CN103676880B - The communication module of CMP integrated control system - Google Patents

Abstract

The present invention proposes a communication module of a CMP integrated control system. The CMP integrated control system includes: a main industrial computer, a lower unit, and a secondary industrial computer. The communication between them includes: OPC access sub-module and TCP/IP access sub-module, and the two sub-modules work in parallel; the main industrial computer obtains the status information and process parameters of multiple process units from the lower unit through the OPC access sub-module, and Send control instructions, process recipes and process parameters to control the operation of multiple process units to the lower unit, and send control instructions to the secondary industrial computer through the TCP/IP access sub-module so that the secondary industrial computer controls the integrated unit to perform corresponding actions. And receive the feedback from the secondary industrial computer. The communication module of the embodiment of the present invention has the advantages of safety, stability and reliability, and the communication module is easy to maintain and has good scalability.

Description

Communication Module of CMP Integrated Control System

technical field

The invention relates to the technical field of chemical mechanical polishing, in particular to a communication module of a CMP integrated control system.

Background technique

In the manufacturing process of integrated circuits, the traditional planarization technology is limited to local planarization, which cannot meet the requirements of global planarization in VLSI manufacturing process. As the most widely used global planarization technology at present, chemical mechanical polishing technology (Chemical Mechanical Planarization, CMP) can meet the requirements of wafer surface roughness and surface flatness, and obtain a damage-free wafer surface.

At present, CMP technology has developed into a chemical mechanical planarization technology with a chemical mechanical polishing machine as the main body, integrating measurement and cleaning technologies, which can better improve productivity, reduce manufacturing costs, and achieve global substrate planarization. CMP equipment includes multiple process units, each unit is controlled by an independent lower computer (PLC), and can operate independently. The main industrial computer manages each unit module through the lower unit to realize the fully automated process flow of the wafer. OPC is a standard interface between hardware and software in the field of industrial control and production automation promoted by the OPC Foundation. Utilizing OPC can well solve the communication problem between the upper and lower control systems. But for the integrated unit, because the unit is directly controlled by the secondary industrial computer, OPC communication mode is not applicable, so the main industrial computer cannot access the integrated unit through the original communication module, and the original OPC communication module limits the expansion of the CMP system.

Contents of the invention

The present invention aims to solve at least one of the above-mentioned technical problems.

For this reason, the purpose of the present invention is to propose a communication module of a safe, stable, reliable and convenient CMP integrated control system, the control system can realize the communication between the main industrial computer and the lower unit and the secondary industrial computer through the communication module And information interaction, used for real-time access to each process unit and integrated unit under the lower unit and secondary industrial computer, and complete the unified management of each process unit and integrated unit.

In order to achieve the above object, the embodiment of the present invention provides a communication module of the CMP integrated control system, which is used to realize the internal communication of the CMP integrated control system, including: OPC access sub-module and TCP/IP access sub-module, and the two sub-modules Working in parallel, wherein the CMP integrated control system includes: a lower unit, a secondary industrial computer and a main industrial computer, wherein the lower unit (each PLC) is connected to a plurality of process units in one-to-one correspondence for controlling all The operation of the multiple process units, and monitor the operating status and process parameters of the multiple process units; the secondary industrial computer is connected with the integrated unit, used to control the operation of the integrated unit, and monitor the The operating status and process parameters of the integrated units; the main industrial computer obtains the status information and process parameters of the plurality of process units from the lower unit through the OPC access sub-module, and sends the control information to the lower unit The control instructions, process recipes and process parameters for the operation of the multiple process units, and send control instructions to the secondary industrial computer through the TCP/IP access sub-module so that the secondary industrial computer controls the integrated unit to execute the corresponding action, and receive the feedback information from the secondary industrial computer.

In addition, the communication module of the CMP integrated control system according to the above-mentioned embodiments of the present invention may also have the following additional technical features:

In some examples, the OPC access submodule further includes: an OPC server, configured to configure the lower group information to realize communication between the OPC server and the lower group, wherein the lower group information Including the name and address of each lower computer; OPC client, the OPC client is used to communicate with the OPC server, responsible for connecting and disconnecting the OPC server, and writing data to the OPC server or from the OPC The server reads the data.

In some examples, the OPC client accesses the OPC server by implementing an OPC custom interface.

In some examples, the OPC client is also used to create the OPC server object and OPC group object, and add OPC item objects accordingly, and according to the OPC item, the OPC client obtains Specifies the value of the variable.

In some examples, the OPC client is also used to remove the OPC item object and the OPC group object when exiting, and delete the OPC server object, release system resources, and disconnect from the OPC server Connections between objects.

In some examples, the OPC client writes data to the OPC server in a synchronous or asynchronous manner, and the OPC client reads data from the OPC server through subscription, thereby realizing Send and receive data.

In some examples, the OPC client writes data to the OPC server in a synchronous or asynchronous manner, specifically including: the OPC client writes data in a Boolean data mode, a floating point data writing mode, or an integer data The writing mode performs synchronous or asynchronous writing of data to the OPC server.

In some examples, the TCP/IP access submodule adopts a mature TCP/IP communication method, and the main industrial computer and the secondary industrial computer are used as communication parties, and the main industrial computer uses a predetermined IP address and port number to access the two Level industrial computer, and if the main industrial computer does not receive the feedback from the secondary industrial computer within the preset time, it is determined that the communication with the secondary industrial computer has failed, and an alarm message window pops up to remind the craftsman .

In some examples, the control instructions sent by the main industrial computer to the secondary industrial computer through the TCP/IP access submodule include: connection establishment or disconnection instructions, process recipe selection and reading instructions, film loading The preparation and unloading end instructions and all status parameter reading instructions, the TCP/IP access sub-module will use the interface function provided by the secondary industrial computer to send the data packets of each instruction.

In some examples, the TCP/IP access submodule adopts a connection-oriented communication method.

The CMP integrated control system according to the embodiment of the present invention has the following advantages:

The advantages of the present invention are:

(1) High efficiency, good real-time performance, and low consumption of network resources.

(2) It is easy to maintain. When the lower control system (lower unit and secondary industrial computer) needs maintenance or hardware devices need to be replaced, if the address and original function of each variable in the lower layer remain unchanged, it will not affect the upper control system ( The normal use of the main industrial computer).

(3) Good scalability. If the system needs to expand new unit modules, it only needs to select the appropriate communication mode according to the needs of the new unit modules. The communication module can complete the corresponding configuration or add variables without changing the original unit module. There is a system.

(4) Safe, stable and reliable. This system uses OCP technology and TCP/IP communication protocol to realize the communication between the main industrial computer, the lower unit and the secondary industrial computer, and sends an alarm to remind the craftsmen when the communication is abnormal. Therefore, This system provides a good guarantee for normal data interaction.

Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Description of drawings

The above and/or additional aspects and advantages of the present invention will become apparent and comprehensible from the description of the embodiments in conjunction with the following drawings, wherein:

Fig. 1 is the functional block diagram of the CMP integrated control system according to one embodiment of the present invention;

Fig. 2 is an example diagram of the hardware structure of the CMP integrated control system according to another embodiment of the present invention;

3 is a schematic diagram of the principle of the OPC access submodule of the communication module of the CMP integrated control system according to an embodiment of the present invention; and

Fig. 4 is a working flow chart of the TCP/IP access sub-module of the communication module of the CMP integrated control system according to an embodiment of the present invention.

detailed description

Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and should not be understood as indicating or implying relative importance.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

The communication module of the CMP integrated control system according to the embodiment of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a functional block diagram of a CMP integrated control system according to an embodiment of the present invention. As shown in FIG. 1 , a CMP integrated control system 100 according to an embodiment of the present invention includes: a lower unit 110 , a main industrial computer 130 and a secondary industrial computer 140 .

Among them, the lower unit 110 is respectively connected to a plurality of process units in one-to-one correspondence, and is used to control the operation of the plurality of process units, and monitor the operation status and process parameters of the plurality of process units. The secondary industrial computer 140 is connected with the unit to be integrated, and is used to control the operation of the unit to be integrated, and monitor the operation status and process parameters of the unit to be integrated;

The communication module 120 of the CMP integrated control system of the embodiment of the present invention is used to realize the communication between the main industrial computer 130 and the lower unit 110 and the secondary industrial computer 140, wherein the communication module 120 further includes OPC access sub-module and TCP/IP Access submodules.

The main industrial computer 130 obtains the status information and process parameters of multiple process units from the lower unit 110 through the OPC access sub-module, and sends control instructions, process formulas and process parameters to control the operation of multiple process units to the lower unit 110, and communicates with the host unit 110 through TCP. The /IP access sub-module sends control instructions to the secondary industrial computer 140 so that the secondary industrial computer 140 controls the integrated units connected to it to perform corresponding actions, and receives feedback information from the secondary industrial computer 140 .

As a specific example, as shown in FIG. 1 and FIG. 2 , the above-mentioned lower unit 110 includes multiple lower units. In the example shown in FIG. 2 , the lower unit 110 includes two lower units, that is, the Programmable logic controller PLC1 and programmable logic controller PLC2. The multiple process units include but not limited to process unit 1 and process unit 2, and PLC1 is connected to process unit 1, and PLC2 is connected to process unit 2. Then PLC1 and PLC2 respectively control the operation of process unit 1 and process unit 2, and monitor their operating status and process parameters.

In other words, in FIG. 2 , the main body of the CMP integrated control system 100 of the embodiment of the present invention adopts a two-level control mode. Among them, the lower control system (that is, the lower unit 110) can choose multiple PLCs (programmable logic controllers), and each PLC directly controls the process unit (such as each polishing unit, etc.), and the upper control system (main industrial computer 130) IPC (Industrial Personal Computer) can be selected to monitor each process unit and manage the operation of the entire system through each PLC. And the physical connection between the upper control system and the lower control system is realized through industrial Ethernet. For the integrated unit, since it already has an independent controller (that is, the secondary industrial computer 140, such as IPC), the IPC of the inherited unit can be used as the secondary IPC on the basis of maintaining the existing control system structure . The physical connection between the primary industrial computer 130 and the secondary industrial computer 140 is also realized by industrial Ethernet.

In an embodiment of the present invention, the above-mentioned OPC access submodule further includes: an OPC server and an OPC client. Wherein, the OPC server is used to configure the lower unit information to realize the communication between the OPC server and the lower unit 110, and to monitor and manage the lower unit 110, wherein the lower unit information includes the name and address of each lower unit. The OPC client communicates with the OPC server, and is used to connect and disconnect the OPC server during use, and write data to the OPC server or read data from the OPC server.

Specifically, the OPC access module is the main communication means of the CMP integrated control system 100 of the embodiment of the present invention, and it mainly includes an OPC server and an OPC client. As a specific example, as shown in Figure 3, the OPC server is responsible for configuring the PLC information (mainly including the name and address of the PLC) of the lower control system to realize the connection with the lower control system. The main functions of the OPC client include: connecting and disconnecting the OPC server and reading and writing each OPC data item. Among them, the lower control system establishes multiple storage areas (DB) to temporarily store all data (including state variables and process parameters, etc.). In the actual production process, the OPC client completes the read and write operations of data in the storage areas of the lower layer by actively accessing the OPC server. The upper control system can use the OPC access module to read and display the state variables and process parameters of each unit module in real time, download process recipes, and send various control instructions, etc., and then realize the unified management of the entire CMP integrated control system.

Further, in another example, the OPC client accesses the OPC server through an OPC custom interface. More specifically, the OPC client creates an OPC server object and an OPC group object, and adds OPC item objects accordingly, and according to each OPC item object, the OPC client obtains the value of a specified variable from the OPC server. In addition, the OPC client is also used to remove the OPC item object and OPC group object when exiting, and delete the OPC server object to release system resources to disconnect the connection with the OPC server object.

In other words, OPC technology is based on Microsoft's DNA architecture and COM technology, designed according to easy scalability. The OPC specification describes the COM object and its interface that the OPC server needs to implement. The client program communicates with the OPC server through the interface, and indirectly realizes the access to field data. Currently, OPC has two sets of interfaces: OPC custom interface and OPC automation interface. The self-defined interface has high efficiency, and through this interface, the client can exert the best performance of the OPC server, and is suitable for clients using the C++ language (the embodiment of the present invention preferably adopts the C++ programming language). Therefore, the embodiment of the present invention preferably adopts the OPC custom interface.

In addition, from a high-level point of view, an OPC server consists of three objects: server objects, group objects, and item objects (see Figure 3).

Among them, the OPC server object is the main object of the OPC server program. First create this object in the OPC client of the OPC access module, then use the OPC server object to create an OPC group, and pass the pointer of the group object to the OPC client, and the OPC client directly operates the group object. Further, the OPC client adds the data items to be accessed into the same group as OPC items. Among them, the OPC client performs data access to the OPC server in units of groups, that is, the client program performs unified read and write operations on the OPC items in the group, which improves the efficiency of data communication. An OPC item represents a connection to data in an OPC server. It should be pointed out that the OPC item is not the actual data source, but only represents the connection with the data source. Therefore, when adding OPC items in the OPC group, strictly define the address of each item to ensure the correctness of data reading.

In another embodiment of the present invention, the OPC client writes data to the OPC server in a synchronous or asynchronous manner, or the OPC client reads data from the OPC server through subscription. Among them, the OPC client writes data to the OPC server in a synchronous or asynchronous manner, specifically including: the OPC client writes bool data, float data or int data Write mode to write data to the OPC server.

In other words, the interaction between the OPC client and the OPC server includes two aspects: one is for the OPC client to write data from the OPC server, and the other is for the OPC client to read data from the OPC server. In the OPC specification, there are three ways to read data between OPC server and OPC client: synchronous, asynchronous and subscription. In the embodiment of the present invention, the OPC client uses synchronous writing or asynchronous writing to write data to the OPC server. For data reading, the subscription method is adopted uniformly.

In a specific example, according to different data types, the embodiments of the present invention can implement synchronous (or asynchronous) writing methods of various data types, so that the data access method is clearer and easier to check during the program development process. The system of the embodiment of the present invention mainly realizes three synchronous (or asynchronous) writing modes, including bool type data writing method SyncWriteBool (intItemNo, boolItemValue)/AsyncWriteBool (intItemNo, boolItemValue), float type data writing method SyncWriteReal (intItemNo, doubleItemValue) )/AsyncWriteReal(intItemNo, doubleItemValue) and int type data writing method SyncWriteInt(intItemNo, intItemValue)/AsyncWriteInt(intItemNo, intItemValue). Among them, the first formal parameter indicates which item in the group the assigned object is, and the second formal parameter indicates the value to be assigned. For array variables, that is, continuous address variables of the same type, the write function can be realized by SyncWrite(intItemNo, void*ItemValue, typeValueType, intValueNo)/AsyncWrite(intItemNo, void*ItemValue, typeValueType, intValueNo), where the formal parameter ItemNo represents the first item in the group Several items, ItemValue represents the value to be assigned, ValueType represents the data type, and ValueNo represents the number of variables.

Taking the synchronous write method as an example, in the function body, the access methods are first divided according to the data type, and then the attribute values (including data type and value, etc.) are sequentially set according to the content of the formal parameters. If you use the synchronous method, you need to call the function Write of IOPCSyncIO. If asynchronous mode is used, the function Write of IOPCAsyncIO2 needs to be called. Here is the main code example of the synchronous write method:

voidOpcClient::SyncWrite(intItemNo, void*ItemValue, typeValueType, intValueNo)

For the read operation, define class COPCDataCallback (inherit class CComObjectRoot and class IOPCDataCallback), and read all variables in its member function OnDataChange. OnDataChange is used to process the notification of the OPC group object, which is automatically carried out by the OPC server when the data changes. In the implementation of the subscription data access method, the reading method is first subdivided according to the data type of each OPC item, and then the value of each item is assigned to the specified variable in turn. Since the embodiment of the present invention adopts a subscription-type data reading method to uniformly read all parameter variables of the system, the specially defined class OpcPublic is responsible for temporarily storing various process variables. The member variable of this class finds its corresponding item through the number of the OPC item, so as to realize the reading of data. In the project, other classes can call the class OpcPublic, and read each member variable in the class, and then process the required data accordingly. Since each member variable of the class OpcPublic is constantly updated, it ensures that the data required by the main program is always up-to-date.

More specifically, for the writing operation of important data (such as process parameters and system configuration information) in the CMP integrated control system of the embodiment of the present invention, the system adopts a synchronous OPC data writing method to ensure that each parameter is set correctly, will not be missed. For the writing operation of general variables, the system properly selects the asynchronous OPC data writing method to reduce the consumption of CPU and network resources and ensure the real-time performance of the system. Compared with the synchronous and asynchronous methods, the subscription data collection method can effectively reduce the number of times OPC clients access the server, minimize the consumption of CPU and network resources, and can execute a large amount of data at the same time, and avoid The situation of network congestion.

In a specific example, both the OPC access sub-module and the TCP/IP access sub-module in the communication module 120 run in the upper control system. And the interaction process between the OPC server and the OPC client of the OPC access sub-module is mainly divided into the following steps:

1) Create and connect to the server object.

Specifically, initialize the COM library, and use the CLSIDFromProgID function to obtain the CLSID. Based on the obtained CLSID, the OPC client creates an OPCServer object and obtains a pointer variable IOPCServer pointing to the server object.

2) Add groups and items.

As the main interface of the OPC server, the IOPCServer interface is responsible for creating OPC groups and returning other interface pointers to ensure that the OPC client can call the interface functions of the OPC server. The OPC client can call the IOPCItemMgt interface through the created OPC group object to add a certain number of OPC item objects.

3) Data read and write operations.

The OPC client synchronously or asynchronously writes the value of each Item object in the OPCGroup by calling the member function Write of IOPCSyncIO or IOPCAsyncIO2. For data reading, the OPC client uniformly adopts the subscription data collection method.

4) Disconnect from the server.

The OPC client releases all interface pointers and deletes OPC items, OPC groups and OPC server objects in turn when exiting.

In a specific example, as shown in FIG. 2 , the unit to be integrated is controlled by an independent secondary industrial computer 140 (IPC), and has an independent local control system. Based on the physical connection of industrial Ethernet, the upper-layer control system (ie, the main industrial computer 130) and the integrated unit control system (ie, the secondary industrial computer 140) realize mutual communication through the TCP/IP access sub-module and TCP/IP communication. communication. More specifically, in one embodiment of the present invention, the TCP/IP access submodule adopts a connection-oriented communication method.

In other words, TCP/IP is currently the most widely used communication protocol, and is widely used in various PC networks. The TCP/IP protocol implements two communication methods: a connectionless communication protocol (UDP) and a connection-oriented communication protocol (TCP). For the connectionless communication protocol, UDP occupies less resources, but the communication does not require the receiver to confirm, which is an unreliable transmission, and packet loss may occur. Before data exchange in TCP mode, a path must be established with the communication party, which not only determines the route between the communication parties, but also ensures that the communication parties are active and can respond to each other, and the delivered data is correct. In order to ensure the accuracy of communication, the embodiment of the present invention preferably adopts a connection-oriented communication manner.

Specifically, in one embodiment of the present invention, the main industrial computer 130 sends control instructions to the secondary industrial computer 140 through the TCP/IP access sub-module so that the secondary industrial computer 140 controls the integrated unit connected to it to perform corresponding actions , and give feedback to the main industrial computer 130, and the main industrial computer 130 judges whether the communication with the secondary industrial computer 140 is normal according to the feedback. And in another embodiment of the present invention, the main industrial computer 130 is also used to determine that the communication with the secondary industrial computer 140 fails when the feedback from the secondary main industrial computer 140 is not received within a preset time, and an alarm pops up Information window to prompt the craftsman. Wherein, the above-mentioned control instructions include: connection establishment or disconnection instructions, process recipe selection and reading instructions, loading preparation and unloading completion instructions, and reading all state parameter instructions. The preset time is preset according to specific needs.

As a specific example, the TCP/IP access sub-module uses the upper control system (main industrial computer 130 ) and the integrated unit control system (secondary industrial computer 140 ) as communication parties. The upper control system uses the IP address and port number entered by the craftsman on the main operation interface (the IP address and port number address are defined in advance) to initiate communication and find the control system of the integrated unit. After the other party responds normally, a stable communication connection between the two parties. Afterwards, based on the pre-defined instructions of both parties, the upper control system sends out the specified data packets according to the operation requirements of the craftsmen, and the integrated unit control system immediately analyzes the instructions in each received data packet (for parameter setting , should be assigned to the variable specified by the integrated unit control system; for each instruction, the corresponding interface function provided by the integrated device control system can be called in the slot function of the program), and then execute the corresponding action or return the required parameter value, The specific process is shown in Figure 4. That is, the above process includes the following steps:

Step S401: The upper layer control system initiates a communication request to the integrated unit control system by using the preset IP address and port number.

Step S402: The control system of the integrated unit makes a normal response according to the communication request and then establishes a communication connection with the upper control system.

Step S403: The upper-level control system sends out a specified data packet according to the operation of the craftsman.

Step S404: The integrated unit control system receives the data packet, parses it and obtains corresponding control instructions, and controls the integrated unit to perform corresponding actions or return specified parameters, so as to feed back to the upper control system.

Furthermore, since each parameter that the upper-level control system needs to read contains multiple data types, a structure variable can be defined, and all parameters that need to be fed back to the upper-level control system are included in this structure variable. Select the variables in the structure and perform subsequent processing on them. Through this idea, the embodiment of the present invention unifies the data reading method and facilitates the development of the program. In addition, for each instruction, the control system of the integrated unit should give a corresponding response to ensure that the control system receives it correctly. If the upper-level control system does not receive any response within the specified time (preset time), it will be determined that the communication has failed, and the corresponding alarm information will be displayed on the control system software interface to inform the craftsman in time. According to the needs of this CMP integrated control system, the sent data packets mainly include the following instructions: 1) Establish or disconnect the connection; 2) Selection and reading of the process formula; 3) Preparation for loading and completion of unloading, etc. Action; 4) Read all state parameters.

The CMP integrated control system according to the embodiment of the present invention has the following advantages:

The advantages of the present invention are:

(1) High efficiency, good real-time performance, and low consumption of network resources.

(2) It is easy to maintain. When the lower control system (lower unit and secondary industrial computer) needs maintenance or hardware devices need to be replaced, if the address and original function of each variable in the lower layer remain unchanged, it will not affect the upper control system ( The normal use of the main industrial computer).

(3) Good scalability. If the system needs to expand a new unit module, it only needs to select an appropriate communication method according to the needs of the new unit module. The communication module can complete the corresponding configuration and add variables without changing the original unit module. There is a system.

(4) Safe, stable and reliable. This system uses OCP technology and TCP/IP communication protocol to realize the communication between the main industrial computer, the lower unit and the secondary industrial computer, and sends an alarm to remind the craftsmen when the communication is abnormal. Therefore, This system provides a good guarantee for normal data interaction.

In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or characteristic is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications, substitutions and modifications can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the invention is defined by the claims and their equivalents.

Claims (9)

1. the communication module of a CMP integrated control system, for realizing main industrial computer and the communication between the next unit and secondary industrial computer, it is characterized in that, comprise: OPC accesses submodule and TCP/IP accesses submodule, and described OPC accesses submodule and TCP/IP accesses submodule concurrent working, wherein

Described CMP integrated control system comprises: the next unit, secondary industrial computer and main industrial computer;

Described slave computer group is connected with multiple technique unit one_to_one corresponding respectively, for controlling the operation of described multiple technique unit, and monitors running status and the procedure parameter of described multiple technique unit;

Described secondary industrial computer is connected with by integrated unit, described by the operation of integrated unit for controlling, and monitors described by the running status of integrated unit and procedure parameter;

Described main industrial computer obtains status information and the procedure parameter of described multiple technique unit from described the next unit by described OPC access submodule, and the steering order controlling described multiple technique unit and run is sent to described the next unit, technical recipe and technological parameter, and access submodule to described secondary industrial computer sending controling instruction so that described secondary industrial computer controls to be performed corresponding action by integrated unit by described TCP/IP, and receive the feedback of described secondary industrial computer, wherein, the steering order that described main industrial computer is sent to described secondary industrial computer by described TCP/IP access submodule comprises: set up or disconnect instruction, the selection of technical recipe and reading command, load prepares and unloading piece END instruction and whole state parameter reading command, described TCP/IP accesses submodule sends each instruction packet by the interface function that described secondary industrial computer provides.

2. communication module according to claim 1, is characterized in that, described OPC accesses submodule and comprises further:

Opc server, described opc server is for configuring described the next unit information to realize the communication of described opc server and described the next unit, and wherein, described the next unit packets of information draws together title and the address of each slave computer;

OPC client, described OPC client is used for and described opc server communication, is responsible for connecting and disconnecting described opc server, and writes data or from described opc server read data to described opc server.

3. communication module according to claim 2, is characterized in that, described OPC client accesses described opc server by realizing OPC self defined interface.

4. communication module according to claim 3, it is characterized in that, described OPC client also for creating described target opc server and OPC group objects, and adds OPC item object according to this, according to described OPC item object, described OPC client obtains the value of named variable by described opc server.

5. communication module according to claim 4, it is characterized in that, described OPC client also for removing described OPC item object and described OPC group objects when exiting, and deletes described target opc server, free system resources, to disconnect the connection between described target opc server.

6. the communication module according to any one of claim 2-5, is characterized in that, described OPC client carries out writing data to described opc server in synchronous or asynchronous mode, and the mode that described OPC client is passed through to subscribe to is from described opc server read data.

7. communication module according to claim 6, it is characterized in that, described OPC client carries out writing data to described opc server in synchronous or asynchronous mode, specifically comprises: described OPC client carries out synchronous or asynchronous write data by Boolean type data WriteMode, real-coded GA WriteMode or integer data WriteMode to described opc server.

8. communication module according to claim 1, it is characterized in that, described TCP/IP accesses submodule and adopts TCP/IP communication modes, using described main industrial computer and secondary industrial computer as communication two party, described main industrial computer accesses described secondary industrial computer according to predetermined IP address and port numbers, and when if described main industrial computer does not receive the feedback of described secondary industrial computer in Preset Time, judge the Communications failure with described secondary industrial computer, and eject warning information window to point out technologist.

9. the communication module according to claim 1 or 8, is characterized in that, described TCP/IP accesses submodule and adopts connection-oriented communication modes.