CN103676880B - The communication module of CMP integrated control system - Google Patents

The communication module of CMP integrated control system Download PDF

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CN103676880B
CN103676880B CN201310684501.1A CN201310684501A CN103676880B CN 103676880 B CN103676880 B CN 103676880B CN 201310684501 A CN201310684501 A CN 201310684501A CN 103676880 B CN103676880 B CN 103676880B
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opc
industrial computer
unit
communication module
submodule
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CN103676880A (en
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路新春
李弘恺
田芳馨
郭振宇
何永勇
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Tsinghua University
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Tsinghua University
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The present invention proposes a kind of communication module of CMP integrated control system, this CMP integrated control system comprises: main industrial computer, the next unit and secondary industrial computer, this communication module is for realizing main industrial computer and the communication between the next unit and secondary industrial computer, it comprises: OPC accesses submodule and TCP/IP accesses submodule, and two sub-modular concurrent work; Main industrial computer obtains status information and the procedure parameter of multiple technique unit from the next unit by OPC access submodule, and the steering order, technical recipe and the technological parameter that control multiple technique unit and run is sent to the next unit, and access submodule to secondary industrial computer sending controling instruction so that secondary industrial computer controls to be performed corresponding action by integrated unit by TCP/IP, and receive the feedback of secondary industrial computer.The communication module of the embodiment of the present invention has safety, stable and reliable advantage, and this communication module is convenient to safeguard, extensibility is good.

Description

The communication module of CMP integrated control system
Technical field
The present invention relates to chemical Mechanical Polishing Technique field, particularly a kind of communication module of CMP integrated control system.
Background technology
In the manufacture process of integrated circuit, traditional planarization is only confined to local planarization, can not meet the requirement of global planarizartion in VLSI (very large scale integrated circuit) manufacture process.As the most widely used current global planarizartion technology, chemical Mechanical Polishing Technique (ChemicalMechanicalPlanarization, CMP) can take into account the requirement of wafer surface roughness and surface smoothness, obtains undamaged crystal column surface.
At present, it is main body that CMP technology has developed into chemical-mechanical polishing mathing, integrates the chemical-mechanical planarization technology of the technology such as measurement and cleaning, can boost productivity better, reduce manufacturing cost and realize substrate global planarizartion.CMP kit is containing multiple technique unit, and unit is controlled by each independently slave computer (PLC), can independently run.Main industrial computer, by the next unit unified management unit module, realizes the full-automatic technological process of wafer.OPC be OPC foundation tissue promote Industry Control and production automation field in hardware and software between standard interface.Utilize OPC well can solve Communication between levels control system.But for by integrated unit, because this unit is directly controlled by secondary industrial computer, inapplicable OPC communication modes, therefore main industrial computer cannot by original communication module access by integrated unit, and original OPC communication module limits the expansion of CMP system.
Summary of the invention
The present invention is intended at least one of solve the problems of the technologies described above.
For this reason, the object of the invention is to propose a kind of communication module that is safe, stable, reliably and easily CMP integrated control system, this control system realizes main industrial computer and the communication between the next unit and secondary industrial computer and information interaction by communication module, for each technique unit under the next unit of real time access and secondary industrial computer and by integrated unit, complete to each technique unit and by the unified management of integrated unit.
To achieve these goals, The embodiment provides a kind of communication module of CMP integrated control system, communication for realizing CMP integrated control system inside comprises: OPC accesses submodule and TCP/IP accesses submodule, and two sub-modular concurrent work, wherein, described CMP integrated control system comprises: the next unit, secondary industrial computer and main industrial computer, wherein, described the next unit (each PLC) is connected with multiple technique unit one_to_one corresponding respectively, for controlling the operation of described multiple technique unit, and monitor running status and the procedure parameter of described multiple technique unit, described secondary industrial computer is connected with by integrated unit, described by the operation of integrated unit for controlling, and monitors described by the running status of integrated unit and procedure parameter, described main industrial computer obtains status information and the procedure parameter of described multiple technique unit from described the next unit by described OPC access submodule, and the steering order, technical recipe and the technological parameter that control described multiple technique unit and run is sent to described the next unit, and access submodule to described secondary industrial computer sending controling instruction so that described secondary industrial computer controls to be performed corresponding action by integrated unit by described TCP/IP, and receive the feedback information of described secondary industrial computer.
In addition, the communication module of CMP integrated control system according to the above embodiment of the present invention can also have following additional technical characteristic:
In some instances, described OPC accesses submodule and comprises further: opc server, described opc server is for configuring described the next unit information to realize the communication of described opc server and described the next unit, and wherein, described the next unit packets of information draws together title and the address of each slave computer; OPC client, described OPC client is used for and described opc server communication, is responsible for connecting and disconnecting described opc server, and writes data or from described opc server read data to described opc server.
In some instances, described OPC client accesses described opc server by realizing OPC self defined interface.
In some instances, described OPC client also for creating described target opc server and OPC group objects, and adds OPC item object according to this, and according to described OPC item, described OPC client obtains the value of named variable by described opc server.
In some instances, described OPC client also for removing described OPC item object and described OPC group objects when exiting, and deletes described target opc server, free system resources, to disconnect the connection between described target opc server.
In some instances, described OPC client carries out writing data to described opc server in synchronous or asynchronous mode, described OPC client from described opc server read data by the mode of subscribing to, thus is realized main industrial computer and transmits and receive data to the next unit.
In some instances, described OPC client carries out writing data to described opc server in synchronous or asynchronous mode, specifically comprises: described OPC client carries out synchronous or asynchronous write data by Boolean type data WriteMode, real-coded GA WriteMode or integer data WriteMode to described opc server.
In some instances, described TCP/IP accesses submodule and adopts ripe TCP/IP communication modes, using described main industrial computer and secondary industrial computer as communication two party, main industrial computer utilizes predetermined IP address and port numbers access secondary industrial computer, and when if described main industrial computer does not receive the feedback of described secondary industrial computer in Preset Time, judge the Communications failure with described secondary industrial computer, and eject warning information window to point out technologist.
In some instances, described main industrial computer is accessed by described TCP/IP the steering order that submodule sends to described secondary industrial computer and is comprised: set up or disconnect instruction, technical recipe selection and reading command, load prepare and unloading piece END instruction and whole state parameter reading command, the interface function utilizing described secondary industrial computer to provide is sent the packet of each instruction by described TCP/IP access submodule.
In some instances, described TCP/IP accesses submodule and adopts connection-oriented communication modes.
According to the CMP integrated control system of the embodiment of the present invention, tool has the following advantages:
The invention has the advantages that:
(1) efficiently, real-time is good, network resource consumption is low.
(2) be convenient to safeguard, when lower floor's control system (the next unit and secondary industrial computer) needs maintenance or hardware device to need to change, if address and the original function of each variable of lower floor remain unchanged, the normal use of top level control system (main industrial computer) would not be affected.
(3) good extensibility, native system as new unit module need be expanded, only need according to new unit module need select suitable communication modes, communication module completes adding, without the need to changing original system of corresponding configuration or variable.
(4) safely, stable, reliable, native system adopts OCP technology and TCP/IP communications protocol to realize main industrial computer and the communication between the next unit and secondary industrial computer, and the prompting technologist that gives the alarm when communication abnormality, therefore, native system is that normal data interaction provides good guarantee.
Additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the theory diagram of CMP integrated control system according to an embodiment of the invention;
Fig. 2 is the hardware configuration instance graph of CMP integrated control system in accordance with another embodiment of the present invention;
Fig. 3 is the principle schematic of the OPC access submodule of the communication module of CMP integrated control system according to an embodiment of the invention; And
Fig. 4 is the workflow diagram of the TCP/IP access submodule of the communication module of CMP integrated control system according to an embodiment of the invention.
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition above-mentioned term concrete meaning in the present invention can be understood.
Below in conjunction with accompanying drawing, the communication module according to the CMP integrated control system of the embodiment of the present invention is described.
Fig. 1 is the theory diagram of CMP integrated control system according to an embodiment of the invention.As shown in Figure 1, CMP integrated control system 100 according to an embodiment of the invention, comprising: the next unit 110, main industrial computer 130 and secondary industrial computer 140.
Wherein, the next unit 110 is connected with multiple technique unit one_to_one corresponding respectively, for controlling the operation of multiple technique unit, and monitors running status and the procedure parameter of multiple technique unit.Secondary industrial computer 140 is connected with by integrated unit, for controlling by the operation of integrated unit, and monitors described by the running status of integrated unit and procedure parameter;
The communication module 120 of the CMP integrated control system of the embodiment of the present invention is for realizing main industrial computer 130 and the communication between the next unit 110 and secondary industrial computer 140, and wherein, communication module 120 comprises OPC further and accesses submodule and TCP/IP access submodule.
Main industrial computer 130 obtains status information and the procedure parameter of multiple technique unit from the next unit 110 by OPC access submodule, and the steering order, technical recipe and the technological parameter that control multiple technique unit and run is sent to the next unit 110, and access submodule to secondary industrial computer 140 sending controling instruction so that secondary industrial computer 140 controls coupled to be performed corresponding action by integrated unit by TCP/IP, and receive the feedback information of secondary industrial computer 140.
As a concrete example, shown in composition graphs 1 and Fig. 2, above-mentioned the next unit 110 comprises multiple slave computer, in the example shown in Fig. 2, the next unit 110 such as comprises two slave computers, the programmable logic controller (PLC) PLC1 namely in Fig. 2 and programmable logic controller (PLC) PLC2.Multiple technique unit includes but not limited to technique unit 1 and technique unit 2, and PLC1 is connected with technique unit 1, and PLC2 is connected with technique unit 2.The then operation of PLC1 and PLC2 difference Controlling Technology unit 1 and technique unit 2, and monitor their running status and procedure parameter.
In other words, in fig. 2, the main body of the CMP integrated control system 100 of the embodiment of the present invention adopts Two level control module.Wherein, lower floor's control system (i.e. the next unit 110) can select multiple PLC(programmable logic controller (PLC)), and each PLC directly controls affiliated technique unit (such as each polishing unit etc.) respectively, top level control system (main industrial computer 130) can select IPC(industrial computer), and monitor each technique unit by each PLC and manage the operation of whole system.And realize physical connection by Industrial Ethernet between top level control system and lower floor's control system.For by integrated unit, because it has had independent controller (i.e. secondary industrial computer 140 is such as IPC), so on the basis keeping existing Control system architecture, this can be inherited the IPC of unit as secondary IPC.Industrial Ethernet is utilized to realize the physical connection of main industrial computer 130 and secondary industrial computer 140 equally.
In one embodiment of the invention, above-mentioned OPC accesses submodule and comprises further: opc server and OPC client.Wherein, opc server for configuring the next unit information to realize the communication of opc server and the next unit 110, and carries out monitor and managment to the next unit 110, and wherein, the next unit packets of information draws together title and the address of each slave computer.OPC client and opc server communication, for connecting in use and disconnecting opc server, and write data to opc server or read data from opc server.
Specifically, OPC access modules is the primary communications means of the CMP integrated control system 100 of the embodiment of the present invention, and it mainly comprises opc server and OPC client.As a concrete example, as shown in Figure 3, opc server is responsible for the configuration each PLC information of lower floor's control system (mainly comprising title and the address of PLC), realizes the connection with lower floor's control system.The major function of OPC client comprises: connect and disconnect opc server and read and write each OPC data item.Wherein, lower floor's control system set up multiple memory block (DB) be responsible for deposit total data (comprising state variable and technological parameter etc.) temporarily.In actual production process, OPC client completes the read and write operation of data in each memory block of lower floor by initiatively accessing opc server.Top level control system utilizes this OPC access modules can read and show state variable and the technological parameter of unit module in real time, downloads technical recipe, and sends every steering order etc., and then realize the unified management of whole CMP integrated control system.
Further, in another example, OPC client is by OPC self defined interface access opc server.More specifically, namely OPC client creates target opc server and OPC group objects, and adds OPC item object according to this, and according to each OPC item object, OPC client obtains the value of named variable from opc server.In addition, OPC client also for removing OPC item object and OPC group objects when exiting, and deletes target opc server, free system resources, to disconnect the connection between target opc server.
In other words, OPC technology is DNA framework based on Microsoft and COM technology, designs according to expansibility.OPC specification describes com object and the interface thereof that opc server needs realization, and CLIENT PROGRAM is communicated with opc server by interface, indirectly achieves the access to field data.At present, OPC has two sockets: OPC self defined interface and OPC automation interface.Self defined interface efficiency is high, and by this interface, client can play the optimum performance of opc server, is applicable to the client's (embodiment of the present invention preferably adopts C++ programming language) adopting C Plus Plus.Therefore, embodiments of the invention preferably adopt OPC self defined interface.
In addition, from high level, opc server is made up of three objects: server object, group objects and item object (shown in Figure 3).
Wherein, target opc server is the main object of opc server program.In the OPC client of OPC access modules, first create this object, recycling target opc server creates OPC group, and the pointer of group objects is passed to OPC client, by OPC client direct control group objects.Further, OPC client is added to needing the data item of access in same group as OPC item.Wherein, carry out when OPC client carries out data access to opc server in units of group, namely CLIENT PROGRAM carries out unified read-write operation to the OPC item in group, improves the efficiency of data communication.OPC item represents the connection with data in opc server.It is pointed out that OPC item is not actual data source, just represent the connection with data source.Therefore, when adding OPC item in OPC group, each address of strict difinition, ensures the correctness of digital independent.
In another embodiment of the present invention, OPC client carries out writing data to opc server in synchronous or asynchronous mode, or OPC client reads data by the mode of subscribing to from opc server.Wherein, OPC client carries out writing data to opc server in synchronous or asynchronous mode, specifically comprises: OPC client carries out writing data to opc server by boolean (bool) type data WriteMode, floating-point (float) type data WriteMode or whole (int) type data WriteMode.
In other words, comprise two aspects alternately namely between OPC client and opc server: write data for OPC client from opc server on the one hand, another aspect reads data for OPC client from opc server.In OPC specification, opc server and the digital independent of OPC client have three kinds of modes: synchronous, asynchronous and subscribe to.In an embodiment of the present invention, OPC client writes data acquisition synchronous write or asynchronous write to opc server.For the reading of data, unified employing subscription formula.
In a concrete example, according to different data types, embodiments of the invention can realize synchronous (or asynchronous) write method of various data type respectively so that in program development process, the access mode of data more clear and be easy to check.The system of the embodiment of the present invention mainly achieves the mode that three kinds synchronous (or asynchronous) are write, comprise bool type data write method SyncWriteBool (intItemNo, boolItemValue)/AsyncWriteBool (intItemNo, boolItemValue), float type data write method SyncWriteReal (intItemNo, doubleItemValue)/AsyncWriteReal (intItemNo, and int type data write method SyncWriteInt (intItemNo doubleItemValue), intItemValue)/AsyncWriteInt (intItemNo, intItemValue).Wherein, first parameter represent be assigned to as if group in which, second parameter represents the value that will compose.For array variable, continuation address variable namely of the same type, can by SyncWrite (intItemNo, void*ItemValue, typeValueType, intValueNo)/AsyncWrite (intItemNo, void*ItemValue, typeValueType, intValueNo) realize write function, wherein in parameter ItemNo expression group which, ItemValue represents the value that will compose, ValueType represents data type, and ValueNo represents variable number.
For synchronous write method, in function body, first according to data type, access mode is divided, then set gradually every property value (comprising data type and value etc.) according to parameter content.If the use method of synchronization, the function Write of IOPCSyncIO need be called.If use asynchronous system, the function Write of IOPCAsyncIO2 need be called.Below the main code example of synchronous write method:
voidOpcClient::SyncWrite(intItemNo,void*ItemValue,typeValueType,intValueNo)
And for read operation, definition class COPCDataCallback(derived class CComObjectRoot and class IOPCDataCallback), the read work of all variablees all realizes in its member function OnDataChange.OnDataChange is for the treatment of the notice of OPC group objects, and this notice is carried out by opc server automatically when data change.In the realization of the formula of subscription data access mode, first according to the data type of each OPC item, reading manner is segmented, then the value of each is assigned to successively the variable of specifying.Because embodiments of the invention adopt subscription formula data reading mode to unify all parametric variables of reading system, so special definition class OpcPublic is responsible for temporary every process variable.Such member variable finds the item of self correspondence by the numbering of OPC item, thus realizes the reading of data.In engineering, other classes all can call class OpcPublic, and read each member variable in class, and then can process accordingly required data.Each member variable due to class OpcPublic constantly updates, so ensure that the data needed for master routine are always up-to-date.
More specifically, for the write operation of the significant data (such as technological parameter and system configuration information) in the CMP integrated control system of the embodiment of the present invention, this system adopts synchronous mode OPC data WriteMode, to guarantee that each parameter is correctly arranged, can not be missed.For the write operation of general variable, this system suitably selects asynchronous system OPC data WriteMode, to reduce the consumption of CPU and Internet resources, ensures the real-time of system.Compared to the method for synchronization and asynchronous system, subscription formula data acquisition modes can reduce the number of times of OPC client-access server effectively, the consumption of CPU and Internet resources is dropped to minimum, a large amount of data can be performed simultaneously, and farthest avoid the situation of network congestion.
In a concrete example, the OPC in communication module 120 accesses submodule and TCP/IP access submodule all operates in top level control system.And OPC accesses the opc server of submodule and the reciprocal process of OPC client is mainly divided into following step:
1) also connection server object is created.
Specifically, initialization COM storehouse, utilizes CLSIDFromProgID function to obtain CLSID.Create an OPCServer object based on the CLSID obtained, OPC client, and obtain the pointer variable IOPCServer that is pointed to server object.
2) interpolation group and item.
As the main interface of opc server, IOPCServer interface is responsible for creating OPC group, and returns other interface pointer, ensures that OPC client can call the interface function of opc server.OPC client can call IOPCItemMgt interface by the OPC group objects created, and adds the OPC item object of some.
3) read-write operation of data.
OPC client carrys out the value of each Item object in synchronous or asynchronous write OPCGroup by the member function Write calling IOPCSyncIO or IOPCAsyncIO2.And for the reading of data, OPC client is unified adopts subscription formula data acquisition modes.
4) connection with server is disconnected.
OPC client discharges all interface pointer and deletes OPC item successively, OPC group and target opc server when exiting.
In a concrete example, shown in composition graphs 2, by integrated unit by independently secondary industrial computer 140(IPC) control, there is independently local control system.And based on the physical connection of Industrial Ethernet, top level control system (i.e. main industrial computer 130) and accessed submodule by TCP/IP between integrated unit control system (i.e. secondary industrial computer 140) and realize mutual communication with TCP/IP communication modes.More specifically, in one embodiment of the invention, TCP/IP accesses submodule and adopts connection-oriented communication modes.
In other words, TCP/IP is current application communications protocol the most widely, is widely used in various PC network.ICP/IP protocol achieves two kinds of communication modes: connectionless communications protocol (UDP) and connection-oriented communications protocol (TCP).For connectionless communications protocol, the resource that UDP takies is less, but does not need take over party to confirm during communication, belongs to insecure transmission, may go out packet loss phenomenon.Before TCP mode carries out exchanges data, a paths must be set up with communication side, so both determine the route between communication two party, in turn ensure that communication two party is movable, can respond each other, and the data of delivering are errorless.In order to ensure that communication is accurate, the embodiment of the present invention preferably adopts connection-oriented communication modes.
Specifically, in one embodiment of the invention, main industrial computer 130 accesses submodule to secondary industrial computer 140 sending controling instruction so that secondary industrial computer 140 controls coupled to be performed corresponding action by integrated unit by TCP/IP, and feed back to main industrial computer 130, according to this feedback, main industrial computer 130 judges that whether the communication between secondary industrial computer 140 is normal.And in another embodiment of the present invention, when main industrial computer 130 also for not receiving the feedback of the main industrial computer 140 of secondary in Preset Time, judging the Communications failure with secondary industrial computer 140, and ejecting warning information window to point out technologist.Wherein, above-mentioned steering order comprises: set up or disconnect instruction, the selection of technical recipe and reading command, load and prepare and unloading piece END instruction and read whole state parameter instruction.Preset Time presets according to real needs.
As a concrete example, namely TCP/IP access submodule using top level control system (main industrial computer 130) and by integrated unit control system (secondary industrial computer 140) as communication two party.The IP address that top level control system utilizes technologist to input in main operation interface and port numbers (IP address and port numbers address are and define in advance) are initiated communication and find by integrated unit control system, treat the other side's normal response, stable both sides' communication can be set up and connect.Afterwards, based on the instruction that both sides pre-define, top level control system sends the packet of regulation according to the operational requirements of technologist, after being received packet by integrated unit control system at every turn, immediately instruction is wherein resolved and (for the setting of parameter, the variable of being specified by integrated unit control system should be assigned to; For instructions, the corresponding interface function provided by integrated equipment control system can be called in the groove function of program), and then perform corresponding action or return the parameter value of needs, idiographic flow is as shown in Figure 4.Namely said process comprises the following steps:
Step S401: top level control system utilizes the IP address that pre-sets and port numbers to initiate communication request to by integrated unit control system.
Step S402: set up communication with top level control system after being made normal response by integrated unit control system according to communication request and be connected.
Step S403: top level control system sends the packet of regulation according to the operation of technologist.
Step S404: received packet by integrated unit control system, obtains corresponding steering order after resolving, and control accordingly to be performed corresponding action by integrated unit or return the parameter of specifying, to feed back to upper strata control system to it.
Further, because top level control system needs the parameters read to comprise numerous types of data, so definable structure variable, all parameters feeding back to top level control system that needs all are included in this structure variable, the variable of top level control system as required in choice structure body, and follow-up process is carried out to it.By this thinking, embodiments of the invention have unified data reading mode, and facilitate the exploitation of program.In addition, for each instruction, corresponding response all should be given by integrated unit control system, guarantee that control system correctly receives.If top level control system (Preset Time) not in official hour receives any response, namely assert Communications failure, and show corresponding warning information on Control System Software interface, inform technologist in time.And according to the needs of this CMP integrated control system, the packet of transmission mainly comprises following several respects command content: 1) set up or disconnect; 2) selection of technical recipe and reading; 3) load prepares and unloading piece such as to terminate at the action; 4) whole state parameter is read.
According to the CMP integrated control system of the embodiment of the present invention, tool has the following advantages:
The invention has the advantages that:
(1) efficiently, real-time is good, network resource consumption is low.
(2) be convenient to safeguard, when lower floor's control system (the next unit and secondary industrial computer) needs maintenance or hardware device to need to change, if address and the original function of each variable of lower floor remain unchanged, the normal use of top level control system (main industrial computer) would not be affected.
(3) good extensibility, native system as new unit module need be expanded, only need according to new unit module need select suitable communication modes, communication module completes adding, without the need to changing original system of corresponding configuration and variable.
(4) safely, stable, reliable, native system adopts OCP technology and TCP/IP communications protocol to realize main industrial computer and the communication between the next unit and secondary industrial computer, and the prompting technologist that gives the alarm when communication abnormality, therefore, native system is that normal data interaction provides good guarantee.
In the description of this instructions, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and describe embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple change, amendment, replacement and modification to these embodiments when not departing from principle of the present invention and aim, scope of the present invention is by claim and equivalency thereof.

Claims (9)

1. the communication module of a CMP integrated control system, for realizing main industrial computer and the communication between the next unit and secondary industrial computer, it is characterized in that, comprise: OPC accesses submodule and TCP/IP accesses submodule, and described OPC accesses submodule and TCP/IP accesses submodule concurrent working, wherein
Described CMP integrated control system comprises: the next unit, secondary industrial computer and main industrial computer;
Described slave computer group is connected with multiple technique unit one_to_one corresponding respectively, for controlling the operation of described multiple technique unit, and monitors running status and the procedure parameter of described multiple technique unit;
Described secondary industrial computer is connected with by integrated unit, described by the operation of integrated unit for controlling, and monitors described by the running status of integrated unit and procedure parameter;
Described main industrial computer obtains status information and the procedure parameter of described multiple technique unit from described the next unit by described OPC access submodule, and the steering order controlling described multiple technique unit and run is sent to described the next unit, technical recipe and technological parameter, and access submodule to described secondary industrial computer sending controling instruction so that described secondary industrial computer controls to be performed corresponding action by integrated unit by described TCP/IP, and receive the feedback of described secondary industrial computer, wherein, the steering order that described main industrial computer is sent to described secondary industrial computer by described TCP/IP access submodule comprises: set up or disconnect instruction, the selection of technical recipe and reading command, load prepares and unloading piece END instruction and whole state parameter reading command, described TCP/IP accesses submodule sends each instruction packet by the interface function that described secondary industrial computer provides.
2. communication module according to claim 1, is characterized in that, described OPC accesses submodule and comprises further:
Opc server, described opc server is for configuring described the next unit information to realize the communication of described opc server and described the next unit, and wherein, described the next unit packets of information draws together title and the address of each slave computer;
OPC client, described OPC client is used for and described opc server communication, is responsible for connecting and disconnecting described opc server, and writes data or from described opc server read data to described opc server.
3. communication module according to claim 2, is characterized in that, described OPC client accesses described opc server by realizing OPC self defined interface.
4. communication module according to claim 3, it is characterized in that, described OPC client also for creating described target opc server and OPC group objects, and adds OPC item object according to this, according to described OPC item object, described OPC client obtains the value of named variable by described opc server.
5. communication module according to claim 4, it is characterized in that, described OPC client also for removing described OPC item object and described OPC group objects when exiting, and deletes described target opc server, free system resources, to disconnect the connection between described target opc server.
6. the communication module according to any one of claim 2-5, is characterized in that, described OPC client carries out writing data to described opc server in synchronous or asynchronous mode, and the mode that described OPC client is passed through to subscribe to is from described opc server read data.
7. communication module according to claim 6, it is characterized in that, described OPC client carries out writing data to described opc server in synchronous or asynchronous mode, specifically comprises: described OPC client carries out synchronous or asynchronous write data by Boolean type data WriteMode, real-coded GA WriteMode or integer data WriteMode to described opc server.
8. communication module according to claim 1, it is characterized in that, described TCP/IP accesses submodule and adopts TCP/IP communication modes, using described main industrial computer and secondary industrial computer as communication two party, described main industrial computer accesses described secondary industrial computer according to predetermined IP address and port numbers, and when if described main industrial computer does not receive the feedback of described secondary industrial computer in Preset Time, judge the Communications failure with described secondary industrial computer, and eject warning information window to point out technologist.
9. the communication module according to claim 1 or 8, is characterized in that, described TCP/IP accesses submodule and adopts connection-oriented communication modes.
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