Irradiation intensity detector is outside effective irradiation region, to avoid it because being subject to polluting the reduction that causes measuring accuracy.Must not be greater than 1000h the service time of VUV Irradiation intensity detector, according to the method described above, in 1000h, can guarantee its precision.
Apparatus of the present invention are simple in structure, and corresponding physical construction is tending towards modularization, easy to operate.Based on close-loop feedback principle, by the distance of adjusting between ultraviolet irradiation sample board and light source, make the irradiation intensity on sample board keep constant, adopt elaborate servo kinetic control system, positioning precision is high, fast response time.More effectively utilized light source, more than making light source service time to bring up to 250h from 100h left and right.Compared with prior art, that the present invention has advantages of is simple in structure, versatility is high, application is convenient, precision is high, it is fast to respond, and can effectively reduce the experimentation cost of spacecraft product VUV Irradiation, improves test accuracy.
Above specific embodiments of the invention are described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and those skilled in the art can make various distortion or modification within the scope of the claims, and this does not affect flesh and blood of the present invention.

Claims (8)

1. a VUV Irradiation test irradiation intensity control device, is characterized in that, comprising: vacuum equipment, vacuum ultraviolet intensity detector, detector power supply, detector moving mechanism, detector servomotor, detector power supply, charge amplifier, data collecting card, ultraviolet irradiation sample board, sample board travel mechanism, sample board moving guide rail, sample board servomotor, sample board servo motor power supply, controller and computing machine, described vacuum ultraviolet intensity detector, detector moving mechanism, ultraviolet irradiation sample board, it is inner that sample board travel mechanism and sample board moving guide rail are arranged on described vacuum equipment, it is outside that other parts are arranged on described vacuum equipment, described sample board moving guide rail two ends are connected with described vacuum equipment is affixed, described sample board travel mechanism is connected with described sample board moving guide rail, described ultraviolet irradiation sample board is connected with described sample board travel mechanism, described sample board servomotor one end is connected with described sample board travel mechanism, and the other end is connected to described controller by described sample board servo motor power supply, described detector moving mechanism is arranged between ultraviolet source and described ultraviolet irradiation sample board, described vacuum ultraviolet intensity detector is connected with described detector moving mechanism, described detector servomotor one end is connected with described vacuum ultraviolet intensity detector, and the other end is connected to controller by described detector servo motor power supply, described charge amplifier is connected with described vacuum ultraviolet intensity detector, described data collecting card one end is connected with described charge amplifier, the other end is connected to described controller, and described computing machine is connected with described controller, and described detector power supply is connected with described vacuum ultraviolet intensity detector.
2. according to the ultraviolet irradiation test irradiation intensity control device described in right 1, it is characterized in that described ultraviolet irradiation sample board irradiation plane and light source irradiation face keeping parallelism.
3. according to the ultraviolet irradiation test irradiation intensity control device described in right 1, it is characterized in that, described sample board travel mechanism is not more than 10cm/min along the translational speed of described sample board moving guide rail direction.
4. according to the ultraviolet irradiation test irradiation intensity control device described in right 1, it is characterized in that, described detector moving mechanism is at light source irradiation rotation with in surface, and the distance d of plane of living in and light source 0remain unchanged.
5. according to the ultraviolet irradiation test irradiation intensity control device described in right 1, it is characterized in that, described vacuum ultraviolet intensity detector is used MgF window, in vacuum tightness, is 10 -3under the environment of Pa, normally use, and described vacuum ultraviolet intensity detector service time was no longer than 1000 hours.
6. according to the ultraviolet irradiation test irradiation intensity control device described in right 1, it is characterized in that, described sample board travel mechanism slides on described sample board moving guide rail, and the distance between described sample board travel mechanism and light source is at certain limit [d 1, d 2] in automatically adjust, and be greater than described detector moving mechanism apart from the distance of light source.
7. the irradiation intensity control method for VUV Irradiation test, it is characterized in that, utilize the total radiation of the light source that vacuum ultraviolet intensity detector obtains, adopt loop control theory, regulate the distance between vacuum ultraviolet light source and irradiation sample, guarantee that the VUV Irradiation intensity that sample is subject to is constant, specifically comprise the following steps:
The first step, utilizes standard vacuum ultraviolet source to carry out the intensity calibration of vacuum ultraviolet detector in 115-200nm wave band, i.e. vacuum ultraviolet intensity/output current;
Second step, installs detector, sample, the vacuum equipment trystate of starting shooting;
The 3rd step, opens ultraviolet source, is controlling the UV radiation intensity S that inputs the expectation of ultraviolet irradiation sample board on computing machine rwith exposure time T;
The 4th step, vacuum ultraviolet detector moving, to being subject to irradiation zone, obtains current light source total radiation;
The 5th step, based on feedback current light source total radiation, computing machine is controlled servomotor by controller and is moved the distance d between ultraviolet source and ultraviolet irradiation sample board, makes the vacuum ultraviolet intensity on ultraviolet irradiation sample board reach S r, test the beginning of clocking;
The 6th step, vacuum ultraviolet intensity detector return, goes to the 4th step after 20 minutes;
The 7th step, exposure time reaches T, off-test.
8. according to the irradiation intensity control method of the VUV Irradiation test described in right 7, it is characterized in that, in the 5th step, if the distance d between ultraviolet source and ultraviolet irradiation sample board reaches the minimum value d of mobile range 1, computer prompted is changed light source.
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